CN110668448A - Single-side lateral horizontal collecting device of solid pure object electric heating equipment - Google Patents
Single-side lateral horizontal collecting device of solid pure object electric heating equipment Download PDFInfo
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- CN110668448A CN110668448A CN201811518564.9A CN201811518564A CN110668448A CN 110668448 A CN110668448 A CN 110668448A CN 201811518564 A CN201811518564 A CN 201811518564A CN 110668448 A CN110668448 A CN 110668448A
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
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- C01B33/037—Purification
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- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
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Abstract
The single-side horizontal collecting device of the solid pure object electric heating equipment is a horizontal electric heating side collecting system and comprises horizontal electric heating equipment, horizontal collecting devices and a moving device, wherein a port on one side of the horizontal electric heating equipment is an opening, each opening end is connected with a movable horizontal collecting device, the horizontal collecting devices are laterally connected with the horizontal electric heating equipment together, and the horizontal collecting devices are installed on the moving device and are connected with or separated from the horizontal electric heating equipment through movement. According to the invention, the horizontal electric heating equipment is adopted to collect the solid purified material from the side surface, so that the crucible in the electromagnetic oven can be conveniently fed out, the operation is convenient, the lateral movement of the sublimed material monomer can be effectively utilized to realize the partition treatment of sublimation and condensation collection, the purity of the solid purified material can be greatly improved by utilizing the condensation after sublimation, and the high-purity and high-efficiency recovery of the solid purified material is realized.
Description
Technical Field
The invention relates to a material smelting and collecting method, in particular to a horizontal collecting device for purifying or refining various solid purified materials (such as silicon, magnesium, vanadium and the like), which can effectively improve the collecting efficiency and degree of the solid purified materials; belongs to the technical field of collection of solid pure smelting.
Background art:
the production of simple substance silicon in China has been well established, with the tightening of national energy policy and the development of energy conservation and emission reduction and the advocation of new energy, the smelting of simple substance silicon has become a primary product and process, a series of circulating industrial chains of simple substance silicon, polycrystalline silicon, monocrystalline silicon, solar cells and the like are built in a plurality of domestic emerging energy enterprises, and the development of the whole energy field in China and the application of new energy are influenced in the coming years.
The existing elemental silicon smelting process and flow are processed by a vertical elemental silicon smelting furnace, namely an elemental silicon intermediate frequency smelting furnace, a high-purity graphite crucible is vertically placed into the elemental silicon intermediate frequency smelting furnace, the high-purity graphite crucible is inductively heated to 1650-1750 ℃ by using a magnetic field, and the high-purity graphite crucible is used as a heating body to heat and melt the elemental silicon to smelt the elemental silicon. However, the existing elemental silicon smelting furnace is generally vertical, and the vertical elemental silicon smelting furnace is adopted to collect elemental silicon and needs to be put in and taken out from the top of the furnace, so that the defects of low efficiency, complex operation and the like exist, and the research on the defects is very necessary.
Patent documents in which the same technology as that of the present invention is not found through patent search are reported, and the following patents which have a certain relationship with the present invention are mainly included:
1. the patent number is CN201810323986.4, named as 'a method for producing nanometer submicron spherical silicon powder', and the applicant is: the invention discloses a production method of nanometer submicron silicon powder, which is an invention patent of Tianshuiji chemical industry limited company. The nano spherical silicon is largely used for the silicon-carbon cathode material of the high-energy density lithium ion battery, the energy ratio of the lithium ion battery is improved, and a novel high-temperature gasification physical production method is provided for solving the problems of low unit production efficiency, high cost and low quality of the existing nano silicon powder production method, in particular to the problem of nano-crystallization of the silicon material in the silicon-carbon cathode material of the high-energy density lithium ion battery. The method selects polysilicon, monocrystalline silicon or metal silicon powder as raw materials, and obtains nano-scale or submicron-scale spherical silicon powder through electric heating-laser composite heating, high-temperature gasification, high-temperature growth of silicon vapor, cooling and collection. The process can produce high-purity and high-quality nano silicon powder with the particle size of nano grade (5 nm-100 nm) and submicron grade (0.1 μm-1.0 μm), and the particle size can be accurately controlled.
2. Patent No. CN200710196562 entitled "vacuum purification furnace and purification method especially for silicon metal/silicon dioxide", applicant: the invention patent of the crystal Zhan (Nanchang) science and technology Co., Ltd discloses a vacuum purification furnace for metallic silicon/silica, comprising a crucible for containing the metallic silicon/silica and having an outer wall, and a heating system for heating the crucible and comprising at least a temperature control system for controlling the temperature of the crucible, the vacuum purification furnace being capable of being evacuated and filled with an inert gas or oxygen, characterized in that the temperature control system comprises a plurality of heating elements arranged on at least a part of the outer wall and a computer system connected to the plurality of heating elements, the plurality of heating elements being divided into a plurality of groups in one direction of the crucible, the computer system controlling each group of heating elements in the following manner, for the first group of heating members located foremost in the direction and the first region of the melt in the crucible corresponding to the first group of heating members, the first group of heating members continue to heat the peripheral portion of the first region during the cooling solidification of the first region. This patent also relates to a method for purifying silicon metal/silica using the vacuum purification furnace described above.
3. The patent number is CN201621413960.1, entitled "improved intermediate frequency induction heating equipment", and the applicant is: the invention patent of Shanghai fir technology Limited company discloses improved medium-frequency induction heating equipment, which is characterized in that the included angle between the central axis of a vacuum furnace shell and the installation ground of the vacuum furnace shell is 1-10 degrees; at least the opening end side of the graphite crucible positioned at the lower part of the central axis of the graphite crucible is provided with a graphite baffle; the end face of the opening end of the graphite crucible is covered with a collector, the collector is in a circular truncated cone shape, and the diameter of the opening end of the collector at the joint of the collector and the graphite crucible is larger than that of the tail end of the collector.
4. The patent number is CN201620391918.8, and the name is 'a device for preparing high-purity nano molybdenum trioxide', the applicant is: the patent of invention of Australia nanometer material technology Limited company in Hubei discloses a device for preparing high-purity nanometer molybdenum trioxide, which comprises a feeding port, wherein the bottom of the feeding port is communicated with a feeding packing auger, an outlet of the feeding packing auger extends into a sublimation furnace, a discharge port is arranged at the bottom of the sublimation furnace, the upper side of the sublimation furnace is communicated with a molybdenum trioxide steam channel, a dispersing agent nozzle is arranged on the molybdenum trioxide steam channel, an outlet of the molybdenum trioxide steam channel is communicated with a recoverer, and a finished product collecting barrel is arranged at the bottom of the recoverer, and the device is characterized in that: the furnace wall of the sublimation furnace is sequentially provided with a silicon nitride liner layer, a graphite cushion layer and a high-temperature heat preservation layer, and the outer wall of the high-temperature heat preservation layer is provided with a medium-frequency induction heating copper pipe.
Although the above patents have been carefully analyzed and referred to the collection and processing method or apparatus of silicon or other pure substances, some improved technical solutions have been proposed, through careful analysis, the proposed patents still adopt a vertical method, even though a horizontal collection apparatus like lateral silica is proposed in patent No. CN201621413960.1, named "an improved medium frequency induction heating apparatus", but also a fixed system apparatus inclined upwards, so that there is still a need for further research on how to simplify the purification and collection method of solid pure substances.
Disclosure of Invention
The invention aims to provide a horizontal collecting device and a horizontal collecting device for silicon single substances and other monomer substances, which are simpler and more efficient in operation, aiming at the defects that the existing single substance silicon and other solid-state purified substances are collected by a vertical electromagnetic heating furnace, so that the operation is inconvenient and the operation efficiency is low.
In order to achieve the purpose, the invention provides a single-side horizontal collecting device of solid pure object electric heating equipment, which is a horizontal electric heating side collecting system and comprises horizontal electric heating equipment, a horizontal collecting device and a moving device, wherein a port on one side of the horizontal electric heating equipment is an opening, the opening end is connected with the movable horizontal collecting device, the horizontal collecting device is laterally connected with the horizontal electric heating equipment, and the horizontal collecting device is arranged on the moving device and is connected with or separated from the horizontal electric heating equipment through moving.
Furthermore, the horizontal electric heating equipment is a horizontal medium-frequency or high-frequency electromagnetic heating furnace, an insulating layer is arranged in the electromagnetic heating furnace, a crucible is arranged in the insulating layer, and solid pure raw materials to be collected are placed in the crucible; is a horizontal medium-frequency or high-frequency electromagnetic heating furnace with a single-side opening.
Furthermore, the horizontal electric heating device is a horizontal resistance heating furnace, a crucible is arranged in the horizontal resistance heating furnace, and solid pure material to be collected is placed in the crucible.
Furthermore, a vacuum system is arranged beside the horizontal electric heating equipment, the vacuum system keeps the horizontal electric heating equipment in a vacuum environment for working, and the vacuum system is connected with the horizontal electric heating equipment through a pipeline.
Further, the horizontal collecting device comprises a collecting cover, the collecting cover is arranged in a movable collecting cover shell, and the collecting cover is close to or away from the side port of the horizontal electric heating equipment through the movement of the collecting cover shell.
Further, the collection cover is close to or away from the side port of the horizontal electric heating equipment through the movement of the collection cover shell, the collection cover is separated from the side port of the horizontal electric heating equipment before the materials are collected, so that an operator can put the materials into the crucible of the electric heating equipment or take the crucible out of the horizontal electric heating equipment to pour the residues in the crucible; when the materials are filled in the crucible for collection, the collection cover is close to the side port of the horizontal electric heating equipment by moving the collection cover through the collection cover shell and covers the side port of the horizontal electric heating equipment, so that the gasified and sublimated solid-state purified materials in the graphite crucible are led into the inlet of the horizontal collection device from the side surface of the end part of the cavity of the electric heating equipment, and the sublimated solid-state purified materials are condensed to be changed into solid materials at the inlet and fall into the horizontal collection device, and the purpose of collecting the solid-state purified materials is achieved.
Furthermore, after the collecting cover is moved to be close to the port of the horizontal electric heating equipment to reach the determined position through the collecting cover shell, the opening of the collecting cover shell is butted with the crucible port of the horizontal electric heating equipment and sleeved outside the port of the crucible of the electric heating equipment, so that the sublimed solid purified substances in the electric heating equipment flow into the collecting cover.
Further, the collecting cover is single and is butted with one side of the crucible of the horizontal electric heating device to form a single-side collecting system.
Furthermore, the opening end of the horizontal electric heating equipment is provided with a condensing device, so that the solid-state purified gas is rapidly changed into a solid again when flowing to the horizontal collecting device with low temperature, the condensing device is arranged on a crucible port in the cavity of the electric heating equipment, and the sublimed solid-state purified gas is rapidly condensed into a solid under the condensation action of condensation when being condensed and falls into the horizontal collecting device.
Further, the movement of the collecting cover is realized by the movement of a collecting cover shell arranged outside; the collecting cover is arranged in the collecting cover shell, the collecting cover shell is arranged on a movable frame, and the movable frame is placed on the movable track; in the collecting process, the collecting cover shell is matched with a port of an electric heating equipment cavity of the horizontal electric heating equipment to form a closed cavity, a sublimed solid purified substance is cooled to form solid powder when passing through a condensation zone, and after the collecting is finished, the collecting cover shell is moved to open the port of the electric heating equipment cavity of the horizontal electric heating equipment to form an opening, so that an operator can take out or put in the crucible of the horizontal electric heating equipment conveniently.
The invention has the advantages that:
the invention adopts horizontal electric heating equipment to collect solid purified substances from the side surface. Has the following advantages:
1. the horizontal side collection is adopted, so that the crucible in the electromagnetic oven can be conveniently fed and discharged, and the operation is convenient;
2. monomer substances are collected from the side surface, and the sectional treatment of sublimation and condensation collection can be realized by effectively utilizing the lateral movement of the monomer of the sublimation substances; achieve the purpose of high-efficiency collection
3. The solid-state purified object is collected through the side direction, the purity of the solid-state purified object can be greatly improved by utilizing condensation after sublimation, and the recovery of the high-purity solid-state purified object is realized.
Drawings
FIG. 1 is a schematic diagram of the general structure of one embodiment of the present invention;
fig. 2 is a schematic top view of the structure of fig. 1.
Detailed Description
The invention is further illustrated with reference to the following figures and specific examples.
Example one
As can be seen from the attached drawings 1 and 2, the invention relates to a single-side horizontal collecting device of solid-state pure object electric heating equipment, which is a horizontal electric heating side collecting system and comprises horizontal electric heating equipment 1, a horizontal collecting device 2 and a moving device 3, wherein one end of the side surface of the horizontal electric heating equipment 1 is open, the movable horizontal collecting device 2 is connected to the open end, the horizontal collecting device 2 is laterally connected with the horizontal electric heating equipment 1, the horizontal collecting device 2 is arranged on the moving device 3, and the horizontal electric heating equipment 1 is connected or separated through moving.
Furthermore, the horizontal electric heating equipment 1 is a horizontal medium-frequency or high-frequency electromagnetic heating furnace, a heat insulation layer 4 is arranged in the electromagnetic heating furnace, a crucible 5 is arranged in the heat insulation layer 4, and solid pure raw materials to be collected are placed in the crucible 5; is a horizontal medium-frequency or high-frequency electromagnetic heating furnace with a single-side opening.
Further, a vacuum system 6 is arranged beside the horizontal electric heating device 1, the vacuum system 6 keeps the horizontal electric heating device in a vacuum environment for working, and the vacuum system 6 is connected with the horizontal electric heating device 1 through a pipeline 7.
Further, the horizontal collecting device 2 comprises a collecting cover 8, the collecting cover 8 is arranged in a movable collecting cover shell 9, and the collecting cover 8 is close to or away from the side port of the horizontal electric heating device through the movement of the collecting cover shell 9.
Further, the collection cover 8 is close to or away from the side port 10 of the horizontal electric heating device 1 through the movement of the collection cover shell 9, the collection cover 8 is separated from the side port of the horizontal electric heating device 1 before the materials are collected, so that an operator can put the materials into the crucible 5 of the electric heating device 1 or take the crucible 5 out of the horizontal electric heating device 1 to pour the residues in the crucible; when the materials are contained in the crucible 5 for collection, the collection cover 8 is required to move through the collection cover shell 9, so that the collection is carried out, the collection cover 8 is close to the side port of the horizontal electric heating equipment 1 and covers the side port of the horizontal electric heating equipment 1, so that the gasified and sublimated solid purified materials in the graphite crucible are led into the inlet of the horizontal collection device 2 from the side surface of the end part of the cavity of the electric heating equipment 1, and the sublimated solid purified materials are enabled to be changed into solid again through condensation at the inlet and fall into the collection cover 8 of the horizontal collection device 2, and the purpose of collecting the solid purified materials is achieved.
Further, after the collecting hood 8 is moved to a position close to the port of the horizontal electric heating device 1 to reach a determined position through the movement of the collecting hood housing 9, the opening of the collecting hood housing 9 is butted with the port of the crucible 5 of the horizontal electric heating device 1 and sleeved outside the port of the crucible 5 in the electric heating device 1, so that the sublimated solid-state purified matter in the electric heating device 1 flows into the collecting hood 8.
Further, the collecting cover 8 is single and is butted with the single side of the crucible 5 of the horizontal electric heating device 1 to form a single-side collecting system.
Further, the movement of the collecting cover 8 is realized by the movement of a collecting cover shell 9 arranged outside; the collecting cover 8 is arranged in a collecting cover shell 9, the collecting cover shell 9 is arranged on a movable frame 11, and the movable frame 11 is placed on a movable track 12; in the collecting process, the collecting cover shell 9 is matched with a side port 10 of the electric heating equipment cavity of the horizontal electric heating equipment 1, the collecting cover shell and the electric heating equipment cavity are tightly connected together to form a closed cavity, solid powder is formed when sublimed solid purified substances are cooled through a condensation zone, and after the collecting is finished, the collecting cover shell 9 is collected and moved away, so that the port of the electric heating equipment cavity of the horizontal electric heating equipment is opened, and an operator can take out or put in the crucible of the horizontal electric heating equipment conveniently.
Example two
The principle of the second embodiment is the same as that of the first embodiment, except that the adopted structure is different, as shown in fig. 1 and 2, the second embodiment is a single-side horizontal collecting device of solid-state pure object electric heating equipment, and is a horizontal electric heating side collecting system, the second embodiment comprises a horizontal electric heating equipment 1, a horizontal collecting device 2 and a moving device 3, one end of the side of the horizontal electric heating equipment 1 is open, the movable horizontal collecting device 2 is connected to the open end, the horizontal collecting device 2 is laterally connected with the horizontal electric heating equipment 1, the horizontal collecting device 2 is installed on the moving device 3, and the connection or separation with the horizontal electric heating equipment 1 is realized through movement.
The end of the horizontal electric heating equipment 1 is provided with the condensing device 13, so that the solid-state purified gas is rapidly changed into solid again when flowing to the horizontal collecting device 2 with low temperature, the condensing device 13 is arranged on a crucible port in the cavity of the electric heating equipment, and the solid-state purified gas after sublimation is rapidly condensed into solid under the condensation action of condensation when being condensed and falls into the collecting cover 8 of the horizontal collecting device 2.
The above listed embodiments are only for clear and complete description of the technical solution of the present invention with reference to the accompanying drawings; it is to be understood that the described embodiments are merely a few embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention has the advantages that:
the invention adopts horizontal electric heating equipment to collect solid purified substances from the side surface. Has the following advantages:
1. the horizontal side collection is adopted, so that the crucible in the electromagnetic oven can be conveniently fed and discharged, and the operation is convenient;
2. monomer substances are collected from the side surface, and the sectional treatment of sublimation and condensation collection can be realized by effectively utilizing the lateral movement of the monomer of the sublimation substances; achieve the purpose of high-efficiency collection
3. The solid-state purified object is collected through the side direction, the purity of the solid-state purified object can be greatly improved by utilizing condensation after sublimation, and the recovery of the high-purity solid-state purified object is realized.
Claims (10)
1. The utility model provides a horizontal collection device of solid-state pure thing electrical heating equipment unilateral side which characterized in that: the horizontal electric heating side collecting system comprises horizontal electric heating equipment, a horizontal collecting device and a moving device, wherein a port on one side of the horizontal electric heating equipment is an opening, the opening end is connected with the movable horizontal collecting device, the horizontal collecting device is laterally connected with the horizontal electric heating equipment, the horizontal collecting device is installed on the moving device, and the horizontal electric heating equipment is connected with or separated from the horizontal electric heating equipment through movement.
2. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 1, wherein: the horizontal electric heating equipment is a horizontal medium-frequency or high-frequency electromagnetic heating furnace, an insulating layer is arranged in the electromagnetic heating furnace, a crucible is arranged in the insulating layer, and solid pure raw materials to be collected are placed in the crucible; is a horizontal medium-frequency or high-frequency electromagnetic heating furnace with a single-side opening.
3. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 1, wherein: the horizontal electric heating equipment is a horizontal resistance heating furnace, a crucible is arranged in the horizontal resistance heating furnace, and solid pure raw materials to be collected are placed in the crucible.
4. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 1, wherein: and a vacuum system is arranged beside the horizontal electric heating equipment, the vacuum system keeps the horizontal electric heating equipment in a vacuum environment for working, and the vacuum system is connected with the horizontal electric heating equipment through a pipeline.
5. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 1, wherein: the horizontal collecting device comprises a collecting cover, the collecting cover is arranged in a movable collecting cover shell, and the collecting cover is close to or away from the side port of the horizontal electric heating equipment through the movement of the collecting cover shell.
6. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 5, wherein: the collecting cover is separated from the side port of the horizontal electric heating equipment before the materials are collected by the collecting cover, so that an operator can put the materials into the crucible of the electric heating equipment or take the crucible out of the horizontal electric heating equipment to pour the residues in the crucible; when the materials are filled in the crucible for collection, the collection cover is close to the side port of the horizontal electric heating equipment by moving the collection cover through the collection cover shell and covers the side port of the horizontal electric heating equipment, so that the gasified and sublimated solid-state purified materials in the graphite crucible are led into the inlet of the horizontal collection device from the side surface of the end part of the cavity of the electric heating equipment, and the sublimated solid-state purified materials are condensed to be changed into solid materials at the inlet and fall into the horizontal collection device, and the purpose of collecting the solid-state purified materials is achieved.
7. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 3, wherein: after the collecting cover moves to a position close to the port of the horizontal electric heating equipment to reach a determined position through the collecting cover shell, the opening of the collecting cover shell is butted with the crucible port of the horizontal electric heating equipment and sleeved outside the port of the crucible of the electric heating equipment, so that sublimed solid purified substances in the electric heating equipment flow into the collecting cover.
8. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 7, wherein: the collecting cover is single and is butted from one side of the crucible of the horizontal electric heating equipment to form a single-side collecting system.
9. The single-sided lateral horizontal collection device of the solid-state pure object electric heating apparatus of claim 7, wherein: the opening end of the horizontal electric heating equipment is provided with a condensing device, so that the solid-state purified gas is rapidly changed into solid again when flowing to the horizontal collecting device with low temperature, the condensing device is arranged on a crucible port in the cavity of the electric heating equipment, and the sublimed solid-state purified gas is rapidly condensed into solid under the condensation effect of condensation and falls into the horizontal collecting device when passing through the condensation.
10. The single-sided lateral horizontal collection device of a solid-state pure object electric heating apparatus of claim 8, wherein: the movement of the collecting cover is realized by the movement of a collecting cover shell arranged outside; the collecting cover is arranged in the collecting cover shell, the collecting cover shell is arranged on a movable frame, and the movable frame is placed on the movable track; in the collecting process, the collecting cover shell is matched with a port of an electric heating equipment cavity of the horizontal electric heating equipment to form a closed cavity, a sublimed solid purified substance is cooled to form solid powder when passing through a condensation zone, and after the collecting is finished, the collecting cover shell is moved to open the port of the electric heating equipment cavity of the horizontal electric heating equipment to form an opening, so that an operator can take out or put in the crucible of the horizontal electric heating equipment conveniently.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811518564.9A CN110668448A (en) | 2018-12-12 | 2018-12-12 | Single-side lateral horizontal collecting device of solid pure object electric heating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811518564.9A CN110668448A (en) | 2018-12-12 | 2018-12-12 | Single-side lateral horizontal collecting device of solid pure object electric heating equipment |
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| CN110668448A true CN110668448A (en) | 2020-01-10 |
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| CN201811518564.9A Withdrawn CN110668448A (en) | 2018-12-12 | 2018-12-12 | Single-side lateral horizontal collecting device of solid pure object electric heating equipment |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101428803A (en) * | 2008-11-10 | 2009-05-13 | 高文秀 | Method and apparatus for producing high purity polysilicon with high-purity metal silicon purification |
| KR20160037439A (en) * | 2014-09-29 | 2016-04-06 | 주식회사 엘지화학 | Apparatus and method for producing polycrystalline silicon using horizontal reactor |
| CN105858666A (en) * | 2016-03-30 | 2016-08-17 | 北京富兴凯永兴光电技术有限公司 | Horizontal vacuum furnace used for producing silicon monoxide and application method |
| CN205973814U (en) * | 2016-08-26 | 2017-02-22 | 长沙诺天电子科技有限公司 | Horizontal square high temperature graphitization stove |
| CN106608629A (en) * | 2016-12-21 | 2017-05-03 | 上海杉杉科技有限公司 | Method and device for preparing high-purity silicon monoxide by medium-frequency induction heating way |
-
2018
- 2018-12-12 CN CN201811518564.9A patent/CN110668448A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101428803A (en) * | 2008-11-10 | 2009-05-13 | 高文秀 | Method and apparatus for producing high purity polysilicon with high-purity metal silicon purification |
| KR20160037439A (en) * | 2014-09-29 | 2016-04-06 | 주식회사 엘지화학 | Apparatus and method for producing polycrystalline silicon using horizontal reactor |
| CN105858666A (en) * | 2016-03-30 | 2016-08-17 | 北京富兴凯永兴光电技术有限公司 | Horizontal vacuum furnace used for producing silicon monoxide and application method |
| CN205973814U (en) * | 2016-08-26 | 2017-02-22 | 长沙诺天电子科技有限公司 | Horizontal square high temperature graphitization stove |
| CN106608629A (en) * | 2016-12-21 | 2017-05-03 | 上海杉杉科技有限公司 | Method and device for preparing high-purity silicon monoxide by medium-frequency induction heating way |
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Application publication date: 20200110 |