CN110658199A - Inspection result presentation device, inspection result presentation method, and storage medium - Google Patents
Inspection result presentation device, inspection result presentation method, and storage medium Download PDFInfo
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- CN110658199A CN110658199A CN201910258396.2A CN201910258396A CN110658199A CN 110658199 A CN110658199 A CN 110658199A CN 201910258396 A CN201910258396 A CN 201910258396A CN 110658199 A CN110658199 A CN 110658199A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
Abstract
The invention provides an inspection result presentation device capable of realizing an environment in which one or more threshold values for defect determination can be determined more easily. The inspection result presentation device generates a graph showing the relationship between the first direction position and the feature amount of each defect and the one or more threshold values based on the inspection result information generated by the inspection result information generation processing, and presents the graph to the user. In the inspection result information generating process, a predetermined feature amount is obtained at each position of the surface to be inspected based on image data of the surface to be inspected of the object to be inspected, and the obtained feature amount at each position is compared with one or more threshold values to specify a first directional position and the feature amount of each defect existing in the surface to be inspected, thereby generating the inspection result information including the specified first directional position and the feature amount of each defect and the one or more threshold values.
Description
Technical Field
The present invention relates to an inspection result presentation device, an inspection result presentation method, an inspection result presentation program, and a storage medium for presenting an appearance inspection result of an object to be inspected to a user.
Background
In order to determine whether or not a product is normally manufactured, for example, a device (hereinafter, referred to as an appearance inspection device) is used which obtains a feature amount (usually, a luminance value) of each portion of a product surface from an imaging result obtained by imaging the product surface with a camera, and compares the obtained feature amount with a plurality of threshold values to detect a defect.
As can be seen from the above-described defect detection flow, the conventional appearance inspection apparatus obtains an erroneous inspection result when the threshold value is not an appropriate value, but the conventional appearance inspection apparatus has only a function of outputting the total number of defects or the number of defects of each size (for example, see patent document 1). Therefore, when the threshold value is not an appropriate value, the conventional appearance inspection apparatus must perform a complicated operation such as sequentially inspecting the feature values of the defects and determining an appropriate threshold value from the inspection result.
Patent document 1: japanese patent laid-open publication No. 2003-98111
Disclosure of Invention
The present invention has been made in view of the above circumstances, and an object thereof is to provide a technique that can realize an environment in which one or more threshold values for defect determination can be determined more easily.
In order to achieve the above object, an inspection result presentation device according to an embodiment of the present invention includes: an acquisition unit that acquires inspection result information generated by an inspection result information generation process in which a predetermined feature amount is obtained at each position of an inspection target surface of an inspection target object based on image data of the inspection target surface, and a first directional position and the feature amount of each defect existing in the inspection target surface are specified by comparing the obtained feature amount at each position with one or more threshold values, thereby generating the inspection result information including the specified first directional position and the feature amount of each defect and one or more threshold values; and a graph generating unit that generates a graph indicating a relationship between the first direction position and the feature amount of each defect and one or more of the threshold values based on the inspection result information acquired by the acquiring unit, and presents the graph to a user.
That is, the inspection result presentation device according to the above-described embodiment of the present invention is configured to present a graph in which the correlation between the characteristic amount of each defect and the threshold value can be understood to the user based on the display content. Therefore, according to the inspection result presentation device, the appropriate value can be adjusted by only determining whether or not each defect whose feature value is close to the threshold value is an actual defect.
The graph presented to the user by the graph generation unit may indicate the relationship between the first direction position of each defect and the feature amount, and one or more threshold values. Therefore, the graph generating unit may generate a graph showing a relationship between the first directional position of each defect and the feature amount, one or more of the threshold values, and the first directional position correlation of the feature amount of the texture region, which is a region of the test surface other than the defect, and present the graph to the user.
In order to easily determine whether or not each defect whose feature value is close to the threshold value is an actual defect, the inspection result presentation device may be configured to include "the inspection result information includes the image data, and the inspection result presentation device may further include an enlarged image presentation unit that presents an enlarged image of a defect selected by the user from the graph to the user based on the image data included in the inspection result information".
Further, the chart generating unit may have a function of generating the chart for each of the plurality of pieces of examination result information and presenting the generated plurality of charts to the user at the same time; the inspection result presentation device may further include a "histogram generation unit" that generates a frequency histogram indicating the number of defects existing in the inspection target surface for each of the feature values based on the inspection result information acquired by the acquisition unit, and presents the frequency histogram to the user.
In order to make it easy to determine whether or not each defect whose feature value is close to the threshold value is an actual defect, the inspection result presentation device may be configured to employ a configuration in which "the inspection result information includes the image data, and the inspection result presentation device further includes an enlarged image presentation unit that presents an enlarged image of a defect selected by the user from the graph to the user based on the image data included in the inspection result information".
The inspection result presentation device may be "the object to be inspected is a sheet-like member, and the image data of the surface to be inspected of the object to be inspected is data obtained by relatively moving a camera and the object to be inspected in the first direction. "is used herein.
Further, an inspection result presentation method according to an embodiment of the present invention includes: an acquisition step of acquiring inspection result information generated by an inspection result information generation process of determining a predetermined feature amount at each position of an inspection target surface of an inspection target based on image data of the inspection target surface, and comparing the determined feature amount at each position with one or more threshold values to thereby specify a first directional position and the feature amount of each defect existing in the inspection target surface and generate the inspection result information including the specified first directional position and the feature amount of each defect and one or more threshold values; and a chart generating step of generating a chart showing a relationship between the first direction position of each defect and the feature amount and the threshold value based on the inspection result information acquired in the acquiring step, and presenting the chart to a user.
Further, an inspection result presentation program according to an embodiment of the present invention causes a computer to execute: an acquisition step of acquiring inspection result information generated by an inspection result information generation process of determining a predetermined feature amount at each position of an inspection target surface of an inspection target based on image data of the inspection target surface, and comparing the determined feature amount at each position with one or more threshold values to thereby specify a first directional position and the feature amount of each defect existing in the inspection target surface and generate the inspection result information including the specified first directional position and the feature amount of each defect and the threshold values; and a graph generating step of generating a graph indicating a relationship between the first direction position and the characteristic amount of each defect and one or more threshold values based on the inspection result information acquired in the acquiring step, and presenting the graph to a user.
In addition, a computer-readable storage medium according to an embodiment of the present invention is a computer-readable storage medium storing an inspection result presentation program, the inspection result presentation program causing a computer to execute: an acquisition step of acquiring inspection result information generated by an inspection result information generation process of determining a predetermined feature amount at each position of an inspection target surface of an inspection target based on image data of the inspection target surface, and comparing the determined feature amount at each position with one or more threshold values to thereby specify a first directional position and the feature amount of each defect existing in the inspection target surface and generate the inspection result information including the specified first directional position and the feature amount of each defect and the threshold values; and a graph generating step of generating a graph indicating a relationship between the first direction position and the characteristic amount of each defect and one or more threshold values based on the inspection result information acquired in the acquiring step, and presenting the graph to a user.
Further, an inspection result presentation device according to an embodiment of the present invention includes: an inspection result information generating unit that determines a predetermined feature amount at each position of an inspection target surface of an inspection target based on image data of the inspection target surface, and compares the determined feature amount at each position with one or more threshold values to thereby specify a first directional position and the feature amount of each defect existing in the inspection target surface, and generates inspection result information including the specified first directional position and the feature amount of each defect and the threshold values; and a graph generating unit that generates a graph indicating a relationship between the first direction position and the feature amount of each defect and the threshold value based on the inspection result information generated by the inspection result information generating unit, and presents the graph to a user.
With the above-described technique, an environment in which one or more threshold values for defect determination can be determined more easily can be realized.
According to the present invention, an environment in which one or more threshold values for defect determination can be determined more easily can be realized.
Drawings
Fig. 1 is an explanatory diagram of a schematic configuration and a usage of an inspection result presentation device according to an embodiment of the present invention.
Fig. 2 is an explanatory diagram of an example of display of the inspection result of the first display processing.
Fig. 3 is an explanatory diagram of an example of display of the inspection result of the first display processing with frequency histogram.
Fig. 4 is an explanatory diagram of an example of display of the inspection result of the second display processing.
Fig. 5 is an explanatory diagram of an example of display of the inspection result of the second display processing.
Fig. 6 is an explanatory diagram of an example of display of the inspection result of the second display processing.
Fig. 7 is an explanatory diagram of an example of display of the inspection result of the second display processing with the frequency histogram.
Fig. 8 is an explanatory diagram of an enlarged display window displayed by the enlarged display processing.
Fig. 9 is an explanatory diagram of information displayed by the defect type histogram display processing.
Fig. 10 is an explanatory diagram of information displayed by each camera luminance graph display process.
Fig. 11 is an explanatory diagram of a modification of the inspection result presentation device according to the embodiment.
Wherein the reference numerals are as follows:
10 inspection result presentation device
10a computer body
10b input device
10c display
11 acquisition part
12 texture brightness information calculating part
13 instruction responding section
15. 27 storage section
20 appearance inspection device
21 light source
22 Camera
25 signal processing device
26 inspection result information generating unit
30 object to be inspected
31 conveying roller
Approximate curve of 44
453 sigma curve
GUI widget for 61 brightness chart
GUI widget for 62 frequency histogram
Detailed Description
Fig. 1 shows a schematic configuration and a usage of an inspection result presentation device 10 according to an embodiment of the present invention.
The inspection result presentation device 10 of the present embodiment is used in connection with 1 or more (1 in fig. 1) appearance inspection devices 20.
Appearance inspection device 20
The appearance inspection apparatus 20 is an apparatus for inspecting the appearance of a sheet-like object 30 to be inspected which is conveyed by a conveying means such as a conveying roller 31. As shown in the drawing, the appearance inspection apparatus 20 includes: the image processing apparatus includes a light source 21 for irradiating a predetermined region of an object 30 with light, a camera 22, and a signal processing device 25, and the camera 22 is disposed so that light irradiated from the light source 21 and reflected by an inspection surface (a surface on the camera 22 side in fig. 1) of the object 30 enters the camera 22. The camera 22 of the appearance inspection apparatus 20 according to the present embodiment is a combination of a Color Line Sensor (Color Line Sensor) and an optical system.
The appearance inspection apparatus 20 is an apparatus including an inspection result information generating unit 26 and a storage unit 27, the inspection result information generating unit 26 performs an inspection result information generating process, and the storage unit 27 stores the inspection result information generated by the inspection result information generating process until deletion is instructed. The inspection result information generating unit 26 and the storage unit 27 of the appearance inspection apparatus 20 are each realized by a unit (hardware for signal processing) including a processor (CPU, microcontroller) as a center, and a nonvolatile storage device such as a hard disk drive.
The inspection result information generation process performed by the inspection result information generation unit 26 of the appearance inspection apparatus 20 is composed of the following processes. In the following description, the positions ("positions of the surface to be inspected", "center position of each region", and the like ") are positions divided in units of resolution of the image data input from the camera 22. Before the inspection result information generation process is started, identification information (product name, lot number, etc.) of the object 30 to be inspected, which is a processing target of the inspection result information generation process, is input to the inspection result information generation unit 26.
Processing for obtaining a brightness value at each position of the surface to be inspected based on the image data of the surface to be inspected of the object 30 input from the camera 22;
on the basis of the obtained brightness values at the respective positions, a bright-side defect, which is an area having a brightness value equal to or higher than a bright-side detection threshold (described in detail later), is searched for from the surface of the object 30 to be inspected, and dark-side defect information generation processing for generating bright-side defect information including a range, a center position, and a center position brightness value is performed for each of the searched bright-side defects;
on the basis of the obtained brightness values at the respective positions, dark-side defects, which are regions having brightness values equal to or less than a dark-side detection threshold (described in detail later), are searched for from the surface of the object 30 to be inspected, and bright-side defect information generation processing for generating dark-side defect information including the range, the center position, and the center position brightness value is performed for each of the searched dark-side defects;
processing for storing (storing) in the storage unit 27 inspection result information including dark-side defect information and light-side defect information generated by each defect information generation processing and image data of the surface to be inspected of the inspection object 30 in a form associated with inspection result identification information including a light-side detection threshold and a dark-side detection threshold for generating the inspection result information, device identification information of the appearance inspection device 20, identification information of the inspection object 30, and generation date and time of the image data of the surface to be inspected.
The bright-side detection threshold and the dark-side detection threshold are values determined by the appearance inspection apparatus 20 by inspecting the appearance of some samples (hereinafter referred to as threshold determination samples) of the standard of the inspection object 30 before the appearance inspection apparatus 20 is actually operated. The appearance inspection apparatus 20 is an apparatus that starts operation in a state where the storage unit 27 stores inspection result information and inspection result identification information on each threshold determination sample. The inspection result identification information related to the threshold value determination sample includes information indicating that the self-information is related to the threshold value determination sample.
The appearance inspection apparatus 20 is also configured to be connectable to a plurality of cameras 22, and the plurality of cameras 22 are arranged in a straight line orthogonal to the conveyance direction of the test object 30. When the plurality of cameras 22 arranged in this manner are connected, the appearance inspection device 20 (inspection result information generating unit 26) stores inspection result identification information in the storage unit 27, the inspection result identification information including information indicating which part of the image data output from each camera 22 is the image data in the inspection result information.
Examination result presentation device 10
The inspection result presentation device 10 is a device obtained by installing an inspection result presentation program in a Computer (a desktop PC (Personal Computer), a notebook PC, or the like) having a Computer main body 10a, an input device 10b, and a display 10c, the inspection result presentation program being for causing the Computer to operate as a device having the configuration shown in fig. 1, that is, as a device having an acquisition unit 11, a texture brightness information calculation unit 12, an instruction response unit 13, and a storage unit 15.
The acquiring unit 11 is a unit that acquires and stores in the storage unit 15 each piece of inspection result information and inspection result identification information associated with each piece of inspection result information from each of the appearance inspection devices 20 connected to the inspection result presenting device 10.
The texture brightness information calculation unit 12 is a means for calculating texture brightness information indicating the conveyance direction position correlation of the average value and the standard deviation σ of the brightness values of the texture region based on each piece of inspection result information in the storage unit 15, and adding the texture brightness information to each piece of inspection result information in the storage unit 15. The texture region is a region of the surface to be inspected (in other words, a normal region) which is not a dark-side defect nor a light-side defect.
The texture luminance information calculation unit 12 of the present embodiment is a unit that calculates the texture luminance information by repeating a process of removing each pixel value related to a dark-side defect and a light-side defect from one line of image data in a direction perpendicular to the conveyance direction of the test object 30 included in the inspection result information and calculating the average value of the luminance values and the standard deviation σ from the remaining pixel values so that portions to be calculated, such as the average value of the luminance values, are substantially equally spaced. The texture brightness information may be information indicating the positional correlation in the conveyance direction of the brightness values of the texture region. Therefore, the texture brightness information may be information indicating the conveyance direction position correlation of the average value of the brightness values of the texture region, information indicating the conveyance direction position correlation of the standard deviation σ of the brightness values of the texture region, or information indicating the conveyance direction position correlation of the representative value (for example, the randomly selected brightness value or the mode value of the brightness values) of the brightness values of the texture region.
The instruction responding unit 13 is a unit that receives various instructions from the user by the user operating the input device 10b and performs processing corresponding to the received instructions.
The processes that can be executed by the instruction responding unit 13 include a first display process, a first display process with a frequency histogram, a second display process with a second frequency histogram, an enlarged image display process, a threshold value calculation setting process, a defect type histogram display process, and each camera luminance chart display process.
The first display processing is processing executed by the instruction responding unit 13 when the user performs an instruction operation for executing the first display processing in association with the designation of the device identification information.
The instruction responding unit 13 that has started the first display process first searches the storage unit 15 for the examination result identification information on the threshold value determination sample including the device identification information (hereinafter, referred to as "designated device identification information") designated by the user and the latest examination result identification information on the examination target sample including the designated device identification information. The sample to be tested is the object 30 to be tested, which is not a sample for determining the threshold value.
Then, the instruction responding unit 13 displays the image information shown in fig. 2 on the display 10c based on the respective pieces of inspection result information stored in the storage unit 15 in association with the respective pieces of inspection result identification information retrieved. The graphs (hereinafter, referred to as luminance graphs) shown on the left, center, and right sides of fig. 2 are graphs displayed based on the test result information of the Cut (Cut) sample test ("sample test"), the rolling sample test ("rolling (Roll) test"), and the test target sample ("operation"), respectively.
That is, the instruction responding unit 13 displays, on the display 10c, a graph having a vertical axis of luminance values and a horizontal axis of conveying direction positions (time or distance in the figure) as shown on the right side of fig. 2, on the basis of the light-side defect information, dark-side defect information, and texture luminance information included in the inspection result information, the graph showing a point 41b indicating each light-side defect, a point 41d indicating each dark-side defect, a point 43 indicating an average value of luminance values of each portion in the texture region, an approximate curve 44 approximately fitting the point 43, 2 3 σ curves 45, a line 51b indicating a light-side detection threshold, and a line 51d indicating a dark-side detection threshold.
The instruction responding unit 13 also displays the same luminance graph on the display 10c for the inspection result information of each inspection target sample.
The first display processing with frequency histogram is processing for displaying the same luminance graph as the first display processing in the display 10 c. However, as shown in fig. 3, in the first display process with the frequency histogram, the frequency histogram indicating the content of each inspection result information is also displayed on the display 10 c. In this case, as in the luminance graph, the line 52b indicating the bright-side detection threshold and the line 52d indicating the dark-side detection threshold are also shown in each of the displayed frequency histograms.
The second display processing is processing executed by the instruction responding unit 13 when the user performs an instruction operation for executing the second display processing in association with the specification of the 2 or more inspection result identification information in the storage unit 15.
In the case where 2 pieces of inspection result identification information are specified by the user, in the second display process, a luminance chart for indicating the content of the inspection result information which is associated with one piece of inspection result identification information and stored in the storage part 15, and a luminance chart for indicating the content of the inspection result information which is associated with the other piece of inspection result identification information and stored in the storage part 15 are displayed in the display 10 c. Specifically, for example, when the inspection result identification information of lot a and the inspection result identification information of lot B are specified by the user, as shown in fig. 4, in the second display process, the luminance graph relating to lot a and the luminance graph relating to lot B are displayed on the display 10 c. Further, in the case where the inspection result identification information of the product a and the inspection result identification information of the product B are specified by the user, as shown in fig. 5, in the second display process, the luminance chart related to the product a and the luminance chart related to the product B are displayed in the display 10 c.
When N (≧ 3) pieces of inspection result identification information are designated by the user, as shown in fig. 6, in the second display processing, two GUI widgets 61 for luminance charts are displayed on the display 10c, and the GUI widget 61 for luminance charts can select a luminance chart to be displayed from among the N kinds of luminance charts by a tab operation.
The second display processing with frequency histogram is processing for displaying the frequency histogram on the display 10c in the same manner as the first display processing with frequency histogram (see fig. 3). In addition, when N (≧ 3) pieces of inspection result identification information are designated by the user, as shown in fig. 7, in the second display process with frequency histogram, two frequency histogram GUI widgets 62 are displayed on the display 10c, and the frequency histogram GUI widget 62 can select a frequency histogram to be displayed from among the N kinds of frequency histograms by a tag operation.
The enlarged image display processing is processing executed by the instruction responding unit 13 when an operation for selecting one point 41(41b or 41d) on the luminance graph being displayed is performed. When performing this enlarged image display processing, the instruction responding unit 13 extracts image data of a predetermined size centered on a certain point 41 from the image data in the inspection result information that is the basis of the selection of the luminance chart of the point 41. Then, the instruction responding unit 13 displays an enlarged display window as shown in fig. 8, that is, an enlarged display window including an image 55 in which the extracted image data is enlarged and displayed and a frequency histogram of a portion in which the selected point 41 in the quality area coincides with the conveyance direction position, on the luminance graph.
When a predetermined exclusion operation is performed on the enlarged display window, the instruction responding unit 13 stores the point 41 that is enlarged and displayed as a point that should not be a defect, and deletes the enlarged display window from the display 10 c.
The threshold calculation setting process is a process of instructing the response unit 13 to start performing when a predetermined operation is performed. When performing the threshold calculation setting process, the instruction responding unit 13 first performs a recommendation threshold calculation process for calculating a recommendation threshold (recommendation values of the dark-side detection threshold and the light-side detection threshold) to be presented to the user. As the recommendation threshold value calculation processing, various processing different in specific contents may be employed. For example, the recommended threshold value calculation process may be a process of calculating the average value and the standard deviation σ of the luminance values of the texture region by regarding the portion of each point 41 stored as a point that should not be a defect as the texture region, and calculating the average value ± k · σ (k is a predetermined constant) as the recommended threshold value. The recommended threshold value calculation process may be a process of calculating, as recommended threshold values, the dark-side detection threshold value and the light-side detection threshold value that specify each point 41 that is stored as a defect and should not be a defect.
The instruction responding unit 13 after the recommended threshold calculation processing ends displays each of the calculated recommended thresholds on the luminance graph being displayed. Then, when the user performs an operation for instructing setting of each threshold, the instruction responding unit 13 sets each calculated threshold to the appearance inspection device 20, and then ends the threshold calculation setting process.
When the user performs an operation to instruct the manual setting of each threshold, the instruction responding unit 13 displays a dialog box for allowing the user to input the dark-side detection threshold and the bright-side detection threshold on the display 10 c. Then, the instruction responding unit 13 sets the dark-side detection threshold value and the bright-side detection threshold value that are input to the dialog box, to the appearance inspection apparatus 20, and then ends the threshold value calculation setting process.
As described above, the instruction responding unit 13 of the inspection result presentation device 10 has a function of presenting a graph (luminance graph, frequency graph) in which each defect whose luminance value is close to each detection threshold (dark-side detection threshold, light-side detection threshold) can be grasped to the user. Therefore, the user of the inspection result presentation apparatus 10 can determine whether or not only the defect having the luminance value close to each detection threshold is an actual defect, but also the threshold is an appropriate value by using the enlargement display processing or the like. Further, as a result, the adjustment operation for adjusting each detection threshold to an appropriate value can be easily performed with the inspection result presentation apparatus 10.
Next, several items concerning the instruction responding unit 13 are supplemented.
The instruction responding unit 13 is set to execute the defect type histogram display processing and the camera luminance chart display processing in addition to the various processing described above.
The defect type histogram display processing is the following processing executed by the instruction responding unit 13 when an execution instruction operation of the defect type histogram display processing is performed in association with the designation of the device identification information.
The instruction responding unit 13 that starts the defect type histogram display processing first retrieves inspection result identification information including device identification information specified by the user from the storage unit 15. Next, the instruction responding unit 13 specifies the number of light-side defects and the number of dark-side defects of each inspection object (lot) based on each piece of inspection result information stored in the storage unit 15 in association with each piece of inspection result identification information retrieved. Then, based on the determination result of each defect number, the instruction responding unit 13 displays, on the display 10c, the image information shown in fig. 9, that is, a histogram showing the number of bright-side defects of each inspection object in order of inspection date and time and a histogram showing the number of dark-side defects of each inspection object in order of inspection date and time.
In order to display the histogram in the defect type histogram display process at a high speed, the number of bright-side defects and the number of dark-side defects may be calculated when the inspection result information and the inspection result identification information from the appearance inspection apparatus 20 are acquired, and the calculation result and the inspection result identification information may be stored in the storage unit 15 in a corresponding relationship.
By analyzing the display information displayed on the display 10c by the defect type histogram display processing with reference to information (addition or reduction of raw materials, replacement of devices, maintenance timing of equipment, and the like) related to the manufacturing process of the test object 30, it is possible to identify a potential problem in the manufacturing process.
Each camera brightness chart display process is a process executed by the instruction responding unit 13 when an instruction operation for executing each camera brightness chart display process is performed in association with designation of the device identification information of the appearance inspection device 20 to which the plurality of cameras 22 are connected and the identification information of the inspection object 30 inspected by the appearance inspection device 20.
When performing the camera brightness chart display processing, the instruction responding unit 13 first searches the storage unit 15 for inspection result identification information including the device identification information specified by the user and the identification information of the object 30. Next, the instruction responding unit 13 generates a luminance chart (a luminance chart based on image data from "camera 1", a luminance chart based on image data from "camera 2", and the like) for each camera 22 based on the retrieved inspection result identification information and the inspection result identification information associated with the inspection result identification information and stored in the storage unit 15, and displays the luminance charts on the display 10c in the form shown in fig. 10. The camera 22 in the abnormal state can be easily specified by the camera brightness chart display processing.
Modification example
The inspection result presentation device 10 of the above-described embodiment may be variously modified. For example, the first display processing may be modified to a processing of displaying the image information shown in fig. 11. That is, the first display processing may be modified to display the luminance graphs of the respective test object samples (in the figure, batch A, B, C) as labels. The first display processing may be modified to display a list frame for selecting identification information of the object 30 and the like when a predetermined operation (for example, an operation of right clicking a luminance chart) is performed on a certain luminance chart (hereinafter, referred to as a focused luminance chart) being displayed, and to change the focused luminance chart to a luminance chart related to the inspection result of the object 30 identified by the identification information and the like selected in the list frame.
The inspection result presentation device 10 may be modified so as not to calculate information (the average value and the standard deviation σ of the luminance values of the respective portions of the texture region) necessary for displaying the luminance graph in advance. That is, the inspection result presentation device 10 may be modified to a device that calculates information necessary for displaying a certain luminance graph when the display of the luminance graph is instructed, and displays the luminance graph using the calculated information. The luminance chart displayed by the inspection result presentation device 10 may indicate the relationship between the first direction position and the luminance value of each defect and one or more threshold values used for determining whether or not the defect is present. The first directional position is a coordinate value in an orthogonal coordinate system set on the surface to be inspected of the object 30. Therefore, the luminance graph may not represent any or all of the point 43, the approximate curve 44, and the 3 σ curve 45.
In addition, in the case where the defect on the dark side or the defect on the light side is not generated at all (or almost) in the object 30 to be inspected, it is obvious that the information on the defect on the dark side or the defect on the light side can be not displayed on the luminance chart.
The inspection result presentation device 10 may be modified to a device that processes the inspection result information output by the appearance inspection device 20 based on the feature quantities (hue, color saturation, brightness, etc.) other than the brightness value, the appearance inspection device 20 being used to identify each defect present in the inspection surface of the defect inspection object 30. Further, the inspection result presentation apparatus 10 may be modified to an apparatus that can be used by a device (PC, smartphone, or the like) having a Web browsing function (that is, an apparatus that can provide a Web page for displaying various charts to a device having a Web browsing function).
The inspection result presentation apparatus 10 may be modified to be operable as the appearance inspection apparatus 20. In the case where the inspection result presentation device 10 is modified to be a device capable of operating as the appearance inspection device 20, a function of displaying a luminance graph or the like in real time (a function of receiving image data from the camera 22 of the object 30 and adding the points 41b, 41d, and 43 to the luminance graph) may be added to the inspection result presentation device 10. The above-described technique can be applied to the inspection of the non-sheet-like object 30.
Appendix
An examination result presentation device (10) is characterized by comprising:
an acquisition unit (11) that acquires inspection result information generated by an inspection result information generation process in which a predetermined feature amount is obtained at each position of an inspected surface of an inspected object (30) on the basis of image data of the inspected surface, and a first direction position and the feature amount of each defect existing on the inspected surface are specified by comparing the obtained feature amount at each position with one or more threshold values, thereby generating the inspection result information including the specified first direction position and the feature amount of each defect, and the one or more threshold values; and
graph generating units (12, 13) that generate graphs indicating the relationship between the first direction position and the feature amount of each defect and the one or more threshold values based on the inspection result information acquired by the acquiring unit (11), and present the graphs to a user.
An examination result presentation device is characterized by comprising:
an inspection result information generating unit (11, 12, 26) that determines a predetermined feature amount at each position of an inspection target surface of an inspection target object (30) based on image data of the inspection target surface, and compares the determined feature amount at each position with one or more threshold values to thereby specify a first direction position and the feature amount of each defect existing in the inspection target surface, and generates inspection result information including the specified first direction position and the feature amount of each defect and the threshold values; and
and a graph generation unit (13) that generates a graph indicating the relationship between the first direction position and the characteristic amount of each defect and the threshold value on the basis of the inspection result information generated by the inspection result information generation unit, and presents the graph to a user.
Claims (9)
1. An examination result presentation device is characterized by comprising:
an acquisition unit that acquires inspection result information generated by an inspection result information generation process in which a predetermined feature amount is obtained at each position of an inspection target surface of an inspection target object based on image data of the inspection target surface, and a first directional position and the feature amount of each defect existing in the inspection target surface are specified by comparing the obtained feature amount at each position with one or more threshold values, thereby generating the inspection result information including the specified first directional position and the feature amount of each defect and the one or more threshold values; and
and a graph generating unit that generates a graph indicating a relationship between the first direction position and the feature amount of each defect and the one or more threshold values based on the inspection result information acquired by the acquiring unit, and presents the graph to a user.
2. The inspection result presentation device according to claim 1,
the graph generating unit generates a graph showing a relationship between the first directional position of each defect and the feature amount, the one or more threshold values, and the first directional position correlation of the feature amount of the texture region, which is a region of the surface to be inspected other than the defect, and presents the graph to a user.
3. The inspection result presentation device according to claim 1,
the inspection result information includes the image data,
the inspection result presentation device further includes an enlarged image presentation unit that presents an enlarged image of a defect selected by the user from the chart to the user based on the image data included in the inspection result information.
4. The inspection result presentation device according to claim 1,
the chart generating unit has a function of generating the chart for each of the plurality of pieces of examination result information and presenting the generated plurality of charts to a user at the same time.
5. The inspection result presentation device according to claim 1,
the inspection result presentation device further includes a histogram generation unit that generates a frequency histogram indicating the number of defects present in the inspection target surface for each of the feature values based on the inspection result information acquired by the acquisition unit, and presents the frequency histogram to a user.
6. The inspection result presentation device according to any one of claims 1 to 5,
the object to be inspected is a sheet-like member,
the image data of the surface of the object to be inspected is data obtained by relatively moving a camera and the object to be inspected in the first direction.
7. An inspection result prompting method is characterized by comprising the following steps:
an acquisition step of acquiring inspection result information generated by an inspection result information generation process of determining a predetermined feature amount at each position of an inspection target surface of an inspection target based on image data of the inspection target surface, and comparing the determined feature amount at each position with one or more threshold values to thereby specify a first directional position and the feature amount of each defect existing in the inspection target surface and generate the inspection result information including the specified first directional position and the feature amount of each defect and the one or more threshold values; and
a graph generating step of generating a graph indicating a relationship between the first direction position and the characteristic amount of each defect and the threshold value based on the inspection result information acquired in the acquiring step, and presenting the graph to a user.
8. A computer-readable storage medium storing an inspection result presentation program, the inspection result presentation program causing a computer to execute:
an acquisition step of acquiring inspection result information generated by an inspection result information generation process of determining a predetermined feature amount at each position of an inspection target surface of an inspection target based on image data of the inspection target surface, and comparing the determined feature amount at each position with one or more threshold values to thereby specify a first directional position and the feature amount of each defect existing in the inspection target surface and generate the inspection result information including the specified first directional position and the feature amount of each defect and the threshold values; and
a graph generating step of generating a graph indicating a relationship between the first direction position and the feature amount of each defect and the one or more threshold values based on the inspection result information acquired in the acquiring step, and presenting the graph to a user.
9. An examination result presentation device is characterized by comprising:
an inspection result information generating unit that determines a predetermined feature amount at each position of an inspection target surface of an inspection target based on image data of the inspection target surface, and compares the determined feature amount at each position with one or more threshold values to thereby specify a first directional position and the feature amount of each defect existing in the inspection target surface, and generates inspection result information including the specified first directional position and the feature amount of each defect and the threshold values; and
and a graph generating unit that generates a graph indicating a relationship between the first direction position and the feature amount of each defect and the threshold value based on the inspection result information generated by the inspection result information generating unit, and presents the graph to a user.
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| JP2018-124963 | 2018-06-29 | ||
| JP2018124963A JP7067321B2 (en) | 2018-06-29 | 2018-06-29 | Inspection result presentation device, inspection result presentation method and inspection result presentation program |
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| CN201910258396.2A Pending CN110658199A (en) | 2018-06-29 | 2019-04-01 | Inspection result presentation device, inspection result presentation method, and storage medium |
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| Country | Link |
|---|---|
| JP (1) | JP7067321B2 (en) |
| KR (1) | KR102179948B1 (en) |
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| KR102179948B1 (en) | 2020-11-17 |
| JP7067321B2 (en) | 2022-05-16 |
| JP2020003412A (en) | 2020-01-09 |
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| TW202001233A (en) | 2020-01-01 |
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