CN110655308A - Vertical welding device and method for quartz tube - Google Patents

Vertical welding device and method for quartz tube Download PDF

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Publication number
CN110655308A
CN110655308A CN201911048718.7A CN201911048718A CN110655308A CN 110655308 A CN110655308 A CN 110655308A CN 201911048718 A CN201911048718 A CN 201911048718A CN 110655308 A CN110655308 A CN 110655308A
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welding
vertical
quartz tube
motor
rotating shaft
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CN201911048718.7A
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CN110655308B (en
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韩家贤
易明辉
周铁军
狄聚青
顾孝泞
黄幸慰
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Guangdong Vital Micro Electronics Technology Co Ltd
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Guangdong Forerunner Materials Ltd By Share Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/20Uniting glass pieces by fusing without substantial reshaping
    • C03B23/207Uniting glass rods, glass tubes, or hollow glassware
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention provides a vertical welding device and a vertical welding method for a quartz tube, and the vertical welding device comprises a controller, a base, a welding gun, a first motor and a second motor, wherein a first vertical rotating shaft is rotatably connected to a supporting rod, an end cap fixing disc is fixedly connected to the first vertical rotating shaft, the first vertical rotating shaft is detachably and fixedly connected with a rotating shaft of the first motor, a second vertical rotating shaft is rotatably connected to the base, a quartz tube supporting base is fixed at the upper end of the second vertical rotating shaft, the second vertical rotating shaft is detachably and fixedly connected with a rotating shaft of the second motor, and a central shaft of the first vertical rotating shaft, a central shaft of the second vertical rotating shaft, a central shaft of the end cap fixing disc and a central shaft of the quartz tube supporting base are positioned on a. The vertical welding device for the quartz tube realizes butt welding of the end cap with the same diameter and the quartz tube, and the end cap and the quartz tube which are cut again after use can be recycled, so that the cost is saved; the welding joint is smooth, and air leakage possibly caused by untidy welding joint is avoided.

Description

Vertical welding device and method for quartz tube
Technical Field
The invention belongs to the field of crystal growth quartz tube welding equipment, and particularly relates to a vertical welding device and method for a quartz tube.
Background
The vertical gradient temperature solidification (VGF) method and the VB method are adopted to grow bulk single crystals such as gallium arsenide and indium phosphide, a stable high vacuum environment needs to be provided for the crystal growth, and the crystal is usually sealed in a tubular quartz container. At present, a commonly used quartz container consists of a quartz tube and an end cap or a special-shaped tube, after vacuum equipment such as a molecular pump is adopted to pump air in the quartz container and achieve a vacuum environment required by crystal growth, the quartz tube and the end cap or the special-shaped tube need to be sealed in a welding mode, so that the vacuum environment in the quartz container meets the requirement of the crystal growth in the whole crystal growth period. Patent publication No. CN208136074U discloses a quartz tube flange welding device, but the welding device can only realize the welding of end caps and quartz tubes with unequal diameters, namely, the end caps are sleeved on the quartz tube openings or the end caps are plugged into the quartz tube openings, the end caps are bonded with the quartz tubes after the quartz tubes are softened and melted by using the high temperature of a welding gun, the welding mode enables the end caps and the quartz tubes to have overlapped parts at the connecting parts, after the end caps are cut from the quartz tubes after use, the outer walls or the inner walls of the end caps are provided with a circle of cut quartz tubes, namely, the overlapped parts exist during welding, the end caps cannot be reused, the length loss of the quartz tubes is large, the device cost is large in the process of growing bulk single crystals such as gallium arsenide, indium phosphide and the like, and the welding mode can cause the scraping of PBN crucibles, the welding is irregular, and the situation of inward concave is shown.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a vertical welding device and method for a quartz tube.
In order to achieve the purpose, the invention adopts the technical scheme that: a vertical welding device for a quartz tube comprises a controller, a base, a welding gun, a first motor and a second motor, the base is fixedly connected with a first lifting mechanism, a fixed beam is fixedly connected on the first lifting mechanism, the fixed beam is rotatably connected with a first vertical rotating shaft, the first vertical rotating shaft is fixedly connected with an end cap fixed disc, the first vertical rotating shaft is detachably and fixedly connected with the rotating shaft of the first motor, the base is rotatably connected with a second vertical rotating shaft, a quartz tube supporting base is fixed at the upper end of the second vertical rotating shaft, the second vertical rotating shaft is detachably and fixedly connected with a rotating shaft of the second motor, the central shaft of the first vertical rotating shaft, the central shaft of the second vertical rotating shaft, the central shaft of the end cap fixing disc and the central shaft of the quartz tube supporting base are positioned on a straight line in the same vertical direction;
the controller is electrically connected with the first motor and controls the first motor to operate, the controller is electrically connected with the second motor and controls the second motor to operate, and the controller is electrically connected with the first lifting mechanism and controls the first lifting mechanism to operate.
The central shaft of the first vertical rotating shaft, the central shaft of the second vertical rotating shaft, the central shaft of the end cap fixing disc and the central shaft of the quartz tube supporting base of the quartz tube vertical welding device are positioned on a straight line in the same vertical direction, so that the quartz tube and the end cap can be coaxially butted in the welding process, the first vertical rotating shaft and the second vertical rotating shaft are driven by a motor and are simultaneously provided with a first lifting mechanism, the quartz tube and the end cap can coaxially rotate in the same hour hand direction and different hour hand directions in the welding process and coaxially approach in the rotating process, so that the quartz tube and the end cap can be welded in the rotating and coaxially approaching processes, in the welding process, the quartz tube and the end cap can rotate in different hour hand directions when the quartz tube is softened, and the softened connecting parts can not be bonded but can be more smoothly milled with each other, then, the needle rotates in the direction to perform bonding, so that the contact part is smoother, and the phenomenon that the sealing is not tight or air leakage is possibly caused due to the untidy welding port is avoided; and because foretell vertical welding set of quartz capsule can realize that the coaxial of quartz capsule and end cap is rotatory with the same hour hand direction and the hour hand direction of difference in welding process, make in the welding process need not overlap end cap cover on the quartz capsule or pack into the quartz capsule, can realize the butt welding of the end cap and the quartz capsule of equal diameter, the overlap of end cap and quartz capsule has been avoided producing in the welding, end cap and quartz capsule all can be recycled in cutting again after the use, the loss of cutting is also few only the loss of cutting knife thickness, the reuse of end cap and quartz capsule has been realized, can be very big saving cost.
Preferably, fixedly connected with second elevating system on the base, fixedly connected with welds the stock on the second elevating system, welder has rifle mouth, barrel, handle and gas conduit, the coaxial intercommunication of rifle mouth and barrel, barrel fixed connection is on hand, the handle end is connected on welding the stock through horizontal rotating shaft, be provided with first telescopic cylinder on welding the stock, first telescopic cylinder is cylinder or pneumatic cylinder, the one end pivot of first telescopic cylinder is connected weld the stock on and the other end pivot of first telescopic cylinder is connected welder's handle middle part, second elevating system with the controller electricity is connected, the controller control second elevating system moves, first telescopic cylinder with the controller electricity is connected, the controller control first telescopic cylinder moves.
The welding gun of the vertical welding device for the quartz tube is arranged on the welding gun seat, the welding gun seat is fixed on the second lifting mechanism, the height position of the welding gun can be adjusted, the tail end of the handle is connected to the welding gun seat through the horizontal rotating shaft, one end of the first telescopic cylinder is connected to the welding gun seat, the other end of the first telescopic cylinder is connected to the middle of the welding gun handle through the rotating shaft, the spraying angle of the welding gun can be controlled and adjusted in the welding process, and water vapor generated in the welding process can be better prevented from entering the quartz tube through adjustment of the height of the welding gun and the spraying angle of the welding gun in the welding process.
Preferably, the second lifting mechanism is a cylinder or a hydraulic cylinder.
Preferably, the welding gun seat is provided with more than 2 welding guns, and all the welding guns are connected with the welding gun seat in the same way.
The vertical welding device for the quartz tube is provided with a plurality of welding guns which can be used alternately.
Preferably, the gas conduit of the welding gun is connected with a hydrogen supply device and an oxygen supply device, the controller is electrically connected with the hydrogen supply device and controls the operation of the hydrogen supply device, and the controller is electrically connected with the oxygen supply device and controls the operation of the oxygen supply device.
The vertical welding device for the quartz tube can realize mechanical operation in the whole welding process.
Preferably, the quartz tube support base is a double-layer three-jaw caliper.
According to the vertical welding device for the quartz tube, the double-layer three-jaw calipers are used as the quartz tube supporting base, so that the quartz tube is more stably fixed in the welding process.
Preferably, the fixed beam is a vertical column, the upper end of the fixed beam is fixedly connected with a supporting rod, the supporting rod is horizontally arranged, and the first vertical rotating shaft is rotatably connected to the supporting rod.
Preferably, the first lifting mechanism is a cylinder or a hydraulic cylinder.
Preferably, the vertical welding device for the quartz tube further comprises a vacuum pump, and the controller is electrically connected with the vacuum pump and controls the operation of the vacuum pump.
The vertical welding device for the quartz tube can vacuumize the quartz tube in the welding process, can remove water vapor generated in the welding process, avoids the material from absorbing the water vapor, and keeps the vacuum state of the quartz tube in the welding process.
Preferably, the first motor is a servo motor, and the second motor is a servo motor.
The invention also provides a vertical welding method for the quartz tube, which applies any one of the vertical welding devices for the quartz tube, and comprises the following steps:
(1) cleaning a quartz tube and an end cap, drying and charging, wherein the diameters of opening parts of the quartz tube and the end cap are equal;
(2) vertically fixing the quartz tube on the quartz tube supporting base, and fixing the end cap on the end cap fixing disc;
(3) the controller controls the first lifting mechanism to enable the end cap to be vertically opposite to the quartz tube orifice and keep a gap of 0.5-0.8 mm;
(4) the controller controls the second lifting mechanism and the first telescopic cylinder to adjust the vertical height of the welding gun and enables the included angle between the spraying direction of the welding gun and the vertical direction to be 40-50 degrees;
(5) the controller controls the vacuum pump to operate to keep a vacuumizing state on the quartz tube, the controller controls the first motor to rotate at a rotating speed of 6-60 rmp and controls the second motor to rotate at a rotating speed of 6-60 rmp, the first motor and the second motor keep rotating in different clockwise directions and are welded for 0.8-1.2 minutes at a temperature of more than 2000 ℃ by a welding gun;
(6) the controller controls the first motor and the second motor to keep the same clockwise direction to rotate at the rotating speed of 6-60 rmp, and controls the first lifting mechanism to move 0.4-0.6 mm at the speed of 0.1-0.16 mm/min so that the end cap and the quartz tube are close to each other and are welded at the temperature of more than 2000 ℃ by a welding gun.
The vertical welding method for the quartz tube realizes butt welding of the end cap with the same diameter and the quartz tube, the welding joint is smooth, and air leakage caused by irregular welding is avoided.
The invention has the beneficial effects that: the vertical welding device for the quartz tube realizes butt welding of the end cap with the same diameter and the quartz tube, and the end cap and the quartz tube which are cut again can be recycled after use, so that the cost is saved; the welding joint is smooth, so that air leakage possibly caused by untidy welding joint is avoided; the vertical welding method for the quartz tube realizes butt welding of the end cap with the same diameter and the quartz tube, the welding joint is smooth, and air leakage caused by irregular welding positions is avoided.
Drawings
Fig. 1 is a schematic structural diagram of a vertical welding device for quartz tubes according to an embodiment of the invention.
FIG. 2 is a schematic view illustrating a vertical welding apparatus for quartz tubes according to an embodiment of the present invention.
The welding gun comprises a base 1, a base 2, a controller 3, a welding gun 4, a first lifting mechanism 5, a fixed beam 6, a supporting rod 7, a first vertical rotating shaft 8, a first motor 9, an end cap fixing disc 10, a quartz tube supporting base 11, a second vertical rotating shaft 12, a second lifting mechanism 13, a second motor 14, a first telescopic cylinder 15, a welding gun seat 16, a quartz tube 17 and an end cap.
Detailed Description
To better illustrate the objects, aspects and advantages of the present invention, the present invention will be further described with reference to specific examples.
Example 1
The vertical welding device for the quartz tube comprises a controller 2, a base 1, a welding gun 3, a first motor 8, a second motor 13 and a vacuum pump of 23kg, wherein the first motor 8 is a servo motor, the second motor 13 is a servo motor, the base 1 is fixedly connected with a first lifting mechanism 4, the first lifting mechanism 4 is a cylinder or a hydraulic cylinder, the first lifting mechanism 4 is fixedly connected with a fixed beam 5, the fixed beam 5 is a vertical column, the upper end of the fixed beam 5 is fixedly connected with a horizontally arranged support rod 6, the support rod 6 is rotatably connected with a first vertical rotating shaft 7, the first vertical rotating shaft 7 is fixedly connected with an end cap fixing disc 9, the first vertical rotating shaft 7 is detachably and fixedly connected with a rotating shaft of the first motor 8, the base 1 is rotatably connected with a second vertical rotating shaft 11, the upper end of the second vertical rotating shaft 11 is fixedly connected with a quartz tube supporting base 10, the quartz tube supporting base 10 is a double-layer three-jaw caliper, the second vertical rotating shaft 11 is detachably and fixedly connected with a rotating shaft of the second motor 13, and a central shaft of the first vertical rotating shaft 7, a central shaft of the second vertical rotating shaft 11, a central shaft of the end cap fixing disc 9 and a central shaft of the quartz tube supporting base 10 are positioned on a straight line in the same vertical direction;
the base 1 is fixedly connected with a second lifting mechanism 12, the second lifting mechanism 12 is an air cylinder or a hydraulic cylinder, the second lifting mechanism 12 is fixedly connected with a welding gun base 15, each welding gun 3 is provided with a gun nozzle, a gun barrel, a handle and a gas guide pipe, the gun nozzle is coaxially communicated with the gun barrel, the gun barrel is fixedly connected to the handle, the tail end of the handle is connected to the welding gun base 15 through a horizontal rotating shaft, a first telescopic cylinder 14 is arranged on the welding gun base, the first telescopic cylinder 14 is an air cylinder or a hydraulic cylinder, one end of the first telescopic cylinder 14 is connected to the welding gun base 15 through a rotating shaft, the other end of the first telescopic cylinder is connected to the middle of the handle of the welding gun 3 through a rotating shaft, the welding gun base 15 is provided with two welding guns 3, the two welding guns 3 are connected with the welding gun base 15 in the same mode, and;
the controller 2 is electrically connected with the first motor 8 and controls the first motor to operate, the controller 2 is electrically connected with the second motor 13 and controls the second motor to operate, the controller 2 is electrically connected with the first lifting mechanism 4 and controls the first lifting mechanism to operate, the controller 2 is electrically connected with the second lifting mechanism 12 and controls the second lifting mechanism to operate, the controller is electrically connected with the hydrogen supply device and controls the hydrogen supply device to operate, the controller is electrically connected with the oxygen supply device and controls the oxygen supply device to operate, the controller 2 is electrically connected with the first telescopic cylinder 14 and controls the first telescopic cylinder to operate, and the controller 2 is electrically connected with a 23kg vacuum pump and controls the vacuum pump to operate.
The vertical welding method of the quartz tube by using the vertical welding device of the quartz tube comprises the following steps:
(1) cleaning a quartz tube and an end cap, drying and charging, wherein the diameters of opening parts of the quartz tube and the end cap are equal;
(2) as shown in fig. 2, the quartz tube 16 is vertically fixed on the quartz tube support base 10, and the end cap 17 is fixed on the end cap fixing disc 9;
(3) the controller controls the first lifting mechanism to enable the end cap to be vertically opposite to the quartz tube orifice and keep a gap of 0.5-0.8 mm;
(4) the controller controls the second lifting mechanism and the first telescopic cylinder to adjust the vertical height of the welding gun and enables the included angle between the spraying direction of the welding gun and the vertical direction to be 40-50 degrees;
(5) keeping a vacuumizing state on the quartz tube, controlling a first motor to rotate at a rotating speed of 6-60 rmp and a second motor to rotate at a rotating speed of 6-60 rmp by a controller, keeping the first motor and the second motor to rotate in different clockwise directions and simultaneously welding for 0.8-1.2 minutes at a temperature of more than 2000 ℃ by a welding gun;
(6) then the controller controls the first motor and the second motor to keep the same clockwise direction rotation, the rotating speed is 6-60 rmp, the controller controls the first lifting mechanism to move 0.4-0.6 mm at the speed of 0.1-0.16 mm/min, so that the end cap and the quartz tube are close to each other, and meanwhile, a welding gun is used for welding at the temperature of more than 2000 ℃.
The central shaft of the first vertical rotating shaft, the central shaft of the second vertical rotating shaft, the central shaft of the end cap fixing disc and the central shaft of the quartz tube supporting base of the vertical quartz tube welding device of the embodiment are positioned on a straight line in the same vertical direction, so that the quartz tube and the end cap can be coaxially butted in the welding process, the first vertical rotating shaft and the second vertical rotating shaft are driven by a motor and are simultaneously provided with a first lifting mechanism, the coaxial rotation of the quartz tube and the end cap in the welding process can be realized, the quartz tube and the end cap are coaxially close to each other in the rotation process, the quartz tube and the end cap are enabled to rotate in different hour directions in the welding process when the quartz tube is softened, the softened connecting parts cannot be bonded but can be ground into each other more smoothly, then the quartz tube and the end cap are rotated in different directions for bonding, the contact parts are made to be smoother, and the untidy sealing or gas leakage possibly caused, and can make during the welding need not with the end cap cover on the quartz capsule or in the stopper quartz capsule, can realize the butt welding of the end cap and the quartz capsule of equal diameter, avoid the welding to produce the overlap of end cap and quartz capsule, the re-cutting end cap and quartz capsule all can be recycled after the use, the cutting loss also has the loss of cutting knife thickness only rarely, realized the reuse of end cap and quartz capsule, can very big saving cost.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.

Claims (10)

1. A vertical welding device for a quartz tube is characterized by comprising a controller, a base, a welding gun, a first motor and a second motor, the base is fixedly connected with a first lifting mechanism, a fixed beam is fixedly connected on the first lifting mechanism, the fixed beam is rotatably connected with a first vertical rotating shaft, the first vertical rotating shaft is fixedly connected with an end cap fixed disc, the first vertical rotating shaft is detachably and fixedly connected with the rotating shaft of the first motor, the base is rotatably connected with a second vertical rotating shaft, a quartz tube supporting base is fixed at the upper end of the second vertical rotating shaft, the second vertical rotating shaft is detachably and fixedly connected with a rotating shaft of the second motor, the central shaft of the first vertical rotating shaft, the central shaft of the second vertical rotating shaft, the central shaft of the end cap fixing disc and the central shaft of the quartz tube supporting base are positioned on a straight line in the same vertical direction;
the controller is electrically connected with the first motor and controls the first motor to operate, the controller is electrically connected with the second motor and controls the second motor to operate, and the controller is electrically connected with the first lifting mechanism and controls the first lifting mechanism to operate.
2. The vertical welding device for the quartz tube according to claim 1, wherein a second lifting mechanism is fixedly connected to the base, a welding torch base is fixedly connected to the second lifting mechanism, the welding torch has a torch tip, a barrel, a handle and a gas conduit, the torch tip is coaxially communicated with the barrel, the barrel is fixedly connected to the handle, the tail end of the handle is connected to the welding torch base through a horizontal rotating shaft, a first telescopic cylinder is arranged on the welding torch base and is an air cylinder or a hydraulic cylinder, one end of the first telescopic cylinder is rotatably connected to the welding torch base, the other end of the first telescopic cylinder is rotatably connected to the middle portion of the handle of the welding torch, the second lifting mechanism is electrically connected to the controller, the controller controls the second lifting mechanism to operate, and the first telescopic cylinder is electrically connected to the controller, the controller controls the first telescopic cylinder to operate.
3. The vertical welding device for quartz tubes according to claim 2, wherein the second lifting mechanism is a pneumatic cylinder or a hydraulic cylinder.
4. The vertical welding device for the quartz tube according to claim 2, wherein the welding torch base is provided with more than 2 welding torches, and all the welding torches are connected with the welding torch base in the same manner.
5. The vertical quartz tube welding apparatus according to claim 2, wherein a hydrogen supply device and an oxygen supply device are connected to the gas conduit of the welding torch, the controller is electrically connected to the hydrogen supply device and controls the operation of the hydrogen supply device, and the controller is electrically connected to the oxygen supply device and controls the operation of the oxygen supply device.
6. The vertical welding device for quartz tubes according to claim 1, wherein the quartz tube support base is a double-layer three-jaw caliper.
7. The vertical welding device for the quartz tubes as claimed in claim 1, wherein the fixed beam is a vertical column, a support rod is fixedly connected to the upper end of the fixed beam, the support rod is horizontally arranged, the first vertical rotating shaft is rotatably connected to the support rod, and the first lifting mechanism is a cylinder or a hydraulic cylinder.
8. The vertical welding device for quartz tubes according to claim 1, further comprising a vacuum pump, wherein the controller is electrically connected with the vacuum pump and controls the operation of the vacuum pump.
9. The vertical welding device for quartz tubes according to claim 1, wherein the first motor is a servo motor and the second motor is a servo motor.
10. A vertical welding method for a quartz tube, which employs the vertical welding apparatus for a quartz tube according to any one of claims 2 to 9, comprising the steps of:
(1) cleaning a quartz tube and an end cap, drying and charging, wherein the opening parts of the quartz tube and the end cap have the same diameter;
(2) vertically fixing the quartz tube on the quartz tube supporting base, and fixing the end cap on the end cap fixing disc;
(3) the controller controls the first lifting mechanism to enable the end cap to be vertically opposite to the quartz tube orifice and keep a gap of 0.5-0.8 mm;
(4) the controller controls the second lifting mechanism and the first telescopic cylinder to adjust the vertical height of the welding gun and enables the included angle between the spraying direction of the welding gun and the vertical direction to be 40-50 degrees;
(5) the controller controls the vacuum pump to operate to vacuumize the quartz tube, the controller controls the first motor to rotate at a rotating speed of 6-60 rmp and controls the second motor to rotate at a rotating speed of 6-60 rmp, the first motor and the second motor keep rotating in different clockwise directions and are welded for 0.8-1.2 minutes at a temperature of more than 2000 ℃ by the welding gun;
(6) the controller controls the first motor and the second motor to keep the same clockwise direction to rotate at the rotating speed of 6-60 rmp, and controls the first lifting mechanism to move 0.4-0.6 mm at the speed of 0.1-0.16 mm/min so that the end cap and the quartz tube are close to each other, and meanwhile, the welding gun is used for welding at the temperature of more than 2000 ℃.
CN201911048718.7A 2019-10-30 2019-10-30 Vertical welding device and method for quartz tube Active CN110655308B (en)

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CN110655308B CN110655308B (en) 2023-10-24

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112408761A (en) * 2020-12-08 2021-02-26 广东先导先进材料股份有限公司 Welding device
CN112520989A (en) * 2020-12-09 2021-03-19 中国电子科技集团公司第四十六研究所 Automatic quartz tube welding device and method
CN112723725A (en) * 2020-11-26 2021-04-30 杭州大和热磁电子有限公司 Full-automatic hot melt interfacing apparatus of quartz product
CN113173695A (en) * 2020-12-07 2021-07-27 湖北新华光信息材料有限公司 Oxyhydrogen torch seals machine

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Publication number Priority date Publication date Assignee Title
JPH08333125A (en) * 1995-05-31 1996-12-17 Heraeus Quarzglas Gmbh Production of highly homogeneous optical quartz glass molding
WO2007057070A1 (en) * 2005-11-18 2007-05-24 Olivotto Glass Technologies S.P.A. Stemmed glass tumbler manufacturing device
CN101603208A (en) * 2008-06-11 2009-12-16 中国科学院半导体研究所 The silica tube of growing semi-insulated gallium arsenide reaches the method for carbon dope in gallium arsenide
CN204079789U (en) * 2014-08-25 2015-01-07 陈仲枫 U bend energy pipe port welding torch supporting mechanism
CN210855811U (en) * 2019-10-30 2020-06-26 广东先导先进材料股份有限公司 Vertical welding set of quartz capsule

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08333125A (en) * 1995-05-31 1996-12-17 Heraeus Quarzglas Gmbh Production of highly homogeneous optical quartz glass molding
WO2007057070A1 (en) * 2005-11-18 2007-05-24 Olivotto Glass Technologies S.P.A. Stemmed glass tumbler manufacturing device
CN101603208A (en) * 2008-06-11 2009-12-16 中国科学院半导体研究所 The silica tube of growing semi-insulated gallium arsenide reaches the method for carbon dope in gallium arsenide
CN204079789U (en) * 2014-08-25 2015-01-07 陈仲枫 U bend energy pipe port welding torch supporting mechanism
CN210855811U (en) * 2019-10-30 2020-06-26 广东先导先进材料股份有限公司 Vertical welding set of quartz capsule

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112723725A (en) * 2020-11-26 2021-04-30 杭州大和热磁电子有限公司 Full-automatic hot melt interfacing apparatus of quartz product
CN112723725B (en) * 2020-11-26 2023-06-16 杭州大和热磁电子有限公司 Full-automatic hot melting butt joint device for quartz products
CN113173695A (en) * 2020-12-07 2021-07-27 湖北新华光信息材料有限公司 Oxyhydrogen torch seals machine
CN113173695B (en) * 2020-12-07 2022-08-09 湖北新华光信息材料有限公司 Oxyhydrogen torch seals machine
CN112408761A (en) * 2020-12-08 2021-02-26 广东先导先进材料股份有限公司 Welding device
CN112520989A (en) * 2020-12-09 2021-03-19 中国电子科技集团公司第四十六研究所 Automatic quartz tube welding device and method

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