CN112520989A - Automatic quartz tube welding device and method - Google Patents
Automatic quartz tube welding device and method Download PDFInfo
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- CN112520989A CN112520989A CN202011426083.2A CN202011426083A CN112520989A CN 112520989 A CN112520989 A CN 112520989A CN 202011426083 A CN202011426083 A CN 202011426083A CN 112520989 A CN112520989 A CN 112520989A
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- 238000003466 welding Methods 0.000 title claims abstract description 128
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 121
- 239000010453 quartz Substances 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 14
- 238000005245 sintering Methods 0.000 claims abstract description 13
- 230000004927 fusion Effects 0.000 claims abstract description 9
- 239000001301 oxygen Substances 0.000 claims description 29
- 229910052760 oxygen Inorganic materials 0.000 claims description 29
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 238000007526 fusion splicing Methods 0.000 claims 2
- 239000005350 fused silica glass Substances 0.000 claims 1
- 238000007500 overflow downdraw method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000002775 capsule Substances 0.000 abstract description 3
- 238000005496 tempering Methods 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 8
- 229910052739 hydrogen Inorganic materials 0.000 description 8
- 238000013508 migration Methods 0.000 description 6
- 230000005012 migration Effects 0.000 description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007713 directional crystallization Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/207—Uniting glass rods, glass tubes, or hollow glassware
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses an automatic welding device and method for a quartz tube, wherein the device comprises an operation table, a control panel, an objective table rotating device, an oxyhydrogen welding gun moving device, an oxyhydrogen welding gun adjusting device and an oxyhydrogen valve; placing a quartz tube filled with polycrystalline materials and other auxiliary materials on an objective table; placing a quartz cap at the upper end of the quartz tube and aligning; adjusting the concentricity of the quartz tube; adjusting the position of an oxyhydrogen welding gun according to the diameter of the quartz tube to be welded; and igniting and adjusting the flame size of the oxyhydrogen welding gun, sintering the joint of the quartz tube and the quartz cap, and completing the fusion of the quartz tube and the quartz cap. The invention has the following advantages: flame of each oxyhydrogen welding gun is independently controlled, so that the risk of fusion failure caused by single-gun tempering is avoided; welding process easy operation, it is efficient, three welder sintering simultaneously, combine rotatory quartz capsule to be heated more evenly, the butt fusion quality is better than manual operation, has eliminated the easy production stress of manual operation and has cracked the pipe problem, can ensure operating personnel's personal safety moreover well.
Description
Technical Field
The invention relates to a crystal material preparation technology, in particular to an automatic welding device and method for a quartz tube.
Background
The vertical gradient freezing method (VGF/VB) is mature in technology and low in operation cost, so that the method is a crystal growth method which is commonly applied in the field of preparation of crystal materials at present. The more commonly used crystal growth system in this method consists of a vacuum-sealed quartz tube. The process of the crystal growth process comprises the steps of filling prepared polycrystal materials, seed crystals and the like into a prepared Pyrolytic Boron Nitride (PBN) crucible, then filling the PBN crucible into a quartz tube, carrying out evacuation system treatment, sintering in a vacuum state, finally filling the PBN-quartz tube system in the vacuum state into a VB/VGF single crystal furnace, and realizing directional crystallization by adopting a crucible system moving or segmented cooling method to achieve the purpose of crystal growth.
The most adopted quartz tube welding method in the industry at present is to horizontally or vertically place a PBN-quartz tube system, connect the PBN-quartz tube system with an evacuation system through a flange, and after the vacuum degree meets the requirement, two persons use 6 or 12 oxyhydrogen welding torches simultaneously to burn the PBN-quartz tube system, and weld the PBN-quartz tube system with a quartz cap placed in the PBN-quartz tube system to form the vacuum system. Although the operation method is simple and easy to implement, the influence of human factors in the sintering process is large, due to the fact that preheating is not uniform before and after sintering, thermal stress formed after sintering affects tube cracking easily, a new quartz tube needs to be replaced to evacuate again due to failure, polycrystalline materials are scrapped seriously, the production efficiency is reduced, the production cost is greatly increased, and batch production is not facilitated; in addition, because the operation time is as long as 20 minutes, the oxyhydrogen flame is high in temperature and heat, and certain damage can be caused to operators if the operators operate at close range and are not protected properly.
Disclosure of Invention
The invention provides an automatic quartz tube welding device and a welding method, which are used for solving the problem of quartz tube breakage easily occurring in the existing quartz tube welding process, greatly shortening the welding time of a tube cap and improving the tube sealing efficiency; in addition, the close contact of the operating personnel with oxyhydrogen flames is avoided, and the personal safety is ensured.
The technical scheme adopted by the invention is as follows: the automatic quartz tube welding device is characterized by comprising an operation table, a control panel, an object stage rotating device, an oxyhydrogen welding gun moving device, an oxyhydrogen welding gun adjusting device and an oxyhydrogen valve.
The control part on the control panel is provided with three groups, wherein the first group is an indicator light and an emergency stop button; the second group is that the object stage rotation control comprises an object stage rotation speed regulating button, an object stage rotation opening button and an object stage rotation closing button; the third group is hydrogen-oxygen welding gun movement control comprising a hydrogen-oxygen welding gun movement speed regulating button, a hydrogen-oxygen welding gun upward movement button, a hydrogen-oxygen welding gun downward movement button and a hydrogen-oxygen welding gun movement stopping button.
The object stage rotating device comprises an object stage, an upper flange plate, a lower flange plate, a speed reducer, a rotating motor, a correcting pressure plate and an O-shaped rubber ring; wherein the objective table is fixed with the upper flange plate and the lower flange plate through screws; the correcting pressure plate is fixed at the top of the objective table through screws, the O-shaped rubber ring is arranged below the correcting pressure plate, the speed reducer and the rotating motor are fixed at the bottom of the operating table, and the speed reducer is connected with the rotating motor through a connecting shaft and drives the objective table rotating device and the objective table to rotate together.
The oxyhydrogen welding gun moving device comprises a moving motor, a moving screw rod, a screw rod protective shell, a bearing sleeve, an oxyhydrogen welding gun fixing supporting plate and a sub-supporting plate; the movable screw rod is arranged in the screw rod protective shell, the lower end of the movable screw rod is connected with a rotating shaft of a movable motor fixed on the operating platform, the bearing sleeve is sleeved at the upper end of the movable screw rod and fixed with one end of a oxyhydrogen welding gun fixing support plate through screws, and the three support plates are respectively and fixedly connected with the oxyhydrogen welding gun fixing support plate into a whole.
The hydrogen-oxygen welding guns are three, are positioned on the same plane and mutually form an angle of 120 degrees.
The oxyhydrogen welding gun adjusting device comprises a fixed clamp, a horizontal moving guide rail and an oxyhydrogen welding gun angle adjusting knob; three oxyhydrogen welder fix respectively on three fixation clamp, three fixation clamp is connected with three oxyhydrogen welder angle adjust knob respectively, and three oxyhydrogen welder angle adjust knob fixes respectively on the slider of three horizontal migration guide rail, and three horizontal migration guide rail is fixed respectively on three branch layer board, and three branch layer board is fixed respectively on oxyhydrogen welder fixed layer board.
The hydrogen and oxygen valves are in three groups, each group comprises a hydrogen valve and an oxygen valve, wherein the gas inlets are respectively connected with a hydrogen and oxygen pipeline, and the gas outlets are respectively connected with the gas inlets of three hydrogen and oxygen welding guns through pressure-resistant hoses.
The inner cavity of the objective table is in an inverted cone shape, and the inclination angle to the center of the bottom is not less than 90 degrees; preferably, the inclination angle of the inner cavity of the object stage to the center of the bottom is 91 degrees +/-1 degree.
The objective table is made of graphite or stainless steel.
The oxyhydrogen welding gun adopts a porous quartz welding gun.
The number of holes of the porous quartz welding gun is preferably 5-7.
An automatic welding method for quartz tubes is characterized by comprising the following steps:
firstly, a quartz tube filled with polycrystalline materials and other auxiliary materials is placed on an objective table.
And secondly, placing the quartz cap on the upper port of the quartz tube and aligning.
And thirdly, adjusting the concentricity of the quartz tube.
Fourthly, adjusting the position of the oxyhydrogen welding gun according to the diameter of the quartz tube to be welded.
Fifthly, igniting and adjusting the flame size of the oxyhydrogen welding gun, sintering the joint of the quartz tube and the quartz cap, and completing the welding of the quartz tube and the quartz cap.
The distance between the oxyhydrogen welding gun and the welded quartz tube is not less than 50mm, preferably 50-80 mm.
In the fifth step, the flame length of the oxyhydrogen welding gun is adjusted to be not less than 60mm, and preferably 65-75 mm.
When the quartz tube is welded, the rotating speed of the objective table is 3-10 revolutions per minute, and is preferably 4-6 revolutions per minute.
The beneficial effects produced by the invention are as follows: the newly designed automatic welding device for the quartz tube is adopted, the high-temperature sintering time is controlled by adjusting the size and the position of flame, so that the quartz tube and the quartz sealing cap are fully welded, a quartz tube system can form higher vacuum degree during vacuumizing, and the growth quality of crystals is improved; the quartz tube welding device can uniformly heat the quartz tube, eliminates the phenomenon that the tube is cracked due to stress easily generated during single-gun sintering, and reduces unsafe factors of manual close-range operation.
Drawings
FIG. 1 is a front view of a fusion apparatus for quartz tubes according to the present invention;
FIG. 2 is a schematic top view of a fusion apparatus for quartz tubes according to the present invention;
FIG. 3 is an enlarged front view of the fixing clamp and the angle adjusting knob of the oxyhydrogen welding gun;
FIG. 4 is an enlarged top view of the mounting fixture and oxyhydrogen welding torch angle adjustment knob;
FIG. 5 is a flowchart illustrating an automatic welding method for quartz tubes according to an embodiment of the present invention.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1 and 2, the device comprises an operation table 1, a control panel 2, a stage rotating device 3, an oxyhydrogen welding gun moving device 4, an oxyhydrogen welding gun 5, an oxyhydrogen welding gun adjusting device 6 and an oxyhydrogen valve 7.
The control part on the control panel 2 of the device is provided with three groups, wherein the first group comprises an indicator lamp 2.1 and an emergency stop button 2.2; the second group is that the object stage rotation control comprises an object stage rotation speed regulating button 2.3, an object stage rotation opening button 2.5 and an object stage rotation closing button 2.7; the third group is hydrogen-oxygen welding gun movement control comprising a hydrogen-oxygen welding gun movement speed regulating button 2.4, a hydrogen-oxygen welding gun upward movement button 2.6, a hydrogen-oxygen welding gun downward movement button 2.8 and a hydrogen-oxygen welding gun movement stopping button 2.9.
The objective table rotating device 3 comprises a quartz tube objective table 3.1, an upper flange 3.2, a lower flange 3.3, a speed reducer 3.4, a rotating motor 3.5, a correcting pressure plate 3.6 and an O-shaped rubber ring 3.7; the objective table 3.1, the upper flange 3.2 and the lower flange 3.3 are fixed through screws, so that the objective table 12 can be conveniently replaced when quartz tubes of different specifications are welded; the correcting pressure plate 3.6 is fixed at the top of the quartz tube objective table 3.1 through screws, the O-shaped rubber ring 3.7 is arranged below the correcting pressure plate 3.6, the speed reducer 3.4 and the rotating motor 3.5 are fixed at the bottom of the operating table 1, and the speed reducer 3.4 is connected with the rotating motor 3.3 through a connecting shaft to drive the objective table rotating device 3 and the objective table 3.1 to rotate together.
The oxyhydrogen welding gun moving device 4 of the device comprises a moving motor 4.1, a moving screw rod 4.2, a screw rod protective shell 4.3, a bearing sleeve 4.4, an oxyhydrogen welding gun fixing supporting plate 4.5 and a sub supporting plate 4.6; the movable lead screw 4.2 is arranged in the lead screw protective shell 4.3, the lower end of the movable lead screw 4.2 is connected with a rotating shaft of a movable motor 4.1 fixed on the operation table 1, a bearing sleeve 4.4 is sleeved at the upper end of the movable lead screw 4.2 and is fixed with one end of a oxyhydrogen welding gun fixing supporting plate 4.5 through a screw, and three sub supporting plates 4.6 are respectively fixedly connected with the oxyhydrogen welding gun fixing supporting plate 4.5 into a whole.
The device has three oxyhydrogen welding guns 5, wherein the three oxyhydrogen welding guns 5 are on the same plane and form an angle of 120 degrees, and the height, the front and the back and the inclination angle are adjustable.
The oxyhydrogen welding gun adjusting device 6 of the device comprises three groups which correspond to three oxyhydrogen welding guns 5 respectively, wherein each group comprises a fixed clamp 6.1, a horizontal moving guide rail 6.2 and an oxyhydrogen welding gun angle adjusting knob 6.3; three oxyhydrogen welder 5 are fixed respectively on three mounting fixture 6.1, and three mounting fixture 6.1 is connected with three oxyhydrogen welder angle adjust knob 6.3 respectively, and three oxyhydrogen welder angle adjust knob 6.3 is fixed respectively on the slider of three horizontal migration guide rail 6.2, and three horizontal migration guide rail 6.2 is fixed respectively on three branch layer board 4.6, and three branch layer board 4.6 is fixed respectively on oxyhydrogen welder mounting fixture 4.5.
In order to meet the requirement that three oxyhydrogen welding guns 5 form an angle of 120 degrees, the three sub-supporting plates 4.6 are symmetrical to each other, so that the whole fixed supporting plate 4.5 respectively fixed with the three sub-supporting plates 4.6 is irregular.
As shown in fig. 3 and 4, the fixing clamp 6.1 of the device is composed of two rectangular stainless steel blocks with special-shaped grooves, wherein the rear stainless steel block is fixed with the right oxyhydrogen welding gun angle adjusting knob 6.3, and after the oxyhydrogen welding gun 5 is installed, the front stainless steel block is fixed with the rear stainless steel block by four screws, so that the oxyhydrogen welding gun 5 is clamped and fixed in the special-shaped grooves by the two stainless steel blocks. Oxyhydrogen welder angle adjust knob 6.3 includes the locking knob at top and the angle adjust knob on right side, and oxyhydrogen welder angle adjust knob 6.3 passes through the screw to be connected with the slider on the horizontal migration guide rail 6.2, has a locking knob on the slider, and adjustable oxyhydrogen welder 5 is along the horizontal position of horizontal migration guide rail 6.2.
The oxyhydrogen valves 7 of the device are in three groups, each group comprises one oxyhydrogen valve and one oxygen valve, wherein the air inlets are respectively connected with hydrogen pipelines and oxygen pipelines, and the air outlets are respectively connected with the air inlets of three oxyhydrogen welding guns 5 through pressure-resistant hoses.
The inner cavity of the objective table 3.1 in the embodiment is in an inverted cone shape, and the inclination angle of the inner cavity of the objective table 3.1 to the center of the bottom is not less than 90 degrees; this embodiment is set to 91 ± 1 °.
The stage 3.1 of the apparatus is made of a material having a constant strength, and graphite is preferred in this embodiment.
The oxyhydrogen welding gun 5 of the embodiment adopts a porous quartz welding gun, and the number of holes is preferably 5-7.
The automatic welding method of the quartz tube of the present embodiment is shown in fig. 5, and comprises the following steps:
s100, placing the quartz tube filled with the polycrystalline materials and other auxiliary materials on an objective table of a welding device.
S101, turning on a rotary button of a quartz tube objective table, adjusting and fixing the concentricity of the quartz tube, adjusting the concentricity of the quartz tube through an O-shaped rubber ring and a fixing screw of a correction pressing plate, and placing a quartz cap at an upper port of the quartz tube and aligning the quartz cap. The O-shaped rubber ring is a high-temperature-resistant rubber ring, and the O-shaped rubber ring with the diameter slightly larger than the outer diameter of the welded quartz tube is selected in the embodiment.
S102, adjusting the position of an oxyhydrogen welding gun according to the diameter of the quartz tube to be welded; the distance between the oxyhydrogen welding gun and the welded quartz tube is not less than 50mm, and the position between the oxyhydrogen welding gun and the quartz tube is 50-80mm in the embodiment. The position of the 4-inch quartz tube hydrogen-oxygen welding gun is 50-65 mm; the position of the hydrogen-oxygen welding gun of the 6-inch quartz tube is 65-80 mm.
S103, opening a hydrogen valve, igniting, and adjusting the size of flame, wherein the size of the flame of the three oxyhydrogen welding guns is consistent, and the height of the center of the flame is consistent, based on the condition that the flame can contact the quartz tube. The flame size of the oxyhydrogen welding gun is adjusted through three independent hydrogen valves.
And S104, preheating the rotating quartz tube.
And S105, opening oxygen, and continuously preheating the quartz tube by adjusting the three oxygen valves to gradually increase the flame temperature.
S106, adjusting the size and the duration of oxyhydrogen flame, and taking the oxyhydrogen flame as a white light blue as a standard; alignment stone
The quartz tube and the quartz cap are sintered and welded, and the flame length of the oxyhydrogen welding gun is not less than 60mm, and the preferred embodiment is 65-75 mm.
S107, when the quartz tube is welded, the rotating speed of the objective table is 3-10 r/min, the best effect is set to be 4-6 r/min in the embodiment, sintering is carried out for 5-10 min, the contact part of the quartz tube and the quartz cap is gradually softened, and when the quartz tube and the quartz cap are welded into a thin line, welding is finished.
And S108, gradually reducing the oxygen flow, and annealing the welded quartz tube interface to gradually reduce the temperature of the part.
S109, after annealing for 1-3 minutes, firstly closing the oxygen valve, then closing the hydrogen valve, and extinguishing the fire, and ending the quartz tube welding process.
The device adjusts the rotation speed of the quartz tube by rotating the speed adjusting button 2.3 through the objective table, and simultaneously adjusts the verticality of the quartz tube 8 by adjusting the O-shaped rubber ring 3.7 and the correcting pressing plate 3.6; buckling a quartz cap 9 on the upper port of the quartz tube 8 and aligning; through oxyhydrogen welder removal speed governing button 2.4, oxyhydrogen welder upward movement button 2.6 and oxyhydrogen welder downward movement button 2.8 on control panel 2, move oxyhydrogen welder 5 to the seam crossing of quartz capsule 8 and quartz cap 9 through oxyhydrogen welder mobile device 4, press oxyhydrogen welder and remove stop button 2.9 and stop moving.
The method adjusts the distance between an oxyhydrogen welding gun 5 and the quartz tube and the angle of the gun head through an oxyhydrogen welding gun adjusting device 6 according to the diameter of the quartz tube to be welded; the oxyhydrogen welding gun 5 is fixed on a branch supporting plate 4.6 fixedly connected with the oxyhydrogen welding gun fixing supporting plate 4.5 through a fixing clamp 6.1 and a horizontal moving guide rail 6.2, and the angle of the oxyhydrogen welding gun 5 is adjusted through an oxyhydrogen welding gun angle adjusting knob 6.3; after oxyhydrogen is turned on, the size of oxyhydrogen flame is adjusted, so that the center of the oxyhydrogen flame is aligned with the joint of the quartz tube 8 and the quartz cap 9 for sintering, and after the contact point of the oxyhydrogen flame and the quartz cap is observed to become a thin line, the firepower is gradually reduced, and the welding of the oxyhydrogen flame and the quartz cap is completed. If an unexpected situation occurs in the operation process, the emergency stop button 2.2 is pressed to stop.
The invention has the following advantages: flame of each oxyhydrogen welding gun is independently controlled, so that the risk of fusion failure caused by single-gun tempering is avoided; welding process easy operation, it is efficient, three welder sintering simultaneously, combine rotatory quartz capsule to be heated more evenly, the butt fusion quality is better than manual operation, has eliminated the easy production stress of manual operation and has cracked the pipe problem, can ensure operating personnel's personal safety moreover well.
The interface between the quartz tube and the quartz cap after fusion welding is smooth and flat, and the circumference is uniformly fused.
The statistical comparison of the data of the subsequent crystal growth experiments proves that the quartz tube system welded by the method has high welding strength and no defects of air leakage, cracking and the like at high temperature. The method is suitable for the sealing welding process of quartz tubes for 2-inch, 3-inch, 4-inch, 6-inch and 8-inch crystal growth.
Claims (9)
1. An automatic quartz tube welding device is characterized by comprising an operation table (1), a control panel (2), an object stage rotating device (3), an oxyhydrogen welding gun moving device (4), an oxyhydrogen welding gun (5), an oxyhydrogen welding gun adjusting device (6) and an oxyhydrogen valve (7);
the control part on the control panel (2) is provided with three groups, wherein the first group is an indicator lamp (2.1) and an emergency stop button (2.2); the second group is that the object stage rotation control comprises an object stage rotation speed regulating button (2.3), an object stage rotation opening button (2.5) and an object stage rotation closing button (2.7); the third group is hydrogen-oxygen welding gun movement control, which comprises a hydrogen-oxygen welding gun movement speed regulating button (2.4), a hydrogen-oxygen welding gun upward movement button (2.6), a hydrogen-oxygen welding gun downward movement button (2.8) and a hydrogen-oxygen welding gun movement stopping button (2.9);
the object stage rotating device (3) comprises an object stage (3.1), an upper flange plate (3.2), a lower flange plate (3.3), a speed reducer (3.4), a rotating motor (3.5), a correcting pressure plate (3.6) and an O-shaped rubber ring (3.7); wherein the objective table (3.1) is fixed with the upper flange plate (3.2) and the lower flange plate (3.3) through screws; the correcting pressure plate (3.6) is fixed at the top of the objective table (3.1) through screws, the O-shaped rubber ring (3.7) is arranged below the correcting pressure plate (3.6), the speed reducer (3.4) and the rotating motor (3.5) are fixed at the bottom of the operating table (1), and the speed reducer (3.4) is connected with the rotating motor (3.3) through a connecting shaft to drive the objective table rotating device (3) and the objective table (3.1) to rotate together;
the oxyhydrogen welding gun moving device (4) comprises a moving motor (4.1), a moving screw rod (4.2), a screw rod protective shell (4.3), a bearing sleeve (4.4), an oxyhydrogen welding gun fixing supporting plate (4.5) and a sub-supporting plate (4.6); the movable screw rod (4.2) is arranged in a screw rod protective shell (4.3), the lower end of the movable screw rod (4.2) is connected with a rotating shaft of a movable motor (4.1) fixed on the operating platform (1), a bearing sleeve (4.4) is sleeved at the upper end of the movable screw rod (4.2) and is fixed with one end of a oxyhydrogen welding gun fixing supporting plate (4.5) through a screw, and the three sub supporting plates (4.6) are respectively fixedly connected with the oxyhydrogen welding gun fixing supporting plate (4.5) into a whole;
the number of the oxyhydrogen welding guns (5) is three, and the three oxyhydrogen welding guns (5) are arranged on the same plane and form an angle of 120 degrees;
the oxyhydrogen welding gun adjusting device (6)) comprises a fixed clamp (6.1), a horizontal moving guide rail (6.2) and an oxyhydrogen welding gun angle adjusting knob (6.3); the three oxyhydrogen welding guns 5 are respectively fixed on three fixing clamps (6.1), the three fixing clamps (6.1) are respectively connected with three oxyhydrogen welding gun angle adjusting knobs (6.3), the three oxyhydrogen welding gun angle adjusting knobs (6.3) are respectively fixed on sliders of three horizontal moving guide rails (6.2), the three horizontal moving guide rails (6.2) are respectively fixed on three sub-supporting plates (4.6), and the three sub-supporting plates (4.6) are respectively fixed on the oxyhydrogen welding gun fixing supporting plates (4.5);
the oxyhydrogen valves (7) are in three groups, each group comprises one oxyhydrogen valve and one oxygen valve, wherein the air inlets are respectively connected with an oxyhydrogen pipeline, and the air outlets are respectively connected with the air inlets of three oxyhydrogen welding guns (5) through pressure-resistant hoses.
2. The automatic welding device for the quartz tubes according to claim 1, wherein an inner cavity of the objective table (3.1) is in an inverted cone shape, and the inclination angle to the center of the bottom is not less than 90 degrees; preferably, the inclination angle of the inner cavity of the object stage (3.1) to the center of the bottom is 91 degrees +/-1 degree.
3. The automatic welding device for quartz tubes according to claim 1, characterized in that the material of the object stage (3.1) is graphite or stainless steel.
4. The automatic welding device for quartz tubes according to claim 1, wherein said oxyhydrogen welding torch (5) is a porous quartz torch.
5. The automatic fusion apparatus of claim 4 wherein the number of holes of the multi-hole quartz welding torch is preferably 5-7.
6. A method for automatically welding a quartz tube using the automatic welding apparatus for a quartz tube according to claim 1, comprising the steps of:
firstly, a quartz tube (8) filled with polycrystalline materials and other auxiliary materials is placed on an objective table (3.1);
secondly, placing a quartz cap (9) at the upper port of the quartz tube (8) and aligning;
thirdly, adjusting the concentricity of the quartz tube;
fourthly, adjusting the position of the oxyhydrogen welding gun (5) according to the diameter of the quartz tube (8) to be welded;
fifthly, igniting and adjusting the flame size of the oxyhydrogen welding gun (5), sintering the joint of the quartz tube and the quartz cap, and completing the welding of the quartz tube and the quartz cap.
7. The automatic fusion splicing method of quartz tubes according to claim 6, characterized in that the oxyhydrogen welding torch (5) is at a distance of not less than 50mm, preferably 50-80mm, from the fused quartz tube (8).
8. The automatic fusion method of claim 6, wherein in step five, the flame length of the oxyhydrogen welding torch (5) is adjusted to be not less than 60mm, preferably 65-75 mm.
9. The automatic fusion splicing method of quartz tubes according to claim 6, wherein the rotation speed of the stage is set to 3 to 10 rpm, preferably 4 to 6 rpm, when the quartz tubes are fused.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114537795A (en) * | 2022-04-11 | 2022-05-27 | 武汉是维光电科技有限公司 | Vacuum tube sealing device and method based on high-temperature plasma |
| CN115771996A (en) * | 2022-11-18 | 2023-03-10 | 云南中科鑫圆晶体材料有限公司 | Vacuum sealing and welding method of oversized-diameter quartz tube for VGF crystal growth |
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| CN214327548U (en) * | 2020-12-09 | 2021-10-01 | 中国电子科技集团公司第四十六研究所 | Automatic butt fusion device of quartz capsule |
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| CN206028972U (en) * | 2016-06-30 | 2017-03-22 | 烟台和谐传动技术有限公司 | Three rifle automatic welding machines |
| CN110655308A (en) * | 2019-10-30 | 2020-01-07 | 广东先导先进材料股份有限公司 | Vertical welding device and method for quartz tube |
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| CN114537795A (en) * | 2022-04-11 | 2022-05-27 | 武汉是维光电科技有限公司 | Vacuum tube sealing device and method based on high-temperature plasma |
| CN114537795B (en) * | 2022-04-11 | 2022-08-05 | 武汉是维光电科技有限公司 | Vacuum tube sealing device and method based on high-temperature plasma |
| CN115771996A (en) * | 2022-11-18 | 2023-03-10 | 云南中科鑫圆晶体材料有限公司 | Vacuum sealing and welding method of oversized-diameter quartz tube for VGF crystal growth |
| CN115771996B (en) * | 2022-11-18 | 2024-03-22 | 云南中科鑫圆晶体材料有限公司 | Vacuum seal welding method of oversized-diameter quartz tube for VGF crystal growth |
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