CN114537795B - Vacuum tube sealing device and method based on high-temperature plasma - Google Patents
Vacuum tube sealing device and method based on high-temperature plasma Download PDFInfo
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- CN114537795B CN114537795B CN202210373611.5A CN202210373611A CN114537795B CN 114537795 B CN114537795 B CN 114537795B CN 202210373611 A CN202210373611 A CN 202210373611A CN 114537795 B CN114537795 B CN 114537795B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B51/00—Devices for, or methods of, sealing or securing package folds or closures; Devices for gathering or twisting wrappers, or necks of bags
- B65B51/10—Applying or generating heat or pressure or combinations thereof
- B65B51/22—Applying or generating heat or pressure or combinations thereof by friction or ultrasonic or high-frequency electrical means, i.e. by friction or ultrasonic or induction welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K10/00—Welding or cutting by means of a plasma
- B23K10/02—Plasma welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B31/00—Packaging articles or materials under special atmospheric or gaseous conditions; Adding propellants to aerosol containers
- B65B31/04—Evacuating, pressurising or gasifying filled containers or wrappers by means of nozzles through which air or other gas, e.g. an inert gas, is withdrawn or supplied
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
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- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
The invention discloses a vacuum tube sealing device based on high-temperature plasma, which comprises a vacuum tube sealing machine, a vacuum tube pumping mechanism, a first movable table, a second movable table and a high-temperature plasma sintering mechanism, wherein the vacuum tube pumping mechanism is arranged on the upper part of the right side surface of the vacuum tube sealing machine, the lower ends of a left side frame and a right side frame are vertically fixed on the upper end surface of a base, a groove is formed in the lower part of the left side frame, and a first screw rod is arranged in the middle of the groove; and the upper end surface of the first movable table is movably provided with a second movable table, and the high-temperature plasma sintering mechanism is arranged at the upper end of the second movable table. The invention adopts high-temperature plasma as a heat source to weld the tubular object, and the temperature of the plasma is adjustable, thus being convenient for manual and PLC automatic control; can seal the pipe fitting of different materials, pipe diameter and wall thickness, application range is wider, and can seal the tubulose object of different grade type, sets up more intelligent facility, uses safer and more stable reliable.
Description
Technical Field
The invention relates to the technical field related to vacuum tube sealing, in particular to a vacuum tube sealing device and method based on high-temperature plasma.
Background
With the rapidly growing demand of the market of advanced electronic material devices, a vacuum tube sealing preparation process is needed to grow and prepare high-performance material devices, and the general popularization and wide application of the vacuum tube sealing are also in the change of a day after a month. In order to improve the reliable stability of the manufacturing process of the material device, some magnetic fluid rotating structures and seals are also introduced into the vacuum tube sealing equipment. The traditional pipe sealing process is that a heater is rotated manually, a pipe fitting is heated by a heat source burning flammable and explosive gas (such as hydrogen, oxygen, acetylene, methane and the like) for sealing, and a high-temperature melting workpiece, namely the pipe fitting, is burnt by the gas to further achieve the sealing purpose. The vacuum tube sealing process adopting the high-temperature plasma as the heat source can effectively avoid the safety risk existing in the traditional tube sealing process, prevent safety accidents, and solve the problems of advanced electronic material device research and development and production in a safe, high-efficiency, reliable, stable, environment-friendly and energy-saving manner.
Disclosure of Invention
The invention aims to provide a vacuum tube sealing device and a method based on high-temperature plasma, and aims to solve the problems that the existing tube packaging or packaging equipment in the background art is packaged by utilizing a combustible gas temperature melting tube opening, is low in safety, is easy to cause accidents such as explosion and the like, can only melt glass products, cannot melt metal tubes, and is not intelligent, safe and reliable in use.
In order to achieve the purpose, the invention provides the following technical scheme: a vacuum tube sealing device based on high-temperature plasma comprises a vacuum tube sealing machine, a vacuum tube pumping mechanism, a first movable table, a second movable table and a high-temperature plasma sintering mechanism, wherein the vacuum tube pumping mechanism is installed on the upper portion of the right side face of the vacuum tube sealing machine, a left rotating shaft is fixed in the middle of the left side face of the vacuum tube sealing machine, the other end of the left rotating shaft penetrates through a left side frame, the left end of the left rotating shaft is installed on a first motor at the upper end of the left side face of a left side frame, a right rotating shaft is fixed in the middle of the right side face of the vacuum tube sealing machine, and the right end of the right rotating shaft penetrates through the right rotating shaft;
the lower ends of the left side frame and the right side frame are vertically fixed on the upper end face of the base, a groove is formed in the lower portion of the left side frame, a first screw rod is mounted in the middle of the groove, third movable tables are movably arranged on the first screw rod, and a first movable table is movably arranged between the two groups of third movable tables on the left side and the right side;
the upper end surface of the first movable table is movably provided with a second movable table, and the high-temperature plasma sintering mechanism is arranged at the upper end of the second movable table.
According to a further technical scheme, a front control panel is arranged on the front side face of the vacuum tube sealing machine, three groups of tube body rotating motor switch buttons and three groups of second buttons are arranged on the front control panel, each group of tube body rotating motor switch buttons and one group of second buttons are arranged in an up-and-down alignment mode, three groups of upper connecting seats are arranged on the lower end face of the vacuum tube sealing machine, a lower connector is arranged at the lower end of each upper connecting seat, a sealing gasket and a tube connector are sequentially arranged below each lower connector, a tubular object is arranged below each tube connector, and the tube connectors and the tubular object are arranged together through adjusting clamps.
As a further technical scheme, a first guide rod is arranged at the front part and the rear part in the groove, the middle part of the third movable table is movably connected into the first screw rod, the upper end of the first screw rod is installed below the second motor, the lower end of the first screw rod is rotatably connected into an installation groove on the base, the front part and the rear part of the third movable table are respectively sleeved in the first guide rod, and the third movable table moves up and down in the vertical direction.
As a further technical scheme, a barometer is installed in the middle of the vacuum tube mechanism, an air pressure regulating valve is arranged below the barometer, a main flow control valve is arranged at the right part of the vacuum tube mechanism, a shunt control valve is arranged below the main flow control valve, and an air tube interface is arranged at the right end of the vacuum tube mechanism.
As a further technical scheme, the middle of the first movable table is movably connected to the second screw rod, the left end of the second screw rod is arranged on a third motor at the center of the left side face of the third movable table, the right end of the second screw rod is rotatably connected to the right side of the third movable table, the front portion and the rear portion of the first movable table are sleeved on a group of second guide rods, the second guide rods are fixed between the third movable tables on the two sides, and the first movable table moves left and right in the horizontal direction.
As a further technical scheme, a sliding block is arranged at the bottom end of the second movable table, a linear sliding rail is arranged on the upper end face of the first movable table, the sliding block is connected to the linear sliding rail in a sliding mode, and the second movable table moves back and forth in the horizontal direction.
As a further technical scheme, the lower part of the second movable table is provided with a mounting seat, the right side surface of the mounting seat is provided with a right fixing plate, a right loop bar is vertically fixed on the right fixing plate, a second gear is sleeved on the right loop bar, the center of the mounting seat is rotatably connected with a mounting shaft, the lower part of the mounting shaft is sleeved with a first gear, and the first gear and the second gear are in toothed connection.
As a further technical scheme, the high-temperature plasma sintering mechanism is provided with a shaft pin, the shaft pin is hinged with two groups of clamping plates, a high-temperature plasma emission welding gun is clamped between the front clamping plate and the rear clamping plate, a locking bolt is installed between the upper portions of the front clamping plate and the rear clamping plate, a connecting pipe is connected between the high-temperature plasma emission welding gun and a high-temperature plasma PLC control platform on the upper portion of the left side face of the left side frame, and the high-temperature plasma emission welding gun is of a dismounting structure.
A vacuum tube sealing method based on high-temperature plasma comprises the steps of connecting a molecular pump set, installing a tubular object on a vacuum tube sealing machine, vacuumizing before sample loading, necking the tubular object, loading a sample, vacuumizing after the sample loading, filling protective gas and sealing the tubular object, and comprises the following steps:
the method comprises the following steps: connecting a molecular pump; the vacuum tube sealing machine interface is connected with the reducing of 25-to-16 conversion, the clamp is used for locking, one end of the KF25 corrugated tube is used for connecting the reducing interface of the vacuum tube sealing machine, and the other end of the KF25 corrugated tube is connected with the molecular pump set interface and locked with the clamp.
Step two: mounting a tubular object on a vacuum tube sealing machine; the pipe joint is locked on the vacuum pipe sealing machine by using a hoop, the pipe joint is unscrewed, and the pipe-shaped objects are connected on the pipe joint in a certain sequence.
Step three: vacuumizing before sample loading; and starting the molecular pump set, unscrewing the shunt vacuumizing control valve, screwing the shunt vacuumizing control valve and suspending the molecular pump set after the pressure gauge reaches a negative pressure value of-1 bar, and stopping vacuumizing.
Step four: necking the tubular object; opening a green motor switch of a vacuumizing tube sealing machine, controlling the rotation speed through a speed adjusting knob, unscrewing a fixing screw of a high-temperature plasma emission welding gun clamping device, installing a high-temperature plasma emission welding gun on the clamping device, screwing down and fixing, unscrewing a high-temperature plasma emission welding gun adjusting valve to generate gas, then igniting the high-temperature plasma emission welding gun, preheating the middle part of a tubular object, moving the flame of the welding gun to a corresponding position of the tubular object needing necking down, starting to sinter the necking down, carrying out goggles, observing the sintering condition, seeing that the necking down part of the tubular object is obviously fused and sunken, completing necking down, quickly screwing down the high-temperature plasma emission welding gun adjusting valve to stop sintering, closing the motor switch of the vacuum tube sealing machine, opening the air outlet to release pressure, closing the air outlet, carrying protective gloves, unscrewing a tube connector, taking down the tubular object, and placing the tubular object into a test tube rack for cooling.
Step five: and (4) loading a sample, namely placing the sample into the tubular object, and connecting the tubular object after loading the sample to the pipe joint.
Step six: after sample loading, vacuumizing; and opening the vacuum tube pumping machine, slowly unscrewing the shunt vacuum control valve to prevent a sample from being pumped out, slowly unscrewing the main flow vacuum control valve when the pressure gauge reaches a negative pressure value of-1 bar, screwing the shunt vacuum control valve, checking the degree of vacuum pumping on a panel of the molecular pump group, and screwing the main flow vacuum control valve after the required high vacuum value is reached.
Step seven: filling protective gas; and inserting an inflation tube of inflation equipment into an inflation port of the vacuum tube sealing machine, slowly screwing off the inflation port control valve, and quickly closing the inflation port control valve when a pointer of the pressure flow meter points to a negative pressure intermediate value of-0.6 bar.
Step eight: sealing the tube; and (3) unscrewing a plasma power switch, opening a plasma emission welding gun, aligning the plasma emission welding gun to the necking part of the tubular object to start sintering and sealing the pipe, finishing pipe sealing after the tubular wall of the tubular cylinder is sintered and fused together, and immediately screwing a high-temperature plasma emission welding gun regulating valve to stop sintering.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the sealing washer and the pipe joint are arranged below the lower interface arranged at the lower end of the upper connecting seat, the sealing washer is arranged between the lower interface and the pipe joint in a double-sealing mode, so that the sealing effect is achieved, air leakage and air leakage are avoided, meanwhile, the pipe joint and the pipe joint are convenient to assemble and disassemble, the pipe joint can be replaced according to pipes with different sizes, the use range is wider, and the use is more flexible and convenient. Can meet the requirement of simultaneously operating a plurality of pipe fittings for vacuum pipe sealing, and has high working efficiency.
2. The lower structures of the left side frame and the right side frame are arranged the same, a group of screw rods are arranged, and the front part and the rear part of each screw rod are provided with guide rods, so that the first screw rod is conveniently rotated clockwise by a clockwise second motor to drive the third movable table to move upwards straightly, and the first screw rod is rotated reversely to drive the third movable table to move downwards so as to conveniently adjust the positions of the first movable table, the second movable table and the high-temperature plasma sintering mechanism on the Y axis.
3. The air pipe interface at the right end of the vacuum pipe pumping mechanism can be connected with a molecular pump through a pipeline so as to conveniently carry out vacuum treatment on the tubular object, the vacuum pipe pumping mechanism is respectively provided with a main flow control valve and a shunt control valve, the main flow control valve is arranged for quartz before the tubular object is filled with a sample, and the shunt control valve is arranged for vacuum pipe sealing of various target materials such as powder, blocks, liquid and atmosphere after the tubular object is filled with the sample so as to prevent the sample from being pumped out, so that the vacuum pipe sealing mechanism is safer and more reliable in arrangement, advanced in functional design and wide in application.
4. In the invention, the third movable table moves up and down on the first screw rod, and the first movable table moves left and right on the second screw rod, so that the position of the first movable table in the direction of the X, Z shaft can be conveniently changed, and the use is more flexible and convenient.
5. According to the invention, the first gear at the bottom end of the second movable table is slidably connected in the linear slide rail, so that the positions of the second movable table and the high-temperature plasma sintering mechanism on the Y axis can be conveniently and properly changed, tube sealing treatment on three groups of tubular objects under the vacuum tube sealing machine can be conveniently carried out, manpower is saved, and the working efficiency is improved.
6. In the invention, the lower part of the mounting shaft in the second movable table is sleeved with the first gear, the first gear and the second gear are in toothed connection, and the first gear can be reversely driven to rotate and move by rotating the second gear, so that the mounting shaft is driven to synchronously rotate, the rotation angle of the mounting shaft is adjusted, and the direction angle of the high-temperature plasma sintering mechanism can be properly changed.
7. According to the invention, the front and rear clamping plates hinged on the shaft pin are conveniently installed together through the locking bolt, the locking bolt is also conveniently detached, the high-temperature plasma emission welding gun is conveniently installed between the front and rear clamping plates, so that the high-temperature plasma emission welding gun is used for carrying out high-temperature sintering pipe sealing treatment on the tubular object, a connecting pipe is connected between the high-temperature plasma emission welding gun and the high-temperature plasma PLC console, the temperature can be controlled through the high-temperature plasma PLC console, the operation and the use are reliable, safe, intelligent and efficient, the potential safety risk that the traditional pipe sealing adopts flammable and explosive gas is avoided through high-temperature plasma vacuum pipe sealing, the safety production accidents are prevented, the safety production accidents are safer, more efficient, more reliable and stable, and more environment-friendly, energy-saving, low-carbon and emission reduction are realized.
8. The power, current and heat of the power supply based on the high-temperature plasma can be manually and automatically intelligently adjusted according to the working condition and the sealing material, the functional design is advanced, and the automation degree is high.
Drawings
FIG. 1 is a schematic front view of the structure of the present invention;
FIG. 2 is a schematic left side view of the structure of the present invention;
FIG. 3 is a schematic cross-sectional view of the structure of the present invention;
FIG. 4 is a schematic view of the tubular installation deployment of the inventive structure;
FIG. 5 is a bottom view of the first movable stage of the present invention;
FIG. 6 is a schematic view of the arrangement of the present invention between a first movable table and a second movable table;
FIG. 7 is a schematic view of the installation between the second movable table and the high temperature plasma sintering mechanism of the inventive structure.
In the figure: 1. a vacuum tube sealing machine; 10. a front control panel; 11. the tube body rotates a motor switch button; 12. a second button; 13. an upper connecting seat; 14. a left-handed shaft; 15. a right-hand shaft; 16. a lower interface; 17. a sealing gasket; 18. a pipe interface; 19. adjusting the clamp; 2. a tube; 3. a vacuum tube pumping mechanism; 30. a barometer; 31. a main flow control valve; 32. a tracheal tube interface; 33. an air pressure regulating valve; 34. a shunt control valve; 4. a left side frame; 40. a first motor; 41. a high-temperature plasma PLC console; 42. a connecting pipe; 43. a second motor; 44. a first lead screw; 45. a third movable table; 46. a third motor; 47. a groove; 48. a first guide bar; 5. a right side frame; 6. a base; 60. mounting grooves; 7. a first movable table; 70. a second lead screw; 71. a second guide bar; 72. a linear slide rail; 8. a second movable table; 80. a slider; 81. installing a shaft; 82. a first gear; 83. a mounting seat; 84. a right fixing plate; 85. a right loop bar; 86. a second gear; 9. a high temperature plasma sintering mechanism; 90. a shaft pin; 91. locking the bolt; 92. a splint; 93. high temperature plasma emission welding gun.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In a first embodiment, referring to fig. 1 to 7, the present invention provides a technical solution: a vacuum tube sealing device based on high-temperature plasma comprises a vacuum tube sealing machine 1, a vacuum tube pumping mechanism 3, a first movable table 7, a second movable table 8 and a high-temperature plasma sintering mechanism 9, wherein the vacuum tube pumping mechanism 3 is installed on the upper portion of the right side face of the vacuum tube sealing machine 1, a left rotating shaft 14 is fixed in the middle of the left side face of the vacuum tube sealing machine 1, the other end of the left rotating shaft 14 penetrates through a left side frame 4 to be arranged, the left end of the left rotating shaft 14 is installed on a first motor 40 at the upper end of the left side face of the left side frame 4, a right rotating shaft 15 is fixed in the middle of the right side face of the vacuum tube sealing machine 1, and the right end of the right rotating shaft 15 penetrates through the right rotating shaft 15 to be arranged; the lower ends of the left side frame 4 and the right side frame 5 are vertically fixed on the upper end surface of the base 6, a groove 47 is formed in the lower part of the left side frame 4, a first screw rod 44 is installed in the middle of the groove 47, a third movable table 45 is movably arranged on the first screw rod 44, and a first movable table 7 is movably arranged between the two groups of third movable tables 45 on the left side and the right side; the upper end surface of the first movable table 7 is movably provided with a second movable table 8, and a high-temperature plasma sintering mechanism 9 is installed at the upper end of the second movable table 8.
A vacuum tube sealing method based on high-temperature plasma comprises the steps of connecting a molecular pump, installing a tubular object on a vacuum tube sealing machine, vacuumizing before sample loading, necking down the tubular object, loading a sample, vacuumizing after the sample loading, filling protective gas and sealing the tubular object, and is characterized in that:
the method comprises the following steps: connecting a molecular pump; the vacuum tube sealing machine interface is connected with the reducing of 25-to-16 conversion, the clamp is used for locking, one end of the KF25 corrugated tube is used for connecting the reducing interface of the vacuum tube sealing machine, and the other end of the KF25 corrugated tube is connected with the molecular pump set interface and locked with the clamp.
Step two: mounting a tubular object on a vacuum tube sealing machine; the pipe joint is locked on the vacuum pipe sealing machine by using a hoop, the pipe joint is unscrewed, and the pipe-shaped objects are connected on the pipe joint in a certain sequence.
Step three: vacuumizing before sample loading; and starting the molecular pump set, unscrewing the shunt vacuumizing control valve, screwing the shunt vacuumizing control valve and suspending the molecular pump set after the pressure gauge reaches a negative pressure value of-1 bar, and stopping vacuumizing.
Step four: necking the tubular object; opening a green motor switch of a vacuum-pumping pipe sealing machine, controlling the rotation speed by a speed adjusting knob, unscrewing a fixing screw of a high-temperature plasma emission welding gun clamping device, installing a high-temperature plasma emission welding gun on the clamping device, screwing down and fixing, unscrewing a high-temperature plasma emission welding gun adjusting valve, then igniting the high-temperature plasma emission welding gun, preheating the middle part of a tubular object, then moving the plasma emission welding gun to a corresponding position of the tubular object needing necking down, starting to sinter the necking down, carrying a goggles, observing the sintering condition, seeing that the necking down part of the tubular object is obviously fused and sunken, completing necking down, quickly screwing the high-temperature plasma emission welding gun adjusting valve to stop sintering, closing the motor switch of the vacuum pipe sealing machine, unscrewing an air release port to release pressure, closing the air release port, carrying protective gloves, unscrewing a pipe joint, taking down the tubular object, and placing the tubular object into a test tube rack for cooling.
Step five: and (4) loading a sample, namely placing the sample into the tubular object, and connecting the tubular object after loading the sample to the pipe joint.
Step six: after sample loading, vacuumizing; and opening the vacuum tube pumping machine, slowly unscrewing the shunt vacuum control valve to prevent a sample from being pumped out, slowly unscrewing the main flow vacuum control valve when the pressure gauge reaches a negative pressure value of-1 bar, screwing the shunt vacuum control valve, checking the degree of vacuum pumping on a panel of the molecular pump group, and screwing the main flow vacuum control valve after the required high vacuum value is reached.
Step seven: filling protective gas; and inserting an inflation tube of inflation equipment into an inflation port of the vacuum tube sealing machine, slowly screwing off the inflation port control valve, and quickly closing the inflation port control valve when a pointer of the pressure flow meter points to a negative pressure intermediate value of-0.6 bar.
Step eight: sealing the tube; and (3) unscrewing a plasma power switch, opening a plasma emission welding gun, aligning the plasma emission welding gun to the necking part of the tubular object to start sintering and sealing the pipe, finishing pipe sealing when the quartz cylinder and the wall of the tubular object are sintered and fused together, and immediately screwing a high-temperature plasma emission welding gun regulating valve to stop sintering.
A vacuum tube sealing device based on high-temperature plasma is applied to a vacuum tube sealing method based on high-temperature plasma.
In this embodiment, a front control panel 10 is disposed on a front side surface of the vacuum tube sealing machine 1, three sets of tube body rotating motor switch buttons 11 and second buttons 12 are disposed on the front control panel 10, each set of tube body rotating motor switch button 11 and one set of second button 12 are aligned up and down, three sets of upper connecting seats 13 are disposed on a lower end surface of the vacuum tube sealing machine 1, a lower connector 16 is disposed on a lower end of the upper connecting seats 13, a sealing gasket 17 and a tube connector 18 are sequentially mounted below the lower connector 16, a tube 2 is mounted below the tube connector 18, the tube connector 18 and the tube 2 are mounted together through an adjusting clamp 19, and the tube 2 may be a quartz tube or a metal tube or other tubular structure.
In the present invention, a sealing washer 17 and a pipe joint 18 are installed below a lower interface 16 disposed at the lower end of an upper connecting seat 13, the sealing washer 17 is installed between the lower interface 16 and the pipe joint 18 to play a sealing role, so as to prevent air leakage and air leakage, meanwhile, the pipe 2 and the pipe joint 18 are conveniently assembled and disassembled, and the pipe joint 18 can be replaced according to pipes with different sizes, so that the application range is wide, and the use is flexible and convenient.
In this embodiment, the front and rear portions of the groove 47 are provided with the first guide rod 48, the middle portion of the third movable table 45 is movably connected in the first lead screw 44, the upper end of the first lead screw 44 is installed under the second motor 43, the lower end of the first lead screw 44 is rotatably connected in the installation groove 60 on the base 6, the front and rear portions of the third movable table 45 are respectively sleeved in the first guide rod 48, and the third movable table 45 moves up and down in the vertical direction.
In the third embodiment, the lower structures of the left side frame 4 and the right side frame 5 are the same, a set of screw rods are arranged, and the front part and the rear part of each screw rod are provided with guide rods, so that the first screw rod 44 is rotated clockwise by the clockwise second motor 43 to drive the third movable table 45 to move up straightly, and the third movable table 45 is driven to move down by rotating the first screw rod 44 in the reverse direction, so as to adjust the positions of the first movable table 7, the second movable table 8 and the high-temperature plasma sintering mechanism 9 on the Y axis.
In this embodiment, the middle of the evacuation tube mechanism 3 is provided with a barometer 30, an air pressure regulating valve 33 is arranged below the barometer 30, the right part of the evacuation tube mechanism 3 is provided with a main flow control valve 31, a shunt control valve 34 is arranged below the main flow control valve 31, and the right end of the evacuation tube mechanism 3 is provided with an air tube interface 32.
Fourth embodiment, this embodiment is a further limitation to the first embodiment, in the present invention, the air pipe interface 32 at the right end of the evacuation pipe mechanism 3 may be connected to a molecular pump through a pipeline to facilitate evacuation processing of the tubular object, and the evacuation pipe mechanism 3 is respectively provided with a main flow control valve 31 and a shunt control valve 34, the main flow control valve 31 is provided before the tubular object is loaded with a sample, and the shunt control valve 34 is provided after the tubular object is loaded with a sample, so as to prevent the sample from being drawn out, and the setup is safer and more reliable.
In this embodiment, the middle of the first movable table 7 is movably connected to the second lead screw 70, the left end of the second lead screw 70 is installed on the third motor 46 at the center of the left side surface of the third movable table 45, the right end of the second lead screw 70 is rotatably connected to the right side of the third movable table 45, the front and rear parts of the first movable table 7 are sleeved on a set of second guide rods 71, the second guide rods 71 are fixed between the third movable tables 45 at the two sides, and the first movable table 7 moves left and right in the horizontal direction.
Fifth embodiment, this embodiment is a further limitation to the first embodiment, and in the present invention, the third movable table 45 moves up and down on the first lead screw 44, and the first movable table 7 moves left and right on the second lead screw 70, so that the position of the first movable table 7 in the X, Z axis direction can be easily changed, and the use is more flexible and convenient.
In this embodiment, the bottom end of the second movable stage 8 is provided with a slider 80, the upper end surface of the first movable stage 7 is provided with a linear slide rail 72, the slider 80 is slidably connected to the linear slide rail 72, and the second movable stage 8 moves back and forth in the horizontal direction.
Sixth embodiment, which is a further limitation to the first embodiment, in the present invention, the first gear 82 at the bottom end of the second movable stage 8 is slidably connected in the linear slide rail 72, so as to conveniently and properly change the positions of the second movable stage 8 and the high temperature plasma sintering mechanism 9 on the Y axis, and conveniently seal the three sets of tubes 2 under the vacuum tube sealing machine 1.
In this embodiment, the lower portion of the second movable table 8 is provided with a mounting seat 83, a right fixing plate 84 is provided on the right side surface of the mounting seat 83, a right sleeve rod 85 is vertically fixed on the right fixing plate 84, a second gear 86 is sleeved on the right sleeve rod 85, the center of the mounting seat 83 is rotatably connected with a mounting shaft 81, a first gear 82 is sleeved on the lower portion of the mounting shaft 81, and the first gear 82 and the second gear 86 are in toothed connection.
Seventh embodiment, which is a further limitation to the first embodiment, in the present invention, the first gear 82 is sleeved on the lower portion of the mounting shaft 81 in the second movable stage 8, the first gear 82 and the second gear 86 are connected together in a toothed manner, and the first gear 82 can be driven to rotate reversely by rotating the second gear 86, so as to drive the mounting shaft 81 to rotate synchronously, so as to adjust the rotation angle of the mounting shaft 81, thereby appropriately changing the direction angle of the high temperature plasma sintering mechanism 9.
In this embodiment, the high temperature plasma sintering mechanism 9 is provided with a shaft pin 90, and the shaft pin 90 is hinged with two sets of clamping plates 92, and a high temperature plasma emission welding gun 93 is clamped between the front and rear two sets of clamping plates 92, and a locking bolt 91 is installed between the upper portions of the front and rear two sets of clamping plates 92, and a connecting pipe 42 is connected between the high temperature plasma emission welding gun 93 and the high temperature plasma PLC control platform 41 on the upper portion of the left side surface of the left side frame 4, and the high temperature plasma emission welding gun 93 is of a detachable structure.
Eighth embodiment, which is a further limitation of the first embodiment, in the present invention, the front and rear two sets of clamping plates 92 hinged on the shaft pin 90 are conveniently installed together through the locking bolt 91, and the locking bolt 91 is also conveniently detached, so that the high temperature plasma emission welding gun 93 is conveniently installed between the front and rear two sets of clamping plates 92, so as to perform high temperature sintering tube sealing treatment on the tubular object by using the high temperature plasma emission welding gun 93, and the connecting pipe 42 is connected between the high temperature plasma emission welding gun 93 and the high temperature plasma PLC console 41, so that the temperature can be controlled by using the high temperature plasma PLC console 41, and the operation is relatively safe and intelligent.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (1)
1. The utility model provides a vacuum tube sealing device based on high temperature plasma, includes vacuum tube sealing machine (1), evacuation pipe mechanism (3), first movable table (7), second movable table (8) and high temperature plasma sintering mechanism (9), its characterized in that: a vacuum tube pumping mechanism (3) is installed on the upper portion of the right side face of the vacuum tube sealing machine (1), a gas pressure gauge (30) is installed in the middle of the vacuum tube pumping mechanism (3), a gas pressure adjusting valve (33) is arranged below the gas pressure gauge (30), a main flow control valve (31) is arranged on the right portion of the vacuum tube pumping mechanism (3), a shunt control valve (34) is arranged below the main flow control valve (31), and a gas pipe connector (32) is arranged at the right end of the vacuum tube pumping mechanism (3); a left rotating shaft (14) is fixed in the middle of the left side face of the vacuum pipe sealing machine (1), the other end of the left rotating shaft (14) penetrates through the left side frame (4) to be arranged, the left end of the left rotating shaft (14) is installed on a first motor (40) at the upper end of the left side face of the left side frame (4), a right rotating shaft (15) is fixed in the middle of the right side face of the vacuum pipe sealing machine (1), and the right end of the right rotating shaft (15) penetrates through the right rotating shaft (15) to be arranged; the front side surface of the vacuum tube sealing machine (1) is provided with a front control panel (10), three groups of tube body rotating motor switch buttons (11) and second buttons (12) are arranged on the front control panel (10), each group of tube body rotating motor switch buttons (11) and one group of second buttons (12) are arranged in an up-and-down alignment mode, the lower end surface of the vacuum tube sealing machine (1) is provided with three groups of upper connecting seats (13), the lower end of each upper connecting seat (13) is provided with a lower connector (16), a sealing gasket (17) and a tube connector (18) are sequentially arranged below each lower connector (16), a quartz tube (2) is arranged below each tube connector (18), and meanwhile, each tube connector (18) and the quartz tube (2) are arranged together through an adjusting clamp (19);
the lower ends of the left side frame (4) and the right side frame (5) are vertically fixed on the upper end face of the base (6), a groove (47) is formed in the lower portion of the left side frame (4), a first screw rod (44) is installed in the middle of the groove (47), first guide rods (48) are arranged on the front portion and the rear portion in the groove (47), the middle of a third movable table (45) is movably connected into the first screw rod (44), the upper end of the first screw rod (44) is installed below a second motor (43), the lower end of the first screw rod (44) is rotatably connected into an installation groove (60) in the base (6), the front portion and the rear portion of the third movable table (45) are respectively sleeved in the first guide rods (48), and the third movable table (45) moves up and down in the vertical direction; meanwhile, a third movable table (45) is movably arranged on the first screw rod (44), and a first movable table (7) is movably arranged between two groups of the third movable tables (45) at the left side and the right side;
a second movable table (8) is movably arranged on the upper end face of the first movable table (7), and a high-temperature plasma sintering mechanism (9) is installed at the upper end of the second movable table (8); the high-temperature plasma sintering mechanism (9) is provided with a shaft pin (90), two groups of clamping plates (92) are hinged on the shaft pin (90), a high-temperature plasma emission welding gun (93) is clamped between the front and rear groups of clamping plates (92), a locking bolt (91) is arranged between the upper parts of the front and rear groups of clamping plates (92), a connecting pipe (42) is connected between the high-temperature plasma emission welding gun (93) and a high-temperature plasma PLC console (41) at the upper part of the left side surface of the left side frame (4), and the high-temperature plasma emission welding gun (93) is of a disassembly structure; the bottom end of the second movable table (8) is provided with a sliding block (80), the upper end face of the first movable table (7) is provided with a linear sliding rail (72), the sliding block (80) is connected to the linear sliding rail (72) in a sliding mode, and the second movable table (8) moves back and forth in the horizontal direction; the lower part of the second movable table (8) is provided with a mounting seat (83), the right side surface of the mounting seat (83) is provided with a right fixing plate (84), a right loop bar (85) is vertically fixed on the right fixing plate (84), a second gear (86) is sleeved on the right loop bar (85), the center of the mounting seat (83) is rotatably connected with a mounting shaft (81), the lower part of the mounting shaft (81) is sleeved with a first gear (82), and the first gear (82) is in toothed connection with the second gear (86); the middle part of the first movable table (7) is movably connected to a second screw rod (70), the left end of the second screw rod (70) is arranged on a third motor (46) at the center of the left side face of a third movable table (45), the right end of the second screw rod (70) is rotatably connected into the right third movable table (45), the front part and the rear part of the first movable table (7) are sleeved on a group of second guide rods (71), the second guide rods (71) are fixed between the third movable tables (45) at two sides, and the first movable table (7) moves left and right in the horizontal direction;
the vacuum tube sealing method based on high-temperature plasma comprises the steps of connecting a molecular pump, installing a quartz tube on a vacuum tube sealing machine, vacuumizing before sample loading, necking the quartz tube, loading a sample, vacuumizing after the sample loading, filling protective gas and sealing the quartz tube,
the method comprises the following steps: connecting a molecular pump; the interface of the vacuum tube sealing machine is connected with the reducing diameter of 25 turns 16 and is locked by a hoop, one end of a KF25 corrugated tube is connected with the reducing interface of the vacuum tube sealing machine, and the other end of the KF25 corrugated tube is connected with the interface of the molecular pump group and is locked with the hoop;
step two: installing a quartz tube on the vacuum tube sealing machine; locking the pipe joint on a vacuum pipe sealing machine by using a hoop, unscrewing the pipe joint, and installing a certain sequence to connect the quartz pipe on the pipe joint;
step three: vacuumizing before sample loading; starting the molecular pump set, unscrewing the shunt vacuumizing control valve, screwing the shunt vacuumizing control valve and suspending the molecular pump set after the pressure gauge reaches a negative pressure value of-1 bar, and stopping vacuumizing;
step four: necking down the quartz tube; opening a green motor switch of a vacuumizing tube sealing machine, controlling the rotation speed through a speed adjusting knob, loosening a fixing screw of a high-temperature plasma emission welding gun clamping device, installing a high-temperature plasma emission welding gun on the clamping device, screwing and fixing, unscrewing a high-temperature plasma emission welding gun adjusting valve to generate gas, then igniting the high-temperature plasma emission welding gun, preheating the middle part of a quartz tube, moving an emission flame to a corresponding position of the quartz tube needing necking, starting to sinter the necking, carrying out goggles, observing the sintering condition, seeing that the neck part of the quartz tube is obviously fused and sunken, completing necking, quickly screwing the high-temperature plasma emission welding gun adjusting valve to stop sintering, closing the motor switch of the vacuum tube sealing machine, unscrewing a gas outlet after releasing the pressure of the gas outlet, carrying protective gloves, unscrewing a tube joint, taking down the quartz tube, and placing the quartz tube into a test tube rack for cooling;
step five: loading a sample, namely putting the sample into a tubular object, and connecting the tubular object after loading the sample to a pipe joint;
step six: after sample loading, vacuumizing; opening the vacuum tube pumping machine, slowly unscrewing the shunt vacuum control valve to prevent a sample from being pumped out, slowly unscrewing the main flow vacuum control valve when a pressure gauge reaches a negative pressure value of-1 bar, screwing the shunt vacuum control valve, checking the degree of vacuum pumping on a panel of the molecular pump group, and screwing the main flow vacuum control valve after reaching a desired high vacuum value;
step seven: filling protective gas; inserting an inflation tube of inflation equipment into an inflation inlet of the vacuum tube sealing machine, slowly screwing off an inflation inlet control valve, and quickly closing the inflation inlet control valve when a pressure gauge pointer points to a negative pressure intermediate value of-0.6 bar;
step eight: sealing the tube; unscrewing a plasma power switch, opening a plasma emission welding gun, aligning the plasma emission welding gun to the necking part of the tubular object to start sintering and sealing the pipe, finishing pipe sealing when the tubular pipe wall of the tubular cylinder is sintered and fused together, and immediately screwing a high-temperature plasma emission welding gun regulating valve to stop sintering;
the vacuum tube sealing device based on the high-temperature plasma is applied to a vacuum tube sealing method based on the high-temperature plasma.
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| CN116288737B (en) * | 2023-02-09 | 2023-08-18 | 武汉是维光电科技有限公司 | High-temperature plasma vacuum tube sealing system and method for automatic transfer growth |
| CN116288685B (en) * | 2023-03-23 | 2023-08-22 | 武汉是维光电科技有限公司 | Automatic growth and transfer system and method for two-dimensional material |
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