CN110642524B - 一种二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法 - Google Patents
一种二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法 Download PDFInfo
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Abstract
本发明涉及一种二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,包括以下步骤:(1)将二氧化钛纳米颗粒水凝胶滴至玻璃样件表面;(2)将另一片玻璃压在水凝胶表面,使得水凝胶均匀分布在两片玻璃之间,然后水平静置一段时间,使得二氧化钛纳米颗粒水凝胶晾干;(3)将玻璃片分开得到具有均匀二氧化钛纳米颗粒涂层的玻璃;(4)利用波长1064nm的红外纳秒激光器进行微结构加工;(5)后处理,将步骤3所得样件分别用丙酮、无水乙醇、去离子水超声清洗10分钟,以去除表面粘附的二氧化钛纳米颗粒,得到具有微结构的玻璃样件;解决了石英玻璃对于1064nm的红外纳秒激光吸收率很低,无法实现材料去除的问题。
Description
技术领域
本发明属于激光加工技术领域,公开了一种利用红外纳秒激光在玻璃表面制备微结构的方法。
背景技术
公开该背景技术部分的信息仅仅旨在增加对本发明的总体背景的理解,而不必然被视为承认或以任何形式暗示该信息构成已经成为本领域一般技术人员所公知的现有技术。
石英玻璃具有优异的物理化学性能,在生物医疗、航空航天等领域中具有广泛应用,例如石英玻璃制备的微流控芯片具有透光度好、化学稳定性及生物兼容性好的优点。然而由于玻璃的高硬脆及低断裂韧性的特点,其表面微孔及微流道的制造一直存在难题,传统的磨料喷射加工适用于玻璃切割,而难以应用于玻璃表面微结构制造。化学刻蚀加工玻璃微结构存在化学污染和加工效率低的缺陷。激光加工作为一种非接触式加工方法,具有工艺简单,污染小,图案直写不需要掩膜等优点。目前玻璃加工常采用10.6μm的CO2激光器用于玻璃切割或准分子激光用于钻孔及微结构加工。但准分子激光器平均功率较低,导致加工效率低,成本高。红外纳秒激光是目前应用最广泛的激光类型之一,而石英玻璃是很好的透红外材料,对于1064nm的红外纳秒激光吸收率很低,无法实现材料去除。
发明内容
为了克服上述问题,本发明提供了一种二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,针对石英玻璃无法吸收红外纳秒的激光的特点,本发明通过涂覆二氧化钛纳米颗粒涂层,增加了玻璃与二氧化钛纳米颗粒涂层界面处的红外纳秒激光吸收率,从而实现微结构的制造。本发明解决了石英玻璃对于1064nm的红外纳秒激光吸收率低,无法加工的问题。
为实现上述技术目的,本发明采用的技术方案如下:
一种二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,包括:
将二氧化钛纳米颗粒水凝胶滴至玻璃样件表面;
然后将另一片玻璃压在所述二氧化钛纳米颗粒水凝胶表面,使二氧化钛纳米颗粒水凝胶均匀分布在两片玻璃之间、水平静置至二氧化钛纳米颗粒水凝胶固化;
将两片玻璃分开,得到具有均匀二氧化钛纳米颗粒涂层的玻璃;
采用激光进行微结构加工;
后处理,即得具有微结构的玻璃样件。
本申请研究发现:水凝胶有一定的粘度,滴在玻璃表面无法全部铺展开,利用另一片玻璃的压力可以实现均匀涂覆,且一次可以涂覆两块玻璃。而经实验,其他涂覆方式难以保证整个玻璃表面的均匀性。
在一些实施例中,所述玻璃为石英玻璃,通过增加二氧化钛纳米颗粒涂层与玻璃基体界面处的红外纳秒激光吸收率,实现了微结构的高效低成本制造。
在一些实施例中,所述激光为红外纳秒激光。目前短波长的激光(例如532nm)不需要涂层就能直接加工玻璃,但激光器成本较高。红外激光为最常见和普及的激光器,因此,本发明的目的在于使用红外纳秒激光实现玻璃微结构制造。
在一些实施例中,所述红外纳秒激光的波长为1064nm,激光加工的参数为激光平均功率为2W~10W,脉冲频率为20~200kHz,扫描速度为1000~2000mm/min,提高了加工效率和加工精度。
厚度会影响激光的吸收率,二氧化钛涂层过厚的话激光能量绝大部分被涂层吸收,无法在玻璃表面形成微结构,因此,在一些实施例中,所述二氧化钛纳米颗粒水凝胶的浓度为35~40%、所述玻璃表面单位面积上的二氧化钛纳米颗粒水凝胶的体积为0.1-0.2μL/mm2。
其中,对于40mm×20mm的玻璃片所用的35%二氧化钛纳米颗粒水凝胶为30微升,效果较好。
在一些实施例中,水平静置的时间为5~10min,以使二氧化钛纳米颗粒水凝胶充分固化。
在一些实施例中,所述后处理的具体步骤为:分别用丙酮、无水乙醇、去离子水对玻璃样品进行超声清洗,去除表面粘附的二氧化钛纳米颗粒。
本发明还提供了任一上述的方法制备的具有微结构的玻璃样件。
本发明的有益效果在于:
(1)二氧化钛纳米颗粒无毒、粘附力强、具有良好的不透明性、白度和光亮度。
(2)二氧化钛纳米颗粒涂层与玻璃基体界面处的红外纳秒激光吸收率增加,实现了微结构的高效低成本制造。
(3)本申请的操作方法简单、成本低、具有普适性,易于规模化生产。
附图说明
构成本申请的一部分的说明书附图用来提供对本申请的进一步理解,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。
图1为本发明实施例1的二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法示意图;
图2为经过本发明实施例1制备方法加工后的玻璃微结构;
图3为经过本发明实施例1制备方法加工后的玻璃微流道;
图4为经过本发明实施例1制备方法加工后的玻璃微流道局部形貌图;
其中,1、40mm×20mm石英玻璃样件1,2、质量分数为35%的二氧化钛纳米颗粒水凝胶,3、移液器,4、40mm×20mm石英玻璃样件2,5、红外纳秒激光脉冲,6、激光器所用聚焦镜。
具体实施方式
应该指出,以下详细说明都是例示性的,旨在对本申请提供进一步的说明。除非另有指明,本申请使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。
需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本申请的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。
正如背景技术所介绍的,针对目前玻璃加工常采用的准分子激光器加工效率低,成本高,以及石英玻璃对于1064nm的红外纳秒激光吸收率很低,无法实现材料去除的问题。因此,本发明提出二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法包括以下步骤:
步骤(1):将二氧化钛纳米颗粒水凝胶滴至玻璃样件表面;
步骤(2):将另一片玻璃压在水凝胶表面,使得水凝胶均匀分布在两片玻璃之间,然后水平静置一段时间,使得二氧化钛纳米颗粒水凝胶晾干,
步骤(3)将玻璃片分开得到具有均匀二氧化钛纳米颗粒涂层的玻璃;
步骤(4):利用波长1064nm的红外纳秒激光器进行微结构加工。
步骤(5):后处理,将步骤3所得样件分别用丙酮、无水乙醇、去离子水超声清洗10分钟,以去除表面粘附的二氧化钛纳米颗粒,得到具有微结构的玻璃样件。
优选的,步骤(1)中对于40mm×20mm的玻璃片所用的35%二氧化钛纳米颗粒水凝胶为30微升,玻璃表面单位面积上的二氧化钛纳米颗粒水凝胶的体积为0.1-0.2μL/mm2。
优选的,步骤(2)中静置时间为5分钟。
下面结合具体的实施例,对本发明做进一步的详细说明,应该指出,所述具体实施例是对本发明的解释而不是限定。
实施例1:
步骤(1):参见附图1步骤1将30微升质量分数35%二氧化钛纳米颗粒水凝胶(阿法埃莎Alfa Aesar,Titanium(IV)oxide https://www.alfa.com/en/catalog/044517/)滴至40mm×20mm的玻璃样件表面,玻璃表面单位面积上的二氧化钛纳米颗粒水凝胶的体积为0.18μL/mm2;
步骤(2):参见附图1步骤2,将另一片40mm×20mm玻璃压在水凝胶表面,使得水凝胶均匀分布在两片玻璃之间,然后水平静置5分钟,使得二氧化钛纳米颗粒水凝胶晾干;
步骤(3):参见附图1步骤3,将玻璃片分开得到具有均匀二氧化钛纳米颗粒涂层的玻璃;
步骤(4):参见附图1步骤4,利用波长1064nm的红外纳秒激光器进行微结构加工;激光烧蚀的参数为激光平均功率为5W,脉冲频率为100kHz,扫描速度为2000mm/min。
步骤(5):后处理,将步骤3所得样件分别用丙酮、无水乙醇、去离子水超声清洗10分钟,以去除表面粘附的二氧化钛纳米颗粒,得到具有微结构的玻璃样件。附图2为最终加工的微沟槽三维形貌图,附图3为最终加工的微流道整体图片,附图4为微流道局部形貌图。
由附图2、4可以看出,微沟槽和微流道表面无裂纹产生,加工效果较好。
最后应该说明的是,以上所述仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述实施例所记载的技术方案进行修改,或者对其中部分进行等同替换。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。上述虽然结合附图对本发明的具体实施方式进行了描述,但并非对本发明保护范围的限制,所属领域技术人员应该明白,在本发明的技术方案的基础上,本领域技术人员不需要付出创造性劳动即可做出的各种修改或变形仍在本发明的保护范围以内。
Claims (7)
1.一种二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,其特征在于,包括:
将二氧化钛纳米颗粒水凝胶滴至玻璃样件表面;
然后将另一片玻璃压在所述二氧化钛纳米颗粒水凝胶表面,使二氧化钛纳米颗粒水凝胶均匀分布在两片玻璃之间、水平静置至二氧化钛纳米颗粒水凝胶固化;
将两片玻璃分开,得到具有均匀二氧化钛纳米颗粒涂层的玻璃;
采用激光进行微结构加工;
后处理,即得具有微结构的玻璃样件;
所述玻璃为石英玻璃;
所述激光为红外纳秒激光;
所述红外纳秒激光的波长为1064nm,激光加工的参数为激光平均功率为2W~10W,脉冲频率为20~200kHz,扫描速度为1000~2000mm/min。
2.如权利要求1所述的二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,其特征在于,单位面积上的二氧化钛纳米颗粒水凝胶的体积为0.1-0.2μL/mm2。
3.如权利要求1所述的二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,其特征在于,所述二氧化钛纳米颗粒水凝胶的浓度为35~40%。
4.如权利要求1所述的二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,其特征在于,所述水平静置的时间为5~10分钟。
5.如权利要求1所述的二氧化钛纳米颗粒辅助红外纳秒激光在玻璃表面制备微结构的方法,其特征在于,所述后处理的具体步骤为:分别用丙酮、无水乙醇、去离子水对玻璃样品进行超声清洗,去除表面粘附的二氧化钛纳米颗粒。
6.权利要求1-5任一项所述的方法制备的具有微结构的玻璃样件。
7.权利要求6所述的具有微结构的玻璃样件在生物医疗或航空航天领域的应用。
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