CN110631808A - Portable fast-reflection mirror performance automatic test system and method - Google Patents
Portable fast-reflection mirror performance automatic test system and method Download PDFInfo
- Publication number
- CN110631808A CN110631808A CN201910911829.XA CN201910911829A CN110631808A CN 110631808 A CN110631808 A CN 110631808A CN 201910911829 A CN201910911829 A CN 201910911829A CN 110631808 A CN110631808 A CN 110631808A
- Authority
- CN
- China
- Prior art keywords
- reflecting mirror
- fast
- theta
- axis
- max
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/005—Testing of reflective surfaces, e.g. mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Abstract
The invention discloses a portable automatic performance test system and method for a fast reflecting mirror, and relates to the technical field of performance test of fast reflecting mirrors. The method comprises the following steps: the parallel light receiving and transmitting module is arranged at the front end of the quick reflection mirror actuator; the image processing module is used for measuring the angle value of the fast reflecting mirror actuator according to the parallel light received by the parallel light receiving and transmitting module and reflected by the fast reflecting mirror actuator; the main control module is used for sending a control instruction to the parallel light transceiving module and the image processing module, reading the angle value of the fast reflecting mirror actuator measured by the image processing module, and generating performance index data of the deflection range, linearity, coupling error, repeated positioning precision, repeated electrifying precision and bandwidth of the fast reflecting mirror actuator according to the angle value of the fast reflecting mirror actuator and generating a test report; and the display module is used for displaying the performance index data and the test report of the fast reflecting mirror actuator. The invention does not need to manually record data and manually calculate, and improves the working efficiency of the performance test of the fast reflecting mirror.
Description
Technical Field
The invention relates to the technical field of performance test of a fast reflecting mirror, in particular to a portable automatic performance test system and a method of the fast reflecting mirror.
Background
The quick reflection mirror is one of important parts of a part of precision optical mechanical equipment, and the precision optical electrical equipment can control the transmission direction of transmitting light/receiving light in a small mechanical rotation angle range. The system has the advantages of high response speed, high precision, high resolution and the like, and is widely applied to the fields of astronomical telescopes, laser communication, laser equipment, image stabilizing optical systems, tracking and aiming optical systems and the like. At present, devices such as an autocollimator, a signal generator and an oscilloscope are mainly adopted for testing the performance of the fast reflecting mirror, wiring in the measuring process is complex and time-consuming, manual calculation is needed, and great workload is brought to testing personnel.
Disclosure of Invention
The invention aims to overcome the defects of the background technology and provide a portable automatic testing system and a method for the performance of a fast reflecting mirror.
The invention provides a portable automatic testing system for the performance of a fast reflecting mirror, which comprises:
the parallel light transceiver module is arranged at the front end of the fast reflector actuator and is used for transmitting parallel light to the fast reflector actuator and receiving the parallel light reflected by the fast reflector actuator;
the image processing module is used for measuring the angle value of the fast reflecting mirror actuator according to the parallel light received by the parallel light receiving and transmitting module and reflected by the fast reflecting mirror actuator;
the main control module is used for sending a control instruction to the parallel light transceiving module and the image processing module, reading the angle value of the fast reflecting mirror actuator measured by the image processing module, and generating performance index data of the deflection range, linearity, coupling error, repeated positioning precision, repeated electrifying precision and bandwidth of the fast reflecting mirror actuator according to the angle value of the fast reflecting mirror actuator and generating a test report;
and the display module is used for displaying the performance index data and the test report of the deflection range, the linearity, the coupling error, the repeated positioning precision, the repeated electrifying precision and the bandwidth of the fast-reflecting mirror actuator.
The preferred scheme is as follows: the fast reflection mirror actuator is connected with a fast reflection mirror drive controller, the fast reflection mirror drive controller is used for controlling the deflection angle of the fast reflection mirror actuator, the fast reflection mirror drive controller is connected with a master control module, the master control module is provided with an A/D conversion module and a D/A conversion module, the master control module sends instruction information to the fast reflection mirror drive controller in real time through the A/D conversion module, and the master control module collects the feedback signal of the fast reflection mirror drive controller in real time through the D/A conversion module.
The preferred scheme is as follows: the general control module sends the command signal of changing the X-axis angle of the fast reflecting mirror actuator to the fast reflecting mirror drive controller through the D/A conversion module, so that the X-axis of the fast reflecting mirror actuator moves from the minimum negative direction to the maximum positive direction, the command value of the Y-axis angle of the fast reflecting mirror actuator is 0mrad, and 20 groups of actual deflection angle values of the fast reflecting mirror actuator are collected according to the input at equal intervals: theta'x，i，j、θ'y1，i，j；
The general control module sends a command signal for changing the Y-axis angle of the fast reflecting mirror actuator to the fast reflecting mirror drive controller through the D/A conversion module, so that the Y-axis of the fast reflecting mirror actuator moves from the minimum negative direction to the maximum positive direction, the command value of the X-axis angle of the fast reflecting mirror actuator is 0mrad, and 20 groups of actual deflection angle values of the fast reflecting mirror actuator are acquired according to the equally spaced input: theta'x1，i，j、θ'y，i，j；
The master control module takes the abscissa as an idealThe rotation angle and the ordinate are actual rotation angles, a curve is drawn, a straight line is fitted according to the curve, and the maximum value of the absolute value of the ordinate deviation of the actually measured curve and the fitted straight line is as follows: delta thetax，j，max＝max{|θ'x，i，j-θx，i，jI, the linearity of the X-axis rotation for this test is: vx，j＝Δθx，j，max/(θ′x，20，j-θ′x，1，j)×100％；
The master control module uses the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle to draw a curve, and a straight line is fitted according to the curve, and the maximum value of the absolute value of the deviation of the actual measurement curve and the ordinate of the fitted straight line is as follows: delta thetay，j，max＝max{|θ'y，i，j-θy，i，jI, the linearity of the Y-axis rotation of this test is: vy，j＝Δθy，j，max/(θ′y，20，j-θ′y，1，j)×100％；
When the total control module measures the X-axis full-stroke rotation at a single time, the coupling error of the Y axis is as follows: cy，j＝max{θ′y1，i，j}-min{θ′y1，i，jIn mrad;
when the total control module measures the Y-axis full-stroke rotation at a single time, the coupling error of the X axis is as follows: cx，j＝max{θ′x1，i，j}-min{θ′x1，i，jIn mrad;
the main control module measures the X-axis deflection range at a single time: px，j＝θ′x，20，j-θ′x，1，jThe unit is mrad;
the main control module measures the Y-axis deflection range at a single time: py，j＝θ′y，20，j-θ′y，1，jIn mrad;
wherein, theta'x，i，j、θ'y1，i，j、θ'x1，i，j、θ'y，i，jFor measured deflection angle values, θx，i，j、θy，i，jThe unit is mrad for a deflection angle value corresponding to a fitting straight line drawn according to measured values; wherein i is the number of data points, and j is the number of measurement times.
The preferred scheme is as follows: the master control module sets the output voltage range of the A/D conversion module according to 10% of the deflection range, the frequency range of the output signal is increased upwards from 1Hz, and when the deflection angle value fed back by the fast-reflecting mirror drive controller collected by the D/A conversion module is attenuated to 0.707 time of the input value and the phase lag is less than 90 degrees, the frequency increase of the output signal is stopped;
the deflection angle value fed back by the fast reflecting mirror driving controller is attenuated to 0.707 times of the input value, and the phase lag is less than 90 degrees, so that the corresponding input frequency is the bandwidth.
The preferred scheme is as follows: the total control module enables the quick-reflection mirror actuator to deflect from 0mrad to the maximum forward voltage through the A/D conversion module, the total control module enables the quick-reflection mirror actuator to deflect back from the maximum forward voltage to 0mrad through the A/D conversion module, and the average value of the actual deflection angle of the quick-reflection mirror actuator in 1min is recorded: thetax，j、θy，j；
The main control module enables the quick-reflection mirror actuator to deflect from 0mrad to the maximum negative voltage through the A/D conversion module, the main control module enables the quick-reflection mirror actuator to deflect from the maximum negative voltage back to 0mrad through the A/D conversion module, and the average value of the actual deflection angle of the quick-reflection mirror actuator within 1min is recorded: thetax，j、θy，j；
The master control module reads data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated positioning precision on the X axis at the specified angle is as follows: RLAX ═ θx，max-θx，minIn mrad;
the master control module reads data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated positioning precision on the Y axis at the specified angle is as follows: RLAY ═ thetay，max-θy，minIn mrad.
The preferred scheme is as follows: the master control module controls the fast reflecting mirror drive controller to be electrified, and records the average value of the actual deflection angle of the fast reflecting mirror actuator displayed by the autocollimator within 1 min: thetax，j、θy，jThe master control module controls the fast reflecting mirror driving controller to be powered off, and the process is repeated for 3 times after waiting for 20 min;
the master control module reads data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated power-on precision at the specified angle X axis is: RPAX is θx，max-θx，minIn mrad;
the master control module reads data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated power-on precision at the specified angle Y axis is: RPAY ═ thetay，max-θy，minIn mrad.
The invention provides a portable fast reflecting mirror performance automatic test method on the other hand, which comprises the following steps:
transmitting parallel light to the fast reflecting mirror actuator, receiving the parallel light reflected by the fast reflecting mirror actuator, and measuring an angle value of the fast reflecting mirror actuator according to the reflected parallel light;
generating performance index data of deflection range, linearity, coupling error, repeated positioning precision, repeated electrifying precision and bandwidth of the fast reflecting mirror actuator according to the angle value of the fast reflecting mirror actuator and generating a test report;
and displaying the generated performance index data of the deflection range, the linearity, the coupling error, the repeated positioning precision, the repeated electrifying precision and the bandwidth of the fast-reflecting mirror actuator and the generated test report.
The preferred scheme is as follows: changing the angle of the X axis of the fast reflecting mirror actuator to ensure that the X axis of the fast reflecting mirror actuator moves from the minimum in the negative direction to the maximum in the positive direction, wherein the command value of the angle of the Y axis of the fast reflecting mirror actuator is 0mrad, and acquiring 20 groups of actual deflection angle values of the fast reflecting mirror actuator according to the input at equal intervals: theta'x，i，j、θ'y1，i，j；
Changing a command signal of a Y-axis angle of the fast reflecting mirror actuator to enable the Y-axis of the fast reflecting mirror actuator to move from a minimum in a negative direction to a maximum in a positive direction, wherein a command value of an X-axis angle of the fast reflecting mirror actuator is 0mrad, and collecting 20 groups of actual deflection angle values of the fast reflecting mirror actuator according to input at equal intervals: theta'x1，i，j、θ'y，i，j；
In the abscissaDrawing a curve for the ideal rotation angle and the vertical coordinate for the actual rotation angle, fitting a straight line according to the curve, wherein the maximum value of the absolute value of the vertical coordinate deviation between the actually measured curve and the fitted straight line is as follows: delta thetax，j，max＝max{|θ'x，i，j-θx，i，jI, the linearity of the X-axis rotation for this test is: vx，j＝Δθx，j，max/(θ′x，20，j-θ′x，1，j)×100％；
Drawing a curve by taking the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle, fitting a straight line according to the curve, and obtaining the maximum value of the absolute value of the deviation of the measured curve and the ordinate of the fitted straight line: delta thetay，j，max＝max{|θ'y，i，j-θy，i，jI, the linearity of the Y-axis rotation of this test is: vy，j＝Δθy，j，max/(θ′y，20，j-θ′y，1，j)×100％；
When the X-axis full-stroke rotation is measured at a single time, the coupling error of the Y-axis is as follows: cy，j＝max{θ′y1，i，j}-min{θ′y1，i，jIn mrad;
when the Y-axis full-stroke rotation is measured at a single time, the coupling error of the X-axis is as follows: cx，j＝max{θ′x1，i，j}-min{θ′x1，i，jIn mrad;
single measurement X-axis deflection range: px，j＝θ′x，20，j-θ′x，1，jThe unit is mrad;
single measurement Y-axis deflection range: py，j＝θ′y，20，j-θ′y，1，jIn mrad;
wherein, theta'x，i，j、θ'y1，i，j、θ'x1，i，j、θ'y，i，jFor measured deflection angle values, θx，i，j、θy，i，jThe unit is mrad for a deflection angle value corresponding to a fitting straight line drawn according to measured values; wherein i is the number of data points, and j is the number of measurement times.
The preferred scheme is as follows: setting an output voltage range according to 10% of the deflection range, wherein the frequency range of the output signal is increased upwards from 1Hz, and when the deflection angle value is attenuated to 0.707 times of the input value and the phase lag is less than 90 degrees, the frequency increase of the output signal is stopped;
when the deflection angle value is attenuated to 0.707 times the input value and the phase lag is less than 90 deg., the corresponding input frequency is the bandwidth.
The preferred scheme is as follows: the average of the actual deflection angles of the mirror actuators within 1min was recorded by varying the voltage at which the mirror actuators deflected from 0mrad to the maximum forward, and deflecting the mirror actuators from the maximum forward back to 0 mrad: thetax，j、θy，j；
Changing the voltage of the quick reflection mirror actuator deflecting from 0mrad to the maximum negative direction, enabling the quick reflection mirror actuator to deflect from the maximum negative direction to 0mrad, and recording the average value of the actual deflection angles of the quick reflection mirror actuator within 1 min: thetax，j、θy，j；
Taking data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated positioning precision on the X axis at the specified angle is as follows: RLAX ═ θx，max-θx，minIn mrad;
taking data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated positioning precision on the Y axis at the specified angle is as follows: RLAY ═ thetay，max-θy，minIn mrad;
and electrifying the fast reflecting mirror driving controller, driving the fast reflecting mirror actuator to deflect, and recording the average value of the actual deflection angle of the fast reflecting mirror actuator displayed by the autocollimator within 1 min: thetax，j、θy，jThe fast reflecting mirror driving controller is powered off, the fast reflecting mirror actuator is stopped to be driven to deflect, and the process is repeated for 3 times after 20 min;
taking data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated power-on precision at the specified angle X axis is: RPAX is θx，max-θx，minIn mrad;
taking data thetay，jMaximum value ofAnd the minimum value: thetay，max、θy，minThen, the repeated power-on precision at the specified angle Y axis is: RPAY ═ thetay，max-θy，minIn mrad.
On the basis of the technical scheme, compared with the prior art, the invention has the following advantages:
the invention relates to a portable automatic test system for the performance of a fast reflecting mirror, which adopts a parallel light receiving and transmitting module, an image processing module, a master control module and a display module to complete the construction of the automatic test system for the performance of the fast reflecting mirror. The automatic test system for the performance of the fast reflecting mirror can simply, quickly and automatically test and solve the performance index of the fast reflecting mirror, does not need to manually record data and manually calculate, is full-automatic in the measurement process, and does not need excessive manual intervention. And automatically generating performance index data of the deflection range, the linearity, the coupling error, the repeated positioning precision, the repeated power-on precision and the bandwidth of the fast reflecting mirror actuator and generating a test report. The working efficiency of the performance test of the fast reflecting mirror is improved, and the automatic test requirements of various performance indexes of the fast reflecting mirror can be met.
Drawings
FIG. 1 is a schematic structural diagram of an automatic testing system for performance of a fast reflective mirror according to an embodiment of the present invention;
FIG. 2 is a schematic block diagram of an automatic testing system for the performance of a fast reflective mirror according to an embodiment of the present invention;
fig. 3 is a display interface diagram of the automatic testing system for the performance of the fast reflective mirror according to the embodiment of the present invention.
Reference numerals: the system comprises a 1-parallel light transceiving module, a 2-display module, a 3-image processing module, a 4-master control module, a 5-fast reflecting mirror driving controller and a 6-fast reflecting mirror actuator.
Detailed Description
The invention is described in further detail below with reference to the figures and the embodiments.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the application, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Example 1
Referring to fig. 1 and fig. 2, an embodiment of the present invention provides a portable fast-reflection mirror performance automatic testing system, including:
the parallel light transceiver module 1 is arranged at the front end of the fast reflector actuator 6, and the parallel light transceiver module 1 is used for emitting parallel light to the fast reflector actuator 6 and receiving the parallel light reflected by the fast reflector actuator 6.
The image processing module 3 is electrically connected with the parallel light transceiver module 1, and the image processing module 3 is used for measuring the angle value of the fast reflector actuator 6 according to the parallel light reflected by the fast reflector actuator 6 received by the parallel light transceiver module 1.
The total control module 4 is electrically connected with the parallel light transceiver module 1 and the image processing module 3, the total control module 4 is used for sending a control instruction to the parallel light transceiver module 1 and the image processing module 3, reading the angle value of the fast-reflecting mirror actuator 6 measured by the image processing module 3, and generating the deflection range, linearity, coupling error, repeated positioning accuracy, repeated electrification accuracy and bandwidth performance index data of the fast-reflecting mirror actuator 6 according to the angle value of the fast-reflecting mirror actuator 6 and generating a test report.
The fast reflecting mirror actuator 6 is connected with a fast reflecting mirror driving controller 5, the fast reflecting mirror driving controller 5 is used for controlling the deflection angle of the fast reflecting mirror actuator 6, and the fast reflecting mirror driving controller 5 is connected with the master control module 4; the master control module 4 is provided with an A/D conversion module and a D/A conversion module, the master control module 4 sends instruction information to the fast reflecting mirror drive controller 5 in real time through the A/D conversion module, and the master control module 4 collects the feedback signal of the fast reflecting mirror drive controller 5 in real time through the D/A conversion module.
And the display module 2 is electrically connected with the master control module 4 and is used for displaying performance index data and test reports of the deflection range, linearity, coupling error, repeated positioning precision, repeated electrifying precision and bandwidth of the fast-reflecting mirror actuator 6.
Specifically, the method comprises the following steps: the general control module 4 sends a command signal for changing the angle of the X axis of the fast reflecting mirror actuator 6 to the fast reflecting mirror driving controller 5 through the D/A conversion module, so that the X axis of the fast reflecting mirror actuator 6 moves from the minimum angle value of the negative direction to the maximum angle value of the positive direction, the command value of the Y axis angle of the fast reflecting mirror actuator 6 is 0mrad, namely, the Y axis angle of the fast reflecting mirror actuator 6 is kept unchanged, and 20 groups of actual deflection angle values of the fast reflecting mirror actuator 6 are collected according to the input of equal intervals: theta'x，i，j、θ'y1，i，j；
The general control module 4 sends a command signal for changing the angle of the Y axis of the fast reflecting mirror actuator 6 to the fast reflecting mirror driving controller 5 through the D/A conversion module, so that the Y axis of the fast reflecting mirror actuator 6 moves from the minimum angle value in the negative direction to the maximum angle value in the positive direction, the command value of the angle of the X axis of the fast reflecting mirror actuator is 0mrad, namely, the angle of the X axis of the fast reflecting mirror actuator 6 is kept unchanged, and 20 groups of actual deflection angle values of the fast reflecting mirror actuator 6 are collected according to the input of equal intervals: theta'x1，i，j、θ'y，i，j；
The master control module 4 uses the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle to draw a curve, and a straight line is fitted according to the curve, and the maximum value of the absolute value of the deviation of the actual measurement curve and the ordinate of the fitted straight line is as follows: delta thetax，j，max＝max{|θ'x，i，j-θx，i，jI, the linearity of the X-axis rotation for this test is: vx，j＝Δθx，j，max/(θ′x，20，j-θ′x，1，j)×100％；
The master control module 4 uses the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle to draw a curve, and a straight line is fitted according to the curve, and the maximum value of the absolute value of the deviation of the actual measurement curve and the ordinate of the fitted straight line is as follows: delta thetay，j，max＝max{|θ'y，i，j-θy，i，jI, the linearity of the Y-axis rotation of this test is: vy，j＝Δθy，j，max/(θ′y，20，j-θ′y，1，j)×100％；
When the total control module 4 measures the X-axis full-stroke rotation of the fast reflecting mirror actuator 6 at a time, the coupling error of the Y axis is as follows: cy，j＝max{θ′y1，i，j}-min{θ′y1，i，jIn mrad;
when the total control module 4 measures the Y-axis full-stroke rotation of the fast reflecting mirror actuator 6 at a time, the coupling error of the X axis is as follows: cx，j＝max{θ′x1，i，j}-min{θ′x1，i，jIn mrad;
the general control module 4 measures the X-axis deflection range of the fast-reflecting mirror actuator 6 in a single time: px，j＝θ′x，20，j-θ′x，1，jThe unit is mrad;
the general control module 4 measures the Y-axis deflection range of the fast-reflecting mirror actuator 6 in a single time: py，j＝θ′y，20，j-θ′y，1，jIn mrad;
wherein, theta'x，i，j、θ'y1，i，j、θ'x1，i，j、θ'y，i，jFor measured deflection angle values, θx，i，j、θy，i，jThe unit is mrad for a deflection angle value corresponding to a fitting straight line drawn according to measured values; wherein i is the number of data points, and j is the number of measurement times.
The general control module 4 sets the output voltage range of the A/D conversion module according to 10% of the X-axis deflection range of the fast-reflecting mirror actuator 6, the frequency range of the output signal is increased upwards from 1Hz, and when the deflection angle value fed back by the fast-reflecting mirror drive controller 5 collected by the D/A conversion module is attenuated to 0.707 time of the input value and the phase lag is less than 90 degrees, the frequency increase of the output signal is stopped. The deflection angle value fed back by the fast reflecting mirror drive controller 5 is attenuated to 0.707 times of the input value, and the phase lag is less than 90 degrees, so that the corresponding input frequency is the X-axis bandwidth of the fast reflecting mirror actuator 6;
the general control module 4 sets the output voltage range of the A/D conversion module according to 10% of the Y-axis deflection range of the fast-reflecting mirror actuator 6, the frequency range of the output signal is increased upwards from 1Hz, and when the deflection angle value fed back by the fast-reflecting mirror drive controller 5 collected by the D/A conversion module is attenuated to 0.707 time of the input value and the phase lag is less than 90 degrees, the frequency increase of the output signal is stopped. The value of the deflection angle fed back by the fast reflecting mirror drive controller 5 is attenuated to 0.707 times of the input value and the phase lag is less than 90 deg., and the corresponding input frequency is the Y-axis bandwidth of the fast reflecting mirror actuator 6.
The total control module 4 enables the fast reflecting mirror actuator 6 to deflect from 0mrad to the maximum forward voltage through the A/D conversion module, the total control module 4 enables the fast reflecting mirror actuator 6 to deflect from the maximum forward voltage to 0mrad through the A/D conversion module, and the average value of the actual deflection angle of the fast reflecting mirror actuator 6 in 1min is recorded: thetax，j、θy，j；
The total control module 4 enables the fast reflecting mirror actuator 6 to deflect from 0mrad to the maximum negative voltage through the A/D conversion module, the total control module 4 enables the fast reflecting mirror actuator to deflect from the maximum negative voltage back to 0mrad through the A/D conversion module, and the average value of the actual deflection angles of the fast reflecting mirror actuator within 1min is recorded: thetax，j、θy，j；
The master control module 4 reads data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated positioning precision on the X axis at the specified angle is as follows: RLAX ═ θx，max-θx，minIn mrad;
the master control module 4 reads data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated positioning precision on the Y axis at the specified angle is as follows: RLAY ═ thetay，max-θy，minIn mrad.
The master control module 4 controls the fast reflecting mirror drive controller 5 to be powered on, and records the average value of the actual deflection angle of the fast reflecting mirror actuator 6 displayed by the autocollimator within 1 min: thetax，j、θy，jThe master control module 4 controls the fast reflecting mirror driving controller 5 to power off, and repeats the above process for 3 times after waiting for 20 min;
the master control module 4 reads data thetax，jMaximum and minimum values of：θx，max、θx，minThen, the repeated power-on precision at the specified angle X axis is: RPAX is θx，max-θx，minIn mrad;
the master control module 4 reads data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated power-on precision at the specified angle Y axis is: RPAY ═ thetay，max-θy，minIn mrad.
Example 2
Referring to fig. 1 and 3, according to still another aspect of the present invention, there is provided a portable automatic testing method for performance of a fast reflective mirror, including the steps of:
step 1, emitting parallel light to the fast reflecting mirror actuator 6, receiving the parallel light reflected by the fast reflecting mirror actuator 6, and measuring an angle value of the fast reflecting mirror actuator 6 according to the reflected parallel light.
And 2, generating performance index data of the deflection range, the linearity, the coupling error, the repeated positioning precision, the repeated electrifying precision and the bandwidth of the fast reflecting mirror actuator 6 according to the angle value of the fast reflecting mirror actuator 6 and generating a test report.
And 3, displaying the generated performance index data of the deflection range, the linearity, the coupling error, the repeated positioning precision, the repeated electrifying precision and the bandwidth of the fast-reflecting mirror actuator 6 and the generated test report.
Specifically, the method comprises the following steps: changing the angle of the X axis of the fast reflecting mirror actuator 6 to make the X axis of the fast reflecting mirror actuator 6 move from the minimum angle value in the negative direction to the maximum angle value in the positive direction, wherein the instruction value of the Y axis angle of the fast reflecting mirror actuator 6 is 0mrad, namely keeping the Y axis angle of the fast reflecting mirror actuator 6 unchanged, and acquiring 20 groups of actual deflection angle values of the fast reflecting mirror actuator 6 according to the input at equal intervals: theta'x，i，j、θ'y1，i，j；
Changing the command signal of the Y-axis angle of the fast-reflecting mirror actuator 6 to make the Y-axis of the fast-reflecting mirror actuator 6 move from the minimum angle value in the negative direction to the maximum angle value in the positive direction, and the command value of the X-axis angle of the fast-reflecting mirror actuator 6 is 0mrad, namely keeping the X-axis angle of the fast-reflecting mirror actuator 6 unchangedInstead, 20 sets of actual deflection angle values of the fast mirror actuator 6 are acquired according to equally spaced inputs: theta'x1，i，j、θ'y，i，j；
Drawing a curve by taking the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle, fitting a straight line according to the curve, and obtaining the maximum value of the absolute value of the deviation of the measured curve and the ordinate of the fitted straight line: delta thetax，j，max＝max{|θ'x，i，j-θx，i，jI, the linearity of the X-axis rotation for this test is: vx，j＝Δθx，j，max/(θ′x，20，j-θ′x，1，j)×100％；
Drawing a curve by taking the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle, fitting a straight line according to the curve, and obtaining the maximum value of the absolute value of the deviation of the measured curve and the ordinate of the fitted straight line: delta thetay，j，max＝max{|θ'y，i，j-θy，i，jI, the linearity of the Y-axis rotation of this test is: vy，j＝Δθy，j，max/(θ′y，20，j-θ′y，1，j)×100%；
When the X-axis full-stroke rotation of the fast-reflection mirror actuator 6 is measured once, the coupling error of the Y axis is as follows: cy，j＝max{θ′y1，i，j}-min{θ′y1，i，jIn mrad;
when the Y-axis full-stroke rotation of the fast-reflection mirror actuator 6 is measured once, the coupling error of the X-axis is as follows: cx，j＝max{θ′x1，i，j}-min{θ′x1，i，jIn mrad;
single measurement of the X-axis deflection range of the fast mirror actuator 6: px，j＝θ′x，20，j-θ′x，1，jThe unit is mrad;
single measurement of the Y-axis deflection range of the fast mirror actuator 6: py，j＝θ′y，20，j-θ′y，1，jIn mrad;
wherein, theta'x，i，j、θ'y1，i，j、θ'x1，i，j、θ'y，i，jFor the value of the measured deflection angle,θx，i，j、θy，i，jthe unit is mrad for a deflection angle value corresponding to a fitting straight line drawn according to measured values; wherein i is the number of data points, and j is the number of measurement times.
Setting an output voltage range according to 10% of the X-axis deflection range of the fast-reflection mirror actuator 6, increasing the output signal frequency range from 1Hz upwards, and stopping the output signal frequency increase when the deflection angle value is attenuated to 0.707 times of the input value and the phase lag is less than 90 degrees; when the deflection angle value is attenuated to 0.707 times of the input value and the phase lag is less than 90 degrees, the corresponding input frequency is the X-axis bandwidth of the fast-reflection mirror actuator 6;
setting an output voltage range according to 10% of the Y-axis deflection range of the fast-reflection mirror actuator 6, increasing the output signal frequency range from 1Hz upwards, and stopping the output signal frequency increase when the deflection angle value is attenuated to 0.707 times of the input value and the phase lag is less than 90 degrees; when the deflection angle value is attenuated to 0.707 times the input value and the phase lag is less than 90 deg., the corresponding input frequency is the Y-axis bandwidth of the fast mirror actuator 6.
The voltage at which the mirror actuator 6 deflects from 0mrad to the maximum forward is varied, the mirror actuator 6 is deflected from the maximum forward back to 0mrad, and the average of the actual deflection angles of the mirror actuator over 1min is recorded: thetax，j、θy，j；
Changing the voltage of the fast mirror actuator 6 deflecting from 0mrad to the negative maximum, making the fast mirror actuator 6 deflecting from the negative maximum back to the voltage of 0mrad, recording the average value of the actual deflection angles of the fast mirror actuator within 1 min: thetax，j、θy，j；
Taking data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated positioning precision on the X axis at the specified angle is as follows: RLAX ═ θx，max-θx，minIn mrad;
taking data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated positioning precision on the Y axis at the specified angle is as follows: RLAY ═ thetay，max-θy，minIn the unit ofmrad。
And powering on the fast reflecting mirror driving controller 5, driving the fast reflecting mirror actuator 6 to deflect, and recording the average value of the actual deflection angle of the fast reflecting mirror actuator 6 displayed by the autocollimator within 1 min: thetax，j、θy，jThe fast reflecting mirror driving controller 5 is powered off, the fast reflecting mirror actuator 6 is stopped to be driven to deflect, and the process is repeated for 3 times after 20 min;
taking data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated power-on precision at the specified angle X axis is: RPAX is θx，max-θx，minIn mrad;
taking data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated power-on precision at the specified angle Y axis is: RPAY ═ thetay，max-θy，minIn mrad.
Various modifications and variations of the embodiments of the present invention may be made by those skilled in the art, and they are also within the scope of the present invention, provided they are within the scope of the claims of the present invention and their equivalents.
What is not described in detail in the specification is prior art that is well known to those skilled in the art.
Claims (10)
1. A portable fast-reflection mirror performance automatic test system is characterized by comprising:
the parallel light transceiver module is arranged at the front end of the fast reflector actuator and is used for transmitting parallel light to the fast reflector actuator and receiving the parallel light reflected by the fast reflector actuator;
the image processing module is used for measuring the angle value of the fast reflecting mirror actuator according to the parallel light received by the parallel light receiving and transmitting module and reflected by the fast reflecting mirror actuator;
the main control module is used for sending a control instruction to the parallel light transceiving module and the image processing module, reading the angle value of the fast reflecting mirror actuator measured by the image processing module, and generating performance index data of the deflection range, linearity, coupling error, repeated positioning precision, repeated electrifying precision and bandwidth of the fast reflecting mirror actuator according to the angle value of the fast reflecting mirror actuator and generating a test report;
and the display module is used for displaying the performance index data and the test report of the deflection range, the linearity, the coupling error, the repeated positioning precision, the repeated electrifying precision and the bandwidth of the fast-reflecting mirror actuator.
2. The portable automatic fast reflecting mirror performance test system as claimed in claim 1, wherein:
the fast reflection mirror actuator is connected with a fast reflection mirror drive controller, the fast reflection mirror drive controller is used for controlling the deflection angle of the fast reflection mirror actuator, the fast reflection mirror drive controller is connected with a master control module, the master control module is provided with an A/D conversion module and a D/A conversion module, the master control module sends instruction information to the fast reflection mirror drive controller in real time through the A/D conversion module, and the master control module collects the feedback signal of the fast reflection mirror drive controller in real time through the D/A conversion module.
3. The portable automatic fast reflecting mirror performance test system as claimed in claim 2, wherein:
the general control module sends the command signal of changing the X-axis angle of the fast reflecting mirror actuator to the fast reflecting mirror drive controller through the D/A conversion module, so that the X-axis of the fast reflecting mirror actuator moves from the minimum negative direction to the maximum positive direction, the command value of the Y-axis angle of the fast reflecting mirror actuator is 0mrad, and 20 groups of actual deflection angle values of the fast reflecting mirror actuator are collected according to the input at equal intervals: theta'x，i，j、θ'y1，i，j；
The general control module sends a command signal for changing the Y-axis angle of the fast reflecting mirror actuator to the fast reflecting mirror drive controller through the D/A conversion module, so that the Y-axis of the fast reflecting mirror actuator moves from the minimum negative direction to the maximum positive direction, the command value of the X-axis angle of the fast reflecting mirror actuator is 0mrad, and 20 groups of actual deflection angle values of the fast reflecting mirror actuator are acquired according to the equally spaced input: theta'x1，i，j、θ'y，i，j；
The master control module uses the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle to draw a curve, and a straight line is fitted according to the curve, and the maximum value of the absolute value of the deviation of the actual measurement curve and the ordinate of the fitted straight line is as follows: delta thetax，j，max＝max{|θ'x，i，j-θx，i，jI, the linearity of the X-axis rotation for this test is: vx，j＝Δθx，j，max/(θ′x，20，j-θ′x，1，j)×100％；
The master control module uses the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle to draw a curve, and a straight line is fitted according to the curve, and the maximum value of the absolute value of the deviation of the actual measurement curve and the ordinate of the fitted straight line is as follows: delta thetay，j，max＝max{|θ'y，i，j-θy，i，jI, the linearity of the Y-axis rotation of this test is: vy，j＝Δθy，j，max/(θ′y，20，j-θ′y，1，j)×100％；
When the total control module measures the X-axis full-stroke rotation at a single time, the coupling error of the Y axis is as follows: cy，j＝max{θ′y1，i，j}-min{θ′y1，i，jIn mrad;
when the total control module measures the Y-axis full-stroke rotation at a single time, the coupling error of the X axis is as follows: cx，j＝max{θ′x1，i，j}-min{θ′x1，i，jIn mrad;
the main control module measures the X-axis deflection range at a single time: px，j＝θ′x，20，j-θ′x，1，jThe unit is mrad;
the main control module measures the Y-axis deflection range at a single time: py，j＝θ′y，20，j-θ′y，1，jIn mrad;
wherein, theta'x，i，j、θ'y1，i，j、θ'x1，i，j、θ'y，i，jFor measured deflection angle values, θx，i，j、θy，i，jThe unit is mrad for a deflection angle value corresponding to a fitting straight line drawn according to measured values; wherein i is the number of data points, j isThe number of measurements.
4. A portable automatic test system for the performance of a fast reflecting mirror as claimed in claim 3, wherein:
the master control module sets the output voltage range of the A/D conversion module according to 10% of the deflection range, the frequency range of the output signal is increased upwards from 1Hz, and when the deflection angle value fed back by the fast-reflecting mirror drive controller collected by the D/A conversion module is attenuated to 0.707 time of the input value and the phase lag is less than 90 degrees, the frequency increase of the output signal is stopped;
the deflection angle value fed back by the fast reflecting mirror driving controller is attenuated to 0.707 times of the input value, and the phase lag is less than 90 degrees, so that the corresponding input frequency is the bandwidth.
5. The portable automatic fast reflecting mirror performance test system as claimed in claim 2, wherein:
the total control module enables the quick-reflection mirror actuator to deflect from 0mrad to the maximum forward voltage through the A/D conversion module, the total control module enables the quick-reflection mirror actuator to deflect back from the maximum forward voltage to 0mrad through the A/D conversion module, and the average value of the actual deflection angle of the quick-reflection mirror actuator in 1min is recorded: thetax，j、θy，j；
The main control module enables the quick-reflection mirror actuator to deflect from 0mrad to the maximum negative voltage through the A/D conversion module, the main control module enables the quick-reflection mirror actuator to deflect from the maximum negative voltage back to 0mrad through the A/D conversion module, and the average value of the actual deflection angle of the quick-reflection mirror actuator within 1min is recorded: thetax，j、θy，j；
The master control module reads data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated positioning precision on the X axis at the specified angle is as follows: RLAX ═ θx，max-θx，minIn mrad;
the master control module reads data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated positioning precision on the Y axis at the specified angle is as follows: RLAY ═ thetay，max-θy，minIn mrad.
6. The portable automatic fast reflecting mirror performance test system as claimed in claim 2, wherein:
the master control module controls the fast reflecting mirror drive controller to be electrified, and records the average value of the actual deflection angle of the fast reflecting mirror actuator displayed by the autocollimator within 1 min: thetax，j、θy，jThe master control module controls the fast reflecting mirror driving controller to be powered off, and the process is repeated for 3 times after waiting for 20 min;
the master control module reads data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated power-on precision at the specified angle X axis is: RPAX is θx，max-θx，minIn mrad;
the master control module reads data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated power-on precision at the specified angle Y axis is: RPAY ═ thetay，max-θy，minIn mrad.
7. A portable fast reflecting mirror performance automatic test method is characterized by comprising the following steps:
transmitting parallel light to the fast reflecting mirror actuator, receiving the parallel light reflected by the fast reflecting mirror actuator, and measuring an angle value of the fast reflecting mirror actuator according to the reflected parallel light;
generating performance index data of deflection range, linearity, coupling error, repeated positioning precision, repeated electrifying precision and bandwidth of the fast reflecting mirror actuator according to the angle value of the fast reflecting mirror actuator and generating a test report;
and displaying the generated performance index data of the deflection range, the linearity, the coupling error, the repeated positioning precision, the repeated electrifying precision and the bandwidth of the fast-reflecting mirror actuator and the generated test report.
8. The method for automatically testing the performance of the portable fast reflecting mirror according to claim 7, wherein:
changing the angle of the X axis of the fast reflecting mirror actuator to ensure that the X axis of the fast reflecting mirror actuator moves from the minimum in the negative direction to the maximum in the positive direction, wherein the command value of the angle of the Y axis of the fast reflecting mirror actuator is 0mrad, and acquiring 20 groups of actual deflection angle values of the fast reflecting mirror actuator according to the input at equal intervals: theta'x，i，j、θ'y1，i，j；
Changing a command signal of a Y-axis angle of the fast reflecting mirror actuator to enable the Y-axis of the fast reflecting mirror actuator to move from a minimum in a negative direction to a maximum in a positive direction, wherein a command value of an X-axis angle of the fast reflecting mirror actuator is 0mrad, and collecting 20 groups of actual deflection angle values of the fast reflecting mirror actuator according to input at equal intervals: theta'x1，i，j、θ'y，i，j；
Drawing a curve by taking the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle, fitting a straight line according to the curve, and obtaining the maximum value of the absolute value of the deviation of the measured curve and the ordinate of the fitted straight line: delta thetax，j，max＝max{|θ'x，i，j-θx，i，jI, the linearity of the X-axis rotation for this test is: vx，j＝Δθx，j，max/(θ′x，20，j-θ′x，1，j)×100％；
Drawing a curve by taking the abscissa as an ideal rotation angle and the ordinate as an actual rotation angle, fitting a straight line according to the curve, and obtaining the maximum value of the absolute value of the deviation of the measured curve and the ordinate of the fitted straight line: delta thetay，j，max＝max{|θ'y，i，j-θy，i，jI, the linearity of the Y-axis rotation of this test is: vy，j＝Δθy，j，max/(θ′y，20，j-θ′y，1，j)×100%；
When the X-axis full-stroke rotation is measured at a single time, the coupling error of the Y-axis is as follows: cy，j＝max{θ′y1，i，j}-min{θ′y1，i，jIn mrad;
when the Y-axis full-stroke rotation is measured at a single time, the coupling error of the X-axis is as follows: cx，j＝max{θ′x1，i，j}-min{θ′x1，i，jIn mrad;
single measurement X-axis deflection range: px，j＝θ′x，20，j-θ′x，1，jThe unit is mrad;
single measurement Y-axis deflection range: py，j＝θ′y，20，j-θ′y，1，jIn mrad;
wherein, theta'x，i，j、θ'y1，i，j、θ'x1，i，j、θ'y，i，jFor measured deflection angle values, θx，i，j、θy，i，jThe unit is mrad for a deflection angle value corresponding to a fitting straight line drawn according to measured values; wherein i is the number of data points, and j is the number of measurement times.
9. The method for automatically testing the performance of the portable fast reflecting mirror according to claim 8, wherein:
setting an output voltage range according to 10% of the deflection range, wherein the frequency range of the output signal is increased upwards from 1Hz, and when the deflection angle value is attenuated to 0.707 times of the input value and the phase lag is less than 90 degrees, the frequency increase of the output signal is stopped;
when the deflection angle value is attenuated to 0.707 times the input value and the phase lag is less than 90 deg., the corresponding input frequency is the bandwidth.
10. The method for automatically testing the performance of the portable fast reflecting mirror according to claim 8, wherein:
the average of the actual deflection angles of the mirror actuators within 1min was recorded by varying the voltage at which the mirror actuators deflected from 0mrad to the maximum forward, and deflecting the mirror actuators from the maximum forward back to 0 mrad: thetax，j、θy，j；
Changing the voltage of the quick reflection mirror actuator deflecting from 0mrad to the maximum negative direction, enabling the quick reflection mirror actuator to deflect from the maximum negative direction to 0mrad, and recording the average value of the actual deflection angles of the quick reflection mirror actuator within 1 min: thetax，j、θy，j；
Taking data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated positioning precision on the X axis at the specified angle is as follows: RLAX ═ θx，max-θx，minIn mrad;
taking data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated positioning precision on the Y axis at the specified angle is as follows: RLAY ═ thetay，max-θy，minIn mrad;
and electrifying the fast reflecting mirror driving controller, driving the fast reflecting mirror actuator to deflect, and recording the average value of the actual deflection angle of the fast reflecting mirror actuator displayed by the autocollimator within 1 min: thetax，j、θy，jThe fast reflecting mirror driving controller is powered off, the fast reflecting mirror actuator is stopped to be driven to deflect, and the process is repeated for 3 times after 20 min;
taking data thetax，jMaximum and minimum values of (a): thetax，max、θx，minThen, the repeated power-on precision at the specified angle X axis is: RPAX is θx，max-θx，minIn mrad;
taking data thetay，jMaximum and minimum values of (a): thetay，max、θy，minThen, the repeated power-on precision at the specified angle Y axis is: RPAY ═ thetay，max-θy，minIn mrad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910911829.XA CN110631808A (en) | 2019-09-25 | 2019-09-25 | Portable fast-reflection mirror performance automatic test system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910911829.XA CN110631808A (en) | 2019-09-25 | 2019-09-25 | Portable fast-reflection mirror performance automatic test system and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110631808A true CN110631808A (en) | 2019-12-31 |
Family
ID=68973978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910911829.XA Pending CN110631808A (en) | 2019-09-25 | 2019-09-25 | Portable fast-reflection mirror performance automatic test system and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110631808A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215431A (en) * | 2014-09-25 | 2014-12-17 | 中国工程物理研究院应用电子学研究所 | Rapid tilting mirror performance testing device |
| CN104236860A (en) * | 2014-09-25 | 2014-12-24 | 中国工程物理研究院应用电子学研究所 | Quick reflection mirror traceability testing device |
| JP2016176914A (en) * | 2014-09-30 | 2016-10-06 | ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ | Aero-wave instrument for measurement of optical wave-front disturbances in airflow around airborne systems |
| CN108287404A (en) * | 2017-12-23 | 2018-07-17 | 湖北航天技术研究院总体设计所 | A kind of fast mirror bandwidth calculation method and Simulation Calculation |
| WO2018231285A1 (en) * | 2017-06-13 | 2018-12-20 | Raytheon Company | Calibration method and system for fast steering mirror |
| CN109520425A (en) * | 2018-12-29 | 2019-03-26 | 湖北航天技术研究院总体设计所 | A kind of essence tracking error test device and test method |
-
2019
- 2019-09-25 CN CN201910911829.XA patent/CN110631808A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215431A (en) * | 2014-09-25 | 2014-12-17 | 中国工程物理研究院应用电子学研究所 | Rapid tilting mirror performance testing device |
| CN104236860A (en) * | 2014-09-25 | 2014-12-24 | 中国工程物理研究院应用电子学研究所 | Quick reflection mirror traceability testing device |
| JP2016176914A (en) * | 2014-09-30 | 2016-10-06 | ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ | Aero-wave instrument for measurement of optical wave-front disturbances in airflow around airborne systems |
| WO2018231285A1 (en) * | 2017-06-13 | 2018-12-20 | Raytheon Company | Calibration method and system for fast steering mirror |
| CN108287404A (en) * | 2017-12-23 | 2018-07-17 | 湖北航天技术研究院总体设计所 | A kind of fast mirror bandwidth calculation method and Simulation Calculation |
| CN109520425A (en) * | 2018-12-29 | 2019-03-26 | 湖北航天技术研究院总体设计所 | A kind of essence tracking error test device and test method |
Non-Patent Citations (2)
| Title |
|---|
| 倪迎雪: "空间激光通信APT系统中快速反射镜关键技术研究", 《中国博士学位论文全文数据库 信息科技辑》 * |
| 刘重飞: "大口径与大转角压电快速控制反射镜设计与研究", 《中国博士学位论文全文数据库 信息科技辑》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112740094B (en) | Mirror assembly for light steering | |
| CN204322753U (en) | A kind of 3D laser marking machine | |
| US5216729A (en) | Active alignment system for laser to fiber coupling | |
| CN104459995A (en) | Optical deflecting device and methods of controlling and adjusting optical deflecting device, image forming apparatus, and vehicle | |
| CN108072973B (en) | Laser galvanometer device comprising correction system and correction method | |
| CN108072972B (en) | Laser galvanometer device correction system and method | |
| CN112346238B (en) | Piezoelectric two-dimensional fast reflecting mirror without axial displacement and driving and deflection angle measuring method | |
| CN111859572A (en) | Method, system, equipment and storage medium for fitting surface contour line of fan blade | |
| CN203885484U (en) | Optical device used for increasing blood vessel sampling frequency in rotary Doppler OCT | |
| US10495955B2 (en) | Method and apparatus for controlling projector | |
| TW202018367A (en) | Cascaded mirror array and scanning system thereof | |
| CN111562667A (en) | Driving control method and device of MEMS (micro-electromechanical system) micro-mirror and computer storage medium | |
| CN110631808A (en) | Portable fast-reflection mirror performance automatic test system and method | |
| CN111158139A (en) | Ultra-high-speed rotating prism optical fiber delay line for real-time terahertz medical imaging | |
| CN112116887B (en) | Display chip flatness correction system of LCoS spatial light modulator | |
| CN112114403B (en) | Calibration method, device and equipment for optical switch and computer readable storage medium | |
| CN109916392B (en) | Mechanical equipment position detection device based on encoder and system and method thereof | |
| CN108037575B (en) | Light beam pointing stability control simulation device and method | |
| CN109175694A (en) | A kind of online high-rate laser welding system of dynamic battery box dynamic and its working method | |
| CN110764251B (en) | Method and device for driving scanning micro-mirror to rotate | |
| JP3988606B2 (en) | Light switch | |
| CN108922461A (en) | Micro- laser-projector, the signal processing method based on micro- laser-projector and equipment | |
| CN115373135A (en) | Closed-loop control system and method for resonant MEMS scanning mirror | |
| CN110401483B (en) | Laser communication device and method | |
| KR102061859B1 (en) | Apparatus and method for correctinf wavefront of laser beam |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191231 |
|
| RJ01 | Rejection of invention patent application after publication |