CN110596010A - Micro-lens array capable of receiving and transmitting ultrasound - Google Patents
Micro-lens array capable of receiving and transmitting ultrasound Download PDFInfo
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- CN110596010A CN110596010A CN201911015515.8A CN201911015515A CN110596010A CN 110596010 A CN110596010 A CN 110596010A CN 201911015515 A CN201911015515 A CN 201911015515A CN 110596010 A CN110596010 A CN 110596010A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1708—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids with piezotransducers
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Acoustics & Sound (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
The invention discloses a micro-lens array capable of receiving and transmitting ultrasound, which comprises a base layer bottom plate made of a piezoelectric material with high optical transmittance, an electrode layer with high optical transmittance, an acoustic matching layer with high optical transmittance and an optical mask with high optical reflectance. The micro lens array can simultaneously realize two functions of optical and acoustic such as optical array type micro focusing, ultrasonic array type transmitting and receiving and the like with a large view field, has the advantages of simple structure, small volume, light weight and the like, is convenient for large-area industrial preparation and system integration, and is expected to be applied to the fields of biological identity recognition, medical imaging diagnosis, industrial nondestructive detection, multifunctional underwater detection robots and the like developed by adopting a laser ultrasonic technology.
Description
Technical Field
The invention relates to an optical component, in particular to a micro-lens array capable of receiving and transmitting ultrasonic waves, which is suitable for the fields of biological identity recognition, medical imaging diagnosis, industrial nondestructive testing, multifunctional underwater testing robots and the like developed by adopting a laser ultrasonic technology.
Background
Microlens arrays, also known as fly's eye lenses or fly's eye lenses, are arrays composed of a series of micro-lenses with apertures of several microns to several hundred microns, in a certain order, and can be conveniently made on optically transparent materials such as glass or resin. The optical lens has the basic functions of focusing, imaging and the like of the traditional optical lens, has the characteristics of small unit size and high integration level, can complete the functions which cannot be completed by the traditional optical element, can form a plurality of novel optical detection systems, and has wide application in the fields of wavefront sensing, light focusing, light shaping and the like.
The industrial and medical ultrasonic phased array technology has been developed for decades, and the quality of the performance of the ultrasonic phased array technology is firstly determined by the quality of an ultrasonic array probe. Usually, it is formed by cutting a piezoelectric wafer into piezoelectric array elements such as linear array, area array, ring array, etc. which are arranged according to a certain rule, and then packaging them with a matching layer, a backing, etc., and implementing focusing transmission and reception of ultrasonic beams by adopting a mechanical or electronic scanning mode.
Laser ultrasound is a novel non-contact, high-precision and nondestructive detection technology, combines the advantages of high precision of ultrasonic detection and non-contact of optical detection, has the advantages of high sensitivity and wide detection bandwidth, and has wide application in the fields of industrial nondestructive detection, biomedical imaging and the like. The ultrasonic wave is generated by laser excitation or piezoelectric transducer excitation, and the ultrasonic wave is received by piezoelectric transducer reception or optical method (including optical interference method and non-interference method). Therefore, the main laser ultrasonic detection method can be divided into three modes: laser excitation-laser reception, laser excitation-ultrasonic reception, ultrasonic transmission-laser reception. At present, laser ultrasonic detection systems in the last two modes are formed by two independent systems of laser and ultrasound, most optical or acoustic structures are complex and are not convenient to realize miniaturization, and the integration of the optical and the acoustic in the same scale is difficult to realize really.
Disclosure of Invention
In view of the above problems, the present invention provides a microlens array capable of receiving and transmitting ultrasound, which comprises a base substrate made of a piezoelectric material with high optical transmittance, an electrode layer with high optical transmittance, an acoustic matching layer with high optical transmittance, and an optical mask layer with high optical reflectance, so as to realize integration and miniaturization of optical and acoustic structures, and greatly reduce the complexity of a detection system using a laser ultrasound technique.
In order to achieve the above purpose, the invention comprises the following design schemes:
a micro-lens array capable of receiving and emitting ultrasonic waves comprises a base substrate made of a piezoelectric material with high optical transmittance, an electrode layer with high optical transmittance, an acoustic matching layer with high optical transmittance and an optical mask layer with high optical reflectance.
A large-area array consisting of a plurality of micro lenses is engraved on the base layer bottom plate; the micro lens is plated with an electrode layer; the areas of the base layer bottom plate except the micro lenses are plated with optical mask layers; the outer surface of the base layer bottom plate is adhered with an acoustic matching layer; the micro lens has an optical micro focusing function and can transmit and receive ultrasonic signals.
The base substrate is preferably made of a piezoelectric single crystal material or a piezoelectric composite material with high optical transmittance; the micro-lenses are preferably of a micrometer to centimeter size; the micro-lenses are preferably in a round or square structure; the micro lens can be plated with an optical antireflection film in a specific spectrum region; the microlenses preferably have the same shape, size and optical focal length; the arrangement mode of the large-area array formed by the micro lenses is preferably square arrangement.
The invention has the beneficial effects that:
(1) in the laser ultrasonic detection structure, a micro-lens array with high optical transmittance is adopted, and the optical function of large-field optical array type micro-focusing and the acoustic function of ultrasonic array type transmitting and receiving are realized simultaneously.
(2) The multiple optical micro-focuses further simplify the number of optical lenses needed in the optical path, reduce the complexity of the optical path and the attenuation of laser, realize a simple structure of coaxial, confocal and small integration of the optical path and the acoustic path by a single micro-lens, eliminate the multiple reflection attenuation of the optical path and the acoustic path, and effectively improve the coupling efficiency and the detection sensitivity of the optical path and the acoustic path.
(3) By adjusting the shape, size, spacing, thickness, material composition and other parameters of the micro lens, the micro lens array can obtain different acoustic and optical performance parameters including optical focal length, optical focal spot shape, acoustic main frequency, acoustic bandwidth, acoustic sensitivity and the like.
Drawings
FIG. 1 is a schematic diagram of a structure of a micro-lens array capable of emitting and receiving ultrasound according to the present invention;
FIG. 2 is a side view of a microlens array of the present invention that can transmit and receive ultrasound;
FIG. 3 is a formula diagram;
FIG. 4 is an enlarged view of a single microlens;
FIGS. 5a and 5b are impedance spectrum and ultrasonic receiving response graph of PMNT piezoelectric single crystal material, respectively, and FIGS. 5c and 5d are impedance spectrum and ultrasonic receiving response graph of PMNT1-3 piezoelectric composite material, respectively;
FIG. 6 is a graph of optical transmittance of two tin-doped indium oxide (ITO) films.
Reference numerals: the substrate comprises a base layer bottom plate 1, an electrode layer 2, an optical mask layer 3, a micro lens 4, an optical antireflection film 5 and an acoustic matching layer 6.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b): a microlens array capable of receiving and emitting ultrasound is characterized by comprising a base substrate 1 made of a piezoelectric material with high optical transmittance, an electrode layer 2 with high optical transmittance, an optical mask layer 3 with high optical reflectance, and an acoustic matching layer 6 with high optical transmittance.
Further, the base substrate 1 is made of PMNT single crystal material with high optical transmittance; a 10mm multiplied by 10mm array consisting of micro lenses 4 with the diameter of 250 mu m and the curvature radius of 835 mu m is carved on the base bottom plate 1, and the effective focal length of a single micro lens 4 is less than 1.8 mm; the array of the micro lenses 4 adopts a square arrangement mode of 40 multiplied by 40; the micro lenses 4 are of a two-dimensional spherical square structure, and the center distance between every two micro lenses 4 is 250 micrometers; the surface of the electrode layer 2 of the micro lens 4 can be plated with an optical antireflection film 5 with a 350-700nm wide band; the micro lens 4 is plated with an electrode layer 2; the areas of the base layer bottom plate 1 except the micro lenses 4 are plated with optical mask layers 3; the micro lens 4 can be adhered with an acoustic matching layer 6 with high optical transmittance; the microlens array can produce a diffraction focus with a beam waist radius of 3.5 μm and a rayleigh length of about 72 μm, as calculated by the following theory. The rayleigh length is the distance from the waist of the beam to a cross-section having an area twice the area of the waist along the direction of travel of the beam. If a gaussian beam is used as the light source model, the rayleigh length can be used to measure the collimation range of the gaussian beam.
ω in FIG. 30Denotes the radius of the beam waist, omega denotes the radius of the spot of the laser incident on the lens surface, Z denotes the focal length of the lens, ZRRepresenting the rayleigh length. According to the formula:
where λ represents the laser wavelength (here chosen to be 532nm), the beam waist radius is 3.525 μm, and the rayleigh length under theoretical conditions is 73 μm.
Further, the relationship between the acoustic center frequency f and the thickness d of the microlens 4 is f ═ N/d, where N is the frequency constant of the piezoelectric material; FIGS. 5a to 5d are impedance spectra and ultrasonic receiving response graphs of the PMNT piezoelectric single crystal material and the PMNT1-3 piezoelectric composite material, respectively;
further, the electrode layer 2 is preferably made of an ITO thin film material with high optical transmittance, for example, the optical transmittance of a general ITO thin film to 450nm-1100nm can reach 70% -80%, and fig. 6 is a graph of the optical transmittance of two ITO thin films.
Further, the optical mask layer 3 is preferably a chrome mask having a high optical reflectance.
Further, the acoustic matching layer 6 is preferably an epoxy resin having a high optical transmittance.
As a first embodiment, the thickness of the micro lens 4 is 4.1mm, and the micro lens has an optical micro focusing effect and can transmit and receive ultrasonic signals with the center frequency of 0.5 MHz.
As the second embodiment, the thickness of the microlens 4 is 1.03mm, and the microlens has an optical micro-focusing effect and can transmit and receive an ultrasonic signal with a center frequency of 2.0 MHz.
It should be noted that although embodiments of the present invention have been shown and described herein, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A micro lens array capable of receiving and transmitting ultrasonic waves is characterized by comprising a base layer bottom plate made of piezoelectric materials with high optical transmittance, an electrode layer with high optical transmittance, an acoustic matching layer with high optical transmittance and an optical mask layer with high optical reflectance; an array formed by a plurality of micro lenses is carved on the base layer bottom plate; the micro lens is plated with an electrode layer; the areas of the base layer bottom plate except the micro lenses are plated with optical mask layers; the outer surface of the base layer bottom plate is adhered with an acoustic matching layer; the micro lens has an optical micro focusing function and can transmit and receive ultrasonic signals.
2. A microlens array capable of receiving and transmitting ultrasound according to claim 1, wherein: the base substrate is made of a piezoelectric single crystal material or a piezoelectric composite material with high optical transmittance.
3. A microlens array capable of receiving and transmitting ultrasound according to claim 1, wherein: the micro-lenses are selected from the micrometer-scale to centimeter-scale dimensions.
4. A microlens array capable of receiving and transmitting ultrasound according to claim 1, wherein: the micro lens is in a round or square structure.
5. A microlens array capable of receiving and transmitting ultrasound according to claim 1, wherein: the microlenses are selected to have the same shape, size and optical focal length.
6. A microlens array capable of receiving and transmitting ultrasound according to claim 1, wherein: the array arrangement mode of the micro lenses is selected from square arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911015515.8A CN110596010B (en) | 2019-10-24 | 2019-10-24 | Micro-lens array capable of receiving and transmitting ultrasound |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911015515.8A CN110596010B (en) | 2019-10-24 | 2019-10-24 | Micro-lens array capable of receiving and transmitting ultrasound |
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| CN110596010A true CN110596010A (en) | 2019-12-20 |
| CN110596010B CN110596010B (en) | 2022-07-08 |
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| CN107079223A (en) * | 2015-04-30 | 2017-08-18 | 奥林巴斯株式会社 | Ultrasonic oscillator and ultrasonic probe |
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2019
- 2019-10-24 CN CN201911015515.8A patent/CN110596010B/en active Active
Patent Citations (10)
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| CN101006931A (en) * | 2005-11-04 | 2007-08-01 | 株式会社东芝 | Ultrasonic probe, and ultrasonographic device |
| US20070282204A1 (en) * | 2006-05-31 | 2007-12-06 | Kabushiki Kaisha Toshiba | Array-type ultrasonic probe and ultrasonic diagnostic apparatus |
| CN101910829A (en) * | 2007-11-14 | 2010-12-08 | 3M创新有限公司 | Make the method for microarray |
| US20110190617A1 (en) * | 2008-05-30 | 2011-08-04 | Stc.Unm | Photoacoustic imaging devices and methods of making and using the same |
| CN201244025Y (en) * | 2008-07-03 | 2009-05-27 | 刘国栋 | Detecting device integrated with light sound ultrasonic excitation and sensor |
| CN104644212A (en) * | 2013-11-20 | 2015-05-27 | 精工爱普生株式会社 | Ultrasonic device and manufacturing method thereof, electronic equipment, and ultrasonic image device |
| US20150305714A1 (en) * | 2014-04-25 | 2015-10-29 | Transducerworks, Llc | Acoustic Lens Of Enhanced Wear Resistance |
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| CN110596010B (en) | 2022-07-08 |
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