CN110592529A

CN110592529A - Mask frame

Info

Publication number: CN110592529A
Application number: CN201911047145.6A
Authority: CN
Inventors: 姜正文; 李文星
Original assignee: Kunshan Guoxian Photoelectric Co Ltd
Current assignee: Kunshan Govisionox Optoelectronics Co Ltd; Kunshan Guoxian Photoelectric Co Ltd
Priority date: 2019-10-30
Filing date: 2019-10-30
Publication date: 2019-12-20

Abstract

The invention belongs to the technical field of OLED (organic light emitting diode) preparation and discloses a mask frame. The mask frame comprises a frame body, wherein the frame body comprises a plurality of frames which are sequentially connected end to end, an arc-shaped correction structure is arranged on each frame, the correction structure extends along the length direction of the frame where the correction structure is arranged, and the correction structure can provide prestress deformation for the frame body to correct the deformation of the mask, so that the deformation phenomenon of inward contraction or outward expansion which occurs on the corrected mask is improved, the pixel position precision is improved, the scrapped number of the mask is reduced, and the cost is saved; can also adjust prevention mask version deformation through correcting the structure, guarantee product quality.

Description

Mask frame

Technical Field

The invention relates to the technical field of OLED (organic light emitting diode) preparation, in particular to a mask frame.

Background

At present, a vacuum evaporation process of an Organic Light-Emitting Diode (OLED) uses a precision Mask (FMM) frame module as a mold, heats an Organic Light-Emitting material to volatilize the Organic Light-Emitting material at a high temperature, and then evaporates the Organic Light-Emitting material to a relative position on a substrate through an opening of the Mask in a material molecule state, so as to form a solid film with a specific pattern on the surface of the substrate, thereby realizing normal Light emission of pixels of a screen.

Generally, the mask frame module comprises a mask frame and a metal mask provided with an opening, wherein two ends of the metal mask are clamped by clamping jaws and then are welded and fixed on the mask frame. After welding, due to the action of welding stress, the metal mask can deform such as retraction or outward expansion, so that a PPA (Pixel Position Accuracy) deviation phenomenon of a Pixel graph on the metal mask can occur; the mask plate finished by net stretching also has the problem of opening position deviation in the net stretching and using processes, so that the evaporation position has deviation, the PPA deviation phenomenon occurs, the problems of poor color mixing and the like are caused, and the final display effect is influenced.

Therefore, it is desirable to provide a mask frame to solve the above-mentioned problems.

Disclosure of Invention

The invention aims to provide a mask frame, which can improve the deformation phenomena of inward contraction and outward expansion of a mask, thereby improving the pixel position precision of the mask and ensuring the imaging quality of the mask.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a mask version frame, includes the frame body, the frame body includes many end to end consecutive frames, be provided with curved correction structure on the frame, correct the structure along the place the length direction of frame extends the setting, correct the structure and be configured for can for the frame body provides the deformation of prestressing force deformation in order to correct the mask version.

As the preferable technical scheme of the mask frame, the correcting structure comprises a pair of arc-shaped grooves with opposite bending directions and a prestressed rib plate embedded in the arc-shaped grooves, and the arc-shaped grooves extend along the length direction of the frame.

As a preferred technical scheme of the mask frame, the width of the arc-shaped groove ranges from 5mm to 10mm, and the depth of the arc-shaped groove ranges from 5mm to 6 mm.

As a preferred technical solution of the above mask frame, the arc-shaped groove is disposed on a side of the frame body facing away from the mask.

As the preferable technical scheme of the mask frame, the prestressed rib plate and the frame body are both made of invar alloy.

As an optimal technical scheme of the mask frame, the correcting structure comprises a pair of arc-shaped channels with opposite bending directions, correcting reinforcing steel bars arranged in the arc-shaped channels, and adjusting pieces connected with two ends of the correcting reinforcing steel bars, the arc-shaped channels penetrate and extend along the length direction of the frame where the arc-shaped channels are located, and the adjusting pieces are configured to be capable of adjusting the prestress between the correcting reinforcing steel bars.

As the preferred technical scheme of the mask frame, the two ends of the correction steel bar are provided with external threads, the adjusting piece is provided with internal threads, and the adjusting piece is in threaded connection with the correction steel bar.

As a preferred technical solution of the above mask frame, the correcting structure further includes adjusting grooves respectively disposed at two ends of the arc-shaped pore passage, and the adjusting grooves are used for accommodating the corresponding adjusting members.

As a preferred technical scheme of the mask frame, the correcting steel bars and the frame body are both made of invar alloy.

As a preferred technical solution of the above mask frame, the number of the correction structures is two, and the two correction structures are respectively disposed on the side frames at two opposite sides of the frame body.

Compared with the prior art, the invention has the advantages and beneficial effects that:

the mask frame provided by the invention comprises a frame body, wherein the frame body comprises a plurality of frames which are sequentially connected end to end, an arc-shaped correction structure is arranged on each frame, the correction structures extend along the length direction of the frame, and the correction structures can provide prestress deformation for the frame body to correct the mask deformation, so that the deformation phenomenon of inward contraction or outward expansion on the correction mask is improved, the mask scrapping quantity is reduced, the cost is saved, and the mask deformation can be adjusted and prevented through the correction structures to improve the pixel position precision and ensure the product quality.

Drawings

Fig. 1 is a schematic structural diagram of a mask frame according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a mask frame according to a second embodiment of the present invention;

fig. 3 is a schematic structural diagram of an adjusting member according to a second embodiment of the present invention.

In the figure:

1. a frame body; 2. an arc-shaped slot; 3. an arc-shaped pore channel; 4. straightening reinforcing steel bars; 5. an adjustment member;

51. a screwing part; 52. a connecting portion.

Detailed Description

In order to make the technical problems solved, the technical solutions adopted and the technical effects achieved by the present invention clearer, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

Example one

The embodiment discloses a mask frame, as shown in fig. 1, including frame body 1, frame body 1 includes many end to end's frame, is provided with curved correction structure on the frame, corrects the length direction extension setting of structure edge frame at place, corrects the structure and is configured to can provide the deformation of prestressing force deformation in order to correct the mask for frame body 1.

In this embodiment, the frame body 1 is a square frame structure, and includes four frames connected end to end in sequence. In particular, the mask frame provided by the embodiment can be suitable for the situation that the whole mask has serious retraction or outward expansion. As shown in fig. 1, the straightening structure includes a pair of arc-shaped grooves 2 with opposite bending directions and a prestressed rib plate embedded in the arc-shaped grooves 2, and the arc-shaped grooves 2 extend along the length direction of the frame. A pair of arc wall 2 that crooked opposite direction sets up respectively on the frame of the relative both sides of frame body, can understand, inlays the prestressing force gusset of locating arc wall 2 and also sets up respectively on the frame of the relative both sides of frame body along with arc wall 2. Preferably, the pair of arc-shaped grooves 2 with opposite bending directions in the embodiment are symmetrically arranged.

More preferably, a pair of arc-shaped grooves 2 with opposite bending directions and a prestressed rib plate embedded in the arc-shaped grooves 2 are arranged on the frame on one side of the frame body, the arc-shaped grooves 2 extend along the length direction of the frame, and the pair of arc-shaped grooves 2 with opposite bending directions on the same frame are symmetrically arranged.

In the present embodiment, for convenience of description, the arc-shaped grooves 2 of the frame body 1 with opposite bending directions are respectively referred to as a positive C-groove and a negative C-groove according to the bending directions, taking the case that the correction structure is provided on the left side frame and the right side frame of the frame body as an example, the arc-shaped groove 2 bent to the right is referred to as a positive C-groove, and the arc-shaped groove 2 bent to the left is referred to as a negative C-groove.

In actual production, the two ends of the metal mask are clamped by the clamping jaws and then welded and fixed on the frame body 1 of the mask frame. After welding, due to the action of welding stress, the metal mask can deform such as retraction or outward expansion, and the pixel position precision deviation phenomenon of subsequent pixel graphs is caused. In addition, the mask is unreasonable in use in the process of stretching the screen, and the mask can deform, so that the pixel position precision is expanded or contracted; when the related equipment is abnormal in the process of stretching the net, the pixel position precision is also caused to expand or contract, and the display effect is influenced finally.

In view of the above technical problems, the principle of the above structure in this embodiment is as follows: arc-shaped grooves 2 are respectively formed in two opposite sides of the frame body 1, and the arc-shaped grooves 2 on each side comprise a positive C groove and a negative C groove which are symmetrically arranged. The prestress rib plates are respectively embedded in the positive C groove and the reverse C groove, the embedding of the prestress rib plates can generate acting force on the arc-shaped groove 2, so that acting force is generated on the frame body 1, the acting force can resist deformation generated by the frame body 1, the correction of the mask frame is realized, the correction of the metal mask welded on the mask frame is realized, and the purpose of improving the pixel position precision is achieved.

Specifically, a positive C groove on the left side frame and a negative C groove on the right side frame form a group, and stress is applied to the frame body 1; the anti-C groove on the left side frame and the positive C groove on the right side frame form a group, stress is applied to the frame body 1, one group of anti-C groove and the positive C groove can be selected to be subjected to deformation adjustment or two groups of anti-C grooves can be simultaneously adjusted during actual adjustment, and the stress generated by the pre-stressed rib plate on the positive C groove and the negative C groove is transmitted to the metal mask plate through the mask frame, so that the deviation phenomenon of the pixel position precision of the mask plate is corrected.

Optionally, in order not to affect the normal installation and fixation of the mask plate and improve the processing convenience of the correction structure, the arc-shaped groove 2 is opened at the back of the frame body 1, i.e. at the side back to the mask plate.

Further, the width of the arc-shaped groove 2 ranges from 5mm to 10 mm. The depth of the arc-shaped groove 2 ranges from 5mm to 6 mm. In actual production, the size of the arc-shaped groove can be designed according to actual requirements.

Based on the expansion and contraction characteristics of the metal material, the prestressed rib plate is made of the same material as the frame body 1, and both are made of Invar alloy (Invar alloy) with a low expansion coefficient in this embodiment.

When the mask plate has a deformation phenomenon of inward contraction or outward expansion, the frames on two opposite sides of the back surface of the mask frame are respectively processed with an arc-shaped groove 2, the two arc-shaped grooves 2 are oppositely and symmetrically arranged in the bending direction, then a prestressed rib plate with a shape different from that of the arc-shaped groove 2, such as a straight rib plate or an arc-shaped rib plate, is inserted into the arc-shaped groove 2 from one end of the arc-shaped groove 2, the straight rib plate or the arc-shaped rib plate with a shape different from that of the arc-shaped groove 2 is inserted into the arc-shaped groove 2, and the prestressed rib plate is formed into a shape consistent with that of the arc-shaped groove 2 through extrusion of the arc-shaped groove 2 and the prestressed rib plate, so that prestressed deformation; further, on the frame of frame body 1 one side, can include a pair of crooked opposite direction, and the arc wall 2 that the symmetry set up, correct the structure through setting up on the frame of frame body 1 relative both sides to improve pixel position accuracy, reduce mask version and scrap quantity, practice thrift the cost. On the other hand, compared with the prior art, once the deformation defect of the mask occurs, the whole mask is scrapped, and the net needs to be expanded again after the mask is reprocessed, the correcting structure in the embodiment realizes the online correcting function of the mask frame, greatly reduces the reprocessing time, obviously shortens the production period, and improves the production efficiency.

Tests prove that the rejection rate of the mask in the prior art is about 50%, and the reprocessing time is about 60min, but after the mask frame provided by the embodiment is adopted, the rejection rate of the mask is reduced to about 30% under the same production condition, and the reprocessing time is about 15 min.

It should be noted that the machining precision of the arc-shaped groove 2 and the prestressed rib plate should meet the production requirement so as to prevent the residual liquid medicine during cleaning. And the arc-shaped groove 2 and the prestressed rib plate should establish the same standard, and all projects can be completely exchanged to improve the universality of materials.

Example two

The embodiment provides a mask frame, and the mask frame structure is different from the mask frame structure in the first embodiment in that the specific structure of the correction structure is different.

The mask frame provided by the embodiment is suitable for the manufacturing process of the mask frame before vacuum evaporation production. The mask frame can be adjusted in the subsequent vacuum evaporation process to prevent the mask from deforming so as to improve the pixel position precision and ensure the product quality.

Specifically, as shown in fig. 2 and fig. 3, the correcting structure on the mask frame includes a pair of arc-shaped ducts 3 with opposite bending directions, correcting reinforcing bars 4 disposed in the arc-shaped ducts 3, and adjusting members 5 connected to two ends of the correcting reinforcing bars 4, the arc-shaped ducts 3 extend through in the length direction of the frame where the arc-shaped ducts 3 are located, and the adjusting members 5 are configured to be capable of adjusting the magnitude of the prestress between the correcting reinforcing bars 4, so as to adjust the deformation of the mask.

Furthermore, the correcting structure further comprises two adjusting grooves respectively arranged at two ends of the arc-shaped pore canal 3, and the two adjusting grooves are respectively used for accommodating the two adjusting pieces 5. The size of this adjustment tank is in order not to influence under the prerequisite of the structural strength of mask version frame, does not make the surperficial protruding frame surface of regulating part 5 suitable, in actual production, can confirm the size of this adjustment tank according to the actual size of mask version frame. The size of the adjustment groove in this embodiment is preferably 10mm 5 mm.

Further preferably, both ends of the straightening reinforcing bar 4 in the embodiment are provided with external threads, the adjusting piece 5 is provided with internal threads, and the adjusting piece 5 is in threaded connection with the straightening reinforcing bar 4. Optionally, the adjusting member 5 in this embodiment is a nut. The deformation of the frame body 1 is resisted through the prestress of the adjusting nut and the correcting steel bar 4, so that the problem of inward shrinkage or outward expansion of a mask is solved, the pixel position precision is improved, the structure is simple, and the operation is easy.

In the present embodiment, for convenience of description, the arc-shaped grooves 2 of the frame body 1 with opposite bending directions are respectively referred to as a positive C-groove and a negative C-groove according to the bending directions, taking the case that the correction structure is provided on the left side frame and the right side frame of the frame body 1 as an example, the arc-shaped groove 2 bent to the right is referred to as a positive C-groove, and the arc-shaped groove 2 bent to the left is referred to as a negative C-groove.

In the present embodiment, the setting of the adjustment member 5 is optionally more than one way. Can respectively set up a nut at the upper and lower both ends of left side frame and the upper and lower both ends of right side frame, also can correspond positive C pore and anti-C pore and respectively set up a nut at the upper and lower both ends of left side frame, correspond positive C pore and anti-C pore and respectively set up a nut simultaneously at the upper and lower both ends of right side frame, when needs adjust the deformation, can select only to adjust the deformation of one of them correction reinforcing bar 4 at every turn, in order to reduce the deformation of other positions, also can select to adjust simultaneously wherein two, three or four deformation of correction reinforcing bar 4, make it produce the synergism, correct pixel position precision contract or expand the phenomenon outward jointly.

It should be noted that, because the arc-shaped duct 3 in this embodiment is of an arc-shaped structure, in order to improve the connection stability between the adjusting member 5 and the straightening reinforcing steel bar 4, the straightening reinforcing steel bar 4 in this embodiment needs to be pre-bent, and two ends of the arc-shaped duct 3 are designed to be approximately straight holes, so as to meet the requirement of perpendicularity of the nut connecting flange surface. In another embodiment, the end portions of the two arc-shaped ducts 3 with opposite bending directions on the same side can be arranged at intervals, and the end portions are respectively processed in a beveling manner, so that the end surfaces of the arc-shaped ducts 3 are perpendicular to the tail ends of the arc-shaped ducts, and the nut and the straightening steel bar 4 can be conveniently and stably connected in a threaded manner.

The nut in this embodiment adopts a special structure as shown in fig. 3, the nut includes a screwing portion 51 and a connecting portion 52, one end of the connecting portion 52 is connected to the screwing portion 51, the other end of the connecting portion 52 abuts against the frame body 1, the connecting portion 52 is in a boss-shaped structure, and the nut and the frame body 1 can be fastened more tightly by screwing the screwing portion 51, so as to prevent the influence of the residual liquid medicine and the foreign particles during cleaning.

Alternatively, the straightening bars 4 and the frame body 1 in this embodiment are made of invar.

It should be noted that, after the mask frame is processed, the correction steel bars 4 are located in the arc-shaped pore channels 3, nuts at two ends of the correction steel bars do not need to be screwed, and when pixel position precision deviation occurs or is about to occur in vacuum evaporation production, prestress deformation is provided for the frame body 1 by adjusting the screwing force between the nuts and the correction steel bars 4, so that the mask frame is adjusted or prevented from shrinking inwards or expanding outwards, and the pixel position precision is improved.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. The utility model provides a mask version frame, includes frame body (1), frame body (1) includes many end to end frame in proper order, its characterized in that, be provided with curved correction structure on the frame, correct the structure along the place the length direction of frame extends the setting, correct the structure and be configured for can for frame body (1) provides prestressing force deformation in order to correct mask version deformation.

2. The mask frame according to claim 1, wherein the correcting structure comprises a pair of arc-shaped grooves (2) with opposite bending directions and a prestressed rib plate embedded in the arc-shaped grooves (2), and the arc-shaped grooves (2) extend along the length direction of the frame.

3. The reticle frame of claim 2, wherein the width of the arc-shaped slot (2) ranges from 5mm to 10mm and the depth of the arc-shaped slot (2) ranges from 5mm to 6 mm.

4. Reticle frame according to claim 2, characterized in that the arc-shaped slot (2) is arranged on the side of the frame body (1) facing away from the reticle.

5. Reticle frame according to any one of claims 2-4, characterized in that the pre-stressed webs and the frame body (1) are made of invar.

6. The mask frame according to claim 1, wherein the correcting structure comprises a pair of arc-shaped channels (3) with opposite bending directions, correcting steel bars (4) arranged in the arc-shaped channels (3), and adjusting pieces (5) connected with two ends of the correcting steel bars (4), the arc-shaped channels (3) extend through in the length direction of the frame, and the adjusting pieces (5) are configured to adjust the prestress between the adjusting pieces and the correcting steel bars (4).

7. The reticle frame according to claim 6, wherein both ends of the straightening steel bar (4) are provided with external threads, the adjusting member (5) is provided with internal threads, and the adjusting member (5) is in threaded connection with the straightening steel bar (4).

8. The reticle frame according to claim 6, wherein the correcting structure further comprises adjusting grooves respectively arranged at two ends of the arc-shaped duct (3), and the adjusting grooves are used for accommodating the corresponding adjusting pieces (5).

9. Reticle frame according to any one of claims 6-8, characterized in that the corrective bars (4) and the frame body (1) are made of invar.

10. The reticle frame according to claim 1, wherein the number of the correcting structures is two, and the two correcting structures are respectively arranged on the rims at two opposite sides of the frame body (1).