CN110579384B

CN110579384B - Sample clamp

Info

Publication number: CN110579384B
Application number: CN201910799423.7A
Authority: CN
Inventors: 李亨特
Original assignee: Yangtze Memory Technologies Co Ltd
Current assignee: Yangtze Memory Technologies Co Ltd
Priority date: 2019-08-28
Filing date: 2019-08-28
Publication date: 2022-11-01
Anticipated expiration: 2039-08-28
Also published as: CN110579384A

Abstract

The application discloses a sample anchor clamps. This sample anchor clamps includes: a first beam having one end opened to form a first arm and a second arm, and further comprising a cavity communicating with the opening; a fastener connecting the first arm and the second arm; and a sample holder accommodated in the cavity and holding the sample, wherein when the first arm and the second arm are approached by the fastener, the first arm and the second arm clamp the sample holder and the sample holder clamps the sample, and when the first arm and the second arm are separated by the fastener, the first arm and the second arm release the sample holder and the sample holder releases the sample. This sample anchor clamps can press from both sides tight/loosen the sample pedestal through the effort of first arm and second arm, and the sample is pressed from both sides tight/loosen the sample to accomplish the installation and the dismantlement of sample, avoided the damage to the sample, improved the quality of sample, the success rate and the system appearance efficiency of system appearance.

Description

Sample clamp

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a sample clamp.

Background

In the field of semiconductor manufacturing, metallographic analysis is one of important means for experimental research of metal materials, and the three-dimensional spatial morphology of an alloy structure is determined by measuring and calculating a metallographic microstructure of a ground surface or a thin film of a two-dimensional metallographic sample by adopting a quantitative metallography principle, so that the quantitative relation among the components, the structure and the performance of the alloy is established.

Metallographic analysis includes cutting, inserting (mounting), mechanical sampling, inspecting and metallographic analysis, and each operation must be carefully performed and carried out strictly according to the operating requirements, since any operating error may affect the subsequent steps. The sample inlaying is a method for inlaying the sample or clamping the sample by using a sample clamp due to the difficulty in mask polishing when the sample is small in size or irregular in shape, and the sample inlaying enables grinding and polishing to be convenient and improves the working efficiency and the experimental accuracy. However, the prior art mounting method is an irreversible operation for the sample, and the sample needs to be destroyed to be removed for further testing.

The existing sample inlaying process is easy to damage samples, and the quality of the samples, the success rate of sample preparation and the sample preparation efficiency are greatly limited. It is desirable to further improve the sample holder to improve the quality of the sample, the success rate of sample preparation and the efficiency of sample preparation.

Disclosure of Invention

In view of the above problems, an object of the present invention is to provide a sample holder in which a sample base is fixed by a first arm and a second arm to fix a sample, thereby improving the quality of the sample, the success rate of sample preparation, and the efficiency of sample preparation.

According to an aspect of the present invention, there is provided a sample holder for holding a sample for grinding or polishing, the sample holder comprising: a first beam open at one end to form a first arm and a second arm, and further comprising a cavity in communication with the opening; a fastener connecting the first arm and the second arm; and a sample stand that is accommodated in the cavity and holds a sample, wherein when the fastener approaches the first arm and the second arm, the first arm and the second arm clamp the sample stand, and the sample stand clamps the sample, and when the fastener separates the first arm and the second arm, the first arm and the second arm release the sample stand, and the sample stand releases the sample.

Preferably, the recessed portions of the first arm and the second arm opposed to each other form the cavity, and the side surface of the sample stand is in surface contact or line contact with the recessed portions of the first arm and the second arm.

Preferably, the cavity has a cross-sectional shape of an ellipse communicating with the opening along a minor axis direction of the ellipse, and the sample stand has a cross-sectional shape of a circle or a racetrack and forms line contact with the recessed portions of the first and second arms at a position of the minor axis of the ellipse.

Preferably, the sample stand comprises: at least two columns, wherein the columns are provided with at least one plane, and the planes of the at least two columns are oppositely arranged and form a containing space for clamping the sample; and a connecting tab connected to the at least two posts for connecting the sample block to the cavity.

Preferably, the sample stand further comprises: a spacer located between the planes of at least two of the columns, the receiving space of the sample holder being located within the spacer.

Preferably, the method further comprises the following steps: a first adjustment member located in a threaded hole of the first beam, the threaded hole communicating with the cavity, wherein the sample block is connected to the first adjustment member via the connecting piece.

Preferably, the cross-sectional shape of the cylinder is arcuate or semicircular.

Preferably, the opening is a strip-shaped slit or a T-shaped slit penetrating the first beam.

Preferably, the cavity is located on a first surface of the first beam, the sample holder further comprising: a second beam connected to the first beam and disposed to cross the first beam; at least two bases located on a second surface of the second beam, each base having a support point or a support surface, each support point or support surface being located on the same horizontal plane, the second surface and the first surface being oriented in the same direction; and at least one second adjusting member positioned on a third surface of the second beam for adjusting a height of the second beam, the second surface and the third surface being opposite to each other, wherein the second adjusting member is positioned on one side or both sides of the first beam.

Preferably, the height of the sample base at the first surface is less than the height of the base at the second surface.

According to the sample clamp provided by the invention, the sample pedestal is provided with the accommodating space capable of accommodating a sample, after the sample pedestal is connected into the cavity of the first beam, the fastener enables the size of the cavity to be reduced or increased by the first arm and the second arm, and the accommodating space is reduced or increased by the acting force of the first arm and the second arm on the sample pedestal, so that the sample can be mounted and dismounted by the fastener, the damage to the sample in the mounting and dismounting process is avoided, and the quality of the sample, the success rate of sample preparation and the sample preparation efficiency are improved.

Drawings

The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the present invention with reference to the accompanying drawings, in which:

FIGS. 1a to 1c show a front view, a top view and a right side view, respectively, of a conventional sample holder;

FIGS. 2a to 2d show perspective, right side, top and bottom views, respectively, of a sample holder according to an embodiment of the invention;

figures 3a to 3c show front, top and right side views respectively of a sample holder according to an embodiment of the invention;

FIG. 4 shows a schematic representation of the use of a sample holder according to an embodiment of the invention;

FIG. 5 shows a force analysis diagram of a sample holder according to an embodiment of the invention.

Detailed Description

Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by the same or similar reference numerals. For purposes of clarity, the various features in the drawings are not drawn to scale.

It will be understood that when a layer, region or layer is referred to as being "on" or "over" another layer, region or layer, it can be directly on the other layer, region or layer or region or intervening layers or regions may also be present in the structure of the clip. And, if the fixture is turned over, the layer, region will be "under" or "beneath" another layer, region.

If the description is directed to the case of being directly on another layer or another region, the description will be given by the expression "directly on 8230; \8230; above or" on 8230; \8230; above and adjacent to it ".

Numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of the fixture, are set forth in the following description in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details.

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples.

Fig. 1a to 1c show a front view, a top view and a right side view of a conventional sample holder, respectively. The main structure of the conventional sample holder 100 includes a first beam 110, a second beam 120, and a sample stand 130 for holding a sample 140.

The first beam 110 has a cavity for receiving the sample block 130, and the first beam 110 further has a fastening knob 111 thereon, the fastening knob 111 being used for clamping the sample block 130.

The second beam 120 is vertically connected to the first beam 110 for supporting the first beam 110, and the second beam 120 has an adjusting knob 121 and a base 122, the two adjusting knobs 121 and the two bases 122 correspond to each other and are respectively located at two sides of the first beam 110, and the two adjusting knobs 121 are used for adjusting the heights of the two sides of the second beam 120 to adjust the included angle between the sample holder 130 and the X-Y plane.

The sample block 130 is detachably attached to the cavity of the first beam 110 via adjustment studs 131, the adjustment studs 131 are used to adjust the overall height of the sample block 130 in the Z-axis direction, and the surface of the sample block 130 in the X-Z plane is exposed to attach a sample 140, and the sample 140 is fixed to the exposed surface of the sample block 130 using a hot melt adhesive or other detachable adhesive.

The grinding and polishing surface of the sample 140 is located on the X-Y plane, the grinding and polishing surface of the sample 140 and the two bases 122 can be located on the same horizontal plane by adjusting the studs 131 and the adjusting knobs 121, and the sample 140 with a flat surface can be prepared by grinding and polishing the sample 140 by a grinding and polishing machine or manually.

After the sample 140 with a flat surface is prepared, the hot melt adhesive needs to be heated and melted in the process of taking off the sample 140, a cotton swab is dipped in acetone to remove the hot melt adhesive, and then other operations are performed on the sample 140. Because the sample 140 has poor mechanical strength and the common hot melt adhesive has certain adhesiveness, a cotton swab stained with acetone needs to be wiped for multiple times with certain force, so that the sample 140 is extremely easy to be polluted and even the sample 140 is damaged; furthermore, the operation of taking out the sample is tedious, and an experienced sample preparation person needs to spend a long time to take out the sample; further, the sample holder is not suitable for a sample 140 that is partially not heated.

The inventors of the present application have noted the above-mentioned problems affecting the quality of the sample, the success rate of sample preparation, and the efficiency of sample preparation, and thus propose a further improved sample holder.

Figures 2a to 2d show perspective, right side, top and bottom views respectively of a sample holder according to an embodiment of the present invention; figures 3a to 3c show front, top and right side views respectively of a sample holder according to an embodiment of the invention. For clarity, a partial cross-sectional view of the sample holder is shown in the dashed box of fig. 2 b.

In this embodiment, the sample holder 200 includes a first beam 210, a second beam 220, a pedestal 230, and a fastener 214 on the first beam 210, a first adjuster 231 in a threaded hole of the first beam 210, at least one second adjuster 221 on the second beam 220.

The first surface of the first beam 210 has a cavity 213 (see fig. 2 d), via which cavity 213 the sample holder 230 can be connected to the first beam 210. Preferably, the cross-sectional shape of the cavity 213 is an ellipse, the cross-sectional shape of the sample stage 230 is a circle or a racetrack, and the diameter of the sample stage 230 is substantially equal to the minor axis of the cavity 213, as viewed in the Z-axis direction.

An opening penetrating the first beam in the Z-axis direction is provided on the first beam 210 to form a first arm 211 and a second arm 212, and a cavity 213 is formed in a recessed portion of the first arm 211 and the second arm 212 opposed to each other. The opening is connected with the cavity 213 and is at least a strip-shaped gap. The fastener 214 penetrates at least a portion of the first beam 210 and connects the first arm 211 and the second arm 212, and the distance between the first arm 211 and the second arm 212 can be adjusted by rotating the fastener 214, so that the size of the cavity 213 can be adjusted to facilitate the mounting and dismounting of the sample stand 230. Preferably, the opening is a T-shaped opening, and includes a first strip-shaped slit and a second strip-shaped slit perpendicular to each other, and the second strip-shaped slit can increase the amount of deformation of the first arm 211 and the second arm 212, thereby increasing the adjustment range of the size of the cavity 213. The fastening member 214 is, for example, a fastening knob.

The second beam 220 is used to support the first beam 210, the first beam 210 is arranged to intersect the second beam 220, the shape of the joint of the first beam 210 and the second beam 220 is adapted and the first beam 210 and the second beam 220 are connected to each other, for example, by glue or screws, and in an alternative embodiment, the first beam 210 and the second beam 220 may be formed integrally.

The second surface of the second beam 220 has at least two pedestals 222, and the second surface of the second beam 220 faces the same direction as the first surface of the first beam 210. The bases 222 have supporting points or supporting surfaces, the bases 222 are, for example, cylinders or rectangular solids, and the supporting points or supporting surfaces of at least two bases 222 are located on the same horizontal plane.

The third surface of the second beam 220 has at least one second regulating member 221, and the third surface and the second surface of the second beam 220 are opposite to each other. Each second adjusting member 221 corresponds to each base 222, the second adjusting member 221 is located on one side or both sides of the first beam 210, and the height of the second beam 220 on one side or both sides of the first beam 210 can be adjusted by rotating the respective second adjusting member 221, thereby adjusting the angle between the first beam 210, the sample stand 230, and the sample 240 and the X-Y plane. The second adjustment member 111 is, for example, an adjustment knob or an adjustment stud.

The sample stand 230 is detachably received in the cavity 213 of the first beam 210 via the first regulating member 231 and has a receiving space for holding a sample, and the side surfaces of the sample stand 230 are in surface contact or line contact with the concave portions of the first and

second arms

211 and 212. The first adjusting member 231 is located in a screw hole of the first beam 210, the screw hole communicating with the cavity 213, and the first adjusting member 231 is used to adjust the overall height of the sample stand 230 in the Z-axis direction. The first adjustment member 231 is, for example, an adjustment stud or an adjustment knob.

Preferably, the cross-sectional shape of the cavity 213 of the first beam 210 is an ellipse and communicates with the opening along the minor axis direction of the ellipse, and the cross-sectional shape of the sample stand 230 is a circle or a racetrack and makes line contact with the concave portions of the first arm 211 and the second arm 212 at the minor axis position of the ellipse.

In this embodiment, when the fastener 214 approaches the first arm 211 and the second arm 212, the first arm 211 and the second arm 212 clamp the sample block 230, and the sample block 230 clamps the sample 240, and when the fastener 214 separates the first arm 211 and the second arm 212, the first arm 211 and the second arm 212 release the sample block 230, and the sample block 230 releases the sample 240.

The sample 240 has an abrasive polishing surface in an X-Y plane, the abrasive polishing surface of the sample 240 can be positioned on the same horizontal plane as the two bases 222 by the first adjusting member 231 and the second adjusting member 221, and the sample 240 having a flat surface can be prepared by polishing the sample 240 by a polishing machine or manually.

Referring to fig. 3a to 3c, in this embodiment, the sample holder 230 includes at least two columns 232, each column 232 has at least one plane, and a clamping space is formed between the two oppositely disposed columns 232, and the clamping space can contract and clamp at least a portion of the sample 240 under the action of the first beam 210. The thickness of the clamping space may be set according to the thickness of the sample when the sample stand 230 is in the unclamped state.

Preferably, a gasket 233 is provided between the two columns 232 to protect the sample 240 from damage during handling. The holding space of the sample stand 230 is located in a spacer 233, and the spacer 233 serves to connect at least two columns 232 and protect the sample 240. The gasket 233 may be a gasket 233 formed by combining a plurality of sheet-shaped gaskets, or may be a gasket 233 having a clamping space formed integrally, and the material of the gasket 233 is preferably rubber or polytetrafluoroethylene.

Preferably, the sample stand 230 includes two columns 232 having an arcuate or semicircular cross-sectional shape, and the spacer 233 and the columns 232 are connected to form a cylinder or an approximately cylinder.

In this embodiment, the cross-sectional shape of the cavity 213 of the first beam 210 is elliptical, the cross-sectional shape of the sample stage 230 is substantially circular, and the diameter of the sample stage 230 is substantially equal to the minor axis of the cavity 213. The sample stand 230 includes two oppositely disposed columns 232, the cross-sectional shape of the columns 232 is an arc or a semicircle, the surfaces of the columns 232 adjacent to each other are connected with pads 233, the two columns 232 are connected to each other via three pads 233, and the three pads 233 form a structure having a holding space.

In this embodiment, the sample block 230 further comprises a connection piece 234, e.g. a metal washer, located above the two columns 232 for connecting the sample block 230 to the first adjustment 231 of the first beam 210. In one or more embodiments, the shim 233 is omitted and the connecting tab 234 is also used to connect at least two of the posts 232.

FIG. 4 shows a schematic representation of the use of a sample holder according to an embodiment of the invention.

As shown in fig. 4, the sample holder 200 is the same as the sample holder 200 shown in fig. 2a to 2d, and will not be described herein again.

In step a, the sample 240 is placed in the holding space of the sample stand 230.

In step b, the sample holder 230 is placed in the cavity 213 of the first beam 210 together with the sample 240.

In step c, the fastener 214 is turned so that the first beam 210 grips the sample holder 230 and the sample holder 230 grips the sample 240.

In the subsequent step, the height of the grinding and polishing surface of the sample 240 can be adjusted by adjusting the first adjusting member 231, and the gradients on both sides of the sample 240 can be adjusted by adjusting the second adjusting member 221 located on the second beam 220, so that the supporting points/surfaces of at least two bases 222 on the second beam 220 and the grinding and polishing surface of the sample 240 are located on the same horizontal plane.

As shown in fig. 5, in this embodiment, the cavity 213 of the first beam 210 has an elliptical cross-sectional shape and communicates with the opening along the minor axis direction of the ellipse, and the sample holder 230 has a circular or racetrack cross-sectional shape and makes line contact with the recessed portions of the first and

second arms

211 and 212 at the minor axis position of the ellipse. The sample stand 230 includes two oppositely disposed columns 232, the cross-sectional shape of the columns 232 is an arc or a semicircle, the surfaces of the columns 232 adjacent to each other are connected with pads 233, the two columns 232 are connected to each other via three pads 233, and the three pads 233 form a structure having a holding space.

The fastening member 214 (see fig. 2a to 2 d) of the sample holder is rotated, the fastening member 214 makes the first beams 210 located at both sides of the strip-shaped gap approach each other, the cavity 213 in the first beam 210 is contracted, the two columns 232 facing each other are pressed, the columns 232 press the gasket 233, so that the sample 240 is firmly held in the holding space, and the gasket 233 can protect the sample 240 from being damaged during the holding process.

While embodiments in accordance with the invention have been described above, these embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A sample holder for holding a sample for grinding or polishing, the sample holder comprising:

a first beam having an opening at one end thereof in a direction perpendicular to a first surface of the first beam, the opening penetrating the first beam to form a first arm and a second arm, the recessed portions of the first arm and the second arm facing each other forming a cavity, the cavity having a cross-sectional shape parallel to the first surface of the first beam that is an ellipse and communicating with the opening in a minor axis direction of the cavity;

a sample stand connected to the first beam via the cavity and detachably accommodated in the cavity, the sample stand including two oppositely disposed posts whose sectional shapes parallel to the first surface of the first beam are arcuate or semicircular, the posts being brought into line contact with the recessed portions of the first and second arms at the position of the minor axis of the cavity, the planes of the two posts being oppositely disposed and forming an accommodation space to hold a sample; and

a fastener passing through at least a portion of the first beam and connecting the first arm and the second arm, the fastener being rotated to adjust a distance between the first arm and the second arm, the size of the cavity being adjusted to facilitate mounting and dismounting of the sample block,

wherein the first arm and the second arm clamp the sample block and the sample block clamps the sample when the fastener approaches the first arm and the second arm,

when the fastener separates the first arm and the second arm, the first arm and the second arm release the sample block, and the sample block releases the sample.

2. The sample holder of claim 1, wherein the sample block further comprises:

a connecting tab connected to the two posts for connecting the sample block to the cavity.

3. The sample holder of claim 1, wherein the sample block further comprises: a spacer located between the planes of the two columns, the receiving space of the sample holder being located within the spacer.

4. The sample holder of claim 2, further comprising:

a first adjusting member located in a threaded bore of the first beam, the threaded bore being in communication with the cavity,

wherein the sample stand is connected to the first adjusting member via the connecting piece.

5. The sample holder of claim 1, wherein the opening is a strip slit or a T-shaped slit through the first beam.

6. The sample holder of claim 1, further comprising:

a second beam connected to the first beam and disposed to cross the first beam;

at least two pedestals located on a second surface of the second beam, each of the pedestals having a support point or a support surface, each of the support points or support surfaces being located on a same horizontal plane, the second surface and the first surface being oriented in the same direction; and

at least one second adjusting piece located on a third surface of the second beam for adjusting a height of the second beam, the second surface and the third surface being opposite to each other,

the second adjusting member is positioned on one side or both sides of the first beam.