CN110579284B - 一种干涉式激光波长测量装置及其使用方法 - Google Patents
一种干涉式激光波长测量装置及其使用方法 Download PDFInfo
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- CN110579284B CN110579284B CN201911023019.7A CN201911023019A CN110579284B CN 110579284 B CN110579284 B CN 110579284B CN 201911023019 A CN201911023019 A CN 201911023019A CN 110579284 B CN110579284 B CN 110579284B
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- 238000000034 method Methods 0.000 title claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 54
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 238000005305 interferometry Methods 0.000 claims abstract description 4
- 238000006073 displacement reaction Methods 0.000 claims description 22
- 230000001066 destructive effect Effects 0.000 claims description 11
- 239000011358 absorbing material Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0246—Measuring optical wavelength
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
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CN110579284A CN110579284A (zh) | 2019-12-17 |
CN110579284B true CN110579284B (zh) | 2024-04-26 |
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Families Citing this family (2)
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CN111537453A (zh) * | 2020-04-23 | 2020-08-14 | 山东省科学院激光研究所 | 一种二维多点反射长光程气体传感器探头及气体传感器 |
CN111578832A (zh) * | 2020-04-30 | 2020-08-25 | 南京理工大学 | 基于短相干光源干涉仪的大行程光程匹配装置及实验方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11183116A (ja) * | 1997-12-18 | 1999-07-09 | Nikon Corp | 光波干渉測定方法および装置 |
CN1431459A (zh) * | 2003-01-22 | 2003-07-23 | 浙江工程学院 | 双频激光合成波长干涉仪 |
KR20110030143A (ko) * | 2009-09-17 | 2011-03-23 | 한국산업기술대학교산학협력단 | 포인트 소스를 이용한 간섭계 및 그 측정 방법 |
CN105004263A (zh) * | 2015-05-29 | 2015-10-28 | 北方民族大学 | 一种对比式抗干扰微动平面反射镜激光干涉仪及标定方法和测量方法 |
CN108662984A (zh) * | 2018-07-17 | 2018-10-16 | 北方民族大学 | 一种基于直角反射镜组的精密位移传感器及其测量方法 |
CN210571045U (zh) * | 2019-10-25 | 2020-05-19 | 北方民族大学 | 一种干涉式激光波长测量装置 |
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2019
- 2019-10-25 CN CN201911023019.7A patent/CN110579284B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11183116A (ja) * | 1997-12-18 | 1999-07-09 | Nikon Corp | 光波干渉測定方法および装置 |
CN1431459A (zh) * | 2003-01-22 | 2003-07-23 | 浙江工程学院 | 双频激光合成波长干涉仪 |
KR20110030143A (ko) * | 2009-09-17 | 2011-03-23 | 한국산업기술대학교산학협력단 | 포인트 소스를 이용한 간섭계 및 그 측정 방법 |
CN105004263A (zh) * | 2015-05-29 | 2015-10-28 | 北方民族大学 | 一种对比式抗干扰微动平面反射镜激光干涉仪及标定方法和测量方法 |
CN108662984A (zh) * | 2018-07-17 | 2018-10-16 | 北方民族大学 | 一种基于直角反射镜组的精密位移传感器及其测量方法 |
CN210571045U (zh) * | 2019-10-25 | 2020-05-19 | 北方民族大学 | 一种干涉式激光波长测量装置 |
Non-Patent Citations (2)
Title |
---|
一种用激光干涉测量光波波长的新方法;王仁洲;杨涛;;大学物理实验(06);全文 * |
线性位移台直线度高精密外差干涉测量装置;金涛;刘景林;杨卫;乐燕芬;侯文玫;;光学精密工程(07);全文 * |
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