CN105004263A - 一种对比式抗干扰微动平面反射镜激光干涉仪及标定方法和测量方法 - Google Patents
一种对比式抗干扰微动平面反射镜激光干涉仪及标定方法和测量方法 Download PDFInfo
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- 238000004556 laser interferometry Methods 0.000 description 3
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CN201510289678.0A CN105004263B (zh) | 2015-05-29 | 2015-05-29 | 一种对比式抗干扰微动平面反射镜激光干涉仪及标定方法和测量方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105509637A (zh) * | 2015-11-27 | 2016-04-20 | 成都信息工程大学 | 一种激光波长修正式平面反射镜激光干涉仪及波长修正方法 |
CN110579284A (zh) * | 2019-10-25 | 2019-12-17 | 北方民族大学 | 一种干涉式激光波长测量装置及其使用方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2046623U (zh) * | 1989-01-14 | 1989-10-25 | 北京大学 | 综合光学干涉仪 |
US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
CN1280293A (zh) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | 物体位移的纳米精度的测量方法 |
EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
CN204757920U (zh) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | 一种对比式抗干扰微动平面反射镜激光干涉仪 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
CN2046623U (zh) * | 1989-01-14 | 1989-10-25 | 北京大学 | 综合光学干涉仪 |
CN1280293A (zh) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | 物体位移的纳米精度的测量方法 |
EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
CN204757920U (zh) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | 一种对比式抗干扰微动平面反射镜激光干涉仪 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105509637A (zh) * | 2015-11-27 | 2016-04-20 | 成都信息工程大学 | 一种激光波长修正式平面反射镜激光干涉仪及波长修正方法 |
CN110579284A (zh) * | 2019-10-25 | 2019-12-17 | 北方民族大学 | 一种干涉式激光波长测量装置及其使用方法 |
CN110579284B (zh) * | 2019-10-25 | 2024-04-26 | 西安驰丰精密机械有限公司 | 一种干涉式激光波长测量装置及其使用方法 |
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