CN110568225A - A shape information detection system, method and device - Google Patents

Abstract

The invention discloses a shape information detection system, method and device. The shape information detection system includes: a test sample carrier for placing the test sample; a shape information detection device, including a miniature force sensitive element, used It is used to detect the shape information of the tested sample; the static elimination device is used to eliminate the static electricity between the miniature force sensitive element and the tested sample; the controller is respectively connected with the shape information detection device, the The static electricity removal device is connected with the appearance information detection device and the static electricity removal device, and is used to control the static electricity removal device and the appearance information detection device to perform static electricity removal and shape information detection operations respectively. By installing a static elimination device, the static electricity between the shape detection device and the tested sample is eliminated, which avoids the influence of the static electricity between the shape information detection device and the tested sample on the shape detection results, and improves the shape detection. The accuracy of the results and the efficiency of shape detection.

Description

A shape information detection system, method and device

technical field

The invention relates to the field of equipment detection, in particular to a system, method and device for detecting shape information.

Background technique

In the actual product manufacturing and production process, the surface morphology of the sample is usually tested to produce products that meet the requirements. In related technologies, the sample surface topography detection instrument determines the surface topography characteristics of the tested sample based on the principle of detecting the extremely weak interatomic interaction force between the tested sample surface and a miniature force sensitive element. For example, the widely used atomic force microscope (Atomic Force Microscope, AFM) is a device that uses a micro-cantilever to sense and amplify the force between the probe on the cantilever and the atoms of the sample under test, so as to detect the surface morphology of the sample. That is to say, when the distance between atoms is reduced to a certain extent, the force between atoms will rise rapidly, and the height of the surface of the tested sample can be directly converted according to the force on the probe, so as to obtain the information of the surface morphology of the tested sample .

However, when using AFM to detect the surface topography of the sample under test, due to the electrostatic force in the air, the speed of the probe will be slowed down or the probe will be prompted to complete the needle if it fails to drop to the target position, which will affect the obtained results. The accuracy of the surface topography information of the measured sample and the detection efficiency of AFM; and the static electricity generated in the air will also cause the resonance frequency of the probe to change, resulting in a decrease in the probe amplitude, which also reduces the obtained surface topography of the tested sample. Accuracy of Information.

Contents of the invention

Therefore, the technical problem to be solved by the present invention is to overcome the defects of low accuracy and low efficiency in obtaining the surface topography information of the tested sample in the related art, so as to provide a topography information detection system, method and device.

According to the first aspect, the embodiment of the present invention discloses a topography information detection system, including: a test sample carrier, used to place the test sample; a topography information detection device, including a miniature force sensitive element, used to detect the The shape information of the tested sample; the static elimination device is used to eliminate the static electricity between the miniature force sensitive element and the tested sample; the controller is connected with the shape information detection device and the static removal device , for controlling the static electricity removal device and the shape information detection device to perform static electricity removal and shape information detection operations respectively.

With reference to the first aspect, in the first implementation manner of the first aspect, the static elimination device includes any one or more of a deionization blower, a static elimination ion nozzle, or a static elimination lamp.

With reference to the first aspect, in the second implementation manner of the first aspect, the tested sample carrier includes a gravity sensor connected to the controller for detecting the tested sample.

With reference to the first aspect, in the third implementation manner of the first aspect, the tested sample carrier includes a brightness sensor connected to the controller for detecting the tested sample.

With reference to the first aspect, in the fourth implementation manner of the first aspect, it further includes: a timing device connected to the controller for determining the working time of the static elimination device.

According to the second aspect, the embodiment of the present invention discloses a method for detecting topography information, including: when the test sample is placed on the test sample carrier, turn on the static electricity removal device; determine the working time of the static electricity removal device; When the working time meets the target time, the shape information detection device is turned on to detect the shape information of the tested sample.

With reference to the second aspect, in the first implementation manner of the second aspect, when the working time meets the target time, the configuration information detection device is turned on to detect the configuration information of the sample under test, including:

When the working time meets the target time, the static elimination device is turned off, and the shape information detection device is turned on to detect the shape information of the tested sample.

With reference to the second aspect, in the second implementation manner of the second aspect, the working time of the static elimination device is 25s-35s.

According to the third aspect, the embodiment of the present invention discloses a topography information detection device, comprising: an opening module of the static elimination device, used to activate the static removal device when the test sample is placed on the test sample carrier; To determine the working time of the static elimination device; the shape information detection device opening module is used to turn on the shape information detection device to detect the shape information of the tested sample when the working time meets the target time.

With reference to the third aspect, in the first implementation manner of the third aspect, the opening module of the appearance information detection device includes: an opening sub-module of the appearance information detection device, which is used to close the The static electricity removal device is used to turn on the shape information detection device to detect the shape information of the tested sample.

With reference to the third aspect, in the second implementation manner of the third aspect, the working time of the static elimination device is 25s-35s.

According to the fourth aspect, the embodiment of the present invention discloses a topographical information detection device, comprising: a memory, a processor, and a computer program stored in the memory and operable on the processor, when the processor executes the program The steps of the topography information detection method described in the second aspect and any implementation manner of the second aspect are realized.

According to the fifth aspect, the embodiment of the present invention discloses a computer-readable storage medium, on which computer instructions are stored, and when the instructions are executed by a processor, the above-mentioned second aspect and any implementation mode of the second aspect can be realized. The steps of the shape information detection method.

The technical solution provided by the embodiments of the present invention has the following advantages:

In the morphology information detection system, method and device provided in the embodiments of the present invention, when the sample to be tested is placed on the carrier of the sample to be tested, the static electricity between the shape detection device and the sample to be tested is eliminated by turning on the static electricity removal device The shape information detection device is turned on to detect the shape information of the sample under test, which avoids the influence of static electricity between the shape information detection device and the sample under test on the shape detection result, and improves the accuracy of the shape detection result.

Description of drawings

In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the specific embodiments or prior art. Obviously, the accompanying drawings in the following description The drawings show some implementations of the present invention, and those skilled in the art can also obtain other drawings based on these drawings without creative work.

FIG. 1 is a schematic structural diagram of a topography information detection system provided by an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a topography information detection system provided by an embodiment of the present invention;

Fig. 3 is a flow chart of a method for detecting topography information provided by an embodiment of the present invention;

FIG. 4 is a block diagram of a topography information detection device provided by an embodiment of the present invention;

Fig. 5 is a block diagram of a topography information detection device provided by an embodiment of the present invention.

Detailed ways

The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically or electrically connected; it can be directly connected, or indirectly connected through an intermediary, or it can be the internal communication of two components, which can be wireless or wired connect. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as there is no conflict with each other.

In the actual product manufacturing and production process, the surface morphology of the sample is usually tested to produce products that meet the requirements. In the related art, the sample surface topography detection instrument usually determines the surface topography characteristics of the tested sample based on the principle of detecting the extremely weak interatomic interaction force between the tested sample surface and a miniature force sensitive element. For example, the widely used atomic force microscope (Atomic Force Microscope, AFM) is a device that uses a micro-cantilever to sense and amplify the force between the probe on the cantilever and the atoms of the sample under test, so as to detect the surface morphology of the sample. That is to say, when the distance between atoms is reduced to a certain extent, the force between atoms will rise rapidly, and the height of the surface of the tested sample can be directly converted according to the force on the probe, so as to obtain the information of the surface morphology of the tested sample .

However, when using AFM to detect the surface topography of the sample under test, due to the electrostatic force in the air, the speed of the probe will be slowed down or the probe will be prompted to complete the needle if it fails to drop to the target position, which will affect the obtained results. The accuracy of the surface topography information of the measured sample and the detection efficiency of AFM; and the static electricity generated in the air will also cause the resonance frequency of the probe to change, resulting in a decrease in the probe amplitude, which also reduces the obtained surface topography of the tested sample. Accuracy of Information. In order to solve the above technical problems, an embodiment of the present application provides a topography information detection system.

The embodiment of the present application provides a topography information detection system, as shown in Figure 1 and Figure 2, the topography information detection system includes a sample carrier 101 to be tested, a topography information detection device 102, a static electricity removal device 103 and a controller 104:

The tested sample carrier 101 is used to place the tested sample.

Exemplarily, the tested sample carrier can be any carrier that can place the tested sample. The embodiment of the present application does not limit the parameters such as the shape of the tested sample carrier, which can be determined by those skilled in the art according to actual needs. As shown in FIG. 2 , the tested sample carrier is a circular slide platform 201 .

The shape information detection device 102 includes a miniature force sensitive element, which is used to detect the shape information of the tested sample.

Exemplarily, the shape information detection device may be an atomic force microscope (Atomic Force Microscope, AFM), or other detection devices that can be used to detect shape information. In the AFM shown in Figure 2, the miniature force-sensitive element is a micro-cantilever 202, and the change of the atomic force between the probe 204 and the sample under test drives the micro-cantilever 202 to fluctuate in a direction perpendicular to the surface of the sample. The position change of the microcantilever relative to each detection point of the tested sample is measured by the tunnel current detection method, and then the shape information of the tested sample is obtained.

The static electricity removing device 103 is used to eliminate the static electricity between the miniature force sensitive element and the tested sample.

As an optional embodiment of the present application, the static removal device may include: any one or more of a deionization fan, a static removal ion nozzle, or a static removal lamp. The embodiment of the present application does not limit the number and type of the static-eliminating devices, which can be determined by those skilled in the art according to actual needs. The static electricity removal device can eliminate the static electricity between the miniature force sensitive element and the tested sample by aligning the static elimination device with the air gap between the miniature force sensitive element and the tested sample or aligning the miniature force sensitive element for static elimination operate. When the shape information detection device is AFM, the antistatic operation can be performed on the alignment probe. As shown in Figure 2, the static removal device is a deionization fan 203.

The controller 104 is connected with the appearance information detection device and the static removal device, and is used to control the static removal device and the appearance information detection device to perform static removal and appearance information detection operations respectively.

Exemplarily, taking the topography information detection device as an AFM as an example, after the static elimination device performs static elimination operation, the AFM probe descends to the surface of the sample to be tested for topography information detection. The working mode of AFM is classified according to the form of force between the probe and the sample, which can include contact mode, non-contact mode or knocking mode. The embodiment of the present application does not limit the working mode of the AFM.

In the morphology information detection system provided in the embodiment of the present application, when the tested sample is placed on the tested sample carrier, the static electricity between the morphology detection device and the tested sample is eliminated by turning on the static electricity removal device, and then the morphology information is turned on. The information detection device detects the shape information of the tested sample, avoids the influence of static electricity between the shape information detection device and the tested sample on the shape detection result, and improves the accuracy of the shape detection result and the shape detection efficiency.

As an optional embodiment of the present application, the tested sample carrier 101 includes a gravity sensor connected to the controller 104 for detecting the tested sample.

Exemplarily, by setting a gravity sensor on the test sample carrier to detect whether the test sample is placed on the test sample carrier, the gravity sensor is connected to the controller, so that the controller can turn on the static elimination device according to the detection result of the gravity sensor Perform static removal. The embodiment of the present application does not limit the position and quantity of the gravity sensor on the test sample carrier, as long as the gravity sensor can detect the test sample on the test sample carrier, those skilled in the art can determine according to actual use needs.

As an optional implementation manner of the present application, the tested sample carrier 101 includes a brightness sensor, and the brightness sensor is connected to the controller 104 for detecting the tested sample.

Exemplarily, by setting a brightness sensor on the tested sample carrier to detect whether the tested sample carrier is placed on the tested sample carrier, the brightness sensor is connected to the controller, so that the controller can turn on the static elimination device according to the detection result of the brightness sensor Perform static removal. The embodiment of the present application does not limit the position and quantity of the brightness sensor on the test sample carrier, as long as the brightness sensor can detect the test sample on the test sample carrier, those skilled in the art can determine according to actual use needs. In order to increase the accuracy of the brightness sensor in detecting the sample under test, the brightness sensor can be arranged on the carrier of the sample under test at a position aligned with the shape detection device. For example, for AFM, the brightness sensor can be arranged on the position of the alignment probe on the sample carrier under test.

As an optional implementation manner of the present application, the system further includes: a timing device connected to the controller 104 for determining the working time of the static elimination device 103 .

Exemplarily, after detecting that the static elimination device is turned on, the controller turns on the timing device to count the working time of the static removal device. The timing device can be integrated in the controller or installed in the static elimination device. When the target static removal time is reached, a trigger signal is sent to the controller, so that the controller controls the shape detection device to turn on.

The embodiment of the present application provides a topography information detection method, as shown in Figure 3, the topography information detection method includes:

Step 301, when the test sample is placed on the test sample carrier, turn on the static elimination device.

Exemplarily, when the test sample is placed on the test sample carrier, the way to turn on the static elimination device can be to set a gravity sensor on the test sample carrier, and turn on the static removal device according to the detection result of the gravity sensor; A brightness sensor is arranged on the carrier, and according to the detection result of the brightness sensor, it is determined whether to turn on the static elimination device. The embodiment of the present application does not limit the way of turning on the static electricity removal device, and those skilled in the art can determine according to actual use needs.

Step 302, determining the working time of the static elimination device.

Exemplarily, the manner of determining the working time of the static eliminating device may be that when it is detected that the static eliminating device is turned on, the timing device may be turned on to count the working time of the static removing device. The embodiment of the present application does not limit the working time of the static elimination device, which can be determined by those skilled in the art according to actual use needs.

Step 303, when the working time meets the target time, turn on the shape information detection device to detect the shape information of the tested sample.

Exemplarily, the target time can be determined according to the amount of static electricity in the air in the detection environment. For example, before performing the detection of the shape information of the tested sample, turn on the electrostatic tester and other equipment that can measure the static electricity to the air in the current detection environment. Static electricity is detected. After detecting the amount of static electricity in the current detection environment, the static elimination operation can be performed in advance through the static elimination device, and the time required for the static elimination device to eliminate the static electricity in the current detection environment can be determined, and this time can be used as the target time. It is also possible to associate different amounts of static electricity with the target time in advance, and after detecting the amount of static electricity in the air in the current detection environment, match the corresponding target time according to the correlation relationship. The embodiment of the present application does not limit the method of determining the target time, and those skilled in the art may determine it according to actual use requirements. When the working time of the static elimination device meets the target time, it indicates that the static electricity between the current shape detection device and the tested sample is eliminated, and then the shape information detection device is turned on to perform shape detection of the tested sample.

As an optional implementation of the present application, the working time of the static elimination device may be 25s-35s.

Exemplarily, the working time of the static elimination device may be 30s. The embodiment of the present application does not limit the working time of the static elimination device, which can be determined by those skilled in the art according to actual use needs.

In the morphology information detection method provided in the embodiment of the present application, when the sample to be tested is placed on the carrier of the sample to be tested, the static electricity between the morphology detection device and the sample to be tested is eliminated by turning on the static electricity removal device, and the shape information is turned on. The information detection device detects the shape information of the tested sample, avoids the influence of static electricity between the shape information detection device and the tested sample on the shape detection result, and improves the accuracy of the shape detection result and the shape detection efficiency.

As an optional implementation manner of this application, step 303 includes:

Step 3031, when the working time meets the target time, turn off the static elimination device, and turn on the shape information detection device to detect the shape information of the tested sample.

Exemplarily, in order to avoid the influence of the static elimination device in the on state on the detection result of the topography information detection device, when the working time of the static removal device satisfies the target time, after the static removal device is turned off, the topography information detection device is turned on. For example, when the deionization device is a deionization fan or a deionization nozzle, the wind force generated may affect the force of the AFM probe, and then affect the detection results of the tested samples.

The embodiment of the present application provides a topography information detection device, as shown in Figure 4, including:

The destaticizing device opening module 401 is used to start the destaticizing device when the tested sample is placed on the tested sample carrier.

The determination module 402 is configured to determine the working time of the static elimination device.

The shape information detection device opening module 403 is used to start the shape information detection device to detect the shape information of the tested sample when the working time meets the target time.

In the shape information detection device provided in the embodiment of the present application, when the test sample is placed on the test sample carrier, the static electricity between the shape detection device and the test sample is eliminated by turning on the static electricity removal device, and the shape information is turned on. The information detection device detects the shape information of the tested sample, avoids the influence of static electricity between the shape information detection device and the tested sample on the shape detection result, and improves the accuracy of the shape detection result and the shape detection efficiency.

As an optional implementation manner of the present application, the opening module 403 of the appearance information detection device includes: an opening submodule of the appearance information detection device, which is used to turn off the static elimination device when the working time meets the target time, and turn on The shape information detection device is used to detect the shape information of the tested sample.

As an optional implementation manner of the present application, the working time of the static elimination device is 25s-35s.

The embodiment of the present application provides a topography information detection device. As shown in FIG. 5, the topography information detection device may include a processor 501 and a memory 502, wherein the processor 501 and the memory 502 may be connected through a bus or in other ways, In Fig. 5, the connection through the bus is taken as an example.

The processor 501 may be a central processing unit (Central Processing Unit, CPU). The processor 501 may also be other general-purpose processors, digital signal processors (Digital Signal Processor, DSP), application-specific integrated circuits (Application Specific Integrated Circuit, ASIC), field-programmable gate array (Field-Programmable Gate Array, FPGA) or Other chips such as programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or combinations of the above-mentioned types of chips.

The memory 502, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs and modules, such as program instructions/modules corresponding to the form information detection method in the embodiment of the present invention (For example, the activation module 401 of the static elimination device, the determination module 402 and the activation module 403 of the shape information detection device shown in FIG. 4 ). The processor 501 executes various functional applications and data processing of the processor by running the non-transitory software programs, instructions and modules stored in the memory 502, that is, implements the topography information detection method in the above method embodiments.

The memory 502 may include a program storage area and a data storage area, wherein the program storage area may store an operating system and an application program required by at least one function; the data storage area may store data created by the processor 501 and the like. In addition, the memory 502 may include a high-speed random access memory, and may also include a non-transitory memory, such as at least one magnetic disk storage device, a flash memory device, or other non-transitory solid-state storage devices. In some embodiments, the memory 502 may optionally include memory that is remotely located relative to the processor 501, and these remote memories may be connected to the processor 501 through a network. Examples of the aforementioned networks include, but are not limited to, the Internet, intranets, local area networks, mobile communication networks, and combinations thereof.

The one or more modules are stored in the memory 502, and when executed by the processor 501, the topography information detection method in the embodiment shown in FIG. 3 is executed.

The specific details of the above-mentioned topography information detection device can be understood by correspondingly referring to the corresponding descriptions and effects in the embodiments shown in FIG. 1 to FIG. 4 , and will not be repeated here.

The shape information detection equipment provided in the embodiment of the present application, when the test sample is placed on the test sample carrier, the static electricity between the shape detection device and the test sample is eliminated by turning on the static electricity removal device, and the shape information is turned on. The information detection device detects the shape information of the tested sample, avoids the influence of static electricity between the shape information detection device and the tested sample on the shape detection result, and improves the accuracy of the shape detection result and the shape detection efficiency.

The embodiment of the present invention also provides a computer storage medium, the computer storage medium stores computer-executable instructions, and the computer-executable instructions can execute the topography information detection method in any method embodiment above. Wherein, the storage medium may be a magnetic disk, an optical disk, a read-only memory (Read-Only Memory, ROM), a random access memory (Random Access Memory, RAM), a flash memory (Flash Memory), a hard disk (Hard Disk) Disk Drive, abbreviation: HDD) or solid-state drive (Solid-State Drive, SSD), etc.; the storage medium may also include a combination of the above-mentioned types of memory.

Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.

Claims (11)

1. A topographical information detection system, comprising:

A test sample carrier for holding a test sample;

The appearance information detection device comprises a miniature force sensitive element and is used for detecting the appearance information of the detected sample;

The static removing device is used for removing static between the miniature force sensitive element and the tested sample;

And the controller is connected with the morphology information detection device and the static removing device and is used for controlling the static removing device and the morphology information detection device to respectively carry out static removing and morphology information detection operations.

2. the system of claim 1, wherein the static discharge device comprises: any one or more of a deionization fan, a static electricity removal ion air nozzle or a static electricity removal lamp.

3. The system of claim 1, wherein the sample carrier under test comprises a gravity sensor coupled to the controller for detecting the sample under test.

4. The system of claim 1, wherein the sample carrier under test comprises a light sensor coupled to the controller for detecting the sample under test.

5. the system of claim 1, further comprising: and the timing device is connected with the controller and is used for determining the working time of the static eliminating device.

6. A method for detecting topographic information, comprising:

When a tested sample is placed on the tested sample carrier, the static removing device is started;

Determining the working time of the static eliminating device;

and when the working time meets the target time, starting a morphology information detection device to detect the morphology information of the detected sample.

7. The method of claim 6, wherein the turning on a profile information detection device to perform profile information detection on the tested sample when the working time meets a target time comprises:

and when the working time meets the target time, closing the static removing device, and opening the morphology information detection device to detect the morphology information of the detected sample.

8. The method of claim 6, wherein the static discharge device is operated for 25s to 35 s.

9. A profile information detection apparatus, comprising:

The static electricity removing device starting module is used for starting the static electricity removing device when a tested sample is placed on the tested sample carrier;

the determining module is used for determining the working time of the static eliminating device;

and the morphology information detection device starting module is used for starting the morphology information detection device to detect the morphology information of the detected sample when the working time meets the target time.

10. A profile information detecting apparatus, characterized by comprising: a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing the steps of the topography information detection method according to any of claims 6-8 when executing the program.

11. A readable computer storage medium having stored thereon computer instructions, characterized in that the instructions, when executed by a processor, carry out the steps of the topography information detection method according to any of claims 6-8.