CN110568225A - Morphology information detection system, method and device - Google Patents
Morphology information detection system, method and device Download PDFInfo
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- CN110568225A CN110568225A CN201910917282.4A CN201910917282A CN110568225A CN 110568225 A CN110568225 A CN 110568225A CN 201910917282 A CN201910917282 A CN 201910917282A CN 110568225 A CN110568225 A CN 110568225A
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- 238000001514 detection method Methods 0.000 title claims abstract description 120
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000003068 static effect Effects 0.000 claims abstract description 121
- 238000012360 testing method Methods 0.000 claims abstract description 28
- 230000005611 electricity Effects 0.000 claims description 44
- 238000012876 topography Methods 0.000 claims description 20
- 230000015654 memory Effects 0.000 claims description 18
- 230000005484 gravity Effects 0.000 claims description 11
- 238000002242 deionisation method Methods 0.000 claims description 3
- 238000004590 computer program Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 133
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000008030 elimination Effects 0.000 description 4
- 238000003379 elimination reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
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Abstract
The invention discloses a system, a method and a device for detecting morphology information, wherein the system for detecting the morphology information comprises the following components: a test sample carrier for holding a test sample; the appearance information detection device comprises a miniature force sensitive element and is used for detecting the appearance information of the detected sample; the static removing device is used for removing static between the miniature force sensitive element and the tested sample; and the controller is respectively connected with the morphology information detection device and the static removing device, is connected with the morphology information detection device and the static removing device, and is used for controlling the static removing device and the morphology information detection device to respectively carry out static removing and morphology information detection operations. Through setting up the static-removing device, eliminate the static between appearance detection device and the sample that receives, avoided the influence of the static between appearance information detection device and the sample that receives to the appearance testing result, improved the accuracy and the appearance detection efficiency of appearance testing result.
Description
Technical Field
The invention relates to the field of equipment detection, in particular to a system, a method and a device for detecting morphology information.
Background
in the actual manufacturing and production process of products, the surface topography of a sample is usually detected to generate a product meeting the requirements. In the related art, a sample surface topography detecting apparatus determines a surface topography of a sample to be detected based on a principle of detecting a very weak interatomic interaction force between a surface of the sample to be detected and a micro force sensitive element. For example, an Atomic Force Microscope (AFM) is a device that senses and amplifies the Force between a probe on a cantilever and an atom of a sample to be measured by using a micro-cantilever, thereby detecting the surface topography of the sample. Namely, when the distance between atoms is reduced to a certain degree, the acting force between atoms is rapidly increased, and the height of the surface of the sample to be measured can be directly converted according to the stress of the probe, so that the information of the surface appearance of the sample to be measured is obtained.
When the AFM is used for detecting the surface topography of a detected sample, the probe descending speed is slowed or the probe cannot descend to a target position to prompt that the descending is finished due to the action of electrostatic force in the air, so that the accuracy of obtaining the surface topography information of the detected sample and the detection efficiency of the AFM are influenced; and static electricity generated in the air can also cause the resonance frequency of the probe to change, so that the amplitude of the probe is reduced, and the accuracy of the acquired surface topography information of the detected sample is also reduced.
Disclosure of Invention
Therefore, the technical problem to be solved by the present invention is to overcome the defects of low accuracy and efficiency in obtaining the surface topography information of the tested sample in the related art, so as to provide a topography information detection system, method and device.
According to a first aspect, an embodiment of the present invention discloses a topographic information detecting system, including: a test sample carrier for holding a test sample; the appearance information detection device comprises a miniature force sensitive element and is used for detecting the appearance information of the detected sample; the static removing device is used for removing static between the miniature force sensitive element and the tested sample; and the controller is connected with the morphology information detection device and the static removing device and is used for controlling the static removing device and the morphology information detection device to respectively carry out static removing and morphology information detection operations.
With reference to the first aspect, in a first embodiment of the first aspect, the static discharge apparatus includes: any one or more of a deionization fan, a static electricity removal ion air nozzle or a static electricity removal lamp.
With reference to the first aspect, in a second embodiment of the first aspect, the sample carrier under test comprises a gravity sensor connected to the controller for detecting the sample under test.
with reference to the first aspect, in a third embodiment of the first aspect, the sample carrier under test comprises a brightness sensor connected to the controller for detecting the sample under test.
with reference to the first aspect, in a fourth embodiment of the first aspect, the method further includes: and the timing device is connected with the controller and is used for determining the working time of the static eliminating device.
According to a second aspect, the embodiment of the invention discloses a method for detecting topographic information, which comprises the following steps: when a tested sample is placed on the tested sample carrier, the static removing device is started; determining the working time of the static eliminating device; and when the working time meets the target time, starting a morphology information detection device to detect the morphology information of the detected sample.
with reference to the second aspect, in the first embodiment of the second aspect, the turning on a profile information detection apparatus to perform profile information detection on the tested sample when the working time meets a target time includes:
And when the working time meets the target time, closing the static removing device, and opening the morphology information detection device to detect the morphology information of the detected sample.
with reference to the second aspect, in a second embodiment of the second aspect, the operation time of the static eliminating device is 25s-35 s.
According to a third aspect, an embodiment of the present invention discloses a profile information detecting apparatus, including: the static electricity removing device starting module is used for starting the static electricity removing device when a tested sample is placed on the tested sample carrier; the determining module is used for determining the working time of the static eliminating device; and the morphology information detection device starting module is used for starting the morphology information detection device to detect the morphology information of the detected sample when the working time meets the target time.
With reference to the third aspect, in a first embodiment of the third aspect, the profile information detection device activation module includes: and the morphology information detection device starting submodule is used for closing the static removing device and starting the morphology information detection device to detect the morphology information of the detected sample when the working time meets the target time.
With reference to the third aspect, in a second embodiment of the third aspect, the operation time of the static eliminating device is 25s-35 s.
according to a fourth aspect, an embodiment of the present invention discloses a profile information detecting apparatus, including: a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor implements the steps of the method for detecting profile information according to any one of the embodiments of the second aspect and the second aspect when executing the program.
According to a fifth aspect, an embodiment of the present invention discloses a readable computer storage medium, on which computer instructions are stored, and the computer instructions, when executed by a processor, implement the steps of the topography information detection method described in any of the second aspect and the second aspect.
The technical scheme provided by the embodiment of the invention has the following advantages:
According to the morphology information detection system, the method and the device provided by the embodiment of the invention, when the detected sample is placed on the detected sample carrier, the static electricity between the morphology detection device and the detected sample is eliminated by starting the static electricity elimination device, and then the morphology information detection device is started to detect the morphology information of the detected sample, so that the influence of the static electricity between the morphology information detection device and the detected sample on the morphology detection result is avoided, and the accuracy of the morphology detection result is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural diagram of a topographic information detecting system according to an embodiment of the present invention;
Fig. 2 is a schematic structural diagram of a topographic information detecting system according to an embodiment of the present invention;
FIG. 3 is a flowchart of a method for detecting topographic information according to an embodiment of the present invention;
fig. 4 is a block diagram of a profile information detection apparatus according to an embodiment of the present invention;
Fig. 5 is a block diagram of a profile information detection apparatus according to an embodiment of the present invention.
Detailed Description
the technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
In the actual manufacturing and production process of products, the surface topography of a sample is usually detected to generate a product meeting the requirements. In the related art, a sample surface topography detecting apparatus generally determines the surface topography of a sample to be detected based on the principle of detecting the extremely weak interatomic interaction force between the surface of the sample to be detected and a miniature force sensitive element. For example, an Atomic Force Microscope (AFM) is a device that senses and amplifies the Force between a probe on a cantilever and an atom of a sample to be measured by using a micro-cantilever, thereby detecting the surface topography of the sample. Namely, when the distance between atoms is reduced to a certain degree, the acting force between atoms is rapidly increased, and the height of the surface of the sample to be measured can be directly converted according to the stress of the probe, so that the information of the surface appearance of the sample to be measured is obtained.
when the AFM is used for detecting the surface topography of a detected sample, the probe descending speed is slowed or the probe cannot descend to a target position to prompt that the descending is finished due to the action of electrostatic force in the air, so that the accuracy of obtaining the surface topography information of the detected sample and the detection efficiency of the AFM are influenced; and static electricity generated in the air can also cause the resonance frequency of the probe to change, so that the amplitude of the probe is reduced, and the accuracy of the acquired surface topography information of the detected sample is also reduced. In order to solve the above technical problem, an embodiment of the present application provides a topographic information detecting system.
The embodiment of the present application provides a profile information detection system, as shown in fig. 1 and fig. 2, the profile information detection system includes a tested sample carrier 101, a profile information detection apparatus 102, a static electricity removal apparatus 103, and a controller 104:
A test sample carrier 101 for holding a test sample.
The sample carrier to be tested can be any carrier on which a sample to be tested can be placed, and the shape and other parameters of the sample carrier to be tested are not limited in the embodiments of the present application, and can be determined by those skilled in the art according to actual use needs. As shown in fig. 2, the sample carrier under test is a circular stage 201.
The profile information detection device 102 comprises a miniature force sensitive element for detecting the profile information of the tested sample.
For example, the profile information detection device may be an Atomic Force Microscope (AFM), or other detection device that can be used to detect profile information. As shown in fig. 2, the micro force sensing element is a micro-cantilever 202, the micro-cantilever 202 is driven to move up and down in a direction perpendicular to the surface of the sample by the change of atomic force between the probe of the probe 204 and the sample to be measured, and the position change of the micro-cantilever relative to each detection point of the sample to be measured is measured by an optical detection method or a tunnel current detection method, so as to obtain the topography information of the sample to be measured.
And the static removing device 103 is used for removing static between the miniature force sensitive element and the tested sample.
As an alternative embodiment of the present application, the static removing apparatus may include: any one or more of a deionization fan, a static electricity removal ion air nozzle or a static electricity removal lamp. The number and the type of the static removing devices are not limited in the embodiments of the present application, and can be determined by those skilled in the art according to the actual use requirement. The static removing device can remove static electricity between the micro force-sensitive element and the sample to be tested by aligning the static removing device with an air gap between the micro force-sensitive element and the sample to be tested or aligning the micro force-sensitive element for static removing operation. When the morphology information detection device is an AFM, the probe can be aligned to perform static electricity removal operation. As shown in fig. 2, the static electricity removing device is a deionizing fan 203.
And the controller 104 is connected with the morphology information detection device and the static electricity removal device and is used for controlling the static electricity removal device and the morphology information detection device to respectively perform static electricity removal and morphology information detection operations.
For example, taking the profile information detection device as an AFM as an example, after the static electricity elimination device performs the static electricity elimination operation, the AFM probe is lowered to the surface of the sample to be detected to perform the profile information detection. The operating mode of the AFM is classified in terms of the force between the probe and the sample, and may include a contact mode, a non-contact mode, or a tapping mode. The working mode of the AFM is not limited in the embodiment of the application.
The appearance information detection system that this application embodiment provided places on receiving by the sample carrier and receives the sample messenger, through opening static-removing device, to appearance detection device and receive the back that static between the sample is eliminated, open appearance information detection device and detect the appearance information that receives the sample, avoided appearance information detection device and received the influence of the static between the sample to appearance testing result, improved appearance testing result's accuracy and appearance detection efficiency.
As an alternative embodiment of the present application, the sample carrier 101 to be tested comprises a gravity sensor, which is connected to the controller 104 for testing the sample to be tested.
Exemplarily, whether the tested sample is placed on the tested sample carrier or not is detected by arranging the gravity sensor on the tested sample carrier, and the gravity sensor is connected with the controller, so that the controller can start the static removing device to perform static removing operation according to the detection result of the gravity sensor. The position and the number of the gravity sensors arranged on the tested sample carrier are not limited in the embodiment of the application, as long as the gravity sensors can detect the tested sample on the tested sample carrier, and the gravity sensors can be determined by a person skilled in the art according to actual use requirements.
As an alternative embodiment of the present application, the sample carrier 101 to be tested comprises a brightness sensor, which is connected to the controller 104 for testing the sample to be tested.
The controller is connected with the controller, so that the controller can start the static removing device to perform static removing operation according to the detection result of the brightness sensor. The position and the number of the brightness sensors arranged on the tested sample carrier are not limited in the embodiment of the application, as long as the brightness sensors can detect the tested sample on the tested sample carrier, and the brightness sensors can be determined by a person skilled in the art according to actual use requirements. In order to increase the accuracy of the brightness sensor for detecting the tested sample, the brightness sensor can be arranged on the tested sample carrier at the position aligned with the appearance detection device. For AFM, for example, the brightness sensor may be positioned on the sample carrier under test at a position aligned with the probe.
As an optional embodiment of the present application, the system further comprises: and the timing device is connected with the controller 104 and is used for determining the working time of the static electricity removing device 103.
Illustratively, after detecting that the static electricity eliminating device is started, the controller starts a timing device to time the working time of the static electricity eliminating device. The timing device can be integrated in the controller or arranged in the static removing device, and when the target static removing time is reached, a trigger signal is sent to the controller, so that the controller controls the morphology detecting device to be started.
the embodiment of the application provides a morphology information detection method, as shown in fig. 3, the morphology information detection method includes:
Step 301, when a sample to be tested is placed on the sample carrier to be tested, the static removing device is started.
For example, when a sample to be tested is placed on the sample carrier to be tested, the static electricity removing device may be turned on by arranging a gravity sensor on the sample carrier to be tested, and turning on the static electricity removing device according to a detection result of the gravity sensor; or a brightness sensor is arranged on the tested sample carrier, and whether the static electricity removing device is started or not is determined according to the detection result of the brightness sensor. The method for starting the static eliminator is not limited in the embodiment of the application, and a person skilled in the art can determine the method according to actual use needs.
Step 302, determining the working time of the static eliminating device.
for example, the working time of the static eliminator can be determined in such a way that after the static eliminator is detected to be started, a timing device can be started to time the working time of the static eliminator. The working time of the static eliminating device is not limited in the embodiment of the application, and can be determined by a person skilled in the art according to actual use needs.
And 303, when the working time meets the target time, starting a morphology information detection device to detect the morphology information of the detected sample.
For example, the target time may be determined according to the static amount in the air in the detection environment, for example, before the detected topographic information of the sample is detected, a device capable of measuring the static amount, such as a static tester, may be turned on to detect the static amount in the air in the current detection environment. When the static electricity amount in the current detection environment is detected, the static electricity eliminating operation can be performed in advance through the static electricity eliminating device, the time required by the static electricity eliminating device to eliminate the static electricity amount in the current detection environment is determined, and the time is used as the target time. Or different static electricity quantities may be associated with the target time in advance, and when the static electricity quantity of the air in the current detection environment is detected, the corresponding target time is matched according to the association relationship. The determination method of the target time is not limited in the embodiment of the application, and can be determined by a person skilled in the art according to actual use needs. When the working time of the static removing device meets the target time, the static electricity between the current appearance detection device and the detected sample is eliminated, and then the appearance information detection device is started to carry out appearance detection on the detected sample.
As an alternative embodiment of the present application, the working time of the static eliminating device can be 25s-35 s.
Illustratively, the working time of the static eliminating device can be 30 s. The working time of the static eliminating device is not limited in the embodiment of the application, and can be determined by a person skilled in the art according to actual use needs.
According to the morphology information detection method provided by the embodiment of the application, when a detected sample is placed on a detected sample carrier, the static electricity between the morphology detection device and the detected sample is eliminated by starting the static electricity removal device, and then the morphology information detection device is started to detect the morphology information of the detected sample, so that the influence of the static electricity between the morphology information detection device and the detected sample on the morphology detection result is avoided, and the accuracy of the morphology detection result and the morphology detection efficiency are improved.
As an alternative embodiment of the present application, step 303 includes:
Step 3031, when the working time meets the target time, the static eliminating device is closed, and the morphology information detection device is opened to detect the morphology information of the detected sample.
For example, in order to avoid the influence of the static eliminating device in the on state on the detection result of the profile information detection device, when the working time of the static eliminating device meets the target time, the profile information detection device is turned on after the static eliminating device is turned off. For example, when the static removing device is a de-ionization fan or a static removing ion tuyere, the generated wind may affect the stress condition of the AFM probe, and then affect the detection result of the detected sample.
an embodiment of the present application provides a profile information detecting apparatus, as shown in fig. 4, including:
And the static electricity removing device starting module 401 is used for starting the static electricity removing device when a tested sample is placed on the tested sample carrier.
A determining module 402, configured to determine an operating time of the static electricity removing apparatus.
A morphology information detection device starting module 403, configured to start a morphology information detection device to perform morphology information detection on the detected sample when the working time meets a target time.
The appearance information detection device that this application embodiment provided places on receiving by the sample carrier and receives the sample messenger, through opening static-removing device, to appearance detection device and receive the back of eliminating by the static between the sample, open appearance information detection device and detect the appearance information that receives the sample, avoided appearance information detection device and received the influence of the static between the sample to appearance testing result, improved appearance testing result's accuracy and appearance detection efficiency.
as an optional embodiment of the present application, the profile information detection device opening module 403 includes: and the morphology information detection device starting submodule is used for closing the static removing device and starting the morphology information detection device to detect the morphology information of the detected sample when the working time meets the target time.
As an alternative embodiment of the application, the working time of the static removing device is 25s-35 s.
The embodiment of the present application provides a profile information detecting apparatus, as shown in fig. 5, the profile information detecting apparatus may include a processor 501 and a memory 502, where the processor 501 and the memory 502 may be connected by a bus or by other means, and fig. 5 illustrates an example of a connection by a bus.
Processor 501 may be a Central Processing Unit (CPU). The Processor 501 may also be other general purpose processors, Digital Signal Processors (DSPs), Application Specific Integrated Circuits (ASICs), Field Programmable Gate Arrays (FPGAs) or other Programmable logic devices, discrete Gate or transistor logic devices, discrete hardware components, or combinations thereof.
the memory 502, which is a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as program instructions/modules corresponding to the morphological information detection method in the embodiment of the present invention (for example, the static elimination apparatus activation module 401, the determination module 402, and the morphological information detection apparatus activation module 403 shown in fig. 4). The processor 501 executes various functional applications and data processing of the processor by running non-transitory software programs, instructions and modules stored in the memory 502, that is, implements the topographic information detection method in the above method embodiments.
The memory 502 may include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program required for at least one function; the storage data area may store data created by the processor 501, and the like. Further, the memory 502 may include high speed random access memory, and may also include non-transitory memory, such as at least one magnetic disk storage device, flash memory device, or other non-transitory solid state storage device. In some embodiments, memory 502 optionally includes memory located remotely from processor 501, which may be connected to processor 501 via a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
The one or more modules are stored in the memory 502 and, when executed by the processor 501, perform the topographical information detection method as in the embodiment shown in fig. 3.
The details of the above-mentioned profile information detection device can be understood by referring to the corresponding related descriptions and effects in the embodiments shown in fig. 1 to fig. 4, which are not described herein again.
The appearance information detection equipment that this application embodiment provided places on receiving by the sample carrier and receives the sample messenger, through opening static-removing device, to appearance detection device and receive the back of eliminating by the static between the sample, open appearance information detection device and detect the appearance information that receives the sample, avoided appearance information detection device and received the influence of the static between the sample to appearance testing result, improved appearance testing result's accuracy and appearance detection efficiency.
The embodiment of the invention also provides a computer storage medium, wherein the computer storage medium stores computer executable instructions, and the computer executable instructions can execute the morphology information detection method in any method embodiment. The storage medium may be a magnetic Disk, an optical Disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a Flash Memory (Flash Memory), a Hard Disk (Hard Disk Drive, abbreviated as HDD), a Solid State Drive (SSD), or the like; the storage medium may also comprise a combination of memories of the kind described above.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (11)
1. A topographical information detection system, comprising:
A test sample carrier for holding a test sample;
The appearance information detection device comprises a miniature force sensitive element and is used for detecting the appearance information of the detected sample;
The static removing device is used for removing static between the miniature force sensitive element and the tested sample;
And the controller is connected with the morphology information detection device and the static removing device and is used for controlling the static removing device and the morphology information detection device to respectively carry out static removing and morphology information detection operations.
2. the system of claim 1, wherein the static discharge device comprises: any one or more of a deionization fan, a static electricity removal ion air nozzle or a static electricity removal lamp.
3. The system of claim 1, wherein the sample carrier under test comprises a gravity sensor coupled to the controller for detecting the sample under test.
4. The system of claim 1, wherein the sample carrier under test comprises a light sensor coupled to the controller for detecting the sample under test.
5. the system of claim 1, further comprising: and the timing device is connected with the controller and is used for determining the working time of the static eliminating device.
6. A method for detecting topographic information, comprising:
When a tested sample is placed on the tested sample carrier, the static removing device is started;
Determining the working time of the static eliminating device;
and when the working time meets the target time, starting a morphology information detection device to detect the morphology information of the detected sample.
7. The method of claim 6, wherein the turning on a profile information detection device to perform profile information detection on the tested sample when the working time meets a target time comprises:
and when the working time meets the target time, closing the static removing device, and opening the morphology information detection device to detect the morphology information of the detected sample.
8. The method of claim 6, wherein the static discharge device is operated for 25s to 35 s.
9. A profile information detection apparatus, comprising:
The static electricity removing device starting module is used for starting the static electricity removing device when a tested sample is placed on the tested sample carrier;
the determining module is used for determining the working time of the static eliminating device;
and the morphology information detection device starting module is used for starting the morphology information detection device to detect the morphology information of the detected sample when the working time meets the target time.
10. A profile information detecting apparatus, characterized by comprising: a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing the steps of the topography information detection method according to any of claims 6-8 when executing the program.
11. A readable computer storage medium having stored thereon computer instructions, characterized in that the instructions, when executed by a processor, carry out the steps of the topography information detection method according to any of claims 6-8.
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| CN201910917282.4A CN110568225A (en) | 2019-09-26 | 2019-09-26 | Morphology information detection system, method and device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112801941A (en) * | 2020-12-31 | 2021-05-14 | 深兰人工智能芯片研究院（江苏）有限公司 | Method, device and equipment for removing static electricity and storage medium |
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