CN210742302U - Appearance information detection system - Google Patents
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- CN210742302U CN210742302U CN201921623978.8U CN201921623978U CN210742302U CN 210742302 U CN210742302 U CN 210742302U CN 201921623978 U CN201921623978 U CN 201921623978U CN 210742302 U CN210742302 U CN 210742302U
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Abstract
The utility model discloses a appearance information detecting system, this appearance information detecting system, include: a test sample carrier for holding a test sample; the appearance information detection device comprises a miniature force sensitive element and is used for detecting the appearance information of the detected sample; the static removing device is used for removing static between the miniature force sensitive element and the tested sample; and the controller is respectively connected with the morphology information detection device and the static removing device, is connected with the morphology information detection device and the static removing device, and is used for controlling the static removing device and the morphology information detection device to respectively carry out static removing and morphology information detection operations. Through setting up the static-removing device, eliminate the static between appearance detection device and the sample that receives, avoided the influence of the static between appearance information detection device and the sample that receives to the appearance testing result, improved the accuracy and the appearance detection efficiency of appearance testing result.
Description
Technical Field
The utility model relates to an equipment detection area, concretely relates to appearance information detecting system.
Background
In the actual manufacturing and production process of products, the surface topography of a sample is usually detected to generate a product meeting the requirements. In the related art, a sample surface topography detecting apparatus determines a surface topography of a sample to be detected based on a principle of detecting a very weak interatomic interaction force between a surface of the sample to be detected and a micro force sensitive element. For example, an Atomic Force Microscope (AFM) is a device that senses and amplifies the Force between a probe on a cantilever and an atom of a sample to be measured by using a micro-cantilever, thereby detecting the surface topography of the sample. Namely, when the distance between atoms is reduced to a certain degree, the acting force between atoms is rapidly increased, and the height of the surface of the sample to be measured can be directly converted according to the stress of the probe, so that the information of the surface appearance of the sample to be measured is obtained.
When the AFM is used for detecting the surface topography of a detected sample, the probe descending speed is slowed or the probe cannot descend to a target position to prompt that the descending is finished due to the action of electrostatic force in the air, so that the accuracy of obtaining the surface topography information of the detected sample and the detection efficiency of the AFM are influenced; and static electricity generated in the air can also cause the resonance frequency of the probe to change, so that the amplitude of the probe is reduced, and the accuracy of the acquired surface topography information of the detected sample is also reduced.
Disclosure of Invention
Therefore, the to-be-solved technical problem of the utility model lies in overcoming the defect that correlation technique acquireed and surveyed sample surface topography information accuracy and inefficiency to a topography information detecting system is provided.
According to a first aspect, the embodiment of the utility model discloses topography information detecting system is disclosed, include: a test sample carrier for holding a test sample; the appearance information detection device comprises a miniature force sensitive element and is used for detecting the appearance information of the detected sample; the static removing device is used for removing static between the miniature force sensitive element and the tested sample; and the controller is connected with the morphology information detection device and the static removing device and is used for controlling the static removing device and the morphology information detection device to respectively carry out static removing and morphology information detection operations.
With reference to the first aspect, in a first embodiment of the first aspect, the static discharge apparatus includes: any one or more of a deionization fan, a static electricity removal ion air nozzle or a static electricity removal lamp.
With reference to the first aspect, in a second embodiment of the first aspect, the sample carrier under test comprises a gravity sensor connected to the controller for detecting the sample under test.
With reference to the first aspect, in a third embodiment of the first aspect, the sample carrier under test comprises a brightness sensor connected to the controller for detecting the sample under test.
With reference to the first aspect, in a fourth embodiment of the first aspect, the method further includes: and the timing device is connected with the controller and is used for determining the working time of the static eliminating device.
The embodiment of the utility model provides a technical scheme has following advantage:
the embodiment of the utility model provides a appearance information detection system places on receiving the sample carrier and receives the sample messenger, through opening static-removing device, to appearance detection device and receive the back of eliminating by the static between the sample, open appearance information detection device and detect the appearance information who receives the sample, avoided appearance information detection device and received the influence of the static between the sample to appearance testing result, improved appearance testing result's accuracy.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a topography information detection system according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a topography information detection system according to an embodiment of the present invention;
fig. 3 is a flowchart of a method for detecting topographic information according to an embodiment of the present invention;
fig. 4 is a block diagram of a topographic information detecting device according to an embodiment of the present invention;
fig. 5 is a block diagram of a device for detecting topographic information according to an embodiment of the present invention.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
In the actual manufacturing and production process of products, the surface topography of a sample is usually detected to generate a product meeting the requirements. In the related art, a sample surface topography detecting apparatus generally determines the surface topography of a sample to be detected based on the principle of detecting the extremely weak interatomic interaction force between the surface of the sample to be detected and a miniature force sensitive element. For example, an Atomic Force Microscope (AFM) is a device that senses and amplifies the Force between a probe on a cantilever and an atom of a sample to be measured by using a micro-cantilever, thereby detecting the surface topography of the sample. Namely, when the distance between atoms is reduced to a certain degree, the acting force between atoms is rapidly increased, and the height of the surface of the sample to be measured can be directly converted according to the stress of the probe, so that the information of the surface appearance of the sample to be measured is obtained.
When the AFM is used for detecting the surface topography of a detected sample, the probe descending speed is slowed or the probe cannot descend to a target position to prompt that the descending is finished due to the action of electrostatic force in the air, so that the accuracy of obtaining the surface topography information of the detected sample and the detection efficiency of the AFM are influenced; and static electricity generated in the air can also cause the resonance frequency of the probe to change, so that the amplitude of the probe is reduced, and the accuracy of the acquired surface topography information of the detected sample is also reduced. In order to solve the above technical problem, an embodiment of the present application provides a topographic information detecting system.
The embodiment of the present application provides a profile information detection system, as shown in fig. 1 and fig. 2, the profile information detection system includes a tested sample carrier 101, a profile information detection apparatus 102, a static electricity removal apparatus 103, and a controller 104:
a test sample carrier 101 for holding a test sample.
The sample carrier to be tested can be any carrier on which a sample to be tested can be placed, and the shape and other parameters of the sample carrier to be tested are not limited in the embodiments of the present application, and can be determined by those skilled in the art according to actual use needs. As shown in fig. 2, the sample carrier under test is a circular stage 201.
The profile information detection device 102 comprises a miniature force sensitive element for detecting the profile information of the tested sample.
For example, the profile information detection device may be an Atomic Force Microscope (AFM), or other detection device that can be used to detect profile information. As shown in fig. 2, the micro force sensing element is a micro-cantilever 202, the micro-cantilever 202 is driven to move up and down in a direction perpendicular to the surface of the sample by the change of atomic force between the probe of the probe 204 and the sample to be measured, and the position change of the micro-cantilever relative to each detection point of the sample to be measured is measured by an optical detection method or a tunnel current detection method, so as to obtain the topography information of the sample to be measured.
And the static removing device 103 is used for removing static between the miniature force sensitive element and the tested sample.
As an alternative embodiment of the present application, the static removing apparatus may include: any one or more of a deionization fan, a static electricity removal ion air nozzle or a static electricity removal lamp. The number and the type of the static removing devices are not limited in the embodiments of the present application, and can be determined by those skilled in the art according to the actual use requirement. The static removing device can remove static electricity between the micro force-sensitive element and the sample to be tested by aligning the static removing device with an air gap between the micro force-sensitive element and the sample to be tested or aligning the micro force-sensitive element for static removing operation. When the morphology information detection device is an AFM, the probe can be aligned to perform static electricity removal operation. As shown in fig. 2, the static electricity removing device is a deionizing fan 203.
And the controller 104 is connected with the morphology information detection device and the static electricity removal device and is used for controlling the static electricity removal device and the morphology information detection device to respectively perform static electricity removal and morphology information detection operations.
For example, taking the profile information detection device as an AFM as an example, after the static electricity elimination device performs the static electricity elimination operation, the AFM probe is lowered to the surface of the sample to be detected to perform the profile information detection. The operating mode of the AFM is classified in terms of the force between the probe and the sample, and may include a contact mode, a non-contact mode, or a tapping mode. The working mode of the AFM is not limited in the embodiment of the application.
The appearance information detection system that this application embodiment provided places on receiving by the sample carrier and receives the sample messenger, through opening static-removing device, to appearance detection device and receive the back that static between the sample is eliminated, open appearance information detection device and detect the appearance information that receives the sample, avoided appearance information detection device and received the influence of the static between the sample to appearance testing result, improved appearance testing result's accuracy and appearance detection efficiency.
As an alternative embodiment of the present application, the sample carrier 101 to be tested comprises a gravity sensor, which is connected to the controller 104 for testing the sample to be tested.
Exemplarily, whether the tested sample is placed on the tested sample carrier or not is detected by arranging the gravity sensor on the tested sample carrier, and the gravity sensor is connected with the controller, so that the controller can start the static removing device to perform static removing operation according to the detection result of the gravity sensor. The position and the number of the gravity sensors arranged on the tested sample carrier are not limited in the embodiment of the application, as long as the gravity sensors can detect the tested sample on the tested sample carrier, and the gravity sensors can be determined by a person skilled in the art according to actual use requirements.
As an alternative embodiment of the present application, the sample carrier 101 to be tested comprises a brightness sensor, which is connected to the controller 104 for testing the sample to be tested.
The controller is connected with the controller, so that the controller can start the static removing device to perform static removing operation according to the detection result of the brightness sensor. The position and the number of the brightness sensors arranged on the tested sample carrier are not limited in the embodiment of the application, as long as the brightness sensors can detect the tested sample on the tested sample carrier, and the brightness sensors can be determined by a person skilled in the art according to actual use requirements. In order to increase the accuracy of the brightness sensor for detecting the tested sample, the brightness sensor can be arranged on the tested sample carrier at the position aligned with the appearance detection device. For AFM, for example, the brightness sensor may be positioned on the sample carrier under test at a position aligned with the probe.
As an optional embodiment of the present application, the system further comprises: and the timing device is connected with the controller 104 and is used for determining the working time of the static electricity removing device 103.
Illustratively, after detecting that the static electricity eliminating device is started, the controller starts a timing device to time the working time of the static electricity eliminating device. The timing device can be integrated in the controller or arranged in the static removing device, and when the target static removing time is reached, a trigger signal is sent to the controller, so that the controller controls the morphology detecting device to be started.
The embodiment of the application provides a morphology information detection method, as shown in fig. 3, the morphology information detection method includes:
For example, when a sample to be tested is placed on the sample carrier to be tested, the static electricity removing device may be turned on by arranging a gravity sensor on the sample carrier to be tested, and turning on the static electricity removing device according to a detection result of the gravity sensor; or a brightness sensor is arranged on the tested sample carrier, and whether the static electricity removing device is started or not is determined according to the detection result of the brightness sensor. The method for starting the static eliminator is not limited in the embodiment of the application, and a person skilled in the art can determine the method according to actual use needs.
For example, the working time of the static eliminator can be determined in such a way that after the static eliminator is detected to be started, a timing device can be started to time the working time of the static eliminator. The working time of the static eliminating device is not limited in the embodiment of the application, and can be determined by a person skilled in the art according to actual use needs.
And 303, when the working time meets the target time, starting a morphology information detection device to detect the morphology information of the detected sample.
For example, the target time may be determined according to the static amount in the air in the detection environment, for example, before the detected topographic information of the sample is detected, a device capable of measuring the static amount, such as a static tester, may be turned on to detect the static amount in the air in the current detection environment. When the static electricity amount in the current detection environment is detected, the static electricity eliminating operation can be performed in advance through the static electricity eliminating device, the time required by the static electricity eliminating device to eliminate the static electricity amount in the current detection environment is determined, and the time is used as the target time. Or different static electricity quantities may be associated with the target time in advance, and when the static electricity quantity of the air in the current detection environment is detected, the corresponding target time is matched according to the association relationship. The determination method of the target time is not limited in the embodiment of the application, and can be determined by a person skilled in the art according to actual use needs. When the working time of the static removing device meets the target time, the static electricity between the current appearance detection device and the detected sample is eliminated, and then the appearance information detection device is started to carry out appearance detection on the detected sample.
As an alternative embodiment of the present application, the working time of the static eliminating device can be 25s-35 s.
Illustratively, the working time of the static eliminating device can be 30 s. The working time of the static eliminating device is not limited in the embodiment of the application, and can be determined by a person skilled in the art according to actual use needs.
According to the morphology information detection method provided by the embodiment of the application, when a detected sample is placed on a detected sample carrier, the static electricity between the morphology detection device and the detected sample is eliminated by starting the static electricity removal device, and then the morphology information detection device is started to detect the morphology information of the detected sample, so that the influence of the static electricity between the morphology information detection device and the detected sample on the morphology detection result is avoided, and the accuracy of the morphology detection result and the morphology detection efficiency are improved.
As an alternative embodiment of the present application, step 303 includes:
step 3031, when the working time meets the target time, the static eliminating device is closed, and the morphology information detection device is opened to detect the morphology information of the detected sample.
For example, in order to avoid the influence of the static eliminating device in the on state on the detection result of the profile information detection device, when the working time of the static eliminating device meets the target time, the profile information detection device is turned on after the static eliminating device is turned off. For example, when the static removing device is a de-ionization fan or a static removing ion tuyere, the generated wind may affect the stress condition of the AFM probe, and then affect the detection result of the detected sample.
An embodiment of the present application provides a profile information detecting apparatus, as shown in fig. 4, including:
and the static electricity removing device starting module 401 is used for starting the static electricity removing device when a tested sample is placed on the tested sample carrier.
A determining module 402, configured to determine an operating time of the static electricity removing apparatus.
A morphology information detection device starting module 403, configured to start a morphology information detection device to perform morphology information detection on the detected sample when the working time meets a target time.
The appearance information detection device that this application embodiment provided places on receiving by the sample carrier and receives the sample messenger, through opening static-removing device, to appearance detection device and receive the back of eliminating by the static between the sample, open appearance information detection device and detect the appearance information that receives the sample, avoided appearance information detection device and received the influence of the static between the sample to appearance testing result, improved appearance testing result's accuracy and appearance detection efficiency.
As an optional embodiment of the present application, the profile information detection device opening module 403 includes: and the morphology information detection device starting submodule is used for closing the static removing device and starting the morphology information detection device to detect the morphology information of the detected sample when the working time meets the target time.
As an alternative embodiment of the application, the working time of the static removing device is 25s-35 s.
The embodiment of the present application provides a profile information detecting apparatus, as shown in fig. 5, the profile information detecting apparatus may include a processor 501 and a memory 502, where the processor 501 and the memory 502 may be connected by a bus or by other means, and fig. 5 illustrates an example of a connection by a bus.
The memory 502 is a non-transitory computer-readable storage medium, and can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as program instructions/modules corresponding to the morphology information detection method in the embodiment of the present invention (for example, the static eliminator opening module 401, the determination module 402, and the morphology information detection device opening module 403 shown in fig. 4). The processor 501 executes various functional applications and data processing of the processor by running non-transitory software programs, instructions and modules stored in the memory 502, that is, implements the topographic information detection method in the above method embodiments.
The memory 502 may include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program required for at least one function; the storage data area may store data created by the processor 501, and the like. Further, the memory 502 may include high speed random access memory, and may also include non-transitory memory, such as at least one magnetic disk storage device, flash memory device, or other non-transitory solid state storage device. In some embodiments, memory 502 optionally includes memory located remotely from processor 501, which may be connected to processor 501 via a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
The one or more modules are stored in the memory 502 and, when executed by the processor 501, perform the topographical information detection method as in the embodiment shown in fig. 3.
The details of the above-mentioned profile information detection device can be understood by referring to the corresponding related descriptions and effects in the embodiments shown in fig. 1 to fig. 4, which are not described herein again.
The appearance information detection equipment that this application embodiment provided places on receiving by the sample carrier and receives the sample messenger, through opening static-removing device, to appearance detection device and receive the back of eliminating by the static between the sample, open appearance information detection device and detect the appearance information that receives the sample, avoided appearance information detection device and received the influence of the static between the sample to appearance testing result, improved appearance testing result's accuracy and appearance detection efficiency.
The embodiment of the utility model provides a still provide a computer storage medium, computer storage medium storage has computer executable instruction, and this computer executable instruction can carry out the appearance information detection method in the above-mentioned arbitrary method embodiment. The storage medium may be a magnetic disk, an optical disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a Flash Memory (Flash Memory), a Hard disk (Hard disk Drive, abbreviated as HDD), a Solid State Drive (SSD), or the like; the storage medium may also comprise a combination of memories of the kind described above.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (5)
1. A topographical information detection system, comprising:
a test sample carrier for holding a test sample;
the appearance information detection device comprises a miniature force sensitive element and is used for detecting the appearance information of the detected sample;
the static removing device is used for removing static between the miniature force sensitive element and the tested sample;
and the controller is connected with the morphology information detection device and the static removing device and is used for controlling the static removing device and the morphology information detection device to respectively carry out static removing and morphology information detection operations.
2. The system of claim 1, wherein the static discharge device comprises: any one or more of a deionization fan, a static electricity removal ion air nozzle or a static electricity removal lamp.
3. The system of claim 1, wherein the sample carrier under test comprises a gravity sensor coupled to the controller for detecting the sample under test.
4. The system of claim 1, wherein the sample carrier under test comprises a light sensor coupled to the controller for detecting the sample under test.
5. The system of claim 1, further comprising: and the timing device is connected with the controller and is used for determining the working time of the static eliminating device.
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| CN201921623978.8U CN210742302U (en) | 2019-09-26 | 2019-09-26 | Appearance information detection system |
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| CN201921623978.8U CN210742302U (en) | 2019-09-26 | 2019-09-26 | Appearance information detection system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110568225A (en) * | 2019-09-26 | 2019-12-13 | 全球能源互联网研究院有限公司 | Morphology information detection system, method and device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110568225A (en) * | 2019-09-26 | 2019-12-13 | 全球能源互联网研究院有限公司 | Morphology information detection system, method and device |
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