CN110560424A - Non-contact ultrasonic cleaning device for photoetching equipment - Google Patents
Non-contact ultrasonic cleaning device for photoetching equipment Download PDFInfo
- Publication number
- CN110560424A CN110560424A CN201910879546.1A CN201910879546A CN110560424A CN 110560424 A CN110560424 A CN 110560424A CN 201910879546 A CN201910879546 A CN 201910879546A CN 110560424 A CN110560424 A CN 110560424A
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- Prior art keywords
- cleaning
- guide rail
- cleaning device
- contact
- ultrasonic
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Abstract
The invention relates to the field of mechanical equipment, in particular to a non-contact ultrasonic cleaning device for photoetching equipment. The cleaning device comprises a cleaning device, a bracket, a guide rail and an air floatation device; a cleaning liquid circulating device is arranged in the center of the cleaning device; the cleaning liquid circulating device is provided with a water outlet at the central position and a water suction port arranged at the periphery; an ultrasonic generator is arranged around the water outlet; the air floatation device is arranged at the edge of the cleaning device; the guide rail is arranged on the bracket; the cleaning device is connected with the guide rail through a movable hanging piece.
Description
Technical Field
The invention relates to the field of mechanical equipment, in particular to a non-contact ultrasonic cleaning device for photoetching equipment.
Background
A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target position on the substrate. The projection water-proof cover of the equipment (such as an immersion lithography machine) such as the lithography machine, a silicon wafer platform and the like are often contacted with a silicon wafer with photoresist, so that the projection water-proof cover is polluted, and the silicon wafer is distorted due to particles on the silicon wafer platform, so that the operation precision of high-precision equipment, the processing technology of the silicon wafer and the like are seriously influenced. Therefore, it is necessary to clean the particular member which is often in contact with the resist and is likely to be contaminated. The cleaning of the prior art to such equipment mainly adopts marble to polish or whole part soaks the washing, wastes time and energy, and the efficiency ratio is lower and because what marble polished was adopted is contact clearance, therefore has the risk of damaging the part.
Disclosure of Invention
In view of the above technical problems, a first aspect of the present invention provides a non-contact ultrasonic cleaning apparatus, including a cleaning apparatus, a bracket, a guide rail, and an air flotation apparatus; a cleaning liquid circulating device is arranged in the center of the cleaning device; the cleaning liquid circulating device is provided with a water outlet at the central position and a water suction port arranged at the periphery; an ultrasonic generator is arranged around the water outlet; the air floatation device is arranged at the edge of the cleaning device; the guide rail is arranged on the bracket; the cleaning device is connected with the guide rail through a movable hanging piece.
as a preferable technical solution, the non-contact ultrasonic cleaning device is further provided with a gas circulation device.
as a preferable technical solution, the gas circulation device is disposed between the water suction port of the cleaning liquid circulation device and the air flotation device.
As a preferable technical scheme, the gas circulation device is provided with an air inlet in the inward direction and an air outlet in the vertical direction.
As a preferred technical scheme, a weight is arranged on the cleaning device.
As a preferred solution, the guide rail is connected to the support by a rotating strut.
As a preferred technical solution, the movable hanging piece is connected with the guide rail through a moving device.
as a preferred technical solution, the guide rail comprises a transverse guide rail and a longitudinal guide rail; the transverse guide rail is fixedly arranged on the bracket; the longitudinal guide rails are arranged on the transverse guide rails through a moving device.
As a preferred technical solution, the mobile device is a slot type mobile device, a sliding type mobile device or a rolling type mobile device.
A second aspect of the invention provides the use of a non-contact ultrasonic cleaning apparatus as described above in a cleaning process for a lithographic apparatus.
Has the advantages that: according to the invention, through the ingenious design of a cleaning solution circulating device, an air flotation device, a gas circulating device and the like of the cleaning device, the cleaning solution circulating device, the ultrasonic generator, the guide rail and the support are utilized, so that on one hand, pits which are easy to leak cleaning solution are avoided, on the other hand, the distance between the cleaning device and an object to be cleaned is effectively regulated and controlled by the air flotation device and the weight while the surfaces of parts which are easy to stain of high-precision equipment such as the whole photoetching equipment are completely cleaned, the direct contact between the cleaning device and the surface of the object to be cleaned is avoided, and the secondary pollution or damage to the object to be. Meanwhile, the gas circulating device is skillfully arranged, and the air knives are formed on the surfaces of the cleaning device and the cleaned object, so that the problems of waste and further pollution caused by the leakage of the cleaning liquid onto the silicon wafer table are avoided.
Drawings
FIG. 1 is a schematic view of a cleaning apparatus of the non-contact ultrasonic cleaning apparatus of the present invention.
Fig. 2 is a schematic structural view of a non-contact ultrasonic cleaning apparatus in embodiment 1 of the present invention.
FIG. 3 is a schematic view showing the structure of a non-contact ultrasonic cleaning apparatus according to examples 2 and 3 of the present invention.
1-cleaning device, 2-cleaning liquid circulating device, 2-1-water suction port, 2-2-water outlet, 3-gas circulating device, 3-1-gas inlet, 3-2-gas outlet, 4-weight, 5-air floating device, 6-photoetching machine silicon wafer table, 7-ultrasonic generator, 8-bracket, 9-moving device, 10-rotating support, 11-guide rail, 11-1-transverse guide rail, 11-2-longitudinal guide rail, 12-movable hanging piece and 14-connecting pipe.
Detailed Description
the technical features of the technical solutions provided by the present invention will be further clearly and completely described below with reference to the specific embodiments, and it should be apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
it will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "vertical", "inside", "outside", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
The meaning of "inner" in the present invention means that when the reader faces the attached drawings, the position of the center of the cleaning device is "inner", the position of the center of the cleaning device is deviated, and the position of the side edge of the cleaning device is the edge position, namely "outer".
The upper side of the reader's illustrated view is upper and the lower side of the reader is lower, not specifically limiting of the mechanism of the device of the present invention.
in view of the above technical problems, a first aspect of the present invention provides a non-contact ultrasonic cleaning apparatus, including a cleaning apparatus, a bracket, a guide rail, and an air flotation apparatus; a cleaning liquid circulating device is arranged in the center of the cleaning device; the cleaning liquid circulating device is provided with a water outlet at the central position and a water suction port arranged at the periphery; an ultrasonic generator is arranged around the water outlet; the air floatation device is arranged at the edge of the cleaning device; the guide rail is arranged on the bracket; the cleaning device is connected with the guide rail through a movable hanging piece.
in the non-contact ultrasonic cleaning device of the present invention, the shape of the cleaning device is not particularly limited, and any conventional shape, for example, a disk shape, may be selected. The cleaning device is characterized in that a cleaning liquid circulating system is arranged in the center of the cleaning device, and prepared cleaning liquid can be sprayed out through a central water outlet in the system, is in contact with dirt on the silicon wafer table for cleaning, and then flows back into the circulating system through a peripheral water suction port. In the present invention, the type of the cleaning solution is not particularly limited, and the cleaning solution may be ultrapure water or other types of cleaning solutions known to those skilled in the art.
the cleaning device is provided with an ultrasonic generator which is also called as an ultrasonic driving power supply. The ultrasonic generator is used for transmitting the electric signal to the cleaning liquid in a vibration mode, so that the cleaning liquid vibrates at high frequency on a silicon wafer platform, a projection water-proof cover surface of a photoetching machine and the like, stains are better removed, and a better cleaning effect is achieved. In addition, the position where the ultrasonic generator is disposed is not particularly limited in the present invention, as long as the cleaning liquid can be ultrasonically vibrated. In a preferred embodiment, the ultrasonic generators are positioned between the central water outlet and the peripheral water intake, which helps to cause the cleaning fluid to be ejected from the water outlet and to vibrate sufficiently to wash away stains before flowing from the water intake into the circulation system.
In the invention, in order to avoid the abrasion caused by the contact between the cleaning device and the projection water-proof cover surface of the silicon wafer platform and the photoetching machine to be cleaned, an air flotation device is arranged at the edge of the cleaning device. The air floating device sprays compressed air to the surface of the cleaned platform, so that buoyancy is generated, and the cleaning device is prevented from contacting the cleaned platform. The arrangement position of the air floating device does not influence the generation of buoyancy and the contact between the cleaning device and the cleaned platform, and the air floating device can be arranged at any position of the cleaning device as long as the cleaning device is ensured to stably float. In order not to affect the cleaning liquid circulating device of the cleaning device and the normal cleaning operation, the air floating device is arranged at the edge position of the cleaning device.
In order to enable the cleaning device to float on the surface of the platform to be cleaned more stably, avoid the contact between the cleaning device and the platform to be cleaned and better regulate and control the distance between the surface of the platform to be cleaned and the cleaning device, in one embodiment, a weight is arranged on the cleaning device. Through the weight can be better the regulation belt cleaning device's weight, also can coordinate with the produced buoyancy of air supporting device, regulation and control belt cleaning device's that can be better height that floats reaches and avoids the contact to cause secondary pollution and damage to the surface of being washd such as silicon chip platform, can also reach better abluent purpose.
in the invention, in order to avoid the cleaning liquid flowing out of the cleaning liquid circulating device from flowing out of the edge of the cleaning device and not completely flowing into the cleaning liquid circulating device for circulating cleaning, the cleaning device is provided with an air knife.
In some embodiments, the non-contact ultrasonic cleaning device is further provided with a gas circulation device; preferably, the gas circulating device is arranged between a water suction port of the cleaning liquid circulating device and the air floatation device; further preferably, the gas circulation device is provided with an air inlet in the inward direction and an air outlet in the vertical direction.
In the invention, a gas circulating device is arranged between the air floatation device and the water suction port of the cleaning liquid circulating device, and the gas circulating device is provided with a gas inlet and a gas outlet. The air inlet is oriented towards the inside of the cleaning device and towards the central position of the cleaning device, and the air outlet is oriented perpendicular to the surface of the platform to be cleaned. The gas circulation device is connected to a compressed air generator and injects compressed air through an air inlet onto the surface of the platform to be cleaned, the compressed air flows out through an air outlet by reflection from the platform to be cleaned, forming a so-called air knife. By means of the mode of spraying high-pressure gas from the outside and then spraying the gas from the inside, leakage of the cleaning liquid in the cleaning liquid circulating device can be ingeniously avoided.
The cleaning device is connected with the movable hanging piece through the connecting pipe; and the movable hanging piece is arranged on a guide rail through a moving device, and the guide rail is arranged on the bracket. Therefore, the cleaning device can move back and forth on the surface to be cleaned along with the movement of the movable hanging piece on the guide rail, so that the surface of the platform to be cleaned is completely covered, and the aim of complete cleaning is fulfilled.
the arrangement of the guide rail and the bracket is not specially limited, and the cleaning device can be driven to completely clean the surface to be cleaned.
in some embodiments, the guide rail is connected to the bracket by a rotating strut. This rotating support sets up on the support, can rotate on the support, and the one end of this guide rail is fixed to be set up rotating support is last, and along with rotating support's rotation, the guide rail can drive belt cleaning device and carry out the arc circuit on being washd the thing surface and remove like this. In order to enable the cleaning device to cover the entire surface of the part to be cleaned, in some embodiments, the movable hanger is connected to the guide rail by a moving device. The movable device is not specially limited, and can be a clamping groove type movable device, a sliding type movable device, a rolling type movable device and the like, components such as clamping grooves, sliding blocks, rolling strips and the like on a movable hanging piece and a guide rail can be utilized, so that the movable hanging piece drives the cleaning device to move along the direction of a circular diameter formed by the rotation of the guide rail, namely the rotation direction of the guide rail is vertical to the movement direction of the movable hanging piece, and thus the cleaning device can freely move in the transverse direction and the longitudinal direction, the surface of a cleaned object is comprehensively covered, the aim of comprehensive cleaning is fulfilled, and concave points where cleaning liquid is easy to leak can be avoided.
Of course, the arrangement of the bracket and the guide rail may not be the same as above. In some embodiments, the guide rails comprise a lateral guide rail and a longitudinal guide rail; the transverse guide rail is fixedly arranged on the bracket; the longitudinal guide rails are arranged on the transverse guide rails through a moving device. The moving device is not particularly limited, as long as the movable hanging piece can be driven to move on the guide rail. In some preferred embodiments, the mobile device is a slot-type mobile device, a sliding mobile device, or a rolling mobile device.
The transverse guide rail is fixedly arranged on the bracket and provides support for the longitudinal guide rail. The longitudinal guide rail is arranged on the transverse guide rail through the moving device, and can move transversely on the transverse guide rail through the moving device, which also means that the cleaning device can be driven by the longitudinal guide rail to move transversely. The movable hanging piece is arranged on the longitudinal guide rail through the moving device, and the moving device moves longitudinally on the longitudinal guide rail, which means that the cleaning device can be driven by the movable hanging piece to move longitudinally. Therefore, the movable hanging pieces on the longitudinal guide rail and the longitudinal guide rail can be regulated and controlled to move freely in the transverse direction and the longitudinal direction, so that the cleaning area of the cleaning device covers the whole cleaned part, and meanwhile, concave points which are easy to leak cleaning liquid can be avoided.
a second aspect of the invention provides the use of a non-contact ultrasonic cleaning apparatus as described above in a cleaning process for a lithographic apparatus.
The above is only a specific embodiment of the present disclosure, but the scope of the present disclosure is not limited thereto, and the scope of the present disclosure should be determined by the scope of the claims.
The present invention will be specifically described below by way of examples. It should be noted that the following examples are only for illustrating the present invention and should not be construed as limiting the scope of the present invention, and that the insubstantial modifications and adaptations of the present invention by those skilled in the art based on the above disclosure are still within the scope of the present invention.
Examples
Example 1
as shown in fig. 1 and 2, the embodiment provides a non-contact ultrasonic cleaning device, which comprises a cleaning device 1, a bracket 8, a guide rail 11 and an air floatation device 5;
A cleaning liquid circulating device 2 is arranged in the center of the cleaning device 1;
The cleaning liquid circulating device 2 is provided with a water outlet 2-2 at the central position and a water suction port 2-1 at the periphery;
An ultrasonic generator 7 is arranged around the water outlet 2-2;
The air floatation device 5 is arranged at the edge of the cleaning device 1;
the non-contact ultrasonic cleaning device is also provided with a gas circulating device 3;
the gas circulating device 3 is arranged between a water suction port 2-1 of the cleaning liquid circulating device 2 and the air floatation device 5;
The gas circulation device 3 is provided with a gas inlet 3-1 in the inward direction and a gas outlet 3-2 in the vertical direction of the cleaning device 1;
the cleaning device 1 is provided with a weight 4;
The guide rail 11 is arranged on the bracket 8 and is connected with the bracket 8 through a rotating support column 10;
The cleaning device 1 is connected with the movable hanging piece 12 through a connecting pipe 14;
The movable hanging piece 12 is connected with the guide rail 11 through a moving device 9;
The mobile device 9 is a rolling mobile device.
example 2
As shown in fig. 1 and 3, the present embodiment provides a non-contact ultrasonic cleaning apparatus, including a cleaning apparatus 1, a bracket 8, a guide rail 11, and an air flotation apparatus 5;
a cleaning liquid circulating device 2 is arranged in the center of the cleaning device 1;
The cleaning liquid circulating device 2 is provided with a water outlet 2-2 at the central position and a water suction port 2-1 at the periphery;
An ultrasonic generator 7 is arranged around the water outlet 2-2;
The air floatation device 5 is arranged at the edge of the cleaning device 1;
the non-contact ultrasonic cleaning device is also provided with a gas circulating device 3;
The gas circulating device 3 is arranged between a water suction port 2-1 of the cleaning liquid circulating device 2 and the air floatation device 5;
the gas circulating device 3 is provided with a gas inlet 3-1 in the inward direction and a gas outlet 3-2 in the vertical direction of the cleaning device 1;
the cleaning device 1 is provided with a weight 4;
The guide rail 11 comprises two transverse guide rails 11-1 and a longitudinal guide rail 11-2;
two ends of the transverse guide rail 11-1 are fixedly arranged on the bracket 8;
two ends of the longitudinal guide rail 11-2 are arranged on the transverse guide rail 11-1 through a moving device 9;
The cleaning device 1 is connected with the movable hanging piece 12 through a connecting pipe 14;
The movable hanging piece 12 is connected with the longitudinal guide rail 11-2 through a moving device 9;
The mobile device 9 is a rolling mobile device.
example 3
as shown in fig. 1 and 3, the present embodiment provides a non-contact ultrasonic cleaning apparatus, including a cleaning apparatus 1, a bracket 8, a guide rail 11, and an air flotation apparatus 5;
A cleaning liquid circulating device 2 is arranged in the center of the cleaning device 1;
the cleaning liquid circulating device 2 is provided with a water outlet 2-2 at the central position and a water suction port 2-1 at the periphery;
an ultrasonic generator 7 is arranged around the water outlet 2-2;
the air floatation device 5 is arranged at the edge of the cleaning device 1;
the non-contact ultrasonic cleaning device is also provided with a gas circulating device 3;
The gas circulating device is arranged between the water suction port of the cleaning liquid circulating device and the air floatation device;
The gas circulating device 3 is provided with a gas inlet 3-1 in the inward direction and a gas outlet 3-2 in the vertical direction of the cleaning device 1;
The cleaning device 1 is provided with a weight 4;
The guide rail 11 comprises two transverse guide rails 11-1 and a longitudinal guide rail 11-2;
Two ends of the transverse guide rail 11-1 are fixedly arranged on the bracket 8;
Two ends of the longitudinal guide rail 11-2 are arranged on the transverse guide rail 11-1 through a moving device 9;
The cleaning device 1 is connected with the movable hanging piece 12 through a connecting pipe 14;
a water outlet 2-2 and a water suction port 2-1 in the cleaning liquid circulating device 2 are connected with a water pipeline which is arranged inside the connecting pipe 14;
The movable hanging piece 12 is connected with the longitudinal guide rail 11-2 through a moving device 9;
the moving device 9 is a slot type moving device.
The drawings of the embodiments of the disclosure only relate to the structures related to the embodiments of the disclosure, and other structures can refer to the common design.
for purposes of clarity, the thickness of layers or regions in the figures used to describe embodiments of the present disclosure are exaggerated or reduced, i.e., the figures are not drawn on a true scale.
Without conflict, embodiments of the present disclosure and features of the embodiments may be combined with each other to arrive at new embodiments.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in other forms, and any person skilled in the art may modify or change the technical content disclosed above into an equivalent embodiment with equivalent changes, but all those simple modifications, equivalent changes and modifications made on the above embodiment according to the technical spirit of the present invention still belong to the protection scope of the present invention.
Claims (10)
1. a non-contact ultrasonic cleaning device is characterized by comprising a cleaning device, a bracket, a guide rail and an air floatation device; a cleaning liquid circulating device is arranged in the center of the cleaning device; the cleaning liquid circulating device is provided with a water outlet at the central position and a water suction port arranged at the periphery; an ultrasonic generator is arranged around the water outlet; the air floatation device is arranged at the edge of the cleaning device; the guide rail is arranged on the bracket; the cleaning device is connected with the guide rail through a movable hanging piece.
2. A non-contact ultrasonic cleaning apparatus according to claim 1 wherein the non-contact ultrasonic cleaning apparatus is further provided with a gas circulation means.
3. the ultrasonic non-contact cleaning apparatus according to claim 2, wherein the gas circulation device is disposed between a water suction port of the cleaning liquid circulation device and the air flotation device.
4. The ultrasonic non-contact cleaning apparatus according to claim 3, wherein the gas circulation means is provided with an air inlet in an inward direction and an air outlet in a vertical direction.
5. The non-contact ultrasonic cleaning device according to claim 1, wherein a weight is provided on the cleaning device.
6. the non-contact ultrasonic cleaning apparatus of claim 1, wherein the guide track is coupled to the support by a rotating strut.
7. the non-contact ultrasonic cleaning apparatus of claim 6, wherein the movable hanger is coupled to the guide rail by a moving device.
8. the non-contact ultrasonic cleaning device of claim 1, wherein the guide rails comprise a transverse guide rail and a longitudinal guide rail; the transverse guide rail is fixedly arranged on the bracket; the longitudinal guide rails are arranged on the transverse guide rails through a moving device.
9. the ultrasonic non-contact cleaning device according to claim 7 or 8, wherein the moving device is a slot-type moving device, a sliding-type moving device or a rolling-type moving device.
10. use of a non-contact ultrasonic cleaning device according to any one of claims 1 to 9 in a lithographic apparatus cleaning process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910879546.1A CN110560424A (en) | 2019-09-18 | 2019-09-18 | Non-contact ultrasonic cleaning device for photoetching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910879546.1A CN110560424A (en) | 2019-09-18 | 2019-09-18 | Non-contact ultrasonic cleaning device for photoetching equipment |
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| Publication Number | Publication Date |
|---|---|
| CN110560424A true CN110560424A (en) | 2019-12-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910879546.1A Pending CN110560424A (en) | 2019-09-18 | 2019-09-18 | Non-contact ultrasonic cleaning device for photoetching equipment |
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| CN (1) | CN110560424A (en) |
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| CN111215398A (en) * | 2020-02-26 | 2020-06-02 | 昆山国显光电有限公司 | Cleaning system and cleaning method for mask plate |
| CN111229728A (en) * | 2020-03-03 | 2020-06-05 | 河南科技大学 | Ultrasonic cleaning head for dry ultrasonic cleaning |
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| CN111229728A (en) * | 2020-03-03 | 2020-06-05 | 河南科技大学 | Ultrasonic cleaning head for dry ultrasonic cleaning |
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