CN110510615A - Guiding device for polycrystalline silicon reducing furnace and the reduction furnace with it - Google Patents
Guiding device for polycrystalline silicon reducing furnace and the reduction furnace with it Download PDFInfo
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- CN110510615A CN110510615A CN201910913385.3A CN201910913385A CN110510615A CN 110510615 A CN110510615 A CN 110510615A CN 201910913385 A CN201910913385 A CN 201910913385A CN 110510615 A CN110510615 A CN 110510615A
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- 230000009467 reduction Effects 0.000 title claims abstract description 82
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 55
- 239000000463 material Substances 0.000 claims description 17
- 230000007797 corrosion Effects 0.000 claims description 8
- 238000005260 corrosion Methods 0.000 claims description 8
- 229910000851 Alloy steel Inorganic materials 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
- 239000007789 gas Substances 0.000 description 80
- 102100033121 Transcription factor 21 Human genes 0.000 description 19
- 101710119687 Transcription factor 21 Proteins 0.000 description 19
- 229920005591 polysilicon Polymers 0.000 description 13
- 238000013461 design Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000000956 alloy Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 235000011299 Brassica oleracea var botrytis Nutrition 0.000 description 3
- 240000003259 Brassica oleracea var. botrytis Species 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 239000004484 Briquette Substances 0.000 description 2
- 235000014653 Carica parviflora Nutrition 0.000 description 2
- 241000243321 Cnidaria Species 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910000952 Be alloy Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
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- 230000035772 mutation Effects 0.000 description 1
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- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
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- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of guiding device for polycrystalline silicon reducing furnace and the reduction furnaces with it, the reduction furnace has air inlet, gas outlet and chassis, the gas outlet is formed in the center chassis of the reduction furnace, the guiding device includes: pod, pod it is top closed to prevent air-flow from causing gas turbulence in reduction furnace vertically into chassis；Supporting element, supporting element is vertically extending, and the upper end of the supporting element is connected with the pod and lower end is connected with the chassis；The connection gas outlet is formed on supporting element crosses gas portion.Guiding device according to the present invention for polycrystalline silicon reducing furnace, in the case where being changed without or being transformed the chassis of reduction furnace, by pod and gas portion is crossed to original reduction furnace gas progress water conservancy diversion, can significantly optimize the flow field in reduction furnace, eliminate in reduction furnace because air inlet, gas outlet are each perpendicular to the chassis of reduction furnace and caused by feeding gas and the mutual convection current of exhaust gas, turbulent flow condition.
Description
Technical field
The present invention relates to polysilicon manufacturing technology fields, more particularly, to a kind of guiding device for polycrystalline silicon reducing furnace
And the reduction furnace equipped with the above-mentioned guiding device for polycrystalline silicon reducing furnace.
Background technique
In the related technology, in field of polysilicon production, polycrystalline silicon reducing furnace is the core apparatus for producing polysilicon, effect
Be carried out in reduction furnace after mixing trichlorosilane or silicon tetrachloride gas with hydrogen reduction and pyrolysis, and
Polysilicon carrier surface carries out deposition growing, to obtain the polysilicon product of high-purity.And the gas flowfield pair in reduction furnace
It is influenced very in the reaction temperature of carrier surface, the density of molecular collision crystal and reaction condition various for crystallization rate etc.
Greatly.So guaranteeing that uniform, the symmetry of reduction fluid field in furnace are one of the essential condition for guaranteeing that polycrystalline silicon growth is controllable, and also
The main foundation of former furnace design.And to there is silicon rod top polysilicon silicon growth loose for current various types polycrystalline silicon reducing furnace
Situation, main cause are exactly that fluid field in furnace situations such as turbulent flow, convection current occurs.Solve flow field problems, it is necessary to reduction furnace
The design of air inlet, gas outlet improves.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art.For this purpose, one object of the present invention
It is to propose that a kind of guiding device for polycrystalline silicon reducing furnace, the guiding device for polycrystalline silicon reducing furnace are conducive to change
Gas flowfield in kind reduction furnace, guarantees the quality of production of polysilicon.
It is another object of the present invention to propose that a kind of reduction furnace, the reduction furnace include above-mentioned leading for reduction furnace
Flow device.
The guiding device for polycrystalline silicon reducing furnace of embodiment according to a first aspect of the present invention, the reduction furnace have into
Port, gas outlet and chassis, the gas outlet are formed in the center chassis of the reduction furnace, and the guiding device includes: to lead
Stream cover, the pod it is top closed to prevent air-flow from causing gas turbulence in reduction furnace vertically into the chassis；Branch
Support member, the supporting element is vertically extending, and the upper end of the supporting element is connected with the pod and lower end and the chassis phase
Even；Wherein, the connection gas outlet is formed on the supporting element crosses gas portion.
Guiding device according to an embodiment of the present invention for polycrystalline silicon reducing furnace, at the bottom for being changed without or being transformed reduction furnace
In the case where disk, by pod and gas portion is crossed to original reduction furnace gas progress water conservancy diversion, can significantly optimize reduction furnace
Interior flow field, eliminate in reduction furnace because air inlet, gas outlet be each perpendicular to the chassis of reduction furnace and caused by feeding gas and tail
The mutual convection current of gas gas, turbulent flow condition.
In addition, the guiding device according to the above embodiment of the present invention for reduction furnace also has following additional technology special
Sign:
According to some embodiments of the present invention, the pod is configured to rectangular, oval or hemispherical.
According to some embodiments of the present invention, the gas portion of crossing is configured to air passing hole.
Further, the air passing hole is configured to round, ellipse or polygon.
In some embodiments of the invention, the supporting element is configured to support column, the support column include it is multiple, it is more
A support column is opened up in the bottom interval of the pod and is set, and limits the air passing hole between the two neighboring support column.
Optionally, the supporting element is configured to support plate, the support plate include it is multiple, multiple support plates are led described
The bottom interval of stream cover, which opens up, to be set, and limits the air passing hole between the two neighboring support plate.
In some embodiments of the invention, the supporting element is configured to support ring, is formed in the support ring
State air passing hole.
According to some embodiments of the present invention, the guiding device is corrosion-resistant and high-temperature resistant material pieces.
Further, the guiding device is alloy steel products materials and parts.
According to some embodiments of the present invention, the opening area for crossing gas portion is not less than the area of the gas outlet.
The reduction furnace of embodiment according to a second aspect of the present invention, including the water conservancy diversion for polycrystalline silicon reducing furnace described above
Device.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures
Obviously and it is readily appreciated that, in which:
Fig. 1 is a schematic diagram of the guiding device for polycrystalline silicon reducing furnace according to an embodiment of the present invention；
Fig. 2 is a schematic diagram of the guiding device for polycrystalline silicon reducing furnace of another embodiment according to the present invention；
Fig. 3 is a schematic diagram of reduction furnace according to an embodiment of the present invention, wherein the reduction furnace is equipped with above-mentioned use
In the guiding device of polycrystalline silicon reducing furnace.
Appended drawing reference:
For the guiding device 100 of polycrystalline silicon reducing furnace,
Pod 1, supporting element 2 cross gas portion 21,
Reduction furnace 200,
Air inlet 210, gas outlet 220, chassis 230.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In the related technology, cowl designs each polysilicon producer in polycrystalline silicon reducing furnace gas outlet is not identical, and main function is past
Toward being designed for the effect protected to tail gas mouth, the effect in relation to tail gas mouth water conservancy diversion was both examined without accordingly design
Consider also without relevant design principle and thinking.And existing various gas outlet shields mostly use greatly sieve or substitution sieve
Construction, purpose is exactly not change the design airflow circulating direction of original reduction furnace to the full extent.
Had at present much for the improvement project of reduction furnace inlet jet, the application in many years knowhow and
It is initiative to propose to carry out diversion Design to gas outlet on the basis of computer simulation, achieve the effect that eliminate disengaging gas convection current, mention
The high quality of production of polysilicon.The current Patent design in relation to polycrystalline silicon reducing furnace gas outlet cover, primarily to preventing
Polysilicon rod lodging causes silico briquette to fall into what gas outlet was designed, and the principle of cowl designs is not change the direction of air-flow,
Reach and stops silico briquette effect.
Below with reference to the accompanying drawings guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace is described.
Referring to Figure 1 and Figure 3, the guiding device 100 for polycrystalline silicon reducing furnace of embodiment according to a first aspect of the present invention,
Reduction furnace 200 has air inlet 210, gas outlet 220 and chassis 230, and air inlet 210 and gas outlet 220 can be located at bottom
On disk 230, air inlet 210 may include it is multiple, gas outlet 220 may include one, and multiple air inlets 210 can surround outlet
Mouth 220 is arranged, and gas outlet 220 can be formed in 230 center of chassis of reduction furnace, and guiding device 100 includes: pod 1
And supporting element 2.
Specifically, pod 1 it is top closed to prevent air-flow vertically into the chassis 230 of the reduction furnace 200 and
Cause gas turbulence in reduction furnace 200.For example, pod 1 can be configured in some optional embodiments of the invention
The shape of lid can stop gas to flow to the chassis of reduction furnace 200 230, to be conducive to change by pod 1
The flow field of 200 interior air-flow of reduction furnace is eliminated in reduction furnace 200 because air inlet 210, gas outlet 220 are each perpendicular to reduction furnace 200
Chassis 230 and caused by feeding gas and the mutual convection current of exhaust gas, turbulent flow condition.
Supporting element 2 is vertically extending combined with Figure 1 and Figure 2, and the upper end of supporting element 2 is connected with pod 1 and lower end and chassis
230 are connected.Supporting element 2 in the application can not only play the role of supporting pod 1, can also play certain water conservancy diversion and make
With.
For example, supporting element 2 can extend along up and down direction shown in fig. 1 or fig. 2, the upper end of supporting element 2 can with lead
Stream cover 1 is connected, and the lower end of supporting element 2 can be connected with chassis 230.Water conservancy diversion can not only be fixed by supporting element 2 as a result,
Cover 1 can also prevent deviation original position in 100 operational process of guiding device from causing operation troubles, to be conducive to improve water conservancy diversion dress
Set 100 use reliability and stability.
In some optional embodiments of the invention, supporting element 2 can be for example, by the mode phase of welding with pod 1
Even etc., the present invention is not especially limited this.
Wherein, connection gas outlet 220 is formed on supporting element 2 crosses gas portion 21.For example, could be formed on supporting element 2
Gas portion 21 is crossed, crossing gas portion 21 can be connected to gas outlet 220.Gas portion 21 of crossing in the application is suitable for existing reduction furnace 200
Process conditions.The gas entered in reduction furnace 200 by air inlet 210 as a result, can be carried out water conservancy diversion and blocking, warp by pod 1
It is discharged again by gas outlet 220 after changing the flow field of air-flow by crossing gas portion 21.
The present invention is not construed as limiting the specific constructive form of supporting element 2, and the shape of supporting element 2 allows for preventing from running
It is broken in journey, and gas barrier structure is caused to fall blocking gas outlet 220, causing to build the pressure in furnace generates safety accident.
The specific size of guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace can according to need
The reduction furnace apparatus gas outlet size of installation, electrode for reduction furnace arrangement are designed, and verify flow field by computer simulation.
Guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace, by using a kind of top closed
Pod 1, air-flow can be prevented to cause in reduction furnace 200 gas turbulence existing vertically into the chassis 230 of reduction furnace 200
As.Simultaneously using the method for Engineering Simulation simulation (for example, passing through Fluent software etc.), the height of guiding device 100 can root
It is specifically optimized according to the different type of furnaces, structure of accessory etc., to reach preferably rectification effect.
Guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace, is being changed without or is being transformed reduction furnace
In the case where 200 chassis 230, by pod 1 and crosses gas portion 21 water conservancy diversion is carried out to gas in original reduction furnace 200, it can be with
Significantly optimize the flow field in reduction furnace 200, eliminates in reduction furnace 200 because air inlet 210, gas outlet 220 are each perpendicular to also
The chassis 230 of former furnace 200 and caused by feeding gas and the mutual convection current of exhaust gas, turbulent flow condition.
Referring to Figures 1 and 2, according to some embodiments of the present invention, pod 1 is configured to rectangular, oval or hemisphere
Shape.For example, pod 1 can be configured to rectangular, oval or hemispherical in some optional embodiments of the invention
Deng.The present invention is not construed as limiting the specific structure shape of pod 1, can according to need adaptability setting in practical application.
According to some embodiments of the present invention, gas portion 21 is crossed combined with Figure 1 and Figure 2, be configured to air passing hole.For example, at this
In some optional embodiments of invention, gas portion 21 can be configured to air passing hole (or air drain etc. excessively) excessively, and the air passing hole can
To include one or more, when the air passing hole includes multiple, the multiple air passing hole is spaced apart setting.It is retouched in of the invention
In stating, the meaning of " plurality " is two or more.
Further, the air passing hole is configured to round, ellipse or polygon.For example, it is of the invention it is some can
In the embodiment of choosing, the air passing hole can be configured to round, ellipse or polygon etc..The above-mentioned shape to the air passing hole
The description of shape is only exemplary, and is not considered as limiting the invention, in fact, the air passing hole may be configured as
Abnormity etc., this will be understood by one skilled in the art.
In some embodiments of the invention, supporting element 2 is configured to support column, the support column include it is multiple, it is multiple
Support column is opened up in the bottom interval of pod 1 and is set, and limits the air passing hole between the two neighboring support column.For example,
In some optional embodiments of the invention, supporting element 2 can be configured to support column, and the support column may include more
A, multiple support columns are opened up in the bottom interval of pod 1 and are set, and can be limited between two adjacent support columns
The air passing hole.The invention is not limited thereto, and in some optional embodiments of the invention, supporting element 2 can also be configured to
Support plate, the support plate include it is multiple, multiple support plates are opened up in the bottom interval of pod 1 and are set, described in adjacent two
The air passing hole can be limited between support plate.
The invention is not limited thereto, and in some embodiments of the invention, supporting element 2 can also be configured to support ring, institute
It states and is formed with the air passing hole in support ring.
The description of the above-mentioned structure type to supporting element 2 is only exemplary, and is not considered as limiting the invention, this
Invention is not construed as limiting the specific constructive form of supporting element 2, can according to need adaptability setting in practical application.
According to some embodiments of the present invention, guiding device 100 is corrosion-resistant and high-temperature resistant material pieces.For example, in the present invention
Some optional embodiments in, the material of entire guiding device 100 can be by hydrogen resistant burn into acid corrosion-resistant, conjunction resistant to high temperature
Golden material is made.
Further, guiding device 100 can be alloy steel material part.As a result, by making guiding device 100 select alloy
Steel materials and parts prevent guiding device 100 to polysilicon product so that guiding device 100 can have certain high-temperature stability
Form secondary pollution.
Specifically, alloy material can use RA330 alloy, RA330 alloy have high temperature resistant, corrosion-resistant and chlorine-resistant from
The advantages that sub- corrosion cracking.
RA330 alloy is a kind of high-performance high-temperature alloy of classics.Element silicon by being added to 1.25% makes its tool
There is an elevated temperature strength well, up to 1200 DEG C whens still have good resistance to carbonization, oxidation resistent susceptibility.RA330 specific aim simultaneously
Design come bear quenching thermal shock.RA330 alloy has the ability of very excellent anti-chlorine ion stress corrosion cracking.
According to some embodiments of the present invention, the opening area for crossing gas portion 21 is not less than the area of gas outlet 220.For example,
In some optional embodiments of the invention, the opening area for crossing gas portion 21 can be more than or equal to the face of gas outlet 220
Product.As a result, when guiding device 100 is applied on reduction furnace 200, the pressure in reduction furnace 200 is advantageously ensured that, improve reduction
The operation stability of furnace 200.
If the opening area for crossing gas portion 21 is less than the area of gas outlet 220, just represent after increasing guiding device 100,
Effective discharge area is less than former design area, under maximum feeding conditions, is likely to result in furnace pressure raising, this is to this field
Technical staff for will be understood by.
The invention proposes the schemes that water conservancy diversion is carried out to chassis of reducing furnace gas outlet.Because CVD (chemical vapor deposition,
Chemical Vapor Deposition (CVD)) operating condition of reduction furnace will be according to specific production constantly adjustment, so working as
Reduction furnace in order to optimize flow field can optimize modification after going into operation to every spare part, and the direction of modification often focused on for
In the modification of reduction furnace nozzle of air supply, the present invention using in such a way that chassis of reducing furnace gas outlet carries out water conservancy diversion, optimizes for the first time
Furnace gas flow field.
Guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace is selected and is closed by the way of blocking
Suitable corrosion-resistant and high-temperature resistant material, utilizing works simulation softward optimize opinion to the furnace gas flow field of different reduction furnaces 200
Card, after increasing guiding device 100 at gas outlet 220, the flow field in reduction furnace 200 is significantly improved, effective anti-
Stop in 200 operational process of reduction furnace, tolerance constantly changes the mutation for causing local gas flow velocity in furnace, it is therefore prevented that turbulent flow in furnace
Cause the gas flow on silicon rod surface to change, to form more evenly consistent air-flow environment, ensure that each position of silicon rod
Reaction temperature, pressure, density CONSENSUS, to increase substantially the fine and close material ratio of separate unit stove, effectively prevent cauliflower material,
The generation of loose material.
Guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace, using blocking gas flowing
Method optimizing fluid field in furnace, eliminate the effect that liquidates of the inside of reduction furnace 200 gas up and down.
Wherein, pod 1 can use various shape, and rectangular, oval, semi-round ball etc. can play and stop gas stream
Dynamic effect.As long as crossing gas portion 21 guarantees the position of fixed top pod 1 (choke part), and can guarantee gas circulation i.e.
Can, it is not limited to using column structure, plate structure, hole configurations etc..The dimensional height of guiding device 100 is by being used in not
With hearth type reduction test, be calculated, height dimension according to the furnace tube shape and gas outlet size of different reduction furnaces determine, no
It is limited to proportional sizes shown by schematic diagram.
Guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace, the chassis suitable for reduction furnace 200
Reduction furnace 200 of 230 centers as tail gas mouth (such as gas outlet 220) significantly improves gas flowfield in reduction furnace 200.
Guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace, is able to solve existing center port
The 200 flow field problem of non-uniform of reduction furnace of outlet, solve because flow field unevenly caused by polysilicon rod growthform is loose, coral
The problem of coral shape is grown.
Present inventor is had found by multiple actual verification: the reduction furnace product before guiding device 100 is not used,
The case where being extended out there are silicon rod surface cauliflower material and silicon rod.And the reduction furnace 200 produced using guiding device 100, silicon rod top
The cauliflower material in portion is eliminated, and the polysilicon rod of annular arrangement does not occur outer ring silicon rod in outside diffusion type again.
The reduction furnace 200 of embodiment according to a second aspect of the present invention, including the above-mentioned water conservancy diversion for polycrystalline silicon reducing furnace
Device 100.As a result, by be arranged on the reduction furnace 200 above-mentioned first aspect embodiment for polycrystalline silicon reducing furnace
Guiding device 100 can prevent air-flow from causing gas turbulence in reduction furnace 200 existing vertically into the chassis 230 of reduction furnace 200
As.
Other of guiding device 100 according to an embodiment of the present invention for polycrystalline silicon reducing furnace and the reduction furnace with it
Constituting and operating all is known for those of ordinary skills, is not detailed herein.
In the description of the present invention, it is to be understood that, term " center ", "vertical", " transverse direction ", " height ", "upper",
The orientation or positional relationship of the instructions such as "lower", "horizontal", "top", "bottom", "inner", "outside", " axial direction ", " radial direction ", " circumferential direction " is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair
Limitation of the invention.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " illustrative examples ",
The description of " example ", " specific example " or " some examples " etc. means specific features described in conjunction with this embodiment or example, knot
Structure, material or feature are included at least one embodiment or example of the invention.In the present specification, to above-mentioned term
Schematic representation may not refer to the same embodiment or example.Moreover, specific features, structure, material or the spy of description
Point can be combined in any suitable manner in any one or more of the embodiments or examples.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: not
A variety of change, modification, replacement and modification can be carried out to these embodiments in the case where being detached from the principle of the present invention and objective, this
The range of invention is defined by the claims and their equivalents.
Claims (11)
1. a kind of guiding device for polycrystalline silicon reducing furnace, which is characterized in that the reduction furnace have air inlet, gas outlet with
And chassis, the gas outlet are formed in the center chassis of the reduction furnace, the guiding device includes:
Pod, the pod it is top closed to prevent air-flow from causing vertically into the chassis reduction furnace gas rapid
Stream；
Supporting element, the supporting element is vertically extending, the upper end of the supporting element be connected with the pod and lower end with it is described
Chassis is connected；
Wherein, the connection gas outlet is formed on the supporting element crosses gas portion.
2. the guiding device according to claim 1 for polycrystalline silicon reducing furnace, which is characterized in that the pod is by structure
Cause rectangular, oval or hemispherical.
3. the guiding device according to claim 1 for polycrystalline silicon reducing furnace, which is characterized in that the gas portion of crossing is by structure
Cause air passing hole.
4. the guiding device according to claim 3 for polycrystalline silicon reducing furnace, which is characterized in that the air passing hole is by structure
Cause round, ellipse or polygon.
5. the guiding device according to claim 3 for polycrystalline silicon reducing furnace, which is characterized in that the supporting element is by structure
Cause support column, the support column include it is multiple, multiple support columns are opened up in the bottom interval of the pod and are set, two neighboring
The air passing hole is limited between the support column.
6. the guiding device according to claim 3 for polycrystalline silicon reducing furnace, which is characterized in that the supporting element is by structure
Cause support plate, the support plate include it is multiple, multiple support plates are opened up in the bottom interval of the pod and are set, two neighboring
The air passing hole is limited between the support plate.
7. the guiding device according to claim 3 for polycrystalline silicon reducing furnace, which is characterized in that the supporting element is by structure
Support ring is caused, the air passing hole is formed in the support ring.
8. the guiding device according to claim 1 for polycrystalline silicon reducing furnace, which is characterized in that the guiding device is
Corrosion-resistant and high-temperature resistant material pieces.
9. the guiding device according to claim 8 for polycrystalline silicon reducing furnace, which is characterized in that the guiding device is
Alloy steel products materials and parts.
10. the guiding device according to claim 1 to 9 for polycrystalline silicon reducing furnace, which is characterized in that institute
The opening area for stating gas portion is not less than the area of the gas outlet.
11. a kind of reduction furnace, which is characterized in that be used for polycrystalline reduction including according to claim 1 to 10
The guiding device of furnace.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910913385.3A CN110510615A (en) | 2019-09-25 | 2019-09-25 | Guiding device for polycrystalline silicon reducing furnace and the reduction furnace with it |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910913385.3A CN110510615A (en) | 2019-09-25 | 2019-09-25 | Guiding device for polycrystalline silicon reducing furnace and the reduction furnace with it |
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| CN110510615A true CN110510615A (en) | 2019-11-29 |
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| CN201910913385.3A Pending CN110510615A (en) | 2019-09-25 | 2019-09-25 | Guiding device for polycrystalline silicon reducing furnace and the reduction furnace with it |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115092932A (en) * | 2022-07-04 | 2022-09-23 | 衡阳凯新特种材料科技有限公司 | Reduction furnace for producing polycrystalline silicon and feeding control method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101633503A (en) * | 2009-09-01 | 2010-01-27 | 上海森松能源设备有限公司 | Double-layer air-guide heat insulation shield of polysilicon hydriding furnace |
| CN202415170U (en) * | 2011-09-09 | 2012-09-05 | 上海森松环境技术工程有限公司 | Tail gas outlet device of polycrystalline silicon reduction furnace |
| CN203128212U (en) * | 2013-04-02 | 2013-08-14 | 新特能源股份有限公司 | Energy-saving hydrogenation furnace internal part |
| CN105645415A (en) * | 2016-03-16 | 2016-06-08 | 黄河水电光伏产业技术有限公司 | Gas flow controller for polycrystalline silicon reduction furnace |
| CN209065431U (en) * | 2018-08-16 | 2019-07-05 | 青海黄河上游水电开发有限责任公司新能源分公司 | Polysilicon reducing furnace tail gas shield, polycrystalline silicon reducing furnace and polycrystalline silicon production system |
| CN210825445U (en) * | 2019-09-25 | 2020-06-23 | 洛阳中硅高科技有限公司 | Flow guide device for polycrystalline silicon reduction furnace and reduction furnace with flow guide device |
-
2019
- 2019-09-25 CN CN201910913385.3A patent/CN110510615A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101633503A (en) * | 2009-09-01 | 2010-01-27 | 上海森松能源设备有限公司 | Double-layer air-guide heat insulation shield of polysilicon hydriding furnace |
| CN202415170U (en) * | 2011-09-09 | 2012-09-05 | 上海森松环境技术工程有限公司 | Tail gas outlet device of polycrystalline silicon reduction furnace |
| CN203128212U (en) * | 2013-04-02 | 2013-08-14 | 新特能源股份有限公司 | Energy-saving hydrogenation furnace internal part |
| CN105645415A (en) * | 2016-03-16 | 2016-06-08 | 黄河水电光伏产业技术有限公司 | Gas flow controller for polycrystalline silicon reduction furnace |
| CN209065431U (en) * | 2018-08-16 | 2019-07-05 | 青海黄河上游水电开发有限责任公司新能源分公司 | Polysilicon reducing furnace tail gas shield, polycrystalline silicon reducing furnace and polycrystalline silicon production system |
| CN210825445U (en) * | 2019-09-25 | 2020-06-23 | 洛阳中硅高科技有限公司 | Flow guide device for polycrystalline silicon reduction furnace and reduction furnace with flow guide device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115092932A (en) * | 2022-07-04 | 2022-09-23 | 衡阳凯新特种材料科技有限公司 | Reduction furnace for producing polycrystalline silicon and feeding control method |
| CN115092932B (en) * | 2022-07-04 | 2023-08-22 | 衡阳凯新特种材料科技有限公司 | Reduction furnace for producing polycrystalline silicon and feeding control method |
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