CN110509205B - Suction plate - Google Patents
Suction plate Download PDFInfo
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- CN110509205B CN110509205B CN201910774720.6A CN201910774720A CN110509205B CN 110509205 B CN110509205 B CN 110509205B CN 201910774720 A CN201910774720 A CN 201910774720A CN 110509205 B CN110509205 B CN 110509205B
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- plate
- panel
- vacuum
- suction plate
- groove
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
Abstract
The invention relates to the technical field of pneumatics, in particular to a suction plate, which comprises a porous plate and a panel which are sequentially laminated, wherein the panel comprises a bearing surface which is used for being back to the porous plate, the bearing surface is used for being contacted with an object to be detected, and a vacuum hole is arranged in the bearing surface; the material of perforated plate is porous material, has a plurality of trompils in the perforated plate, and the vacuum hole is ventilated and is communicated with the trompil, and panel surface roughness is less than perforated plate surface roughness. The middle panel of the suction plate, the porous plate and the base are arranged in a laminated manner, the porous plate comprises uniformly distributed open pores, and at least part of the area of the panel comprises vacuum holes; on the other hand, the suction plate can adsorb objects with various sizes and has higher compatibility; in addition, the suction plate can prevent the surface of the object to be adsorbed from being damaged.
Description
Technical Field
The invention relates to the technical field of pneumatics, in particular to a suction plate.
Background
The pneumatic technology is an important means for realizing industrial automation, and a vacuum system is widely applied to various manufacturing industries as a means for realizing automation. The vacuum system is composed of vacuum elements, and the vacuum adsorption element is an element for directly sucking and hanging objects and is an actuating element in the vacuum system.
Currently, a common vacuum suction element includes a vacuum chuck and a vacuum suction plate. The vacuum chuck can be used for adsorbing various regular and/or irregular products, the surface of the vacuum chuck comprises a rubber soft structure, the vacuum chuck can effectively protect the products, and the vacuum chuck is stable and reliable. Vacuum suction plates are commonly used to adsorb flat, regular products. However, when the vacuum chuck and the vacuum suction plate are used for sucking and hanging objects, air leakage can occur to the vacuum chuck or the vacuum suction plate due to the fact that the size of the objects is not matched with the size of the chuck or the suction plate, the vacuum degree of the vacuum chuck or the vacuum suction plate is reduced, and the adsorption capacity is weakened; if the vacuum chuck or the vacuum suction plate needs to keep higher vacuum degree and stronger adsorption capacity, the size of the vacuum chuck and the vacuum suction plate needs to be strictly matched with an object to be sucked and hung.
Disclosure of Invention
In order to solve the above problems, an object of the present invention is to provide a suction plate which can maintain a high degree of vacuum and has strong adsorption; on the other hand, the suction plate can adsorb objects with various sizes and has higher compatibility; in addition, the suction plate can prevent the surface of the object to be adsorbed from being damaged.
The suction plate comprises a bearing surface which is used for being back to the porous plate and is used for being contacted with an object to be tested, and a vacuum hole is formed in the bearing surface; the material of perforated plate is porous material, has a plurality of trompils in the perforated plate, and the vacuum hole is ventilated and is communicated with the trompil, and panel surface roughness is less than perforated plate surface roughness.
Further, the gap between the panel and the perforated plate is communicated with the outside only through the open holes and the vacuum holes.
Further, the diameter of the vacuum holes is larger than the diameter of the open holes.
Further, the porosity of the openings in the perforated plate is greater than the porosity of the vacuum holes in the panel.
Further, the perforated plate has openings with a diameter of less than 100 μm.
Further, the material of the porous plate is microporous ceramic.
Furthermore, the porosity of the porous plate is 30-50%; the diameter of the opening of the porous plate is 2um-30 um.
Further, the material of the panel is a quartz glass plate.
Furthermore, the suction plate also comprises a base, and the porous plate is positioned between the base and the panel; the base is provided with a vent hole, the vent hole is communicated with the opening hole, and the vent hole is used for being communicated with the vacuum equipment.
Furthermore, the base is provided with a containing groove, the panel and the porous plate are positioned in the containing groove, the side wall of the containing groove is sealed with the side wall of the porous plate, and the side wall of the containing groove is sealed with the side wall of the panel.
Further, the bottom of the accommodating groove is provided with a buffer cavity which is communicated with the vent hole.
Furthermore, the buffer cavity is provided with an air channel groove, and the width of each part of the air channel groove is the same.
Further, the buffer cavity comprises a corner area and a main area, and the air passage grooves are distributed in the corner area and the main area.
Furthermore, the bearing surface is provided with an adsorption area, the adsorption area is provided with a vacuum hole, and the projection of the buffer cavity on the bearing surface covers the adsorption area.
Furthermore, a first bulge is arranged on the surface of the side wall of the accommodating groove, a first embedding groove is formed in the side wall of the first bulge, and the side wall of the porous plate is embedded into the first embedding groove;
and/or the surface of the side wall of the accommodating groove is provided with a second protrusion, the side wall of the second protrusion is provided with a second embedding groove, and the side wall of the panel is embedded into the second embedding groove.
Furthermore, the suction plate also comprises a positioning groove for positioning.
The invention has the beneficial effects that: the suction disc includes panel and perforated plate, panel roughness is less than perforated plate roughness, makes loading end and determinand contact, can reduce the damage of perforated plate to determinand surface, just the perforated plate has the trompil, and the trompil can form crooked pore for the hole that link up each other, the trompil communicates with the vacuum hole is ventilated, and the suction disc is in the use, even the determinand size is less or the determinand does not laminate with the loading end, leads to one or more vacuum hole gas leakage, because the vacuum hole with through pore and vacuum apparatus intercommunication, the diameter of pore crooked and trompil is less, is difficult to influence the suction in other vacuum holes consequently.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is an exploded view of a suction plate according to the present invention;
FIG. 2a is a schematic view of the assembly of the suction plate structure with non-uniform distribution of vacuum holes according to the present invention;
FIG. 2b is a schematic view of the assembly of the suction plate structure with uniformly distributed vacuum holes according to the present invention;
FIG. 3 is a schematic view of the base structure of the suction plate of the present invention;
FIG. 4 is a schematic cross-sectional view of an assembly drawing of a suction plate according to the present invention.
Wherein the reference numerals are: 1-panel, 2-perforated plate, 3-base, 4-vent hole, 5-U-shaped air channel groove, 6-L-shaped air channel groove, 7-positioning groove.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 4, a suction plate comprises a porous plate 2 and a panel 1 which are sequentially stacked, wherein the panel 1 comprises a bearing surface which is used for being back to the porous plate 2 and is used for being contacted with an object to be detected, and a vacuum hole is arranged in the bearing surface; the material of perforated plate 2 is porous material, has a plurality of trompils in the perforated plate, and the vacuum hole is ventilated and is communicated with the trompil, and panel 1 surface roughness is less than perforated plate 2 surface roughness.
The invention has the beneficial effects that: the suction disc includes panel 1 and perforated plate 2, and 1 roughness of panel is less than 2 roughness of perforated plate, makes loading end and determinand contact, can reduce the damage of perforated plate 2 to determinand surface, and perforated plate 2 has the trompil, and the trompil can form crooked pore for the hole that link up each other, the intercommunication is ventilated with the vacuum hole to the trompil, and the suction disc is in the use, even the determinand size is less or determinand and loading end do not laminate, leads to one or more vacuum hole gas leakage, because the vacuum hole with through pore and vacuum apparatus intercommunication, the diameter of pore crooked and trompil is less, consequently is difficult to influence the suction in other vacuum holes.
In the embodiment, the suction plate further comprises a base 3, the porous plate 2 is located between the base 3 and the panel 1, the base 3 is provided with vent holes 4, the vent holes 4 are communicated with the opening, the vent holes 4 are used for being communicated with vacuum equipment, the number of the vent holes 4 can be one or more, and the number is not limited herein; in this embodiment, the number of the suction holes 4 is two;
in the embodiment, the base 3 is provided with a containing groove, the panel 1 and the porous plate 2 are positioned in the containing groove, the side wall of the containing groove is sealed with the side wall of the porous plate 2, and a closed space is formed between the porous plate 2 and the base 3; the side wall of the accommodating groove is sealed with the side wall of the panel 1; in the embodiment, the bottom of the accommodating groove is provided with a buffer cavity which is communicated with the vent hole 4; the projection of the buffer cavity on the bearing surface covers the adsorption area.
In the embodiment, the surface of the side wall of the accommodating groove of the base 3 is provided with a first protrusion, the side wall of the first protrusion is provided with a first embedding groove (not shown), and the side wall of the porous plate 2 is embedded into the first embedding groove; and/or a second protrusion is arranged on the surface of the side wall of the accommodating groove, a second embedding groove (not marked in the figure) is arranged in the side wall of the second protrusion, and the side wall of the panel 1 is embedded into the second embedding groove.
After the porous plate 2 is embedded into the accommodating groove in the base 3, the porous plate 2 is sealed with the side wall of the accommodating groove, and the porous plate 2 is contacted with the convex part of the gas path groove in the accommodating groove; the porous plate 2 is covered on the convex part of the air channel groove, so that an air channel which can be used for air flow to circulate is formed between the porous plate 2 and the air channel groove; after the panel 1 is embedded into the accommodating groove in the base 3, the panel 1 covers the multi-empty plate 2, and the panel 1 is sealed with the side wall of the accommodating groove; at the moment, closed spaces are formed between the base 3 and the porous plate 2, between the base 3 and the panel 1, and between the porous plate 2 and the panel 1; at this time, the air passage, the opening and the vacuum hole are communicated, and when the vacuum equipment is connected to the vent hole 4, the air flow in the accommodating groove can only flow among the air passage, the opening and the vacuum hole.
In the embodiment, when the vacuum equipment is connected to the vent holes 4, the vacuum equipment pumps out air in a closed space formed between the porous plate 2 and the base 3, so that an air pressure difference is generated between the porous plate 2 and the panel 1, the air pressure can generate suction to the panel 1 through the holes on the porous plate 2, and the air pressure generates adsorption force to adsorbates on the panel 1 through the vacuum holes on the panel 1; the bearing surface of the panel 1 is provided with an adsorption area, when the area of the adsorption area where the vacuum holes on the panel 1 are located is the same as the surface area of an object to be adsorbed, the adsorption plate does not generate air leakage, the adsorption area is the largest, and the adsorption capacity is the strongest; when the area of the adsorption area on the panel 1 is slightly smaller than the object to be adsorbed, the adsorption plate does not generate air leakage, but the adsorption area is slightly smaller than the surface area of the object to be adsorbed, and the adsorption is slightly weak; when the area of the adsorption region on the panel 1 is slightly larger than the surface area of the substance to be adsorbed, part of the vacuum holes are exposed to the outside, but the vacuum degree is not reduced or slightly reduced due to the presence of the porous plate 2, and the adsorption capacity is maintained stronger or slightly reduced.
Through the arrangement, on one hand, the suction plate can keep higher vacuum degree and has stronger adsorption force; on the other hand, the suction plate can adsorb objects with various sizes and has higher compatibility.
In an embodiment, the diameter of the vacuum holes is greater than the diameter of the open holes; the porosity of the openings in the perforated plate 2 is greater than the porosity of the vacuum holes in the panel 1.
In the embodiment, the smaller the diameter of the opening in the porous plate 2, the less the leakage of the suction plate can be reduced when the object to be measured is not attached to the contact surface. The diameter of the opening hole on the porous plate 2 is less than 100 μm, and the aperture range of the opening hole in the porous plate 2 is 2um-30 um; preferably, the porosity of the porous plate 2 is 30-50%, so that a better adsorption effect can be achieved; in this embodiment, the trompil aperture undersize in the perforated plate 2 can make evacuation speed slow, and the adsorption affinity that the suction disc produced is relatively weak, and the trompil aperture is too big can make the suction disc have gas leakage, and the vacuum of suction disc reduces, and the adsorption affinity weakens, and the aperture of specific trompil is 30 um.
In this embodiment, the porous plate 2 is a microporous ceramic material; in other embodiments, the porous plate 2 may also be other microporous materials, such as a microporous plastic plate, and the like.
In the embodiment, the panel 1 can be made of metal, plastic or quartz glass, and has relatively low hardness and flat and smooth surface; in this embodiment, the material of the panel 1 is a quartz glass plate.
In this embodiment, the panel 1 completely covers the porous plate 2 and is in close contact with the porous plate 2, so as to prevent the object to be adsorbed from directly contacting the porous plate 2 and prevent the surface of the object to be adsorbed from being damaged by the porous plate 2 with high hardness. At least partial region on the panel 1 is provided with vacuum holes, in the embodiment, the size of the region where the vacuum holes on the panel 1 are located is the same as the surface size of the object to be adsorbed, at the moment, the adsorption force of the adsorption plate on the object to be adsorbed is strongest, no air leakage phenomenon exists, and the vacuum degree of the adsorption plate is also highest.
Further, the greater the distribution density of the vacuum holes in the panel 1, the greater the suction force generated by the suction plate, and the smaller the distribution density of the vacuum holes in the panel 1, the smaller the suction force generated by the suction plate. In this embodiment, as shown in fig. 2a, the distribution density of the vacuum holes on the panel 1 is not uniform, the distribution density of the vacuum holes matches with the shape of the object to be adsorbed, and the suction plate can provide a balanced acting force for the object to be adsorbed. In other embodiments, as shown in fig. 2b, the vacuum holes on the panel 1 may also be uniformly distributed, and the panel 1 is relatively simple to process and can be used for adsorbing an object to be adsorbed with a symmetrical structure.
In the embodiment, when the suction plate works, the suction plate is pumped by the external vacuum equipment through the vent holes 4 on the side surface and/or the bottom surface of the base 3, along with the reduction of the vacuum degree of the accommodating space between the base 3 and the porous plate 2, namely, the gas pressure in the accommodating space is smaller than the external gas pressure, the porous plate 2 generates suction to the panel 1 through the opening, and the panel 1 generates suction to an object to be adsorbed through the vacuum holes distributed on the panel 1.
In the embodiment, the buffer cavity of the base 3 is provided with communicated air channel grooves, the widths of all the air channel grooves are the same, and the porous plate 2 is embedded in the base 3 and is contacted with the convex part of the air channel groove in the base 3; the air channel groove, the opening hole and the vacuum hole are communicated in sequence; in the embodiment, the air channel groove is used for ensuring the structural stability and guiding the trend of the air.
In the embodiment, the buffer cavity comprises a corner area and a main area, and the air channel grooves are distributed in the corner area and the main area, so that the air pressure of the corner area is the same as that of the main area, and the suction force of the suction plate to the object to be tested is uniform.
In this embodiment, the air passage grooves formed on the surface of the base 3 are U-shaped and L-shaped; in another embodiment, the airway slots may be all U-shaped or all L-shaped. The main reasons for providing the plurality of air passage grooves on the surface of the susceptor 3 are: on the one hand, the convex part of the air path groove can support the porous plate 2, the stability of the structure is improved, and on the other hand, the volume capable of accommodating gas between the base 3 and the porous plate 2 is small, so that the vacuumizing is rapid, and the time is saved.
In an embodiment the suction plate is further provided with a U-shaped positioning slot 7 for positioning the suction plate such that it can be fixed on a specific stand table without position change.
In the embodiment, the number of the U-shaped positioning grooves 7 is set according to actual needs, or not; the number of U-shaped constant head tank 7 is eight in this embodiment, and the equipartition sets up for carry out the rigidity to the suction disc.
In the embodiment, the bottom of the base 3 is further provided with a mounting hole (not labeled in the figure) for mounting and positioning the base 3; the number of the mounting holes is one or more; in this embodiment, the number of the mounting holes is four.
In the embodiment, the base 3 may be a ceramic material or an alloy material; in this embodiment, the base 3 is made of an aluminum alloy material.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (11)
1. A suction plate, characterized in that: the vacuum plate comprises a porous plate and a panel which are sequentially stacked, wherein the panel comprises a bearing surface which is used for being opposite to the porous plate, the bearing surface is used for being in contact with an object to be tested, and a vacuum hole is formed in the bearing surface; the perforated plate is made of a porous material, a plurality of open holes are formed in the perforated plate, the vacuum holes are communicated with the open holes in a ventilation mode, and the surface roughness of the panel is smaller than that of the perforated plate; wherein, the pore canal of the open pore in the porous plate is bent and the diameter of the open pore is smaller, the aperture range of the open pore in the porous plate is 2um-30um, and the porosity of the porous plate is 30% -50%;
the gap between the panel and the porous plate is communicated with the outside only through the open hole and the vacuum hole; the suction plate also comprises a base, and the porous plate is positioned between the base and the panel; the base is provided with a vent hole, the vent hole is communicated with the opening hole, and the vent hole is used for being communicated with vacuum equipment; the base is provided with a containing groove, the panel and the porous plate are located in the containing groove, the side wall of the containing groove is sealed with the side wall of the porous plate, and the side wall of the containing groove is sealed with the side wall of the panel.
2. A suction plate according to claim 1, characterized in that: the diameter of the vacuum hole is larger than that of the open hole.
3. A suction plate according to claim 1, characterized in that: the porosity of the openings in the perforated plate is greater than the porosity of the vacuum holes in the panel.
4. A suction plate according to claim 1, characterized in that: the porous plate is made of microporous ceramic.
5. A suction plate according to claim 1, characterized in that: the panel is made of quartz glass plate.
6. A suction plate according to claim 1, characterized in that: the bottom of the accommodating groove is provided with a buffer cavity which is communicated with the vent hole.
7. A suction plate according to claim 6, characterized in that: the buffer cavity is provided with an air passage groove, and the width of each air passage groove is the same.
8. A suction plate according to claim 7, wherein: the buffer cavity comprises a corner area and a main area, and the air path grooves are distributed in the corner area and the main area.
9. A suction plate according to claim 6, characterized in that: the bearing surface is provided with an adsorption area, the adsorption area is provided with the vacuum holes, and the projection of the buffer cavity on the bearing surface covers the adsorption area.
10. A suction plate according to claim 1, characterized in that: the surface of the side wall of the accommodating groove is provided with a first bulge, the side wall of the first bulge is provided with a first embedding groove, and the side wall of the porous plate is embedded into the first embedding groove;
and/or, the lateral wall surface of holding tank is provided with the second protrudingly, the groove is inlayed to the second in the bellied lateral wall of second, the embedding of panel lateral wall the groove is inlayed to the second.
11. A suction plate according to claim 1, characterized in that: the side wall of the suction plate is provided with a positioning groove for positioning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910774720.6A CN110509205B (en) | 2019-08-21 | 2019-08-21 | Suction plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910774720.6A CN110509205B (en) | 2019-08-21 | 2019-08-21 | Suction plate |
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| Publication Number | Publication Date |
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| CN110509205A CN110509205A (en) | 2019-11-29 |
| CN110509205B true CN110509205B (en) | 2022-03-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910774720.6A Active CN110509205B (en) | 2019-08-21 | 2019-08-21 | Suction plate |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2022073573A (en) * | 2020-11-02 | 2022-05-17 | 株式会社村田製作所 | Multilayer ceramic capacitor package |
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| US6032715A (en) * | 1996-06-28 | 2000-03-07 | Sony Corporation | Wafer bonding device |
| JP2001121413A (en) * | 1999-10-21 | 2001-05-08 | Toshiba Mach Co Ltd | Method of holding planar workpiece |
| TW200414976A (en) * | 2002-12-20 | 2004-08-16 | Infineon Technologies Ag | Method of processing a workpiece, and a work carrier, in particular of porous ceramic |
| CN101140892A (en) * | 2006-09-06 | 2008-03-12 | 株式会社迪思科 | Processing device and suction plate bench |
| CN203101783U (en) * | 2013-01-10 | 2013-07-31 | 天虹科技股份有限公司 | Ceramic carrier with multiple micropores |
| CN103567912A (en) * | 2012-07-31 | 2014-02-12 | 三星钻石工业股份有限公司 | Method for manufacturing adsorption table and the adsorption table |
| CN109773681A (en) * | 2017-11-14 | 2019-05-21 | 大银微系统股份有限公司 | Vacuum absorbing platform |
-
2019
- 2019-08-21 CN CN201910774720.6A patent/CN110509205B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032715A (en) * | 1996-06-28 | 2000-03-07 | Sony Corporation | Wafer bonding device |
| JP2001121413A (en) * | 1999-10-21 | 2001-05-08 | Toshiba Mach Co Ltd | Method of holding planar workpiece |
| TW200414976A (en) * | 2002-12-20 | 2004-08-16 | Infineon Technologies Ag | Method of processing a workpiece, and a work carrier, in particular of porous ceramic |
| CN101140892A (en) * | 2006-09-06 | 2008-03-12 | 株式会社迪思科 | Processing device and suction plate bench |
| CN103567912A (en) * | 2012-07-31 | 2014-02-12 | 三星钻石工业股份有限公司 | Method for manufacturing adsorption table and the adsorption table |
| CN203101783U (en) * | 2013-01-10 | 2013-07-31 | 天虹科技股份有限公司 | Ceramic carrier with multiple micropores |
| CN109773681A (en) * | 2017-11-14 | 2019-05-21 | 大银微系统股份有限公司 | Vacuum absorbing platform |
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