CN110499103A - A kind of sapphire lapping liquid and preparation method thereof - Google Patents

A kind of sapphire lapping liquid and preparation method thereof Download PDF

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Publication number
CN110499103A
CN110499103A CN201910863072.1A CN201910863072A CN110499103A CN 110499103 A CN110499103 A CN 110499103A CN 201910863072 A CN201910863072 A CN 201910863072A CN 110499103 A CN110499103 A CN 110499103A
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parts
lapping liquid
nano
silicon carbide
revolving speed
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蔡佳霖
宋述远
蔡金荣
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JIANGSU JIXING NEW MATERIALS CO Ltd
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JIANGSU JIXING NEW MATERIALS CO Ltd
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09GPOLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00Polishing compositions
    • C09G1/02Polishing compositions containing abrasives or grinding agents

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  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention belongs to gem processing technical fields, and in particular to a kind of sapphire lapping liquid and preparation method thereof.The sapphire lapping liquid includes following content of component: 35-48 parts of silica, 28-32 parts of silicon carbide, 18-25 parts of aluminum oxide, 14-21 parts of boron nitride, 8-15 parts of chitosan, 8-14 parts of titanium diboride, 12-18 parts of glycerol, 7-11 parts of polyethylene glycol, 6-9 parts of carbon black, 6-9 parts of vermiculite power, 4-7 parts of surfactant, 3-5 parts of dispersing agent, 150-180 parts of deionized water.Lapping liquid prepared by the present invention can effectively shorten milling time, and preparation method of the invention is simple and effective, be suitble to industrialized production.

Description

A kind of sapphire lapping liquid and preparation method thereof
Technical field
The invention belongs to gem processing technical fields, and in particular to a kind of sapphire lapping liquid and preparation method thereof.
Background technique
Sapphire lapping liquid (also known as sapphire polishing liquid) is for the grinding and thinned grinding in Sapphire Substrate Liquid.Lapping liquid is scattered in medium by abrasive grain and is prepared, and is a kind of abrasive product with excellent chemical mechanical performance, can be used for The grinding and polishing of silicon wafer, compound crystal, precision optics, liquid crystal display panel, jewel, metal works etc..Abrasive grain is lapping liquid The key factor of mechanism, variety classes, varigrained abrasive grain ground effect are different, are suitable for different processing requests. Abrasive hardness is higher in general, particle is bigger, and grinding efficiency is higher, processed surface smoothness is lower;Opposite abrasive hardness It is lower, particle is smaller, grinding efficiency is lower, processed surface smoothness is higher.Medium is the carrier of abrasive grain, affects abrasive grain The effects of dispersing, playing the role of cooling, chip removal in process, chemical attack can be also played sometimes.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of sapphire lapping liquid and preparation method thereof, present invention preparation Lapping liquid can effectively shorten milling time, and preparation method of the invention is simple and effective, is suitble to industrialized production.
In order to achieve the above object, the present invention is achieved by the following technical programs:
A kind of sapphire lapping liquid, including following content of component: 35-48 parts of silica, 28-32 parts of silicon carbide, three oxidations Two 18-25 parts of aluminium, 14-21 parts of boron nitride, 8-15 parts of chitosan, 8-14 parts of titanium diboride, 12-18 parts of glycerol, polyethylene glycol 7- 11 parts, 6-9 parts of carbon black, 6-9 parts of vermiculite power, 4-7 parts of surfactant, 3-5 parts of dispersing agent, 150-180 parts of deionized water.
Preferably, the sapphire lapping liquid includes following content of component: 38 parts of silica, 30 parts of silicon carbide, three 22 parts of Al 2 O, 18 parts of boron nitride, 12 parts of chitosan, 11 parts of titanium diboride, 15 parts of glycerol, 9 parts of polyethylene glycol, 8 parts of carbon black, 8 parts of vermiculite power, 6 parts of surfactant, 4 parts of dispersing agent, 160 parts of deionized water.
Preferably, the sapphire lapping liquid includes following content of component: 45 parts of silica, 31 parts of silicon carbide, three 22 parts of Al 2 O, 18 parts of boron nitride, 13 parts of chitosan, 9 parts of titanium diboride, 15 parts of glycerol, 9 parts of polyethylene glycol, 7 parts of carbon black, 8 parts of vermiculite power, 5 parts of surfactant, 3 parts of dispersing agent, 170 parts of deionized water.
Preferably, partial size≤50nm of the silica, partial size≤50nm of the silicon carbide, the titanium diboride Partial size≤50nm.
A kind of preparation method of sapphire lapping liquid, comprising the following steps:
(1) raw material is weighed, it is spare;
(2) by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride, carbon black and vermiculite power successively milled processed, Obtain nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, nano carbon black and Nanometer vermiculite powder;By nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, Nano carbon black and nanometer vermiculite powder are uniformly mixed and secondary milled processed, obtains mixture;
(3) mixture is dissolved in deionized water, 150-200 DEG C at a temperature of, stirred with the revolving speed of 600-1000r/min 1-2 hours, chitosan, glycerol and polyethylene glycol is added, 120-150 DEG C at a temperature of, stirred with the revolving speed of 600-800r/min It mixes 1.5-3 hours;Surfactant and dispersing agent is added, 80-120 DEG C at a temperature of, stirred with the revolving speed of 600-800r/min 30-40min is mixed, obtains sapphire lapping liquid after cooling.
Preferably, the step of step (3) are as follows: mixture is dissolved in deionized water, 180 at a temperature of, Stirred 1.5 hours with the revolving speed of 800r/min, chitosan, glycerol and polyethylene glycol be added, 130 DEG C at a temperature of, with 700r/ The revolving speed of min stirs 2 hours;Surfactant and dispersing agent is added, 110 DEG C at a temperature of, stirred with the revolving speed of 700r/min 35min is mixed, obtains sapphire lapping liquid after cooling.
Preferably, the step of step (3) are as follows: mixture being dissolved in deionized water, in 190 DEG C of temperature Under, stirred 1.2 hours with the revolving speed of 900r/min, chitosan, glycerol and polyethylene glycol be added, 145 DEG C at a temperature of, with The revolving speed of 650r/min stirs 2.5 hours;Surfactant and dispersing agent is added, 100 DEG C at a temperature of, with 650r/min's Revolving speed stirs 35min, obtains sapphire lapping liquid after cooling.
Compared with prior art, the invention has the following advantages: lapping liquid prepared by the present invention can effectively contract Short milling time, and preparation method of the invention is simple and effective, is suitble to industrialized production.
Specific embodiment
Below by specific embodiment, invention is further described in detail.But those skilled in the art will manage Solution, the following example is merely to illustrate the present invention, and should not be taken as limiting the scope of the invention.Specific skill is not specified in embodiment Art or condition person, described technology or conditions carry out to specifications according to the literature in the art.Agents useful for same or instrument Production firm person is not specified, being can be with conventional products that are commercially available.
Embodiment 1
A kind of sapphire lapping liquid, including following content of component: 35-48 parts of silica, 28 parts of silicon carbide, aluminum oxide 18 parts, 14 parts of boron nitride, 8 parts of chitosan, 8 parts of titanium diboride, 12 parts of glycerol, 7 parts of polyethylene glycol, 6 parts of carbon black, 6 parts of vermiculite power, 4 parts of surfactant, 3 parts of dispersing agent, 150 parts of deionized water.
Wherein, partial size≤50nm of the silica, partial size≤50nm of the silicon carbide, the grain of the titanium diboride Diameter≤50nm.
A kind of preparation method of sapphire lapping liquid, comprising the following steps:
(1) raw material is weighed, it is spare;
(2) by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride, carbon black and vermiculite power successively milled processed, Obtain nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, nano carbon black and Nanometer vermiculite powder;By nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, Nano carbon black and nanometer vermiculite powder are uniformly mixed and secondary milled processed, obtains mixture;
(3) mixture is dissolved in deionized water, 150 DEG C at a temperature of, stirred 1 hour, added with the revolving speed of 600r/min Enter chitosan, glycerol and polyethylene glycol, 120 DEG C at a temperature of, stirred 1.5 hours with the revolving speed of 600r/min;Surface is added Activating agent and dispersing agent, 80 DEG C at a temperature of, 30min is stirred with the revolving speed of 600r/min, sapphire grinding is obtained after cooling Liquid.
Embodiment 2
A kind of sapphire lapping liquid, including following content of component: 48 parts of silica, 32 parts of silicon carbide, aluminum oxide 25 Part, 21 parts of boron nitride, 15 parts of chitosan, 14 parts of titanium diboride, 18 parts of glycerol, 11 parts of polyethylene glycol, 9 parts of carbon black, vermiculite power 9 Part, 7 parts of surfactant, 5 parts of dispersing agent, 180 parts of deionized water.
Wherein, partial size≤50nm of the silica, partial size≤50nm of the silicon carbide, the grain of the titanium diboride Diameter≤50nm.
A kind of preparation method of sapphire lapping liquid, comprising the following steps:
(1) raw material is weighed, it is spare;
(2) by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride, carbon black and vermiculite power successively milled processed, Obtain nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, nano carbon black and Nanometer vermiculite powder;By nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, Nano carbon black and nanometer vermiculite powder are uniformly mixed and secondary milled processed, obtains mixture;
(3) mixture is dissolved in deionized water, 200 DEG C at a temperature of, stirred 2 hours, added with the revolving speed of 1000r/min Enter chitosan, glycerol and polyethylene glycol, 150 DEG C at a temperature of, stirred 3 hours with the revolving speed of 800r/min;It is living that surface is added Property agent and dispersing agent, 120 DEG C at a temperature of, 40min is stirred with the revolving speed of 800r/min, sapphire grinding is obtained after cooling Liquid.
Embodiment 3
A kind of sapphire lapping liquid, including following content of component: 38 parts of silica, 30 parts of silicon carbide, aluminum oxide 22 Part, 18 parts of boron nitride, 12 parts of chitosan, 11 parts of titanium diboride, 15 parts of glycerol, 9 parts of polyethylene glycol, 8 parts of carbon black, 8 parts of vermiculite power, 6 parts of surfactant, 4 parts of dispersing agent, 160 parts of deionized water.
Wherein, partial size≤50nm of the silica, partial size≤50nm of the silicon carbide, the grain of the titanium diboride Diameter≤50nm.
A kind of preparation method of sapphire lapping liquid, comprising the following steps:
(1) raw material is weighed, it is spare;
(2) by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride, carbon black and vermiculite power successively milled processed, Obtain nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, nano carbon black and Nanometer vermiculite powder;By nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, Nano carbon black and nanometer vermiculite powder are uniformly mixed and secondary milled processed, obtains mixture;
(3) mixture is dissolved in deionized water, 180 at a temperature of, stirred 1.5 hours, added with the revolving speed of 800r/min Enter chitosan, glycerol and polyethylene glycol, 130 DEG C at a temperature of, stirred 2 hours with the revolving speed of 700r/min;It is living that surface is added Property agent and dispersing agent, 110 DEG C at a temperature of, 35min is stirred with the revolving speed of 700r/min, sapphire grinding is obtained after cooling Liquid.
Embodiment 4
A kind of sapphire lapping liquid, including following content of component: 45 parts of silica, 31 parts of silicon carbide, aluminum oxide 22 Part, 18 parts of boron nitride, 13 parts of chitosan, 9 parts of titanium diboride, 15 parts of glycerol, 9 parts of polyethylene glycol, 7 parts of carbon black, 8 parts of vermiculite power, 5 parts of surfactant, 3 parts of dispersing agent, 170 parts of deionized water.
Wherein, partial size≤50nm of the silica, partial size≤50nm of the silicon carbide, the grain of the titanium diboride Diameter≤50nm.
A kind of preparation method of sapphire lapping liquid, comprising the following steps:
(1) raw material is weighed, it is spare;
(2) by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride, carbon black and vermiculite power successively milled processed, Obtain nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, nano carbon black and Nanometer vermiculite powder;By nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, Nano carbon black and nanometer vermiculite powder are uniformly mixed and secondary milled processed, obtains mixture;
(3) mixture is dissolved in deionized water, 190 DEG C at a temperature of, stirred 1.2 hours with the revolving speed of 900r/min, Chitosan, glycerol and polyethylene glycol is added, 145 DEG C at a temperature of, stirred 2.5 hours with the revolving speed of 650r/min;Table is added Face activating agent and dispersing agent, 100 DEG C at a temperature of, 35min is stirred with the revolving speed of 650r/min, sapphire is obtained after cooling and grinds Grinding fluid.
Comparative example 1
For step with embodiment 4, difference is to be not added with carbon black.
A kind of sapphire lapping liquid, including following content of component: 45 parts of silica, 31 parts of silicon carbide, three oxidations two 22 parts of aluminium, 18 parts of boron nitride, 13 parts of chitosan, 9 parts of titanium diboride, 15 parts of glycerol, 9 parts of polyethylene glycol, 7 parts of carbon black, vermiculite power 8 Part, 5 parts of surfactant, 3 parts of dispersing agent, 170 parts of deionized water.
Wherein, partial size≤50nm of the silica, partial size≤50nm of the silicon carbide, the grain of the titanium diboride Diameter≤50nm.
A kind of preparation method of sapphire lapping liquid, comprising the following steps:
(1) raw material is weighed, it is spare;
(2) it by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride and vermiculite power successively milled processed, obtains Nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride and nanometer vermiculite powder;It will Nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride and nanometer vermiculite powder are mixed Uniform and secondary milled processed is closed, mixture is obtained;
(3) mixture is dissolved in deionized water, 190 DEG C at a temperature of, stirred 1.2 hours with the revolving speed of 900r/min, Chitosan, glycerol and polyethylene glycol is added, 145 DEG C at a temperature of, stirred 2.5 hours with the revolving speed of 650r/min;Table is added Face activating agent and dispersing agent, 100 DEG C at a temperature of, 35min is stirred with the revolving speed of 650r/min, sapphire is obtained after cooling and grinds Grinding fluid.
Comparative example 2
For step with embodiment 4, difference is not added with chitosan.
A kind of sapphire lapping liquid, including following content of component: 45 parts of silica, 31 parts of silicon carbide, three oxidations two 22 parts of aluminium, 18 parts of boron nitride, 13 parts of chitosan, 9 parts of titanium diboride, 15 parts of glycerol, 9 parts of polyethylene glycol, 7 parts of carbon black, vermiculite power 8 Part, 5 parts of surfactant, 3 parts of dispersing agent, 170 parts of deionized water.
Wherein, partial size≤50nm of the silica, partial size≤50nm of the silicon carbide, the grain of the titanium diboride Diameter≤50nm.
A kind of preparation method of sapphire lapping liquid, comprising the following steps:
(1) raw material is weighed, it is spare;
(2) by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride, carbon black and vermiculite power successively milled processed, Obtain nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, nano carbon black and Nanometer vermiculite powder;By nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, Nano carbon black and nanometer vermiculite powder are uniformly mixed and secondary milled processed, obtains mixture;
(3) mixture is dissolved in deionized water, 190 DEG C at a temperature of, stirred 1.2 hours with the revolving speed of 900r/min, Glycerol and polyethylene glycol is added, 145 DEG C at a temperature of, stirred 2.5 hours with the revolving speed of 650r/min;Surfactant is added And dispersing agent, 100 DEG C at a temperature of, 35min is stirred with the revolving speed of 650r/min, obtains sapphire lapping liquid after cooling.
Sapphire lapping liquid obtained by embodiment 1-4 and comparative example 1-2 is subjected to grinding test, test effect is as follows: in indigo plant In gem grinding treatment process, the resulting lapping liquid of embodiment 1-4 is compared with the lapping liquid of comparative example 1-2: milling time shortens 30 minutes or more, cleannes were improved.
The above is only preferred embodiments of the present invention, is not intended to limit the scope of the present invention, Therefore any trickle amendment, equivalent variations and modification made to the above embodiment according to the technical essence of the invention, belong to In the range of technical solution of the present invention.

Claims (7)

1. a kind of sapphire lapping liquid, which is characterized in that including following content of component: 35-48 parts of silica, silicon carbide 28-32 parts, 18-25 parts of aluminum oxide, 14-21 parts of boron nitride, 8-15 parts of chitosan, 8-14 parts of titanium diboride, glycerol 12-18 Part, 7-11 parts of polyethylene glycol, 6-9 parts of carbon black, 6-9 parts of vermiculite power, 4-7 parts of surfactant, 3-5 parts of dispersing agent, deionized water 150-180 parts.
2. a kind of sapphire lapping liquid according to claim 1, which is characterized in that including following content of component: dioxy 38 parts of SiClx, 30 parts of silicon carbide, 22 parts of aluminum oxide, 18 parts of boron nitride, 12 parts of chitosan, 11 parts of titanium diboride, glycerol 15 Part, 9 parts of polyethylene glycol, 8 parts of carbon black, 8 parts of vermiculite power, 6 parts of surfactant, 4 parts of dispersing agent, 160 parts of deionized water.
3. a kind of sapphire lapping liquid according to claim 1, which is characterized in that including following content of component: dioxy 45 parts of SiClx, 31 parts of silicon carbide, 22 parts of aluminum oxide, 18 parts of boron nitride, 13 parts of chitosan, 9 parts of titanium diboride, glycerol 15 Part, 9 parts of polyethylene glycol, 7 parts of carbon black, 8 parts of vermiculite power, 5 parts of surfactant, 3 parts of dispersing agent, 170 parts of deionized water.
4. a kind of sapphire lapping liquid according to claim 1, which is characterized in that the partial size of the silica≤ 50nm, partial size≤50nm of the silicon carbide, partial size≤50nm of the titanium diboride.
5. a kind of preparation method of sapphire lapping liquid described in claim 1-4 any claim, which is characterized in that including Following steps:
(1) raw material is weighed, it is spare;
(2) by silica, silicon carbide, aluminum oxide, boron nitride, titanium diboride, carbon black and vermiculite power successively milled processed, Obtain nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, nano carbon black and Nanometer vermiculite powder;By nano silica, nanometer silicon carbide, nano-aluminium oxide, nm-class boron nitride, nano titanium diboride, Nano carbon black and nanometer vermiculite powder are uniformly mixed and secondary milled processed, obtains mixture;
(3) mixture is dissolved in deionized water, 150-200 DEG C at a temperature of, stirred with the revolving speed of 600-1000r/min 1-2 hours, chitosan, glycerol and polyethylene glycol is added, 120-150 DEG C at a temperature of, stirred with the revolving speed of 600-800r/min It mixes 1.5-3 hours;Surfactant and dispersing agent is added, 80-120 DEG C at a temperature of, stirred with the revolving speed of 600-800r/min 30-40min is mixed, obtains sapphire lapping liquid after cooling.
6. a kind of preparation method of sapphire lapping liquid according to claim 5, which is characterized in that the step (3) Steps are as follows: mixture is dissolved in deionized water, 180 at a temperature of, stirred 1.5 hours with the revolving speed of 800r/min, Chitosan, glycerol and polyethylene glycol is added, 130 DEG C at a temperature of, stirred 2 hours with the revolving speed of 700r/min;Surface is added Activating agent and dispersing agent, 110 DEG C at a temperature of, 35min is stirred with the revolving speed of 700r/min, sapphire grinding is obtained after cooling Liquid.
7. a kind of preparation method of sapphire lapping liquid according to claim 5, which is characterized in that the step (3) Steps are as follows: mixture is dissolved in deionized water, 190 DEG C at a temperature of, it is small with the stirring 1.2 of the revolving speed of 900r/min When, chitosan, glycerol and polyethylene glycol is added, 145 DEG C at a temperature of, stirred 2.5 hours with the revolving speed of 650r/min;It is added Surfactant and dispersing agent, 100 DEG C at a temperature of, 35min is stirred with the revolving speed of 650r/min, obtains sapphire after cooling Lapping liquid.
CN201910863072.1A 2019-09-12 2019-09-12 A kind of sapphire lapping liquid and preparation method thereof Pending CN110499103A (en)

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Application publication date: 20191126