CN1104967C - Fluid delivery apparatus and method - Google Patents
Fluid delivery apparatus and method Download PDFInfo
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- CN1104967C CN1104967C CN98108912A CN98108912A CN1104967C CN 1104967 C CN1104967 C CN 1104967C CN 98108912 A CN98108912 A CN 98108912A CN 98108912 A CN98108912 A CN 98108912A CN 1104967 C CN1104967 C CN 1104967C
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Abstract
The present invention relates to a fluid conveying device and a method. Liquids or gases are both supplied to each side of a transporting passage of an object to be processed from a branch pipe of a fluid distributor through a nozzle plate connected with the branch pipe, and a nozzle opening in the nozzle plate is matched with a transverse groove to provide tentiform fluid flow transversely extending along a transporting passage of the object and aligning to the object which is to be processed. Under the condition that the fluids are the liquids, the nozzle opening provides a cylindrical linear liquid column. Under the condition that the fluids are the gases, the nozzle opening and the transverse groove are matched to cause the gases to be aligned to the transporting passage of the object to be conveyed through plane gas belts which are transversely spaced.
Description
In relating to such as chemically treated various wet treatment process such as etching, plating, all knowing needs fluid is delivered on the surface of pending object.In many cases, pending object is printed circuit board (PCB) and similar articles.Common this object be along one be roughly level to passage carry, and carry out etching, purification, rinse, activation, drying etc. at various docking stations along this passage.Sometimes pending object is if printed circuit board (PCB) then has the boring of therefrom passing, and that is just not only wished to handle fluid and can impinge upon the upper and lower surface of plate but also impinge upon in the boring.The processing of this object can be undertaken by spray nozzle device, for example proposes on United States Patent (USP) 4789405.In other situation, processing can be carried out with various other the forms of technology such as fluid conveying, spraying, drying, as disclosed in United States Patent (USP) 4576685,4017982,3935041,3905827 or 3776800.Various transmission printed circuit board (PCB) or other object drive technologies by various treating stations that are used for can use, and are for example proposed on United States Patent (USP) 4046248 or other similar data.
Therefore technical field of the present invention relates to the method and apparatus that is used to handle the conductor substrate.This handling procedure can also comprise that except purification, coating, etching, activation and various electrolysis program the through hole neutralization from conductor plate removes liquid from its surface.
The present invention relates to deliver the fluid to effectively pending object, particularly deliver to conductor plate and analog.
Carry about fluid, for example, once used slotted pipe, but this expansion when just being limited to liquid stream and from hole or seam, overflowing, thereby liquid stream may disperse sooner and lose some its momentum, even when from the distance increase of pending substrate, lose orientation.
Spray nozzle also can use, but this application usually requires lot of energy consumption with respect to pending fluid media (medium).In addition, in some example, spray nozzle can not provide the desired uniformity degree of wanting aspect coverage rate, center at the fog pattern of nozzle, the percentage of flow and pressure is than higher, and in its periphery, the percentage of flow and pressure is just lower, because flow and pressure usually reduce widely when perpendicular to the distance increase of nozzle centerline.
Fluid ejector also once was used to and produced fluid fluidization tower closely, but the desired uniformity of wanting generally can not be provided and fully cover pending object.In addition, little injector requires significantly higher pressure so that keep a desirable impulsive force on pending object, but that this high impulsive force may always not conform with is desirable.
The invention provides a kind of being used for flows to the pending printed circuit board (PCB) or the method and apparatus of other object with a kind of fluid, wherein when this object when their operation passage transports, fluid just impinges upon on this object from their both sides of operation passage.When going out and be guided with the groove that is connected nozzle from each nozzle dispersion, thereby make fluid from each nozzle opening, provide out with the form of the tentiform fluid stream of horizontal expansion by nozzle itself at this run duration fluid.The fluid of being carried can be liquid or gas.If a kind of liquid, nozzle opening scatters liquid and broadcasts into cylindrical wire liquid fluidization tower, connects into a general flat by groove, the plane tentiform liquid spraying of lateral arrangement.If a kind of gaseous fluid, this gaseous fluid is to provide with the transverse concave groove that is being connected opening in a row by a plurality of nozzle openings, and this opening is laterally alternate to be separated so that promote to distribute towards the plane air-flow band of the independent lateral alignment that separates of object operation passage from opening by groove.But also can start a swabbing effect by a upstream convergent face of nozzle.
Various adjusting devices are provided according to the present invention for this equipment.In addition, various preferred parameters and structural arrangement have also been used.In some cases, towards the operation passage, aiming moves the updrift side of passage to row's nozzle opening with an angle.
Therefore, the main purpose of the present invention method and apparatus that provides a kind of novelty is given on the object that transports along predetermined passage in order to the fluid dispense that will carry.
Another object of the present invention is to reach above-mentioned purpose, and wherein the fluid of Shu Songing is the gas that is used for dry object, and this object for example is a conductor plate.
Another purpose of the present invention is to reach this main purpose, and wherein the fluid of Shu Songing is a kind of liquid fluid, for example is used for rinse, etching etc.
Another purpose of the present invention is to reach above-mentioned purpose, wherein is provided with a nozzle segment that comprises the removal immediately of fluid issuing or aperture, in order to this nozzle segment is purified immediately etc.
Another object of the present invention is to reach above-mentioned purpose, has various variations between the center line of the transverse concave groove of the cross central line of nozzle wherein in a row and connection nozzle.
A further object of the present invention is to reach above-mentioned purpose, and the transverse concave groove that wherein connects the nozzle aperture can be in an acute angle with vertical flow channel of pending object.
By reading the following cutline to accompanying drawing, detailed description of the preferred embodiment and appended claims just can easily be understood other purpose and advantage.
Fig. 1 is a longitudinal cross-section schematic diagram that cuts from a multistation equipment of the present invention, has wherein shown a plurality of relevant etchings, rinse, dry operations, wherein also shown be used for to such as the top of the object of circuit conductor and below distribute the device of carrying fluid.
Fig. 2 is the perspective illustration of a circuit-board conductors when being transferred along its passage between upper and lower fluid distributor manifold of the present invention, and this menifold belongs to the sort of type that is positioned at operation passage above and below shown among Fig. 1.
Fig. 3 is the enlarged drawing of the upper and lower fluid transfer manifold shown in Fig. 1, and its delivery board that approaches object operation passage shows with solid line, with more then the showing with dotted line of object operation channel spacing.
Fig. 4 is the view that is roughly along the IV-IV line intercepting of Fig. 3, demonstrates a lower end of going up the menifold nozzle plate surface partly.
Fig. 5 is roughly along the longitdinal cross-section diagram of the V-V line of Fig. 4 intercepting, wherein demonstrates the nozzle that two approximate vertical are provided with, and is an obliquely-angled nozzle between the two and be arranged on.
Fig. 5 A is one of in the nozzle shown in Fig. 5 and the amplification detailed map of the groove that is associated with it, wherein clearly demonstrates its geometrical arrangements.
Fig. 6 is and the similar view of view of the liquid distributing nozzle plate of Fig. 4, distributes but the nozzle plate of Fig. 6 is specially adapted for gas, for example dry air or its congener.
Fig. 7 is the longitdinal cross-section diagram that is similar to Fig. 5, but roughly along the intercepting of the VII-VII line of Fig. 6.
Fig. 8 passes to be arranged on the pending object operation passage opposite side another to the local longitdinal cross-section diagram of the amplification of carrying the gas manifold intercepting, and wherein to assemble to promotion along updrift side be the suction of clashing into the fluid that pending object surface carries on the surface of the menifold plate of the most approaching operation passage.
Fig. 9 is the local longitdinal cross-section diagram that passes a nozzle plate intercepting of the present invention, but wherein demonstrates an independent nozzle plate foundation and nozzle plate removal part, and transversely dove tail joggle place has seal.
Figure 10 is roughly along amplification, part, the upright sectional view of the intercepting of the X-X line of Fig. 9, wherein demonstrates an end plate, but connects nozzle foundation and nozzle removal part hermetically.
Figure 11 is the local upright longitdinal cross-section diagram of amplification that passes nozzle aperture of the present invention and groove intercepting.
Figure 12 is the view that is similar to Figure 11, but wherein schematically demonstrates a columniform fluid (preferably liquid) post that goes out from nozzle discharge.
Figure 13 is the view that is similar to Figure 12, become an acute angle but wherein schematically demonstrate fluid column and be the passage that flows with object (or the level that is roughly of nozzle plate to surface), and wherein transverse concave groove is to be in to be different from the centerline of connection transverse to the center line of the nozzle aperture of nozzle plate.
Now at length referring to accompanying drawing, at first referring to Fig. 1, a fluid treatment system that wherein is used to the object that is transported is by the total sign of label 10.In this embodiment, the object that is transported is printed circuit board (PCB) or analog 11, has the through hole 12 that therefrom passes, and has along the coupling part 13 as conductor of some part of plate, as shown in Figure 2.
In Fig. 1, show a plurality of docking stations 14,15 and 16, stand 14 may be as an etching chamber, wherein a kind of suitable corrosive agent can be assigned on the suitable surface of printed circuit board (PCB) or analog, perhaps thereupon with a rinse station 15, corrosive agent liquid (or other handles fluid) is rinsed from object 11 by fluid distributor 17,18 therein, thereupon object is sent into another station 16, this station for example can be a gas treatment station, for example an air drying is stood, and wherein air is assigned with by distributor 20,21, distributor 20,21 is the same with distributor 17,18, is arranged on the opposite sides thereof that object transports passage 22, this passage is carried object from left to right along the equipment that the direction of arrow 23 is passed system 10, as shown in the figure.
Each station 14-16 is provided with upper and lower wall 24,25, and sidewall 26 has suitable import and the import and the exit wall 27,28 that export perforate 30,31 respectively.
Object 11 transport passage 22 therefore be one pass this machine vertically transport passage, and in illustrated embodiment, this passage 22 roughly be level to.
Also being provided with suitable live-roller 32, generally is to be contained on the axle of horizontally set, and this axle is driven by any proper device again, for example, and at the drive unit shown in the United States Patent (USP) 4015706.
At wherein the processing fluid in a given station particularly is in the example of liquid, for example is used to stand 15, a suitable liquid discharge pipe 33 just can be set, if be used for discharging or be ready to be used for recirculation or the like.
Referring to Fig. 2, shown object 11 essentially horizontally is transferred below distributor 17 He above the distributor 18 by the direction of arrow 23 especially.Certainly Fig. 2 also can similarly represent distributor 20,21.
Referring to Fig. 3, can see go up that distributor 17 is arranged on down distributor 18 top on an operation passage that is roughly level longitudinally in order to betwixt object 11 is transported, as shown in the figure.
The roller 44,45 of pair of engaging object by menifold 17 entrained (its device does not show), is installed in axle 46,47 places respectively, on the upper surface 48 that is bonded on pending object 11 indirectly.The purpose that upper and lower roller 44,45 is set is that antagonism is via the impulsive force that flows to the fluid of processed object 11 at the menifold that transports passage 22 opposite sides.Therefore, the fluid of carrying via following distributor 18 will give the motion component that 11 1 of pending objects make progress, and as shown in Figure 3, but this is the resistance that is applied for the roller 44,45 that the upper surface 48 of paying object 11 is engaged.Conversely, being transported to the existence that fluid on the upper surface 48 of object 11 will be assigned with the entrained lower roll (not giving label) of device 18 from last distributor 17 resists.
In order to adapt to the different thickness of object 11, distributor 17,18 can be adjusted on vertical direction with any suitable device, so that make their dispenser nozzle plate 40 for example move to the dotted line position shown in it from the solid line position shown in Fig. 3, so that hold a thicker object 11, and still keep predetermined closely-spaced between the surface (for example upper surface shown in Fig. 3 48) of a surface of being wanted (for example lower surface of its shown in Fig. 3) and adjacent object 11 between plate 40.
Can be any suitable device in order to regulate and distribute device 17,18 towards object operation passage with from its device that leaves.Thereby shown a kind of representational device is an adjustable keeper 50, this keeper 50 pass one fixedly plate 51 install with screw thread, so that supporting post 52 in the horizontal expansion at place, distributor 17 horizontal opposite end, thereby rotate screw element 50 just can mobile distributor 17 from the solid line position of Fig. 3 center pillar 52 to also at its dotted line position shown in Fig. 3, so that plate 40 is mobile between above-mentioned solid line and dotted line position.Certainly, any suitable adjusting device can both be used for changing the relative position between the distributor.
Shown in operation passage 22 be the horizontal channel basically, and the roller 44 of last menifold, under 45 situations about being bonded on the upper surface 48 of pending object 11, roller 44,45 weight can be utilized for pending object 11 fixing effect is provided, with the jet that make progress of antagonism from distributor 18.In a kind of like this example, the axle 46,47 that is respectively applied for roller 44,45 can be contained in the upright slotted hole 53,54, as shown in the figure.
In addition, can notice that referring to Fig. 4 a plurality of breach 55 that roughly are spaced apart from each other along plate 40 can have the roller of admitting with gap from its process 44,45 between sidewall 26, thereby can not contact that part of plate 40 that is limited by breach 55.So just can allow with roller 44,45 adorn be close to opening 41,42 with 43 with identical opening on the nozzle plate of distributor 18 on operation passage 22 opposed (descending) side.
The structure, operation, adjusting etc. that from Fig. 3, can see distributor 18 significantly be basically with 17 identical, therefore the description to it has not just here repeated.Yet,, generally just do not need to be provided with as 53 and 54 in order to (up or down) that promote the post that lower roll is mounted thereto upright slotted hole that moves along with the operation of distributor in upper and lower of object operation passage; Above described be that a kind of gravity that utilizes guarantees function on the upper surface 48 of top roll contact at object 11 about top roll 44,45 and they in the phenomenon of the ability that moves up of slotted hole 53,54.
Also clearly, except fluid passes the details that nozzle plate discharges, distributor 20,21 textural and install generally all identical with distributor 17 and 18, thereby above to be used for being described in of distributor 17 suitable too here.
Referring to shown in Fig. 4 about the diagram of nozzle plate 40, cut partly in its lower end though can see plate 40, it is actually basically extends between the sidewall 26 of this equipment fully.
Illustrated plate 40 has and has upper and lower surperficial 55,56 of the upstream and downstream surface portion 57 of cutting sth. askew respectively and 58.Beveled surface part 57 enters between a pair of opposed plate 40 object easily, and beveled surface 58 enters easily by being positioned at straight nozzle 61 air with embarking on journey, canted nozzle 60 between 62 forward or in the partial vacuum that swabbing action caused that causes of upstream jet, this will give more detailed discussion hereinafter.This suction to air will be towards the direction of 63 indications of arrow among Fig. 5, so that the partial vacuum that liquid caused that wadding warp is given off by canted nozzle 60 and liquid 60 is flow through easily according to the printed circuit board (PCB) that transports from updrift side to downstream direction of arrow among Fig. 5 64 or the upper surface of other object.
As can be seen, nozzle 61 is arranged to transverse to moving passage longitudinally with being into delegation and extends, and is approximately perpendicular to and moves passage 22 longitudinally and orientation.Each nozzle of embarking on journey 61 comprises a larger-diameter cylindrical shape blind hole district 65 in the upper end, and this blind hole district is connecting a cylindrical shape taper 66 in its lower section, and this taper is connected with a transverse concave groove 67 again.Transverse concave groove extends along the lower surface 56 of plate 40 fully, is connecting the jet hole of nozzle region 66, as shown in Figure 4.District's cylindrical shape convergent tapering " a " of 66 be cross diameter in 100 ° to 160 ° scope, preferably about 120 °.As shown in Fig. 5 A, transverse concave groove 67 has an angle " b " in 30 ° to 90 ° scopes, preferably about 60 °.
Be applied to by chosen that the liquid stream development of launching from transversely arranged nozzle in groups 61 is become from nozzle 61 of the pressure on nozzle 61 and a plurality of nozzles 61 scattered liquid spaced intermediate and be roughly columniform wire fluid column 68, and groove 67 connects a plurality of little fluid columns and becomes one and be roughly flat, transversely arranged plane tentiform liquid spraying is Gu and groove 67 can easily form the fan-shaped liquid spraying from single-nozzle 61 a described tentiform spraying.
Preferably, except the nozzle 61 of embarking on journey, also have delegation to be arranged on its downstream, also at the identical or substantially the same nozzle 62 in canted nozzle 60 downstreams, this will give description hereinafter.Each nozzle 60 is generally all alike with nozzle 61, has a blind hole as the blind hole 65 of nozzle 61, this blind hole is joined in its lower end and a cylindrical shape tapered portion, this tapered portion is connected groove 70 with one again and joins, this groove is connecting a plurality of nozzles 60, but difference is also arranged, promptly connect groove 70 and several nozzle region 60 for the discharge liquid of updrift side be tilt angled, preferably about 75 ° of the angle " C " that this and horizontal direction form, as shown in Figure 5.It is further noted that to be exactly that this causes the partial vacuum of the air stream that is 63 directions via the spraying of nozzle 60 towards the upstream, just disseminate along the direction of its channel flow along updrift side from the liquid of nozzle 60,61 and 62 facing to object so that promote.
Referring now to Fig. 6 and 7,, shown the multi-aperture gas distributor nozzle plate that is associated with gas (generally being air) distribution station 16 among the figure.Except nozzle plate 74, the remainder of distributor 20,21 is generally also all according to the design setting of distributor 17,18, as previously mentioned.Each nozzle plate 74 has a plurality of breach 75, and the function of this breach is identical with the breach 55 of plate among aforesaid Fig. 4.In addition, according to embodiment discussed above, each piece plate 74 extends between sidewall 26 transverse to this equipment equally, and has upper and lower surperficial 76,77 and the bottom upstream and the upstream face part 78,80 of cutting sth. askew.
Yet plate 74 is provided with a plurality of slotted holes 81 that are arranged in lateral rows along plate 74, as shown in the figure.Slotted hole is separated by a plurality of horizontal spacing 82.Slotted hole 81 is connected by a transverse concave groove 83 on the lower surface 77 of plate 74.Groove 83 is perpendicular to the vertical flow channel of object of process in its lower section, and it is in one to four times the scope of the width (size that the flute profile Kongzui is lacked) weighed in the vertical of slotted hole 81 that its degree of depth is upwards weighed from surface 77.This is only size.
The groove 83 of keeping " d " dimension width among Fig. 6 is convenient to keep air or other gas passes each slotted hole 81 discharging, thereby feasible direction towards arrow 84 from this place, air perpendicular to the downward emission of the object flow channel 22 below it will be a plurality of spaced, the form of the plane flow area of transversal orientation.
A plurality of nozzles 85 also are arranged to a lateral rows, as shown in Fig. 6 and 7, equally also comprise spaced slotted hole as shown in the figure, also be arranged to from its emission, relative each slotted hole, a lateral dimension " d " towards the spaced transverse plane flow area of object operation passage.Yet, from air stream or other gas stream that nozzle 85 is launched, the component with a updrift side, this is because pass through the orientation that oblique angle otch " e " forms, as shown in Figure 7, cut an one-tenth about angle of 30 ° " e " in the surface 77 at this place's groove 86.
In addition, can notice that the slotted hole 81 of embarking on journey to agent with respect to groove 83 with the slotted hole 85 of 86 one-tenth row alignments of groove is " to stagger " mutually, thereby slotted hole 85 aligns with spacing 82 in the vertical, and slotted hole 81 aligns with spacing 89 in the vertical.Therefore be subjected to object that air or other gas stream handles when it slotted hole 81 times through out-of-date on the pending object surface longitudinally the district in the imagination do not run into continuous single air curtain at first with 90, but, see a plurality of parallel upright plane air curtains, then see a plurality of air curtain (see figure 2)s via slotted hole 85.
A plurality of cylinder-shaped holes 92 that the groove 93 by lower surface 77 shown in Fig. 6 it is further noted that in 7 is connected help to increase extra air-flow on pending object.In addition, the random cylinder-shaped hole 94 of another row can be arranged on the downstream of plate 74, perpendicular to object flow channel 22 extensions of process in its lower section, is connected by a transverse concave groove 95, as shown in Figure 7.Should also be noted that hole 94 and groove 95 are not presented among Fig. 6, this only is arbitrarily to be provided with because of them.
Referring now to Fig. 8,, there is shown the another kind arrangement that is used for gas or other air discharging distributor 120,121 to occur by the entrained upper and lower nozzle plate form of relevant menifold.The slotted hole 181,185 of embarking on journey and their corresponding low grooves 183,186 groove with the slotted hole of embarking on journey 81,85 of top just Fig. 6 and 7 described embodiment and associated basically are identical, have therefore just no longer repeated here.Yet, should be noted that the upstream orientation via jet hole 185 and 186 air discharged of groove that are associated will cause one by the partial vacuum shown in the arrow 190.The lower surface 177 of plate 174 is domatics in this embodiment, rather than is parallel to the flow channel 22 of the object that is transported from this process, so it is assembled from an one downstream part 180 towards its upstream portion 178.Such convergence has increased the air speed when through hole 200 that is transported from the object 111 of this process of flowing through.If the upper and lower slotted hole on the upper and lower plate 174 is laterally to stagger mutually, thereby given hole by or from last slotted hole or the air impact that gives off from slotted hole down, but not when being subjected to the bump of the two air simultaneously, the effect that a pump is inhaled will appear, air will or make progress or this slotted hole 200 of flowing through downwards thus, but is not interior at one time mobile towards both direction.This by on upper and lower plate 174, being oppositely arranged upper and lower slotted hole, by convergence plane 177 cause high-speed, and the pump-absorb action that caused of tilting discharging groove 186 helps to make fluid to pass through hole 200 up and down to flow.
Referring now to Fig. 9 and 10,, can see one with the nozzle plate 300 shown in the vertically upright cross section, it comprises a nozzle base part 301 and the nozzle segment that can remove 302 of establishing within it, some of nozzle base parts are sentenced horizontal dove tail joggle mode 303 and 304 and are covered on the nozzle segment removed partly, as shown in Figure 9, its joint that forms thus 305,306 extend in the horizontal, and the transverse elasticity body seal 307 of O shape ring type, 308 can remove part 302 is sealed on the base part 301, as shown in the figure.Can see that nozzle bore 310 is inclusive in the removable nozzle segment 302.Therefore, the fluid preferably liquid can be as shown in Figure 9, makes progress flow nozzle along the direction of arrow 311, and discharge from aperture 310, and its mode as described above.
Yet, under the situation of the film of take place to form handling material or delamination, big parts that will equipment for those parts that contain aperture of washer jet plate immediately just can remove removable nozzle segment 302 down in order to cleaning or similar operations when doing big dismounting.
Clearly, though the top nozzle plate that only shows 300, one same general structures of a following nozzle plate among the figure usually with regard to side disposed thereon, it is then mediate and from left to right that pending object transports passage, or extend from right to left, as shown in Figure 9.
Referring to Figure 10, can see in each end of removable nozzle segment 302 and be provided with end plate 312, generally be to be fastened on the nozzle base part 301 with suitable securing member 313, as shown in the figure, it is whole on its periphery by the general O shape ring 314 that is connecting vertical setting of seal 307 and 308 that plate 312 carries plate 302 to be sealed in.Clearly, seal 307,308 and 314 also can comprise independent seal, will also can comprise an independent annular seal for no reason if perhaps be ready.In addition, though only demonstrate an end plate 312 and seal 314 among Figure 10, a common similar plate and seal can be arranged on the opposite end of removable plate portion 302 certainly.
Therefore, clearly this removable plate portion can be removed down immediately so that clean or other similar operations, and they also can be ressembled in this equipment immediately.In addition clearly, dove tail joggle 305,306 will firmly fix this can remove part 302, along the fluid that arrow 311 directions flow, generally is the power that liquid (though perhaps also can be gas) is acted on antagonism.
Referring now to Figure 11-13,, can see that a nozzle plate 400 is provided with a plurality of nozzles 401, the transverse concave groove 402 that nozzle stretches into aperture 404 by one with the degree of depth 403 and has a vertical width D 1 is connected, and the tilting side of groove 402 has an angle " f " betwixt, as shown in Figure 11.In Figure 11, the center line of the center line of groove 402 and nozzle bore or mouth 404 is the same single lines that indicate with 405.
Referring to Figure 12, can see that liquid is in the mode of the fluid column 407 that schematically illustrates from the aperture 404 of nozzle in Figure 12, along shown in the direction of arrow 406 upwards discharge along center line 405, this all is identical for each nozzle bore in the many nozzle bores 404 that connected by transverse concave groove 402.With the discharging angle and 408 one-tenth 90 ° of nozzle surfaces of the fluid column 407 of " g " mark, this is identical with the vertical flow channel angulation of object between the paired nozzle plate 400, i.e. angle " g ".
Referring now to Figure 13,, can see nozzle plate 500 be made into its connecting transverse to the cross central line 505 of a plurality of discharge orifices 504 of this equipment and the center line of the transverse concave groove 502 that is connecting a plurality of nozzle bores 504 transverse to this equipment be positioned at different from position by the object flow channel of device processes.In addition, in Figure 13, can notice that it is an acute angle with horizontal surface 508 angulations " h " that the fluid column 507 of discharging with the direction of arrow 506 schematically is shown from nozzle bore 504, as shown in Figure 13.
Distance between the line 505 and 509 can change, and be preferably in the scope of 0.0～0.508 millimeter (0.0～0.020 inch), and angle " h " generally can change between from about 70 ° to about 90 °.
Can obviously find out on the details of structure from above-mentioned, and using and operate and can make various improvement at method and apparatus of the present invention.
Claims (26)
1. one kind is used for predetermined being roughly the equipment that object that passage longitudinally transports carries out fluid treatment along one, this equipment comprise be used for along a predetermined vertical passage transport from updrift side towards downstream direction object device and:
(a) one is substantially transverse to the described roughly first fluid distributor menifold of passage setting longitudinally;
(b) one is substantially transverse to the described roughly second fluid distributor menifold of passage setting longitudinally;
(c) the roughly mutual opposite disposed of the described first and second fluid distributor menifolds, and vertically the object passage is mediate;
(d) the described first and second fluid distributor menifolds have separately the first and second fluid distributor nozzle plates of the substantial transverse and close described passage that links to each other respectively, respectively have a described nozzle plate and this nozzle plate to end at nozzle plate surface of close described passage in each example of described passage;
(e) at least one nozzle plate in described first and second nozzle plates has jet hole, is used for distributing the fluid that passes from a continuous described menifold, and makes it to contact on the object that transports along pre-routing;
(f) described nozzle plate comprises a base part and a removable nozzle segment, and described jet hole is arranged on the described removable nozzle segment.
2. equipment as claimed in claim 1, it is characterized in that, described each nozzle plate is that porous plate and jet hole are arranged at least one lateral rows, also comprise the transverse concave groove device that extends transverse to described vertical passage along described nozzle plate surface, connecting the jet hole on described nozzle plate surface of approaching described passage, described jet hole of embarking on journey and described transverse concave groove device match and are configured for providing from described jet hole the device of the tentiform fluid stream of horizontal expansion.
3. as each described equipment in claim 1 and 2, it is characterized in that the described base part of wherein said nozzle plate and the described removable nozzle segment of described nozzle plate are to be roughly horizontal joint along at least one closely to be provided with mutually.
4. equipment as claimed in claim 3, it is characterized in that, wherein the described base part of at least a portion is to cover on the described removable nozzle segment of at least a portion, so just constituted can the described nozzle segment of impedance when fluid when jet expansion flows out from described base part at the separated device in described joint.
5. equipment as claimed in claim 4 is characterized in that, one of them elastomeric seal is arranged in the described joint, in order to form the joint of sealing between described base part and described removable nozzle segment.
6. equipment as claimed in claim 5 is characterized in that, wherein said seal comprises a kind of O shape ring.
7. equipment as claimed in claim 3, it is characterized in that, wherein between described base part and described removable nozzle segment, there are two to be roughly horizontal joint along described removable nozzle segment both sides, in each described joint, have an elastomeric seal, between described base part and described removable nozzle segment, form the joint of sealing.
8. equipment as claimed in claim 7 is characterized in that, wherein said joint is made of dove tail ridge.
9. equipment as claimed in claim 8, it is characterized in that, wherein the described base part of at least a portion is to cover on the described removable nozzle segment of at least a portion, so just constituted can the described removable nozzle segment of impedance when fluid when nozzle flows out from described base part at the separated device in described joint, and one of them elastomeric seal is arranged in the described joint, in order to form the joint of sealing between described base part and described removable nozzle segment.
10. equipment as claimed in claim 7, it is characterized in that, this equipment comprises along the end plate of the termination of described base part and removable nozzle segment, is provided with elastomeric seal between the adjacent part of described end plate and described removable nozzle segment.
11. equipment as claimed in claim 1, it is characterized in that, described each nozzle plate is that porous plate and jet hole are arranged at least one lateral rows, also comprise the transverse concave groove device that extends transverse to described vertical passage along described nozzle plate surface, connecting the jet hole on described nozzle plate surface of approaching described passage, described jet hole of embarking on journey and described transverse concave groove device match and are configured for providing from described jet hole the device of the tentiform fluid stream of horizontal expansion, this transverse concave groove device has a cross central line at the primary importance place along described pre-routing, and this jet hole of embarking on journey has a cross central line along a described pre-routing second place place different with described primary importance.
12. equipment as claimed in claim 11 is characterized in that can reaching 0.508 millimeter along the distance between described first and second positions of described pre-routing.
13. equipment as claimed in claim 1, it is characterized in that, described each nozzle plate is that porous plate and jet hole are arranged at least one lateral rows, also along the transverse concave groove device of described nozzle plate surface transverse to described vertical passage extension, connecting the jet hole on described nozzle plate surface of approaching described passage, described jet hole of embarking on journey and described transverse concave groove device match and are configured for providing from described jet hole the device of the tentiform fluid stream of horizontal expansion, described transverse concave groove device have one with described vertical passage fixed center line in an acute angle.
14. equipment as claimed in claim 13 is characterized in that, wherein said acute angle is between 70 ° to 90 °.
15. equipment as claimed in claim 11 is characterized in that, described transverse concave groove device has a fixing center line that becomes an acute angle with described vertical passage.
16. equipment as claimed in claim 15 is characterized in that, wherein can reach 0.508 millimeter and wherein said acute angle between 70 ° to 90 ° along the distance of described pre-routing between described first and second positions.
17. equipment as claimed in claim 11 is characterized in that, described nozzle plate is to be made of a base part and a removable nozzle segment, and described jet hole is arranged within the described removable nozzle segment.
18. equipment as claimed in claim 17 is characterized in that, the described base part of wherein said nozzle plate and described nozzle plate described removed nozzle segment and is roughly horizontal joint along at least one and is provided with adjoining each other.
19. equipment as claimed in claim 18, it is characterized in that, wherein the described base part of at least a portion is to cover on the described removable nozzle segment of at least a portion, so just constituted can the described removable nozzle segment of impedance when fluid when nozzle flows out from described base part at the separated device in described joint, and one of them elastomeric seal is arranged in the described joint, in order to form the joint of sealing between described base part and described removable nozzle segment.
20. one kind is used for predetermined being roughly the method that object that passage longitudinally transports carries out fluid treatment along one, this method comprise with object along a predetermined vertical passage transported from updrift side towards downstream direction and:
(a) be provided with one and be substantially transverse to the described roughly first fluid distributor menifold of passage longitudinally;
(b) be provided with one and be substantially transverse to the described roughly second fluid distributor menifold of passage longitudinally;
(c), and make vertical object passage mediate with the roughly mutual opposite disposed of the described first and second fluid distributor menifolds;
(d) the described first and second fluid distributor menifolds have the first and second porous fluid dispenser nozzle plates that link to each other separately respectively; This nozzle plate is substantially transverse to and near described passage setting, a described nozzle plate respectively is set and makes this nozzle plate end at nozzle plate surface of close described passage in each side of described passage;
(e) at least one nozzle plate in described first and second nozzle plates has jet hole, is used for distributing the fluid that passes from a continuous described menifold, and makes it to contact on the object that transports along pre-routing;
(f) described nozzle plate is made up of a base part and a removable nozzle segment, and described jet hole is arranged in the described removable nozzle segment, and removable nozzle segment is removed down so that clean from base part.
21. the method as claim 20 is characterized in that, provides the step of the first and second fluid distributor manifolds to comprise the porous of the jet hole with at least one lateral rows fluid dispenser nozzle plate is provided; Comprise that also step provides a transverse concave groove device that extends transverse to described vertical passage along described nozzle plate surface, and make it connect the jet hole on described nozzle plate surface of approaching described passage; Provide by the tentiform fluid stream of transverse concave groove device from the horizontal expansion of described jet hole.
22., it is characterized in that the described base part of wherein said nozzle plate and described nozzle plate described removed nozzle segment and be roughly horizontal joint along at least one and be provided with adjoining each other as each described method in claim 20 and 21.
23. method as claimed in claim 22, it is characterized in that this method is included in provides an elastomeric seal in the described joint, in order to form the joint of sealing between described base part and described removable nozzle segment.
24. method as claimed in claim 22, it is characterized in that this method is included in along the end of described base part and removable nozzle segment provides end plate, and between the adjacent part of described end plate and described removable nozzle segment elastomeric seal is set.
25. method as claimed in claim 20 is characterized in that, provides the step of first and second manifolds to comprise that it is porous plate and the jet hole with at least one lateral rows that the manifold with fluid distributor nozzle plate, this nozzle plate are provided; Comprise that also step provides a transverse concave groove device that extends transverse to described vertical passage along described nozzle plate surface, and make it connect the jet hole on described nozzle plate surface of approaching described passage; Provide by the tentiform fluid stream of transverse concave groove device from the horizontal expansion of described jet hole; Be provided at the transverse concave groove device that has a cross central line along the primary importance place of described pre-routing; Be provided at the jet hole of embarking on journey that has a cross central line along described pre-routing at a second place place different with described primary importance.
26. method as claimed in claim 20 is characterized in that, provides the step of first and second manifolds to comprise that it is porous plate and the jet hole with at least one lateral rows that the manifold with fluid distributor nozzle plate, this nozzle plate are provided; Comprise that also step provides a transverse concave groove device that extends transverse to described vertical passage along described nozzle plate surface, and make it connect the jet hole on described nozzle plate surface of approaching described passage; Provide by the tentiform fluid stream of transverse concave groove device from the horizontal expansion of described jet hole; Provide and have a transverse concave groove device that becomes the fixed center line of an acute angle with described vertical passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN98108912A CN1104967C (en) | 1998-05-15 | 1998-05-15 | Fluid delivery apparatus and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN98108912A CN1104967C (en) | 1998-05-15 | 1998-05-15 | Fluid delivery apparatus and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1235879A CN1235879A (en) | 1999-11-24 |
| CN1104967C true CN1104967C (en) | 2003-04-09 |
Family
ID=5219799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN98108912A Expired - Fee Related CN1104967C (en) | 1998-05-15 | 1998-05-15 | Fluid delivery apparatus and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1104967C (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2848997B1 (en) * | 2002-12-23 | 2005-07-08 | Valois Sas | FLUID PRODUCT DISPENSER. |
| KR101153537B1 (en) * | 2010-09-10 | 2012-06-11 | 삼성전기주식회사 | A plating device for printed circuit board a plating device for printed circuit board |
| US9126224B2 (en) | 2011-02-17 | 2015-09-08 | 3M Innovative Properties Company | Apparatus and methods for impinging fluids on substrates |
| DE102015221646A1 (en) * | 2015-11-04 | 2017-05-04 | Gebr. Schmid Gmbh | Treatment fluid suction device and etching device containing the same |
| CN106391583B (en) * | 2016-11-14 | 2018-11-13 | 湖南省客来宝生物能源科技有限公司 | A kind of Biodegradable films dust-extraction unit |
| US11731153B2 (en) | 2017-07-24 | 2023-08-22 | Carlisle Fluid Technologies, LLC | Systems and methods for communication and control in fluid delivery systems |
| CN114760765B (en) * | 2022-06-16 | 2022-09-02 | 深圳市惠利电子科技有限公司 | Dry-type circuit board chemical etching equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4174261A (en) * | 1976-07-16 | 1979-11-13 | Pellegrino Peter P | Apparatus for electroplating, deplating or etching |
| US5063951A (en) * | 1990-07-19 | 1991-11-12 | International Business Machines Corporation | Fluid treatment device |
| US5289639A (en) * | 1992-07-10 | 1994-03-01 | International Business Machines Corp. | Fluid treatment apparatus and method |
-
1998
- 1998-05-15 CN CN98108912A patent/CN1104967C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4174261A (en) * | 1976-07-16 | 1979-11-13 | Pellegrino Peter P | Apparatus for electroplating, deplating or etching |
| US5063951A (en) * | 1990-07-19 | 1991-11-12 | International Business Machines Corporation | Fluid treatment device |
| US5289639A (en) * | 1992-07-10 | 1994-03-01 | International Business Machines Corp. | Fluid treatment apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1235879A (en) | 1999-11-24 |
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