CN110491807B - Automatic silicon wafer degumming machine for silicon wafer production - Google Patents
Automatic silicon wafer degumming machine for silicon wafer production Download PDFInfo
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- CN110491807B CN110491807B CN201910744112.0A CN201910744112A CN110491807B CN 110491807 B CN110491807 B CN 110491807B CN 201910744112 A CN201910744112 A CN 201910744112A CN 110491807 B CN110491807 B CN 110491807B
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Abstract
The invention discloses an automatic silicon wafer degumming machine for silicon wafer production, which comprises a degumming machine body, wherein an electric cabinet is arranged in the degumming machine body, a degumming box body is fixedly connected to the left side of the electric cabinet, a partition plate is fixedly connected in the degumming box body and divides the interior of the degumming box body into a first degumming chamber, a second degumming chamber, a third degumming chamber and a drying chamber from right to left in sequence, the front end of the degumming box body is hinged with a degumming box door, the lower end of the degumming box body is fixedly connected with a collecting box body, and a conveying mechanism is fixedly arranged in the degumming box body. This automatic silicon chip degumming machine is used in silicon chip production has increased the effect that wholly comes unstuck to the effect of silicon chip production has been increased, thereby has increased whole practicality, and the water in the production all recycles through the mode of circulation, has reduced holistic resource consumption, has increased whole practicality, thereby has increased holistic practicality.
Description
Technical Field
The invention relates to the technical field of silicon wafer production and processing, in particular to an automatic silicon wafer degumming machine for silicon wafer production.
Background
The chip made of silicon chip is a famous "magic calculator" and has remarkable computing power. No matter how complex mathematical problems, physical problems and engineering problems are, and no matter how large the calculation workload is, a worker can tell the problems to the computer through a computer keyboard and issue thinking and instructions for solving the problems, and the computer can tell the answers to the user in a very short time. Thus, those problems that take years and decades of manual calculations, which may only take minutes to solve, are solved by a computer. Even some people can not calculate the result, the computer can tell you the answer very fast.
However, the silicon wafer production needs to be performed with degumming, automatic, fast and efficient degumming can not be performed on the silicon wafer in the silicon wafer degumming process, incomplete degumming of the silicon wafer is easily caused, so that overall subsequent work is influenced, the overall degumming effect is reduced, the existing silicon wafer production degumming can not be performed continuously, the overall degumming speed is reduced, meanwhile, the existing silicon wafer production degumming equipment can only be used for performing degumming simply, the overall functionality is reduced, and the overall practicability is reduced.
Disclosure of Invention
The invention aims to provide an automatic silicon wafer degumming machine for silicon wafer production, which solves the problems that the silicon wafer production needs to be degummed, the silicon wafer cannot be automatically, quickly and efficiently degummed in the silicon wafer degumming process, the silicon wafer degumming is not thorough easily caused, the overall subsequent work is influenced, the overall degumming effect is reduced, the existing silicon wafer production degumming can not be continuously carried out, the overall degumming speed is reduced, the existing silicon wafer production degumming equipment can only be used for carrying out degumming simply, the overall functionality is reduced, and the overall practicability is reduced.
In order to achieve the purpose, the invention provides the following technical scheme: an automatic silicon wafer degumming machine for silicon wafer production comprises a degumming machine body, wherein an electric cabinet is arranged in the degumming machine body, a degumming box body is fixedly connected to the left side of the electric cabinet, a partition plate is fixedly connected in the degumming box body and divides the interior of the degumming box body from right to left into a first degumming chamber, a second degumming chamber, a third degumming chamber and a drying chamber in sequence and in equal parts, the front end of the degumming box body is hinged with a degumming box door, the lower end of the degumming box body is fixedly connected with a collecting box body, the front end of the collecting box body is hinged with a collecting box door, the interior of the collecting box body is movably connected with a collecting mechanism, the upper end of the degumming box body is fixedly connected with a circulating box body, the interior of the circulating box body is fixedly provided with a conveying mechanism, and the drying chamber is correspondingly and fixedly connected with a fan in the interlayer of the circulating box body, and the fan air outlet passes circulation box lower extreme and extends to the box inside that comes unstuck, circulation box lower extreme fixedly connected with electric heat banks that the drying chamber corresponds the distribution, and the electric heat banks outside and the fan air outlet not laminate, the fan air intake passes the inside extension of circulation box and circulates the box upper end.
Preferably, the degumming box body, the collecting box body and the circulating box body are identical in internal structure, the collecting box body and the circulating box body are divided into four groups in equal times by the partition plates, and the internal spaces of the collecting box body and the circulating box body are respectively distributed correspondingly to the first degumming chamber, the second degumming chamber, the third degumming chamber and the drying chamber.
Preferably, the partition plates are distributed in the degumming box body at equal intervals, the partition plates are symmetrically distributed about the horizontal center line of the degumming box body, a movable groove is formed in the middle of each partition plate, and the movable groove is overlapped with the vertical center line of each partition plate.
Preferably, the collecting mechanism is internally provided with a collecting box, the rear end of the collecting box is fixedly connected with a connecting pipe, the connecting pipe penetrates through the inner side of the collecting box body and extends to the rear end of the collecting box body, the connecting pipe is distributed correspondingly to the first degumming chamber, the second degumming chamber, the third degumming chamber and the drying chamber, the rear end of the connecting pipe is fixedly connected with a circulating pump, the first degumming chamber, the second degumming chamber and the third degumming chamber are correspondingly distributed, the upper end of the circulating pump is fixedly connected with a circulating pipe, and the inner side of the circulating pipe is fixedly connected with a filter box.
Preferably, the inside fixedly connected with water conservancy diversion frame of collection box, the inside fixedly connected with of water conservancy diversion frame strains the offset plate, and strains the offset plate inside and seted up the hole that leaks, the water conservancy diversion frame corresponds the distribution with the collecting box and has four groups, and the equidistant distribution of the hole that leaks in the water conservancy diversion frame.
Preferably, the inside fixedly connected with filter assembly of rose box, and filter assembly presss from both sides dress active carbon particle structure for two-layer filter cloth.
Preferably, the inside storage water tank that is including of circulation mechanism, and storage water tank rear end fixedly connected with butt joint pipe, the butt joint pipe passes the inside side of circulation box and extends to circulation box rear end, and butt joint pipe rear end and circulation pipe fixed connection, the inside fixedly connected with force (forcing) pump of storage water tank, the force (forcing) pump delivery port passes circulation box lower extreme and extends to the box inside that comes unstuck, and force (forcing) pump delivery port fixedly connected with pressure nozzle, storage water tank, force (forcing) pump and pressure nozzle correspond first room, the second room that comes unstuck, the third room that comes unstuck and distribute.
Preferably, conveying mechanism is inside including the mounting panel, and mounting panel outside fixedly connected with motor, it is inboard that the motor output passes the mounting panel and extends to the mounting panel, and motor output fixedly connected with drive roll, drive roll outside swing joint has the conveyer belt, the inboard swing joint of conveyer belt has the driven voller, the through-hole has been seted up to the conveyer belt inboard, and conveyer belt outside fixedly connected with location frock.
Preferably, the location frock is inside including the installing frame, and installing frame front end fixedly connected with driving motor, the driving motor output passes the installing frame and extends to the installing frame inboard, and the fixed frame of driving motor output fixedly connected with, fixed frame and installing frame swing joint, fixed frame outside fixedly connected with cylinder, and the cylinder expansion end passes fixed frame outside and extends to fixed frame inboard, the location frock is at the equidistant distribution in the conveyer belt outside, and fixes a position frock internally mounted frame lower extreme and seted up the limbers.
The invention has the beneficial effects that:
1. according to the automatic silicon wafer degumming machine for silicon wafer production, the three degumming chambers are used for degumming the whole body to different degrees, warm water, cold water and lactic acid can be respectively added into the collecting boxes and the circulating boxes corresponding to the first degumming chamber, the second degumming chamber and the third degumming chamber, and the silicon wafer is subjected to triple degumming, so that the whole body is subjected to complete degumming, the whole degumming effect is increased, the silicon wafer production effect is increased, and the whole practicability is increased;
2. according to the automatic silicon wafer degumming machine for silicon wafer production, the conveying mechanism is used for driving the silicon wafer to be conveyed, and the high-pressure spray head of the circulating mechanism is used for carrying out high-pressure degumming on the silicon wafer, so that the whole silicon wafer can be subjected to automatic degumming in the case of tannin, only manual feeding and discharging are needed in the whole process, the labor consumption is reduced, the degumming speed of the silicon wafer is increased, the water in the production is recycled in a circulating mode, the whole resource consumption is reduced, and the whole practicability is increased;
3. this automatic silicon chip degumming machine is used in silicon chip production has increased fan and electric heat banks through at silicon chip degumming machine rearmost end to drying the silicon chip that comes unstuck, making silicon chip degumming machine have the effect of drying, increased holistic functionality, and guaranteed holistic process velocity, thereby increased holistic practicality.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the internal structure of the degumming tank according to the present invention;
FIG. 3 is a schematic top view of the present invention;
FIG. 4 is a schematic view of the connection structure of the collecting mechanism of the present invention;
FIG. 5 is a schematic perspective view of a conveying mechanism of the treatment tank of the present invention;
FIG. 6 is a schematic perspective view of a through frame according to the present invention;
FIG. 7 is a schematic view of the internal structure of the filtering box of the present invention;
fig. 8 is a schematic perspective view of the over-positioning tool of the present invention.
In the figure: 1. a degumming machine body; 2. an electric cabinet; 3. degumming a box body; 4. a partition plate; 5. a first degumming chamber; 6. a second degumming chamber; 7. a third degumming chamber; 8. a drying chamber; 9. a degumming box door; 10. a collection box body; 11. a collection box door; 12. a collection mechanism; 13. circulating the box body; 14. a circulating mechanism; 15. a conveying mechanism; 16. a flow guide frame; 17. a fan; 18. an electric heating lamp set; 19. a movable groove; 1201. a collection box; 1202. a connecting pipe; 1203. a circulation pump; 1204. a circulation pipe; 1205. a filter box; 1401. a water storage tank; 1402. butt-joint pipes; 1403. a pressure pump; 1404. a pressurized spray head; 1601. filtering the rubber plate; 1602. a water leakage hole; 1501. mounting a plate; 1502. an electric motor; 1503. a drive roll; 1504. a conveyor belt; 1505. a through hole; 1506. positioning a tool; 1507. a driven roller; 12051. a filter assembly; 12052. filtering cloth; 12053. activated carbon particles; 15061. installing a frame; 15062. a drive motor; 15063. a fixing frame; 15064. a cylinder; 15065. a water hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-8, the present invention provides a technical solution: an automatic silicon wafer degumming machine for silicon wafer production comprises a degumming machine body 1, wherein an electric control box 2 is arranged in the degumming machine body 1, a degumming box body 3 is fixedly connected to the left side of the electric control box 2, a partition plate 4 is fixedly connected in the degumming box body 3, the partition plate 4 divides the interior of the degumming box body 3 into a first degumming chamber 5, a second degumming chamber 6, a third degumming chamber 7 and a drying chamber 8 from right to left in sequence, the front end of the degumming box body 3 is hinged with a degumming box door 9, the lower end of the degumming box body 3 is fixedly connected with a collecting box body 10, the front end of the collecting box body 10 is hinged with a collecting box door 11, the interior of the collecting box body 10 is movably connected with a collecting mechanism 12, the upper end of the degumming box body 3 is fixedly connected with a circulating box body 13, a circulating mechanism 14 is fixedly arranged in the circulating box body 13, a conveying mechanism 15 is fixedly arranged in the degumming box body 3, and a fan 17 is fixedly connected in the drying chamber 8 corresponding to the inner part of the distributed circulating box body 13, and the air outlet of the fan 17 penetrates through the lower end of the circulating box body 13 and extends into the degumming box body 3, the lower end of the circulating box body 13, which is correspondingly distributed in the drying chamber 8, is fixedly connected with an electric heating lamp group 18, the outer side of the electric heating lamp group 18 is not attached to the air outlet of the fan 17, the air inlet of the fan 17 penetrates through the inner side of the circulating box body 13 and extends to the upper end of the circulating box body 13, the electric heating lamp group 18 and the fan 17 can dry the degummed silicon wafer, and the integral functionality is improved.
Further, the degumming box body 3 is identical to the internal structures of the collecting box body 10 and the circulating box body 13, the collecting box body 10 and the circulating box body 13 are divided into four groups by 4 times, the internal spaces of the four groups of the equal-divided collecting box body 10 and the circulating box body 13 are respectively distributed corresponding to the first degumming chamber 5, the second degumming chamber 6, the third degumming chamber 7 and the drying chamber 8, and the collecting box body 10 and the circulating box body 13 are distributed corresponding to the first degumming chamber 5, the second degumming chamber 6, the third degumming chamber 7 and the drying chamber 8, so that the degumming is carried out on the whole body for three times.
Furthermore, the partition plates 4 are distributed in the degumming box body 3 at equal intervals, the partition plates 4 are symmetrically distributed about the horizontal central line of the degumming box body 3, the middle of each partition plate 4 is provided with a movable groove 19, and the movable grooves 19 are overlapped with the vertical central line of the partition plates 4. The partition plate 4 can prevent different liquids from streaming mutually, thereby increasing the effect of overall circulation and reducing resource consumption.
Further, collection mechanism 12 is inside including collecting box 1201, and collecting box 1201 rear end fixedly connected with connecting pipe 1202, connecting pipe 1202 passes and collects box 10 inboard and extends to collecting box 10 rear end, and connecting pipe 1202 and first chamber 5 that comes unstuck, second chamber 6 that comes unstuck, third chamber 7 that comes unstuck and drying chamber 8 correspond the distribution, and first chamber 5 that comes unstuck, second chamber 6 that comes unstuck, connecting pipe 1202 rear end fixedly connected with circulating pump 1203 that third chamber 7 that comes unstuck corresponds the distribution, circulating pump 1203 upper end fixedly connected with circulating pipe 1204, and circulating pipe inboard is crossed the definite connection and is connected with rose box 1205, make the whole waste liquid that produces all can circulate, thereby make the whole waste liquid that produces can filter the back recycle, whole environmental protection has been increased.
Further, the inside fixedly connected with water conservancy diversion frame 16 of collection box 10, the inside fixedly connected with of water conservancy diversion frame 16 strains offset plate 1601, and strains offset plate 1601 inside and seted up water leakage hole 1602, and water conservancy diversion frame 16 corresponds the distribution with collecting box 1201 and has four groups, and the equidistant distribution of water leakage hole 1602 in the water conservancy diversion frame 16, strain offset plate 1601 and can block the waste material that produces after coming unstuck to make whole good filter effect that has, increased whole practicality.
Furthermore, the inside fixedly connected with filtering component 12051 of filter box 1205, and filtering component 12051 is two-layer filter cloth 12052 and presss from both sides the dress active carbon particle 12053 structure, and two-layer filter cloth 12052 presss from both sides the filtering component 12051 of dress active carbon particle 12053 structure and can carry out good filtration to the degumming liquid, has increased holistic filter effect.
Further, the inside of the circulation mechanism 14 includes a water storage tank 1401, the rear end of the water storage tank 1401 is fixedly connected with a butt joint pipe 1402, the butt joint pipe 1402 penetrates through the inner side of the circulation tank 13 and extends to the rear end of the circulation tank 13, the rear end of the butt joint pipe 1402 is fixedly connected with a circulation pipe 1204, the inside of the water storage tank 1401 is fixedly connected with a pressure pump 1403, the water outlet of the pressure pump 1403 penetrates through the lower end of the circulation tank 13 and extends to the inside of the degumming tank 3, the water outlet of the pressure pump 1403 is fixedly connected with a pressure nozzle 1404, the water storage tank 1401, the pressure pump 1403 and the pressure nozzle 1404 are distributed corresponding to the first degumming chamber 5, the second degumming chamber 6 and the third degumming chamber 7, and degumming solutions in the first degumming chamber 5, the second degumming chamber 6 and the third degumming chamber 7 are sprayed out in a pressurization mode, so that the whole degumming effect is ensured.
Further, conveying mechanism 15 is inside including mounting panel 1501, and mounting panel 1501 outside fixedly connected with motor 1502, it is inboard that the motor 1502 output passes mounting panel 1501 and extends to mounting panel 1501, and motor 1502 output fixedly connected with drive roll 1503, drive roll 1503 outside swing joint has conveyer belt 1504, the inboard swing joint of conveyer belt 1504 has driven voller 1507, through-hole 1505 has been seted up to conveyer belt 1504 inboard, and conveyer belt 1504 outside fixedly connected with location frock 1506, location frock 1506 can be fixed the silicon chip, thereby make the silicon chip overturn in the transportation, guarantee holistic effect of coming unstuck.
Further, the location frock 1506 is inside including installing frame 15061, and installing frame 15061 front end fixedly connected with driving motor 15062, the driving motor 15062 output passes installing frame 15061 and extends to the installing frame 15061 inboard, and the fixed frame 15063 of driving motor 15062 output fixedly connected with, fixed frame 15063 and installing frame 15061 swing joint, fixed frame 15063 outside fixedly connected with cylinder 15064, and the cylinder 15064 expansion end passes the fixed frame 15063 outside and extends to fixed frame 15063 inboard, the location frock 1506 is at the equidistant distribution in the conveyer belt 1504 outside, and the limbers 15065 has been seted up to the inside installing frame 15061 lower extreme of location frock 1506, driving motor 15062 drives the silicon chip and overturns in the transportation, guarantee the coming unstuck of silicon chip positive and negative, holistic effect of coming unstuck has been increased.
The working principle is as follows: firstly, a degumming box door 9 is opened to place a silicon wafer on a fixing frame 15063 in a positioning tool 1506, cylinders 15064 at two ends of the fixing frame 15063 clamp the silicon wafer, then a motor 1502 drives a driving roller 1503 to rotate, the driving roller 1503 drives a driven roller 1507 to rotate through a conveying belt 1504, the conveying belt 1504 drives the positioning tool 1506 to move, when the silicon wafer moves to a first degumming chamber 5, a pressure pump 1403 sprays degumming liquid in a water storage tank 1401 at the upper end of the silicon wafer through a pressure nozzle 1404, the glue machine on the surface of the silicon wafer is preliminarily separated, in the separation process, the driving motor 15062 drives the fixing frame 15063 to rotate, so that the silicon wafer is driven to rotate, the overall all-dimensional degumming is realized, the overall degumming effect is increased, and similarly, the conveying belt 1504 drives the positioning tool 1506 to move to the insides of a second degumming chamber 6 and a third degumming chamber 7, and the pressure pumps of the second degumming chamber 6 and the third degumming chamber 7 drive 1403 to drive different degumming (hot water and lactic acid) to carry out all-dimensional degumming on the silicon wafer The waste liquid after degumming is collected in the collecting box 1201 after being primarily filtered by the flow guide frame 16, and is filtered in the filtering box 1205 under the driving of the circulating pump 1203, so that the whole body is filtered, and the waste liquid enters the water storage tank 1401 for internal recycling, and finally the silicon wafer is moved to the inside of the drying chamber 8 and is dried under the action of the fan 17 and the electric heating lamp group 18, so that the whole degumming and drying are realized.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a silicon chip production is with automatic silicon chip degumming machine, includes degumming machine body (1), its characterized in that: the degumming machine is characterized in that an electric cabinet (2) is arranged in the degumming machine body (1), a degumming box body (3) is fixedly connected to the left side of the electric cabinet (2), a partition plate (4) is fixedly connected to the inside of the degumming box body (3), the partition plate (4) divides the inside of the degumming box body (3) into a first degumming chamber (5), a second degumming chamber (6), a third degumming chamber (7) and a drying chamber (8) from right to left in sequence, the front end of the degumming box body (3) is hinged with a degumming box door (9), the lower end of the degumming box body (3) is fixedly connected with a collecting box body (10), the front end of the collecting box body (10) is hinged with a collecting box door (11), a collecting mechanism (12) is movably connected to the inside of the collecting box body (10), a circulating box body (13) is fixedly connected to the upper end of the degumming box body (3), and a circulating mechanism (14) is fixedly installed in the circulating box body (13), the utility model discloses a degumming box, including degumming box (3), the inside fixed mounting of box (3) that comes unstuck has conveying mechanism (15), drying chamber (8) correspond the inside fixedly connected with fan (17) of circulation box (13) interlayer that distributes, and fan (17) air outlet pass circulation box (13) lower extreme and extend to box (3) that comes unstuck inside, drying chamber (8) correspond circulation box (13) lower extreme fixedly connected with electric heat banks (18) that distribute, and electric heat banks (18) outside and fan (17) air outlet do not laminate, fan (17) air intake passes circulation box (13) inboard and extends to circulation box (13) upper end.
2. The automatic silicon wafer degumming machine for silicon wafer production according to claim 1, characterized in that: the degumming box body (3) is identical to the collecting box body (10) and the circulating box body (13) in internal structure, the collecting box body (10) and the circulating box body (13) are internally divided into four groups by the partition plates (4) in time, and the internal spaces of the collecting box body (10) and the circulating box body (13) are respectively distributed correspondingly to the first degumming chamber (5), the second degumming chamber (6), the third degumming chamber (7) and the drying chamber (8).
3. The automatic silicon wafer degumming machine for silicon wafer production according to claim 1, characterized in that: the separation plates (4) are distributed in the degumming box body (3) at equal intervals, the separation plates (4) are symmetrically distributed about the horizontal central line of the degumming box body (3), a movable groove (19) is formed in the middle of each separation plate (4), and the movable groove (19) is overlapped with the vertical central line of each separation plate (4).
4. The automatic silicon wafer degumming machine for silicon wafer production according to claim 1, characterized in that: the collecting mechanism (12) is internally provided with a collecting box (1201), the rear end of the collecting box (1201) is fixedly connected with a connecting pipe (1202), the connecting pipe (1202) penetrates through the inner side of the collecting box (10) and extends to the rear end of the collecting box (10), the connecting pipe (1202) is correspondingly distributed with the first degumming chamber (5), the second degumming chamber (6), the third degumming chamber (7) and the drying chamber (8), the first degumming chamber (5), the second degumming chamber (6) and the third degumming chamber (7) are correspondingly distributed, the rear end of the connecting pipe (1202) is fixedly connected with a circulating pump (1203), the upper end of the circulating pump (1203) is fixedly connected with a circulating pipe (1204), and the inner side of the circulating pipe (1204) is fixedly connected with a filter box (1205).
5. The automatic silicon wafer degumming machine for silicon wafer production according to claim 1, characterized in that: the utility model discloses a collection box, including collection box (10), the inside fixedly connected with water conservancy diversion frame (16) of collection box (10), the inside fixedly connected with of water conservancy diversion frame (16) strains offset plate (1601), and strains offset plate (1601) inside and seted up water leakage hole (1602), water conservancy diversion frame (16) and collection box (1201) correspond the distribution and have four groups, and water leakage hole (1602) equidistant distribution in the water conservancy diversion frame (16).
6. The automatic silicon wafer degumming machine for silicon wafer production according to claim 4, characterized in that: the inside fixedly connected with filter assembly (12051) of rose box (1205), and filter assembly (12051) is two-layer filter cloth (12052) and presss from both sides dress active carbon particle (12053) structure.
7. The automatic silicon wafer degumming machine for silicon wafer production according to claim 4, characterized in that: the circulation mechanism (14) is internally provided with a water storage tank (1401), the rear end of the water storage tank (1401) is fixedly connected with a butt joint pipe (1402), the butt joint pipe (1402) penetrates through the inner side of a circulation box body (13) and extends to the rear end of the circulation box body (13), the rear end of the butt joint pipe (1402) is fixedly connected with a circulation pipe (1204), a pressure pump (1403) is fixedly connected inside the water storage tank (1401), a water outlet of the pressure pump (1403) penetrates through the lower end of the circulation box body (13) and extends to the inside of a degumming box body (3), a pressure nozzle (1404) is fixedly connected with a water outlet of the pressure pump (1403), and the water storage tank (1401), the pressure pump (1403) and the pressure nozzle (1404) are distributed corresponding to a first degumming chamber (5), a second degumming chamber (6) and a third degumming chamber (7).
8. The automatic silicon wafer degumming machine for silicon wafer production according to claim 1, characterized in that: conveying mechanism (15) is inside including mounting panel (1501), and mounting panel (1501) outside fixedly connected with motor (1502), motor (1502) output passes mounting panel (1501) and extends to mounting panel (1501) inboard, and motor (1502) output end fixedly connected with drive roll (1503), drive roll (1503) outside swing joint has conveyer belt (1504), conveyer belt (1504) inboard swing joint has driven voller (1507), through-hole (1505) have been seted up to conveyer belt (1504) inboard, and conveyer belt (1504) outside fixedly connected with location frock (1506).
9. The automatic silicon wafer degumming machine for silicon wafer production according to claim 8, characterized in that: location frock (1506) is inside including installing frame (15061), and installing frame (15061) front end fixedly connected with driving motor (15062), driving motor (15062) output passes installing frame (15061) and extends to installing frame (15061) inboard, and driving motor (15062) output end fixedly connected with fixes frame (15063), fixed frame (15063) and installing frame (15061) swing joint, fixed frame (15063) outside fixedly connected with cylinder (15064), and cylinder (15064) expansion end passes fixed frame (15063) outside and extends to fixed frame (15063) inboard, location frock (1506) is at the equidistant distribution in conveyer belt (1504) outside, and location frock (1506) inside installing frame (15061) lower extreme has seted up limbers (15065).
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203521383U (en) * | 2013-11-07 | 2014-04-02 | 英利能源（中国）有限公司 | Degumming tool |
| CN205723592U (en) * | 2016-05-30 | 2016-11-23 | 嘉兴职业技术学院 | A kind of cyclic utilization system of battery component degumming water |
| CN106531667A (en) * | 2016-11-28 | 2017-03-22 | 浙江钱江明士达光电科技有限公司 | High-efficiency silicon wafer degumming device |
| CN107051966A (en) * | 2017-03-08 | 2017-08-18 | 常州市科沛达超声工程设备有限公司 | Full-automatic silicon wafer cleans line and its method of work |
| CN107818935A (en) * | 2017-12-06 | 2018-03-20 | 常州市科沛达超声工程设备有限公司 | Wafer resist remover |
| CN207655564U (en) * | 2017-10-27 | 2018-07-27 | 乐山新天源太阳能科技有限公司 | The automatic cleaning and degumming all-in-one machine of silicon chip |
| CN108597984A (en) * | 2018-04-13 | 2018-09-28 | 扬州市万达光电有限公司 | A kind of cleaning method and its treatment process of monocrystalline silicon piece |
| CN109570174A (en) * | 2018-12-18 | 2019-04-05 | 苏州市晶协高新电子材料有限公司 | A kind of chip glass degumming device and Degumming method |
-
2019
- 2019-08-13 CN CN201910744112.0A patent/CN110491807B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203521383U (en) * | 2013-11-07 | 2014-04-02 | 英利能源（中国）有限公司 | Degumming tool |
| CN205723592U (en) * | 2016-05-30 | 2016-11-23 | 嘉兴职业技术学院 | A kind of cyclic utilization system of battery component degumming water |
| CN106531667A (en) * | 2016-11-28 | 2017-03-22 | 浙江钱江明士达光电科技有限公司 | High-efficiency silicon wafer degumming device |
| CN107051966A (en) * | 2017-03-08 | 2017-08-18 | 常州市科沛达超声工程设备有限公司 | Full-automatic silicon wafer cleans line and its method of work |
| CN207655564U (en) * | 2017-10-27 | 2018-07-27 | 乐山新天源太阳能科技有限公司 | The automatic cleaning and degumming all-in-one machine of silicon chip |
| CN107818935A (en) * | 2017-12-06 | 2018-03-20 | 常州市科沛达超声工程设备有限公司 | Wafer resist remover |
| CN108597984A (en) * | 2018-04-13 | 2018-09-28 | 扬州市万达光电有限公司 | A kind of cleaning method and its treatment process of monocrystalline silicon piece |
| CN109570174A (en) * | 2018-12-18 | 2019-04-05 | 苏州市晶协高新电子材料有限公司 | A kind of chip glass degumming device and Degumming method |
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