CN110491807A - A kind of silicon wafer production automation silicon wafer stripping machine - Google Patents
A kind of silicon wafer production automation silicon wafer stripping machine Download PDFInfo
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- CN110491807A CN110491807A CN201910744112.0A CN201910744112A CN110491807A CN 110491807 A CN110491807 A CN 110491807A CN 201910744112 A CN201910744112 A CN 201910744112A CN 110491807 A CN110491807 A CN 110491807A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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Abstract
The invention discloses a kind of silicon wafers to produce with automation silicon wafer stripping machine, including degumming machine ontology, the degumming machine body interior includes electric cabinet, and degumming cabinet is fixedly connected on the left of electric cabinet, the degumming box house is fixedly connected with demarcation plate, and degumming box house is successively divided into the first degumming room, the second degumming room and third degumming room and drying room by demarcation plate from right to left, degumming cabinet front end is hingedly connected with degumming chamber door, degumming cabinet lower end is fixedly connected with collection tank, and the degumming box house is fixedly installed with conveying mechanism.Silicon wafer production automation silicon wafer stripping machine, increase the effect of whole degumming, to increase the effect of silicon wafer production, to increase volume overall utility, and the water in production is recycled by way of circulation, whole resource consumption is reduced, overall utility is increased, to increase whole practicability.
Description
Technical field
The present invention relates to silicon wafers to produce and process technical field, specially a kind of silicon wafer production automation silicon wafer stripping machine.
Background technique
Chip made of silicon wafer is famous " miraculous foresight ", there is surprising operational capability.No matter how Fu Za mathematics
Problem, physical problem and engineering problem, the workload also no matter calculated have it is much, as long as staff pass through computer keyboard handle
Problem tells it, and assigns the thinking and instruction solved a problem, and computer can tell you answer in a very short period of time.In this way,
Those artificial calculating need the problem of spending several years, tens of years, and computer may only need a few minutes that can solve.Very
The problem of result can not be calculated to some manpowers, computer also can tell quickly you answer.
But silicon wafer production needs to carry out degumming to silicon wafer, can not carry out to silicon wafer during silicon wafer stripping automatically quick
Efficient degumming, be easy to cause silicon wafer stripping to be not thorough, to influence whole subsequent work, reduces whole degumming effect,
And the production degumming of existing silicon wafer cannot be continuous progress, the speed of whole degumming is reduced, to reduce whole de-
Glue speed, while the carry out degumming that existing silicon wafer production degumming equipment can only be simple, reduce whole functionality, to drop
Low overall utility.
Summary of the invention
The purpose of the present invention is to provide a kind of silicon wafers to produce with silicon wafer stripping machine is automated, to solve above-mentioned background technique
Middle proposition but silicon wafer production are needed to silicon wafer progress degumming, can not be carried out to silicon wafer during silicon wafer stripping automatically quickly high
The degumming of effect, be easy to cause silicon wafer stripping to be not thorough, to influence whole subsequent work, reduces whole degumming effect, and
The production degumming of existing silicon wafer cannot be continuous progress, the speed of whole degumming is reduced, to reduce whole degumming
Speed, while the carry out degumming that existing silicon wafer production degumming equipment can only be simple, reduce whole functionality, to reduce
The problem of overall utility.
To achieve the above object, the invention provides the following technical scheme: a kind of production of silicon wafer is used and automates silicon wafer stripping machine,
Including degumming machine ontology, the degumming machine body interior includes electric cabinet, and is fixedly connected with degumming cabinet on the left of electric cabinet,
The degumming box house is fixedly connected with demarcation plate, and degumming box house is successively divided into first by demarcation plate from right to left
Degumming room, the second degumming room and third degumming room and drying room, degumming cabinet front end is hingedly connected with degumming chamber door, described
Degumming cabinet lower end is fixedly connected with collection tank, and collection tank front end is hingedly connected with collection chamber door, the collection tank
Internal activity is connected with collecting mechanism, and degumming cabinet upper end is fixedly connected with circulation cabinet, and recycles box house and fix
Circulation mechanism is installed, the degumming box house is fixedly installed with conveying mechanism.
Preferably, the degumming cabinet and collection tank and the circulation internal structure of cabinet are identical, and collection tank and follow
Ring box house time is divided into four groups by demarcation plate, the collection tank of four groups of equal parts and recycle housing interior volume respectively with
The corresponding distribution of first degumming room, the second degumming room, third degumming room and drying room.
Preferably, the demarcation plate is in degumming box house equidistantly distributed, and demarcation plate is about in degumming cabinet level
Heart line is symmetrical, and loose slot, and loose slot and demarcation plate vertical centre line overlap are offered among the demarcation plate.
Preferably, include collecting box inside the collecting mechanism, and collect box back and be fixedly connected with connecting tube, it is described
Connecting tube passes through and extends to collection tank rear end on the inside of collection tank, and connecting tube and the first degumming room, the second degumming room, third
Degumming room and the corresponding distribution of drying room, and the first degumming room, the second degumming room, the corresponding connecting tube rear end being distributed in third degumming room
It is fixedly connected with circulating pump, the circulating pump upper end is fixedly connected with circulation pipe, and is connected with Rose Box surely excessively on the inside of circulation pipe.
Preferably, it is fixedly connected with water conservancy diversion frame inside the collection tank, is fixedly connected with filter glue inside the water conservancy diversion frame
Plate, and filter glue intralamellar part offers leakage hole, the water conservancy diversion frame is corresponding with collecting box to be distributed with four groups, and the leak in water conservancy diversion frame
Hole equidistantly distributed.
Preferably, filter assemblies are fixedly connected with inside the Rose Box, and filter assemblies are that two layers of filter cloth clamps activity
Charcoal grain structure, and active carbon particle structure preferred compressed active carbon.
Preferably, blower, and blower outlet air are fixedly connected with inside the circulation cabinet interlayer of the corresponding distribution of the drying room
Mouth passes through circulation cabinet lower end and extends to degumming box house, and the circulation cabinet lower end of the corresponding distribution of the drying room is fixedly connected
There is electric heating lamp group, and be not bonded on the outside of electric heating lamp group with fan outlet, the air inlet passes through circulation box inside and prolongs
Extend to circulation cabinet upper end.
It preferably, include water tank inside the circulation mechanism, and water storage box back is fixedly connected with butt tube, it is described
Circulation box back is extended to across circulation box inside, and butt tube rear end is fixedly connected with circulation pipe, in the water tank
Portion is fixedly connected with force (forcing) pump, and the force (forcing) pump water outlet passes through circulation cabinet lower end and extends to degumming box house, and pressurizes
It pumps out the mouth of a river and is fixedly connected with pressurization spray head, the water tank, force (forcing) pump and pressurization spray head corresponding first degumming room, the second degumming
Room, the distribution of third degumming room.
It preferably, include mounting plate inside the conveying mechanism, and be fixedly connected with motor on the outside of mounting plate, it is described
Motor output end passes through mounting plate and extends on the inside of mounting plate, and motor output end is fixedly connected with drive roll, the master
It is connected with conveyer belt on the outside of dynamic roller, driven voller is connected on the inside of the conveyer belt, is offered on the inside of the conveyer belt
Through-hole, and positioning tool is fixedly connected on the outside of conveyer belt.
It preferably, include installing frame inside the positioning tool, and installing frame front end is fixedly connected with driving motor, institute
It states driving motor output end to extend on the inside of installing frame across installing frame, and driving motor output end is fixedly connected with fixed frame,
The fixed frame is flexibly connected with installing frame, cylinder is fixedly connected on the outside of the fixed frame, and cylinder movable end is passed through and fixed
Outer frame side extends on the inside of fixed frame, positioning tool equidistantly distributed on the outside of conveyer belt, and installation inside positioning tool
Frame lower end offers limbers.
The beneficial effects of the present invention are:
1, silicon wafer production automation silicon wafer stripping machine, different degrees of to whole progress by using three groups of degumming rooms
Degumming, can the first degumming room, the corresponding collecting box in the second degumming room and third degumming room and circulating box add respectively warm water,
Cold water and lactic acid carry out triple degummings to silicon wafer, to make the whole complete degumming of progress, increase the effect of whole degumming,
To increase the effect of silicon wafer production, to increase volume overall utility；
2, silicon wafer production automation silicon wafer stripping machine, drives silicon wafer to be conveyed, and lead to by using conveying mechanism
Cross the high-pressure nozzle of circulation mechanism and high pressure degumming carried out to silicon wafer, thus make it is whole can and Xining automation degumming, entirely
Artificial loading and unloading are only needed in the process, reduce manpower consumption, while increasing the speed of silicon wafer stripping and production, and raw
Water in production is recycled by way of circulation, is reduced whole resource consumption, is increased overall utility；
3, silicon wafer production automation silicon wafer stripping machine, by increasing blower and electric heating in silicon wafer stripping machine rearmost end
Lamp group makes silicon wafer stripping machine have the effect of drying, increases whole functionality so that the silicon wafer to degumming is dried,
And ensure that whole process velocity, to increase whole practicability.
Detailed description of the invention
Fig. 1 is schematic diagram of the three-dimensional structure；
Fig. 2 is degumming box inner structure schematic diagram of the present invention；
Fig. 3 is that the present invention overlooks out structural schematic diagram；
Fig. 4 is collecting mechanism attachment structure schematic diagram of the present invention；
Fig. 5 is treatment box perspective view of conveying mechanism of the present invention；
Fig. 6 is that the present invention crosses water conservancy diversion frame schematic perspective view；
Fig. 7 is that the present invention crosses Rose Box schematic diagram of internal structure；
Fig. 8 is that the present invention crosses positioning tool schematic perspective view.
In figure: 1, degumming machine ontology；2, electric cabinet；3, degumming cabinet；4, demarcation plate；5, the first degumming room；6, second is de-
Glue room；7, third degumming room；8, drying room；9, degumming chamber door；10, collection tank；11, chamber door is collected；12, collecting mechanism；13,
Recycle cabinet；14, circulation mechanism；15, conveying mechanism；16, water conservancy diversion frame；17, blower；18, electric heating lamp group；19, loose slot；
1201, collecting box；1202, connecting tube；1203, circulating pump；1204, circulation pipe；1205, Rose Box；1401, water tank；1402,
Butt tube；1403, force (forcing) pump；1404, pressurize spray head；1601, filter glue plate；1602, leakage hole；1501, mounting plate；1502, electric
Motivation；1503, drive roll；1504, conveyer belt；1505, through-hole；1506, positioning tool；1507, driven voller；12051, filtering group
Part；12052, filter cloth；12053, active carbon particle；15061, installing frame；15062, driving motor；15063, fixed frame；
15064, cylinder；15065, limbers.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-8 is please referred to, the present invention provides a kind of technical solution: a kind of silicon wafer production automation silicon wafer stripping machine, packet
Degumming machine ontology 1 is included, includes electric cabinet 2 inside degumming machine ontology 1, and be fixedly connected with degumming cabinet 3 on the left of electric cabinet 2,
Demarcation plate 4 is fixedly connected with inside degumming cabinet 3, and demarcation plate 4 will successively be divided into first inside degumming cabinet 3 from right to left
Degumming room 5, the second degumming room 6 and third degumming room 7 and drying room 8,3 front end of degumming cabinet are hingedly connected with degumming chamber door 9, take off
3 lower end of glue cabinet is fixedly connected with collection tank 10, and 10 front end of collection tank is hingedly connected with and collects chamber door 11, collection tank
10 internal activities are connected with collecting mechanism 12, and 3 upper end of degumming cabinet is fixedly connected with circulation cabinet 13, and recycles inside cabinet 13
It is fixedly installed with circulation mechanism 14, conveying mechanism 15 is fixedly installed with inside degumming cabinet 3.
Further, degumming cabinet 3 is identical as collection tank 10 and the circulation internal structure of cabinet 13, and collection tank 10
Four groups are divided by demarcation plate 4 times with inside circulation cabinet 13, the collection tank 10 of four groups of equal parts and 13 inside of circulation cabinet are empty
Between respectively it is corresponding with the first degumming room 5, the second degumming room 6, third degumming room 7 and drying room 8 distribution, collection tank 10 and circulation
Cabinet 13 corresponds to the first degumming room 5, the second degumming room 6 and third degumming room 7 and drying room 8 is distributed, to carry out three to whole
Secondary degumming.
Further, demarcation plate 4 is in 3 inside equidistantly distributed of degumming cabinet, and demarcation plate 4 is horizontal about degumming cabinet 3
Center line is symmetrical, and loose slot 19, and loose slot 19 and 4 vertical centre line overlap of demarcation plate are offered among demarcation plate 4.Point
Partition 4 can prevent the mutual crossfire of different liquid, increase the effect integrally recycled, reduce resource consumption.
It further, include collecting box 1201 inside collecting mechanism 12, and 1201 rear end of collecting box is fixedly connected with company
Adapter tube 1202, connecting tube 1202 pass through and extend to 10 rear end of collection tank, and connecting tube 1202 and first on the inside of collection tank 10
Degumming room 5, the second degumming room 6, the corresponding distribution of third degumming room 7 and drying room 8, and the first degumming room 5, the second degumming room 6, the
1202 rear end of connecting tube of the corresponding distribution in three degumming rooms 7 is fixedly connected with circulating pump 1203, and 1203 upper end of circulating pump is fixedly connected
There is circulation pipe 1204, and 1204 inside of circulation pipe is connected with Rose Box 1205 surely excessively, can be carried out the waste liquid integrally generated
Circulation, so that it is rear recycled to be filtered the waste liquid integrally generated, increases the whole feature of environmental protection.
Further, it is fixedly connected with water conservancy diversion frame 16 inside collection tank 10, is fixedly connected with filter glue inside water conservancy diversion frame 16
Plate 1601, and leakage hole 1602 is offered inside filter glue plate 1601, water conservancy diversion frame 16 is corresponding with collecting box 1201 to be distributed with four groups, and
1602 equidistantly distributed of leakage hole in water conservancy diversion frame 16, filter glue plate 1601 can stop the waste material generated after degumming, from
And make entirety that there is good filter effect, increase overall utility.
Further, filter assemblies 12051 are fixedly connected with inside Rose Box 1205, and filter assemblies 12051 are two layers
Filter cloth 12052 clamps 12053 structure of active carbon particle, and 12053 preferred compressed active carbon of active carbon particle structure, two layers of filter
The filter assemblies 12051 that cloth 12052 clamps 12053 structure of active carbon particle can carry out good filtering to degumming liquid, increase
The whole filter effect of volume.
Further, blower 17, and blower 17 are fixedly connected with inside 13 interlayer of circulation cabinet of the corresponding distribution of drying room 8
Air outlet passes through circulation 13 lower end of cabinet and extends to inside degumming cabinet 3, and 13 lower end of circulation cabinet of the corresponding distribution of drying room 8 is solid
Surely it is connected with electric heating lamp group 18, and 18 outside of electric heating lamp group is not bonded with 17 air outlet of blower, 17 air inlet of blower passes through circulation
Circulation 13 upper end of cabinet is extended on the inside of cabinet 13, electric heating lamp group 18 and blower 17 can dry the silicon wafer after degumming,
Increase whole functionality.
It further, include water tank 1401 inside circulation mechanism 14, and 1401 rear end of water tank is fixedly connected with pair
Adapter tube 1402 extends to circulation 13 rear end of cabinet, and 1402 rear end of butt tube and circulation pipe 1204 on the inside of circulation cabinet 13
It is fixedly connected, force (forcing) pump 1403 is fixedly connected with inside water tank 1401,1403 water outlet of force (forcing) pump passes through under circulation cabinet 13
End extends to inside degumming cabinet 3, and 1403 water outlet of force (forcing) pump is fixedly connected with pressurization spray head 1404, and water tank 1401 adds
Press pump 1403 and the corresponding first degumming room 5 of pressurization spray head 1404, the second degumming room 6, third degumming room 7 are distributed, the first degumming room
5, the second degumming room 6, the degumming liquid in third degumming room 7 are sprayed by way of pressurization, to guarantee whole de-
Glue effect.
Further, inside conveying mechanism 15 include mounting plate 1501, and be fixedly connected with electricity on the outside of mounting plate 1501
Motivation 1502,1502 output end of motor passes through mounting plate 1501 and extends to 1501 inside of mounting plate, and motor 1502 exports
End is fixedly connected with drive roll 1503, and conveyer belt 1504,1504 inside activity of conveyer belt are connected on the outside of drive roll 1503
It is connected with driven voller 1507, through-hole 1505 is offered on the inside of conveyer belt 1504, and be fixedly connected with positioning on the outside of conveyer belt 1504
Tooling 1506, positioning tool 1506 can be fixed silicon wafer, so that silicon wafer be made to be overturn during transportation, guarantee whole
The degumming effect of body.
It further, include installing frame 15061 inside positioning tool 1506, and 15061 front end of installing frame is fixedly connected
There is driving motor 15062,15062 output end of driving motor passes through installing frame 15061 and extends to 15061 inside of installing frame, and drives
Dynamic 15062 output end of motor is fixedly connected with fixed frame 15063, and fixed frame 15063 is flexibly connected with installing frame 15061, fixed
Cylinder 15064 is fixedly connected on the outside of frame 15063, and 15064 movable end of cylinder passes through and extends to fixation on the outside of fixed frame 15063
The inside of frame 15063, positioning tool 1506 is in 1504 outside equidistantly distributed of conveyer belt, and 1506 inside installing frame of positioning tool
15061 lower ends offer limbers 15065, and driving motor 15062 drives silicon wafer to be overturn during transportation, guarantee silicon wafer
The degumming of front and back sides increases whole degumming effect.
Working principle: being first turned on degumming chamber door 9 for silicon wafer and be placed on fixed frame 15063 inside positioning tool 1506,
It is clamped the cylinder 15064 at 15063 both ends of fixed frame to silicon wafer, then motor 1502 drives drive roll 1503 to be revolved
Turn, drive roll 1503 is made to drive driven voller 1507 to be rotated by conveyer belt 1504, and conveyer belt 1504 is made to drive positioning work
1506 movements are filled, when being moved to the first 5 inside of degumming room, the degumming liquid inside water tank 1401 is passed through pressurization by force (forcing) pump 1403
Spray head 1404 is sprayed at silicon wafer upper end, is tentatively detached to the glue machine of silicon chip surface, during disengaging, driving motor 15062
It drives fixed frame 15063 to rotate, so that silicon wafer be driven to be rotated, realizes whole comprehensive degumming, increase whole take off
Glue effect, similarly, conveyer belt 1504 drive positioning tool 1506 to be moved to inside the second degumming room 6 and third degumming room 7, and second
It is comprehensive that the force (forcing) pump 1403 of degumming room 6 and third degumming room 7 drives different degumming liquid (hot water and lactic acid) to carry out silicon wafer
Degumming, the waste liquid after degumming are collected by entering in collecting box 1201 after 16 primary filtration of water conservancy diversion frame, and in circulating pump 1203
Enter inside Rose Box 1205 under driving and be filtered, so that entirety be made to be filtered, and enters inside water tank 1401 and recycle
It uses, last silicon wafer is moved to inside drying room 8, is dried under the action of blower 17 and electric heating lamp group 18, realizes whole
Degumming and drying.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (10)
1. a kind of silicon wafer production automation silicon wafer stripping machine, including degumming machine ontology (1), it is characterised in that: the degumming machine
It include electric cabinet (2) inside ontology (1), and be fixedly connected with degumming cabinet (3) on the left of electric cabinet (2), the degumming cabinet
(3) internal to be fixedly connected with demarcation plate (4), and demarcation plate (4) will successively be divided into first inside degumming cabinet (3) from right to left
Degumming room (5), the second degumming room (6) and third degumming room (7) and drying room (8), degumming cabinet (3) the front end articulated connection
Have degumming chamber door (9), degumming cabinet (3) lower end is fixedly connected with collection tank (10), and collection tank (10) front end is cut with scissors
It is connected in succession and collects chamber door (11), collection tank (10) internal activity is connected with collecting mechanism (12), the degumming cabinet
(3) upper end is fixedly connected with circulation cabinet (13), and recycles and be fixedly installed with circulation mechanism (14) inside cabinet (13), described de-
Conveying mechanism (15) are fixedly installed with inside glue cabinet (3).
2. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the degumming case
Body (3) is identical as collection tank (10) and the circulation internal structure of cabinet (13), and collection tank (10) and circulation cabinet (13)
Inside is divided into four groups by demarcation plate (4) is secondary, the collection tank (10) of four groups of equal parts and circulation cabinet (13) inner space
Respectively with the first degumming room (5), the second degumming room (6), third degumming room (7) and drying room (8) it is corresponding distribution.
3. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the demarcation plate
(4) in the internal equidistantly distributed of degumming cabinet (3), and demarcation plate (4) is symmetrical about degumming cabinet (3) horizontal center line,
It is offered loose slot (19) among the demarcation plate (4), and loose slot (19) and demarcation plate (4) vertical centre line overlap.
4. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the collection machine
It includes collecting box (1201) that structure (12) is internal, and collecting box (1201) rear end is fixedly connected with connecting tube (1202), the company
Adapter tube (1202) passes through and extends to collection tank (10) rear end on the inside of collection tank (10), and connecting tube (1202) and the first degumming
The corresponding distribution of room (5), the second degumming room (6), third degumming room (7) and drying room (8), and the first degumming room (5), the second degumming
Room (6), corresponding connecting tube (1202) rear end being distributed in third degumming room (7) are fixedly connected with circulating pump (1203), the circulation
Pump (1203) upper end is fixedly connected with circulation pipe (1204), and is connected with Rose Box (1205) surely excessively on the inside of circulation pipe (1204).
5. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the collecting box
It is fixedly connected with water conservancy diversion frame (16) inside body (10), is fixedly connected with filter glue plate (1601) inside the water conservancy diversion frame (16), and filter
It being offered leakage hole (1602) inside offset plate (1601), the water conservancy diversion frame (16) is corresponding with collecting box (1201) to be distributed with four groups,
And leakage hole (1602) equidistantly distributed in water conservancy diversion frame (16).
6. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the Rose Box
(1205) internal to be fixedly connected with filter assemblies (12051), and filter assemblies (12051) are that two layers of filter cloth (12052) clamps work
Property charcoal particle (12053) structure, and active carbon particle structure (12053) preferred compressed active carbon.
7. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the drying room
(8) it is fixedly connected with blower (17) inside circulation cabinet (13) interlayer of corresponding distribution, and blower (17) air outlet passes through circulation
Cabinet (13) lower end extends to degumming cabinet (3) inside, and circulation cabinet (13) lower end of the corresponding distribution of the drying room (8) is fixed
It is connected with electric heating lamp group (18), and is not bonded on the outside of electric heating lamp group (18) with blower (17) air outlet, blower (17) air inlet
Mouth, which passes through, extends to circulation cabinet (13) upper end on the inside of circulation cabinet (13).
8. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the circulator
It includes water tank (1401) that structure (14) is internal, and water tank (1401) rear end is fixedly connected with butt tube (1402), described to wear
It crosses on the inside of circulation cabinet (13) and extends to circulation cabinet (13) rear end, and butt tube (1402) rear end and circulation pipe (1204) are fixed
Connection, the water tank (1401) is internal to be fixedly connected with force (forcing) pump (1403), and force (forcing) pump (1403) water outlet is passed through and followed
It is internal that ring cabinet (13) lower end extends to degumming cabinet (3), and force (forcing) pump (1403) water outlet is fixedly connected with pressurization spray head
(1404), the water tank (1401), force (forcing) pump (1403) and the corresponding first degumming room (5) of pressurization spray head (1404), second take off
Glue room (6), third degumming room (7) distribution.
9. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 1, it is characterised in that: the conveyer
It include mounting plate (1501) inside structure (15), and be fixedly connected with motor (1502), the electricity on the outside of mounting plate (1501)
Motivation (1502) output end passes through mounting plate (1501) and extends on the inside of mounting plate (1501), and motor (1502) output end is solid
Surely it is connected with drive roll (1503), is connected with conveyer belt (1504), the conveyer belt on the outside of the drive roll (1503)
(1504) inside is connected with driven voller (1507), is offered through-hole (1505) on the inside of the conveyer belt (1504), and is conveyed
Positioning tool (1506) are fixedly connected on the outside of band (1504).
10. a kind of silicon wafer production automation silicon wafer stripping machine according to claim 9, it is characterised in that: the positioning
It includes installing frame (15061) that tooling (1506) is internal, and installing frame (15061) front end is fixedly connected with driving motor
(15062), driving motor (15062) output end passes through installing frame (15061) and extends on the inside of installing frame (15061), and
Driving motor (15062) output end is fixedly connected with fixed frame (15063), the fixed frame (15063) and installing frame (15061)
It is flexibly connected, is fixedly connected with cylinder (15064) on the outside of the fixed frame (15063), and cylinder (15064) movable end passes through admittedly
Determine to extend on the outside of frame (15063) on the inside of fixed frame (15063), the positioning tool (1506) is on the outside of conveyer belt (1504) etc.
Spacing distribution, and internal installing frame (15061) lower end of positioning tool (1506) offers limbers (15065).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910744112.0A CN110491807B (en) | 2019-08-13 | 2019-08-13 | Automatic silicon wafer degumming machine for silicon wafer production |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910744112.0A CN110491807B (en) | 2019-08-13 | 2019-08-13 | Automatic silicon wafer degumming machine for silicon wafer production |
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| CN110491807A true CN110491807A (en) | 2019-11-22 |
| CN110491807B CN110491807B (en) | 2022-04-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114042682A (en) * | 2021-12-16 | 2022-02-15 | 上海朴席信息科技有限公司 | Full-automatic clear gluey equipment of high temperature high pressure |
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| CN203521383U (en) * | 2013-11-07 | 2014-04-02 | 英利能源（中国）有限公司 | Degumming tool |
| CN205723592U (en) * | 2016-05-30 | 2016-11-23 | 嘉兴职业技术学院 | A kind of cyclic utilization system of battery component degumming water |
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| CN114042682A (en) * | 2021-12-16 | 2022-02-15 | 上海朴席信息科技有限公司 | Full-automatic clear gluey equipment of high temperature high pressure |
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| CN110491807B (en) | 2022-04-08 |
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