CN110487897A - A kind of compound non-contact detection system of Laser Photoacoustic of element and defect - Google Patents
A kind of compound non-contact detection system of Laser Photoacoustic of element and defect Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/048—Marking the faulty objects
Abstract
The invention belongs to laser material detection fields, disclose the compound non-contact detection system of Laser Photoacoustic of a kind of element and defect, including pulse laser, spectrographic detection unit, ultrasonic listening unit, sample stage unit and analysis controlling unit, wherein, visible light of the spectrographic detection unit for plasma transmitting is detected, to obtain the information about element in sample to be analysed；Ultrasonic listening unit is used to carry out contact-free detection to ultrasonic wave, and the principle based on interferometer detection or the detection of high q-factor resonator can obtain ultrasonic signal under the premise of not contacting sample, obtain the information about defect in sample to be analysed.The present invention is improved by structure to various components in device and its set-up mode etc., non-contact detection is carried out to the ultrasonic wave generated with laser excitation using non-contact ultrasonic probe unit, it can be achieved that element and defect to sample carry out non-contact detecting simultaneously and analyze.
Description
Technical field
The invention belongs to laser material detection fields, compound more particularly, to the Laser Photoacoustic of a kind of element and defect
Non-contact detection system realizes the compound non-contact detecting of the elemental composition and defect distribution using laser excitation, system tool
Body is mainly to pass through laser the light that generates, acoustical signal after material excitation are detected and analyzed, realize to the element of target with
Defect while non-contact detecting.
Background technique
In industrial application, fault in material is not only that security risk has been buried in product use, and greatly reduces material
Stability and mechanical performance.In terms of fault of construction non-destructive testing, at present using the most mature and extensive in industrial circle
Detection technique be ultrasound examination (UT).Ultrasound examination be using ultrasonic wave be detected material in propagate when, material
The variation of acoustic characteristic and interior tissue generates certain influence to the propagation of ultrasonic wave, by ultrasonic wave degree of susceptibility and
The technology of detection the Knowing material performance and structure change of situation.Laser ultrasonic detection technique is the one of ultrasonic detection technology
Kind, there is good detection performance lossless, safe, with high accuracy.
In laser ultrasonic detection technology, traditional ultrasound detection is all made of contact energy-changing method, i.e., in ultrasonic probe
Most of energy of ultrasonic wave is set to be passed to examined workpiece with acoustic coupling mediums such as grease or water between tested material or component.
However in the industries such as chemical industry, medicine, light industry and food, there are many pressure vessels all to have insulating layer, and this partial pressure holds
Device is all to run for a long time.Dismounting insulating layer must just be shut down by carrying out periodic inspection to these pressure vessels, tested container of polishing
Surface, these preparations will waste a large amount of manpower and material resources, and the insulating layer after many times removing is difficult to restore.Separately
Outside, on high temperature or the assembly line of high-speed production, general ultrasonic probe can not steadily be coupled on examined workpiece, therefore non-
Contact photoacoustic technique is particularly important.
Chinese patent " gas pipeline endosexine defect Air Coupling ultrasound non-contact detection system " (CN108896663, it is public
November 27 2018 cloth day) a kind of gas pipeline endosexine defect Air Coupling ultrasound non-contact detection system is described, it uses
Noncontact ultrasonic NDT pipeline endosexine defect.In the prior art, empty coupling incentive probe excitation ultrasound longitudinal wave, longitudinal wave is incident on
Surface wave is generated after pipeline wall surface, surface wave propagation range is lacked in pipeline surface layer, incentive probe to only detect pipeline surface layer
It falls into.As it can be seen that the prior art can not detection structure internal flaw, and detecting defects precision it is not high (it is used pop one's head in inspire it is super
Frequency of sound wave is not high, is KHz-MHz mostly).
In terms of elemental analysis, traditional detection means includes chemical analysis, XRF, ICP-OES etc..However, these sides
There is the disadvantages of destroying sample, time-consuming in method, be unable to satisfy the quick, in situ, micro- of Modern Elements detection and damage even lossless etc. need
It asks, so a kind of new spectrum detection technique --- laser induced breakdown spectroscopy (Laser Induced Breakdown
Spectroscopy, abbreviation LIBS) technology comes into being.
LIBS technology is a kind of novel atomic spectroscopic analysis technology, it is by the way that laser is focused on material surface ablation
Plasma is generated, elemental analysis is carried out to substance by acquisition plasma spectrometry, obtains its element species and content.By
In LIBS technology have the characteristics that multielement synchronize analysis in real time, it is simple or without sample pretreatment, quickly with non-destructive testing,
Therefore it is with a wide range of applications in fields such as metal metallurgy smelting, environmental protection, national defense industry, food safeties.
In conclusion although LIBS technology and laser ultrasonic detection technology all have superior performance, at present to material
Element and defect be all to be analyzed respectively using monotechnics means, analysis time is long, and testing cost is high.And current
Ultrasonic detection technology is mostly contact measurement, and daubing coupling agent avoids the signal of ultrasonic wave between probe and sample to be tested
Decaying, but since coupling coating amount is unable to control and is difficult to operate on irregular sample, this greatly reduces detection
Stability and limit the application range of ultrasound examination.
Inventor has obtained the Laser Photoacoustic composite detection method of a kind of element and defect in preceding research and its has been
It unites (reference can be made to Chinese patent literature CN107607520A), although it, which is also disclosed, is incident on analysis sample using pulse laser
Upper generation plasma and ultrasonic wave can analyze sample elemental constituent and fault of construction, but ultrasound detection used in it simultaneously
Component is immersion type ultrasonic probe, and the detection of this contact, such as above analyze, application is not convenient, limits ultrasound
The application range of wave detection.
So far, there is not yet the compound non-contact detection method of the Laser Photoacoustic of element and defect.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the purpose of the present invention is to provide a kind of element and defects
The compound non-contact detection system of Laser Photoacoustic is improved by structure to various components in device and its set-up mode etc.,
Using Sing plus laser as excitation light source come ablation sample, excitation generates plasma, on the one hand, uses spectrometer
The emission spectrum of plasma is acquired；On the other hand, synchronous to be visited using based on interferometer detection or high q-factor resonator
The non-contact ultrasonic probe unit for surveying principle carries out non-contact detection, it can be achieved that right to the ultrasonic wave generated with laser excitation
The element and defect of sample carry out non-contact detecting and analysis simultaneously.The present invention is incident on analysis sample using pulse laser
Plasma and ultrasonic wave are generated, sample elemental constituent and fault of construction can be analyzed simultaneously, and utilize and detected based on interferometer,
High q-factor resonator testing principle realizes the non-contact detection of ultrasound, avoids the use of acoustic coupling medium, can widen the inspection significantly
The scope of application of examining system.
To achieve the above object, it is proposed, according to the invention, provide the compound non-contact inspection of Laser Photoacoustic of a kind of element and defect
Examining system, including pulse laser (3), spectrographic detection unit, ultrasonic listening unit, sample stage unit and analysis and Control list
Member, wherein
Analysis controlling unit includes digital time delayer (11) and computer (7), digital time delayer (11) and computer (7) phase
Even to be controlled by computer,
Sample stage unit includes displacement platform, which is able to drive to be analyzed for placing sample to be analysed (9)
Sample (9) is mobile, to realize the adjusting to sample to be analysed (9) spatial position, and the displacement platform and digital time delayer
(11) it is electrically connected,
Pulse laser (3) is for launching pulse laser, and the pulse laser is for being incident in sample to be analysed with same
When generate plasma and ultrasonic wave,
Visible light of the spectrographic detection unit for plasma flame emission is detected, to obtain about wait divide
The information of element in sample is analysed,
It is characterized in that, ultrasonic listening unit be used for ultrasonic wave carry out contact-free detection, based on interferometer detection or
Q value meets 105~107High q-factor resonator detection principle, ultrasonic signal can be obtained under the premise of not contacting sample, is obtained
The information of defect in about sample to be analysed.
As present invention further optimization, ultrasonic listening unit is specifically based on interferometer detection principle detection ultrasound
Wave, the ultrasonic listening unit include optical splitter (14), He-Ne laser (15), laser interferometer (16) and digital oscilloscope
(12), laser interferometer (16) and digital oscilloscope (12) electrical connection, digital oscilloscope (12) connect computer (7) sum number simultaneously
Word delayer (11)；
Alternatively, ultrasonic listening unit is specifically based on high q-factor resonator detection principle detection ultrasonic wave, the ultrasonic listening
Unit includes optical fiber laser (17), high q-factor resonator (18), photodetector (19) and digital oscilloscope (12), and photoelectricity is visited
Device (19) and digital oscilloscope (12) electrical connection are surveyed, digital oscilloscope (12) connects computer (7) and digital time delayer simultaneously
(11)。
As present invention further optimization, spectrographic detection unit includes semi-transparent semi-reflecting lens (8), total reflection mirror (4), focuses
Object lens (10), spectrometer detection head (2), spectrometer (1) and enhancing charge-coupled device (6), wherein
Light-emitting window, the semi-transparent semi-reflecting lens (8) of pulse laser (3) are sequentially located in same level optical path, semi-transparent semi-reflecting lens
(8) transmission plane and horizontal optical path angle at 45 °,
Total reflection mirror (4) activity installation, it is parallel with semi-transparent semi-reflecting lens (8) when it is located at optical path, total reflection mirror (4) and gather
Focus objective lens (10) are sequentially located on the reflected light path of semi-transparent semi-reflecting lens (8), semi-transparent semi-reflecting lens (8), total reflection mirror (4), conglomeration
The mutual distance of mirror (10) is adjustable,
Spectrometer collection probe (2) is located at the top of semi-transparent semi-reflecting lens (8), is connect with spectrometer (1) by optical fiber, increases
Strong charge-coupled device (6) is mounted on spectrometer (1), and spectrometer (1) with computer (7) by being electrically connected.
As present invention further optimization, the pulse laser (3) and the spectrometer (1) are simultaneously and digital delay
Device (11) electrical connection.
As present invention further optimization, for optical splitter (14), He-Ne laser (15) and laser interferometer (16),
He-Ne laser (15) is used for emission detection laser, is divided into the identical light of two beam frequencies, light beam conduct by optical splitter (14)
Reference light, light beam are got on sample to be analysed (9) as detection light, and detection light is influenced by ultrasonic microvibration, phase hair
It interferes in laser interferometer (16) after changing with reference light, and then is converted optical signals to by electrooptic modulator
Electric signal shows ultrasonic signal on digital oscilloscope (12)；
For optical fiber laser (17), high q-factor resonator (18) and photodetector (19), high q-factor resonator (18) energy
It is enough, due to photoelastic effect, the refractive index in the high q-factor resonator (18) to be made to change when by ultrasonic wave stress,
Lead to resonator spectrum offset；Then incident laser is coupled in the high q-factor resonator optical fiber laser (17), due to resonator frequency
Spectral migration and lead to wavelength shift, finally can pass through photodetector (19) obtain ultrasonic signal information.
As present invention further optimization, displacement platform is specially 3D displacement platform, is able to drive sample to be analysed (9)
It can move along X to, Y-direction and Z-direction, sample to be analysed is adjusted in the position of three-dimensional to realize.
As present invention further optimization, digital delay generator (11) is being set for controlling pulse laser (3)
Time goes out light, spectrometer (1) and executes collecting work, 3D displacement platform (5) in setting time movement in setting time, is also used to control
Ultrasonic listening unit processed executes detection operations and computer (7) in the time service of setting in setting time.
As present invention further optimization, the pulse laser (3) is specially nanosecoud pulse laser or picosecond arteries and veins
Rush laser.
As present invention further optimization, when the principle that the ultrasonic listening unit is detected based on high q-factor resonator
When, resonant cavity detection structure is encapsulated by heavy water covering.
Contemplated above technical scheme through the invention excites sample to be tested as excitaton source using laser, with same
When generate ultrasonic wave and plasma, by acquiring sound and optic signal, to obtain the element and defect information of material simultaneously, by
The compound non-contact detection device of Laser Photoacoustic of this building element and defect.Compared with prior art, due to using Sing plus
Laser carrys out ablation sample as excitation light source, and excitation generates plasma, on the one hand, using spectrometer plasma
Emission spectrum is acquired；On the other hand particular, it is important that synchronous visited using based on interferometer detection or high q-factor resonator
The non-contact ultrasonic probe unit for surveying principle carries out non-contact detection to the ultrasonic wave generated with laser excitation.Present invention inspection
Surveying device can be realized the compound non-contact detecting of Laser Photoacoustic and analysis of element and defect, while avoiding ultrasonic coupling agent and make
With substantially increasing the application range of photo-acoustic detection.
Laser excitation goes out longitudinal wave sound wave in the present invention, excites in sample surface, in exemplar bottom reception.Sound wave is in exemplar
Internal communication, by the internal flaw for being able to detect exemplar.Interferometer detection or resonator detection principle are based in the present invention,
Ultrasonic signal is obtained under the premise of not contacting sample, is operated under normal air environment, this non-contact detecting avoids
The application limitation of contact measurement has been broken in the use of couplant.The ultrasonic frequency gone out in the present invention using laser excitation
Range is wider, reaches MHz-GHz, when changing laser pulse width, such as when using picosecond laser, frequency of sound wave can reach GHz with
On.Since frequency is higher, the defect precision of detection is higher, the present invention can be realized high-precision detection.
Resonant cavity non-contact detecting ultrasonic signal, according to photoelastic effect, the broadband ultrasonic signal that laser-ultrasound motivates is shaken
Dynamic, wideband acoustical signal carries detection information.Refractive index can change in resonant cavity when by broadband ultrasonic wave stress influence, from
And lead to spectrum offset in resonant cavity.Therewith, photodetector converts optical signals into electric signal, and analysis electric signal can be detected
Analysis.The Air Coupling probe detection acoustical signal of single frequency band can only receive the acoustical signal information of the single frequency band, and resonant cavity
Detection technique can completely retain all frequency sound waves information of broadband ultrasonic signal, and detection information is comprehensive.In specific research
It was found that the narrowband concussion of laser-ultrasound can reduce the accuracy of resonant cavity detection, present invention preferably employs heavy water (D2O) covering seals
Dress ring resonator can achieve the effect that inhibit concussion, avoid with light water (H2The light of 1550nm wave band is produced when O) encapsulating
It is raw to absorb.The Q value of the present invention, the ring resonator encapsulated with heavy water covering reach 3*105, laser energy 2.1mJ, detection obtains
Sound pressure signal be 2pa.Rule of thumb formula, laser pulse width is shorter, and the ultrasonic frequency that laser-ultrasound inspires is higher, at this
If change laser pulsewidth in invention, such as laser is changed to picosecond laser detection from nanosecond laser, due to nanosecond laser
Corresponding ultrasound centre frequency is MHz, and the corresponding ultrasonic centre frequency of picosecond laser is GHz, pops one's head in and examines according to conventional ultrasound
When survey, needing to pop one's head in is changed to the probe of corresponding higher frequency, but in the present invention, due to using based on high q-factor resonator
The ultrasonic listening unit of the principle of detection still can carry out non-contact detecting using the resonant cavity technology, obtain GHz's or more
Acoustic signals, high-frequency ultrasonic signal realize the detection effect of higher precision.
Interferometer non-contact detecting ultrasonic signal, the broadband ultrasonic signal that laser-ultrasound motivates generate exemplar small
Disturbance, so that the phase of detection light changes.Detection light and the reference light being affected interfere, and the optical signal after interference is taken
With detection information, and completely remain the information of all frequency sound waves of broadband ultrasonic signal.It will by electrooptic modulator
Optical signal is converted to electric signal, and analysis electric signal can be tested and analyzed.Rule of thumb formula, laser pulse width is shorter, laser
The ultrasonic frequency that ultrasonic excitation goes out is higher, if changing laser pulsewidth in the present invention, such as equally by laser from nanosecond
Laser is changed to picosecond laser detection, and when detecting according to conventional ultrasound probe, also needing to pop one's head in is changed to corresponding higher frequency
The probe of rate, but in the present invention, due to the ultrasonic listening unit using the principle detected based on interferometer, can still use
The interferometer technique carries out non-contact detecting, obtains the acoustic signals of GHz or more, and high-frequency ultrasonic signal realizes the inspection of higher precision
Survey effect.
Detailed description of the invention
Fig. 1 is the compound non-contact inspection of the Laser Photoacoustic of the element based on interferometer ultrasonic testing system and defect in the present invention
Examining system structural schematic diagram.
Fig. 2 is the compound non-contact inspection of the Laser Photoacoustic of the element based on resonator ultrasonic testing system and defect in the present invention
Examining system structural schematic diagram.
Fig. 3 is that the present invention detects the sound wave curve of metal Cr by resonant cavity non-contact detecting, and further obtains
Spectrogram；(a) corresponding sound wave curve in Fig. 3, (b) corresponding spectrum curve.
The meaning of each appended drawing reference is as follows in figure: 1 is spectrometer；2 pop one's head in for spectrometer collection；3 be pulse laser；4
For total reflection mirror；5 be 3D displacement platform；6 be enhancing charge-coupled device (ICCD)；7 be computer；8 be semi-transparent semi-reflecting lens；9
For sample to be analysed；10 be focusing objective len；11 be digital delay generator；12 be oscillograph；14 be optical splitter；15 swash for He-Ne
Light device；16 be laser interferometer；17 be optical fiber laser；18 be resonator；19 be photodetector.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The present invention proposes the compound non-contact detection method of Laser Photoacoustic and its system of a kind of element and defect, with realization pair
It is detected while Elemental redistribution and fault of construction.
Fig. 1 is that one of present invention implementation interferometer detects the system knot that fault in material detects material element information simultaneously
Structure schematic diagram.Fig. 2 is that a kind of resonator that the present invention is implemented detects the system for detecting material element information while fault in material
Structural schematic diagram.In Fig. 1-Fig. 2, light-emitting window, the semi-transparent semi-reflecting lens 8 of pulse laser 3 are sequentially located in same level optical path,
The transmission plane of semi-transparent semi-reflecting lens 8 and the angle of substrate are 45 degree, while also with horizontal optical path at 45 degree of angles.4 activity of total reflection mirror
Installation, it is parallel with semi-transparent semi-reflecting lens 8 when it is located at optical path.Total reflection mirror 4 and focusing objective len 10 are sequentially located at semi-transparent semi-reflecting lens 8
Reflected light path on.The mutual distance of semi-transparent semi-reflecting lens 8, total reflection mirror 4, focusing objective len 10 can by connection wire rod with
Guide rail realizes horizontal and vertical adjust.
Spectrometer collection probe 2 is located at the top of semi-transparent semi-reflecting lens 8, is connect by optical fiber with spectrometer 1.Enhance charge coupling
Clutch part ICCD6 is mounted on spectrometer 1, and spectrometer 1 is connect by optical cable with computer 7.3D displacement platform 5 passes through level side
To motor driven screw rod and guide rail to may be implemented horizontal X, the precision of Y-direction mobile, pass through the motor driven silk of vertical direction
The precision that vertical Z-direction may be implemented in bar and guide rail is mobile, and horizontal motor acts on simultaneously with vertical motor, and it is three-dimensional to constitute x-y-z
Kinematic system.Sample to be analysed 9 is placed on 3D displacement platform 5.3D displacement platform 5 is connected to computer 7 by controlling cable
On, to be controlled its position by computer precision.
Laser interferometer 16 is connected with optical splitter 14, and optical splitter 14 separates two-beam: detection light and reference light.Detect light by
Optical fiber is transferred to 9 surface of sample to be tested, is influenced to send out in laser interferometer 16 after changing phase with reference light by ultrasonic activation
Raw interference.Laser interferometer 16 is connected on digital number oscillograph 12 by cable.
Resonator 18 is placed at the about 4mm of sample to be tested 9, and the two sides of sample are located at pulse laser 3.
Resonator 18 is connect by cable with photodetector 19, and photodetector 19 is connected to digital number oscillograph 12 by cable
On.In experiment, the sound wave curve of metal Cr is detected by resonant cavity non-contact detecting, obtains its spectrogram, sound wave curve and
Spectrum curve is as shown in Figure 3.
Digital delay generator 11 is mainly used for controlling pulse laser 3 light, the acquisition of spectrometer 1, the fortune of 3D displacement platform 5 out
Delay time between the dynamic, detection of laser interferometer 16, the detection of photodetector 19 and computer 7.Digital delay generator
11 with pulse laser 3, spectrometer 1,3D displacement platform 5, oscillograph 12 and computer 7 among all have cable connection.
The main function of pulse laser 3 is that excitation high energy laser and sample to be tested 9 interact, and excites plasma
And ultrasonic signal, it is respectively used to detection elements and defect.
The main function of the ICCD 6 are as follows: and spectrometer 1 is together, constitutes the beam splitting system and detector of sample, is used for
Collect testee surface plasma generate spectral line of emission signal, and by spectrometer 1 decomposition plasma light obtain it is each
The spectrum line imaging of kind element, to carry out qualitative and quantitative analysis to sample element.
The effect of 3D displacement platform 5 is the control signal by receiving controlling cable transmitting, the electricity of controlled level X, Y-direction
The motor Collaboration of machine and vertical Z-direction.Specifically, the motor for adjusting horizontal X direction rotates forward reversion, control platform or so
It is mobile.Focusing objective len 10 is cooperated to adjust defocusing amount；The motor for adjusting vertical Z-direction is rotated forward, is inverted, control platform lifting；It adjusts
The motor of horizontal Y-direction is rotated forward, is inverted, control platform anterior-posterior translation；Platform Z-direction and Y-direction associated movement may be implemented to
Analyze the Surface scan acquisition of sample 9.
The effect of laser interferometer 16 is the ultrasonic signal for detecting sample to be tested 9, converts the phase information of light beam to by force
Information is spent, phase code information is then extracted using phase demodulating method (such as Fourier transformation, wavelet analysis).Acoustical signal is turned
It is changed to electric signal, is connect by probe connecting line with digital oscilloscope 12, and show acoustical signal waveform on oscillograph.Number is shown
Wave device 12 is connected with computer 7 by cable, is analyzed on computers ultrasonic signal, and lacking for sample to be tested 9 is obtained
Fall into information.
The effect of resonator 18 is to be influenced by ultrasonic activation and make its spectrum offset, so as to cause laser wavelength of incidence
It shifts, passes through the variation of measurement output laser intensity variation characterization ultrasonic wave.Photodetector 19 converts optical signals to
Electric signal, and connect by cable with digital oscilloscope 12, and acoustical signal waveform is shown on oscillograph.Digital oscilloscope 12 with
Computer 7 is connected by cable, is analyzed on computers ultrasonic signal, is obtained the defect information of sample to be tested 9.
Computer 12 can perhaps laptop passes through USB interface, cable or cable and number using desktop computer
Word delay time generator 11, spectrometer 1,3D displacement platform 5, oscillograph 12 are attached.The software of computer have automatically scanning,
Find the functions such as atom spectrum peak value, qualitative recognition, Quantitative yield calculating and sound wave information processing transformation model.
The method for detecting material element information simultaneously using system shown in Figure 1 Poul Dorset Sheep defect information is as follows: laser
Sample surfaces are incident on, while inspiring plasma and ultrasonic wave.The member of sample is obtained by spectrometer collection spectral signal
Prime information, He-Ne laser emission detection laser in ultrasonic detection unit, is divided into the identical light of two beam frequencies by optical splitter,
Light beam is got on sample as reference light, light beam as detection light, and detection light is influenced by ultrasonic microvibration, phase hair
It is interfered in laser interferometer after changing with reference light, telecommunications can be converted optical signals to by photodetector
Number, ultrasonic signal is shown on digital oscilloscope.In practical applications, line, Surface scan analysis are carried out to sample by laser,
Can be under the premise of micro- damage even lossless sample, while obtaining the element and defect distribution of testee.
The method for detecting material element information simultaneously using system shown in Figure 2 Poul Dorset Sheep defect information is as follows: laser
Sample surfaces are incident on, while inspiring plasma and ultrasonic wave.The member of sample is obtained by spectrometer collection spectral signal
Prime information, refraction when resonator passes through ultrasonic wave stress in ultrasonic listening unit, due to photoelastic effect, in resonator
Rate changes, and leads to resonator spectrum offset.Optical fiber laser incident laser is coupled in resonator, due to resonator frequency spectrum
It deviates and leads to wavelength shift, the information of ultrasonic signal can be obtained by photodetector.It can be incited somebody to action by photodetector
Optical signal is converted to electric signal, and ultrasonic signal is shown on digital oscilloscope.In practical applications, by laser to sample into
Line, Surface scan analysis, can be under the premise of micro- damage even lossless sample, while obtaining the element and defect point of testee
Cloth.
Digital delay generator is mainly used for timing control, so that the pulse laser being controlled by it that is electrically connected therewith,
Spectrometer, 3D displacement platform, ultrasonic probe and computer capacity execute work in the time of setting, optimize collecting efficiency, phase
Front and back does not conflict between mutually.
The three-dimensional that analyzed sample may be implemented using 3D displacement platform is mobile, is prolonged by the number in analysis controlling unit
When device and computer and preparatory programming design, can complete automatic collection movement.It is of course also possible to use other are displaced
Platform replaces the 3D displacement platform, as long as the displacement platform is able to drive sample and realizes sample space bit in target direction or plane
The adjusting set.For example, can use the cooperation of sample stage unit, line, Surface scan analysis are carried out to sample by laser, it can
For carrying out contact-free detection to ultrasonic wave, under the premise of micro- damage even lossless sample, while the element of testee is obtained
And defect distribution.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (9)
1. a kind of compound non-contact detection system of the Laser Photoacoustic of element and defect, including pulse laser (3), spectrographic detection list
Member, ultrasonic listening unit, sample stage unit and analysis controlling unit, wherein
Analysis controlling unit includes digital time delayer (11) and computer (7), digital time delayer (11) be connected with computer (7) with
It is controlled by computer,
Sample stage unit includes displacement platform, which is able to drive sample to be analysed for placing sample to be analysed (9)
(9) mobile, to realize the adjusting to sample to be analysed (9) spatial position, and the displacement platform and digital time delayer (11)
It is electrically connected,
Pulse laser (3) is for launching pulse laser, and the pulse laser is for being incident in sample to be analysed with while producing
Raw plasma and ultrasonic wave,
Visible light of the spectrographic detection unit for plasma flame emission is detected, to obtain about sample to be analyzed
The information of element in product,
It is characterized in that, ultrasonic listening unit is used to carry out contact-free detection to ultrasonic wave, based on interferometer detection or Q value
Meet 105~107High q-factor resonator detection principle, ultrasonic signal can be obtained under the premise of not contacting sample, is obtained
Information about defect in sample to be analysed.
2. the compound non-contact detection system of the Laser Photoacoustic of element as described in claim 1 and defect, which is characterized in that ultrasonic wave
Probe unit is specifically based on interferometer detection principle detection ultrasonic wave, which includes optical splitter (14), He-Ne
Laser (15), laser interferometer (16) and digital oscilloscope (12), laser interferometer (16) and digital oscilloscope (12) are electrically connected
It connects, digital oscilloscope (12) connects computer (7) and digital time delayer (11) simultaneously；
Alternatively, ultrasonic listening unit is specifically based on high q-factor resonator detection principle detection ultrasonic wave, the ultrasonic listening unit
Including optical fiber laser (17), high q-factor resonator (18), photodetector (19) and digital oscilloscope (12), photodetector
(19) and digital oscilloscope (12) electrical connection, digital oscilloscope (12) connect computer (7) and digital time delayer (11) simultaneously.
3. the compound non-contact detection system of the Laser Photoacoustic of element as described in claim 1 and defect, which is characterized in that spectrum is visited
Survey unit include semi-transparent semi-reflecting lens (8), total reflection mirror (4), focusing objective len (10), spectrometer detection head (2), spectrometer (1) with
And enhancing charge-coupled device (6), wherein
Light-emitting window, the semi-transparent semi-reflecting lens (8) of pulse laser (3) are sequentially located in same level optical path, semi-transparent semi-reflecting lens (8)
Transmission plane and horizontal optical path angle at 45 °,
Total reflection mirror (4) activity installation, total reflection mirror (4) and conglomeration parallel with semi-transparent semi-reflecting lens (8) when it is located at optical path
Mirror (10) is sequentially located on the reflected light path of semi-transparent semi-reflecting lens (8), semi-transparent semi-reflecting lens (8), total reflection mirror (4), focusing objective len
(10) mutual distance is adjustable,
Spectrometer collection probe (2) is located at the top of semi-transparent semi-reflecting lens (8), is connect with spectrometer (1) by optical fiber, enhancing electricity
Lotus coupled apparatus (6) is mounted on spectrometer (1), and spectrometer (1) with computer (7) by being electrically connected.
4. the compound non-contact detection system of the Laser Photoacoustic of element as described in claim 1 and defect, which is characterized in that the arteries and veins
It rushes laser (3) and the spectrometer (1) while being electrically connected with digital time delayer (11).
5. the compound non-contact detection system of the Laser Photoacoustic of element as claimed in claim 2 and defect, which is characterized in that for dividing
Light device (14), He-Ne laser (15) and laser interferometer (16), He-Ne laser (15) are used for emission detection laser, by dividing
Light device (14) is divided into the identical light of two beam frequencies, and light beam gets to sample to be analysed as detection light as reference light, light beam
(9) on, detection light is influenced by ultrasonic microvibration, is sent out in laser interferometer (16) after phase changes with reference light
Raw interference, and then electric signal is converted optical signals to by electrooptic modulator, show that ultrasonic wave is believed on digital oscilloscope (12)
Number；
For optical fiber laser (17), high q-factor resonator (18) and photodetector (19), high q-factor resonator (18) can be
When by ultrasonic wave stress, due to photoelastic effect, so that the refractive index in the high q-factor resonator (18) is changed, cause
Resonator spectrum offset；Then incident laser is coupled in the high q-factor resonator optical fiber laser (17), since resonator frequency spectrum is inclined
It moves and leads to wavelength shift, the information of ultrasonic signal can be finally obtained by photodetector (19).
6. the compound non-contact detection system of the Laser Photoacoustic of element as described in claim 1 and defect, which is characterized in that displacement is flat
Platform is specially 3D displacement platform, and being able to drive sample to be analysed (9) can move along X to, Y-direction and Z-direction, is treated point to realize
Sample is analysed to adjust in the position of three-dimensional.
7. the compound non-contact detection system of the Laser Photoacoustic of element as claimed in claim 6 and defect, which is characterized in that number is prolonged
When generator (11) for control pulse laser (3) setting time go out light, spectrometer (1) setting time execute acquisition work
Work, 3D displacement platform (5) are mobile in setting time, are also used to control ultrasonic listening unit in setting time and execute detection operations
And computer (7) is in the time service of setting.
8. the compound non-contact detection system of the Laser Photoacoustic of element and defect as described in claim 1-7 any one, feature
It is, the pulse laser (3) is specially nanosecoud pulse laser or picosecond pulse laser.
9. the compound non-contact detection system of the Laser Photoacoustic of element and defect as described in claim 1-8 any one, feature
It is, when the principle that the ultrasonic listening unit is detected based on high q-factor resonator, resonant cavity detection structure is by heavy water covering
Encapsulation.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112067696A (en) * | 2020-09-30 | 2020-12-11 | 北京石油化工学院 | System for detecting surface defects of pipeline based on laser ultrasonic |
| CN112098520A (en) * | 2020-10-20 | 2020-12-18 | 北京石油化工学院 | Detection system and method for detecting internal defect shape of material based on laser ultrasonic |
| CN112255191A (en) * | 2020-09-25 | 2021-01-22 | 广东工业大学 | Laser-induced breakdown spectroscopy and acoustic reflection combined online monitoring system and method |
| CN112304923A (en) * | 2020-10-22 | 2021-02-02 | 岭澳核电有限公司 | Concrete pipeline inner wall detecting system |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100241028B1 (en) * | 1995-12-30 | 2000-03-02 | 이구택 | Method and apparatus for detecting internal defect using laser |
| CN107607520A (en) * | 2017-08-17 | 2018-01-19 | 华中科技大学 | The Laser Photoacoustic composite detection method and its system of a kind of element and defect |
| CN210665618U (en) * | 2019-08-28 | 2020-06-02 | 华中科技大学 | Laser optoacoustic composite non-contact detection system for elements and defects |
-
2019
- 2019-08-28 CN CN201910801864.6A patent/CN110487897A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100241028B1 (en) * | 1995-12-30 | 2000-03-02 | 이구택 | Method and apparatus for detecting internal defect using laser |
| CN107607520A (en) * | 2017-08-17 | 2018-01-19 | 华中科技大学 | The Laser Photoacoustic composite detection method and its system of a kind of element and defect |
| CN210665618U (en) * | 2019-08-28 | 2020-06-02 | 华中科技大学 | Laser optoacoustic composite non-contact detection system for elements and defects |
Non-Patent Citations (2)
| Title |
|---|
| KYU HYUN KIM 等: "Air-coupled ultrasound detection using capillary-based optical ring resonators", 《SCIENTIFIC REPORTS》, 1 March 2017 (2017-03-01), pages 1 - 11 * |
| 周王婷 等: "基于光学相干检测的非接触全光学光声显微镜", 《激光生物学报》, vol. 25, no. 6, 31 December 2016 (2016-12-31), pages 509 - 514 * |
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| CN112067696A (en) * | 2020-09-30 | 2020-12-11 | 北京石油化工学院 | System for detecting surface defects of pipeline based on laser ultrasonic |
| CN112098520A (en) * | 2020-10-20 | 2020-12-18 | 北京石油化工学院 | Detection system and method for detecting internal defect shape of material based on laser ultrasonic |
| CN112304923A (en) * | 2020-10-22 | 2021-02-02 | 岭澳核电有限公司 | Concrete pipeline inner wall detecting system |
| CN112326789A (en) * | 2020-10-28 | 2021-02-05 | 华南理工大学 | Mobile ultrasonic detection method and detection device |
| CN112658454A (en) * | 2020-12-09 | 2021-04-16 | 清华大学 | Electron beam fuse deposition defect online detection system and method |
| CN113324912A (en) * | 2021-04-14 | 2021-08-31 | 航天科工防御技术研究试验中心 | Plastic package structure internal defect detection device and method and storage medium |
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| CN116930091B (en) * | 2023-09-14 | 2023-12-12 | 武汉理通微芬科技有限公司 | Gas analysis device based on non-resonance photoacoustic cell |
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