CN107607520A - The Laser Photoacoustic composite detection method and its system of a kind of element and defect - Google Patents
The Laser Photoacoustic composite detection method and its system of a kind of element and defect Download PDFInfo
- Publication number
- CN107607520A CN107607520A CN201710705352.0A CN201710705352A CN107607520A CN 107607520 A CN107607520 A CN 107607520A CN 201710705352 A CN201710705352 A CN 201710705352A CN 107607520 A CN107607520 A CN 107607520A
- Authority
- CN
- China
- Prior art keywords
- sample
- laser
- defect
- semi
- spectrometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention discloses a kind of element and the Laser Photoacoustic composite detection method and system of defect, belong to laser material detection field, incided using pulse laser and produce plasma and ultrasonic wave on analysis sample, sample elemental constituent and fault of construction can be analyzed simultaneously.Detecting system includes pulse laser, spectrographic detection unit, ultrasonic listening unit, sample stage unit and analysis controlling unit, analysis controlling unit includes digital time delayer and computer, digital time delayer is connected with computer, sample stage unit includes 3D displacement platforms, 3D displacement platforms are electrically connected with digital time delayer, the pulse laser that pulse laser is launched is used to be incident in sample to be analysed with while produce plasma and ultrasonic wave, ultrasonic listening unit is used to detect ultrasonic wave, the visible light that spectrographic detection unit is used for plasma flame emission is detected.The inventive method and device can be realized simultaneously to be detected and is analyzed to the element and defect of sample.
Description
Technical field
The invention belongs to laser material detection field, specially a kind of elemental composition and defect distribution using laser excitation
Composite detection method and its system, light, acoustical signal caused by after mainly being excited by laser to material detected and analyzed,
Realize and the element of target is detected simultaneously with defect.
Background technology
In material tests field, constituent content and fault of construction are two important sides of material physical chemistry nature examination
Face.
In terms of elementary analysis, traditional detection means includes chemical analysis, XRF, ICP-OES etc..However, these sides
There is the shortcomings of destroying sample, time-consuming in method, can not meet even lossless etc. the need of quick, in situ, micro- damage of Modern Elements detection
Ask, so a kind of new spectrum detection technique --- LIBS (Laser Induced Breakdown
Spectroscopy, abbreviation LIBS) technology arises at the historic moment.
LIBS technologies are a kind of new atomic spectroscopic analysis technologies, and it is by by Laser Focusing to material surface ablation
Plasma is produced, elementary analysis is carried out to material by gathering plasma spectrometry, obtains its element species and content.By
In LIBS technologies have the characteristics that the synchronous analysis in real time of multielement, it is simple or without sample pretreatment, quickly with Non-Destructive Testing,
Therefore it is with a wide range of applications in fields such as metal metallurgy smelting, environmental protection, national defense industry, food securities.
Chinese patent literature《A kind of portable laser probe analytical instrument》(it is CN103558191B to announce, the day for announcing
For on 2 17th, 2016) a kind of portable laser probe analytical instrument is disclosed, the equipment is showed in Inner Mongol heavy industry
Field test experiments, mainly ferrous materials are carried out with online, in situ, quick detection, obtains preferable Site Detection result.
In terms of fault of construction Non-Destructive Testing, mainly there is radiography to detect (RT), liquid penetration examination (PT), magnetic inspection
The technology such as (MT), ultrasound examination (UT) of survey.Wherein RT, PT, MT technology are higher to detection environmental requirement, it is necessary to detection pair
It is at present ultrasound examination (UT) using the most ripe and extensive detection technique in industrial circle therefore as being handled.
Laser ultrasonic detection technique is one kind of ultrasonic detection technology, has the high good detection of lossless, safety, precision
Energy.
For example, Chen Lin et al. is in document《Application of the laser ultrasonic Visual retrieval technology in Non-Destructive Testing》Middle report
Road, " laser ultrasonic Visual retrieval instrument " based on laser ultrasonic Detection Techniques can intuitively check the damage of interior of articles
Wound or defect, suitable for metal, ceramics, carbon fiber and composite etc., are widely used in traffic, the energy, machinery, metallurgy, change
The fields such as work.
In summary, although LIBS technologies have superior performance in terms of Element detection, current LIBS technologies are simultaneously
It is not applied to detect the fault of construction of material.Although laser ultrasonic detection technology has superior property in nondestructive inspection
Can, but Elemental redistribution can not be detected.It can be seen that the element to material and defect are all to use monotechnics means at present
Analyzed respectively, analysis time length, testing cost is high.
So far, there is not yet the report detected to material element and defect simultaneously.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of element and the Laser Photoacoustic of defect
Composite detection method and its system, it is intended that using Sing plus laser as excitation source come ablation sample, swash
Hair produces plasma.On the one hand, it is acquired using the emission spectrum of spectrometer plasma；On the other hand, synchronously adopt
With ultrasonic detector to being detected with ultrasonic wave caused by laser excitation；It is same to the element and defect of sample so as to realize
Shi Jinhang is detected and analysis.
To achieve the above object, the invention provides a kind of element and the Laser Photoacoustic composite detection method of defect, use
Laser excites testing sample as excitaton source, to produce ultrasonic wave and plasma simultaneously, by gathering sound and optic signal, from
And the element and defect information of material are obtained simultaneously.
Further, line, Surface scan analysis are entered to sample by laser, can be in micro- damage even premise of lossless sample
Under, while obtain the element and defect distribution of testee.
According to the second aspect of the invention, a kind of element and the Laser Photoacoustic complex detection system of defect are additionally provided,
It includes pulse laser, spectrographic detection unit, ultrasonic listening unit, sample stage unit and analysis controlling unit, wherein,
Analysis controlling unit includes digital time delayer and computer, and digital time delayer is connected with computer to be controlled by computer, sample
Platform unit includes 3D displacement platforms, and 3D displacement platforms are used to placing sample to be analysed, and 3D displacement platforms can be along X to, Y-direction and Z
To movement, so as to realize to sample to be analysed in the position adjustments of three-dimensional, 3D displacement platforms are mutually electrically connected with digital time delayer
Connect, pulse laser be used for launch pulse laser, the pulse laser be used for be incident in sample to be analysed with simultaneously generation etc.
Gas ions and ultrasonic wave, ultrasonic listening unit are used to detect ultrasonic wave, to obtain on defect in sample to be analysed
Information, the visible light that spectrographic detection unit is used for plasma flame emission is detected, to obtain on treating point
Analyse the information of element in sample.Pulse laser, spectrographic detection unit, ultrasonic listening unit, sample stage unit and analysis
Control unit realizes the Elemental redistribution scanning for surveying object plane and structure of matter defect detection function jointly.Detect obtained knot
Fruit includes the graphics of Elemental redistribution information and matter defect information.
Further, ultrasonic listening unit includes ultrasonic probe and digital oscilloscope, ultrasonic probe numeral oscillography
Device electrically connects, and digital oscilloscope connects computer and digital time delayer simultaneously.
Further, spectrographic detection unit includes semi-transparent semi-reflecting lens, completely reflecting mirror, focusing objective len, spectrometer detection head, light
Spectrometer and enhancing charge coupling device, wherein, light-emitting window, the semi-transparent semi-reflecting lens of pulse laser are sequentially located at same level light
Lu Shang, transmission plane and the horizontal optical path angle at 45 ° of semi-transparent semi-reflecting lens, completely reflecting mirror activity installation, when it is located at light path and partly
Saturating semi-reflective mirror is parallel, and completely reflecting mirror and focusing objective len are sequentially located on the reflected light path of semi-transparent semi-reflecting lens, semi-transparent semi-reflecting lens, are all-trans
Penetrating the mutual distance of mirror, focusing objective len can be adjusted, and spectrometer collection probe is positioned at the top of semi-transparent semi-reflecting lens, itself and spectrum
Instrument is connected by optical fiber, and enhancing charge coupling device is arranged on spectrometer, and spectrometer passes through with calculating mechatronics.
Further, the pulse laser and the spectrometer electrically connect with digital time delayer simultaneously.
Further, the ultrasonic probe is immersion type ultrasonic probe, ultrasonic probe and injection sample to be analysed
Laser respectively positioned at the relative both sides of sample to be analysed.In Practical Project practice, during using immersion type ultrasonic probe, detection
Water is smeared in face or couplant couples with object to be detected.Ultrasonic probe can be fixedly mounted on detected object and receive laser excitation
The reverse side collection in face, is not moved with the motion of detected object.
Further, digital delay generator is used to control pulse laser setting in setting time light extraction, spectrometer
Time performs collecting work, 3D displacement platforms move in setting time, is additionally operable to control ultrasonic probe to perform in setting time
The time service of detection operations and computer in setting.Digital delay generator is mainly used in SECO so that phase therewith
Electrically connect the pulse laser, spectrometer, 3D displacement platforms, ultrasonic probe and the computer capacity that are controlled by it setting when
Between perform work, optimize collecting efficiency, it is front and rear between each other not conflict.
In the present invention, it can realize that the three-dimensional of analyzed sample is mobile using 3D displacement platforms, pass through analysis controlling unit
In digital time delayer and computer and advance programming design, can complete automatic data collection motion.
In the present invention, pulse laser, semi-permeable and semi-reflecting mirror, completely reflecting mirror, focusing objective len are sequentially located at same transmitting light
Lu Shang, spectrometer collection probe, semi-permeable and semi-reflecting mirror, completely reflecting mirror, focusing objective len, ultrasonic probe are sequentially located at same collection
In light path.The plasma light that pulse laser beam excites is popped one's head in by spectrometer collection and received, and is transferred to spectrometer by optical fiber,
It is imaged by strengthening charge coupling device, obtains the atomic emission spectrum figure at laser ablation.Acquisition time is sent out by digital delay
Raw device control, and pulse laser, ultrasonic probe, 3D displacement platforms are also to control its unlatching suitable by digital delay generator
Sequence and delay.Ultrasonic probe is arranged on the dorsal part of laser excitation sample surface, for receiving the ultrasonic wave letter that pulse laser excites
Breath.This element and the Laser Photoacoustic complex detection system of defect use single excitation source, at the same inspire spectral information and
Ultrasound information, by the collection and processing of spectral detection device and ultrasonic listening equipment, testee can be obtained simultaneously
Element and defect information.This technology realizes the exploration to Elemental redistribution and fault of construction corresponding relation, available for various
The quantitative multiple analysis of material element content and structure of Flaw discrimination.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show
Beneficial effect：
(1) laser ultrasonic inspection is concentrated mainly on the studying acquisition methods of supersonic sounding in industry at present, and the present invention is most
The characteristics of prominent, is started with from excitaton source, and ultrasonic wave and plasma are produced as excitaton source to excite using Sing plus laser
Body, while using ultrasonic probe and spectral detector collection sound and light signal, so as to obtain the element of material and defect information.Herein
On the basis of, Surface scan analysis is carried out to sample by laser, can be on the premise of hardly sample be destroyed, while obtain measured object
The element and defect distribution of body, so as to improve detection efficiency, reduce cost.
(2) second outstanding feature of the invention is that the detection of LIBS spectral elements and ultrasonic examination technology organically blend.
Ultrasound examination can obtain the depth of rhegmalypt while defect is detected, so as to calibration spectrum intensity；LIBS spectrum analyses
While element can also to ultrasound examination to the defects of confirm, so as to improve accuracy of detection.
(3) the 3rd outstanding feature of the invention is carried out accurately and automatically controlled using high-precision 3D displacement platforms, can
Realize a variety of detection modes such as automatic single-point acquiring, line surface sweeping, Surface scan.Combination algorithm optimize, can obtain it is a variety of intuitively
Three-dimensional, two dimension result of detection, can be achieved that defect is accurately positioned and assessed.
(4) present invention, which can integrate, substitutes existing elementary analysis and carrying out flaw detection system, can apply to material science with
The numerous areas such as engineering, machine-building, metallurgy, steel chemical, historical relic's protection and safety detection.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the Laser Photoacoustic complex detection system of the element and defect in the embodiment of the present invention
Figure；
Wherein, 1. spectrometer；2. spectrometer collection is popped one's head in；3. pulse laser；4. completely reflecting mirror；5.3D displacement platform；
6. strengthen charge coupling device (ICCD)；7. computer；8. semi-transparent semi-reflecting lens；9. sample to be analysed；10. focusing objective len；11. number
Word delay time generator；12. oscillograph；13. immersion type ultrasonic probe
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Conflict can is not formed each other to be mutually combined.
The present invention propose it is a kind of using technology of the laser as the optoacoustic compound detection of light source, with realize to Elemental redistribution with
Detected while fault of construction.
Fig. 1 is a kind of structural representation of the Laser Photoacoustic complex detection system of the element and defect in the embodiment of the present invention
Figure, as seen from the figure, light-emitting window, the semi-transparent semi-reflecting lens 8 of pulse laser 3 are sequentially located in same level light path, semi-transparent semi-reflecting lens 8
Transmission plane and the angle of substrate be 45 degree, while also with horizontal optical path into 45 degree of angles.The activity installation of completely reflecting mirror 4, when its position
It is parallel with semi-transparent semi-reflecting lens 8 when light path.Completely reflecting mirror 4 and focusing objective len 10 are sequentially located at the reflected light path of semi-transparent semi-reflecting lens 8
On.The mutual distance of semi-transparent semi-reflecting lens 8, completely reflecting mirror 4, focusing objective len 10 can realize water by connection wire rod and guide rail
Gentle vertical regulation.
Spectrometer collection probe 2 is located at the top of semi-transparent semi-reflecting lens 8, is connected by optical fiber with spectrometer 1.Strengthen electric charge coupling
Clutch part ICCD6 is arranged on spectrometer 1, and spectrometer 1 is connected by optical cable with computer 7.3D displacement platforms 5 pass through level side
To motor drive screw and guide rail can realize that horizontal X, the precision of Y-direction are mobile, the motor for passing through vertical direction drives silk
Bar can realize that the precision of vertical Z-direction is mobile with guide rail, and horizontal motor acts on simultaneously with vertical motor, and it is three-dimensional to form x-y-z
Kinematic system.Sample to be analysed 9 is placed on 3D displacement platforms 5.3D displacement platforms 5 are connected to computer 7 by controlling cable
On, with by accurate its position of control of computer.
Immersion type ultrasonic probe 13 is fixed in sample to be analysed 9, and with pulse laser separation sample both sides, water logging
Formula ultrasonic probe 13 is connected on oscillograph 12 by connecting line of popping one's head in, and oscillograph 12 connects computer 7 by cable.
Digital delay generator 11 is mainly used in control pulse laser 3 light extraction, spectrometer 1 is gathered, 3D displacement platforms 5 are transported
Dynamic, immersion type ultrasonic probe 13 detect and computer 7 between delay time.Digital delay generator 11 and pulse laser
All there is cable to connect among device 3, spectrometer 1,3D displacement platforms 5, oscillograph 12 and computer 7.
The main function of pulse laser 3 be launch high-energy pulse laser beam come inspire the plasma of material and
Ultrasonic wave, the effect of semi-transparent semi-reflecting lens 8 are reflected impulse laser beams, excite hair caused by plasma through sample to be analysed 9
Penetrate spectrum.The effect of completely reflecting mirror 4 is to form light path catoptric arrangement with semi-transparent semi-reflecting lens 8, by pulse laser beam and emission spectrum
It is totally reflected to adjust light path, it is convenient to gather information.
Spectrometer collection probe 2 is located at the surface of semi-transparent semi-reflecting lens 8, passes through the position in adjustment space and pulse laser
Beam focused acquisition.Spectrometer collection probe 2 substantially increases the stability for gathering spectral information using coaxial collection.Collect
Information spectrometer 1 is transferred to by fiber coupling.
The main function of the ICCD 6 is：With spectrometer 1 together, the beam splitting system and detector of sample are formed, is used for
Collect testee surface plasma caused by spectral line of emission signal, and by spectrometer 1 decompose plasma light obtain it is each
The spectrum line imaging of kind element, so as to carry out qualitative and quantitative analysis to sample element.
The effect of 3D displacement platforms 5 is the control signal by receiving controlling cable transmission, controlled level X, the electricity of Y-direction
Machine and the motor Collaboration of vertical Z-direction.Specifically, the motor for adjusting horizontal X direction rotates forward reversion, control platform or so
It is mobile.Focusing objective len 10 is coordinated to adjust defocusing amount；The motor for adjusting vertical Z-direction is rotated forward, inverted, control platform lifting；Regulation
The motor of horizontal Y-direction rotates forward, reversion, control platform anterior-posterior translation；Platform Z-direction and Y-direction associated movement, which can be realized, to be treated
Analyze the Surface scan collection of sample 9.
The effect of immersion type ultrasonic probe 13 is to be contacted by couplant with sample to be analysed 9, detects sample to be analysed 9
The ultrasonic signal excited, and acoustic signals are converted into electric signal, oscillograph 12 is delivered to by cable of popping one's head in.Oscillograph 12
Change in electric is shown by waveform, and data are delivered to computer 7 by cable and analyzed and processed.Water logging
Formula ultrasonic probe 13 is fixed on support when using, and it is not moved with sample to be analysed, is close to after test surface daubing coupling agent
Tested sample to be analysed realizes the good coupling with sample to be analysed 9.
Computer 12 can use desktop computer or notebook computer, pass through USB interface, cable or netting twine and number
Word delay time generator 11, spectrometer 1,3D displacement platforms 5, oscillograph 12 are attached.The software of computer have automatically scanning,
Find the functions such as atom spectrum peak value, qualitative recognition, Quantitative yield calculating and sound wave information processing transformation model.
The Laser Photoacoustic composite detection method for entering row element and defect using system above is as follows：It is used as and is excited using laser
Source excites testing sample, to produce ultrasonic wave and plasma simultaneously, by gathering sound and optic signal, so as to obtain material simultaneously
The element and defect information of material.In actual use, enter line, Surface scan analysis to sample by laser, can be in micro- damage even
On the premise of lossless sample, while obtain the element and defect distribution of testee.
Apparatus of the present invention are described in more detail with reference to specific embodiment.
Embodiment 1：
Now illustrate the process for using of Laser Photoacoustic complex detection system of the present invention exemplified by detecting steel weld seam, have
Body operating procedure is as follows：
(1) pulse laser 3 uses Nd:YAG Q-switched lasers, its launch wavelength are 532nm, and the pulse duration is
6ns, regulation pulse energy is about 40mJ.Immersion type ultrasonic probe 13 is using without focal length flat focus, frequency 20MHz.Numeral
The model DG535 of delay time generator 11, its delay resolution are 5Ps.
(2) welding sample is placed on 3D displacement platforms 5.Scanning plane face Laser output mouth, adjustment 3D displacement platforms 5 exist
The position of X-direction and the position of focusing objective len 10, make pulse laser beam focus on defocusing amount -1mm positions；Adjustment 3D displacements are put down
Initial point of position of the platform 5 on Y-Z axles to area to be scanned.
The height of appropriate adjustment spectrometer collection probe 2, makes it have optimal acquisition condition.Adjust immersion type ultrasonic wave
The position of probe 13, couplant is used in test surface, is coupled with the back side for welding sample, it is possessed detection condition, and solid
Positioning is put.
After the scanning area for welding sample is aligned and is locked, digital delay generator 11 is triggered using computer 7, is counted
5 equipment that word delay time generator 11 controls start work successively, and this five set respectively pulse laser 3, spectrometer 1 and adopt
Collection, 3D displacement platforms 5, immersion type ultrasonic probe 13 and computer 7.
(3) pulse laser 3 starts, and sends the pulse laser beam of fixed wave length, fixed wave length pulse laser beam is through semi-transparent
The segment beam of semi-reflective mirror 8 change optical path direction is downward, after then completely reflecting mirror 4 is reflected light path again, line focus object lens
10 focus on the test surface of sample to be analysed 9 and carry out ablation.
Material absorbing energy carburation by evaporation is detected at ablation focusing on, substantial amounts of material is converted into plasmoid,
Plasma occurs energy level transition and sends optical signal, and optical signal is by 10 → completely reflecting mirror of focusing objective len, 4 → semi-transparent semi-reflecting lens 8
Coaxial collection light path is collected by spectrometer collection probe 2, wherein, semi-transparent semi-reflecting lens 8 are total reflection pulse laser, and full impregnated is crossed
Gas ions light.
Spectrometer 1 is detected to the atom and ion spectra of laser excitation, analyzed, and detected spectral signal is passed
Transport to enhancing charge coupling device I6, ICCD6 (namely enhancing charge coupling device 6) and receive the control of digital delay generator 11
Clock signal, open its spectra collection switch and preferable time delayed signal collection is carried out to spectral signal, and the spectrum collected
Signal, which is amplified, to be handled and is converted into electric signal transmission to computer 7, handles to obtain the light of plasma finally by program
Spectrogram.
While laser ablation produces plasma, in the inside of sample to be analysed 9 also due to the impulse oscillation production of laser
Ultrasonic wave is given birth to, ultrasonic wave is propagated in interior of articles, and the immersion type ultrasonic probe 13 for being coupling in welding sample opposite side is adopted
Collect, ultrasound information is converted into electric signal, shown electric signal by oscillograph 12, also pass through computer 7
Program processing, obtains the structure chart of ultrasonic listening object.
(4) after completing collection to a collection point, 3D displacement platforms 5 move to next collection position, repeat above-mentioned step
Suddenly, until all collection points, all collection finishes.
After all collection point collections, by the software program of computer 7, the spectral information of collection point is corresponded
To the coordinate of scanning plane, quantitative analysis is carried out to the content for setting element, passes through colouring discrimination, forming face scan element content point
Butut；The defects of interior of articles obtained in combination with ultrasonic listening information, obtain including detected material volume elements by processing
Element distribution and the surface sweeping graphics of fault of construction.
By above-mentioned steps, composition Surface scan based on LIBS and laser-ultrasound wave technology and fault of construction are just completed
Accurate qualitative and accurate quantification is analyzed.When needing to detect sample other positions, controlled by x, y, z three-shaft linkage,
Relock surface sweeping plane, the comprehensive scanning analysis of complete paired samples different parts.
When being detected to sample, the plane of scanning motion and volume should be delimited according to the surface topography and testing requirements of sample first
The scanning pattern of pulse laser processed, the sequential of each functional unit is controlled by digital delay generator when programming
Coordinate, obtain optimal collection effect.
It is proposed by the present invention a kind of for material element and the Laser Photoacoustic complex detection system of defect, by using single
Pulse laser carrys out ablation sample as excitation source, excites generation plasma.On the one hand, using spectrometer article on plasma
The emission spectrum of body is acquired；On the other hand, it is synchronous to use ultrasonic detector to ultrasonic wave caused by laser excitation
Detected；So as to realize the element and defect to sample while be detected and analyzed, enter row element using present system
With during the Laser Photoacoustic compound detection of defect, it is necessary to which vacuum environment, its size and electric conductivity to analyzed sample are unlimited
System, analysis efficiency are high.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (8)
1. the Laser Photoacoustic composite detection method of a kind of element and defect, it is characterised in that swashed using laser as excitaton source
Testing sample is sent out, to produce ultrasonic wave and plasma simultaneously, by gathering sound and optic signal, so as to obtain the member of material simultaneously
Element and defect information.
2. the method as described in claim 1, it is characterised in that enter line, Surface scan analysis to sample by laser, can be micro-
On the premise of damage even lossless sample, while obtain the element and defect distribution of testee.
3. the Laser Photoacoustic complex detection system of a kind of element and defect, it is characterised in that it includes pulse laser (3), light
Probe unit, ultrasonic listening unit, sample stage unit and analysis controlling unit are composed, wherein,
Analysis controlling unit includes digital time delayer (11) and computer (7), digital time delayer (11) be connected with computer (7) with
Controlled by computer,
Sample stage unit includes 3D displacement platforms, and 3D displacement platforms are used to place sample to be analysed (9), and 3D displacement platforms can be along X
To, Y-direction and Z-direction movement, so as to realize to sample to be analysed in the position adjustments of three-dimensional, 3D displacement platforms prolong with numeral
When device (11) be electrically connected,
Pulse laser (3) is used to launch pulse laser, and the pulse laser is used to be incident in sample to be analysed with while produce
The in vitro body and ultrasonic wave such as raw,
Ultrasonic listening unit is used to detect ultrasonic wave, to obtain the information on defect in sample to be analysed,
The visible light that spectrographic detection unit is used for plasma flame emission is detected, to obtain on sample to be analyzed
The information of element in product.
4. the Laser Photoacoustic complex detection system of a kind of element as claimed in claim 3 and defect, it is characterised in that ultrasonic wave
Probe unit includes ultrasonic probe (13) and digital oscilloscope (12), and ultrasonic probe (13) digital oscilloscope (12) is electrically connected
Connect, digital oscilloscope (12) while connect computer (7) and digital time delayer (11).
5. the Laser Photoacoustic complex detection system of a kind of element as claimed in claim 4 and defect, it is characterised in that spectrum is visited
Survey unit include semi-transparent semi-reflecting lens (8), completely reflecting mirror (4), focusing objective len (10), spectrometer detection head (2), spectrometer (1) with
And enhancing charge coupling device (6), wherein,
Light-emitting window, the semi-transparent semi-reflecting lens (8) of pulse laser (3) are sequentially located in same level light path, semi-transparent semi-reflecting lens (8)
Transmission plane and horizontal optical path angle at 45 °,
Completely reflecting mirror (4) activity installation, completely reflecting mirror (4) and conglomeration parallel with semi-transparent semi-reflecting lens (8) when it is located at light path
Mirror (10) is sequentially located on the reflected light path of semi-transparent semi-reflecting lens (8), semi-transparent semi-reflecting lens (8), completely reflecting mirror (4), focusing objective len
(10) mutual distance can be adjusted,
Spectrometer collection probe (2) is located at the top of semi-transparent semi-reflecting lens (8), and it is connected with spectrometer (1) by optical fiber, enhancing electricity
Lotus coupled apparatus (6) is arranged on spectrometer (1), and spectrometer (1) with computer (7) by electrically connecting.
6. the Laser Photoacoustic complex detection system of a kind of element as claimed in claim 5 and defect, it is characterised in that the arteries and veins
Rush laser (3) and the spectrometer (1) while electrically connected with digital time delayer (11).
7. the Laser Photoacoustic complex detection system of a kind of element as claimed in claim 6 and defect, it is characterised in that described super
Sonic probe (13) is immersion type ultrasonic probe, and ultrasonic probe is located at respectively with the laser for injecting sample to be analysed (9) to be treated
Analyze the relative both sides of sample (9).
8. the Laser Photoacoustic complex detection system of a kind of element as claimed in claim 7 and defect, it is characterised in that numeral is prolonged
When generator (11) be used for control pulse laser (3) setting time light extraction, spectrometer (1) setting time perform collection work
Work, 3D displacement platforms (5) move in setting time, are additionally operable to control ultrasonic probe (13) to perform detection operations in setting time
And computer (7) is in the time service of setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710705352.0A CN107607520A (en) | 2017-08-17 | 2017-08-17 | The Laser Photoacoustic composite detection method and its system of a kind of element and defect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710705352.0A CN107607520A (en) | 2017-08-17 | 2017-08-17 | The Laser Photoacoustic composite detection method and its system of a kind of element and defect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107607520A true CN107607520A (en) | 2018-01-19 |
Family
ID=61065090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710705352.0A Pending CN107607520A (en) | 2017-08-17 | 2017-08-17 | The Laser Photoacoustic composite detection method and its system of a kind of element and defect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107607520A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108426839A (en) * | 2018-03-19 | 2018-08-21 | 长沙理工大学 | A kind of increasing material manufacturing component detection method based on manipulator scanning laser ultrasound signal correlation analysis |
| CN108802165A (en) * | 2018-06-29 | 2018-11-13 | 武汉大学 | Have the increasing material system of processing and method of spectrum ULTRASONIC COMPLEX on-line checking function |
| CN108872198A (en) * | 2018-08-31 | 2018-11-23 | 浙江大学 | The effect of fertilizer cadmium detection method of laser induced breakdown spectroscopy based on ar gas environment |
| CN109276229A (en) * | 2018-08-15 | 2019-01-29 | 华中科技大学苏州脑空间信息研究院 | A kind of rapid focus system and method for opto-acoustic microscopic imaging |
| CN109507117A (en) * | 2018-11-12 | 2019-03-22 | 中国科学技术大学 | A kind of micro-nano image checking experimental provision based on optoacoustic beam shaping |
| CN109990829A (en) * | 2018-12-25 | 2019-07-09 | 华中科技大学 | The method and device that a kind of element, defect and residual stress detect simultaneously |
| CN110220975A (en) * | 2018-03-01 | 2019-09-10 | 国家电投集团科学技术研究院有限公司 | Laser-ultrasound modulus measuring device |
| CN110411948A (en) * | 2018-04-30 | 2019-11-05 | 波音公司 | Carry out the system and method for detection structure using laser-ultrasound |
| CN110487897A (en) * | 2019-08-28 | 2019-11-22 | 华中科技大学 | A kind of compound non-contact detection system of Laser Photoacoustic of element and defect |
| CN112255191A (en) * | 2020-09-25 | 2021-01-22 | 广东工业大学 | Laser-induced breakdown spectroscopy and acoustic reflection combined online monitoring system and method |
| CN112611744A (en) * | 2020-12-11 | 2021-04-06 | 中国海洋大学 | Underwater LIBS spectrum correction method based on sound wave signals |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712962A (en) * | 2013-12-31 | 2014-04-09 | 武汉新瑞达激光工程有限责任公司 | Laser probe analyzer based on aerosolization and resonance excitation |
| CN205120573U (en) * | 2015-06-08 | 2016-03-30 | 江西科技师范大学 | Optoacoustic allies oneself with food medicine component and quick detection device of content who uses up spectrometry |
| CN107014804A (en) * | 2017-03-23 | 2017-08-04 | 华中科技大学 | A kind of microwave radiation technology excites the apparatus and method for suppressing LIBS self absorption effect |
-
2017
- 2017-08-17 CN CN201710705352.0A patent/CN107607520A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712962A (en) * | 2013-12-31 | 2014-04-09 | 武汉新瑞达激光工程有限责任公司 | Laser probe analyzer based on aerosolization and resonance excitation |
| CN205120573U (en) * | 2015-06-08 | 2016-03-30 | 江西科技师范大学 | Optoacoustic allies oneself with food medicine component and quick detection device of content who uses up spectrometry |
| CN107014804A (en) * | 2017-03-23 | 2017-08-04 | 华中科技大学 | A kind of microwave radiation technology excites the apparatus and method for suppressing LIBS self absorption effect |
Non-Patent Citations (2)
| Title |
|---|
| 郭瑞鹏等: "基于光声效应的激光超声波检测技术", 《无损检测》 * |
| 马世榜等: "烧蚀机制下激光超声声场的模拟与实验验证", 《激光与红外》 * |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110220975A (en) * | 2018-03-01 | 2019-09-10 | 国家电投集团科学技术研究院有限公司 | Laser-ultrasound modulus measuring device |
| CN108426839B (en) * | 2018-03-19 | 2021-02-26 | 长沙理工大学 | Additive manufacturing component detection method based on mechanical arm scanning laser ultrasonic signal correlation analysis |
| CN108426839A (en) * | 2018-03-19 | 2018-08-21 | 长沙理工大学 | A kind of increasing material manufacturing component detection method based on manipulator scanning laser ultrasound signal correlation analysis |
| CN110411948B (en) * | 2018-04-30 | 2023-10-24 | 波音公司 | System and method for inspecting structures using laser ultrasound |
| CN110411948A (en) * | 2018-04-30 | 2019-11-05 | 波音公司 | Carry out the system and method for detection structure using laser-ultrasound |
| CN108802165A (en) * | 2018-06-29 | 2018-11-13 | 武汉大学 | Have the increasing material system of processing and method of spectrum ULTRASONIC COMPLEX on-line checking function |
| CN109276229A (en) * | 2018-08-15 | 2019-01-29 | 华中科技大学苏州脑空间信息研究院 | A kind of rapid focus system and method for opto-acoustic microscopic imaging |
| CN108872198A (en) * | 2018-08-31 | 2018-11-23 | 浙江大学 | The effect of fertilizer cadmium detection method of laser induced breakdown spectroscopy based on ar gas environment |
| CN109507117A (en) * | 2018-11-12 | 2019-03-22 | 中国科学技术大学 | A kind of micro-nano image checking experimental provision based on optoacoustic beam shaping |
| CN109507117B (en) * | 2018-11-12 | 2020-04-03 | 中国科学技术大学 | Micro-nano imaging detection experimental device based on photoacoustic beam shaping |
| WO2020135118A1 (en) * | 2018-12-25 | 2020-07-02 | 华中科技大学 | Method and device for simultaneously detecting elements, defects and residual stress |
| CN109990829A (en) * | 2018-12-25 | 2019-07-09 | 华中科技大学 | The method and device that a kind of element, defect and residual stress detect simultaneously |
| CN110487897A (en) * | 2019-08-28 | 2019-11-22 | 华中科技大学 | A kind of compound non-contact detection system of Laser Photoacoustic of element and defect |
| CN112255191A (en) * | 2020-09-25 | 2021-01-22 | 广东工业大学 | Laser-induced breakdown spectroscopy and acoustic reflection combined online monitoring system and method |
| CN112611744A (en) * | 2020-12-11 | 2021-04-06 | 中国海洋大学 | Underwater LIBS spectrum correction method based on sound wave signals |
| CN112611744B (en) * | 2020-12-11 | 2021-12-10 | 中国海洋大学 | Underwater LIBS spectrum correction method based on sound wave signals |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107607520A (en) | The Laser Photoacoustic composite detection method and its system of a kind of element and defect | |
| CN109990829B (en) | Method and device for simultaneously detecting elements, defects and residual stress | |
| CN104596997B (en) | Laser-induced breakdown-pulsed Raman spectroscopy combined system and using method | |
| CN110487897A (en) | A kind of compound non-contact detection system of Laser Photoacoustic of element and defect | |
| CN101526477B (en) | Laser differential confocal spectrum microscopy tomography device | |
| CN103808802B (en) | A kind of ultrasonic assay method of full optical lasers of material internal defect | |
| CN106546604A (en) | A kind of bronze surface and Sub-surface defect detection method and system | |
| GB2502239A (en) | Concealed dangerous articles detection method and device | |
| CN105424804B (en) | One kind remanufacturing composite part defect supersonic detection method | |
| CN101782517A (en) | Laser probe micro-area component analyzer based on double laser light source | |
| CN102866144A (en) | Nondestructive testing method for fatigue crack on solid material surface | |
| CN106841171A (en) | The combined spectral detection method of detection is imported and exported for large and valuable kinds of goods | |
| CN110779927B (en) | Subsurface defect detection device and method based on ultrasonic modulation | |
| CN113740317A (en) | Laser focusing point position automatic positioning method and system based on spot area | |
| CN206369698U (en) | A kind of device of utilization laser microprobe quick detection ore pulp | |
| CN214472708U (en) | Absorption breakdown spectrum combined measurement system based on three-dimensional adjustable multi-optical-path structure | |
| CN114544597A (en) | LIBS spectral line enhancement system based on double laser beams in different time domains | |
| KR102285477B1 (en) | Apparatus and Method for Noncontact and Non Destructive Test of Defects Inside Metal using Photoacoustic Imaging for After Induction Hardening | |
| CN104990908B (en) | The confocal induced breakdown Raman spectrum imaging detection method of laser twin shaft and device | |
| CN109187502A (en) | Postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device | |
| CN203606283U (en) | Single light source double-wavelength laser-induced breakdown spectroscopy measuring device | |
| CN109187723A (en) | Postposition is divided pupil differential confocal Raman spectra-mass spectrum micro imaging method and device | |
| CN210665618U (en) | Laser optoacoustic composite non-contact detection system for elements and defects | |
| CN109187501A (en) | Postposition is divided pupil laser differential confocal LIBS spectrum micro imaging method and device | |
| CN206132625U (en) | Remote measurement device based on LIBS technique |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180119 |