CN110479688B - 一种硅片生产用酸洗液循环利用的转动式酸洗装置 - Google Patents
一种硅片生产用酸洗液循环利用的转动式酸洗装置 Download PDFInfo
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- CN110479688B CN110479688B CN201910715321.2A CN201910715321A CN110479688B CN 110479688 B CN110479688 B CN 110479688B CN 201910715321 A CN201910715321 A CN 201910715321A CN 110479688 B CN110479688 B CN 110479688B
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- 238000005554 pickling Methods 0.000 title claims abstract description 88
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 35
- 239000010703 silicon Substances 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 125000004122 cyclic group Chemical group 0.000 title claims abstract description 5
- 239000007788 liquid Substances 0.000 claims abstract description 56
- 239000000779 smoke Substances 0.000 claims abstract description 35
- 238000004140 cleaning Methods 0.000 claims abstract description 22
- 238000004064 recycling Methods 0.000 claims abstract description 13
- 230000002265 prevention Effects 0.000 claims abstract description 7
- 230000000903 blocking effect Effects 0.000 claims description 14
- 239000002253 acid Substances 0.000 claims description 2
- 235000021110 pickles Nutrition 0.000 claims description 2
- 239000000243 solution Substances 0.000 claims 7
- 239000011550 stock solution Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 abstract description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract description 2
- 239000003546 flue gas Substances 0.000 abstract description 2
- 238000005406 washing Methods 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 description 13
- 238000001914 filtration Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/044—Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910715321.2A CN110479688B (zh) | 2019-08-05 | 2019-08-05 | 一种硅片生产用酸洗液循环利用的转动式酸洗装置 |
Applications Claiming Priority (1)
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CN201910715321.2A CN110479688B (zh) | 2019-08-05 | 2019-08-05 | 一种硅片生产用酸洗液循环利用的转动式酸洗装置 |
Publications (2)
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CN110479688A CN110479688A (zh) | 2019-11-22 |
CN110479688B true CN110479688B (zh) | 2022-02-11 |
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CN201910715321.2A Active CN110479688B (zh) | 2019-08-05 | 2019-08-05 | 一种硅片生产用酸洗液循环利用的转动式酸洗装置 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111354662A (zh) * | 2020-03-10 | 2020-06-30 | 南通欧贝黎新能源电力股份有限公司 | 一种太阳能电池片制备用硅片去除磷硅玻璃酸洗装置 |
Citations (8)
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EP0394212B1 (en) * | 1989-04-19 | 1995-01-18 | Bic | Apparatus and process for the uniform treatment of large quantities of small parts |
CN203695575U (zh) * | 2013-12-12 | 2014-07-09 | 浙江五环钛业股份有限公司 | 一种滑动式排气罩及排气系统 |
CN203963401U (zh) * | 2014-06-26 | 2014-11-26 | 嘉善威尔尼绒业有限公司 | 一种滚动支撑机构 |
CN205673266U (zh) * | 2016-02-02 | 2016-11-09 | 苏州鸿博斯特超净科技股份有限公司 | 一种硅料清洗装置 |
CN205684402U (zh) * | 2016-06-07 | 2016-11-16 | 修武县鑫锐超硬材料有限公司 | 一种人造金刚石清洗装置 |
CN108570711A (zh) * | 2018-06-05 | 2018-09-25 | 浙江羿阳太阳能科技有限公司 | 一种多晶硅料酸洗装置 |
CN109201570A (zh) * | 2018-09-04 | 2019-01-15 | 王华珍 | 一种新能源电池生产用单晶硅棒多级酸洗设备 |
CN208661948U (zh) * | 2018-07-13 | 2019-03-29 | 江苏京尚圆电气集团有限公司 | 一种硅料的清洗装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4177400B2 (ja) * | 2006-11-10 | 2008-11-05 | エス・イー・エス株式会社 | 無電解めっき方法 |
JP5029539B2 (ja) * | 2007-09-04 | 2012-09-19 | 三菱マテリアル株式会社 | 多結晶シリコンの洗浄方法及び多結晶シリコンの製造方法 |
CN103480601B (zh) * | 2013-10-09 | 2016-03-02 | 中国科学院城市环境研究所 | 一种活性炭酸洗装置 |
KR102541489B1 (ko) * | 2016-02-26 | 2023-06-08 | 삼성전자주식회사 | 기판 세정 장치 및 이를 이용한 기판 세정 설비 |
CN107774352A (zh) * | 2016-08-26 | 2018-03-09 | 盘锦泓新机器人科技有限公司 | 一种便于清洗试管的试管架 |
CN207806068U (zh) * | 2017-12-20 | 2018-09-04 | 安徽天利动力股份有限公司 | 一种发动机缸盖滚筒式清洗设备 |
CN108296199A (zh) * | 2017-12-29 | 2018-07-20 | 南京康翱峰自动化科技有限公司 | 一种微电机壳的清洗装置 |
CN208437334U (zh) * | 2018-05-29 | 2019-01-29 | 成都经典明胶有限公司 | 一种节能型明胶原料清洗设备 |
-
2019
- 2019-08-05 CN CN201910715321.2A patent/CN110479688B/zh active Active
Patent Citations (8)
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EP0394212B1 (en) * | 1989-04-19 | 1995-01-18 | Bic | Apparatus and process for the uniform treatment of large quantities of small parts |
CN203695575U (zh) * | 2013-12-12 | 2014-07-09 | 浙江五环钛业股份有限公司 | 一种滑动式排气罩及排气系统 |
CN203963401U (zh) * | 2014-06-26 | 2014-11-26 | 嘉善威尔尼绒业有限公司 | 一种滚动支撑机构 |
CN205673266U (zh) * | 2016-02-02 | 2016-11-09 | 苏州鸿博斯特超净科技股份有限公司 | 一种硅料清洗装置 |
CN205684402U (zh) * | 2016-06-07 | 2016-11-16 | 修武县鑫锐超硬材料有限公司 | 一种人造金刚石清洗装置 |
CN108570711A (zh) * | 2018-06-05 | 2018-09-25 | 浙江羿阳太阳能科技有限公司 | 一种多晶硅料酸洗装置 |
CN208661948U (zh) * | 2018-07-13 | 2019-03-29 | 江苏京尚圆电气集团有限公司 | 一种硅料的清洗装置 |
CN109201570A (zh) * | 2018-09-04 | 2019-01-15 | 王华珍 | 一种新能源电池生产用单晶硅棒多级酸洗设备 |
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Title |
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杨素素 ; 杨新胜 ; 高波 等.全自动硅料酸洗工艺技术研究.《新余学院学报》.2017,第25-28页. * |
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Effective date of registration: 20240617 Address after: 120 meters north of Fourth Ring Road, Industrial Park, Danyang Town, Bowang District, Ma'anshan City, Anhui Province, 243000 Patentee after: Maanshan Forging Machinery Forging Co.,Ltd. Country or region after: China Address before: 243000 building 4, No. 1669, north section of huolishan Avenue, Cihu high tech Zone, Ma'anshan City, Anhui Province Patentee before: Ma'anshan Zhiqing Industrial Design Co.,Ltd. Country or region before: China |