CN110471045B - Double-shaft galvanometer - Google Patents
Double-shaft galvanometer Download PDFInfo
- Publication number
- CN110471045B CN110471045B CN201910857863.3A CN201910857863A CN110471045B CN 110471045 B CN110471045 B CN 110471045B CN 201910857863 A CN201910857863 A CN 201910857863A CN 110471045 B CN110471045 B CN 110471045B
- Authority
- CN
- China
- Prior art keywords
- frame
- supporting beam
- driving
- supporting
- fixed seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
Abstract
The invention belongs to the technical field of laser, and discloses a double-shaft galvanometer which comprises a fixed seat, a supporting frame, a reflecting mirror, a reset device and a driving device, wherein the supporting frame comprises an outer frame, an outer supporting beam and an inner supporting beam, the outer supporting beam and the inner supporting beam are perpendicular to each other, the outer frame is connected to the outer supporting beam, the outer supporting beam is rotatably connected to the fixed seat, the reflecting mirror is connected to the outer frame through the inner supporting beam, the reset device is respectively connected to the fixed seat and the outer supporting beam, the driving device is arranged on the fixed seat and the supporting frame and is used for driving the supporting frame and the reflecting mirror to rotate relative to the fixed seat by taking the outer supporting beam as a shaft and driving the reset device to generate elastic deformation, and the driving device is also used for driving the reflecting mirror to rotate by taking the inner supporting beam as a shaft and driving the inner supporting beam to generate elastic deformation. According to the invention, the outer supporting beams are rotationally connected, so that the rigidity of the outer supporting beams is not required to be overcome when the outer frame rotates, the corner range of the reflector is enlarged, and damage caused by vibration impact is avoided.
Description
Technical Field
The invention relates to the technical field of laser, in particular to a double-shaft galvanometer.
Background
Solid-state lidar generally employs electromagnetic MEMS mirrors and MEMS-like mirrors. The electromagnetic MEMS galvanometer and the similar MEMS galvanometer use electromagnetic force to generate torque, and the mirror surface rotates around the torsion beam. The driving modes of the electromagnetic galvanometer can be divided into two modes, namely high-frequency resonant driving and low-frequency quasi-static driving. The high-frequency resonant drive utilizes high-gain vibration under the resonance state of the galvanometer, and has the characteristics of higher frequency and larger angle. However, the resonant drive is sensitive to environment and vibration, position feedback must be used to perform closed-loop control on the galvanometer, and resonant scanning cannot achieve low-frequency slow axis scanning required by the laser radar. Therefore, the conventional electromagnetic MEMS (Micro-Electro-Mechanical System) galvanometer and MEMS-like galvanometer mostly use low-frequency quasi-static driving for slow axis scanning, and the low-frequency quasi-static driving requires electromagnetic force to overcome the stiffness of the torsion beam at low frequency, so as to rotate the mirror surface. To obtain a larger angle of rotation, it is generally necessary to reduce the stiffness of the torsion beam, and to use a torsion beam having a longer length and a smaller cross-sectional area. However, the torsion beam has low rigidity, and stress concentration is easily generated in an external vibration environment, so that the service life of the galvanometer is reduced, the stress limit of a material is easily exceeded, the galvanometer is damaged, or the galvanometer caused by low rigidity is easily influenced by vibration.
Disclosure of Invention
The invention aims to provide a double-shaft galvanometer, which can enlarge the rotation angle range of the galvanometer, avoid damage caused by vibration impact and prolong the service life.
In order to achieve the purpose, the invention adopts the following technical scheme:
a dual-axis galvanometer, comprising:
a fixed seat;
the supporting frame comprises an outer frame, an outer supporting beam and an inner supporting beam, the outer supporting beam and the inner supporting beam are perpendicular to each other, the outer frame is connected to the outer supporting beam, and the outer supporting beam is rotatably connected to the fixed seat;
the reflector is connected to the outer frame through the inner supporting beam;
the resetting device is respectively connected with the fixed seat and the outer supporting beam;
drive arrangement, set up in the fixing base with on the support frame, be used for the drive the support frame with the speculum with outer supporting beam is for the axle rotates for the fixing base, and drives resetting means produces elastic deformation, drive arrangement still is used for the drive the speculum is rotated as the axle with interior supporting beam produces elastic deformation.
Preferably, the fixing seat is provided with a bearing, and the outer support beam is rotatably connected to the fixing seat through the bearing.
Preferably, the support frame further comprises an inner frame, the inner frame is connected to the outer frame through the inner support beam, and the reflector is mounted on the inner frame.
Preferably, the outer frame is sleeved on the outer side of the inner frame, the outer support beam is provided with two sections, the two sections are symmetrically connected to the outer side of the outer frame and are respectively connected to one bearing, and the inner support beam is provided with two sections, and the two sections are symmetrically connected to the outer side of the inner frame.
Preferably, the fixing seat is provided with a shaft seat, the bearing is installed on the shaft seat, the outer supporting beam is connected with the bearing from one side of the bearing, the shaft seat is provided with an end cover, and the end cover abuts against the other side of the bearing.
Preferably, the driving device comprises a permanent magnet and a coil, one of the permanent magnet and the coil is mounted on the fixed seat, and the other is mounted on the supporting frame.
Preferably, the permanent magnet is mounted on the fixing seat, the coil includes an X-axis vibration coil and a Y-axis vibration coil, the X-axis vibration coil is mounted on the outer frame, and the Y-axis vibration coil is mounted on the inner frame.
Preferably, the reset device is a reset spring, one end of the reset spring is connected to the outer supporting beam, and the other end of the reset spring is connected to the fixed seat.
Preferably, the fixing seat is screwed with an adjusting block, one end of the return spring is connected with the outer supporting beam, the other end of the return spring is connected with the adjusting block, and the adjusting block can adjust the pre-tightening force of the return spring.
Preferably, the reset device is a reset elastic sheet, two ends of the reset elastic sheet are both connected to the fixed seat, and the outer support beam is connected to the middle of the reset elastic sheet.
The invention has the beneficial effects that:
the outer supporting beam and the fixing seat are rotatably connected, so that the outer frame does not need to overcome the rigidity of the outer supporting beam when rotating, the requirements on the rigidity, the length and the cross sectional area of the outer supporting beam are reduced, the corner range of the reflector is enlarged, damage caused by vibration impact is avoided, and the service life is prolonged.
Drawings
FIG. 1 is a schematic structural diagram of a biaxial galvanometer in one direction according to a first embodiment of the present invention;
FIG. 2 is a schematic view of another orientation structure of the biaxial galvanometer according to the first embodiment of the present invention;
FIG. 3 is a front view of a biaxial galvanometer according to one embodiment of the present invention;
FIG. 4 is a sectional view taken along line A-A of FIG. 3;
FIG. 5 is a sectional view taken along line B-B of FIG. 3;
FIG. 6 is a cross-sectional view taken along line C-C of FIG. 3;
FIG. 7 is a front view of a biaxial galvanometer according to a second embodiment of the present invention;
FIG. 8 is a cross-sectional view taken along line D-D of FIG. 7;
FIG. 9 is a sectional view taken along line E-E of FIG. 7;
fig. 10 is a sectional view taken along line F-F of fig. 7.
In the figure:
1. a fixed seat; 11. a bearing; 12. a shaft seat; 13. an end cap; 14. an adjusting block; 15. a fixed block;
2. a support frame; 21. an outer frame; 22. an inner frame; 23. an outer support beam; 24. an inner support beam;
3. a mirror;
4. a resetting device;
5. a drive device; 51. a permanent magnet; 511. a first magnet; 512. a second magnet; 52. a coil; 521. an X-axis vibration coil; 522. and a Y-axis vibration coil.
Detailed Description
Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar parts throughout or parts having the same or similar functions. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning a fixed connection, a removable connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediary, a connection between two elements, or an interaction between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, unless otherwise expressly specified or limited, the first feature "on" or "under" the second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature being in contact not directly but with another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The invention provides a double-shaft galvanometer, which comprises a fixed seat 1, a supporting frame 2, a reflecting mirror 3, a resetting device 4 and a driving device 5. Wherein, support frame 2 includes frame 21, prop roof beam 23 and interior roof beam 24 outward, prop roof beam 23 and interior roof beam 24 mutually perpendicular outward, frame 21 is connected in propping roof beam 23 outward, prop roof beam 23 outward and rotate and connect in fixing base 1, speculum 3 is connected in frame 21 through interior roof beam 24, resetting means 4 is connected in fixing base 1 and outer roof beam 23 respectively, drive arrangement 5 sets up on fixing base 1 and support frame 2, be used for drive support frame 2 and speculum 3 with propping roof beam 23 for the axle rotates for fixing base 1 with regard to the axle, and drive resetting means 4 and produce elastic deformation, drive arrangement 5 still is used for drive speculum 3 to use interior roof beam 24 to rotate as the axle, and drive interior roof beam 24 and produce elastic deformation.
In the invention, the reflector 3 and the inner supporting beam 24 can be designed integrally and connected to the outer frame 21 through the inner supporting beam 24; of course, the reflector 3 may also be designed separately, an inner frame 22 is disposed on the supporting frame 2, the inner frame 22 is connected to the outer frame 21 through an inner supporting beam 24, and the reflector 3 is mounted on the inner frame 22.
The technical solution of the present invention will be further described below by taking the example that the supporting frame 2 includes an inner frame 22, and referring to the drawings and the specific embodiments.
Example one
As shown in fig. 1 to 6, the present embodiment provides a biaxial galvanometer, which includes a fixed base 1, a supporting frame 2, a reflecting mirror 3, a resetting device 4 and a driving device 5. Wherein, the supporting frame 2 comprises an outer frame 21, an inner frame 22, an outer supporting beam 23 and an inner supporting beam 24, the outer supporting beam 23 and the inner supporting beam 24 are perpendicular to each other, the outer frame 21 is connected to the outer supporting beam 23, the outer supporting beam 23 is rotatably connected to the fixed base 1, the inner frame 22 is connected to the outer frame 21 through the inner supporting beam 24, the reflector 3 is mounted on the inner frame 22, the resetting device 4 is respectively connected to the fixed base 1 and the outer supporting beam 23, the driving device 5 is arranged on the fixed base 1 and the supporting frame 2 and can drive the supporting frame 2 and the reflector 3 to rotate around the outer supporting beam 23 and the inner supporting beam 24, the inner frame 22 can also be driven to rotate around the inner supporting beam 24, when the outer frame 21 rotates, the outer supporting beam 23 is driven to rotate relative to the fixed base 1, when the outer supporting beam 23 rotates, the resetting device 4 is driven to generate elastic deformation, when the inner frame 22 rotates, the inner supporting beam 24 is driven to generate elastic deformation, and finally, when the outer frame 21 rotates, the reflector 3 can be finally driven to rotate around the outer supporting beam 23, when the inner frame 22 rotates, the reflector 3 can be driven to rotate around the inner supporting beam 24, so that the scanning of another vertical dimension is realized.
In the embodiment, the single reflecting mirror 3 is arranged, so that the mass is smaller, and the whole double-shaft vibrating mirror can realize higher scanning frequency.
In the invention, the external support beam 23 is rotationally connected with the fixed seat 1, so that the outer frame 21 does not need to overcome the rigidity of the external support beam 23 during rotation, thereby reducing the requirements on the rigidity, the length and the cross sectional area of the external support beam 23, enlarging the corner range of the reflector 3, avoiding damage caused by vibration impact and prolonging the service life.
In the present embodiment, the reflector 3 is a quartz glass or sapphire lens, which is conventional in the art.
Optionally, the bearing 11 is arranged on the fixed seat 1, and the outer support beam 23 is rotatably connected to the fixed seat 1 through the bearing 11, so that the rotation of the outer support beam 23 is smoother and more stable, and the coincidence of the slow axis rotation center and the fast axis is ensured.
Specifically, the outer frame 21 is sleeved outside the inner frame 22, the outer support beam 23 is provided with two sections, which are symmetrically connected to the outer side of the outer frame 21 and respectively connected to one bearing 11, and the inner support beam 24 is provided with two sections, which are symmetrically connected to the outer side of the inner frame 22. In addition, in order to reduce the rigidity and avoid stress concentration, the outer supporting beam 23 may have various shapes, such as a square frame, an oval frame, a serpentine frame, etc., or may have a structure with a more complicated three-dimensional shape, such as a circular tube shape or a square tube shape, and the material thereof may be beryllium copper, spring steel, or titanium alloy, etc., anti-torsion metal or non-metal material.
More specifically, the fixing seat 1 is provided with a shaft seat 12, the bearing 11 is installed on the shaft seat 12, the end portion of the outer support beam 23 serves as a vibration-starting plate, the vibration-starting plate is clamped into a rotating shaft of the bearing 11 from one side of the bearing 11 and is connected to the bearing 11, an end cover 13 is installed on the shaft seat 12, and the end cover 13 abuts against the other side of the bearing 11.
Alternatively, the driving device 5 comprises a permanent magnet 51 and a coil 52, and the permanent magnet 51 and the coil 52 are both mounted on the fixed base 1 and the other is mounted on the supporting frame 2, and the outer frame 21 or the inner frame 22 is driven to rotate by the magnetic force between the permanent magnet 51 and the coil 52.
In the present embodiment, the permanent magnet 51 is mounted on the fixing base 1, the coil 52 includes an X-axis vibration coil 521 and a Y-axis vibration coil 522, the X-axis vibration coil 521 is mounted on the outer frame 21, and the Y-axis vibration coil 522 is mounted on the inner frame 22.
Specifically, the permanent magnet 51 includes a first magnet 511 and a second magnet 512, the first magnet 511 and the second magnet 512 are respectively mounted on the fixing base 1 and symmetrically disposed on two sides of the reflector 3, and in this embodiment, the first magnet 511 and the second magnet 512 are fixed on the outer side of the reflector 3 in a direction inclined by 45 °.
It will be appreciated that in other embodiments, the coil 52 may be mounted on the fixed base 1, and two pairs of permanent magnets may be provided, one pair being mounted on the outer frame 21 and the other pair being mounted on the inner frame 22 or the reflector 3.
Alternatively, the restoring means 4 is a restoring spring, one end of which is connected to the outer supporting beam 23 and the other end of which is connected to the fixing base 1.
Specifically, fixing base 1 is provided with the screw hole, and the spiro union has regulating block 14 in the screw hole, and reset spring one end is connected in outer supporting beam 23, and the other end is connected in regulating block 14, and regulating block 14 can adjust reset spring's pretightning force to reach the effect of adjusting reset spring to the damping size of outer supporting beam 23. The return spring achieves the effect of tightness adjustment through the adjusting block 14, so that the rotation amplitude and the rotation speed of the outer frame 21 can be adjusted.
More specifically, each section of the outer supporting beam 23 is correspondingly connected with one return spring, each return spring is correspondingly provided with one adjusting block 14, and the two return springs are symmetrically arranged on two sides of the reflector 3.
Example two
As shown in fig. 7 to 10, the present embodiment provides a biaxial galvanometer. For simplicity, only the differences between the present embodiment and the first embodiment will be described below. In this embodiment, the reset device 4 is a reset spring, two ends of the reset spring are both connected to the fixing base 1, and the outer support beam 23 is connected to the middle of the reset spring.
Specifically, the extending direction of the reset elastic sheet is perpendicular to the outer supporting beam 23, the extending lengths of the two sides of the reset elastic sheet are symmetrical relative to the shaft seat 12, the fixing seat 1 is provided with the fixing block 15, and the two ends of the reset elastic sheet are fixed between the fixing block 15 and the fixing seat 1 through screws.
More specifically, each section of the outer supporting beam 23 is correspondingly connected with one reset elastic sheet, each reset elastic sheet is correspondingly provided with two fixing blocks 15, and the two reset elastic sheets are symmetrically arranged on two sides of the reflector 3.
Furthermore, the invention also provides a laser radar which comprises the double-shaft vibrating mirror in any embodiment.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (9)
1. A biaxial galvanometer, comprising:
a fixed seat (1);
the supporting frame (2), the supporting frame (2) includes an outer frame (21), an outer supporting beam (23) and an inner supporting beam (24), the outer supporting beam (23) and the inner supporting beam (24) are perpendicular to each other, the outer frame (21) is connected to the outer supporting beam (23), and the outer supporting beam (23) is rotatably connected to the fixed seat (1);
a reflector (3) connected to the outer frame (21) via the inner support beam (24);
the resetting device (4) is respectively connected with the fixed seat (1) and the outer supporting beam (23);
the driving device (5) is arranged on the fixed seat (1) and the supporting frame (2) and used for driving the supporting frame (2) and the reflector (3) to rotate relative to the fixed seat (1) by taking the outer supporting beam (23) as an axis and driving the resetting device (4) to generate elastic deformation so as to realize scanning of one dimension, and the driving device (5) is also used for driving the reflector (3) to rotate by taking the inner supporting beam (24) as an axis and driving the inner supporting beam (24) to generate elastic deformation so as to realize scanning of another vertical dimension;
the support frame (2) further comprises an inner frame (22), the inner frame (22) is connected to the outer frame (21) through the inner support beam (24), and the reflector (3) is installed on the inner frame (22).
2. The biaxial galvanometer of claim 1, wherein the fixed base (1) is provided with a bearing (11), and the outer support beam (23) is rotatably connected to the fixed base (1) through the bearing (11).
3. The biaxial galvanometer according to claim 2, wherein the outer frame (21) is sleeved outside the inner frame (22), the outer support beam (23) is provided with two sections which are symmetrically connected to the outside of the outer frame (21) and respectively connected to one of the bearings (11), and the inner support beam (24) is provided with two sections which are symmetrically connected to the outside of the inner frame (22).
4. The biaxial galvanometer of claim 2, wherein the fixed base (1) is provided with a shaft seat (12), the bearing (11) is mounted on the shaft seat (12), the outer supporting beam (23) is connected with the bearing (11) from one side of the bearing (11), the shaft seat (12) is provided with an end cover (13), and the end cover (13) is abutted against the other side of the bearing (11).
5. The biaxial galvanometer of claim 2, characterized in that said driving means (5) comprise a permanent magnet (51) and a coil (52), said permanent magnet (51) and said coil (52) being both mounted on said fixed base (1) and on said supporting frame (2).
6. The biaxial galvanometer of claim 5, wherein the permanent magnet (51) is mounted on the fixed base (1), the coil (52) comprises an X-axis vibrating coil (521) and a Y-axis vibrating coil (522), the X-axis vibrating coil (521) is mounted on the outer frame (21), and the Y-axis vibrating coil (522) is mounted on the inner frame (22).
7. The biaxial galvanometer according to any one of claims 1 to 6, characterized in that said resetting means (4) is a return spring, one end of said return spring being connected to said outer support beam (23) and the other end being connected to said fixed base (1).
8. The biaxial galvanometer according to claim 7, wherein an adjusting block (14) is screwed on the fixed base (1), one end of the return spring is connected to the outer supporting beam (23), the other end of the return spring is connected to the adjusting block (14), and the adjusting block (14) can adjust the pretightening force of the return spring.
9. The biaxial galvanometer according to any one of claims 1 to 6, wherein the resetting device (4) is a resetting spring, both ends of the resetting spring are connected to the fixing base (1), and the outer support beam (23) is connected to the middle part of the resetting spring.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910857863.3A CN110471045B (en) | 2019-09-11 | 2019-09-11 | Double-shaft galvanometer |
| PCT/CN2020/108092 WO2021047336A1 (en) | 2019-09-11 | 2020-08-10 | Biaxial galvanometer and laser radar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910857863.3A CN110471045B (en) | 2019-09-11 | 2019-09-11 | Double-shaft galvanometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110471045A CN110471045A (en) | 2019-11-19 |
| CN110471045B true CN110471045B (en) | 2021-08-17 |
Family
ID=68515539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910857863.3A Active CN110471045B (en) | 2019-09-11 | 2019-09-11 | Double-shaft galvanometer |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110471045B (en) |
| WO (1) | WO2021047336A1 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110471045B (en) * | 2019-09-11 | 2021-08-17 | 深圳市镭神智能系统有限公司 | Double-shaft galvanometer |
| CN111308478B (en) * | 2019-12-06 | 2021-04-20 | 深圳市镭神智能系统有限公司 | Double-shaft galvanometer and laser radar |
| CN111175765B (en) * | 2019-12-12 | 2021-08-17 | 深圳市镭神智能系统有限公司 | Duplex bearing mirror and laser radar that shakes |
| CN111308479B (en) * | 2019-12-13 | 2021-02-19 | 深圳市镭神智能系统有限公司 | Galvanometer and laser radar |
| CN111090083B (en) * | 2019-12-19 | 2023-03-21 | 深圳市镭神智能系统有限公司 | Scanning galvanometer and laser radar |
| CN110940989A (en) * | 2019-12-20 | 2020-03-31 | 深圳市镭神智能系统有限公司 | Galvanometer and laser radar |
| CN110941083B (en) * | 2019-12-20 | 2022-07-26 | 深圳市镭神智能系统有限公司 | Galvanometer and laser radar |
| CN111273435A (en) * | 2020-03-27 | 2020-06-12 | 昂纳信息技术（深圳）有限公司 | Micro-vibration mirror scanning structure, electric energy driving system and angle detection system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101149478A (en) * | 2006-09-19 | 2008-03-26 | 精工爱普生株式会社 | Actuator, optical scanner, and image forming apparatus |
| CN101750734A (en) * | 2008-12-05 | 2010-06-23 | 船井电机株式会社 | Vibrating mirror element |
| JP2013076984A (en) * | 2011-09-14 | 2013-04-25 | Denso Corp | Optical scanner |
| EP3392696A1 (en) * | 2017-04-20 | 2018-10-24 | STMicroelectronics S.r.l. | Oscillating structure with reduced dynamic deformation, optical device including the oscillating structure, and method of manufacturing the oscillating structure |
| CN208314328U (en) * | 2018-06-29 | 2019-01-01 | 上海禾赛光电科技有限公司 | scanning mirror |
| CN109557556A (en) * | 2018-12-03 | 2019-04-02 | 北京觉醒纪科技有限公司 | Scan components and laser radar |
| CN109814254A (en) * | 2019-03-29 | 2019-05-28 | 李胜保 | A kind of swinging method of laser scanning galvanometer device and scanning mirror |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7538928B1 (en) * | 2005-10-31 | 2009-05-26 | Advanced Numicro Systems, Inc. | MEMS mirror with parallel springs and arched support for beams |
| JP2008242207A (en) * | 2007-03-28 | 2008-10-09 | Casio Comput Co Ltd | Shake correcting device and imaging apparatus |
| KR20090041766A (en) * | 2007-10-24 | 2009-04-29 | 삼성전기주식회사 | Mems scanner having actuator separated from mirror |
| JP5238479B2 (en) * | 2008-04-01 | 2013-07-17 | 株式会社トプコン | Method for driving MEMS mirror scanner, method for driving MEMS actuator scanner, and method for controlling rotation angle of MEMS actuator |
| CN107101712B (en) * | 2017-04-06 | 2019-04-05 | 东北大学 | Multi-direction wide-angle continuous scanning vibration measuring auxiliary machine based on single-point laser vialog |
| CN108415155A (en) * | 2018-03-13 | 2018-08-17 | 北方工业大学 | Two-dimensional micro-galvanometer driving frequency adjusting system and method |
| CN209070105U (en) * | 2018-10-29 | 2019-07-05 | 常州诺米电子科技有限公司 | A kind of laser range finder being convenient for changing eyeglass |
| CN109683308A (en) * | 2019-02-01 | 2019-04-26 | 西安知微传感技术有限公司 | A kind of electromagnetic drive galvanometer reducing oscillating motion |
| CN109828257A (en) * | 2019-02-14 | 2019-05-31 | 昂纳信息技术（深圳）有限公司 | A kind of scanning means and laser radar |
| CN110471045B (en) * | 2019-09-11 | 2021-08-17 | 深圳市镭神智能系统有限公司 | Double-shaft galvanometer |
-
2019
- 2019-09-11 CN CN201910857863.3A patent/CN110471045B/en active Active
-
2020
- 2020-08-10 WO PCT/CN2020/108092 patent/WO2021047336A1/en active Application Filing
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101149478A (en) * | 2006-09-19 | 2008-03-26 | 精工爱普生株式会社 | Actuator, optical scanner, and image forming apparatus |
| CN101750734A (en) * | 2008-12-05 | 2010-06-23 | 船井电机株式会社 | Vibrating mirror element |
| JP2013076984A (en) * | 2011-09-14 | 2013-04-25 | Denso Corp | Optical scanner |
| EP3392696A1 (en) * | 2017-04-20 | 2018-10-24 | STMicroelectronics S.r.l. | Oscillating structure with reduced dynamic deformation, optical device including the oscillating structure, and method of manufacturing the oscillating structure |
| CN208314328U (en) * | 2018-06-29 | 2019-01-01 | 上海禾赛光电科技有限公司 | scanning mirror |
| CN109557556A (en) * | 2018-12-03 | 2019-04-02 | 北京觉醒纪科技有限公司 | Scan components and laser radar |
| CN109814254A (en) * | 2019-03-29 | 2019-05-28 | 李胜保 | A kind of swinging method of laser scanning galvanometer device and scanning mirror |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110471045A (en) | 2019-11-19 |
| WO2021047336A1 (en) | 2021-03-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110471045B (en) | Double-shaft galvanometer | |
| CN101482643B (en) | Bidimensional large-diameter fast control reflection mirror | |
| CN108873562B (en) | Optical unit with shake correction function | |
| CN107340667B (en) | Anti-shake miniature cradle head integrated with camera module | |
| US20150331250A1 (en) | Shaking correction device | |
| US9529208B2 (en) | Image stabilizer | |
| KR20090031104A (en) | 2-axis driving electromagnetic scanner | |
| CN108663770B (en) | Rapid control reflector large-angle rotating mechanism based on cross spring bearing | |
| JP2019020525A (en) | Optical unit with shake correction function | |
| CN115097624A (en) | Flexible support galvanometer based on overhead type moving coil | |
| CN109283654A (en) | A kind of one-dimensional quick reflex lens device | |
| CN115097594A (en) | Large-caliber large-corner high-bandwidth voice coil motor fast-reflection mirror device | |
| CN114114785B (en) | Optical unit with jitter correction function | |
| CN110726984B (en) | Vibrating mirror and laser radar | |
| CN208953763U (en) | A kind of one-dimensional quick reflex lens device | |
| CN112014937B (en) | Quick reflector | |
| CN110764072B (en) | Duplex bearing mirror and laser radar that shakes | |
| CN208141028U (en) | Rapid control reflector large rotation angle mechanism based on cross-spring bearing | |
| CN110940989A (en) | Galvanometer and laser radar | |
| CN111175765B (en) | Duplex bearing mirror and laser radar that shakes | |
| JP2002277755A (en) | Reflection mirror device | |
| CN113589470B (en) | Low-frequency image-stabilizing controllable swing mirror mechanism and working method thereof | |
| CN210803864U (en) | Biaxial resonant scanning mirror | |
| US20050263964A1 (en) | Tracking apparatus | |
| CN111308478B (en) | Double-shaft galvanometer and laser radar |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |