CN111175765B - Duplex bearing mirror and laser radar that shakes - Google Patents
Duplex bearing mirror and laser radar that shakes Download PDFInfo
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- CN111175765B CN111175765B CN201911275603.1A CN201911275603A CN111175765B CN 111175765 B CN111175765 B CN 111175765B CN 201911275603 A CN201911275603 A CN 201911275603A CN 111175765 B CN111175765 B CN 111175765B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- Computer Networks & Wireless Communication (AREA)
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- Radar, Positioning & Navigation (AREA)
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- Mechanical Optical Scanning Systems (AREA)
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Abstract
The invention discloses a double-bearing vibrating mirror and a laser radar, wherein the double-bearing vibrating mirror comprises: the device comprises a fixed seat, a galvanometer driving frame, a reflecting lens, a first magnetic structural part, a multi-pole magnet and a motor; the galvanometer driving frame comprises a fixed support, a fast axis frame and a slow axis frame, and the reflecting lens is arranged in the fast axis frame; the fast axis frame is rotationally connected to the inner side of the fixed support, the slow axis frame is fixedly connected to the outer side of the fixed support, and the galvanometer driving frame is rotationally connected into the fixed seat; the first magnetic structural parts are symmetrically arranged on two sides of the fast shaft frame, and the multi-pole magnet is arranged on one side of the fast shaft frame and is opposite to the first magnetic structural parts; the motor is fixedly connected with one side of the multipole magnet, which is far away from the fast shaft frame, and the motor is used for driving the multipole magnet to rotate; the fast axis frame twists around the first direction, the slow axis frame twists around the second direction, and the first direction is perpendicular to the second direction. Therefore, the reliability of the MEMS galvanometer can be improved, and the vibration resistance and impact resistance of the MEMS galvanometer are improved, so that the service life of the laser radar is prolonged.
Description
Technical Field
The embodiment of the invention relates to the technical field of laser radars, in particular to a double-bearing vibrating mirror and a laser radar.
Background
The laser radar is a radar system that emits a laser beam to detect a characteristic quantity such as a position and a velocity of a target object. With the development of laser radar, Micro-Electro-Mechanical systems (MEMS) galvanometers (also referred to as "galvanometers" herein for short) are applied to laser radar, and the development of solid-state laser radar is a new trend of laser radar in recent years. The MEMS galvanometer is a micro mirror manufactured by adopting an MEMS process, the working mode of the MEMS galvanometer is mostly a resonance mode, and the MEMS galvanometer has the advantages of small size, high oscillation frequency, no rotating part and the like.
Generally, electromagnetic MEMS mirrors and MEMS-like mirrors are favored for solid state lidar. The electromagnetic MEMS galvanometer and the similar MEMS galvanometer use electromagnetic force to generate torque, and the mirror surface rotates around the torsion beam. The driving modes of the electromagnetic MEMS galvanometer can be divided into two modes, namely high-frequency resonant driving and low-frequency quasi-static driving. The high-frequency resonant drive utilizes high-gain vibration of the MEMS galvanometer in a resonant state, and has the characteristics of high frequency and large angle. However, the high-frequency resonant drive is sensitive to environment and vibration, and position feedback is required to be used for closed-loop control of the galvanometer; in addition, the resonant scanning cannot realize the low-frequency slow axis scanning required by the laser radar, the scanning angle is small, and the efficiency is low. In order to obtain a larger scanning angle, a low-frequency quasi-static driving mode can be adopted. Low frequency quasi-static drive requires electromagnetic force to overcome the stiffness of the torsion beam at low frequency, causing the mirror to rotate. In order to obtain a larger corner, the stiffness of the torsion beam is generally required to be reduced, and to meet the requirement, the torsion beam with a longer length and a smaller cross-sectional area is required to be adopted. However, the torsion beam has low rigidity, and stress concentration is easy to occur under the external vibration environment to exceed the stress limit of the material, so that the MEMS galvanometer is damaged; alternatively, MEMS mirrors are susceptible to vibration due to low stiffness. Therefore, the MEMS galvanometer is poor in reliability and easy to be damaged by vibration or impact, and the service life of the laser radar is short.
Disclosure of Invention
The embodiment of the invention provides a double-bearing vibrating mirror and a laser radar, so that the reliability of an MEMS vibrating mirror is improved, the vibration resistance and impact resistance of the MEMS vibrating mirror are improved, and the service life of the laser radar is prolonged.
In a first aspect, an embodiment of the present invention provides a dual-bearing galvanometer, including: the device comprises a fixed seat, a galvanometer driving frame, a reflecting lens, a first magnetic structural part, a multi-pole magnet and a motor;
the galvanometer driving frame comprises a fixed support, a fast axis frame and a slow axis frame, and the reflecting mirror is installed in the fast axis frame; the fast axis frame is rotationally connected to the inner side of the fixed support, the slow axis frame is fixedly connected to the outer side of the fixed support, and the galvanometer driving frame is rotationally connected into the fixed seat; and
the first magnetic structural parts are symmetrically arranged on two sides of the fast axis frame, and the multi-pole magnet is arranged on one side of the fast axis frame and is opposite to the first magnetic structural parts; the motor is fixedly connected with one side of the multipole magnet, which is far away from the fast shaft frame, and the motor is used for driving the multipole magnet to rotate;
the fast axis frame twists around a first direction, the slow axis frame twists around a second direction, and the first direction is perpendicular to the second direction.
In one embodiment, the multipole magnet is in the shape of a cylinder, a bottom surface of the cylinder, which is far away from the fast axis frame, is fixedly connected with the motor, and a bottom surface of the cylinder, which is close to the fast axis frame, is provided with N poles and S poles which are sequentially distributed at intervals;
and the multipole magnet is coaxially arranged with the center of the reflector plate.
In one embodiment, the dual-bearing galvanometer further comprises a fast-axis bracket and two first bearings;
the fast axis frame is fixed on the inner side of the fast axis support, the fast axis support comprises a first end and a second end, the first end and the second end extend along the first direction and are oppositely arranged, and the first end and the second end are sleeved in the two first bearings respectively.
In one embodiment, the dual-bearing galvanometer further comprises a first angle sensor and a first angle magnet;
the first angle magnet is fixed at one end of the fast shaft support, and the first angle sensor is arranged on one side, away from the fast shaft support, of the first angle magnet; the first angle sensor is used for sensing the direction and the size of the first angle magnet so as to determine the rotating angle of the fast axis frame.
In one embodiment, the dual bearing galvanometer further includes a first bearing cap and a second bearing cap; the first bearing cover and the second bearing cover are respectively sleeved outside the two first bearings;
the two first shaft sleeves are respectively used for fixing the first bearing and the first end of the fast shaft support and fixing the first bearing and the second end of the fast shaft support;
the first auxiliary shaft sleeve is used for penetrating through the first bearing cover and fixedly connecting the fast shaft support and the first angle magnet.
In one embodiment, the dual-bearing galvanometer further comprises a slow-axis support, a slow-axis coil, a first slow-axis magnet, a second slow-axis magnet, two second bearings and two bearing seats;
the slow shaft frame is fixed on the inner side of the slow shaft support, the first end of the slow shaft support is fixedly connected with the first end of the fixed support, the second end of the slow shaft support is rotatably connected with the fixed seat, and the second end of the fixed support, which is far away from the slow shaft support, is rotatably connected with the fixed seat; the two ends of the fixed seat along the second direction are respectively provided with one bearing seat, the second end of the slow shaft support is sleeved in the second bearing in one bearing seat, and the second end of the fixed support is sleeved in the second bearing in the other bearing seat;
along the first direction, the first slow axis magnet and the second slow axis magnet are arranged on two opposite sides of the slow axis frame, and the slow axis coil is located on the edge of the slow axis frame.
In one embodiment, the dual-bearing galvanometer further comprises a second angle sensor and a second angle magnet;
the second angle magnet is fixed at the second end of the slow shaft support, and the second angle sensor is arranged on one side of the second angle magnet, which is far away from the slow shaft support; the second angle sensor is used for sensing the direction and the size of the second angle magnet so as to determine the rotation angle of the slow shaft frame.
In one embodiment, the dual-bearing galvanometer further comprises a third bearing cover and a fourth bearing cover, wherein the third bearing cover and the fourth bearing cover are respectively sleeved outside the two second bearings;
the two second shaft sleeves are respectively used for fixing the second bearing and the second end of the slow shaft bracket and fixing the second bearing and the second end of the fixed bracket;
the second auxiliary shaft sleeve is used for penetrating through the third bearing cover and fixedly connecting the slow shaft support and the second angle magnet.
In an embodiment, the double-bearing galvanometer further comprises a second magnetic structural part, wherein the second magnetic structural part is arranged on one side of the slow axis frame close to the first slow axis magnet and one side of the slow axis frame close to the second slow axis magnet;
the second magnetic structural part is used for balancing the stress of the reflector when the reflector is twisted around the second direction under the action of magnetic force so as to realize automatic resetting.
In a second aspect, an embodiment of the present invention further provides a laser radar including any one of the dual-bearing galvanometers provided in the first aspect.
The double-bearing galvanometer provided by the embodiment of the invention comprises a fixed seat, a galvanometer driving frame, a reflecting mirror piece, a first magnetic structural part, a multi-pole magnet and a motor, wherein the galvanometer driving frame comprises a fixed support, a fast axis frame and a slow axis frame; the fast axis frame is rotationally connected to the inner side of the fixed support, the slow axis frame is fixedly connected to the outer side of the fixed support, and the galvanometer driving frame is rotationally connected into the fixed seat; the first magnetic structural parts are symmetrically arranged on two sides of the fast shaft frame, and the multi-pole magnet is arranged on one side of the fast shaft frame and is opposite to the first magnetic structural parts; the motor is fixedly connected with one side of the multipole magnet, which is far away from the fast shaft frame, and the motor is used for driving the multipole magnet to rotate; the fast axis frame is twisted around a first direction, the slow axis frame is twisted around a second direction, the first direction is vertical to the second direction, the motor can be used for driving the multi-pole magnet to rotate, so that the fast axis frame is driven and reset by utilizing the principle that like poles repel and opposite poles attract, and the fast axis frame is further used for driving the reflector to rotate around the first direction; meanwhile, the slow shaft frame can drive the fixed support, so that the fast shaft frame is driven, and the reflecting lens in the fast shaft frame is driven to rotate around the second direction; on the basis, the fast axis frame is rotatably connected with the inner side of the fixed support, and the galvanometer driving frame is rotatably connected with the fixed seat, so that the problems of low reliability and short service life caused by the arrangement of a torsion beam structure can be solved, the reliability of the MEMS galvanometer can be improved, the vibration resistance and impact resistance of the MEMS galvanometer can be improved, and the service life of a laser radar can be prolonged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief description will be given below of the drawings required for the embodiments or the technical solutions in the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic perspective view of a dual-bearing galvanometer according to an embodiment of the present invention;
fig. 2 is a schematic perspective view of a dual-bearing galvanometer according to an embodiment of the present invention;
fig. 3 is an exploded view of a dual-bearing galvanometer according to an embodiment of the present invention;
fig. 4 is a schematic plan view of a dual-bearing galvanometer according to an embodiment of the present invention;
FIG. 5 is a schematic cross-sectional view taken along line A-A in FIG. 4;
FIG. 6 is a schematic cross-sectional view taken along line B-B in FIG. 4;
FIG. 7 is a schematic cross-sectional view taken along line C-C of FIG. 4;
FIGS. 8 and 9 are schematic diagrams of fast axis dithering provided by embodiments of the present invention;
fig. 10 is a schematic diagram illustrating a resetting principle of resetting a slow axis frame by a second magnetic structural member of a dual-bearing galvanometer according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The improvement points of the embodiment of the invention are as follows:
(1) aiming at the defects that the electromagnetic galvanometer low-frequency quasi-static scanning is short in service life and easy to damage, the traditional mode of overcoming the rigidity of a torsion beam to rotate is replaced by a mode that a fast shaft and a slow shaft are supported by bearings to integrally rotate, wherein the slow shaft is driven by a mode that an electrified coil generates Lorentz magnetic force in a magnetic field, and a pair of positioning magnetic parts (namely second magnetic structural parts) are used for generating linear restoring force and damping motion; the fast axis adopts the motor to drive the multipolar magnet to rotate, and utilizes the principle that like poles of the magnet repel each other, and heteropolarity attracts to drive and reset, so not only can increase the corner scope but also can avoid the material damage and increase of service life that the vibration impact caused. The use of bearings (including the first bearing and the second bearing) ensures that the slow axis rotation center coincides with the fast axis, thereby facilitating the realization of precise control of the mirror plate.
(2) Aiming at the problem that the scanning angle cannot be accurately controlled, the invention is also respectively provided with the angle sensors along the directions of the fast axis and the slow axis, so that the rotating angles of the fast axis and the slow axis can be accurately measured, and the scanning precision of the galvanometer can be better controlled.
The dual-bearing galvanometer and the laser radar provided by the embodiment of the invention are exemplarily described below with reference to fig. 1 to 10.
Referring to fig. 1 to 10, the dual bearing galvanometer 10 includes: a fixed base 100, a galvanometer drive rack 110, a mirror plate 120, a first magnetic structure 280 (including a first magnetic structure 2801 representing an N pole and a first magnetic structure 2802 representing an S pole), a multi-pole magnet 220, and a motor 230; the galvanometer driving frame 110 comprises a fixed bracket 111, a fast axis frame 112 and a slow axis frame 113, and the reflecting mirror 120 is arranged in the fast axis frame 112; the fast axis frame 112 is rotatably connected to the inner side of the fixed bracket 111, the slow axis frame 113 is fixedly connected to the outer side of the fixed bracket 111, and the galvanometer driving rack 110 is rotatably connected to the fixed seat 100; the first magnetic structural members 280 are symmetrically arranged at two sides of the fast axis frame 112, and the multi-pole magnet 220 is arranged at one side of the fast axis frame 112 and is opposite to the first magnetic structural members 280; the motor 230 is fixedly connected with one side of the multi-pole magnet 220, which is far away from the fast shaft frame 112, and the motor 230 is used for driving the multi-pole magnet 220 to rotate; the fast axis frame 112 twists around a first direction X, and the slow axis frame 113 twists around a second direction Y, where the first direction X is perpendicular to the second direction Y.
In which a separate mirror plate 120 (quartz glass or sapphire) is assembled with the galvanometer drive rack 110. The galvanometer driving rack 110 includes a fast axis frame 112 and a slow axis frame 113, and the fast axis frame 112 and the slow axis frame 113 can be twisted (also referred to as "rotation" or "spin") around two directions perpendicular to each other (i.e., a first direction X and a second direction Y) to realize rotation of the mirror plate 120 in two dimensions.
In other embodiments, the mirror plate 120 may also be installed in the slow axis frame 113, and may be set according to the actual requirements of the dual-bearing galvanometer 10, which is not limited by the embodiment of the present invention.
The fast axis frame 112 drives the multi-pole magnet 220 to rotate by using the motor 230, and drives and resets by using the principle that like poles of the magnet repel each other and unlike poles of the magnet attract each other, thereby driving the mirror 120 to rotate around the first direction X. Therefore, a reset structural member is not required to be additionally arranged for the fast axis, so that the overall structure of the double-bearing vibrating mirror 10 is simpler.
In one embodiment, the dual-bearing galvanometer 10 further comprises a fast-axis bracket 210 and two first bearings 250; the fast shaft frame 112 is fixed on the inner side of the fast shaft support 210, the fast shaft support 210 includes a first end 211 and a second end 212 extending along the first direction X and disposed oppositely, and the first end 211 and the second end 212 are respectively sleeved in the two first bearings 250.
The fast axis frame 112 is connected to both ends of the fixed bracket 111 through the fast axis bracket 210, and both ends of the fast axis bracket 210 are directly sleeved into the first bearing 250 as vibration-exciting plates. When the motor 230 is powered on and drives the multi-pole magnet 220 to rotate, the multi-pole magnet 220 interacts with the first magnetic structure 280 through magnetic poles, so that the vibrating plate is supported by the first bearing 250 to drive the fast axis bracket 210 to integrally rotate, and the reflection lens 120 rotates around the rotation axis of the fast axis bracket 210, thereby realizing one-dimensional scanning.
Therefore, the fast axis frame 112 in the galvanometer driving rack 110 can be driven by the motor 230 to rotate the multi-pole magnet 220, and driven by the way that like poles of the magnet repel each other and unlike poles attract each other, and the first bearing 250 drives the reflection lens 120 and the fast axis rack 210 to integrally rotate, so that the traditional way of rotating by overcoming the rigidity of the torsion beam can be avoided, the material performance degradation can be favorably slowed down, and the service life of the dual-bearing galvanometer 10 can be favorably prolonged.
In one embodiment, the multi-pole magnet 220 is in the shape of a cylinder, a bottom surface of the cylinder facing away from the fast axis frame 112 is fixedly connected with the motor 230, and a bottom surface of the cylinder near the fast axis frame 112 is provided with N poles and S poles which are sequentially distributed at intervals; and the multi-pole magnet 220 is disposed coaxially with the center of the mirror plate 120.
Illustratively, referring to fig. 4 and 5, a pair of first magnetic structures 280 is disposed on both sides of the fast shaft frame 112, the first magnetic structures 280 are symmetrically disposed with respect to the fast shaft bracket 210, an adjustable speed motor 230 is disposed on one side of the fast shaft frame 112, and the adjustable speed motor 230 is connected to a cylindrical multi-pole magnet 220. Wherein the cylindrical multi-pole magnet 220 is coaxial with the center of the mirror plate 120. As shown in fig. 8 and 9, the fixing bracket 111 is provided with a first magnetic structure 280, the first magnetic structure 280 is respectively an S-pole magnet (shown as 2802) and an N-pole magnet (shown as 2801), the multi-pole magnet 220 is driven by the speed-adjustable motor 230 to rotate, so that attractive and repulsive magnetic force is generated between the first magnetic structure 280 and the multi-pole magnet 20, and the direction of the magnetic force is shown by an arrow pointing from N (or S) to S (or N) in fig. 8 and 9; the fast shaft vibrates back and forth under the action of the magnetic force, and at the same time, the vibrating plate is supported by the first bearing 250 to drive the fast shaft support 210 to rotate integrally, so that the reflection lens 120 rotates around the fast shaft support 112, and thus one-dimensional scanning is realized.
It should be noted that the multipole magnet 220 shown in fig. 3 is merely exemplary of 10 pairs N, S poles, based on which the fast axis rotates at 10 times the rotational speed of the motor. It is understood that, in other embodiments, the number of pairs of N, S poles in the multipole magnet 220 may also be set according to the rotation speed of the motor 230, the required speed of the fast axis rotation, and other requirements of the dual-bearing galvanometer 10, which will not be described in detail or limited herein.
In one embodiment, the dual-bearing galvanometer 10 further includes a first angle sensor 260 and a first angle magnet 270, as shown in FIG. 6; the first angle magnet 270 is fixed at one end of the fast axis bracket 210, and the first angle sensor 260 is arranged at one side of the first angle magnet 270, which is far away from the fast axis bracket 210; the first angle sensor 260 is used for sensing the direction and size of the first angle magnet 270 to determine the rotation angle of the fast axis frame 112.
In this way, by providing the first angle sensor 260 and the first angle magnet 270 at the end of the fast axis bracket 210, the first angle magnet 270 can rotate synchronously with the fast axis bracket 210, so that the direction and the size of the first angle magnet 270 can be sensed by the first angle sensor 260 to determine the rotation angle of the fast axis bracket 210, and thus the rotation angle of the fast axis frame 112 and the mirror plate 120 fixed therein. Meanwhile, the overall volume of the dual-bearing galvanometer 10 can be simplified, which is beneficial to the miniaturization design thereof.
As will be understood by those skilled in the art, "angle of rotation" herein may include both a direction of rotation, e.g., clockwise or counterclockwise; a rotation size, such as 5 ° or 8 °, may also be included.
In one embodiment, the dual-bearing galvanometer 10 further comprises a first bearing cover 251, a second bearing cover 252, two first bushings 253, and a first auxiliary bushing 254, as shown in fig. 6; the first bearing cover 251 and the second bearing cover 252 are respectively sleeved outside the two first bearings 250; the two first bushings 253 are respectively used for fixing the first ends 211 of the first bearing 250 and the fast shaft bracket 210 and for fixing the second ends 212 of the first bearing 250 and the fast shaft bracket 210; the first auxiliary bushing 254 is adapted to pass through the first bearing cap 251 and fixedly couple the fast shaft bracket 210 and the first angle magnet 270.
Thus, the bearing can be protected by the bearing cover. Meanwhile, the connection relation of the structural components related to the fast axis direction is stable, so that the overall structure of the double-bearing vibrating mirror 10 is stable, and the service life of the double-bearing vibrating mirror 10 is prolonged.
In one embodiment, the dual-bearing galvanometer 10 further comprises a slow axis support 310, a slow axis coil 320, a first slow axis magnet 330, a second slow axis magnet 340, two second bearings 350, and two bearing seats 360; the slow shaft frame 113 is fixed on the inner side of the slow shaft support 310, the first end 311 of the slow shaft support 310 is fixedly connected with the first end 1111 of the fixed support 111, the second end 312 of the slow shaft support 310 is rotatably connected with the fixed base 100, and the second end 1112 of the fixed support 111 departing from the slow shaft support 310 is rotatably connected with the fixed base 100; a bearing seat 360 is respectively arranged at two ends of the fixed seat 100 along the second direction Y, the second end 312 of the slow-shaft support 310 is sleeved in the second bearing 350 in one bearing seat 360, and the second end 1112 of the fixed support 111 is sleeved in the second bearing 350 in the other bearing seat 360; along the first direction X, the first slow axis magnet 330 and the second slow axis magnet 340 are disposed at opposite sides of the slow axis frame 113, and the slow axis coil 320 is located at an edge of the slow axis frame 113.
The slow shaft frame 113 is rotatably connected to the fixing base 100 through the slow shaft bracket 310 and the fixing bracket 111. That is, the second end 312 of the slow shaft bracket 310 serves as the second bearing 350 in which the vibration-generating plate is directly fitted into the bearing housing 360, and the second end 1112 of the fixed bracket 111 serves as the second bearing 350 in which the vibration-generating plate is directly fitted into the bearing housing 360. A first slow axis magnet 330 and a second slow axis magnet 340 are arranged on two sides of the slow axis frame 113, and the first slow axis magnet 330 and the second slow axis magnet 340 are symmetrically arranged relative to the slow axis frame 113 by taking a straight line parallel to the second direction Y as a symmetry axis; the slow axis coil 320 is provided at the edge of the slow axis frame 113. When the slow axis coil 320 is energized, it generates a lorentz magnetic force in the magnetic field formed by the first slow axis magnet 330 and the second slow axis magnet 340, so that the vibrating plate is supported by the second bearing 350 to drive the slow axis frame 310 and the fixed bracket 111 to integrally rotate, and the mirror plate 120 rotates around the direction (i.e. the second direction Y) perpendicular to the rotation axis (along the first direction X) of the fast axis bracket 210, thereby realizing scanning in another dimension.
In other embodiments, the square area structure in fig. 4 may be divided into only the fixed bracket, and the other structural components in the galvanometer driving bracket 110 may be divided into the slow-axis bracket. On the basis, one end of the slow shaft frame (enclosed in the slow shaft support) is connected with the fixed support, and the other end of the slow shaft frame is connected with the fixed seat. Bearing seats 360 are arranged at two ends of the connecting line on the fixing seat, which are perpendicular to the fast shaft support, one end (a second end 312) of the slow shaft support 310 is used as a second bearing 350 of the vibration generating plate which is directly sleeved in the bearing seats 360, and the other end of the slow shaft support 310 extends out of the fixing support 111 to form an end head which is used as a second bearing 350 of the vibration generating plate which is directly sleeved in the bearing seats 360. The first slow axis magnet 330 and the second slow axis magnet 340 are disposed at both sides of the slow axis support 310, the first slow axis magnet 330 and the second slow axis magnet 340 are symmetrically disposed with respect to the slow axis support 310, and the slow axis coil 320 is disposed at the edge of the slow axis support 310. When the slow axis coil 320 is energized, it generates a lorentz magnetic force in the magnetic field formed by the first slow axis magnet 330 and the second slow axis magnet 340, so that the vibrating plate is supported by the second bearing 350 to drive the slow axis support 310 and the fixed support 111 to integrally rotate, and the mirror plate 120 rotates around the direction perpendicular to the rotation axis of the fast axis support 210, thereby realizing scanning in another dimension.
In this way, the first bearings 250 are disposed at both ends of the fixing bracket 111, and both ends of the fast shaft bracket 210 are directly inserted into the first bearings 250 as vibration-exciting plates. The two ends of the fixing base 110 are provided with second bearings 350, and a connecting line between the two second bearings 350 at the two ends of the fixing base is perpendicular to a connecting line between the two first bearings 250 at the two ends of the fixing bracket 111; thus, the torsion beam arrangement can be avoided, that is, the stiffness of the torsion beam does not need to be overcome when the slow axis frame 113 and the fast axis frame 112 rotate, the rotation of the mirror plate 120 is not affected by vibration, and the service life of the dual-bearing galvanometer 10 can be prolonged.
In one embodiment, the dual-bearing galvanometer 10 further includes a second angle sensor 370 and a second angle magnet 380; the second angle magnet 370 is fixed at the second end 312 of the slow shaft bracket 310, and the second angle sensor 380 is disposed at a side of the second angle magnet 370 facing away from the slow shaft bracket 310; the second angle sensor 380 is used for sensing the direction and size of the second angle magnet 370 to determine the rotation angle of the slow axis frame 113.
In this way, the second angle sensor 370 and the second angle magnet 380 are disposed at the end of the slow shaft bracket 310, so that the second angle magnet 380 and the slow shaft bracket 310 can rotate synchronously, and the direction and the size of the second angle magnet 380 can be sensed by the second angle sensor 370 to determine the rotation angle of the slow shaft bracket 310, and further determine the rotation angle of the slow shaft frame 113 and the mirror plate 120 linked therewith.
The above arrangement also simplifies the overall size of the dual-bearing galvanometer 10, and facilitates the miniaturization design thereof. In addition, the mutual influence of the fast axis direction and the slow axis direction can be avoided, so that the respective rotation angles of the fast axis direction and the slow axis direction can be measured more accurately.
In an embodiment, the dual-bearing galvanometer 10 further comprises a third bearing cover 351 and a fourth bearing cover 352, wherein the third bearing cover 351 and the fourth bearing cover 352 are respectively sleeved outside the two second bearings 350; two second sleeves (not shown) for fixing the second bearing 350 and the second end 312 of the slow shaft bracket 310, and for fixing the second bearing 350 and the second end 1112 of the fixing bracket 111, respectively; a second auxiliary shaft sleeve 354 is further included, and the second auxiliary shaft sleeve 354 is used for passing through the third bearing cap 351 and fixedly connecting the slow shaft bracket 310 and the second angle magnet 380.
Thus, the bearing can be protected by the bearing cover. Meanwhile, the connection relation of the structural components related to the slow axis direction is stable, so that the overall structure of the double-bearing vibrating mirror 10 is stable, and the service life of the double-bearing vibrating mirror 10 is prolonged.
In one embodiment, the dual-bearing galvanometer 10 further includes a second magnetic structure 390, the second magnetic structure 390 is disposed on a side of the slow axis frame 113 near the first slow axis magnet 330, and is disposed on a side of the slow axis frame 113 near the second slow axis magnet 340; the second magnetic structure 390 is used to balance the force applied to the mirror plate 120 when the mirror plate is twisted around the second direction Y under the action of magnetic force to achieve automatic resetting.
The second magnetic structure 390 has a similar action principle to the first magnetic structure 280, which can be understood with reference to the above, and is not described herein again.
The second magnetic structure 390 can generate a magnetic action, so that the mirror 120 is stressed in a balanced manner when rotating around the second direction Y, thereby achieving automatic resetting, and the magnitude of the magnetic action can be controlled to adjust the magnitude of the vibration damping by adjusting the performance of the second magnetic structure 390.
Referring to fig. 10, when the slow shaft bracket 310 deflects at an angle, due to a change in voltage, the direction of the current applied changes, and a zero-value transition occurs in the current value during the change of the current direction, which is equivalent to that the slow shaft coil 320 at the edge of the slow shaft frame 113 is not energized, so that the lorentn magnetic force disappears, and since the force direction between the second magnetic structure 390 and the first slow shaft magnet 330 and the second slow shaft magnet 340 is horizontal, the force is balanced and the slow shaft bracket 310 drives the slow shaft frame 113 to reset when the slow shaft frame 113 rotates to a horizontal position around the second bearing 350.
In the dual-bearing galvanometer 10 provided by the embodiment of the invention, the first bearings 250 are arranged at the two ends of the fixed support 111, and the first bearings 250 are directly sleeved at the two ends of the fast-axis support 210 as vibration-starting plates. Two ends of the fixed seat 100 are provided with second bearings 350, the connecting line of the second bearings 350 at the two ends of the fixed seat 100 is perpendicular to the connecting line of the first bearings 250 at the two ends of the fixed bracket 111, one end of the slow shaft frame 113 far away from the fixed bracket 111 is provided with a second angle sensor 380 and a second angle magnet 370, and one end of the fast shaft bracket 210 is provided with a first angle sensor 260 and a first angle magnet 270; the angle sensor determines the rotation angles in the slow axis direction and the fast axis direction by sensing the large direction and the large size of the magnet of the angle sensor, respectively, thereby determining the rotation angles of the mirror plates 120 in two dimensions perpendicular to each other. The first magnetic structure 280 and the multi-pole magnet 220 generate attractive and repulsive magnet forces to rotate the fast axis frame 112 around the rotating axis direction of the fast axis support 210 and realize resetting, so that one-dimensional scanning is realized; the slow axis frame 113 is rotated around a direction perpendicular to the fast axis support 210 by an electromagnetic force between the slow axis coil 320 at the edge of the slow axis frame 113 and the magnets at both sides (i.e., the first slow axis magnet 330 and the second slow axis magnet 340), thereby implementing scanning of another dimension; the extension directions of the two dimensions are mutually perpendicular. The positions of the slow shaft frame 113 close to the magnets on the two sides (i.e., the first slow shaft magnet 330 and the second slow shaft magnet 340) are respectively provided with a second magnetic structural member 390, so that the vibrating mirror can be stressed in a balanced manner when rotating in two directions under the magnetic action to realize automatic reset, and the size of the magnetic action can be controlled to adjust the size of vibration damping.
In the above embodiment, an improvement of the embodiment of the present invention is that:
a. the mode that the reflecting mirror piece in the vibrating mirror rotates in two directions is realized by adopting the bearing support and the two pairs of magnets so as to replace the traditional mode that the rigidity of the torsion beam is overcome to rotate, the effect of vibration is avoided, and the service life of the double-bearing vibrating mirror can be prolonged.
b. The resetting in the rotation process of the slow shaft is completed in a way that the magnetic structural part generates magnetic force, the resetting way is simple, and the resetting precision is higher; the fast axle itself can drive the rotatory in-process realization of utmost point magnet through the motor of adjustable speed and rotate and reset, need not additionally to set up the structure that resets, does benefit to and makes duplex bearing mirror overall structure simple that shakes.
c. Installation mode of angle sensor: an angle sensor and a sensor magnet are arranged at the tail end of the bearing along the rotation direction of the slow shaft and the fast shaft so as to respectively detect the rotation angle of the slow shaft and the rotation angle of the fast shaft, so that the rotation angle detection of the two shafts cannot be influenced; the detection precision is higher, and the degree of integration is higher, is favorable to the miniaturized design of duplex bearing galvanometer.
On the basis of the above embodiment, the embodiment of the invention also provides a laser radar. The lidar may include any one of the dual-bearing galvanometers provided in the foregoing embodiments, and therefore, the lidar also has the beneficial effects of the dual-bearing galvanometer in the foregoing embodiments, and the same points may be understood with reference to the explanation of the dual-bearing galvanometer in the foregoing description, and are not described again here.
In other embodiments, the lidar may include other structural components known to those skilled in the art besides the dual-bearing vibrating mirror, and the embodiment of the present invention is not described or limited herein.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A dual-bearing galvanometer, comprising:
the device comprises a fixed seat, a galvanometer driving frame, a reflecting lens, a first magnetic structural part, a multi-pole magnet and a motor;
the galvanometer driving frame comprises a fixed support, a fast axis frame and a slow axis frame, and the reflecting mirror is installed in the fast axis frame; the fast axis frame is rotationally connected to the inner side of the fixed support, the slow axis frame is fixedly connected to the outer side of the fixed support, and the galvanometer driving frame is rotationally connected into the fixed seat; and
the first magnetic structural parts are symmetrically arranged on two sides of the fast axis frame, and the multi-pole magnet is arranged on one side of the fast axis frame and is opposite to the first magnetic structural parts; the motor with multipolar magnet deviates from one side fixed connection of fast axle frame, the motor is used for driving multipolar magnet rotates, so that multipolar magnet with first magnetic structure spare passes through the magnetic pole interact, drives fast axle frame is around first direction wrench movement, slow axle frame is around second direction wrench movement through the driven mode of lorentz power, drives the fixed bolster centers on the second direction wrench movement, first direction with the second direction is perpendicular.
2. The double-bearing galvanometer of claim 1, wherein the multipole magnet is in the shape of a cylinder, a bottom surface of the cylinder facing away from the fast axis frame is fixedly connected with the motor, and a bottom surface of the cylinder close to the fast axis frame is provided with N poles and S poles which are sequentially distributed at intervals;
and the multipole magnet is coaxially arranged with the center of the reflector plate.
3. The dual-bearing galvanometer of claim 1, further comprising a fast axis mount and two first bearings;
the fast axis frame is fixed on the inner side of the fast axis support, the fast axis support comprises a first end and a second end, the first end and the second end extend along the first direction and are oppositely arranged, and the first end and the second end are sleeved in the two first bearings respectively.
4. The dual-bearing galvanometer of claim 3, further comprising a first angle sensor and a first angle magnet;
the first angle magnet is fixed at one end of the fast shaft support, and the first angle sensor is arranged on one side, away from the fast shaft support, of the first angle magnet; the first angle sensor is used for sensing the direction and the size of the first angle magnet so as to determine the rotating angle of the fast axis frame.
5. The dual-bearing galvanometer of claim 4, further comprising a first bearing cap and a second bearing cap; the first bearing cover and the second bearing cover are respectively sleeved outside the two first bearings;
the two first shaft sleeves are respectively used for fixing the first bearing and the first end of the fast shaft support and fixing the first bearing and the second end of the fast shaft support;
the first auxiliary shaft sleeve is used for penetrating through the first bearing cover and fixedly connecting the fast shaft support and the first angle magnet.
6. The dual-bearing galvanometer of claim 1, further comprising a slow axis carrier, a slow axis coil, a first slow axis magnet, a second slow axis magnet, two second bearings, and two bearing mounts;
the slow shaft frame is fixed on the inner side of the slow shaft support, the first end of the slow shaft support is fixedly connected with the first end of the fixed support, the second end of the slow shaft support is rotatably connected with the fixed seat, and the second end of the fixed support, which is far away from the slow shaft support, is rotatably connected with the fixed seat; the two ends of the fixed seat along the second direction are respectively provided with one bearing seat, the second end of the slow shaft support is sleeved in the second bearing in one bearing seat, and the second end of the fixed support is sleeved in the second bearing in the other bearing seat;
along the first direction, the first slow axis magnet and the second slow axis magnet are arranged on two opposite sides of the slow axis frame, and the slow axis coil is located on the edge of the slow axis frame.
7. The dual-bearing galvanometer of claim 6, further comprising a second angle sensor and a second angle magnet;
the second angle magnet is fixed at the second end of the slow shaft support, and the second angle sensor is arranged on one side of the second angle magnet, which is far away from the slow shaft support; the second angle sensor is used for sensing the direction and the size of the second angle magnet so as to determine the rotation angle of the slow shaft frame.
8. The dual-bearing galvanometer of claim 7, further comprising third and fourth bearing caps, said third and fourth bearing caps respectively fitted over the outer sides of the two second bearings;
the two second shaft sleeves are respectively used for fixing the second bearing and the second end of the slow shaft bracket and fixing the second bearing and the second end of the fixed bracket;
the second auxiliary shaft sleeve is used for penetrating through the third bearing cover and fixedly connecting the slow shaft support and the second angle magnet.
9. The dual-bearing galvanometer of claim 6, further comprising a second magnetic structure disposed on a side of the slow axis frame proximate to the first slow axis magnet and on a side of the slow axis frame proximate to the second slow axis magnet;
the second magnetic structural part is used for balancing the stress of the reflector when the reflector is twisted around the second direction under the action of magnetic force so as to realize automatic resetting.
10. A lidar comprising the double bearing galvanometer of any one of claims 1-9.
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| CN109521561A (en) * | 2018-12-11 | 2019-03-26 | 苏州希景微机电科技有限公司 | A kind of electromagnetism MEMS micromirror |
| CN110376566A (en) * | 2019-07-12 | 2019-10-25 | 深圳市镭神智能系统有限公司 | A kind of twin shaft scanning system |
| CN110471045A (en) * | 2019-09-11 | 2019-11-19 | 深圳市镭神智能系统有限公司 | A kind of twin shaft galvanometer |
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| JP2015163921A (en) * | 2014-02-28 | 2015-09-10 | ブラザー工業株式会社 | Light deflection device and image forming apparatus |
| US9798135B2 (en) * | 2015-02-16 | 2017-10-24 | Apple Inc. | Hybrid MEMS scanning module |
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| CN109521561A (en) * | 2018-12-11 | 2019-03-26 | 苏州希景微机电科技有限公司 | A kind of electromagnetism MEMS micromirror |
| CN110376566A (en) * | 2019-07-12 | 2019-10-25 | 深圳市镭神智能系统有限公司 | A kind of twin shaft scanning system |
| CN110471045A (en) * | 2019-09-11 | 2019-11-19 | 深圳市镭神智能系统有限公司 | A kind of twin shaft galvanometer |
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