JP2008242207A - Shake correcting device and imaging apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To appropriately position a rotating mirror part while saving power. <P>SOLUTION: The shake correcting device for an imaging apparatus includes: an imaging part; an MEMS mirror 300 having a mirror main body (1b) that is supported by a pan-axis torsion spring 302 and a tilt-axis torsion spring 306 so that it can freely rotate about two axes nearly perpendicular to each other; a driving coil for rotation about pan axis 304 and a driving coil for rotation about tilt axis 305 that are arranged in the magnetic fields generated by a magnet for rotation about pan axis 308 and a magnet for rotation about tilt axis 309, and also, disposed in the MEMS mirror; a rotational driving part to supply the power to the coils 304 and 305; a shake amount calculation part to detect the shake amount upon imaging an object by the imaging part; and a control part to control the amount and direction of the power supply from the rotational driving part to the driving coil for rotation about pan axis 304 and the driving coil for rotation about tilt axis 305 on the basis of the shake amount calculated by the shake amount calculating part, and to rotate the MEMS mirror in a direction P and a direction Y. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a shake correction apparatus and an imaging apparatus that correct shake during imaging of a subject.

2. Description of the Related Art Conventionally, when a digital camera is photographed by hand, image blur due to camera shake, posture blur, subject motion, or the like may be noticeable in the case of a lens with a long focal length, macro photography, or a dark subject.
Such image blur can be prevented to some extent by brightening the lens, increasing the imaging sensitivity, setting the shutter speed fast, and learning by the photographer, but there are limitations. In particular, since video cameras frequently use camera work and zoom, if camera movement or camera shake is severe, it will be difficult to view due to screen shaking, and various shake correction devices have been developed.

Compared to an image processing method that corrects image blur by changing the frame cut out from the captured image in accordance with the detected angular velocity and amount of blur, the image stabilizer corrects image blur by moving the optical system mechanically. The correction method is more advantageous in terms of image quality.
There are various optical correction methods such as the VAP (variable vertical prism) type and the built-in shift lens type. Generally, the mechanism becomes complicated, the lens barrel becomes long, chromatic aberration and decentration aberration occur, and conventional lenses. There were few things that could not be diverted, and had advantages and disadvantages, and were small and easy to use for high-definition still images and video recording.

For example, in the method using a rotating mirror, the shake can be corrected by rotating the mirror in the opposite direction by each (Δθ / 2) half of the camera shake angle (Δθ) with a relatively simple configuration, and fluctuations in aberrations. There is an advantage that there is no chromatic aberration (see, for example, Patent Document 1).
JP 2004-219930 A

  However, in the case of Patent Document 1 and the like, since the rotary mirror is rotated by the piezoelectric element, the positioning and fixing mechanism of the mirror becomes complicated, and it is difficult to control at the time of blurring correction and perform it accurately. There is a problem that can not be.

  The CCD shift type that moves the image sensor side up, down, left, and right has the advantage that there is no difficulty such as aberration and the conventional lens can be diverted, but in order to move the entire image sensor, the mounting method of the image sensor, the stress of the wiring part, There is a problem that reaction force interferes with driving. Furthermore, there is a problem that a large image sensor has a large actuator and is inferior in durability.

  Accordingly, an object of the present invention is to provide a shake correction apparatus and an imaging apparatus that are small in size and excellent in controllability.

The shake correction apparatus according to the first aspect of the present invention provides:
An imaging unit having an imaging lens unit that forms an optical image of a subject;
A rotating mirror unit having a rotating mirror which is arranged on the object side of the imaging lens unit or in the optical path of the imaging unit and is supported so as to be rotatable about an axis in one direction and the other direction intersecting each other. ,
Magnetic field generating means for generating a predetermined magnetic field;
A drive coil disposed in the rotating mirror portion and disposed in the magnetic field generated by the magnetic field generating means;
Energization means for energizing the drive coil;
A blur amount detecting means for detecting a blur amount when the subject is imaged by the imaging unit;
Based on the shake amount detected by the shake amount detection means, the energization means controls the energization amount and energization direction of the drive coil to rotate the rotating mirror around the axis in the one direction and the other direction. A shake correction rotation control means to be moved;
It is characterized by having.

According to a second aspect of the present invention, in the shake correction apparatus according to the first aspect,
The rotating mirror unit is mounted with the rotating mirror and supported by an inner rotating table supported by the supporting member extending in the one direction and an outer surface supported by the supporting member extended in the other direction. With a turntable,
The moment of inertia of the inner turntable is smaller than the moment of inertia of the outer turntable.

According to a third aspect of the present invention, in the shake correction apparatus according to the first aspect,
The rotating mirror portion is mounted with the rotating mirror, and is supported by an inner rotating table supported by the torsion spring extending in the one direction and the torsion spring extending in the other direction. And an outer turntable
The resonance frequency of the inner turntable is higher than the resonance frequency of the outer turntable.

According to a fourth aspect of the present invention, in the shake correction apparatus according to the first aspect,
The rotating mirror unit is mounted with the rotating mirror, and is mounted with the inner rotating table supported by the torsion spring extended in the one direction, the inner rotating table and the rotating mirror, An outer turntable supported by the torsion spring extending in the other direction,
The resonance frequency of the inner turntable and the outer turntable is substantially the same.

The imaging device of the invention according to claim 5
The shake correction apparatus according to any one of claims 1 to 4,
Pan operation instruction means for outputting a pan operation instruction signal for pan operation;
Tilt operation instruction means for outputting a tilt operation instruction signal for tilt operation;
Based on the pan operation instruction signal output from and input from the pan operation instruction means, the energization means and the energization direction to the drive coil by the energization means are controlled to move the rotating mirror portion around the axis in the other direction. Panning rotation control means for panning;
Based on the tilt operation instruction signal output and input from the tilt operation instruction means, the energization means and the energization direction of the drive coil by the energization means are controlled to move the rotating mirror portion around the unidirectional axis. A tilt motion rotation control means for tilting; and
It is characterized by having.

The invention described in claim 6 is the imaging apparatus according to claim 5,
The shake correction rotation control means does not perform control to rotate the rotation mirror around the axis in the other direction during the pan operation of the rotation mirror unit by the pan operation rotation control means, and During the tilting operation of the rotating mirror portion by the tilting operation rotation control means, control for rotating the rotating mirror around the one-direction axis is not performed.

  According to the present invention, it is possible to provide a shake correction device that is small in size and excellent in controllability during shake correction.

  Hereinafter, specific embodiments of the present invention will be described with reference to the drawings. However, the scope of the invention is not limited to the illustrated examples.

[Embodiment 1]
FIG. 1 is a diagram schematically illustrating a schematic configuration of an imaging apparatus 100 according to the first embodiment to which the present invention is applied. FIG. 2A is a front view schematically showing the external appearance of the imaging apparatus 100, and FIG. 2B is a rear view schematically showing the external appearance of the imaging apparatus 100.
In the following description, the left-right direction (for example, the horizontal direction) substantially orthogonal to the front-rear direction of the imaging apparatus 100 that is the main imaging direction in a state where the imaging apparatus 100 is held toward the subject is the H-axis direction, A vertical direction (for example, a vertical direction) substantially orthogonal to the front-rear direction and the left-right direction is defined as a V-axis direction.

The imaging apparatus 100 according to the first embodiment performs shake correction by using a MEMS mirror (rotating mirror unit) 300 that bends the optical axis of the imaging unit 1 by approximately 90 °, such as camera shake or image blurring during imaging of a subject. Is.
Specifically, for example, as illustrated in FIGS. 1 and 2, the imaging apparatus 100 includes an imaging unit 1, a mirror rotation driving unit 2, a signal processing unit 3, a rotation amount detection unit 4, and a photometry unit. 5, ranging unit 6, light emitting unit 7, power supply unit 8, operation input unit 9, display unit 10, image memory 11, external memory 12, control unit 13, and the like. Yes.

  The imaging unit 1 captures still images and moving images. The imaging unit 1 also bends the photographing optical axis of subject light incident from the front of the apparatus (subject side) by approximately 90 °. Specifically, as shown in FIG. 1, an outer lens 1a, a mirror body (rotating mirror) 1b, an inner lens 1c, an image sensor 1d, a lens driving unit (not shown), and the like are provided.

As shown in FIG. 2A, the outer lens 1 a is disposed so as to be exposed on the front side of the imaging device 100.
The mirror main body 1b is disposed in a normal state with an inclination of approximately 45 ° with respect to the front-rear direction of the apparatus main body, and bends the subject light that has passed through the outer lens 1a by approximately 90 ° (details will be described later).
The inner lens 1c is composed of, for example, four lenses and causes the imaging unit 1 to realize a focus function and a zoom function (see FIGS. 5A and 5B).
The imaging device 1d converts subject light (optical image of the subject) that has passed through the inner lens 1c into a two-dimensional image signal, and outputs the signal to the signal processing unit 3 such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal-oxide). Semiconductor) etc.

  The signal processing unit 3 includes an A / D converter and the like, and outputs an analog signal output from the imaging unit 1 to the imaging control unit 13a as digital image data.

The mirror rotation drive unit 2 includes a rotation drive unit 21 around the left and right axis, a rotation drive unit 22 around the tilt axis, and the like.
The left and right axis rotation drive unit 21 drives the mirror main body 1b of the MEMS mirror 300 to rotate about the axis in the H axis direction (one direction) when the imaging apparatus 100 performs the shake correction operation in the Pitch (P) direction. It is for making it happen.
When the image pickup apparatus 100 performs the shake correction operation in the Yaw (Y) direction, the tilt axis rotation drive unit 22 tilts the mirror body 1b in a tilt axis direction (other direction) that is tilted by a predetermined angle with respect to the V axis direction. This is for rotationally driving around the axis.

Below, the structure of the MEMS mirror 300 is demonstrated with reference to FIG.3 and FIG.4.
FIG. 3 is a perspective view schematically showing the MEMS mirror 300. FIG. 4 is a perspective view schematically showing a uniaxial MEMS mirror 400 in order to explain the operation principle of the MEMS mirror 300.

  The MEMS mirror 300 is formed by performing fine processing on a small single crystal silicon semiconductor substrate (MEMS substrate) or the like, and as shown in FIG. 3, the mirror body 1b, the inner turntable 301, and the left-right axis twist. Spring 302, outer turntable 303, drive coil 304 for turning about the left and right axis, drive coil 305 for turning about the tilted axis, tilted torsion spring 306, MEMS substrate 307, and magnet 308 for turning about the left and right axis. And a magnet 309 for rotating around the tilt axis, a yoke 310 and the like.

The mirror body 1b is a reflective mirror made of a metal thin film of about several millimeters square, for example.
The inner turntable 301 has a substantially rectangular outer shape, and the mirror main body 1b is attached to the approximate center thereof. In addition, left and right axial torsion springs 302 extending in the H-axis direction (one direction) are connected to both end portions on the H-axis direction side of the inner turntable 301.
Note that the end of the left / right axis torsion spring 302 opposite to the inner turning table 301 is connected to the inner side surface of the outer turning table 303.
Thereby, the inner turntable 301 and the mirror body 1b are supported by the outer turntable 303.

The outer turntable 303 has an outer shape that is substantially “B” -shaped, and is provided with drive coils for turning in the P direction and Y direction of the mirror body 1b. The left / right axis rotation drive coil 304 and the tilt axis rotation drive coil 305 are arranged in a magnetic field generated by the left / right axis rotation magnet 308 and the tilt axis rotation magnet 309.
In addition, inclined shaft torsion springs 306 extending in the direction of the tilt axis (in the other direction) are connected to both ends of the outer turntable 303 on the tilt axis direction side.
Note that the end of the inclined shaft torsion spring 306 opposite to the outer rotating base 303 side is connected to the inner surface of the MEMS substrate 307.

The outer shape of the MEMS substrate 307 is formed in a substantially “B” shape, and two magnets 308 for rotating around the left and right axes of the mirror body 1 b are disposed outside the MEMS substrate 307 in the tilt axis direction. Two magnets 309 for rotating around the tilt axis of the mirror body 1b are disposed on the outer side in the H-axis direction.
On the outside of the magnet 308 for rotating around the left and right axis and the magnet 309 for rotating around the tilt axis, a yoke 310 whose outer shape is formed in a substantially “B” shape is disposed.
Here, the left and right axis rotation magnet 308 and the tilt axis rotation magnet 309 constitute a magnetic field generation means.

The MEMS mirror 300 configured as described above is provided with a drive coil 304 for turning around the left and right axis and a drive coil 305 for turning around the tilt axis placed in the magnetic fields Bp and By by the magnet 308 for turning around the left and right axis and the magnet 309 for turning around the tilt axis. On the other hand, by passing currents ip and iy from the mirror rotation driving unit 2, electromagnetic Lorentzka Fp and Fy are generated, and the inner side to a position that balances the restoring force of the left and right axis torsion spring 302 and the inclined axis torsion spring 306. The rotating table 301 can be driven to rotate around a shaft of the left-right axis torsion spring 302, and the outer rotating table 303 can be driven to rotate around the axis of the inclined shaft torsion spring 306 by a predetermined angle.
Here, the left / right axis torsion spring 302, the left / right axis rotation drive coil 304, the left / right axis rotation magnet 308, and the yoke 310 constitute the left / right axis rotation drive unit 21, and rotate around the tilt axis. The drive coil 305, the tilt axis torsion spring 306, the tilt axis rotation magnet 309, and the yoke 310 constitute the tilt axis rotation drive unit 22.

Here, the principle of operation of the rotating MEMS mirror 300 will be described in detail with reference to FIG.
As shown in FIG. 4, in the case of a uniaxial MEMS mirror 400, a reflecting mirror 403 is provided on a beam-like movable plate (rotating table) 402 finely processed on a semiconductor material substrate 401 such as single crystal silicon, and the supporting mirror 403 is supported. When a current i is passed through a drive coil 406 disposed around the mirror in a state where a magnetic field having a magnetic flux density B is applied by a permanent magnet 405 in a direction substantially orthogonal to the torsion spring 404 serving as an axis, rotation by Lorentz force F occurs. Torque is generated, and the mirror of the turntable can be rotated by a predetermined angle to a position that balances with the restoring force of the torsion spring.
The Lorentz force F is proportional to the magnetic flux density B, the drive current i, and the number of turns n of the drive coil 406.

  By controlling the magnitude and direction of the current i flowing through the drive coil 406, the rotation angle posture and direction of the reflection mirror 403 can be controlled. For example, as shown in FIG. 4, when the current i flows in the direction indicated by the white arrow, the turntable 402 on which the reflection mirror 403 is mounted rotates in the direction indicated by the arrow, When the current i flows in the opposite direction, the turntable 402 on which the reflection mirror 403 is mounted rotates in the opposite direction.

Since the inner turntable 301 is smaller in size and weight than the outer turntable 303, the moment of inertia is small and the response speed is high. In contrast, the outer turntable 303 is larger in size by about two turns than the inner turntable 301, and is rotated including the weight of the inner turntable 301, so that the moment of inertia is large. The response speed becomes lower. For example, when the inner turning table 301 and the outer turning table 303 are designed so that the deflection angle and the correction angle range are the same, the outer turning table 303 larger than the inner side has a response speed of the inner turning table 301. It becomes low to about 1/2 to 1/5 (response becomes slow).
Therefore, the response speed of the inner turntable 301 is higher than the response speed of the outer turntable 303, and the rotation direction of the inner turntable 301 is higher in vibration frequency and vibration frequency due to camera shake. On the other hand, the direction of rotation of the outer turntable 303 is low because the vibration frequency due to camera shake is low and the response speed is low (slow). The Y direction is also good (the yaw angle, the lateral rotation).

  For example, as shown in FIGS. 5A and 5B, the inner lens 1c includes, in order from the subject side, a first lens c1, a second lens c2, a third lens c3, a diaphragm c5, A fourth lens c4 is provided side by side.

The first lens c <b> 1 is a focus type convex lens fixed at a predetermined position, and allows subject light reflected by the MEMS mirror 300 to pass therethrough. That is, the first lens c1 moves in the optical axis direction according to the driving of the lens driving unit such as a motor or a gear during the focusing operation of the automatic focusing (AF) process.
The second lens c2 is a variable magnification concave lens (variator) provided so as to be movable in the optical axis direction, and allows the subject light that has passed through the first lens c1 to pass therethrough. That is, during the zoom operation, the second lens c2 moves so as to approach the first lens c1 on the telephoto side of the zoom according to the driving of the lens driving unit (see FIG. 5A), and the third lens on the wide side. It moves so that it may approach c3 (refer FIG.5 (b)).
The third lens c3 is a compensation type concave lens (compensator) fixed at a predetermined position, and allows the subject light that has passed through the second lens c2 to pass therethrough.
The stop c5 is for adjusting the amount of light, and blocks part of the light that has passed through the third lens c3 and allows the rest to pass.
The fourth lens c4 is a relay-type convex lens (imaging lens) fixed at a predetermined position, and forms an image of subject light that has passed through the diaphragm c5 on the imaging surface of the imaging device 1d.

The rotation amount detection unit 4 includes a P-direction angular velocity sensor 41, a Y-direction angular velocity sensor 42, and the like.
The P-direction angular velocity sensor 41 detects the amount of rotation of the imaging apparatus main body in the Pitch (P) direction. The P-direction angular velocity sensor 41 includes a vibrator 41a, an angular velocity detector 41b, and the like. The angular velocity detection unit 41b detects the angular velocity in the P direction based on the signal output from the transducer 41a.
The Y-direction angular velocity sensor 42 detects a rotation amount (camera shake amount) in the Yaw (Y) direction of the imaging apparatus main body. The Y-direction angular velocity sensor 42 includes a vibrator 42a, an angular velocity detector 42b, and the like. The angular velocity detection unit 42b detects the angular velocity in the Y direction based on the signal output from the vibrator 42a.

  The photometry unit 5 is for measuring (calculating) the brightness of the subject in automatic exposure (AE) processing.

  The distance measuring unit 6 is for measuring (calculating) a distance to a subject by a phase difference detection method or a contrast detection method in an automatic focusing (AF) process.

  The light emitting unit 7 emits light when the subject is imaged. The light-emitting unit 7 includes a strobe body 7a, a light-emission control unit 7b, and the like, and is output and input from the light-emission control unit 7b based on a predetermined operation of the operation input unit 9 by the user or control by the control unit 13. The flash fires in response to the signal.

  The power supply unit 8 includes a battery 8a, a power supply control unit 8b, and the like, and supplies power to each unit of the imaging apparatus 100.

  The operation input unit 9 is for performing a predetermined operation of the imaging apparatus 100. The operation input unit 9 includes an operation unit 91, an input circuit 92, and the like.

The operation unit 91 includes a power switch 91a, a mode changeover switch 91b for switching a shooting mode, a release button 91c for starting / stopping a still image release operation and moving image shooting, an Up / Down key 91d for performing a zoom operation, a shooting condition, A menu button 91e for performing other settings, a cursor key 91f, a setting button 91g, a display switching button 91h, and the like are provided.
The release button 91c is configured to be capable of, for example, a two-stage pressing operation including a half-pressing operation and a full-pressing operation, and outputs a predetermined operation signal corresponding to each operation stage.
The input circuit 92 is for inputting the operation signal output from the operation unit 91 and input to the control unit 13.

  The display unit 10 displays an image captured by the imaging unit 1. That is, the display unit 10 includes a display control unit (not shown), an image display unit 10a, and the like, and displays a predetermined image on the image display unit 10a such as a liquid crystal monitor based on an output signal from the display control unit.

The image memory 11 is, for example, a built-in memory that stores image data and the like.
For example, the external memory 12 is a memory that is detachably provided in the main body of the imaging apparatus 100 and stores image data and the like. The external memory 12 is connected to the control unit 13 via a memory interface (memory IF) 121.

  The control unit 13 includes a photographing control unit 13a, a digital image processing unit 13b, an image buffer memory 13c, a shake amount calculation unit 13d, a shake correction amount calculation unit 13e, and the like.

  The imaging control unit 13a controls processing related to imaging of the subject by the imaging unit 1, such as blur correction processing, according to various processing programs.

The digital image processing unit 13b performs predetermined image processing on the image signal output from the imaging control unit 13a.
The image buffer memory 13c temporarily stores an image signal after image processing.

  The shake amount calculation unit 13d detects the amount of shake when the image pickup unit 1 images a subject as a shake amount detection unit. That is, the shake amount calculation unit 13d calculates the shake amount such as camera shake and support posture shake based on the angular velocity in the P direction detected by the P direction angular velocity sensor 41 and the angular velocity in the Y direction detected by the Y direction angular velocity sensor 42. Calculate.

The shake correction amount calculation unit 13e calculates the shake correction amount in the shake correction process, that is, the rotation direction and the rotation amount of the MEMS mirror 300, based on the shake amount calculated by the shake amount calculation unit 13d. In other words, the shake correction amount calculation unit 13e includes a rotation drive coil 304 and a tilt axis about the left and right axis from the rotation drive unit 2 that define the rotation angle and rotation direction of the inner rotation table 301 and the outer rotation table 303. The amount of energization and the direction of energization for the rotation drive coil 305 are calculated.
Then, the control unit 13 serves as a shake correction rotation control unit based on the energization amount and the energization direction for the left and right axis rotation drive coil 304 and the tilt axis rotation drive coil 305 calculated by the shake correction amount calculation unit 13e. Thus, the mirror main body 1b is rotated in the P direction and the Y direction by controlling energization from the rotation driving unit 2 to the left and right axis rotation drive coil 304 and the tilt axis rotation drive coil 305.

Hereinafter, the blur correction operation will be described in detail with reference to FIGS. 6 (a) to 6 (c).
FIG. 6A is a diagram schematically illustrating a state without camera shake, FIG. 6B is a diagram schematically illustrating a state in which camera shake occurs, and FIG. It is the figure which showed typically the state which corrected camera shake.
6A to 6C exemplify the shake correction operation by rotating the mirror in the P direction (pitch and back and forth), the Y direction (the yaw angle and the rotation in the horizontal direction). Correction operations in other rotation directions such as movement (horizontal rotation) are substantially the same.

For example, when a camera shake occurs in the state shown in FIG. 6A, the camera shake is calculated by the camera shake amount calculation unit 13d according to the angular velocity detected by the rotation amount detection unit 4 (P-direction angular velocity sensor 41 or Y-direction angular velocity sensor 42). The amount (blur angle Δθ; see FIG. 6B) is calculated.
Then, the shake correction amount calculation unit 13e calculates the energization amount and the energization direction for the left and right axis rotation drive coil 304 and the tilt axis rotation drive coil 305 based on the shake amount calculated by the shake amount calculation unit 13d. Then, the angle posture of the mirror body 1b is driven and controlled so that the mirror body 1b is rotated in the opposite direction by Δθ / 2.
Thus, the optical axis is stably maintained even when image blurring occurs due to camera shake or support posture blur.

Next, the still image capturing process will be described with reference to FIG.
Here, FIG. 7 is a flowchart illustrating an example of an operation related to the still image capturing process.

As shown in FIG. 7, first, when the still image shooting mode is set based on a predetermined operation of the mode changeover switch 91b of the operation unit 91 by the user (step S1), shooting is performed under the control of the shooting control unit 13a. Setting of conditions, photometry processing, white balance processing, automatic focusing processing, etc. are performed (step S2).
And the control part 13 displays a through image on the display part 10 based on the image signal which concerns on the image of the to-be-photographed object by the imaging part 1 (step S3).

Subsequently, when the user performs a half-press operation on the release button 91c (step S4; YES), the imaging control unit 13a determines whether or not the shake correction function is set to ON so as to execute the shake correction process. (Step S5). If it is determined that the shake correction function is set to ON (step S5; YES), the shake amount calculation unit 13d detects the angular velocity in the P direction and the Y direction angular velocity sensor detected by the P direction angular velocity sensor 41. Based on the angular velocity in the Y direction detected by 42, the amount of shake (ΔΘP, ΔΘY) such as camera shake or support posture shake is calculated and detected (step S6).
Then, the shake correction amount calculation unit 13e defines the rotation direction and the rotation amount (ΔΘP / 2, ΔΘY / 2) of the MEMS mirror 300 in the shake correction process based on the shake amount calculated by the shake amount calculation unit 13d. The energization amount and energization direction (blur correction amount) for the right and left axis rotation drive coil 304 and the tilt axis rotation drive coil 305 are calculated (step S7).
Subsequently, the control unit 13 rotates around the left and right axis based on the energization amount and energization direction with respect to the left and right axis rotation drive coil 304 and the tilt axis rotation drive coil 305 calculated by the shake correction amount calculation unit 13e. By controlling the energization from the rotation drive unit 2 to the drive coil 304 for movement and the rotation drive coil 305 about the tilt axis, a shake correction operation for rotating the mirror body 1b in the P direction and the Y direction is executed (step S8). .

Subsequently, when the user fully presses the release button 91c (step S9; YES), the process is substantially the same as step S5 to step S8, that is, whether or not the shake correction function is set to ON (step S9; YES). Step S10), shake amount detection (step S11), shake correction amount calculation (step S12), and shake correction operation (step S13) are performed.
Then, the shooting control unit 13a controls the image pickup unit 1 to pick up an image of the subject under a predetermined exposure condition (step S14), performs image signal encoding and compression encoding, and records them in the image memory 11. (Step S15).

If it is determined in step S4 that the release button 91c is not half-pressed (step S4; NO), or if it is determined in step S5 that the shake correction function is not set to ON. (Step S5; NO), the control part 13 transfers to step S9, and controls execution of the process after it.
If it is determined in step S9 that the release button 91c is not fully pressed (step S9; NO), the control unit 13 proceeds to step S5 and executes the subsequent processing. Control.
Further, when it is determined in step S10 that the shake correction function is not set to ON (step S10; NO), the control unit 13 proceeds to step S14 and controls the execution of the subsequent processing. .

  As described above, according to the imaging apparatus 100 of the first embodiment, based on the shake amount calculated by the shake amount calculation unit, the left and right axis rotation drive coil 304 and the tilt axis rotation by the mirror rotation drive unit 2. The mirror body 1b supported by the left / right axis torsion spring 302 and the inclined axis torsion spring 306 can be rotated in the P direction and the Y direction by controlling the energization amount and the energization direction to the driving coil 305 for movement. Therefore, it is possible to appropriately control the mirror used for blur correction with a simple configuration and power saving, and to reduce the size of the blur correction unit. As a result, it is possible to provide the imaging device 100 that is small in size and excellent in controllability during blur correction.

In addition, since single crystal silicon is used, there is no metal fatigue due to crystal defects, so durability can be increased and the life can be extended. Can be less affected.
In addition, the angle range in which blurring can be corrected can be increased to about ± 5 to 30 °, and aberrations and the like can be eliminated. In addition, the conventional optical system can be used as it is. Obtainable.

Further, since the response speed of the inner turntable 301 that rotates in the P direction is higher than the response speed of the outer turntable 303 that rotates in the Y direction, the size and weight are small and the moment of inertia is small. The rotation operation of the inner turntable 301 having a high response speed is performed in a correction direction in the P direction (pitch and vertical rotation) that requires a higher (faster) response speed during correction drive, with a higher vibration frequency and vibration frequency due to camera shake. The Y-direction (bias angle, lateral direction) that can be used for dynamic driving and may be used to rotate the outer turntable 303 with a low response speed, which may have low vibration frequency and low (slow) response speed. The rotation can be used for correction rotation driving.
Therefore, it is possible to appropriately perform a shake correction process in accordance with the actual state of hand shake in hand-held shooting.

[Embodiment 2]
Hereinafter, the imaging apparatus 200 according to the second embodiment will be described with reference to FIGS.
Here, FIG. 8 is a block diagram illustrating a schematic configuration of the imaging apparatus 200 according to the second embodiment to which the present invention is applied.
As illustrated in FIG. 8, the imaging apparatus 200 according to the second embodiment includes an electric pan / tilt driving function in accordance with a switch operation in addition to the shake correction process.
The imaging apparatus 200 according to the second embodiment is substantially the same as that according to the first embodiment except that it includes an electric pan / tilt drive function, and detailed description thereof is omitted.

Although not shown, the operation unit 91 includes a pan operation switch, a tilt operation switch, and the like.
The pan operation switch constitutes a pan operation instruction means, and inputs a pan operation amount in order to perform a pan operation. The pan operation switch outputs a pan operation instruction signal to the input circuit 92 based on a predetermined operation by the user. Then, the input circuit 92 outputs the input pan operation instruction signal to the pan / tilt operation amount calculation unit 13f.
The tilt operation switch constitutes a tilt operation instruction means, and inputs a tilt operation amount for performing a tilt operation. The tilt operation switch outputs a tilt operation instruction signal to the input circuit 92 based on a predetermined operation by the user. Then, the input circuit 92 outputs the input tilt operation instruction signal to the pan / tilt operation amount calculation unit 13f.

The pan / tilt operation amount calculation unit 13f is provided in the control unit 13, and based on the pan operation instruction signal and the tilt operation instruction signal input via the input circuit 92, the pan / tilt operation amount, that is, the inner turntable. The amount of energization and the direction of energization are calculated for the left and right axis rotation drive coil 304 and the tilt axis rotation drive coil 305 from the rotation drive unit 2 that defines the rotation angle and rotation direction of the 301 and the outer rotation table 303. To do.
Then, the control unit 13 functions as a pan operation rotation control unit based on the energization amount and energization direction with respect to the tilt axis rotation drive coil 305 calculated by the pan / tilt operation amount calculation unit 13f. The energization from the rotation drive unit 2 to the moving drive coil 305 is controlled to pan the mirror body 1b (rotate in the Y direction).
Further, the control unit 13 functions as a tilt operation rotation control unit based on the energization amount and the energization direction about the left / right axis rotation drive coil 304 calculated by the pan / tilt operation amount calculation unit 13f. The energization from the rotation drive unit 2 to the moving drive coil 304 is controlled to tilt the mirror body 1b (rotate in the P direction).

The inner turntable 301 has a high resonance frequency but a slightly smaller swing angle, and the outer turntable 303 has a lower resonance frequency but a larger swing angle.
In the MEMS mirror 300, when forced vibration is performed by a periodic force from the outside, if the frequency of the external force is equal to the natural frequency of the vibration system, the amplitude of the forced vibration is remarkably increased due to the resonance phenomenon. Large vibration and amplitude can be obtained.
Here, when the driving force is constant, the deflection angle of the mirror body 1b has a close relationship with the resonance frequency and the moment of inertia of the turntable, and the resonance frequency increases or the moment of inertia of the turntable ( The deflection angle (θ) decreases as the size of the mirror and the turntable increases.

Here, FIG. 9 shows an example of the resonance frequency and the swing angle of the MEMS mirror 300 having a biaxial drive configuration. For example, when the size of the mirror main body 1b of the MEMS mirror 300 is 6 × 7 (mm), the inside rotation is performed. The resonance frequency of the base 301 is 1.5 kHz and the deflection angle is ± 30 °, and the resonance frequency of the outer rotating base 303 is 430 Hz and the deflection angle is ± 30 °. If the size of the mirror body 1b is 4 × 3 (mm), the resonance frequency of the inner turntable 301 is 560 Hz and the deflection angle is ± 34 °, and the resonance frequency of the outer turntable 303 is 2400 Hz and the deflection angle is ± 34 °.
That is, a large operation angle is not required for the tilting operation by the user, and the rotation angle in the P direction, which requires a high response speed in the shake correction process, is slightly smaller but is designed to have a high resonance frequency. Using a rotation drive of a rotating table, a large operation angle is required for a pan operation by the user, and a high response speed is not required for shake correction processing. The designed rotation drive of the outer rotation table is used.

Further, the display unit 10 displays the tilt operation amount 10b and the pan operation amount 10c on the image display unit 10a in the pan / tilt operation process (see FIGS. 10A to 10C). ).
Specifically, the tilt operation amount 10b is displayed at a position slightly below the right end of the image display unit 10a, and the pan operation amount 10c is displayed at a position slightly below the right end of the image display unit 10a.
The tilt operation amount 10b and the pan operation amount 10c are displayed as bar graphs as shown in FIGS. 10A to 10C, for example, and are displayed as longer bar graphs as the tilt amount and pan amount increase. It has become.

Hereinafter, the tilt operation will be described with reference to FIGS. 10 (a) to 10 (c).
FIG. 10A is a diagram for explaining a state in which the tilt operation is performed upward from a predetermined position, and FIG. 10B is a diagram for explaining a state in which the tilt operation is not performed. FIG. 10C is a diagram for explaining a state in which the tilt operation is performed downward from a predetermined position.
10A to 10C exemplify a tilt operation, the pan operation is substantially the same.

For example, in the state shown in FIG. 10B, when execution of an upward tilt operation (+ 2α with respect to the horizontal direction) is instructed based on a predetermined operation of the tilt operation switch by the user, the pan / tilt operation amount calculation unit 13f calculates a tilting operation amount, that is, an energization amount and energization direction for the drive coil 305 for rotation around the tilt axis, and rotates the mirror body 1b by the tilt angle (45 °) + α of the MEMS mirror 300. The angle posture of the main body 1b is driven and controlled (see FIG. 10A).
Further, when execution of a downward tilt operation (−2β with respect to the horizontal direction) is instructed based on a predetermined operation of the tilt operation switch by the user, the pan / tilt operation amount calculation unit 13f calculates the tilt operation amount, that is, By calculating the energization amount and energization direction for the drive coil 305 for turning around the tilt axis, the angle posture of the mirror body 1b is driven and controlled to rotate the mirror body 1b by the tilt angle (45 °) -β of the MEMS mirror 300. (See FIG. 10C).
Thus, the optical axis is moved to a predetermined position with respect to the tilt operation amount input via the operation unit 91.

Hereinafter, the moving image capturing process will be described in detail with reference to FIG.
Here, FIG. 11 is a flowchart illustrating an example of an operation related to the moving image capturing process.

As shown in FIG. 11, the moving image shooting mode is set based on a predetermined operation of the mode changeover switch 91b of the operation unit 91 by the user, and the moving image capturing is started based on the predetermined operation of the release button 91c ( In step S21), the imaging control unit 13a determines whether or not the shake correction function is set to ON so as to execute the shake correction process (step S22).
Here, if it is determined that the shake correction function is set to ON (step S22; YES), the shake amount calculation unit 13d detects the angular velocity in the P direction and the angular velocity sensor in the Y direction detected by the P direction angular velocity sensor 41. Based on the angular velocity in the Y direction detected by 42, the amount of shake (ΔΘP, ΔΘY) such as camera shake or support posture shake is calculated and detected (step S23).

Next, the control unit 13 determines whether a pan operation instruction signal is input based on a predetermined operation of the pan operation switch by the user (step S24). If it is determined that the pan operation instruction signal is input (step S24; YES), the pan / tilt operation amount calculation unit 13f determines the pan operation amount, that is, the rotation angle of the outer rotation table 303, and the like. The controller 13 calculates the energization amount and energization direction to the rotation drive coil 305 about the tilt axis from the rotation drive unit 2 that defines the rotation direction, and the control unit 13 calculates the tilt calculated by the pan / tilt operation amount calculation unit 13f. Based on the energization amount and the energization direction for the rotation coil around the axis 305, the energization from the rotation drive unit 2 to the rotation drive coil 305 about the tilt axis is controlled to move the mirror body 1b in the pan direction (in the Y direction). (Step S25).
On the other hand, when it is determined in step S24 that the pan operation instruction signal is not input (step S24; NO), the control unit 13 receives the tilt operation instruction signal based on a predetermined operation of the tilt operation switch by the user. It is determined whether it has been performed (step S26). If it is determined that the tilt operation instruction signal is input (step S26; YES), the pan / tilt operation amount calculation unit 13f determines the tilt operation amount, that is, the rotation angle of the inner turntable 301 and The control unit 13 calculates the energization amount and energization direction from the rotation drive unit 2 that defines the rotation direction to the rotation drive coil 304 about the left and right axis, and the control unit 13 calculates the left and right calculated by the pan / tilt operation amount calculation unit 13f. Based on the energization amount and the energization direction for the drive coil 304 for turning around the axis, the energization from the turning drive unit 2 to the drive coil 304 for turning around the left and right axis is controlled to tilt the mirror body 1b (in the P direction). (Step S27).

Next, the imaging control unit 13a determines whether or not the shake correction function is set to ON so as to execute the shake correction process (step S28).
If it is determined that the shake correction function is set to ON (step S28; YES), the control unit 13 has received a pan operation instruction signal based on a predetermined operation of the pan operation switch by the user. It is determined whether or not the pan operation is being performed according to the determination (step S29). Here, if it is determined that the pan operation instruction signal is input, that is, that the pan operation is being performed (step S29; YES), the shake correction amount calculation unit 13e calculates P calculated by the shake amount calculation unit 13d. Based on the amount of shake in the direction, the energization amount and energization direction (blur correction amount) for the left-right axis rotation drive coil 304 that defines the rotation direction and rotation amount (ΔΘP / 2) of the MEMS mirror 300 in the shake correction processing. Calculate (step S30).
Subsequently, based on the energization amount and energization direction for the left and right axis rotation drive coil 304 calculated by the shake correction amount calculation unit 13e, the control unit 13 rotates the left and right axis rotation drive coil 304. 2 is controlled to perform a shake correction operation for rotating the mirror body 1b in the P direction (step S31).

On the other hand, when it is determined in step S29 that the pan operation is not being performed (step S29; NO), the control unit 13 determines whether a tilt operation instruction signal is input based on a predetermined operation of the tilt operation switch by the user. It is determined whether or not the tilting operation is being performed (step S32). Here, if it is determined that the tilt operation instruction signal is input, that is, the tilt operation is being performed (step S32; YES), the shake correction amount calculation unit 13e calculates the Y calculated by the shake amount calculation unit 13d. Based on the shake amount in the direction, the energization amount and energization direction (shake correction amount) for the tilt axis rotation drive coil 305 that defines the rotation direction and rotation amount (ΔΘY / 2) of the MEMS mirror 300 in the shake correction processing. Calculate (step S33).
Subsequently, based on the energization amount and the energization direction for the tilt axis rotation drive coil 305 calculated by the shake correction amount calculation unit 13e, the control unit 13 rotates the tilt axis rotation drive coil 305. 2 is controlled to perform a shake correction operation for rotating the mirror body 1b in the Y direction (step S34).

If it is determined in step S32 that the tilt operation is not being performed (step S32; NO), the shake correction amount calculation unit 13e uses the shake amounts in the P direction and the Y direction calculated by the shake amount calculation unit 13d. Based on the amount of energization to the drive coil 304 for turning about the left and right axis and the drive coil 305 for turning about the tilt axis, which define the turning direction and turning amount (ΔΘP / 2, ΔΘY / 2) of the MEMS mirror 300 in the shake correction processing, The energization direction (blur correction amount) is calculated (step S35).
Subsequently, the control unit 13 rotates around the left and right axis based on the energization amount and energization direction with respect to the left and right axis rotation drive coil 304 and the tilt axis rotation drive coil 305 calculated by the shake correction amount calculation unit 13e. By controlling the energization from the rotation drive unit 2 to the driving coil 304 for movement and the rotation driving coil 305 about the tilt axis, a shake correction operation for rotating the mirror body 1b in the P direction and the Y direction is executed (step S36). .

Then, the control unit 13 determines whether or not the end of moving image capturing is instructed based on a predetermined operation of the release button 91c by the user (step S37), and the end of moving image capturing is instructed. If it is determined that there is not (step S37; NO), the control unit 13 proceeds to step S22 and controls the execution of the subsequent processing.
In step S3, when the end of moving image capturing is instructed (step S37; YES), the control unit 13 performs encoding and compression encoding of image signals related to a plurality of image frames to perform image memory. 11 (step S38).

If it is determined in step S22 that the shake correction function is not set to ON (step S22; NO), the control unit 13 proceeds to step S24 and controls the execution of subsequent processing. .
If it is determined in step S28 that the shake correction function is not set to ON (step S28; NO), the control unit 13 proceeds to step S37 and controls the execution of the subsequent processing. .

  As described above, according to the imaging apparatus 200 of the second embodiment, the configuration includes the electric pan / tilt drive operation function by the switch operation and the like together with the shake correction process, and captures both the still image and the moving image. When the rotation is performed, the rotation direction of the inner turntable 301 in which the deflection angle is small but the resonance frequency is high is set to the shake correction direction in the P direction and the tilt operation direction in the moving image, while the resonance frequency is low. By setting the rotation direction of the outer turntable 303 having a large shake angle to the shake correction direction in the Y direction and the pan operation direction in the moving image, even if there is a difference in drive characteristics, the shake correction is performed with a sufficient shake angle. Further, it is possible to perform a pan / tilt operation and provide a more attractive imaging device 200.

  Further, the control unit 13 does not perform control to rotate the mirror body 1b around the tilt axis during the pan operation of the mirror body 1b, and moves the mirror body 1b to H during the tilt operation of the mirror body 1b. Since control to rotate around the axis is not performed, panning and tilting operations using the MEMS mirror 300 can be performed appropriately.

The present invention is not limited to the above-described embodiment, and various improvements and design changes may be made without departing from the spirit of the present invention.
Below, the modification of an imaging device is demonstrated.

The imaging device of the first modification is designed so that the resonance frequencies of the inner turntable 301 and the outer turntable 303 are the same.
In this case, since the swing angle of the inner turntable 301 increases, the rotation direction is set to the P direction that requires a large shake correction angle, or the pan direction in which the camera work angle in moving image shooting is large. Is preferred.
Further, when the resonance frequency is set high, the swing angle of the outer turntable 303 becomes small. Therefore, the rotation direction is set to the Y direction where the vibration frequency in camera shake is low and the shake correction angle may be relatively small, It is preferable to set the tilt direction so that the angle of the camera work at the time of moving image shooting may be relatively small.
Thereby, according to the imaging device of the modification 1, it is possible to perform the shake correction and the pan / tilt operation with a sufficient shake angle in the Y direction and the P direction even with the same driving force.

  In the first modification, the magnitude of the magnetic field (magnetic flux density B) by the permanent magnets in each direction provided around is changed according to the difference or ratio of the deflection angle depending on the rotation direction of each rotary table. It may be configured to adjust so that the same deflection angle can be obtained with the same driving force (current).

As illustrated in FIGS. 12A to 12D, the imaging apparatus of Modification 2 detects a motion vector based on a video signal output from the imaging unit 1 and detects a blur amount by image processing. .
That is, in image blur detection by image processing, an image from an imaging signal is divided into a plurality of blocks b, the direction of the motion vector of each block b between adjacent consecutive images is obtained, and the motion vector of each block b is constant. (Block matching method).
Then, if the whole has moved in the specific direction by the same amount, it is determined as a camera shake (see FIG. 12A and FIG. 12B), and each block b is separated or only the predetermined block b is in the specific direction. If it is moving, it is determined that the subject is moving, not a camera shake (see FIG. 12C).
Further, if the whole has moved by the same amount in the horizontal direction, it is determined as a pan operation (FIG. 12D).

As shown in FIGS. 13A and 13B, in the imaging device of Modification 3, the inner lens 1c is composed of three lenses, and the MEMS mirror 500 is placed in the middle of the optical path of the imaging unit 501 made of these lenses. Is arranged.
That is, the MEMS mirror 500 forms a substantially afocal system so that the spread of the image circle and subject light is small in the optical path outside the movement range in the optical axis direction of the zoom driving lens and the focus adjustment lens. It is arranged behind the set of convex / concave lenses (focus system lens c1 and variable magnification system lens c2) and in front of the imaging lens c3.

  Therefore, since the MEMS mirror 500 is disposed at a position where the spread of the image circle and subject light is small, a mirror having a smaller area size of the mirror body 1b than the MEMS mirror 300 of the first and second embodiments can be used. It can also be used for camera shake correction of an image pickup apparatus using a lens having a larger aperture or the image pickup element 1d.

Further, instead of the rotating mirror of the MEMS structure made of silicon, for example, an electromagnetically driven rotating mirror using a torsion bar spring formed of a spring steel material such as SUP in a rod shape as a torsion spring may be provided.
The spring constant of the torsion bar is determined by the length of the bar, the shape of the cross section, the material, and the like. For example, the torsional stiffness (torsion spring constant per unit length) K of a torsion bar having a rectangular cross section is approximately K if the lateral elastic modulus (G), long side (a), and short side (b) of the material are used. = K′G · a · b3 (k ′ is a coefficient determined by the ratio of a and b).
In the case of a plate-like rotating body, for example, a lightweight metal such as aluminum or titanium, or a thin but rigid material is used to reduce the moment of inertia by reducing the width and weight of the rotating plate as much as possible. It is desirable to use a material that is lightweight and has high rigidity and durability, such as a high glass fiber-resin.
As a result, not only can the mirror size be changed freely, but also large heavy mirrors can be supported, and it is not necessary to use silicon substrates, LSI lithography technology, silicon micromachining technology, etc. Can be suppressed.

  Moreover, in the said embodiment, it provided so that an outer lens might be exposed to the front side of the imaging devices 100 and 200, and it provided the mirror main body 1b of the MEMS mirror 300 inside, but it is not restricted to this, For example, the mirror body 1b may be provided closest to the subject.

It is a block diagram which shows schematic structure of the imaging device of Embodiment 1 to which this invention is applied. It is a figure which shows typically the external appearance of the imaging device of FIG. It is a perspective view which shows typically the MEMS mirror of the imaging device of FIG. It is a figure for demonstrating the principle of operation of the MEMS mirror of FIG. It is a figure for demonstrating the zoom mechanism of the imaging part of the imaging device of FIG. It is a figure for demonstrating the blurring correction operation | movement by the imaging device of FIG. 3 is a flowchart illustrating an example of an operation related to a still image imaging process performed by the imaging apparatus of FIG. 1. It is a block diagram which shows schematic structure of the imaging device of Embodiment 2 to which this invention is applied. It is a figure which shows an example of the resonant frequency and deflection angle of the MEMS mirror of the imaging device of FIG. It is a figure for demonstrating the tilt operation by the imaging device of FIG. It is a flowchart which shows an example of the operation | movement which concerns on the moving image imaging process by the imaging device of FIG. It is a figure which shows typically the motion vector detected by the imaging device of the modification 2. FIG. 10 is a diagram for explaining a zoom mechanism of an imaging unit of an imaging apparatus according to Modification 3.

Explanation of symbols

100, 200 Imaging device (blur correction device)
1 Imaging unit 1a Outside lens (imaging lens unit)
1b Mirror body (rotating mirror)
1c Inner lens (imaging lens part)
1d Image sensor 13 Controller (blur correction rotation control means, pan operation rotation control means, tilt operation rotation control means)
21 Rotation drive part around left / right axis (energization means)
22 Inclination axis rotation drive part (energization means)
41 P-direction angular velocity sensor (blur amount detection means)
42 Y-direction angular velocity sensor (blur amount detection means)
8 Power supply unit 9 Operation input unit 91 Operation unit (pan operation instruction means, tilt operation instruction means)
300, 500 MEMS mirror (rotating mirror part)
301 Inner turning table 302 Left / right axis torsion spring 303 Outer turning table 304 Driving coil 305 for turning around the left / right axis Tilt turning torsion spring 308 Magnet for turning around the left / right axis (magnetic field generating means)
309 Magnet for rotating around tilt axis (magnetic field generating means)

Claims (6)

An imaging unit having an imaging lens unit that forms an optical image of a subject;
A rotating mirror unit having a rotating mirror which is arranged on the object side of the imaging lens unit or in the optical path of the imaging unit and is supported so as to be rotatable about an axis in one direction and the other direction intersecting each other. ,
Magnetic field generating means for generating a predetermined magnetic field;
A drive coil disposed in the rotating mirror portion and disposed in the magnetic field generated by the magnetic field generating means;
Energization means for energizing the drive coil;
A blur amount detecting means for detecting a blur amount when the subject is imaged by the imaging unit;
Based on the shake amount detected by the shake amount detection means, the energization means controls the energization amount and energization direction of the drive coil to rotate the rotating mirror around the axis in the one direction and the other direction. A shake correction rotation control means to be moved;
A shake correction apparatus comprising: The rotating mirror unit is mounted with the rotating mirror and supported by an inner rotating table supported by the supporting member extending in the one direction and an outer surface supported by the supporting member extended in the other direction. With a turntable,
2. The shake correction apparatus according to claim 1, wherein an inertia moment of the inner rotary table is smaller than an inertia moment of the outer rotary table. The rotating mirror portion is mounted with the rotating mirror, and is supported by an inner rotating table supported by the torsion spring extending in the one direction and the torsion spring extending in the other direction. And an outer turntable
2. The shake correcting apparatus according to claim 1, wherein a resonance frequency of the inner turntable is higher than a resonance frequency of the outer turntable. The rotating mirror unit is mounted with the rotating mirror, and is mounted with the inner rotating table supported by the torsion spring extended in the one direction, the inner rotating table and the rotating mirror, An outer turntable supported by the torsion spring extending in the other direction,
2. The shake correction apparatus according to claim 1, wherein the resonance frequencies of the inner turntable and the outer turntable are substantially equal. The shake correction apparatus according to any one of claims 1 to 4,
Pan operation instruction means for outputting a pan operation instruction signal for pan operation;
Tilt operation instruction means for outputting a tilt operation instruction signal for tilt operation;
Based on the pan operation instruction signal output from and input from the pan operation instruction means, the energization means and the energization direction to the drive coil by the energization means are controlled to move the rotating mirror portion around the axis in the other direction. Panning rotation control means for panning;
Based on the tilt operation instruction signal output and input from the tilt operation instruction means, the energization means and the energization direction of the drive coil by the energization means are controlled to move the rotating mirror portion around the unidirectional axis. A tilt motion rotation control means for tilting; and
An imaging apparatus comprising:   The shake correction rotation control means does not perform control to rotate the rotation mirror around the axis in the other direction during the pan operation of the rotation mirror unit by the pan operation rotation control means, and 6. The control according to claim 5, wherein during the tilting operation of the rotating mirror portion by the tilting operation rotation control means, control for rotating the rotating mirror around the one-direction axis is not performed. Imaging device.

Images