CN110471008B - Vector optical fiber magnetic field sensor based on eccentric hollow microsphere cavity and manufacturing method thereof - Google Patents
Vector optical fiber magnetic field sensor based on eccentric hollow microsphere cavity and manufacturing method thereof Download PDFInfo
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- CN110471008B CN110471008B CN201910729331.1A CN201910729331A CN110471008B CN 110471008 B CN110471008 B CN 110471008B CN 201910729331 A CN201910729331 A CN 201910729331A CN 110471008 B CN110471008 B CN 110471008B
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- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
Abstract
The invention discloses a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity and a manufacturing method thereof, wherein the sensor structure is composed of three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity, the three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity are respectively placed along an x axis, a y axis and a z axis and are arranged in a curing matrix (4) in an embedding and curing mode to respectively detect the directions and the intensities of magnetic fields in three planes; each one-dimensional vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity structurally comprises the eccentric hollow microsphere cavity (1), a tapered optical fiber (2), a nano magnetofluid material (3) and a curing matrix (4). Compared with the prior art, the invention achieves the modulation effect on the center wavelength of the resonance peak of the echo wall, thereby realizing the vector sensing function of the sensor for simultaneously detecting the direction and the strength of the magnetic field.
Description
Technical Field
The invention belongs to the technical field of echo wall resonant mode magnetic field sensing, and particularly relates to a vector magnetic field sensor based on an echo wall resonant mode of a hollow eccentric microsphere and a manufacturing method thereof.
Background
The magnetic field is one of important physical quantities in the fields of power grids, navigation positioning, biomedicine, navigation and spaceflight, geological exploration, geophysical, military engineering and the like. The optical fiber magnetic field sensor utilizes the optical effect of the magnetic sensitive material, realizes high-precision sensing of a magnetic field by modulating the characteristic parameters of the intensity, the wavelength, the phase, the polarization state and the like of an optical signal, and has the advantages of high sensitivity, miniaturization, strong anti-interference performance and the like compared with the traditional electrical magnetic field sensor. The optical echo wall resonant mode has the characteristics of high quality factor and small mode volume, and the optical fiber magnetic sensor constructed based on the optical echo wall resonant mode becomes one of the development directions of optical fiber magnetic field sensing. In 2015, Mahmood et al (A.Mahmood, V.Kavungal, Magnetic-field sensor based on wireless-resonant mode in a photonic crystal fiber in filtered with a photonic crystal fiber resonant microcavity) constructed by injecting Magnetic fluid into its porous structure to realize Magnetic field strength sensing. In 2014 Forstner et al (S.Forstner, E.Sheridan, et al, ultrasonic optical mechanical magnetic measurement [ J ], Advanced Materials,2014,26: 6348-. In 2018, Eugene Freeman et al (Eugene Freeman, Cheng-Yu Wang, et al, Chip-scale high Q-factor glass microsphere for magnetic sensing [ J ]. AIP,2018,8(6):065214) put rubidium magnet on hollow microsphere to change the shape of central axis by mechanical force to realize magnetic field intensity sensing. However, the existing optical echo wall resonant mode-based optical fiber magnetic sensor mainly detects the high sensitivity of the magnetic field intensity, hardly relates to the magnetic field direction, and belongs to scalar sensing. The magnetic field is used as a vector, and the simultaneous detection of the magnitude and the direction of the magnetic field has more important significance, so that the development of an optical fiber vector magnetic sensor is needed.
Disclosure of Invention
Based on the technical problem, the invention provides a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity and a manufacturing method thereof.
The invention relates to a one-dimensional vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity, which structurally comprises an eccentric hollow microsphere cavity 1, a tapered optical fiber 2, a nano magnetofluid material 3 and a curing matrix 4; the eccentric hollow microsphere cavity 1 and the tapered optical fiber 2 are vertically contacted in the tapered region of the tapered optical fiber 2, the nano-magnetic fluid material 3 penetrates through the eccentric hollow microsphere cavity 1, a light wave field in the eccentric hollow microsphere cavity 1 is directly contacted with the nano-magnetic fluid material 3, and the eccentric hollow microsphere cavity 1 and the tapered optical fiber 2 are arranged in a curing matrix 4 in an embedding and curing manner; wherein:
the incident light 5 enters the tapered optical fiber and enters the eccentric hollow microsphere cavity 1 in the tapered region by evanescent waves to generate a echo wall resonant mode 6; a large number of magnetic nano particles 7 are adsorbed to the inner surface of the eccentric hollow microsphere cavity 1, and a chain-shaped cluster structure is formed along the direction of a magnetic field.
The invention relates to a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity, which is structurally composed of three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity, wherein the three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity are respectively placed along an x axis, a y axis and a z axis and are arranged in a curing matrix 4 in an embedding and curing mode to respectively detect the directions and the intensities of magnetic fields in three planes; each one-dimensional vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity structurally comprises an eccentric hollow microsphere cavity 1, a tapered optical fiber 2, a nano magnetofluid material 3 and a curing matrix 4; the eccentric hollow microsphere cavity 1 and the tapered optical fiber 2 are vertically contacted in the tapered region of the tapered optical fiber 2, the nano-magnetic fluid material 3 penetrates through the eccentric hollow microsphere cavity 1, a light wave field in the eccentric hollow microsphere cavity 1 is directly contacted with the nano-magnetic fluid material 3, and the eccentric hollow microsphere cavity 1 and the tapered optical fiber 2 are arranged in a curing matrix 4 in an embedding and curing manner; wherein:
the incident light 5 enters the tapered optical fiber and enters the eccentric hollow microsphere cavity 1 in the tapered region by evanescent waves to generate a echo wall resonant mode 6; a large number of magnetic nano particles 7 are adsorbed to the inner surface of the eccentric hollow microsphere cavity 1, and a chain-shaped cluster structure is formed along the direction of a magnetic field.
The invention discloses a method for manufacturing a one-dimensional vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity, which is characterized by comprising the following steps of:
step one, manufacturing an eccentric hollow microsphere cavity 1: taking a thick-wall quartz microtube 13 with the length of 10 mm-20 mm, the outer diameter of 100 mu m-700 mu m and the wall thickness of 30 mu m-60 mu m, and accurately controlling the air pressure in the thick-wall quartz microtube 13 to be0.1MPa to 1.0 MPa; the oxyhydrogen gas is dried to remove water molecules in the generated oxyhydrogen gas, and the flow rate of the oxyhydrogen gas is controlled to be 5 sccm-2500 sccm; igniting oxyhydrogen flame, and uniformly heating the thick-wall quartz microtube 13; preheating time t1Then drawing into a thin-wall quartz microtube; accurately controlling the air pressure in the thin-wall quartz microtube to be 0.05MPa to 1.0 MPa; controlling the flow rate of the oxyhydrogen mixture to be 5 sccm-1000 sccm, igniting oxyhydrogen flame, and heating for a set heating time t2The front end and the rear end of the thin-wall quartz microtube are heated unevenly, and an eccentric hollow microsphere cavity 1 is formed under the action of internal air pressure, so that the eccentric hollow microsphere cavity 1 is manufactured;
step two, manufacturing the tapered optical fiber 2: taking a single-mode optical fiber 23 with the length of 10 cm-100 cm, and enabling the optical fiber to be parallel to the axis of the displacement direction and to be tight; the oxyhydrogen gas is dried to remove water molecules in the generated oxyhydrogen gas; controlling the flow rate of the mixed hydrogen and oxygen gas to be 5 sccm-2500 sccm; igniting oxyhydrogen flame, uniformly heating the single-mode optical fiber 23, and starting to stretch the optical fiber until the diameter of the conical area of the manufactured tapered optical fiber 2 is 1-5 mu m, and ending the stretching process of the optical fiber; thus, the tapered optical fiber is manufactured;
step three, preprocessing the eccentric hollow microsphere cavity 1: injecting methanol into the eccentric hollow microsphere cavity 1, and continuously injecting for 5-10 minutes to wash off organic matters such as lipids and mineral oil possibly attached to the inner surface of the microsphere cavity; injecting 0.1-10 mol/L dilute hydrochloric acid into the eccentric hollow microsphere cavity 1, and continuously injecting for 10-20 minutes to wash away impurities such as metal ions and the like introduced in the manufacturing process; injecting 0.1-10 mol/L sodium hydroxide solution into the eccentric hollow microsphere cavity 1, continuously injecting for 60 minutes, and opening and hydrolyzing silicon-oxygen bonds on the surface of the silicon dioxide under an alkaline condition to generate silicon hydroxyl; injecting deionized water into the eccentric hollow microsphere cavity 1, and continuously injecting for 20-50 minutes for washing away the sodium hydroxide solution; filling nitrogen into the eccentric hollow microsphere cavity for 30 minutes by a PU tube 10 and a caliber conversion device 11, wherein the filling pressure range is 0.01 MPa-0.08 MPa, and the nitrogen is used for drying and dewatering; so that the pretreatment of the eccentric hollow microsphere cavity 1 is finished;
injecting the nano-magnetic fluid material 3 into the eccentric hollow microsphere cavity 1, vertically placing the eccentric hollow microsphere cavity 1 and the tapered area of the tapered optical fiber 2 in a contact manner, embedding and curing the eccentric hollow microsphere cavity 1 and the tapered optical fiber (2) through optical ultraviolet glue, and thus finishing the manufacturing of the one-dimensional vector magnetic field sensor based on the eccentric hollow microsphere cavity.
The invention discloses a method for manufacturing a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity, which comprises the following steps of:
step one, manufacturing an eccentric hollow microsphere cavity 1: taking a thick-wall quartz microtube 13 with the length of 10 mm-20 mm, the outer diameter of 100 mu m-700 mu m and the wall thickness of 30 mu m-60 mu m, and accurately controlling the air pressure in the thick-wall quartz microtube 13 to be 0.1 MPa-1.0 MPa; the oxyhydrogen gas is dried to remove water molecules in the generated oxyhydrogen gas, and the flow rate of the oxyhydrogen gas is controlled to be 5 sccm-2500 sccm; igniting oxyhydrogen flame, and uniformly heating the thick-wall quartz microtube 13; preheating time t1Then drawing into a thin-wall quartz microtube; accurately controlling the air pressure in the thin-wall quartz microtube to be 0.05MPa to 1.0 MPa; controlling the flow rate of the oxyhydrogen mixture to be 5 sccm-1000 sccm, igniting oxyhydrogen flame, and heating for a set heating time t2The front end and the rear end of the thin-wall quartz microtube are heated unevenly, and an eccentric hollow microsphere cavity 1 is formed under the action of internal air pressure, so that the eccentric hollow microsphere cavity 1 is manufactured;
step two, manufacturing the tapered optical fiber 2: taking a single-mode optical fiber 23 with the length of 10 cm-100 cm, and enabling the optical fiber to be parallel to the axis of the displacement direction and to be tight; the oxyhydrogen gas is dried to remove water molecules in the generated oxyhydrogen gas; controlling the flow rate of the mixed hydrogen and oxygen gas to be 5 sccm-2500 sccm; igniting oxyhydrogen flame, uniformly heating the single-mode optical fiber 23, and starting to stretch the optical fiber until the diameter of the conical area of the manufactured tapered optical fiber 2 is 1-5 mu m, and ending the stretching process of the optical fiber; thus, the tapered optical fiber is manufactured;
step three, preprocessing the eccentric hollow microsphere cavity 1: injecting methanol into the eccentric hollow microsphere cavity 1, and continuously injecting for 5-10 minutes to wash off organic matters such as lipids and mineral oil possibly attached to the inner surface of the microsphere cavity; injecting 0.1-10 mol/L dilute hydrochloric acid into the eccentric hollow microsphere cavity 1, and continuously injecting for 10-20 minutes to wash away impurities such as metal ions and the like introduced in the manufacturing process; injecting 0.1-10 mol/L sodium hydroxide solution into the eccentric hollow microsphere cavity 1, continuously injecting for 60 minutes, and opening and hydrolyzing silicon-oxygen bonds on the surface of the silicon dioxide under an alkaline condition to generate silicon hydroxyl; injecting deionized water into the eccentric hollow microsphere cavity 1, and continuously injecting for 20-50 minutes for washing away the sodium hydroxide solution; filling nitrogen into the eccentric hollow microsphere cavity for 30 minutes by a PU tube 10 and a caliber conversion device 11, wherein the filling pressure range is 0.01 MPa-0.08 MPa, and the nitrogen is used for drying and dewatering; so that the pretreatment of the eccentric hollow microsphere cavity 1 is finished;
injecting a nano magnetofluid material 3 into the eccentric hollow microsphere cavity 1, vertically placing the eccentric hollow microsphere cavity 1 and the tapered area of the tapered optical fiber 2 in a contact manner, and embedding and curing the eccentric hollow microsphere cavity 1 and the tapered optical fiber 2 through optical ultraviolet glue until the one-dimensional vector magnetic field sensor is manufactured;
and fifthly, repeating the first step to the fourth step, manufacturing three one-dimensional vector magnetic field sensors, respectively placing the three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity along the x axis, the y axis and the z axis, assembling the sensors by using optical ultraviolet glue to form a cured matrix 4, and finishing manufacturing the vector magnetic field sensor based on the eccentric hollow microsphere cavity.
The invention relates to a magnetic field vector test system of a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity, which comprises a magnetic field vector test system
1. The system comprises a scanning laser 26, a 1 x 3 coupler 27, a vector optical fiber magnetic field sensor 28 based on an eccentric hollow microsphere cavity, a photoelectric detector 29, a data acquisition and processing system 30, a three-dimensional Helmholtz coil 31, a high-precision digital control three-dimensional power supply 32 and a computer 33; wherein, the light emitted by the scanning laser 26 enters the three ends of the 1 × 3 coupler 27 and is output to be respectively connected with one end of three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity, which are arranged along the x axis, the y axis and the z axis in the vector optical fiber magnetic field sensor 28 based on the eccentric hollow microsphere cavity, and then the other three ends of the vector optical fiber magnetic field sensor 28 based on the eccentric hollow microsphere cavity are connected with the photoelectric detector 29 through optical fibers, and the photoelectric detector 29 receives signals and sends the signals to the data acquisition processing system 30 to record the central wavelength shift of the resonance peak; the vector optical fiber magnetic field sensor 28 based on the eccentric hollow microsphere cavity is fixed in the center of the three-dimensional Helmholtz coil 31; the computer 33 is connected with the high-precision digital control three-dimensional power supply 32, the high-precision digital control three-dimensional power supply 32 controls the current in the coil, the accurate control of the direction and the strength of the magnetic field near the vector magnetic field sensor is realized, and the magnetic field strength and the direction are monitored in real time through the computer 33.
Compared with the prior art, the invention achieves the modulation effect on the center wavelength of the resonance peak of the echo wall, thereby realizing the vector sensing function of the sensor for simultaneously detecting the direction and the strength of the magnetic field.
Drawings
FIG. 1 is a schematic structural diagram of a one-dimensional vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity according to the present invention;
FIG. 2 is a schematic structural diagram of a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity according to the present invention;
FIG. 3 is a schematic structural diagram of an apparatus for manufacturing an eccentric hollow microsphere cavity according to the present invention;
FIG. 4 is a schematic structural diagram of a tapered optical fiber manufacturing apparatus according to the present invention;
FIG. 5 is a schematic structural diagram of a magnetic field vector testing system of the vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity of the present invention;
reference numerals: 1. an eccentric hollow microsphere cavity, 2, a tapered optical fiber, 3, a nano-magnetic fluid material, 4, a solidified substrate, 5, incident light, 6, a echo wall resonant mode, 7, magnetic nanoparticles, 8, a nitrogen gas bottle, 9, a pressure reducing valve, 10, a PU tube, 11, a caliber conversion device, 12, a micro-tube holder, 13, a thick-wall quartz micro-tube, 14, a micro-tube holder, 15, a caliber conversion device, 16, a high-precision gas pressure gauge, 17, a flame spray gun, 18, a short-stroke high-precision displacement table, 19, a long-stroke high-precision displacement table, 20, an oxyhydrogen generator, 21, a gas dryer, 22, a gas flow controller, 23, a single-mode optical fiber, 24, an optical fiber holder, 25, an optical fiber holder, 26, a scanning laser, 27, a 1 x 3 coupler, 28, a vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity, 29, a photoelectric detector, 30, a data acquisition and processing system, 31. three-dimensional Helmholtz coil, 32, high-precision digital control three-dimensional power supply, 33 and a computer.
Detailed Description
Embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a one-dimensional vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity according to the present invention. The one-dimensional vector optical fiber magnetic field sensor structure based on the eccentric hollow microsphere cavity is composed of four core components, namely an eccentric hollow microsphere cavity 1, a tapered optical fiber 2, a nano magnetofluid material 3 and a solidified matrix 4. The eccentric hollow microsphere cavity 1 is vertically contacted with the tapered area of the tapered optical fiber 2, the incident light 5 enters the tapered optical fiber 2, evanescent waves enter the eccentric hollow microsphere cavity 1 in the tapered area to generate an echo wall resonant mode 6, and an optical wave field in the eccentric hollow microsphere cavity 1 is directly contacted with the surrounding nano magnetofluid materials 3, so that the effective refractive index of the optical wave field is modulated by the effective refractive index of the surrounding nano magnetofluid materials 3, and the central wavelength of an echo wall resonant peak is influenced. In the pretreated eccentric hollow microsphere cavity 1, a large number of magnetic nanoparticles 7 can be adsorbed to the inner surface of the eccentric hollow microsphere cavity 1 under the action of hydrogen bonds, and when the pretreated eccentric hollow microsphere cavity 1 is placed in a magnetic field, the magnetic nanoparticles 7 adsorbed to the inner surface of the eccentric hollow microsphere cavity 1 can fall off under the action of the magnetic field to form a chain-shaped cluster structure along the direction of the magnetic field, so that the magnetic nanoparticles 7 are gathered at different wall thicknesses in different magnetic field directions in a one-dimensional plane, and the wall surface particles change. The magnetic nanoparticles in the cavity of the eccentric hollow microsphere are gathered at different wall thicknesses in different magnetic field directions by utilizing the wall particle change caused by the self-assembly process that the magnetic nanoparticles follow the change of the magnetic field, so that the non-uniform distribution characteristic is presented, the effective refractive index of the magnetic fluid is modulated by the direction and the intensity of the magnetic field, and the modulation effect on the central wavelength of the resonance peak of the echo wall is achieved through the evanescent field coupling effect of the magnetic fluid and an optical signal, so that the vector sensing function of the sensor for detecting the direction and the intensity of the magnetic field is realized.
The effective refractive index of the light wave field in the eccentric hollow microsphere cavity 1 is influenced by the distribution density of the nano magnetofluid material 3 near the inner surface of the eccentric hollow microsphere cavity 1, when the microsphere cavity is an eccentric microsphere cavity, the internal light wave field is an eccentric light wave field, the density of the magnetic nano particles 7 nearby the eccentric light wave field obviously changes along with the change of the magnetic field direction, the effective refractive index of the eccentric light wave field is modulated by the magnetic field direction to realize the detection of the magnetic field direction, meanwhile, the density of the magnetic nano-particles 7 is directly influenced by the intensity of the magnetic field, and in conclusion, by the characteristic that the effective refractive index of the nano-magnetic fluid material 3 in the eccentric hollow microsphere cavity 1 is modulated by the direction and the intensity of the magnetic field, through the coupling effect of an evanescent field, the central wavelength of a resonance peak of the echo wall has sensitivity to a vector magnetic field, and the simultaneous detection of the magnetic field intensity and the direction is realized.
As shown in FIG. 2, the vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity has a schematic structure. The structure is composed of three one-dimensional vector optical fiber magnetic field sensors. The three one-dimensional vector optical fiber magnetic field sensors are respectively placed along an x axis, a y axis and a z axis and are assembled by optical ultraviolet glue, and the three one-dimensional vector optical fiber magnetic field sensors respectively detect the directions and the strengths of magnetic fields in three planes, so that the simultaneous detection of the three-dimensional magnetic field strength and the directions is realized.
The magnetic field vector test of the vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity comprises the following steps: as shown in fig. 5, which is a schematic structural diagram of a magnetic field vector testing system of a magnetic field sensor, light emitted from a scanning laser 26 enters three-terminal optical fibers of a vector optical fiber magnetic field sensor 28 based on an eccentric hollow microsphere cavity through a 1 × 3 coupler 27, wherein the three-terminal output of the 1 × 3 coupler 27 is respectively connected with one end of three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity, which are arranged along an x axis, a y axis and a z axis in the vector optical fiber magnetic field sensor 28 based on the eccentric hollow microsphere cavity, and then the other three-terminal optical fiber magnetic field sensor 28 based on the eccentric hollow microsphere cavity is connected with a photodetector 29 for receiving and a data acquisition processing system 30 for recording the movement of the central wavelength of a resonance peak; the vector optical fiber magnetic field sensor 28 based on the eccentric hollow microsphere cavity is fixed in the center of the three-dimensional Helmholtz coil 31; the current in the coil is controlled by the high-precision digital control three-dimensional power supply 32, the direction and the strength of the magnetic field near the vector magnetic field sensor are accurately controlled, and the magnetic field strength and the direction are monitored in real time by the computer 33.
The invention discloses a method for manufacturing a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity, which comprises the following steps of:
step one, manufacturing an eccentric hollow microsphere cavity 1: taking a thick-wall quartz micro-tube 13 with the length of 10-20 mm, the outer diameter of 100-700 μm and the wall thickness of 30-60 μm, respectively connecting the left end and the right end of the thick-wall quartz micro-tube 13 to a left caliber conversion device 11 and a right caliber conversion device 15, respectively, then respectively fixing the two ends of the thick-wall quartz micro-tube 13 on a left micro-tube clamper 12 and a right micro-tube clamper 14, and adjusting the left micro-tube clamper 12 and the right micro-tube clamper 14 to enable the micro-tube to be parallel to a guide axis of a long-stroke high-precision displacement table 19; opening a switch of a nitrogen cylinder 8, adjusting the size of a pressure reducing valve 9 to ensure that the pressure of a downstream gas path is in the range of 0.1 MPa-1.0 MPa, so as to achieve the effect of protecting the gas path, introducing nitrogen into an installed thick-wall quartz micro-tube 13 through the pressure reducing valve 9, a PU tube 10 and a caliber conversion device 11, observing the reading of a high-precision barometer 16 at the tail end, adjusting the pressure reducing valve 9, and accurately controlling the pressure in the thick-wall quartz micro-tube 13 to be 0.1 MPa-1.0 MPa; starting the oxyhydrogen generator 20, introducing the oxyhydrogen mixture into a gas dryer 21, removing water molecules in the generated oxyhydrogen, setting a gas flow controller 22, and controlling the flow rate of the oxyhydrogen mixture to be 5 sccm-2500 sccm; the short-stroke high-precision displacement table 18 is opened, and the flame spray gun 17 is heated along with the displacement table 18 according to the set heating length L1And a moving speed v1Reciprocating; at the nozzle of the flame spray gun 17, oxyhydrogen flame is ignited, and the length is L due to the movement of the short-stroke high-precision displacement table 181The thick-walled quartz microtube 13 is uniformly heated; preheating time t1Then, the long-stroke high-precision displacement table 19 is opened, and the left and right two micro-tube holders 12 and 14 respectively move left and right along with the displacement table 19 according to the set drawing speed v2And a stretching distance X1Moving, the displacement table 19 moves X1Stopping after the distance, and drawing the quartz tube into a thin-wall quartz microtube; adjusting the pressure reducing valve 9, observing the reading of the high-precision barometer 16, and accurately controlling the air pressure in the thin-wall quartz microtube to be 0.05MPa to 1.0 MPa; setting the gas flow controller 22 to control the flow rate of the mixed hydrogen and oxygen gas to be 5sccm to 1000sccmSpeed v of movement of flame spray gun 171Set to 0, i.e. flame lance 17 is fixed, set drawing speed v2And a stretching distance X10, igniting oxyhydrogen flame at the nozzle of the flame spray gun 17, and heating for a set heating time t2Heating, wherein the front and the back of the thin-wall quartz microtube are heated unevenly, and an eccentric hollow microsphere cavity 1 is formed under the action of internal air pressure. Thus, the eccentric hollow microsphere cavity 1 is manufactured. The outer diameter of the manufactured eccentric hollow microsphere cavity 1 is 100-500 mu m, the wall thickness of the thin wall is 1-10 mu m, and the wall thickness of the thick wall is 5-20 mu m;
step two, manufacturing the tapered optical fiber 2: taking a single-mode optical fiber 23 with the length of 10 cm-100 cm, respectively fixing two ends of the single-mode optical fiber 23 on a left optical fiber holder 24 and a right optical fiber holder 25, and adjusting the left optical fiber holder 24 and the right optical fiber holder 25 to enable the optical fiber to be parallel to the axis of a guide rail of the long-stroke high-precision displacement table 19 and to be tight; starting the oxyhydrogen generator 20, introducing the oxyhydrogen mixture into a gas dryer 21, and removing water molecules in the generated oxyhydrogen; setting a gas flow controller 22, and controlling the flow of the mixed oxyhydrogen gas to be 5 sccm-2500 sccm; the long-stroke high-precision displacement table 19 is started, and the flame spray gun 17 is heated along with the displacement table 19 according to the set heating length L2And a moving speed v3Reciprocating, igniting oxyhydrogen flame at the nozzle of the flame spray gun 17, the length of which is L2The single mode optical fiber 23 is uniformly heated to start drawing the optical fiber; the left and right fiber holders 24, 25 are respectively moved to the left and right by the displacement table 19 at a predetermined drawing speed v4And a stretching distance X2Moving, the displacement table 19 moves X2Stopping after the distance, and finishing the stretching process of the optical fiber. And finishing the manufacturing of the tapered optical fiber. The diameter of the taper zone of the manufactured tapered optical fiber 2 is 1-5 mu m;
step three, preprocessing the eccentric hollow microsphere cavity 1: injecting methanol into the eccentric hollow microsphere cavity 1 by using an injection pump, and continuously injecting the methanol at a certain flow rate for 5-10 minutes to wash off organic matters such as lipids and mineral oil possibly attached to the inner surface of the microsphere cavity; injecting 0.1-10 mol/L dilute hydrochloric acid into the eccentric hollow microsphere cavity 1 by using an injection pump, and continuously injecting for 10-20 minutes at a certain flow rate for washing off impurities such as metal ions and the like introduced in the manufacturing process; injecting 0.1-10 mol/L sodium hydroxide solution into the eccentric hollow microsphere cavity 1 by using an injection pump, continuously injecting for 60 minutes at a certain flow rate, and opening and hydrolyzing silicon-oxygen bonds on the surface of the silicon dioxide under an alkaline condition to generate silicon hydroxyl; injecting deionized water into the eccentric hollow microsphere cavity 1 by using an injection pump, and continuously injecting the deionized water at a certain flow rate for 20-50 minutes for washing away the sodium hydroxide solution. Opening a nitrogen bottle 8 switch, adjusting the size of a pressure reducing valve 9, connecting the eccentric hollow microsphere cavity 1 through a PU pipe 10 and a caliber conversion device 11, filling the pressure range of 0.01 MPa-0.08 MPa for 30 minutes, and drying and dehydrating. So far, the pretreatment of the eccentric hollow microsphere cavity 1 is finished;
injecting the nano magnetofluid material 3 into the eccentric hollow microsphere cavity 1 by using an injection pump, vertically placing the eccentric hollow microsphere cavity 1 and the tapered area of the tapered optical fiber 2 in a contact manner through a three-dimensional displacement table, and embedding and curing the eccentric hollow microsphere cavity 1 and the tapered optical fiber 2 through optical ultraviolet glue. Thus, the one-dimensional vector magnetic field sensor is manufactured.
And step five, repeating the step one, the step two, the step three and the step four, manufacturing three one-dimensional vector magnetic field sensors, placing the three one-dimensional vector optical fiber magnetic field sensors along the x axis, the y axis and the z axis respectively, and assembling the sensors by using optical ultraviolet glue to form a cured matrix 4 until the manufacturing of the three-dimensional vector magnetic field sensor is completed.
Claims (9)
1. A one-dimensional vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity is characterized by comprising the eccentric hollow microsphere cavity (1), a tapered optical fiber (2), a nano magnetofluid material (3) and a curing matrix (4); the eccentric hollow microsphere cavity (1) is vertically contacted with the tapered optical fiber (2) in the tapered region of the tapered optical fiber (2), the nano-magnetic fluid material (3) penetrates through the eccentric hollow microsphere cavity (1), a light wave field in the eccentric hollow microsphere cavity (1) is directly contacted with the nano-magnetic fluid material (3), and the eccentric hollow microsphere cavity (1) and the tapered optical fiber (2) are arranged in a curing matrix (4) in an embedding and curing manner; wherein:
incident light (5) enters the tapered optical fiber and enters the eccentric hollow microsphere cavity (1) in the tapered region by evanescent waves to generate a echo wall resonant mode (6); a large number of magnetic nano particles (7) are adsorbed to the inner surface of the eccentric hollow microsphere cavity (1) to form a chain-shaped cluster structure along the direction of a magnetic field.
2. The one-dimensional vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity as claimed in claim 1, wherein the outer diameter of the eccentric hollow microsphere cavity (1) is 100 μm to 500 μm, the wall thickness at the thin wall is 1 μm to 10 μm, and the wall thickness at the thick wall is 5 μm to 20 μm.
3. The one-dimensional vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity as claimed in claim 1, wherein the tapered region of the tapered optical fiber (2) has a diameter of 1 μm to 5 μm.
4. The vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity is characterized by comprising three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity, wherein the three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity are respectively placed along an x axis, a y axis and a z axis and are arranged in a curing matrix (4) in an embedding and curing mode to respectively detect the directions and the intensities of magnetic fields in three planes; each one-dimensional vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity structurally comprises an eccentric hollow microsphere cavity (1), a tapered optical fiber (2), a nano magnetofluid material (3) and a curing matrix (4); the eccentric hollow microsphere cavity (1) is vertically contacted with the tapered optical fiber (2) in the tapered region of the tapered optical fiber (2), the nano-magnetic fluid material (3) penetrates through the eccentric hollow microsphere cavity (1), a light wave field in the eccentric hollow microsphere cavity (1) is directly contacted with the nano-magnetic fluid material (3), and the eccentric hollow microsphere cavity (1) and the tapered optical fiber (2) are arranged in a curing matrix (4) in an embedding and curing manner; wherein:
incident light (5) enters the tapered optical fiber and enters the eccentric hollow microsphere cavity (1) in the tapered region by evanescent waves to generate a echo wall resonant mode (6); a large number of magnetic nano particles (7) are adsorbed to the inner surface of the eccentric hollow microsphere cavity (1) to form a chain-shaped cluster structure along the direction of a magnetic field.
5. The vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity as claimed in claim 4, wherein the outer diameter of the eccentric hollow microsphere cavity (1) is 100 μm to 500 μm, the wall thickness at the thin wall is 1 μm to 10 μm, and the wall thickness at the thick wall is 5 μm to 20 μm.
6. The vector optical fiber magnetic field sensor based on the eccentric hollow microsphere cavity as claimed in claim 4, wherein the tapered region of the tapered optical fiber (2) has a diameter of 1 μm to 5 μm.
7. The magnetic field vector test system of the eccentric hollow microsphere cavity based vector optical fiber magnetic field sensor according to any one of claims 4 to 6, characterized in that the system comprises a scanning laser (26), a 1 x 3 coupler (27), an eccentric hollow microsphere cavity based vector optical fiber magnetic field sensor (28), a photoelectric detector (29), a data acquisition and processing system (30), a three-dimensional Helmholtz coil (31), a high-precision digital control three-dimensional power supply (32) and a computer (33); wherein, the light emitted by the scanning laser (26) enters the three ends of the 1 x 3 coupler (27) and is output and is respectively connected with one end of three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity, which are arranged along the x axis, the y axis and the z axis in the vector optical fiber magnetic field sensor (28) based on the eccentric hollow microsphere cavity, the other three ends of the vector optical fiber magnetic field sensor (28) based on the eccentric hollow microsphere cavity are connected with a photoelectric detector (29), the photoelectric detector (29) receives signals and sends the signals to the data acquisition processing system (30), and the central wavelength movement of a resonance peak is recorded; a vector optical fiber magnetic field sensor (28) based on an eccentric hollow microsphere cavity is fixed in the center of a three-dimensional Helmholtz coil (31); the computer (33) is connected with the high-precision digital control three-dimensional power supply (32), the high-precision digital control three-dimensional power supply (32) is used for controlling the current in the coil, the accurate control of the direction and the strength of the magnetic field near the vector magnetic field sensor is realized, and the magnetic field strength and the direction are monitored in real time through the computer (33).
8. A method for manufacturing a one-dimensional vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity is characterized by comprising the following steps:
step one, manufacturing an eccentric hollow microsphere cavity (1): taking the length of 10 mm-20 mm and the outer diameter of 100 mm
~700
Wall thickness 30
~60
The air pressure in the thick-wall quartz microtube (13) is accurately controlled to be 0.1-1.0 MPa; drying the oxyhydrogen gas mixture to remove water molecules in the generated oxyhydrogen gas, and controlling the flow of the oxyhydrogen gas mixture to be 5 sccm-2500 sccm; igniting oxyhydrogen flame, and uniformly heating the thick-wall quartz microtube (13); preheating timet 1Then drawing into a thin-wall quartz microtube; accurately controlling the air pressure in the thin-wall quartz microtube to be 0.05 MPa-1.0 MPa; controlling the flow of the oxyhydrogen mixture to be 5 sccm-1000 sccm, igniting oxyhydrogen flame, and heating for a set timet 2The front end and the rear end of the thin-wall quartz microtube are heated unevenly, and an eccentric hollow microsphere cavity (1) is formed under the action of internal air pressure, so that the eccentric hollow microsphere cavity (1) is manufactured;
step two, manufacturing the tapered optical fiber (2): taking a 10-100 cm single-mode optical fiber 23, and enabling the optical fiber to be parallel to an axis in the displacement direction and to be tight; the oxyhydrogen gas is dried to remove water molecules in the generated oxyhydrogen gas; controlling hydrogenThe flow rate of the oxygen mixed gas is 5 sccm-2500 sccm; igniting oxyhydrogen flame, uniformly heating the single-mode optical fiber (23), and stretching the optical fiber until the diameter of the taper zone of the manufactured tapered optical fiber (2) is 1
~5
The process of drawing the optical fiber is finished; thus, the tapered optical fiber is manufactured;
step three, preprocessing the eccentric hollow microsphere cavity (1): injecting methanol into the eccentric hollow microsphere cavity (1), and continuously injecting for 5-10 minutes to wash off organic matters such as lipid and mineral oil possibly attached to the inner surface of the microsphere cavity; injecting 0.1-10 mol/L dilute hydrochloric acid into the eccentric hollow microsphere cavity (1), and continuously injecting for 10-20 minutes to wash away impurities such as metal ions and the like introduced in the manufacturing process; injecting 0.1-10 mol/L sodium hydroxide solution into the eccentric hollow microsphere cavity (1), continuously injecting for 60 minutes, and opening and hydrolyzing silicon-oxygen bonds on the surface of the silicon dioxide under an alkaline condition to generate silicon hydroxyl; injecting deionized water into the eccentric hollow microsphere cavity (1), and continuously injecting for 20-50 minutes for washing away sodium hydroxide solution; filling nitrogen into the eccentric hollow microsphere cavity for 30 minutes through a PU pipe (10) and a caliber conversion device (11), wherein the filling pressure range is 0.01 MPa-0.08 MPa, and the nitrogen is used for drying and dehydrating; so that the pretreatment of the eccentric hollow microsphere cavity (1) is finished;
injecting the nano-magnetic fluid material (3) into the eccentric hollow microsphere cavity (1), vertically placing the eccentric hollow microsphere cavity (1) and the tapered area of the tapered optical fiber (2) in a contact manner, embedding and curing the eccentric hollow microsphere cavity (1) and the tapered optical fiber (2) through optical ultraviolet glue, and thus finishing the manufacturing of the one-dimensional vector magnetic field sensor based on the eccentric hollow microsphere cavity.
9. A method for manufacturing a vector optical fiber magnetic field sensor based on an eccentric hollow microsphere cavity is characterized by comprising the following steps:
step one, manufacturing an eccentric hollow microsphere cavity (1): taking the length of 10 mm-20 mm and the outer diameter of 100 mm
~700
Wall thickness 30
~60
The air pressure in the thick-wall quartz microtube (13) is accurately controlled to be 0.1-1.0 MPa; drying the oxyhydrogen gas mixture to remove water molecules in the generated oxyhydrogen gas, and controlling the flow of the oxyhydrogen gas mixture to be 5 sccm-2500 sccm; igniting oxyhydrogen flame, and uniformly heating the thick-wall quartz microtube (13); preheating timet 1Then drawing into a thin-wall quartz microtube; accurately controlling the air pressure in the thin-wall quartz microtube to be 0.05 MPa-1.0 MPa; controlling the flow of the oxyhydrogen mixture to be 5 sccm-1000 sccm, igniting oxyhydrogen flame, and heating for a set timet 2The front end and the rear end of the thin-wall quartz microtube are heated unevenly, and an eccentric hollow microsphere cavity (1) is formed under the action of internal air pressure, so that the eccentric hollow microsphere cavity (1) is manufactured;
step two, manufacturing the tapered optical fiber (2): taking a single-mode optical fiber (23) with the length of 10 cm-100 cm, and enabling the optical fiber to be parallel to the axis of the displacement direction and to be tight; the oxyhydrogen gas is dried to remove water molecules in the generated oxyhydrogen gas; controlling the flow rate of the hydrogen-oxygen mixed gas to be 5 sccm-2500 sccm; igniting oxyhydrogen flame, uniformly heating the single-mode optical fiber (23), and stretching the optical fiber until the diameter of the taper zone of the manufactured tapered optical fiber (2) is 1
~5
The process of drawing the optical fiber is finished; thus, the tapered optical fiber is manufactured;
step three, preprocessing the eccentric hollow microsphere cavity (1): injecting methanol into the eccentric hollow microsphere cavity (1), and continuously injecting for 5-10 minutes to wash off organic matters such as lipid and mineral oil possibly attached to the inner surface of the microsphere cavity; injecting 0.1-10 mol/L dilute hydrochloric acid into the eccentric hollow microsphere cavity (1), and continuously injecting for 10-20 minutes to wash away impurities such as metal ions and the like introduced in the manufacturing process; injecting 0.1-10 mol/L sodium hydroxide solution into the eccentric hollow microsphere cavity (1), continuously injecting for 60 minutes, and opening and hydrolyzing silicon-oxygen bonds on the surface of the silicon dioxide under an alkaline condition to generate silicon hydroxyl; injecting deionized water into the eccentric hollow microsphere cavity (1), and continuously injecting for 20-50 minutes for washing away sodium hydroxide solution; filling nitrogen into the eccentric hollow microsphere cavity for 30 minutes through a PU pipe (10) and a caliber conversion device (11), wherein the filling pressure range is 0.01 MPa-0.08 MPa, and the nitrogen is used for drying and dehydrating; so that the pretreatment of the eccentric hollow microsphere cavity (1) is finished;
injecting a nano magnetofluid material (3) into the eccentric hollow microsphere cavity 1, vertically placing the eccentric hollow microsphere cavity (1) and the tapered area of the tapered optical fiber (2) in a contact manner, embedding and curing the eccentric hollow microsphere cavity (1) and the tapered optical fiber (2) through optical ultraviolet glue, and thus finishing the manufacturing of the one-dimensional vector magnetic field sensor based on the eccentric hollow microsphere cavity;
and fifthly, repeating the first step to the fourth step, manufacturing three one-dimensional vector magnetic field sensors, placing the three one-dimensional vector optical fiber magnetic field sensors based on the eccentric hollow microsphere cavity along the x axis, the y axis and the z axis respectively, assembling the sensors by using optical ultraviolet glue to form a cured matrix (4), and finishing manufacturing the vector magnetic field sensor based on the eccentric hollow microsphere cavity.
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| CN112415443B (en) * | 2020-10-14 | 2022-10-18 | 杭州电子科技大学 | System for enhancing low-frequency band magnetic field detection performance by mechanical mode resonance frequency band |
| CN112924907B (en) * | 2021-01-26 | 2021-11-09 | 北京邮电大学 | High-sensitivity three-dimensional magnetic field detection method using optical microcavity |
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