CN103926220A - Annular optical fiber gas sensor coated with graphene film - Google Patents
Annular optical fiber gas sensor coated with graphene film Download PDFInfo
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- CN103926220A CN103926220A CN201410181901.5A CN201410181901A CN103926220A CN 103926220 A CN103926220 A CN 103926220A CN 201410181901 A CN201410181901 A CN 201410181901A CN 103926220 A CN103926220 A CN 103926220A
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Abstract
The invention discloses an annular optical fiber gas sensor coated with a graphene film, relates to the field of the gas sensor, and particularly relates to the field of a micro-nanometer annular optical fiber sensor. The tail section of a micro-nanometer optical fiber (input optical fiber) is tied to form a micro-annular structure which is arranged on a base plate, the tail end of the micro-annular structure is coupled with another same specification of micro-nanometer optical fiber (output optical fiber) arranged on the same base plate, and the graphene film is used for covering a far end of the input optical fiber micro-annular structure so as to realize the aim of the invention, thus the annular optical fiber gas sensor has the effects of being small in size, simple to manufacture, low in cost, high in sensitivity, rapid in response, easy to regulate, good in stability and convenient to integrate.
Description
Technical field
The present invention relates to gas sensor field, particularly relate to a kind of micro-nano optical fibre ring sensor field.
Background technology
The quick and precisely detection of gas concentration is safety in production, monitoring of environment, medical monitoring, the requisite gordian technique of industrial manufacture process, at aspects such as the industries such as petrochemical complex, coal, electric power, metallurgy, medical treatment, agricultural and environmental engineering and bioengineering, have purposes widely, it for guaranteeing production safety, to improve the quality of products, prevent the pollution of the environment, reduce energy resource consumption etc. all very important.
Interferometric method is one of the sensitiveest known Detection Techniques, and therefore various optical interferometry methods can be used in Fibre Optical Sensor.The interferometric optical fiber sensor of this employing interferometric method can reach high sensitivity.Interferometric optical fiber sensor is divided into two large types at present, anharmonic vibration shape slab guide sensor, and as surface plasma body resonant vibration, Fabry-Bai Luo chamber, and the another kind of resonance sensor based on micro-ring, micro-dish, micro-sphere structure.The detection principle of slab guide sensor is the variation based on phase place and obtaining mostly, for anharmonic vibration shape waveguide sensor, for being changed, phase place can be accumulated to the degree that can effectively be surveyed, required search coverage length is conventionally longer, therefore, they need larger device size and the determinand of more amount.And resonance sensor based on micro-ring, micro-dish, micro-sphere structure, introducing due to resonance effect, although the physical size of such sensor is very little, but light signal can be in chamber constantly resonance, amplification, therefore the detection length after equivalence is enough to cause that the information change such as phase place, intensity are to detectable value, less to the amount of determinand also demand.In addition, the high quality factor that resonance effect is introduced can effectively improve the detectivity of device.Microballoon is owing to having good surface smoothness, there are very high quality factor, therefore their sensitivity is fine, but current shortcoming all needs while being making to arrive molten condition to increase surface smoothness with LASER HEATING waveguide material, therefore add man-hour randomness large, repeatability is bad, and inconvenient with other device coupling integration.The making of micro-dish sensor is relatively simple, reproducible, but the same with microballoon, and pattern when light wave transmits is therein Whispering-gallery-mode but not single mode propagation, thus during for sensing between different mode crosstalk larger.By comparison, micro-ring structure can make device work in single mode state completely by the width of control loop, and elimination is crosstalked, and reduce noise, and manufacture craft is simple.
Document < < Hybrid Graphene-Microfiber Waveguide for Chemical Gas Sensing (the attaching type hybrid waveguide sensor of chemical gas of Graphene micro optical fiber) > > VOL.20, NO.1, JANUARY/FEBRUARY2014, Yu Wu, Bai-Cheng Yao, Yang Cheng, Yun-Jiang Rao, a kind of attaching type hybrid waveguide gas sensor of Graphene micro optical fiber is disclosed, its structure comprises: substrate, graphene layer, input optical fibre, output optical fibre, one graphene layer is wherein set on substrate, input optical fibre and output optical fibre are set on graphene layer, input optical fibre and output optical fibre are of coupled connections.There is following defect in this device: 1. optical fiber is positioned on graphene layer, and contact area is little, limited to the light contributive rate of propagating in optical fiber after Graphene adsorption gas molecule; 2. the method is with changing light intensity in optical fiber after Graphene adsorption gas molecule, and the light intensity of exporting by this device of demodulation judges gas type, and its sensitivity is low, the response time is long, dynamic range is little; 3. the attached type sensing arrangement of this note graphene layer area is excessive, is subject to surrounding environment influence, and reliability is lower.
Summary of the invention
For the weak point of background technology, the technical matters that the present invention solves is: provide a kind of volume little, make simple, with low cost, highly sensitive, fast response time, be easy to adjustment, good stability, be convenient to integrated fiber gas sensor.
Technical scheme of the present invention is that the rear of a micro-nano fiber (input optical fibre) is formed by knots tied to micro-ring structure, and be arranged on substrate, its tail end and another same size are also arranged on same on-chip micro-nano fiber (output optical fibre) and are of coupled connections, with graphene film, cover the far-end of the micro-ring structure of input optical fibre, when gas absorption is on Graphene, can change the effective refractive index of Graphene, the decay that makes micro-ring produce large intensity to the optical fiber of transmission within it, darker notch depth and intrinsic SPA sudden phase anomalies, thereby change the notch depth that light is propagated in optical fiber, frequency spectrum drift, by spectrometer, detect the variation of light notch depth and frequency spectrum drift, judgement gas type, thereby realize goal of the invention.Therefore a kind of optical fibre ring gas sensor that covers graphene film of the present invention comprises: substrate, input optical fibre, output optical fibre, graphene layer, it is characterized in that: input optical fibre rear is formed by knots tied micro-ring structure and is arranged on substrate, its micro-ring structure far-end covers one deck graphene film, the tail end of input optical fibre be arranged on same on-chip output optical fibre and be of coupled connections.
Described input optical fibre head section diameter is 125um, and rear diameter is 2～3um, and micro-ring structure diameter of input optical fibre is 500～600um, and output optical fibre head section diameter is 2～3um, and rear diameter is 125um;
Described input optical fibre and output optical fibre coupling regime length are 4～5cm;
Described graphene film thickness is 0.38nm, and the fiber lengths of its covering is 800～1000um.
The present invention is by being formed by knots tied micro-ring structure by the rear of input optical fibre, and be arranged on substrate, its tail end and another same size are also arranged on same on-chip output optical fibre and are of coupled connections, with graphene film, cover the far-end of the micro-ring structure of optical fiber, thus have volume little, make simple, with low cost, highly sensitive, fast response time, be easy to adjustment, good stability, be convenient to integrated effect.
Accompanying drawing explanation
Fig. 1 is a kind of optical fibre ring gas sensor configuration schematic diagram that covers graphene film of the present invention;
Fig. 2 is application experimental system figure of the present invention;
Fig. 3 is testing result figure before and after gas effect of the present invention.
In figure: 1. substrate, 2. output optical fibre, 3. graphene film, 4 input optical fibres, 6. gas sensor, 5. wideband light source, 7. spectrometer.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
The long 30mm of substrate of the present invention, wide 10mm, material is magnesium fluoride; Input optical fibre, for the ordinary optic fibre that is 125um by diameter is drawn into the micro optical fiber that diameter is 2～3um, is then knotted into micro-ring structure at its rear, and this micro-ring structure diameter is 500～600um; Micro-ring structure far-end of input optical fibre covers the graphene film that a layer thickness is 0.38nm, and the fiber lengths of covering is 800～1000um; The ordinary optic fibre that output optical fibre is 125um by diameter is equally drawn into the micro optical fiber that diameter is 2～3um, its micro optical fiber section and input optical fibre tail end by Robert Van de Walle hereby power be of coupled connections, coupling length is 4～5cm; The partial fixing that is 12um by fibre diameter by ultraviolet glue completes the making of this gas sensor on magnesium fluoride substrate.
In actual gas sensing, wideband light source enters light signal micro-nano fiber and propagates from input optical fibre head end, form with evanescent wave enters ring-type mechanism along micro-nano fiber surface, when light signal process is wrapped up the region of Graphene, by the guiding of micro-ring, in Graphene surface circle transmission, finally at the Coupling point place of ring, mutually interfere, produce resonance spectrum.And when evanescent wave transmits on Graphene surface, the variation of gas concentration can regular change Graphene effective refractive index, thereby change intensity and the phase place of the evanescent wave signal of micro-ring-Graphene surface transmission, and then change resonance intensity and the frequency spectrum drift of micro-ring.Through the resonance spectrum of coupled transfer, the output being then coupled by input optical fibre tail end is fine to be received, and final transmission light spectrometer, detects the resonance spectrum under gas with various concentration.Therefore by analyze the variation of resonance spectrum at receiving end, can realize the mapping between Gas Molecular Density and resonance spectrum, and then can calculate the concentration of chemical gas, thereby realize the function of gas sensor.Fig. 3 is testing result figure before and after gas effect of the present invention.
Above-mentioned specific implementation method is used for the apparatus of the present invention of explaining, rather than limits the invention, and in the protection domain of spirit of the present invention and claims, to any change of the present invention and change, all falls into protection scope of the present invention.
Claims (4)
1. an optical fibre ring gas sensor that covers graphene film, comprise: substrate, input optical fibre, output optical fibre, graphene layer, it is characterized in that: input optical fibre rear is formed by knots tied micro-ring structure and is arranged on substrate, its micro-ring structure far-end covers one deck graphene film, the tail end of input optical fibre be arranged on same on-chip output optical fibre and be of coupled connections.
2. a kind of optical fibre ring gas sensor that covers graphene film as claimed in claim 1, it is characterized in that input optical fibre head section diameter is 125um, rear diameter is 2～3um, micro-ring structure diameter of input optical fibre is 500～600um, output optical fibre head section diameter is 2～3um, and rear diameter is 125um.
3. a kind of optical fibre ring gas sensor that covers graphene film as claimed in claim 1, is characterized in that described input optical fibre and output optical fibre coupling regime length are 4～5cm.
4. a kind of optical fibre ring gas sensor that covers graphene film as claimed in claim 1, is characterized in that described graphene film thickness is 0.38nm, and the fiber lengths of its covering is 800～1000um.
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Cited By (9)
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|---|---|---|---|---|
| CN105549229A (en) * | 2016-03-16 | 2016-05-04 | 电子科技大学 | Mid-infrared electrooptical modulator based on graphene-chalcogenide glass micro-ring resonant cavity |
| CN105629521A (en) * | 2016-01-19 | 2016-06-01 | 西北工业大学 | Graphene-assisted micro optical fiber ring-shaped cavity all-optical switch |
| CN105699328A (en) * | 2016-03-11 | 2016-06-22 | 济南大学 | Detection system based on ED-MFKL (Er<3+>-doped microfiber knot laser) and method |
| CN109164051A (en) * | 2018-09-27 | 2019-01-08 | 电子科技大学 | A kind of Echo Wall Microsphere Cavities monomolecular gases sensor that graphene is embedded |
| CN109946004A (en) * | 2019-04-29 | 2019-06-28 | 华侨大学 | A kind of micro pressure discoloration sensor and preparation method thereof |
| CN110448268A (en) * | 2018-05-08 | 2019-11-15 | 南京大学 | Health monitoring sensor and preparation method and measuring system based on optics micro optical fiber |
| CN113551831A (en) * | 2021-07-05 | 2021-10-26 | 浙江大学 | Pressure detection device and method based on polymer optical fiber knot shape sensor |
| CN114370967A (en) * | 2021-12-16 | 2022-04-19 | 之江实验室 | Three-dimensional force sensor based on polymer optical fiber junction and detection method |
| GB2615867A (en) * | 2021-03-24 | 2023-08-23 | Paragraf Ltd | A method of forming a graphene layer structure and a graphene substrate |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105629521A (en) * | 2016-01-19 | 2016-06-01 | 西北工业大学 | Graphene-assisted micro optical fiber ring-shaped cavity all-optical switch |
| CN105699328A (en) * | 2016-03-11 | 2016-06-22 | 济南大学 | Detection system based on ED-MFKL (Er<3+>-doped microfiber knot laser) and method |
| CN105699328B (en) * | 2016-03-11 | 2018-08-10 | 济南大学 | A kind of detecting system and method based on er-doped micro-nano fiber annular PN junction laser PN |
| CN105549229A (en) * | 2016-03-16 | 2016-05-04 | 电子科技大学 | Mid-infrared electrooptical modulator based on graphene-chalcogenide glass micro-ring resonant cavity |
| CN110448268A (en) * | 2018-05-08 | 2019-11-15 | 南京大学 | Health monitoring sensor and preparation method and measuring system based on optics micro optical fiber |
| CN109164051A (en) * | 2018-09-27 | 2019-01-08 | 电子科技大学 | A kind of Echo Wall Microsphere Cavities monomolecular gases sensor that graphene is embedded |
| CN109164051B (en) * | 2018-09-27 | 2021-03-30 | 电子科技大学 | Graphene embedded echo wall microsphere cavity monomolecular gas sensor |
| CN109946004A (en) * | 2019-04-29 | 2019-06-28 | 华侨大学 | A kind of micro pressure discoloration sensor and preparation method thereof |
| CN109946004B (en) * | 2019-04-29 | 2024-02-02 | 华侨大学 | Miniature pressure color-changing sensor and preparation method thereof |
| GB2615867A (en) * | 2021-03-24 | 2023-08-23 | Paragraf Ltd | A method of forming a graphene layer structure and a graphene substrate |
| GB2615867B (en) * | 2021-03-24 | 2024-02-14 | Paragraf Ltd | A method of forming a graphene layer structure and a graphene substrate |
| CN113551831A (en) * | 2021-07-05 | 2021-10-26 | 浙江大学 | Pressure detection device and method based on polymer optical fiber knot shape sensor |
| CN113551831B (en) * | 2021-07-05 | 2022-07-01 | 浙江大学 | Pressure detection device and method based on polymer optical fiber knot-shaped sensor |
| CN114370967A (en) * | 2021-12-16 | 2022-04-19 | 之江实验室 | Three-dimensional force sensor based on polymer optical fiber junction and detection method |
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