CN110470632A - Three-dimensional absorption characteristic detection device and method based on induced with laser photo-thermal effect - Google Patents
Three-dimensional absorption characteristic detection device and method based on induced with laser photo-thermal effect Download PDFInfo
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- CN110470632A CN110470632A CN201910777158.2A CN201910777158A CN110470632A CN 110470632 A CN110470632 A CN 110470632A CN 201910777158 A CN201910777158 A CN 201910777158A CN 110470632 A CN110470632 A CN 110470632A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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Abstract
The invention discloses a kind of three-dimensional absorption characteristic detection device and method based on induced with laser photo-thermal effect, three-dimensional absorption characteristic detection device includes the pump light source and probe source towards sample to be tested, the first detection light collecting lens being sequentially arranged from front to back, first detection light spatial light filter and the first photodetector, the second detection light collecting lens being sequentially arranged from front to back, second detection light spatial light filter and the second photodetector, and the Sample Scan telecontrol equipment for driving sample to be tested mobile, the plane of incidence that the detection light beam that sample to be tested reflects detects light collecting lens towards first, the plane of incidence that the detection light beam that sample to be tested transmits detects light collecting lens towards second.The present invention measures the two-dimensional surface absorption characteristic distribution of material and three-dimensional body absorption characteristic distribution, overcomes common optical absorption detection method and lacks three-dimensional space resolution capability, cannot distinguish between two-dimensional surface absorption and the systemic problem of said three-dimensional body.
Description
Technical field
The present invention relates to field of optical detection, specifically a kind of three-dimensional absorption characteristic inspection based on induced with laser photo-thermal effect
Survey device and method.
Background technique
The optical absorption characteristic of material is an important parameter for evaluating quality of materials.In many applications, it not only needs
Know total absorption of material, and needs to know the spatial characteristics that material absorbs.For example, in many strong laser systems,
Reflection type optical element (such as laser high-reflecting film element) Surface absorption defect, transmission-type element (such as Optical doubling frequency crystal, lens
Deng) Surface absorption and body absorption defect be one of the main reason for causing damage from laser, therefore to Surface absorption defect distribution,
Body absorption defect distribution is detected, and has very important meaning to improvement optical element processing technology, lift elements quality.
For another example, in the production process of some high precision components, the absorption loss of strict control element is needed, it is therefore desirable to right
Element surface absorption loss and body absorption loss measure respectively.
Currently used absorption detecting method has: spectrophotometry, ellipsometry, photo-thermal method etc..Wherein spectrophotometry is
It is measured by the reflectivity and transmissivity to element to calculate and absorb, this method precision is generally 10-3Left and right, is not suitable for
Weak absorbing element, and Surface absorption and body absorption cannot be distinguished.Ellipsometry can only measure the Surface absorption of thin-film component, nothing
Method measures body absorption.Photo-thermal method detection sensitivity is high, to absorptivity detection sensitivity up to 10-7To 10-8, it is suitable for faint
The detection of absorption.The common detection mode of photo-thermal method has laser calorimetry, laser deflection method, laser thermal lens method etc..These sides
Method does not have three-dimensional space resolution capability, and Surface absorption and body absorption cannot be distinguished.
Summary of the invention
The three-dimensional absorption characteristic inspection based on induced with laser photo-thermal effect that the technical problem to be solved in the present invention is to provide a kind of
Device and method are surveyed, the distribution of two-dimensional surface absorption characteristic and three-dimensional body absorption characteristic distribution of material are measured, overcome
Common optical absorption detection method, which lacks three-dimensional space resolution capability, cannot distinguish between two-dimensional surface absorbs and three-dimensional body absorption
The problem of.
The technical solution of the present invention is as follows:
Three-dimensional absorption characteristic detection device based on induced with laser photo-thermal effect, includes the pump light being sequentially arranged from front to back
Source and pumping optic modulating device, the first detection light collecting lens being sequentially arranged from front to back, the first detection light spatial light filter
With the first photodetector, be sequentially arranged from front to back second detection light collecting lens, second detection light spatial light filter and
Second photodetector and probe source and Sample Scan telecontrol equipment for driving sample to be tested mobile, the pump
The exit end of Pu optic modulating device, probe source direction are fixed on the sample to be tested upper surface on Sample Scan telecontrol equipment
Same exposure spots, the incidence that the detection light beam that the sample to be tested upper surface reflects detects light collecting lens towards first
Face, the plane of incidence that the detection light beam that the sample to be tested lower surface transmits detects light collecting lens towards second.
The pump light source and probe source is monochromatic source.
The pump light source and probe source is laser light source.
The rear end of the pumping optic modulating device has also been sequentially arranged pump light expand device and pump light condenser lens,
The exit end direction of pump light condenser lens is fixed on the upper surface of the sample to be tested on Sample Scan telecontrol equipment.
The rear end of the probe source has also been sequentially arranged detection light expand device and detection light condenser lens, detects light
The exit end direction of condenser lens is fixed on the upper surface of the sample to be tested on Sample Scan telecontrol equipment.
The choosing of the first detection optical wavelength is provided between the first detection light spatial light filter and the first photodetector
Select optical filter.
The choosing of the second detection optical wavelength is provided between the second detection light spatial light filter and the second photodetector
Select optical filter.
The Sample Scan telecontrol equipment is transverse and longitudinal horizontal mobile mechanism, and Sample Scan telecontrol equipment drives to test sample
Product carry out moving horizontally laterally or longitudinally, and pump light source and the exposure spots of probe source is allowed to carry out two dimension on sample to be tested surface
Point by point scanning carries out three-dimensional point by point scanning in sample to be tested body.
Three-dimensional absorption characteristic detection method based on induced with laser photo-thermal effect includes the distribution of two-dimensional surface absorption characteristic
Detection method and three-dimensional body absorption characteristic distribution detection method；The step of the two-dimensional surface absorption characteristic distribution detection method
Suddenly are as follows: the modulated post-concentration of pump beam of pump light source transmitting to the upper surface of sample to be tested first, probe source transmitting
The modulated post-concentration of light beam is detected to sample upper surface, and pump beam, detection light beam are towards the same of sample to be tested upper surface
One exposure spots, the detection light beam reflected by sample to be tested upper surface are collected by the first detection light collecting lens, are successively passed through again
It filters after adjusting, is detected into the first photodetector, Photothermal Signals measured by the first photodetector are by laser
Caused by inducing surface heat deformation effect, what which reflected is the absorption characteristic of sample to be tested two-dimensional surface, utilizes sample
Product scanning motion device drives the point by point scanning of sample to be tested movement realization sample to be tested two-dimensional surface, to obtain sample to be tested
Two-dimensional surface absorption characteristic distributed intelligence；The step of described three-dimensional body absorption characteristic distribution detection method are as follows: pump first
The modulated post-concentration of pump beam of Pu light source transmitting is to the upper surface of sample to be tested, and the detection light beam of probe source transmitting is through adjusting
Post-concentration processed is to sample upper surface, and pump beam, detection light beam be towards the same exposure spots of sample to be tested upper surface, by
The detection light beam that sample lower surface transmits by second detection light collecting lens collect, again successively through optical filtering adjust after, into
Enter the second photodetector to be detected, Photothermal Signals measured by the second photodetector are by induced with laser thermal lensing effect
It is caused, Photothermal Signals reflection be the three-dimensional intracorporal absorption characteristic of sample to be tested using Sample Scan telecontrol equipment drive to
The three-dimensional intracorporal point by point scanning of sample is realized in sample movement, to obtain the three-dimensional body absorption characteristic distribution of sample to be tested
Information.
Reflecting light thermal measurement mode of the invention be based on laser induced surface thermal deformation effect, the basic principle is that:
Material upper surface is irradiated using pumping laser, material can absorb laser energy, temperature is caused to increase, to produce in material upper surface
Heat deformation, this variation are related to the Surface absorption of material.Detection to material surface thermal deformation caused by pumping laser
It is to be realized using a branch of exploring laser light.Exploring laser light is overlapped on the surface of the material with pumping laser, due to caused by pumping laser
The propagation characteristic of surface thermal deformation, the exploring laser light of reflection can change.When measurement, in the detection light light by sample to be tested
A detection light spatial light filter is added in road, the detection light energy of photodetector is reached after detecting light spatial light filter
It can be because the thermal deformation of material surface generates variation to the convergence of detection light beam or effect weakening.The absorption of material surface is bigger,
The Photothermal Signals that photodetector measures are also bigger.Within the scope of certain pump laser power, absorbs and believe with the photo-thermal of measurement
It is number in a linear relationship.Therefore, what reflecting light thermal measurement mode obtained is that material surface absorbs information.
Transmission-type photothermal measurement be based on induced with laser thermal lensing effect, the basic principle is that: utilize a branch of pumping laser
It transmits in material bodies, material can absorb laser energy, temperature is caused to increase, to make the folding in laser irradiation region in material bodies
It penetrates rate and generates variation.This variation is related to the body absorption of material.Detection to Refractive Index of Material caused by pumping laser
It is to be realized using a branch of exploring laser light.Exploring laser light is overlapped in material bodies with pumping laser, due to caused by pumping laser
Variations in refractive index is equivalent to and has increased one " lens " newly, changes so as to cause the exploring laser light propagation characteristic of transmission.Measurement
When, a detection light spatial light filter is added in the detection light optical path through sample to be tested, by detecting light spatial light filter
Afterwards reach photodetector detection light energy can because Refractive Index of Material variation to detect light beam convergence or effect weakening and
Generate variation.The intracorporal absorption of material is bigger, and the Photothermal Signals that photodetector measures are also bigger.In certain pumping laser
In power bracket, the Photothermal Signals of body absorption energy and measurement are in a linear relationship.Therefore, transmission-type photothermal measurement mode obtains
Be material bodies interior suction collect mail breath.
Advantages of the present invention:
The present invention is using the reflective and integrated measurement method of transmission-type, using reflective measurement method to the bivariate table of material
Absorption characteristic distribution in face measures, and is surveyed using three-dimensional body absorption characteristic distribution of the transmission-type measurement method to material
Amount, so as to effectively distinguish the Surface absorption characteristic and body absorption of material, to solve common optical absorption detection method
Lack three-dimensional space resolution capability, cannot distinguish between the problem of Surface absorption and body absorption.
Detailed description of the invention
Fig. 1 is the working principle diagram of three-dimensional absorption characteristic detection device of the invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Three-dimensional absorption characteristic detection device based on induced with laser photo-thermal effect, includes the pump being sequentially arranged from front to back
Pu light source 1, pumping optic modulating device 2, pump light expand device 3 and pump light condenser lens 4, the spy being sequentially arranged from front to back
Light source 5, detection light expand device 6 and detection light condenser lens 7 are surveyed, the first detection light collecting lens being sequentially arranged from front to back
10, the first detection light spatial light filter 11, first detects optical wavelength selection optical filter 12 and the first photodetector 13, from going to
The second detection light collecting lens 14, second being sequentially arranged afterwards detect light spatial light filter 15, second and detect optical wavelength selection filter
Light device 16 and the second photodetector 17, and the Sample Scan telecontrol equipment 9 for driving sample to be tested mobile 8, pump light
The exit end of condenser lens 4, detection light condenser lens 7 direction are fixed on the sample to be tested 8 on Sample Scan telecontrol equipment 9
The same exposure spots on surface, the detection light beam that 8 upper surface of sample to be tested reflects detect entering for light collecting lens 10 towards first
Penetrate face, the plane of incidence that the detection light beam that 8 lower surface of sample to be tested transmits detects light collecting lens 14 towards second.
Wherein, pump light source 1 and probe source 5 are monochromatic source, preferably laser light source.
Sample Scan telecontrol equipment 9 is transverse and longitudinal horizontal mobile mechanism, and Sample Scan telecontrol equipment 9 drives sample to be tested 8
Moving horizontally laterally or longitudinally is carried out, pump light source 1 and the exposure spots of probe source 5 is allowed to carry out two on 8 surface of sample to be tested
It ties up point by point scanning, carry out three-dimensional point by point scanning in 8 body of sample to be tested.
Three-dimensional absorption characteristic detection method based on induced with laser photo-thermal effect includes the distribution of two-dimensional surface absorption characteristic
Detection method and three-dimensional body absorption characteristic distribution detection method；
Two-dimensional surface absorption characteristic is distributed the step of detection method are as follows: after the pump beam of the transmitting of pump light source 1 first is modulated
Converge to the upper surface of sample to be tested 8, the upper table of the detection modulated post-concentration of light beam that probe source 5 emits to sample to be tested
Face, and pump beam, detection light beam towards the same exposure spots of 8 upper surface of sample to be tested, are reflected by 8 upper surface of sample to be tested
Detection light beam out is collected by the first detection light collecting lens 10, again successively by the first detection light spatial light filter 11 and first
After the optical filtering adjusting for detecting optical wavelength selection optical filter 12, detected into the first photodetector 13, the first photodetection
Photothermal Signals measured by device 13 are as caused by laser induced surface thermal deformation effect, and Photothermal Signals reflection is to test sample
The absorption characteristic of product two-dimensional surface drives the movement of sample to be tested 8 to realize sample to be tested bivariate table using Sample Scan telecontrol equipment 9
The point by point scanning in face, to obtain the two-dimensional surface absorption characteristic distributed intelligence of sample to be tested 8；
The step of three-dimensional body absorption characteristic distribution detection method are as follows: after the pump beam of the transmitting of pump light source 1 first is modulated
Converge to the upper surface of sample to be tested 8, the upper table of the detection modulated post-concentration of light beam that probe source 5 emits to sample to be tested 8
Face, and pump beam, detection light beam towards the same exposure spots of 8 upper surface of sample to be tested, are transmitted by 8 lower surface of sample to be tested
Detection light beam out is collected by the second detection light collecting lens 14, again successively by the second detection light spatial light filter 15 and second
After the optical filtering adjusting for detecting optical wavelength selection optical filter 16, detected into the second photodetector 17, the second photodetection
Photothermal Signals measured by device 17 are as caused by induced with laser thermal lensing effect, and Photothermal Signals reflection is sample to be tested 8
Three-dimensional intracorporal absorption characteristic drives the movement of sample to be tested 8 to realize that sample three-dimensional is intracorporal using Sample Scan telecontrol equipment 9
Point by point scanning, to obtain the three-dimensional body absorption property distribution information of sample to be tested 8.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (9)
1. the three-dimensional absorption characteristic detection device based on induced with laser photo-thermal effect, it is characterised in that: include suitable from front to back
The pump light source and pumping optic modulating device of secondary setting, the first detection light collecting lens being sequentially arranged from front to back, first are visited
Light spatial light filter and the first photodetector are surveyed, second be sequentially arranged from front to back detects light collecting lens, the second detection
Light spatial light filter and the second photodetector and probe source and Sample Scan movement for driving sample to be tested mobile
Device, the exit end of the pumping optic modulating device, probe source towards be fixed on Sample Scan telecontrol equipment to
The same exposure spots of sample upper surface, the detection light beam that the sample to be tested upper surface reflects detect light towards first and receive
Collect the plane of incidence of lens, the detection light beam that the sample to be tested lower surface transmits detects entering for light collecting lens towards second
Penetrate face.
2. three-dimensional absorption characteristic detection device according to claim 1, it is characterised in that: the pump light source and detection
Light source is monochromatic source.
3. three-dimensional absorption characteristic detection device according to claim 2, it is characterised in that: the pump light source and detection
Light source is laser light source.
4. three-dimensional absorption characteristic detection device according to claim 1, it is characterised in that: the pumping optic modulating device
Rear end be also sequentially arranged pump light expand device and pump light condenser lens, the exit end of pump light condenser lens is towards solid
Due to the upper surface of the sample to be tested on Sample Scan telecontrol equipment.
5. three-dimensional absorption characteristic detection device according to claim 1, it is characterised in that: the rear end of the probe source
It is also sequentially arranged detection light expand device and detection light condenser lens, the exit end direction for detecting light condenser lens is fixed on sample
The upper surface of sample to be tested on product scanning motion device.
6. three-dimensional absorption characteristic detection device according to claim 1, it is characterised in that: the first detection light space
The first detection optical wavelength selection optical filter is provided between optical filter and the first photodetector.
7. three-dimensional absorption characteristic detection device according to claim 1, it is characterised in that: the second detection light space
The second detection optical wavelength selection optical filter is provided between optical filter and the second photodetector.
8. three-dimensional absorption characteristic detection device according to claim 1, it is characterised in that: the Sample Scan sportswear
It is set to transverse and longitudinal horizontal mobile mechanism, Sample Scan telecontrol equipment drives sample to be tested to carry out moving horizontally laterally or longitudinally,
Pump light source and the exposure spots of probe source is allowed to carry out in the two-dimentional point by point scanning of sample to be tested surface progress, in sample to be tested body
Three-dimensional point by point scanning.
9. the detection method of three-dimensional absorption characteristic detection device according to claim 1, it is characterised in that: include two dimension
Surface absorption characteristic distribution detection method and three-dimensional body absorption characteristic distribution detection method；The two-dimensional surface absorption characteristic
The step of being distributed detection method are as follows: the upper table of the modulated post-concentration of pump beam of pump light source transmitting to sample to be tested first
Face, probe source transmitting the modulated post-concentration of detection light beam arrive sample upper surface, and pump beam, detection light beam direction to
The same exposure spots of sample upper surface, the detection light beam reflected by sample to be tested upper surface is by the first detection light collecting lens
Collect, again successively through optical filtering adjust after, detected into the first photodetector, light measured by the first photodetector
Thermal signal is as caused by laser induced surface thermal deformation effect, and what which reflected is the suction of sample to be tested two-dimensional surface
Characteristic is received, the point by point scanning of sample to be tested movement realization sample to be tested two-dimensional surface is driven using Sample Scan telecontrol equipment, from
And obtain the two-dimensional surface absorption characteristic distributed intelligence of sample to be tested；The three-dimensional body absorption characteristic distribution detection method
Step are as follows: the modulated post-concentration of pump beam of pump light source transmitting to the upper surface of sample to be tested first, probe source transmitting
The modulated post-concentration of detection light beam to sample upper surface, and pump beam, detection light beam are towards sample to be tested upper surface
Same exposure spots, the detection light beam transmitted by sample to be tested lower surface are collected by the second detection light collecting lens, are successively passed through again
After crossing optical filtering adjusting, detected into the second photodetector, Photothermal Signals measured by the second photodetector are by swashing
Caused by photoinduction thermal lensing effect, Photothermal Signals reflection is that the three-dimensional intracorporal absorption characteristic of sample to be tested is swept using sample
Retouching telecontrol equipment drives sample to be tested movement to realize the three-dimensional intracorporal point by point scanning of sample, to obtain the three-dimensional of sample to be tested
Body absorption property distribution information.
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Cited By (1)
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| CN115855848A (en) * | 2022-11-11 | 2023-03-28 | 浙江大学 | Non-fluorescent molecule super-resolution imaging system based on photothermal relaxation positioning microscope |
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