CN110465922A - A kind of plated film parts convenient for substrate automatic turning - Google Patents

A kind of plated film parts convenient for substrate automatic turning Download PDF

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Publication number
CN110465922A
CN110465922A CN201910712409.9A CN201910712409A CN110465922A CN 110465922 A CN110465922 A CN 110465922A CN 201910712409 A CN201910712409 A CN 201910712409A CN 110465922 A CN110465922 A CN 110465922A
Authority
CN
China
Prior art keywords
mechanical arm
clamping jaw
jaw
substrate
clamping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910712409.9A
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Chinese (zh)
Inventor
胡卫东
王海波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Jiadong Phenix Optical Co Ltd
Original Assignee
Hefei Jiadong Phenix Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hefei Jiadong Phenix Optical Co Ltd filed Critical Hefei Jiadong Phenix Optical Co Ltd
Priority to CN201910712409.9A priority Critical patent/CN110465922A/en
Publication of CN110465922A publication Critical patent/CN110465922A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/02Gripping heads and other end effectors servo-actuated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Coating Apparatus (AREA)

Abstract

A kind of plated film parts convenient for substrate automatic turning proposed by the present invention, the distance of the first clamping jaw and the second clamping jaw is adjusted by first mechanical arm and second mechanical arm movement by being arranged, to make the first clamping jaw and the second clamping jaw cooperate clamping returning face plate, it is rotated simultaneously by the 6th mechanical arm and 7th mechanical arm and drives returning face plate overturning so as to carry out double-sided coating to the substrate being fixed on returning face plate, the height of clamped returning face plate is adjusted by the 4th mechanical arm and the 5th mechanical arm to adapt to different plated film requirements, it is rotated by first mechanical arm and drives returning face plate rotation, to carry out uniform coated to substrate, effectively improve plating membrane efficiency and coating quality.

Description

A kind of plated film parts convenient for substrate automatic turning
Technical field
The present invention relates to filming equipment technical fields, and in particular to a kind of plated film parts convenient for substrate automatic turning.
Background technique
Currently, to workpiece when carrying out vacuum coating, it is often necessary to two face mask layers be identical material, but due to lack Weary corresponding overturning clamping tooling seems to need manually to be overturn, can complete work when carrying out double-sided coating to workpiece The double-sided coating of part, and during manually being overturn, coating machine is passed in and out when due to due to workpiece double-sided coating twice, Decompression vacuum pumping twice, and primary, the more plated film low efficiencys of step are opened in midway, and are difficult to ensure the cleanliness of plated film, in turn Influence the coating quality of plate.And be only used for carrying out plated film to a workpiece every time, efficiency is lower.
Summary of the invention
Technical problems based on background technology, a kind of coating machine convenient for substrate automatic turning proposed by the present invention Part.
A kind of plated film parts convenient for substrate automatic turning proposed by the present invention, including cabinet, first mechanical arm, the second machine Tool arm, third mechanical arm, the 4th mechanical arm, the 5th mechanical arm, the 5th mechanical arm, the 5th mechanical arm, the first clamping jaw, the second clamping jaw And returning face plate;
First mechanical arm is arranged in a vertical direction, and first mechanical arm first end is mounted at the top of box house and can be along itself Axis rotation setting, first mechanical arm second end and connecting rod middle part are fixedly connected,
Second mechanical arm is mounted on connecting rod first end and can be movable along the length direction of connecting rod relative to connecting rod, the Three-mechanical arm is mounted on connecting rod second end and can be movable along the length direction of connecting rod relative to connecting rod;
4th mechanical arm is mounted on second mechanical arm second end and can be movable along the vertical direction relative to second mechanical arm, the Six mechanical arms and second mechanical arm are arranged in parallel, and the 6th mechanical arm is mounted on the 4th mechanical arm second end and can turn along own axes It is dynamic;
5th mechanical arm is mounted on third mechanical arm second end and can be movable along the vertical direction relative to third mechanical arm, the Seven mechanical arms and third mechanical arm are arranged in parallel, and 7th mechanical arm is mounted on the 5th mechanical arm second end and can turn along own axes It is dynamic,
First clamping jaw is mounted on the 6th mechanical arm second end, and the second clamping jaw is mounted on 7th mechanical arm second end, the first folder Pawl is oppositely arranged with the second clamping jaw, and the first clamping jaw and the cooperation of the second clamping jaw are to clamp returning face plate.
It preferably, further include controller, second mechanical arm second end is equipped with for detecting second mechanical arm second end to the The first distance detector of the horizontal distance of one mechanical arm, third mechanical arm second end are equipped with for detecting third mechanical arm second Hold the second distance detector of the horizontal distance of first mechanical arm;
4th mechanical arm second end is equipped with the third for the vertical distance for being used to detect the 4th mechanical arm second end to connecting rod Distance detector, the 5th mechanical arm second end be equipped with for detect the 5th mechanical arm second end to connecting rod vertical distance the Four distance detectors;
First distance detector, second distance detector, third distance detector and the connection of the 4th distance detector signal Controller, controller control connection first mechanical arm, second mechanical arm, third mechanical arm, the 4th mechanical arm, the 5th machinery respectively Arm, the 6th mechanical arm, 7th mechanical arm, the first clamping jaw and the second clamping jaw.
Preferably, returning face plate includes overturning substrate and pressing plate, and overturning substrate offers at least one for accommodating substrate First ladder through slot, is equipped with the second ladder through slot on pressing plate at corresponding first ladder through slot, the step of the first ladder through slot and the The step of two ladder through slots is oppositely arranged, and the tabletting for compressing substrate is elasticly connected at the step of the second ladder through slot, is turned over Transglutaminase substrate is detachably fixed with pressing plate and connect.
Preferably, overturning substrate surrounding is respectively equipped with threaded hole, corresponds on pressing plate and offers step through-hole at threaded hole, platform Rank through-hole has counterbore portion and through-hole section, and the internal diameter of counter sink is greater than the aperture of through-hole, and the aperture of through-hole section is greater than threaded hole Internal diameter, bolt is equipped in counter sink, bolt front end passes through through-hole section and is threadedly coupled with corresponding threaded hole.
Preferably, at least one blind hole is offered on boss top surface, the hole bottom of blind hole is fixedly connected with elastic component, elasticity Part one end is stretched out blind hole and is fixedly connected with tabletting.
Preferably, the first clamping jaw includes first base, the first stationary jaw, the first movable jaw, the first guide post and One driving assembly, first base are mounted on the 6th mechanical arm second end, and the first stationary jaw is fixedly connected with first base bottom, First guide post is arranged vertically, is fixedly connected at the top of the first guide post second end and first base, the first movable jaw and first Guide post is slidably connected, and the clamping face of the first stationary jaw and the clamping face of the first movable jaw are oppositely arranged, and driving assembly drives The first movable jaw of dynamic connection with drive the first movable jaw to the first stationary jaw close to or far from;
Second clamping jaw includes second base, the second stationary jaw, the second movable jaw, the second guide post and the second driving group Part, second base are mounted on 7th mechanical arm second end, and the second stationary jaw is fixedly connected with second base bottom, the second guiding Column is arranged vertically, is fixedly connected at the top of the second guide post second end and second base, and the second movable jaw and the second guide post are sliding Dynamic connection, the clamping face of the second stationary jaw and the clamping face of the second movable jaw are oppositely arranged, driving assembly drive connection the Two movable jaws with drive the second movable jaw to the second stationary jaw close to or far from;
Controller controls the first driving assembly of connection and the second driving assembly respectively.
Preferably, the first driving assembly includes the first clamping jaw cylinder, and it is fixed that the cylinder body of the first clamping jaw cylinder is fixed on first On clamping jaw, the piston rod of the first clamping jaw cylinder is connect with the first movable jaw;
Second driving assembly includes the second clamping jaw cylinder, and the cylinder body of the second clamping jaw cylinder is fixed on the second stationary jaw, The piston rod of second clamping jaw cylinder is connect with the second movable jaw;
Controller controls the first clamping jaw cylinder of connection and the second clamping jaw cylinder respectively.
A kind of plated film parts convenient for substrate automatic turning proposed by the present invention pass through first mechanical arm and the by setting The distance that the movement of two mechanical arms adjusts the first clamping jaw and the second clamping jaw makes the first clamping jaw and the second clamping jaw is close to each other is turned over clamping Rotating plate, the first, second clamping jaw cylinder operation make the first clamping jaw and the second clamping jaw be matched for clamping tightly returning face plate, by the 6th mechanical arm and 7th mechanical arm rotates simultaneously drives returning face plate overturning so as to carry out double-sided coating to the substrate being fixed on returning face plate, passes through The height that 4th mechanical arm and the 5th mechanical arm adjust clamped returning face plate passes through the first machine to adapt to different plated film requirements The rotation of tool arm drives returning face plate rotation, to carry out uniform coated to substrate, effectively improves plating membrane efficiency and coating quality.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the plated film parts convenient for substrate automatic turning proposed by the present invention.
Fig. 2 is the structural schematic diagram of returning face plate proposed by the present invention.
Fig. 3 is enlarged drawing at the A in Fig. 2.
Specific embodiment
Referring to Fig.1, a kind of coating machine convenient for substrate automatic turning proposed by the present invention, including cabinet 1, first mechanical arm 2, second mechanical arm 4, third mechanical arm 5, the 4th mechanical arm 6, the 5th mechanical arm 7, the 6th mechanical arm 10,7th mechanical arm 11, First clamping jaw 8, the second clamping jaw and returning face plate 9;
First mechanical arm 2 is arranged in a vertical direction, and 2 first end of first mechanical arm is mounted on 1 inside top of cabinet and can edge Own axis is arranged, and is fixedly connected in the middle part of 2 second end of first mechanical arm and connecting rod 3;
Second mechanical arm 4 is mounted on 3 first end of connecting rod and can be living along the length direction of connecting rod 3 relative to connecting rod 3 Dynamic, third mechanical arm 5 is mounted on 3 second end of connecting rod and can be movable along the length direction of connecting rod 3 relative to connecting rod 3;
4th mechanical arm is mounted on 4 second end of second mechanical arm and can be movable along the vertical direction relative to second mechanical arm, 6th mechanical arm 10 is arranged in parallel with second mechanical arm 4, and the 6th mechanical arm 10 is mounted on 6 second end of the 4th mechanical arm and can be along certainly Body axis rotation;
5th mechanical arm 7 is mounted on 5 second end of third mechanical arm and can live along the vertical direction relative to third mechanical arm 5 Dynamic, 7th mechanical arm 11 and third mechanical arm 5 are arranged in parallel, and 7th mechanical arm 11 is mounted on 5 second end of the 5th mechanical arm and can Along own axis;
First clamping jaw 8 is mounted on the 6th mechanical arm second end, and the second clamping jaw is mounted on 11 second end of 7th mechanical arm, and first Clamping jaw 8 is oppositely arranged with the second clamping jaw, the first clamping jaw 8 and the second clamping jaw cooperation clamping returning face plate 9.
The present invention by by first mechanical arm 2 and the movement of second mechanical arm 4 adjust the first clamping jaw 8 and the second clamping jaw away from From, so that the first clamping jaw 8 and the second clamping jaw is made to cooperate clamping returning face plate 9, it is same by the 6th mechanical arm 10 and 7th mechanical arm 11 When rotation drive the overturning of returning face plate 9 so as to carry out double-sided coating to the substrate that is fixed on returning face plate 9, pass through the 4th mechanical arm 6 and the 5th mechanical arm 7 adjust clamped returning face plate height to adapt to different plated film requirements, pass through 2 turns of first mechanical arm It is dynamic that returning face plate 9 is driven to rotate, to carry out uniform coated to substrate, effectively improve plating membrane efficiency and coating quality.
It in the present embodiment, further include controller, 4 second end of second mechanical arm is equipped with for detecting second mechanical arm 4 Second end to first mechanical arm 2 horizontal distance first distance detector, 5 second end of third mechanical arm is equipped with for detecting the 5 second end of three-mechanical arm to first mechanical arm 2 horizontal distance second distance detector;
4th mechanical arm, 6 second end is equipped with for detecting 6 second end of the 4th mechanical arm to 4 vertical distance of second mechanical arm Third distance detector, 7 second end of the 5th mechanical arm are equipped with for detecting 7 second end of the 5th mechanical arm to third mechanical arm 5 4th distance detector of vertical distance;
First distance detector, second distance detector, third distance detector and the connection of the 4th distance detector signal Controller, controller control connection first mechanical arm 2, second mechanical arm 4, third mechanical arm 5, the 4th mechanical arm the 6, the 5th respectively Mechanical arm 7, the 6th mechanical arm 10,7th mechanical arm 11, the first clamping jaw 8 and the second clamping jaw.Pass through controller institute received first Distance detector, second distance detector, third distance detector and the 4th distance detector information automatically control respectively One mechanical arm 2, second mechanical arm 4, third mechanical arm 5, the 4th mechanical arm 6, the 5th mechanical arm 7, the 6th mechanical arm 10, the 7th machine Tool arm 11, the first clamping jaw 8 and the movement of the second clamping jaw, do not need manually to participate in, improve working efficiency and operating accuracy.
Referring to Fig. 2 and Fig. 3, in the present embodiment, returning face plate 9 includes overturning substrate 92 and pressing plate 91, overturns substrate 92 At least one is offered for accommodating the first ladder through slot of substrate, is equipped with second-order at corresponding first ladder through slot on pressing plate 1 The step of terraced through slot, the step of the first ladder through slot and the second ladder through slot is oppositely arranged, bullet at the step of the second ladder through slot Property be connected with tabletting 93 for compressing substrate, overturning substrate 92 is detachably fixed with pressing plate 91 to be connect.Pass through tabletting 93 and The step of one ladder through slot is matched to compress substrate.And one can be fixed simultaneously by the cooperation of overturning substrate 92 and pressing plate 91 A or multiple substrates.
In the present embodiment, overturning 92 surrounding of substrate is respectively equipped with threaded hole, corresponds at threaded hole and opens up on pressing plate 91 There is step through-hole, step through-hole has counterbore portion and through-hole section, and the internal diameter of counter sink is greater than the aperture of through-hole, the hole of through-hole section Diameter is greater than the internal diameter of threaded hole, and bolt is equipped in counter sink, and bolt front end passes through through-hole section and is threadedly coupled with corresponding threaded hole. Overturning substrate 92 and pressing plate 91 are bolted, and the setting of counter sink can make the head of bolt enter counter sink with clamping platen 91, it avoids bolt head from protruding from pressing plate, influences plated film.
In the present embodiment, at least one blind hole is offered on the step of the second ladder through slot, the hole bottom of blind hole is solid Surely it is connected with elastic component, elastic component one end is stretched out blind hole and is fixedly connected with tabletting 93.Make 93 He of tabletting by the elastic force of elastomer Substrate is fixed in the step cooperation of first ladder through slot, since elastomer has elastic force, can have shock absorbing effect, reduction is turned over The vibration generated when rotating plate 9 is overturn.
In the present embodiment, the first clamping jaw 8 is led including first base, the first stationary jaw, the first movable jaw, first To column and the first driving assembly, first base is mounted on 10 second end of the 6th mechanical arm, the first stationary jaw and first base bottom Portion is fixedly connected, and the first guide post is arranged vertically, is fixedly connected at the top of the first guide post second end and first base, the first activity Clamping jaw is slidably connected with the first guide post, and the clamping face of the first stationary jaw and the clamping face of the first movable jaw are oppositely arranged, Driving assembly is drivingly connected the first movable jaw to drive the first movable jaw to the first stationary jaw close to or far from making first Movable jaw and the cooperation of the first stationary jaw, which are realized, to be clamped with opening to clamp returning face plate 8 and unclamp returning face plate 8;
Second clamping jaw includes second base, the second stationary jaw, the second movable jaw, the second guide post and the second driving group Part, second base are mounted on 11 second end of 7th mechanical arm, and the second stationary jaw is fixedly connected with second base bottom, and second leads It arranges, is fixedly connected at the top of the second guide post second end and second base, the second movable jaw and the second guide post vertically to column It is slidably connected, the clamping face of the second stationary jaw and the clamping face of the second movable jaw are oppositely arranged, and driving assembly is drivingly connected Second movable jaw is to drive the second movable jaw to the second stationary jaw close to or far from making the second movable jaw and second solid The cooperation of clamp pawl, which is realized, to be clamped with opening to clamp returning face plate 8 and unclamp returning face plate 8;
Controller control respectively connection the first driving assembly and the second driving assembly be automatically performed returning face plate 8 clamping and It unclamps.
In the present embodiment, the first driving assembly includes the first clamping jaw cylinder, and the cylinder body of the first clamping jaw cylinder is fixed on On first stationary jaw, the piston rod of the first clamping jaw cylinder is connect with the first movable jaw;
Second driving assembly includes the second clamping jaw cylinder, and the cylinder body of the second clamping jaw cylinder is fixed on the second stationary jaw, The piston rod of second clamping jaw cylinder is connect with the second movable jaw;
Controller controls the first clamping jaw cylinder of connection and the second clamping jaw cylinder respectively.
Specifically, controller controls the first clamping jaw cylinder operation, the piston rod of the first clamping jaw cylinder drives the first activity folder Pawl is along the first guide post to the first stationary jaw close to or far from cooperating the first movable jaw and the first stationary jaw and realize folder Tightly with opening;The piston rod of controller the second clamping jaw cylinder operation, the second clamping jaw cylinder drives the second movable jaw to lead along second The second stationary jaw of Xiang Zhuxiang is close to or far from cooperating the second movable jaw and the second stationary jaw and realize and clamp and open.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.

Claims (7)

1. a kind of coating machine convenient for substrate automatic turning, which is characterized in that including cabinet (1), first mechanical arm (2), second Mechanical arm, third mechanical arm, the 4th mechanical arm (6), the 5th mechanical arm (7), the 6th mechanical arm (10), 7th mechanical arm (11), First clamping jaw (8), the second clamping jaw and returning face plate (9);
First mechanical arm (2) is arranged in a vertical direction, and first mechanical arm (2) first end is mounted on cabinet (1) inside top and can It is arranged along own axis, is fixedly connected in the middle part of first mechanical arm (2) second end and connecting rod (3);
Second mechanical arm (4) is mounted on connecting rod (3) first end and can length side relative to connecting rod (3) along connecting rod (3) To activity, third mechanical arm (5) is mounted on connecting rod (3) second end and can length relative to connecting rod (3) along connecting rod (3) Direction activity;
4th mechanical arm (6) is mounted on second mechanical arm (4) second end and can live along the vertical direction relative to second mechanical arm (4) Dynamic, the 6th mechanical arm (10) and second mechanical arm (4) are arranged in parallel, and the 6th mechanical arm (10) is mounted on the 4th mechanical arm (6) the Two ends and can be along own axis;
5th mechanical arm (7) is mounted on third mechanical arm (5) second end and can live along the vertical direction relative to third mechanical arm (5) Dynamic, 7th mechanical arm (11) and third mechanical arm (5) are arranged in parallel, and 7th mechanical arm (11) is mounted on the 5th mechanical arm (5) the Two ends and can be along own axis;
First clamping jaw (8) is mounted on the 6th mechanical arm (10) second end, and the second clamping jaw is mounted on 7th mechanical arm (11) second end, First clamping jaw (8) is oppositely arranged with the second clamping jaw, and the first clamping jaw (8) and the cooperation of the second clamping jaw are to clamp returning face plate (9).
2. the coating machine according to claim 1 convenient for substrate automatic turning, which is characterized in that it further include controller, the Two mechanical arms (4) second end be equipped with for detect second mechanical arm (4) second end to first mechanical arm (2) horizontal distance the One distance detector, third mechanical arm (5) second end are equipped with for detecting third mechanical arm (5) second end to first mechanical arm (2) the second distance detector of horizontal distance;
4th mechanical arm (6) second end is equipped with the vertical distance for being used to detect the 4th mechanical arm (6) second end to connecting rod (3) Third distance detector, the 5th mechanical arm (7) second end are equipped with for detecting the 5th mechanical arm (7) second end to connecting rod (3) Vertical distance the 4th distance detector;
First distance detector, second distance detector, third distance detector and the connection control of the 4th distance detector signal Device, controller control respectively connection first mechanical arm (2), second mechanical arm (4), third mechanical arm (5), the 4th mechanical arm (6), 5th mechanical arm (7), the first clamping jaw (8) and the second clamping jaw.
3. the coating machine according to claim 1 convenient for substrate automatic turning, which is characterized in that returning face plate (9) includes turning over Transglutaminase substrate (92) and pressing plate (91), overturning substrate (92) offer at least one for accommodating the first ladder through slot of substrate, pressure It is equipped with the second ladder through slot on plate (91) at corresponding first ladder through slot, the step of the first ladder through slot and the second ladder through slot Step is oppositely arranged, and the tabletting (93) for compressing substrate is elasticly connected at the step of the second ladder through slot, overturns substrate (92) it is detachably fixed and connect with pressing plate (91).
4. the coating machine according to claim 3 convenient for substrate automatic turning, which is characterized in that overturning substrate (92) surrounding It is respectively equipped with threaded hole, is corresponded on pressing plate (91) and offers step through-hole at threaded hole, step through-hole has counterbore portion and leads to Hole portion, the internal diameter of counter sink are greater than the aperture of through-hole, and the aperture of through-hole section is greater than the internal diameter of threaded hole, is equipped with spiral shell in counter sink Bolt, bolt front end pass through through-hole section and are threadedly coupled with corresponding threaded hole.
5. the coating machine according to claim 3 convenient for substrate automatic turning, which is characterized in that the platform of the second ladder through slot At least one blind hole is offered on rank, the hole bottom of blind hole is fixedly connected with elastic component, and blind hole and tabletting are stretched out in elastic component one end (93) it is fixedly connected.
6. the coating machine according to claim 1 convenient for substrate automatic turning, which is characterized in that the first clamping jaw (8) includes First base, the first stationary jaw, the first movable jaw, the first guide post and the first driving assembly, first base are mounted on Six mechanical arms (10) second end, the first stationary jaw are fixedly connected with first base bottom, and the first guide post is arranged vertically, and first It is fixedly connected at the top of guide post second end and first base, the first movable jaw is slidably connected with the first guide post, and first is fixed The clamping face of clamping jaw and the clamping face of the first movable jaw are oppositely arranged, and driving assembly is drivingly connected the first movable jaw to drive First movable jaw to the first stationary jaw close to or far from;
Second clamping jaw includes second base, the second stationary jaw, the second movable jaw, the second guide post and the second driving assembly, Second base is mounted on 7th mechanical arm (11) second end, and the second stationary jaw is fixedly connected with second base bottom, and second leads It arranges, is fixedly connected at the top of the second guide post second end and second base, the second movable jaw and the second guide post vertically to column It is slidably connected, the clamping face of the second stationary jaw and the clamping face of the second movable jaw are oppositely arranged, and driving assembly is drivingly connected Second movable jaw with drive the second movable jaw to the second stationary jaw close to or far from;
Controller controls the first driving assembly of connection and the second driving assembly respectively.
7. the coating machine according to claim 6 convenient for substrate automatic turning, which is characterized in that the first driving assembly includes The cylinder body of first clamping jaw cylinder, the first clamping jaw cylinder is fixed on the first stationary jaw, the piston rod of the first clamping jaw cylinder and The connection of one movable jaw;
Second driving assembly includes the second clamping jaw cylinder, and the cylinder body of the second clamping jaw cylinder is fixed on the second stationary jaw, and second The piston rod of clamping jaw cylinder is connect with the second movable jaw;
Controller controls the first clamping jaw cylinder of connection and the second clamping jaw cylinder respectively.
CN201910712409.9A 2019-08-02 2019-08-02 A kind of plated film parts convenient for substrate automatic turning Pending CN110465922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910712409.9A CN110465922A (en) 2019-08-02 2019-08-02 A kind of plated film parts convenient for substrate automatic turning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910712409.9A CN110465922A (en) 2019-08-02 2019-08-02 A kind of plated film parts convenient for substrate automatic turning

Publications (1)

Publication Number Publication Date
CN110465922A true CN110465922A (en) 2019-11-19

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Application Number Title Priority Date Filing Date
CN201910712409.9A Pending CN110465922A (en) 2019-08-02 2019-08-02 A kind of plated film parts convenient for substrate automatic turning

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CN (1) CN110465922A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI776570B (en) * 2020-06-29 2022-09-01 日商川崎重工業股份有限公司 robot

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US20050072358A1 (en) * 2002-11-15 2005-04-07 Seiji Katsuoka Substrate processing apparatus and substrate processing method
CN202555574U (en) * 2012-04-16 2012-11-28 保定天威英利新能源有限公司 Silicon wafer debonding machine and basket-pressing preventing protective manipulator thereof
CN205734904U (en) * 2016-04-11 2016-11-30 哈尔滨理工大学 A kind of casing catching robot
CN207465230U (en) * 2017-08-31 2018-06-08 东莞市李群自动化技术有限公司 A kind of turning manipulator
CN108296859A (en) * 2018-01-03 2018-07-20 佛山杰致信息科技有限公司 A kind of mechanical arm production fixing device
CN208428251U (en) * 2018-04-24 2019-01-25 贝朗医疗(苏州)有限公司 A kind of automatic assembly line handling machinery arm clamping jaw
CN208891890U (en) * 2018-05-09 2019-05-24 深圳市丰巢科技有限公司 A kind of locker and its turnover device
CN210551200U (en) * 2019-08-02 2020-05-19 合肥嘉东光学股份有限公司 Film coating machine part convenient to automatic upset of substrate

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050072358A1 (en) * 2002-11-15 2005-04-07 Seiji Katsuoka Substrate processing apparatus and substrate processing method
CN202555574U (en) * 2012-04-16 2012-11-28 保定天威英利新能源有限公司 Silicon wafer debonding machine and basket-pressing preventing protective manipulator thereof
CN205734904U (en) * 2016-04-11 2016-11-30 哈尔滨理工大学 A kind of casing catching robot
CN207465230U (en) * 2017-08-31 2018-06-08 东莞市李群自动化技术有限公司 A kind of turning manipulator
CN108296859A (en) * 2018-01-03 2018-07-20 佛山杰致信息科技有限公司 A kind of mechanical arm production fixing device
CN208428251U (en) * 2018-04-24 2019-01-25 贝朗医疗(苏州)有限公司 A kind of automatic assembly line handling machinery arm clamping jaw
CN208891890U (en) * 2018-05-09 2019-05-24 深圳市丰巢科技有限公司 A kind of locker and its turnover device
CN210551200U (en) * 2019-08-02 2020-05-19 合肥嘉东光学股份有限公司 Film coating machine part convenient to automatic upset of substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI776570B (en) * 2020-06-29 2022-09-01 日商川崎重工業股份有限公司 robot

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