CN110451973A - 一种高密高纯碳化硅制品的制备方法 - Google Patents

一种高密高纯碳化硅制品的制备方法 Download PDF

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CN110451973A
CN110451973A CN201910425030.XA CN201910425030A CN110451973A CN 110451973 A CN110451973 A CN 110451973A CN 201910425030 A CN201910425030 A CN 201910425030A CN 110451973 A CN110451973 A CN 110451973A
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刘骏
刘振华
张海
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Hunan Prince New Mstar Technology Ltd
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Abstract

本发明公开了一种高密高纯碳化硅制品的制备方法,包括:将碳化硅粗粉、碳化硅细粉、低聚硅烷和纤维素衍生物进行超声处理,将超声后的混合料加水在捏炼机中捏炼成可塑泥料;对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;对所述碳化硅造粉粒进行干压一次成型,成型压力为120~140MPa,得到湿坯,经干燥后得生坯;在惰性气体保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为0.5~3h,得预烧结体;在惰性气体保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,出炉后得高密高纯碳化硅制品。本发明制备的碳化硅制品具有耐高温、高纯度、高密度、成本低廉、耐腐蚀、使用寿命长的优点。

Description

一种高密高纯碳化硅制品的制备方法
技术领域
本发明涉及碳化硅材料技术领域,更具体地说,本发明涉及一种高密高纯碳化硅制品的制备方法。
背景技术
目前,重结晶碳化硅制品工艺,是将较粗粒度的碳化硅与碳化硅微粉混合,加结合剂制浆再由模型中成型,在真空感应炉内于2300度以上的高温条件下,使碳化硅微粉蒸发并与粗粒度的碳化硅凝聚烧结成重结晶碳化硅,重结晶的碳化硅纯度高,具有优异的高温力学性能。
现有技术的碳化硅制品的再结晶过程是直接使用一定颗粒级的碳化硅微粉与碳粉混合后形成生坯,然后在高温下渗硅,这些渗出的硅中有一部分与碳反应,生成碳化硅,生成的碳化硅与胚体中的碳化硅结合,达到烧结的目的,但是仍含有较多的游离硅,这些游离硅在高温时挥发会生成很多微孔,降低了碳化硅制品的密度和纯度,大大限制了碳化硅制品的使用温度,最佳温度不能超过1300度,若超过这个温度,碳化硅制品的强度、耐腐蚀性、抗氧化能力大大下降,难以满足使用需求。
发明内容
本发明的一个目的是解决至少上述问题,并提供至少后面将说明的优点。
本发明还有一个目的是提供了一种制备耐高温、耐腐蚀、抗氧化能力强、使用寿命长的高密高纯碳化硅制品的制备方法。
为了实现上述目的,本发明公开了一种高密高纯碳化硅制品的制备方法,按质量分数计,其原料由50~70%的碳化硅粗粉、10~40%的碳化硅细粉、1~10%的低聚硅烷和1~5%的纤维素衍生物组成,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、低聚硅烷和纤维素衍生物进行超声处理,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为120~140MPa,得到湿坯,经干燥后得生坯;
步骤四、在惰性气体保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为0.5~3h,得预烧结体;
步骤五、在惰性气体保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,出炉后得高密高纯碳化硅制品。
优选地,本发明中,所述碳化硅粗粉的粒径为30~100μm,所述碳化硅细粉的粒径为0.1~1μm。
优选地,本发明中,所述步骤一中,超声处理的频率为100KHz,超声时间为1h。
优选地,本发明中,所述步骤四和步骤五中,惰性气体为氩气。
优选地,本发明中,所述步骤五中,烧结温度为2100~2400℃,保温时间为1.5h。
优选地,本发明中,按质量分数计,所述高密高纯碳化硅制品的原料由65%的碳化硅粗粉、25%的碳化硅细粉、8%的低聚硅烷和2%的纤维素衍生物组成。
优选地,本发明中,所述纤维素衍生物为羧甲基纤维素或者羟丙基甲基纤维素。
优选地,本发明中,所述低聚硅烷为三(三甲基硅基)硅烷、乙烯基三(三甲基硅氧基)硅烷、乙烯基三(2-甲氧基乙氧基)硅烷、3-甲基丙烯酰氧丙基三(三甲基硅氧基)硅烷、甲基三甲氧基硅烷、苯基三(二甲基硅氧基)硅烷、1,3-二苯基四(二甲基硅氧基)二硅氧烷中的任意一种。
本发明采用不同粒径的碳化硅颗粒为原料,采用低聚硅烷和纤维素衍生物作为成型助剂,经过高温烧结制备得到了高纯度高密度的碳化硅制品。低聚硅烷能够提供硅源和碳源,纤维素衍生物能够提供碳源,并调节碳硅的比例,在高温烧结过程中,低聚硅烷和纤维素衍生物发生裂解并生成接近理论比的碳化硅,高温裂解生成的碳化硅和碳化硅细粉经过蒸发和凝聚作用沉积到碳化硅粗粉上,形成致密层,保证了碳化硅制品的密度。因此不需要额外添加碳源和金属硅,避免因需要额外添加游离硅,在高温时挥发会生成很多微孔,而降低了碳化硅的密度。较高的重结晶温度使杂质挥发掉,保证了碳化硅制品的纯度。并且低聚硅烷和纤维素衍生物的加入提高了碳化硅制品的成型性,提高了碳化硅制品的密度和耐腐蚀性。
本发明至少包括以下有益效果:
1、本发明提供的高密高纯碳化硅制品制备方法制备的碳化硅制品的纯度高于99.9%,密度大于3.0g/cm3,材料的抗弯强度大于350MPa,使用寿命比普通的再结晶碳化硅制品提高了60%,从而提高了碳化硅制品的使用范围。
2、本发明提供的高密高纯碳化硅制品制备方法制备的碳化硅辊棒成型效果好、抗氧化能力强、具有1800℃的高温负载能力,在高温使用时,仍具备优异的耐腐蚀性能和抗氧化能力,本发明还具备成本低廉的优点。
本发明的其它优点、目标和特征将部分通过下面的说明体现,部分还将通过对本发明的研究和实践而为本领域的技术人员所理解。
具体实施方式
下面结合实施例对本发明做进一步的详细说明,以令本领域技术人员参照说明书文字能够据以实施。
应当理解,本文所使用的诸如“具有”、“包含”以及“包括”术语并不排除一个或多个其它元件或其组合的存在或添加。
实施例1
本发明公开了一种高密高纯碳化硅制品的制备方法,按质量分数计,其原料由50%的碳化硅粗粉、40%的碳化硅细粉、8%的三(三甲基硅基)硅烷和2%的羟丙基甲基纤维素组成,碳化硅粗粉的粒径为100μm,所述碳化硅细粉的粒径为1μm,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、三(三甲基硅基)硅烷和羟丙基甲基纤维素进行超声处理,超声处理的频率为100KHz,超声时间为1h,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为120MPa,得到湿坯,经干燥后得生坯;
步骤四、在氩气保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为2h,得预烧结体;
步骤五、在氩气保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,烧结温度为2200℃,保温时间为1.5h,降温出炉后得高密高纯碳化硅制品。
对制备的碳化硅制品进行了性能测试,测试结果为碳化硅制品的纯度为99.96%,密度为3.08g/cm3。抗弯强度为353MPa。在1800℃高温下仍具备优异的抗氧化性能和耐腐蚀性能。
实施例2
本发明公开了一种高密高纯碳化硅制品的制备方法,按质量分数计,其原料由60%的碳化硅粗粉、25%的碳化硅细粉、10%的乙烯基三(三甲基硅氧基)硅烷和5%的羟丙基甲基纤维素组成,碳化硅粗粉的粒径为30μm,碳化硅细粉的粒径为1μm,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、乙烯基三(三甲基硅氧基)硅烷和纤羟丙基甲基纤维素进行超声处理,超声处理的频率为100KHz,超声时间为1h,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为130MPa,得到湿坯,经干燥后得生坯;
步骤四、在氩气保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为1h,得预烧结体;
步骤五、在氩气保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,烧结温度为2400℃,时间为1.5h,出炉后得高密高纯碳化硅制品。
对制备的碳化硅制品进行了性能测试,测试结果为碳化硅制品的纯度为99.97%,密度为3.09g/cm3,抗弯强度为360MPa。在1800℃高温下仍具备优异的抗氧化性能和耐腐蚀性能。
实施例3
本发明公开了一种高密高纯碳化硅制品的制备方法,按质量分数计,其原料由65%的碳化硅粗粉、25%的碳化硅细粉、8%的3-甲基丙烯酰氧丙基三(三甲基硅氧基)硅烷和2%的羧甲基纤维素组成,碳化硅粗粉的粒径为70μm,所述碳化硅细粉的粒径为0.2μm,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、3-甲基丙烯酰氧丙基三(三甲基硅氧基)硅烷和羧甲基纤维素进行超声处理,超声处理的频率为100KHz,超声时间为1h,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为140MPa,得到湿坯,经干燥后得生坯;
步骤四、在氩气保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为3h,得预烧结体;
步骤五、在氩气保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,烧结温度为2250℃,烧结时间为1.5h,降温出炉后得高密高纯碳化硅制品。
对制备的碳化硅制品进行了性能测试,测试结果为碳化硅制品的纯度为99.97%,密度为3.07g/cm3,抗弯强度为457MPa。在1800℃高温下仍具备优异的抗氧化性能和耐腐蚀性能。
实施例4
本发明公开了一种高密高纯碳化硅制品的制备方法,按质量分数计,其原料由70%的碳化硅粗粉、20%的碳化硅细粉、9%的1,3-二苯基四(二甲基硅氧基)二硅氧烷和1%的羧甲基纤维素组成,碳化硅粗粉的粒径为50μm,所述碳化硅细粉的粒径为0.7μm,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、1,3-二苯基四(二甲基硅氧基)二硅氧烷和羧甲基纤维素进行超声处理,超声处理的频率为100KHz,超声时间为1h,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为135MPa,得到湿坯,经干燥后得生坯;
步骤四、在氩气保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为2.5h,得预烧结体;
步骤五、在氩气保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,烧结温度为2350℃,烧结时间为1.5h,降温出炉后得高密高纯碳化硅制品。
对制备的碳化硅制品进行了性能测试,测试结果为碳化硅制品的纯度为99.96%,密度为3.06g/cm3,抗弯强度为457MPa。在1800℃高温下仍具备优异的抗氧化性能和耐腐蚀性能。
实施例5
本发明公开了一种高密高纯碳化硅制品的制备方法,按质量分数计,其原料由64%的碳化硅粗粉、30%的碳化硅细粉、1%的1,3-二苯基四(二甲基硅氧基)二硅氧烷和5%的羟丙基甲基纤维素组成,碳化硅粗粉的粒径为40μm,所述碳化硅细粉的粒径为0.2μm,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、1,3-二苯基四(二甲基硅氧基)二硅氧烷和羟丙基甲基纤维素进行超声处理,超声处理的频率为100KHz,超声时间为1h,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为125MPa,得到湿坯,经干燥后得生坯;
步骤四、在氩气保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为0.5~3h,得预烧结体;
步骤五、在氩气保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,烧结温度为2310℃,烧结时间为1.5h,出炉后得高密高纯碳化硅制品。
对制备的碳化硅辊棒进行了性能测试,测试结果为碳化硅辊棒的纯度为99.96%,密度为3.09g/cm3,抗弯强度为363MPa。在1800℃高温下仍具备优异的抗氧化性能和耐腐蚀性能。
实施例6
本发明公开了一种高密高纯碳化硅制品的制备方法,按质量分数计,其原料由58%的碳化硅粗粉、28%的碳化硅细粉、10%的苯基三(二甲基硅氧基)硅烷和4%的羟丙基甲基纤维素组成,碳化硅粗粉的粒径为40μm,碳化硅细粉的粒径为0.2μm,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、苯基三(二甲基硅氧基)硅烷和羟丙基甲基纤维素进行超声处理,超声处理的频率为100KHz,超声时间为1h,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为130MPa,得到湿坯,经干燥后得生坯;
步骤四、在氩气保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为1.5h,得预烧结体;
步骤五、在氩气保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,烧结温度为2400℃,烧结时间为1.5h,降温出炉后得高密高纯碳化硅制品。
对制备的碳化硅制品进行了性能测试,测试结果为碳化硅制品的纯度为99.97%,密度为3.08g/cm3,抗弯强度为390MPa。在1800℃高温下仍具备优异的抗氧化性能和耐腐蚀性能。
尽管本发明的实施方案已公开如上,但其并不仅仅限于说明书和实施方式中所列运用,它完全可以被适用于各种适合本发明的领域,对于熟悉本领域的人员而言,可容易地实现另外的修改,因此在不背离权利要求及等同范围所限定的一般概念下,本发明并不限于特定的细节。

Claims (8)

1.一种高密高纯碳化硅制品的制备方法,其特征在于,按质量分数计,其原料由50~70%的碳化硅粗粉、10~40%的碳化硅细粉、1~10%的低聚硅烷和1~5%的纤维素衍生物组成,所述制备方法包括以下步骤:
步骤一、将碳化硅粗粉、碳化硅细粉、低聚硅烷和纤维素衍生物进行超声处理,将超声后的混合料加水在捏炼机中捏炼成含水量为7~15%的可塑泥料;
步骤二、对所述可塑泥料进行喷雾造粒,得到碳化硅造粉粒;
步骤三、对所述碳化硅造粉粒进行干压一次成型,成型压力为120~140MPa,得到湿坯,经干燥后得生坯;
步骤四、在惰性气体保护下,将生坯置于真空烧结炉进行烧结反应,烧结温度为1500℃,烧结时间为0.5~3h,得预烧结体;
步骤五、在惰性气体保护下,将所述预烧结体置于真空高温烧结炉中进行再次升温烧结,出炉后得高密高纯碳化硅制品。
2.根据权利要求1所述的一种高密高纯碳化硅制品的制备方法,其特征在于,所述碳化硅粗粉的粒径为30~100μm,所述碳化硅细粉的粒径为0.1~1μm。
3.根据权利要求1所述的一种高密高纯碳化硅制品的制备方法,其特征在于,所述步骤一中,超声处理的频率为100KHz,超声时间为1h。
4.根据权利要求1所述的一种高密高纯碳化硅制品的制备方法,其特征在于,所述步骤四和步骤五中,惰性气体为氩气。
5.根据权利要求1所述的一种高密高纯碳化硅制品的制备方法,其特征在于,所述步骤五中,烧结温度为2100~2400℃,保温时间为1.5h。
6.根据权利要求1所述的一种高密高纯碳化硅制品的制备方法,其特征在于,按质量分数计,所述高密高纯碳化硅制品的原料由65%的碳化硅粗粉、25%的碳化硅细粉、8%的低聚硅烷和2%的纤维素衍生物组成。
7.根据权利要求1所述的一种高密高纯碳化硅制品的制备方法,其特征在于,所述纤维素衍生物为羧甲基纤维素或者羟丙基甲基纤维素。
8.根据权利要求1所述的一种高密高纯碳化硅制品的制备方法,其特征在于,所述低聚硅烷为三(三甲基硅基)硅烷、乙烯基三(三甲基硅氧基)硅烷、乙烯基三(2-甲氧基乙氧基)硅烷、3-甲基丙烯酰氧丙基三(三甲基硅氧基)硅烷、甲基三甲氧基硅烷、苯基三(二甲基硅氧基)硅烷、1,3-二苯基四(二甲基硅氧基)二硅氧烷中的任意一种。
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