CN110440357A - Cooling coil, air cleaning and conditioning system, toilet and industrial production workshop - Google Patents

Cooling coil, air cleaning and conditioning system, toilet and industrial production workshop Download PDF

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Publication number
CN110440357A
CN110440357A CN201910744501.3A CN201910744501A CN110440357A CN 110440357 A CN110440357 A CN 110440357A CN 201910744501 A CN201910744501 A CN 201910744501A CN 110440357 A CN110440357 A CN 110440357A
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CN
China
Prior art keywords
fin
cooling coil
air
spacing
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910744501.3A
Other languages
Chinese (zh)
Inventor
肖红梅
李拨
阎冬
李鹏
刘云龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SY Technology Engineering and Construction Co Ltd
Original Assignee
SY Technology Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SY Technology Engineering and Construction Co Ltd filed Critical SY Technology Engineering and Construction Co Ltd
Priority to CN201910744501.3A priority Critical patent/CN110440357A/en
Publication of CN110440357A publication Critical patent/CN110440357A/en
Pending legal-status Critical Current

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Classifications

    • EFIXED CONSTRUCTIONS
    • E04BUILDING
    • E04HBUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H1/00Buildings or groups of buildings for dwelling or office purposes; General layout, e.g. modular co-ordination or staggered storeys
    • E04H1/12Small buildings or other erections for limited occupation, erected in the open air or arranged in buildings, e.g. kiosks, waiting shelters for bus stops or for filling stations, roofs for railway platforms, watchmen's huts or dressing cubicles
    • E04H1/1277Shelters for decontamination
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F1/00Room units for air-conditioning, e.g. separate or self-contained units or units receiving primary air from a central station
    • F24F1/0007Indoor units, e.g. fan coil units
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering

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  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ventilation (AREA)

Abstract

The present invention relates to air-conditioning system technical field, a kind of cooling coil, air cleaning and conditioning system, toilet and industrial production workshop are disclosed.Wherein, cooling coil includes at least two parts fin;In at least two parts fin, the fin spacing of each section is unequal.Air cleaning and conditioning system includes above-mentioned cooling coil, further includes Fresh air handing unit and fan filter unit with cooling coil cooperation.Toilet includes above-mentioned air cleaning and conditioning system, further includes the air ventilation passage being arranged between clear production and between clear production;Cooling coil is arranged in air ventilation passage, and each section fin in cooling coil corresponds respectively to the different wind speed regions in air ventilation passage, and the big part fin of fin spacing corresponds to the small region of wind speed.Cooling coil of the invention can make by wind speed it is uniform, coil pipe cooling treatment ability is improved, so that it is guaranteed that clean indoor temperature parameter requirement.

Description

Cooling coil, air cleaning and conditioning system, toilet and industrial production workshop
Technical field
The present invention relates to air-conditioning system technical field, in particular to a kind of cooling coil, air cleaning and conditioning system, toilet and Industrial production workshop.
Background technique
In electronics industry clear production workshop, each production process is to clean indoor cleaniliness classs, temperature and relatively wet Degree parameter has different requirements, and, area biggish toilet more demanding for cleaniliness classs generallys use fresh air at present Unit (MAU)+dry calibration coil pipe (DCC)+fan filter uints (FFU) air cleaning and conditioning system mode, this mode have Flexibly, the advantages that and heat of air, wet process are separated, and cooling and heating load is avoided to offset, and temperature can be with subregion independent control.
In industrial clear production workshop, air handling process be air flow through raised floor, wafer board (or lattice girder), under Interlayer, return air passageway, cooling coil enter upper interlayer and are sent by FFU indoor.
Due to the air-flow in air ventilation passage and uneven, which kind of mode no matter cooling coil use arrange, It will appear inconsistent by the wind speed on its surface.The big part of wind speed, shared ratio is big, short with DCC time of contact, not up to Processing status point;The small part of wind speed, proportion is small, has reached processing status point.But for entire DDC, without abundant It plays a role.To cause heat transfer effect bad, the temperature of indoor requirement is not achieved.
Summary of the invention
The invention discloses a kind of cooling coil, air cleaning and conditioning system, toilet and industrial production workshops, it is therefore an objective to so that It is uniform by the wind speed of cooling coil, guarantee the air-flow high treating effect for passing through cooling coil.
In order to achieve the above objectives, the present invention the following technical schemes are provided:
A kind of cooling coil, including at least two parts fin;In at least two parts fin, the fin of each section fin Spacing is unequal.
A kind of air cleaning and conditioning system, including above-mentioned cooling coil, and the fresh air with the cooling coil cooperating Handle unit and fan filter unit.
A kind of toilet further includes between clear production and around the clear production including above-mentioned air cleaning and conditioning system Between the air ventilation passage that is arranged;
Cooling coil in the air cleaning and conditioning system is arranged in the air ventilation passage, in the cooling coil Each section fin corresponds respectively to the different wind speed regions in the air ventilation passage, wherein the big part rib of fin spacing Piece corresponds to the small region of wind speed.
Optionally, the air ventilation passage include between the clear production lower section lower interlayer, be located at institute State the return air passageway of side between clear production and between the clear production top upper interlayer.
Optionally, the cooling coil is arranged in the lower interlayer, and is placed on the return air passageway vertically At air flow inlet;
The cooling coil includes the first part's fin and second part fin set gradually from top to bottom, and described first The fin spacing of part fin is less than the fin spacing of the second part fin.
Optionally, the cooling coil is arranged in the return air passageway, and horizontal positioned;
The cooling coil includes from the third that side is set gradually to separate clean room side between clear production The fin spacing of part fin and Part IV fin, the Part III fin is less than between the fin of the Part IV fin Away from.
Optionally, the cooling coil is arranged in the upper interlayer, and is placed on the upper interlayer vertically Inlet;
The cooling coil includes the Part V fin between clear production, the Part VI between separate clear production Fin;The fin spacing of the Part V fin is less than the fin spacing of the Part VI fin.
Optionally, the cooling coil is arranged in the return air passageway, and is arranged in positive V-shape, has bilateral symmetry First coil pipe and second coil pipe, first coil pipe is far between clear production, and second coil pipe is close to clean Between production;
First coil pipe include the Part VII fin that is set gradually from the top opening of V-shape to bottom direction and Part VIII fin, second coil pipe includes the Part IX set gradually from the top opening of V-shape to bottom direction Fin and Part X fin;The Part IX fin, Part VII fin, Part X fin, Part VIII fin Fin spacing is sequentially increased.
A kind of industrial production workshop, including toilet described in any of the above embodiments.
Optionally, the industrial production workshop is integrated circuit or display screen factory.
Specifically, above-mentioned cooling coil (DCC), divides fin including the different multi-section of spacing, when arranging DCC, according to DCC Position in air ventilation passage adjusts flow area corresponding to DCC different piece fin, keeps fin spacing big Part fin corresponds to the small region of wind speed, and the closely spaced part fin of fin corresponds to the big region of wind speed;Work as high-speed flow When part fin closely spaced by fin, resistance increases, and flow velocity reduces, and air-flow contacts time lengthening;Work as high-speed flow When by the big part fin of fin spacing, resistance reduces, and compared with former spacing, flow velocity increases, and time of contact shortens, entire disconnected What speed became on face is uniform, comes into full contact with air-flow with the entire heat-transfer surface of DCC, to guarantee the air-flow treatment effect by DCC It is good.Specifically, when the air cleaning and conditioning system of DCC composition is applied in the toilet of industrial production workshop, make through DCC's Air-flow is uniform, high treating effect, so that the room temperature of factory is met the requirements.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of cooling coil provided in an embodiment of the present invention;
Fig. 2 be another embodiment of the present invention provides a kind of cooling coil structural schematic diagram;
Fig. 3 is a kind of structural schematic diagram of toilet provided in an embodiment of the present invention;
Fig. 4 be another embodiment of the present invention provides a kind of toilet structural schematic diagram;
Fig. 5 be another embodiment of the present invention provides a kind of toilet structural schematic diagram;
Fig. 6 be another embodiment of the present invention provides a kind of toilet structural schematic diagram.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
In a first aspect, as depicted in figs. 1 and 2, the embodiment of the present invention provides a kind of cooling coil, which includes extremely Few two parts fin 81;In at least two parts fin 81, the fin spacing of each section fin 81 is unequal.
Illustratively, as depicted in figs. 1 and 2, cooling coil provided in an embodiment of the present invention, can also include ribbed pipe 82, The structures such as collector pipe 83 and outline border 84, along 83 direction of collector pipe, fin 81 and the intersection of ribbed pipe 82 are combined together.The cooling Coil pipe includes at least two parts fin (as shown in figure 1 include A1 and A2 two parts fin 81), between the fin of each section fin 81 Away from differ;Illustratively, each section fin can be using the same outline border, be also possible to respectively have independent outline border.By It is differed in each section fin spacing, so that each section fin can form wind speed compensation effect of different sizes to the air-flow of process Fruit, and then can satisfy the heat exchange demand of different airflow environment.
Second aspect, the embodiment of the invention provides a kind of air cleaning and conditioning systems, including above-mentioned cooling coil;Such as Fig. 3 Shown, the air cleaning and conditioning system further includes the Fresh air handing unit (MAU) and blower cooperated with the cooling coil (DCC) 1 Filter unit (FFU unit) 2.
Illustratively, the cooling coil can be dry calibration coil pipe;Specifically, dry calibration coil pipe, specifically with water Temperature is higher than the cold water of the dew-point temperature of heat transfer space (toilet) as medium, carries out cooling treatment to air.
The third aspect, as shown in Figures 3 to 6, the embodiment of the invention provides a kind of toilets, empty including above-mentioned purification Adjusting system further includes 3 and (such as Fig. 3 is into Fig. 6 for the air ventilation passages of 3 settings between the clear production between clear production 41,42,43);Specifically, the cooling coil 1 in the air cleaning and conditioning system is arranged in the air ventilation passage, and institute It states each section fin in cooling coil 1 and corresponds respectively to the different wind speed regions in the air ventilation passage, wherein fin The big part fin of spacing corresponds to the small region of wind speed.
Specifically, above-mentioned cooling coil (DCC), including the different multiple portions fin of spacing, when arranging DCC, according to Position of the DCC in air ventilation passage adjusts flow area corresponding to DCC different piece fin, makes fin spacing Big part fin corresponds to the small region of wind speed, and the closely spaced part fin of fin corresponds to the big region of wind speed, then DCC is each Part fin can form wind speed compensation effect of different sizes to the air-flow of process, and (the big part fin of fin spacing is to wind speed Resistance it is smaller, the closely spaced part fin of fin is larger to wind speed resistance), can be with so that the wind speed by DCC is uniform It avoids air-flow from accumulating in certain part of DDC, comes into full contact with air-flow with the entire heat-transfer surface of DCC, to guarantee the air-flow by DCC High treating effect.Specifically, when the air cleaning and conditioning system of DCC composition is applied in the toilet of industrial production workshop, make The room temperature of factory is met the requirements.
In a kind of specific embodiment, as shown in Figures 3 to 6, the air ventilation passage include be located at it is described clean raw Between production 3 lower section lower interlayer 41, between the clear production return air passageway 42 of 3 sides and be located at the cleaning The upper interlayer 43 of 3 tops between production.
As shown in figure 3, the cooling coil 1 is arranged in the lower interlayer 41 in a kind of optional embodiment, And it is placed on the air flow inlet in the return air passageway 42 vertically nearby (descending the air flow outlet of interlayer 41).Specifically, Vertical place refers to the heat-transfer surface of cooling coil state in a vertical shape, and horizontal positioned i.e. heat-transfer surface cited below is in a horizontal state. Illustratively, cooling coil 1 can be "-" type, can also be sector when needs are biggish crosses wind area.
In lower interlayer 41, wind speed is to present the low distribution of relative superiority or inferiority in vertical direction, i.e., close to the top DCC1, wind speed is higher, Lower part wind speed very little.Above-mentioned DCC1 arrangement, air draught are easy to generate vortex in its vicinity when encountering DCC1.
Illustratively, in embodiment of the present invention, the cooling coil 1 includes the first part set gradually from top to bottom Fin 11 and second part fin 12, the fin spacing of first part's fin 11 are less than the rib of the second part fin 12 Piece spacing.
Specifically, above-mentioned cooling coil 1, the spacing of top fin (first part's fin 11) is smaller, lower part fin (second Part fin 12) spacing is larger, by two parts fin to the different compensation effects of wind speed, the wind speed by DCC1 can be made Uniformly, it avoids air-flow from accumulating in the top of DCC1, comes into full contact with air-flow with the entire heat-transfer surface of coil pipe, guarantee the gas by DCC1 Stream process effect is good.
As shown in figure 4, the cooling coil 1 is arranged in the return air passageway 42 in another optional embodiment, And it is horizontal positioned.Specifically, cooling coil 1 is parallel to lower 41 ground of interlayer, can be located at lower 41 ground of interlayer and The position of the upper middle of upper 43 furred ceiling of interlayer.
In return air passageway 42, wind speed uneven distribution in the horizontal direction, 3 side wind speed are high between clear production, far It is low from 3 side wind speed between clear production.Above-mentioned DCC1 arrangement, air draught when encountering DCC1, be obviously biased to lean on by air-flow 3 sides are accumulated between nearly clear production.
Illustratively, in embodiment of the present invention, the cooling coil 1 include between the clear production 3 sides to remote From Part III fin 13 and Part IV fin 14 that 3 sides between clear production are set gradually, the Part III fin 13 Fin spacing be less than the Part IV fin 14 fin spacing.
Specifically, above-mentioned cooling coil 1, the spacing far from 3 part fin (Part IV fin 14) between clear production Larger, 3 part fin (Part III fin 13) spacing is smaller between clear production, by two parts fin to wind speed Different compensation effects, can make it is uniform by the wind speed of DCC1, avoid air-flow between the clear production 3 sides accumulate, make Air-flow comes into full contact with the entire heat-transfer surface of DCC1, guarantees the air-flow high treating effect for passing through DCC1.
As shown in figure 5, the cooling coil 1 is arranged in the upper interlayer 43 in another optional embodiment Entrance (i.e. close to the air stream outlet in return air passageway 42), and vertical placement.
In upper interlayer 43, wind speed is that lower area wind speed is high in vertical direction distribution, and top wind speed is relatively low.It is above-mentioned DCC1 arrangement, air draught when encountering DCC1 are easy that a little be detained occurs near lower region thereof.
Illustratively, in embodiment of the present invention, the cooling coil 1 includes between clear production 3 Part V 3 Part VI fin 16 between fin 15, separate clear production;The fin spacing of the Part V fin 15 is less than described the The fin spacing of six part fins 16.
Specifically, above-mentioned cooling coil 1, the spacing of part fin (Part V fin 15) is smaller under coil pipe, upper part The spacing of fin (Part VI fin 16) is larger, by each section fin to the different compensation effects of wind speed, can to lead to The wind speed for crossing DCC1 is uniform, avoids air-flow from accumulating in the lower area of DCC1, comes into full contact with air-flow with the entire heat-transfer surface of DCC1, Guarantee the air-flow high treating effect by DCC1.
As shown in fig. 6, the cooling coil 1 is arranged in the return air passageway 42 in another optional embodiment, And be arranged in positive V-shape, i.e., cooling coil 1 is V-shape and V word is opening up;Specifically, cooling coil 1 has bilateral symmetry First coil pipe 101 and second coil pipe 102, first coil pipe 101 is far between clear production 3, second disk Pipe 102 is 3 between clear production.
Above-mentioned DCC1 arrangement, air draught is when encountering DCC1, air turbulence in its vicinity;Specifically, along dampening Square upwards, the wind speed on 3 sides (right side in figure) is greater than the wind speed by exterior wall side side (left side in figure) between the clear production, On along vertical direction, wind speed is gradually decreased from top to bottom, in turn, it is easy to which it is excessively high the part DCC1 wind speed occur, DCC1 resistance Increase.
Illustratively, in embodiment of the present invention, first coil pipe 101 includes from the top opening of V-shape the bottom of to The Part VII fin 17 and Part VIII fin 18 that portion direction is set gradually, second coil pipe 102 includes from V-shape The Part IX fin 19 and Part X fin 110 that top opening to bottom direction is set gradually;The Part IX fin 19, Part VII fin 17, Part X fin 110, Part VIII fin 18 fin spacing be sequentially increased.
Specifically, above-mentioned cooling coil 1, first coil pipe 101 and second coil pipe 102 are divided into along the vertical direction respectively Two parts fin, so that cooling coil 1 forms different four part fins (the Part VII fins 17, the 8th of fin spacing Point fin 18, Part IX fin 19, Part X fin 110), by each section fin to the different compensation effects of wind speed, It can make uniform by the wind speed of DCC1, avoid air-flow in local accumulation, prevent local wind speed excessively high, keep air-flow whole with DCC1 A heat-transfer surface comes into full contact with, and guarantees the air-flow high treating effect for passing through DCC1.
Specifically, the arrangement of DCC1 is not limited to above-described embodiment in the present invention, inventive concept according to the invention, There can also be many arrangements in the specific implementation, will not repeat them here.
Fourth aspect, the embodiment of the invention also provides a kind of industrial production workshop, including it is described in any of the above embodiments clean Clean room.
Optionally, the factory can be integrated circuit or display screen factory.Above two workshop is only It illustrates for the factory of protection of the embodiment of the present invention, certainly, the embodiment of the present invention is not limited to above two workshop.
Obviously, those skilled in the art can carry out various modification and variations without departing from this hair to the embodiment of the present invention Bright spirit and scope.In this way, if these modifications and changes of the present invention belongs to the claims in the present invention and its equivalent technologies Within the scope of, then the present invention is also intended to include these modifications and variations.

Claims (10)

1. a kind of cooling coil, which is characterized in that including at least two parts fin;In at least two parts fin, each section Fin spacing it is unequal.
2. a kind of air cleaning and conditioning system, which is characterized in that including cooling coil as described in claim 1, and with it is described cold But the Fresh air handing unit and fan filter unit of coil pipe cooperation.
3. a kind of toilet, which is characterized in that further include clear production including air cleaning and conditioning system as claimed in claim 2 Between and the air ventilation passage that is arranged between the clear production;
Each portion in the air ventilation passage, in the cooling coil is arranged in cooling coil in the air cleaning and conditioning system Fin is divided to correspond respectively to the different wind speed regions in the air ventilation passage, wherein the big part fin pair of fin spacing Region that should be small in wind speed.
4. toilet according to claim 3, which is characterized in that the air ventilation passage includes being located at the clean life The lower interlayer of lower section, the return air passageway of side and between the clear production between the clear production between production The upper interlayer of top.
5. toilet according to claim 4, which is characterized in that the cooling coil is arranged in the lower interlayer In, and it is placed on the inlet in the return air passageway vertically;
The cooling coil includes the first part's fin and second part fin set gradually from top to bottom, the first part The fin spacing of fin is less than the fin spacing of the second part fin.
6. toilet according to claim 4, which is characterized in that the cooling coil is arranged in the return air passageway, And it is horizontal positioned;
The cooling coil includes from the Part III that side is set gradually to separate clean room side between clear production Fin and Part IV fin, the fin spacing of the Part III fin are less than the fin spacing of the Part IV fin.
7. toilet according to claim 4, which is characterized in that the cooling coil is arranged in the upper interlayer In, and it is placed on the upper interlayer inlet vertically;
The cooling coil includes the Part V fin between clear production, the Part VI rib between separate clear production Piece;The fin spacing of the Part V fin is less than the fin spacing of the Part VI fin.
8. toilet according to claim 4, which is characterized in that the cooling coil is arranged in the return air passageway, And be arranged in positive V-shape, there is symmetrical first coil pipe and second coil pipe, first coil pipe is far from clean raw Between production, second coil pipe is between clear production;
First coil pipe includes the Part VII fin and the 8th set gradually from the top opening of V-shape to bottom direction Part fin, second coil pipe include the Part IX fin set gradually from the top opening of V-shape to bottom direction With Part X fin;The Part IX fin, Part VII fin, Part X fin, Part VIII fin fin Spacing is sequentially increased.
9. a kind of industrial production workshop, which is characterized in that including such as described in any item toilets claim 3-8.
10. industrial production workshop according to claim 9, which is characterized in that the industrial production workshop is integrated circuit Or display screen factory.
CN201910744501.3A 2019-08-13 2019-08-13 Cooling coil, air cleaning and conditioning system, toilet and industrial production workshop Pending CN110440357A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910744501.3A CN110440357A (en) 2019-08-13 2019-08-13 Cooling coil, air cleaning and conditioning system, toilet and industrial production workshop

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910744501.3A CN110440357A (en) 2019-08-13 2019-08-13 Cooling coil, air cleaning and conditioning system, toilet and industrial production workshop

Publications (1)

Publication Number Publication Date
CN110440357A true CN110440357A (en) 2019-11-12

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CN201910744501.3A Pending CN110440357A (en) 2019-08-13 2019-08-13 Cooling coil, air cleaning and conditioning system, toilet and industrial production workshop

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112050663A (en) * 2020-09-14 2020-12-08 刘延林 Homogenization liquid cooling type aeration cooling device
CN116105251A (en) * 2023-03-14 2023-05-12 通威微电子有限公司 Purifying equipment for semiconductor factory building

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101476763A (en) * 2009-01-22 2009-07-08 苏州克林络姆空调系统工程有限公司 Energy-saving control method of clean room and clean room thereof
CN103438620A (en) * 2013-08-27 2013-12-11 海尔集团公司 Efficient evaporator
CN103994674A (en) * 2014-06-04 2014-08-20 无锡杰尔压缩机有限公司 Unequal-interval pipe and fin type heat exchanger
CN204494921U (en) * 2014-12-23 2015-07-22 珠海格力电器股份有限公司 Heat-exchanging component and air-conditioning system
CN109059099A (en) * 2018-06-01 2018-12-21 世源科技工程有限公司 A kind of cleanliness control system of toilet
CN211177202U (en) * 2019-08-13 2020-08-04 世源科技工程有限公司 Purification air conditioning system, clean room and industrial production factory building

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101476763A (en) * 2009-01-22 2009-07-08 苏州克林络姆空调系统工程有限公司 Energy-saving control method of clean room and clean room thereof
CN103438620A (en) * 2013-08-27 2013-12-11 海尔集团公司 Efficient evaporator
CN103994674A (en) * 2014-06-04 2014-08-20 无锡杰尔压缩机有限公司 Unequal-interval pipe and fin type heat exchanger
CN204494921U (en) * 2014-12-23 2015-07-22 珠海格力电器股份有限公司 Heat-exchanging component and air-conditioning system
CN109059099A (en) * 2018-06-01 2018-12-21 世源科技工程有限公司 A kind of cleanliness control system of toilet
CN211177202U (en) * 2019-08-13 2020-08-04 世源科技工程有限公司 Purification air conditioning system, clean room and industrial production factory building

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112050663A (en) * 2020-09-14 2020-12-08 刘延林 Homogenization liquid cooling type aeration cooling device
CN116105251A (en) * 2023-03-14 2023-05-12 通威微电子有限公司 Purifying equipment for semiconductor factory building
CN116105251B (en) * 2023-03-14 2024-01-05 通威微电子有限公司 Purifying equipment for semiconductor factory building

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