CN110434681B - Double-side high-precision polishing method for large-caliber sapphire window element - Google Patents
Double-side high-precision polishing method for large-caliber sapphire window element Download PDFInfo
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- CN110434681B CN110434681B CN201910671137.2A CN201910671137A CN110434681B CN 110434681 B CN110434681 B CN 110434681B CN 201910671137 A CN201910671137 A CN 201910671137A CN 110434681 B CN110434681 B CN 110434681B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Abstract
The invention discloses a double-sided high-precision polishing method of a large-caliber sapphire window element, which can meet the processing requirements that the double-sided reflection surface shape of the large-caliber sapphire window element is better than 1/3 lambda, the surface roughness is better than 0.3nm, the parallelism is better than 0.009, and the surface smoothness is better than grade III, has simple process, can be directly applied to a single-shaft polishing machine, has low requirement on equipment, wide range of processable caliber, high production efficiency and low production cost.
Description
Technical Field
The invention relates to ultra-precision machining of optical elements, in particular to a double-side high-precision polishing method of a large-caliber sapphire window element.
Background
The sapphire has high hardness, good chemical stability and excellent heat conductivity, and the key is that the sapphire has excellent optical characteristics and shows good light transmittance in visible light and MWIR bands. The sapphire has high wear resistance, can be applied to severe working environments, can effectively transmit radiation from ultraviolet to middle infrared bands, has good optical characteristics, small optical scattering and good refractive index uniformity, and can meet the requirements of large-size windows. These excellent properties of sapphire are incomparable with other optical materials and are ideal for multispectral viewing windows.
However, the window used in such devices must also be thin and light to minimize the overall weight of the device while minimizing thermal gradients. Accordingly, the sapphire windows used in such devices are typically larger than 500mm, even above 800mm, in physical size, while having a thickness of less than 10mm, and in such large-aperture, thin-thickness cases, the optical processing of the sapphire windows is rather difficult. In the optical processing process, the lens is easy to deform, the high-precision surface shape is difficult to control, the edge distortion is serious, the processing period is long, and the cost is extremely high.
Currently, there are two general polishing processes for sapphire optical elements:
one is a conventional single-side polishing process, wherein the surface B of the fixed element is firstly pasted, the surface A is polished, and then the process is long in processing time, the element is pasted and has great stress deformation, and the precision of the shape after the element is separated from the tool is extremely poor.
The other method is common double-sided polishing, an element is arranged in a planetary polishing wheel between an upper polishing disk and a lower polishing disk, and the two polishing disks rotate reversely to polish; and because this method is a technological method based on a double-sided polishing machine, the application of large-caliber elements with the monomer size of more than 300mm is difficult, and the equipment dependence is overlarge.
Disclosure of Invention
The technical problem solved by the invention is as follows: the method can meet the processing requirements that the double-sided reflection surface shape of the large-caliber sapphire window element is better than 1/3 lambda, the surface roughness is better than 0.3nm, the parallelism is better than 0.009, and the surface smoothness is better than grade III, has simple process, can be directly applied to a single-shaft polishing machine, has low requirement on equipment, wide range of processable caliber, high production efficiency and low production cost.
The technical solution of the invention is as follows:
a double-side high-precision polishing method for a large-caliber sapphire window element adopts a single-shaft polishing machine, and is characterized by comprising the following steps:
1) placing a large-diameter sapphire window element (hereinafter referred to as element) on a lower polishing disc surface of a single-shaft polishing machine, pressing an upper polishing disc on the upper surface of the element, placing the element in the middle of a workpiece ring with a circular hole connecting rod, and keeping the workpiece ring on the lower polishing disc and connected with a main shaft of the upper polishing disc;
2) starting the single-shaft polishing machine, increasing the rotating speed of the lower polishing disk to 30rpm from 0, and increasing the pressure of the upper polishing disk to 10g/cm from 02Respectively polishing the upper surface and the lower surface of the element by an upper polishing disk and a lower polishing disk of a single-shaft polishing machine, when the roughness of the surface of the element is higher than 3nm, using a diamond powder polishing solution with the particle size of 1 mu m and keeping the adding speed of the polishing solution at 30mL/min, and entering the step 3 after a period of time;
3) the rotating speed of the lower polishing disk is increased from 30 to 40rpm, and the pressure of the upper polishing disk is increased to 10g/cm2In the process, the diamond powder with the grain diameter of 1 mu m is kept to be used, and the adding speed of the polishing solution is kept to be 30 mL/min;
4) measuring the roughness of two surfaces of the element, entering the next step when the roughness of the surface of the element is lower than 3nm, and returning to the step 3) if not;
5) taking the element from the current single-shaft polishing machine, placing the element on the lower polishing disk surface of another single-shaft polishing machine, pressing an upper polishing disk on the upper surface of the element, placing the element in the middle of a workpiece ring with a circular hole connecting rod, and keeping the workpiece ring placed on the lower polishing disk and connected with a main shaft of the upper polishing disk; starting the single-shaft polishing machine, increasing the rotating speed of the lower polishing disk to 50rpm from 40, and increasing the pressure of the upper polishing disk to 15g/cm2In the process, the diamond powder polishing solution with the particle size of 0.5 mu m is kept to be used, and the adding speed of the polishing solution is kept to be 40 mL/min;
6) measuring the roughness of two surfaces of the element, entering the next step when the roughness of the two surfaces of the element meets the processing requirement, and otherwise, returning to the step 5);
7) and finishing the double-sided high-precision polishing of the large-caliber sapphire window element.
The lower polishing disk of the single-shaft polishing machine actively rotates, the upper polishing disk passively rotates, and the workpiece ring and the upper polishing disk are connected to move relatively; the upper polishing disc and the lower polishing disc are both resin copper discs, the thickness of the workpiece ring needs to be slightly larger than the thickness of an element, the diameter of an inner hole of the workpiece ring needs to be larger than the longest diagonal length of the element, the diameter of the upper polishing disc needs to be slightly smaller than the longest diagonal length of the element, the single-shaft polishing machine is provided with a peristaltic pump and a filter screen, grooves are arranged on the periphery of the lower polishing disc, and circular injection of polishing solution can be realized by matching the grooves.
The invention has the advantages that:
1) the invention can be suitable for polishing large-caliber thin sapphire window elements, and has wide range of processable calibers;
2) the element processed by the invention can realize that the double-sided reflection surface shape is better than 1/3 lambda, the surface roughness is better than 0.3nm, the parallelism is better than 0.009, and the surface smoothness is better than grade III;
3) the invention can be directly implemented on a single-shaft machine without a special double-sided polishing machine;
4) the polishing solution is replaced by taking down the element replacing equipment, so that the polishing solution with the same particle size can be ensured to be used by the same equipment, the surface quality of the element is not reduced due to mutual pollution of the polishing solution, the use ratio of the polishing solution is further improved, and the cost is reduced.
5) The invention has the advantages of high processing efficiency, small consumption of materials and low overall cost.
Drawings
FIG. 1 is a structural solid diagram of the components, the upper polishing disk, the lower polishing disk and the workpiece ring of the double-sided high-precision polishing method of the large-aperture sapphire window component.
1-upper polishing disk, 2-lower polishing disk, 3-connecting rod with circular hole, 4-workpiece ring, 5-sapphire window element
Detailed Description
The present invention will be further described with reference to the following specific examples.
The invention relates to a double-side high-precision polishing method of a large-caliber sapphire window element, which adopts a single-shaft polishing machine and comprises the following steps: see FIG. 1
1) Placing a large-caliber sapphire window element (hereinafter referred to as element) 5 on a lower polishing disc 2 of a single-shaft polishing machine, pressing an upper polishing disc 1 on the upper surface of the element 5, simultaneously placing the element 5 in the middle of a workpiece ring 4 with a circular hole connecting rod 3, and keeping the workpiece ring 4 on the lower polishing disc and connected with a main shaft of the upper polishing disc;
2) starting the single-shaft polishing machine, increasing the rotating speed of the lower polishing disk 2 from 0 to 30rpm, and increasing the pressure of the upper polishing disk from 0 to 10g/cm2An upper polishing disk 1 and a lower polishing disk 2 of the single-shaft polishing machine respectively polish the upper surface and the lower surface of the element 5, when the roughness of the surface of the element is higher than 3nm, the grain diameter of the used diamond powder polishing solution is 1 mu m, the adding speed of the polishing solution is kept at 30mL/min, and the step 3 is carried out after a period of time;
3) the rotating speed of the lower polishing disk 2 is increased from 30 to 40rpm, and the pressure of the upper polishing disk is increased to 10g/cm2In the process, the diamond powder with the grain diameter of 1 mu m is kept to be used, and the adding speed of the polishing solution is kept to be 30 mL/min;
4) measuring the roughness of two surfaces of the element, entering the next step when the roughness of the surface of the element is lower than 3nm, and returning to the step 3) if not;
5) taking the element from the current single-shaft polishing machine, placing the element on a lower polishing disk 2 of another single-shaft polishing machine, pressing an upper polishing disk 1 to the upper surface of the element 5, placing the element 5 in the middle of a workpiece ring 4 with a circular hole connecting rod 3, keeping the workpiece ring 4 placed on the lower polishing disk and connected with a main shaft of the upper polishing disk; the single-shaft polisher is started to increase the rotation speed of the lower polishing disk 2 from 40 to 50rpm and the pressure of the upper polishing disk to 15g/cm2In the process, the diamond powder polishing solution with the particle size of 0.5 mu m is kept to be used, and the adding speed of the polishing solution is kept to be 40 mL/min;
6) measuring the roughness of two surfaces of the element, entering the next step when the roughness of the two surfaces of the element meets the processing requirement, and otherwise, returning to the step 5);
7) and finishing the double-sided high-precision polishing of the large-caliber sapphire window element.
The lower polishing disk of the single-shaft polishing machine actively rotates, the upper polishing disk passively rotates, and the workpiece ring and the upper polishing disk are connected to move relatively; the upper polishing disc and the lower polishing disc are both resin copper discs, the thickness of the workpiece ring needs to be slightly larger than the thickness of an element, the diameter of an inner hole of the workpiece ring needs to be larger than the longest diagonal length of the element, the diameter of the upper polishing disc needs to be slightly smaller than the longest diagonal length of the element, the single-shaft polishing machine is provided with a peristaltic pump and a filter screen, grooves are arranged on the periphery of the lower polishing disc, and circular injection of polishing solution can be realized by matching the grooves.
The polishing solution is replaced by taking down the element replacing equipment, so that the polishing solution with the same particle size can be ensured to be used by the same equipment, the surface quality of the element is not reduced due to mutual pollution of the polishing solution, the use ratio of the polishing solution is further improved, and the cost is reduced.
The caliber of the element processed by the invention depends on the caliber of a single-axis machine, so the method is suitable for polishing various large, medium and small-caliber sapphire window elements, and is particularly suitable for double-sided high-precision polishing of large-caliber (more than or equal to 500mm) sapphire window elements.
In the examples, a sapphire window having a length of 500mm, a width of 140mm and a thickness of 8mm was used as an object of polishing. Experiments show that the invention not only can meet the processing requirements that the double-sided reflection surface shape of a large-caliber sapphire window element is superior to 1/3 lambda, the surface roughness is superior to 0.3nm, the parallelism is superior to 0.009 and the surface smoothness is superior to grade III, but also has simple process, can be directly applied to a single-shaft polishing machine, has low requirement on equipment, wide range of processable caliber, high production efficiency and low production cost.
Claims (2)
1. A double-side high-precision polishing method for a large-caliber sapphire window element adopts a single-shaft polishing machine, and is characterized by comprising the following steps:
1) placing a large-caliber sapphire window element (5) on a lower polishing disc (2) of a single-shaft polishing machine, pressing an upper polishing disc (1) on the upper surface of the element, simultaneously placing the element in the middle of a workpiece ring (4) with a circular hole connecting rod (3), keeping the workpiece ring (4) placed on the lower polishing disc and connected with a main shaft of the upper polishing disc, and connecting the workpiece ring and the upper polishing disc for relative movement;
2) starting the single-shaft polishing machine, increasing the rotating speed of the lower polishing disk (2) from 0 to 30rpm, and increasing the pressure of the upper polishing disk from 0 to 10g/cm2An upper polishing disk (1) and a lower polishing disk (2) of the single-shaft polishing machine respectively polish the upper surface and the lower surface of the element (5), when the roughness of the surface of the element is higher than 3nm, the grain diameter of used diamond powder polishing solution is 1 mu m, the adding speed of the polishing solution is kept at 30mL/min, and the step 3 is carried out after a period of time;
3) the rotating speed of the lower polishing disk (2) is increased to 40rpm from 30, and the pressure of the upper polishing disk is increased to 10g/cm2In the process, the diamond powder with the grain diameter of 1 mu m is kept to be used, and the adding speed of the polishing solution is kept to be 30 mL/min;
4) measuring the roughness of two surfaces of the element, entering the next step when the roughness of the surface of the element is lower than 3nm, and returning to the step 3) if not;
5) the element is taken down from the current single-shaft polishing machine and placed on a lower polishing disk (2) of another single-shaft polishing machine, an upper polishing disk (1) is pressed on the upper surface of the element, meanwhile, the element is placed in the middle of a workpiece ring (4) with a circular hole connecting rod (3), and the workpiece ring (4) is kept placed on the lower polishing disk and connected with a main shaft of the upper polishing disk; starting the single-shaft polishing machine, increasing the rotating speed of the lower polishing disk (2) to 50rpm from 40, and increasing the pressure of the upper polishing disk to 15g/cm2In the process, the diamond powder polishing solution with the particle size of 0.5 mu m is kept to be used, and the adding speed of the polishing solution is kept to be 40 mL/min;
6) measuring the roughness of two surfaces of the element, entering the next step when the roughness of the two surfaces of the element meets the processing requirement, and otherwise, returning to the step 5);
7) and finishing the double-sided high-precision polishing of the large-caliber sapphire window element.
2. The double-sided high-precision polishing method for the large-caliber sapphire window element as claimed in claim 1, wherein the lower polishing disk of the single-shaft polishing machine is actively rotated, and the upper polishing disk is passively rotated; the upper polishing disc and the lower polishing disc are both resin copper discs, the thickness of the workpiece ring needs to be slightly larger than the thickness of an element, the diameter of an inner hole of the workpiece ring needs to be larger than the longest diagonal length of the element, the diameter of the upper polishing disc needs to be slightly smaller than the longest diagonal length of the element, the single-shaft polishing machine is provided with a peristaltic pump and a filter screen, grooves are arranged on the periphery of the lower polishing disc, and circular injection of polishing solution can be realized by matching the grooves.
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| US5571041A (en) * | 1995-04-21 | 1996-11-05 | Leikam; Josh K. | Refinishing compact disks |
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| CN103909465A (en) * | 2014-04-02 | 2014-07-09 | 天通控股股份有限公司 | Method for grinding and polishing large-size sapphire substrate slice |
| CN104015122A (en) * | 2014-06-18 | 2014-09-03 | 蓝思科技股份有限公司 | Double-sided copper disc grinding process for sapphire panel |
| CN205703670U (en) * | 2016-04-07 | 2016-11-23 | 东莞市兰光光学科技有限公司 | A kind of optical elements of large caliber Twp-sided polishing machine |
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| CN107309784A (en) * | 2017-09-03 | 2017-11-03 | 湖北天宝光电科技有限公司 | A kind of two-sided fine grinding technology of sapphire cover plate |
| CN107695796A (en) * | 2016-08-08 | 2018-02-16 | 蓝思科技（长沙）有限公司 | A kind of sapphire crystalline substance tile polishing method |
| CN108214260A (en) * | 2016-12-22 | 2018-06-29 | 蓝思科技（长沙）有限公司 | A kind of polishing process of ultra-thin sapphire wafer |
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2019
- 2019-07-24 CN CN201910671137.2A patent/CN110434681B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5571041A (en) * | 1995-04-21 | 1996-11-05 | Leikam; Josh K. | Refinishing compact disks |
| CN101069958A (en) * | 2007-05-09 | 2007-11-14 | 浙江工业大学 | Crystal-chip polishing method |
| CN103909465A (en) * | 2014-04-02 | 2014-07-09 | 天通控股股份有限公司 | Method for grinding and polishing large-size sapphire substrate slice |
| CN104015122A (en) * | 2014-06-18 | 2014-09-03 | 蓝思科技股份有限公司 | Double-sided copper disc grinding process for sapphire panel |
| CN205703670U (en) * | 2016-04-07 | 2016-11-23 | 东莞市兰光光学科技有限公司 | A kind of optical elements of large caliber Twp-sided polishing machine |
| CN107695796A (en) * | 2016-08-08 | 2018-02-16 | 蓝思科技（长沙）有限公司 | A kind of sapphire crystalline substance tile polishing method |
| CN108214260A (en) * | 2016-12-22 | 2018-06-29 | 蓝思科技（长沙）有限公司 | A kind of polishing process of ultra-thin sapphire wafer |
| CN106903559A (en) * | 2017-04-18 | 2017-06-30 | 山西中聚晶科半导体有限公司 | A kind of sapphire substrate preparation method |
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