CN205703670U - A kind of optical elements of large caliber Twp-sided polishing machine - Google Patents
A kind of optical elements of large caliber Twp-sided polishing machine Download PDFInfo
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- CN205703670U CN205703670U CN201620301432.0U CN201620301432U CN205703670U CN 205703670 U CN205703670 U CN 205703670U CN 201620301432 U CN201620301432 U CN 201620301432U CN 205703670 U CN205703670 U CN 205703670U
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- polishing disk
- rotation
- polishing
- workpiece ring
- drive motor
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Abstract
The utility model discloses a kind of optical elements of large caliber Twp-sided polishing machine, it is characterized in that including: upper polishing disk, main fork, secondary fork, eccentric, eccentric support, the upper polishing disk axis of rotation, upthrow cd-rom drive motor, correction dish, correction dish clamp, correction disk-drive motor, workpiece ring, workpiece ring clamp, workpiece ring drive motor, lower polishing disk, main engine bed;Wherein, upper polishing disk can swing again can rotation, workpiece surface is carried out swing polishing and annular polishing;Lower polishing disk carries out annular polishing to workpiece;Meanwhile, lower polishing card shape is modified keeping by correction dish;This utility model solves face shape and steps on the problem of limit, rake angle, reduces optical surface small size foozle, it is adaptable to bore reaches 600mm and to before the depth of parallelism, echo and transmission wavefront has the optical elements of large caliber twin polishing of particular/special requirement.
Description
Technical field
This utility model belongs to optical element processing technique field, particularly relates to a kind of optical elements of large caliber twin polishing
Machine.
Background technology
Along with developing rapidly optical elements of large caliber of the development of contemporary optics system, particularly device of high power laser
Processing is had higher requirement.In addition to surface figure accuracy, the depth of parallelism, production cycle and production cost are had strict requirements,
Optical surface small size foozle is the most increasingly paid close attention to by people.Optical surface small size foozle may result in light beam
High frequency modulated and the non-linear growth of system, easily cause optic element damage and reduction light beam can focus power.
Current large-scale glass polishing machine both domestic and external uses the mode of single-sided polishing, and machining accuracy depends on the warp of operator
Test, operator are required height, and when processing has the optical element of transmission wavefront, can only first process simultaneously, and another
Face need to protect, and causes detecting transmission wavefront difficulty, and working (machining) efficiency is low;Domestic existing Twp-sided polishing machine is mainly for diameter
Small-bore ultra thin optical element in 80-300mm, is primarily upon production cycle and production cost, surface figure accuracy, depth of parallelism requirement
Universal the highest, it is impossible to meet the requirement of the optical element twin polishing that bore is reached 600mm.Patent 2010101454338 carries
The ring pendulum gone out throws Twp-sided polishing machine, integrates ring throwing and pendulum is thrown, it is adaptable to require before having transmission wavefront and echo is big
The polishing of bore ultra thin optical element, but on it, dish, lower wall differ relatively big to the polishing efficiency of workpiece, need to be at course of processing intermediate frequency
Numerous to workpiece turn-over, and when upper dish swings, the linear velocity difference in center and peripheral position is relatively big, easily causes workpiece face shape
Step on limit, rake angle;It addition, patent 2013202816890 proposes a kind of actively parallel-moving type Twp-sided polishing machine, collection translation is thrown, annular is thrown
In one, it is adaptable to cutter trade is had the polishing of the heavy caliber ultra thin optical element of particular/special requirement, but its lower wall is for a long time
Work process is susceptible to face shape change, reduces machining accuracy, the lower card shape of reparation need to be spent additional time, extend
Process-cycle.Additionally, use numerical control small tool polishing mode also can realize optical elements of large caliber is processed, face can be improved
Shape precision, but optical surface small size foozle can be introduced, reduce optical element service life and system beam quality.
This utility model is for the processing characteristic of optical elements of large caliber and the defect of existing process technology, and employing can be put
Dynamic again can the upthrow compact disk structure of rotation, make the motion mode of polishing disk become actively, improve polishing efficiency, and polishing
Track is more uniform, solves face shape and steps on limit, rake angle problem;It addition, use lower polishing card shape correcting structure, make lower polishing card
Shape is operationally repaired holding, improves the surface figure accuracy of lower polishing disk, reduces optical surface small size foozle;
Additionally, use adjustable calipers structure, add scalable technological parameter, make polishing locus uniform further, improve big mouth
Footpath optical element twin polishing precision and production efficiency, and improve optical element service life and system beam quality.
Summary of the invention
The purpose of this utility model is to propose a kind of optical elements of large caliber Twp-sided polishing machine, it is achieved reach bore
600mm, to before the depth of parallelism, echo and transmission wavefront has the optical elements of large caliber twin polishing of particular/special requirement.This practicality is new
Type use can swing and can the upthrow compact disk structure of rotation, make the motion mode of polishing disk become actively, improve polishing effect
Rate, makes polishing locus more uniform, solves face shape and step on limit, rake angle problem;It addition, use lower polishing card shape correcting structure, make
Lower polishing card shape is operationally repaired holding, improves the surface figure accuracy of lower polishing disk, thus improves optical component surface shape
Precision, reduces optical surface small size foozle;Additionally, use adjustable calipers structure, increase scalable technological parameter, enter
One step makes polishing locus uniform, improves optical elements of large caliber twin polishing precision and production efficiency, and improves optical element
Service life and system beam quality.
Technical solution of the present utility model is as follows:
A kind of optical elements of large caliber Twp-sided polishing machine, including: upper polishing disk, main fork, secondary fork, eccentric, bias
Wheel support, the upper polishing disk axis of rotation, upthrow cd-rom drive motor, correction dish, correction dish clamp, correction disk-drive motor, workpiece
Ring, workpiece ring clamp, workpiece ring drive motor, lower polishing disk, main engine bed;Wherein, main fork, secondary fork, eccentric, eccentric
The upper polishing disk swinging structure of support composition, provides oscillating motion for upper polishing disk;Main fork one end is provided with polishing disk certainly
Rotating shaft, upthrow cd-rom drive motor, upthrow cd-rom drive motor drives the upper polishing disk axis of rotation to rotate, provides certainly for upper polishing disk
Transhipment is dynamic;Correction dish is positioned in lower polishing card, spacing by correction dish clamp, and correction dish clamp are provided with correction dish clamp
Drive motor, be used for driving correction dish rotation;Workpiece ring is positioned in lower polishing card, spacing by workpiece ring clamp, workpiece ring
It is provided with workpiece ring on clamp and drives motor, be used for driving workpiece ring rotation;Main engine bed connects lower polishing disk, drives lower polishing disk
Rotation in the counterclockwise direction.
Described secondary fork adjustable length, one end is connected with described main fork by oscillating bearing, and the other end is by rolling
Bearing is connected with described eccentric;By the main fork amplitude of oscillation described in the eccentric throw scalable of the described eccentric of regulation;Described main pendulum
Bar adjustable length, terminal surface is provided with motor cabinet and is connected with described upthrow cd-rom drive motor, be additionally provided with through hole, and bottom surface sets
It is equipped with square shaft bearing, is used for placing the polishing disk axis of rotation;Shaft coupling is passed through with described in described upper polishing disk axis of rotation upper end
Upthrow cd-rom drive motor outfan connects, and lower end is connected with upper polishing disk by having the joint of flat recess;Described upper polishing
Dish axis of rotation lower end is provided with pin-and-hole, is installed with latch in pin-and-hole, and latch is positioned at the flat recess of joint;Described upper polishing disk rotation side
To consistent with described lower polishing disk rotation direction.
The diameter of described correction dish is the 8/15 of described lower polishing disk diameter, and the thickness of described correction dish is described correction dish
Diameter 1/10;Described correction dish is spacing by described correction dish clamp, corrects described in regulation correction dish clamp scalable
The position of dish;The rotation under described correction disk-drive motor of described correction dish, sense of rotation is consistent with described lower polishing disk direction.
Described workpiece ring clamp are provided with drivewheel, driven pulley and shield arm, and drivewheel and described workpiece ring drive motor even
Connecing, shield arm is provided with auxiliary wheel;Drivewheel, driven pulley and auxiliary wheel are tangent with described workpiece ring cylindrical, for described workpiece ring
120 ° of center is uniformly distributed, and holds described workpiece ring tightly;Described workpiece ring clamp are provided with XY axis adjustment device, workpiece described in scalable
Ring position.
Work process of the present utility model is: first spill polishing fluid at upper polishing disk, and correction dish moves to correction dish card
In pincers, workpiece ring shield arm is opened, workpiece ring is placed on lower polishing disk, put the workpiece in workpiece ring, on workpiece
Polishing fluid is spilt on surface, is then placed on workpiece by upper polishing disk, and workpiece ring of closing shield arm is also locked, and regulates workpiece ring XY axle
Adjusting means, makes workpiece ring be in operating position, puts down main fork subsequently, makes the latch of polishing disk axis of rotation lower end be positioned at
In the flat recess of polishing disk joint, regulate main fork, secondary oscillating bar length and eccentric, so that upper polishing disk is in working position
Putting, open host switch, main engine bed works, and lower polishing disk rotates, and then opens correction disk-drive motor and workpiece ring drives electricity
Machine switchs, correction dish, workpiece ring rotation, after confirming to work well, opens eccentric support and upthrow cd-rom drive motor switch,
Make polishing disk swing and rotation works;Lower polishing disk carries out annular polishing to workpiece lower surface, and correction dish is to lower polishing simultaneously
Card shape is modified keeping, and workpiece is carried out swinging polishing and annular polishing by upper polishing disk the most simultaneously.
The utility model has the advantages that: a kind of optical elements of large caliber Twp-sided polishing machine, employing can swing and can rotation
Upthrow compact disk structure, make polishing disk simultaneously workpiece is carried out swing polishing and annular polishing, improve polishing efficiency, and
Make polishing locus more uniform, the problem that the face shape of solving easily steps on limit, rake angle;Lower polishing disk carries out ring to workpiece lower surface
Shape polishes, and uses correction dish to be modified lower polishing card shape keeping, improves polishing disk surface figure accuracy, thus improve light
Learn element surface figure accuracy, reduce optical surface small size foozle;Use adjustable calipers structure, add scalable
Technological parameter, makes polishing locus uniform further;This utility model achieves and bore is reached 600mm, to the depth of parallelism, echo
Front and transmission wavefront has the optical elements of large caliber twin polishing of particular/special requirement, improves optical elements of large caliber twin polishing essence
Degree and production efficiency, also improve optical element service life and system beam quality.
Accompanying drawing explanation
Fig. 1 is population structure schematic diagram of the present utility model;
Fig. 2 is upper polishing disk of the present utility model, correction dish, lower polishing disk correspondence position schematic diagram;
The upper polishing disk of parts and numbering: 1-in figure, the main fork of 2-, 3-pair fork, 4-eccentric, 5-eccentric support,
The 6-upper polishing disk axis of rotation, 7-upthrow cd-rom drive motor, 8-correction dish, 9-correction dish clamp, 10-corrects disk-drive motor,
11-workpiece ring, 12-workpiece ring clamp, 13-workpiece ring driving motor, polishing disk under 14-, 15-main engine bed, 16-oscillating bearing,
17-rolling bearing, 18-motor cabinet, 19-through hole, 20-square shaft bearing, 21-shaft coupling, 22-joint, 23-pin-and-hole, 24-inserts
Pin, 25-drivewheel, 26-driven pulley, 27-shield arm, 28-auxiliary wheel, 29-XY axis adjustment device, 30-workpiece.
Detailed description of the invention
Below in conjunction with embodiment, this utility model is further illustrated.
Such as Fig. 1-2, a kind of optical elements of large caliber Twp-sided polishing machine, including: upper polishing disk 1, main fork 2, secondary fork 3,
Eccentric 4, eccentric support 5, the upper polishing disk axis of rotation 6, upthrow cd-rom drive motor 7, correction dish 8, correction dish clamp 9, school
Positive disk-drive motor 10, workpiece ring 11, workpiece ring clamp 12, workpiece ring drive motor 13, lower polishing disk 14, main engine bed 15;Its
In, main fork 2, secondary fork 3, eccentric 4, the upper polishing disk swinging structure of eccentric support 5 composition, provide for upper polishing disk and swing
Motion;Main fork 2 one end arranges the polishing disk axis of rotation 6, upthrow cd-rom drive motor 7, and upthrow cd-rom drive motor 7 drives
The upper polishing disk axis of rotation 6 rotates, and provides spinning motion for upper polishing disk;Correction dish 8 is positioned on lower polishing disk 14, by correction
Dish clamp 9 are spacing, correction dish clamp 9 are provided with correction dish clamp and drive motor 10, be used for driving correction dish 8 rotation;Workpiece
Ring 11 is positioned on lower polishing disk 14, spacing by workpiece ring clamp 12, workpiece ring clamp 12 is provided with workpiece ring and drives electricity
Machine 13, is used for driving workpiece ring 11 rotation;Main engine bed 15 connects lower polishing disk 14, drives lower polishing disk 14 in the counterclockwise direction certainly
Turn.
Described secondary fork 3 adjustable length, one end is connected with described main fork 2 by oscillating bearing 16, and the other end passes through
Rolling bearing 17 is connected with described eccentric 4;By main fork 2 amplitude of oscillation described in the eccentric throw scalable of the described eccentric 4 of regulation;
Described main fork 2 adjustable length, terminal surface is provided with motor cabinet 18 and is connected with described upthrow cd-rom drive motor 7, also set
Having through hole 19, bottom surface is provided with square shaft bearing 20, is used for placing the polishing disk axis of rotation 6;On the described upper polishing disk axis of rotation 6
End is connected with described upthrow cd-rom drive motor 7 outfan by shaft coupling 21, lower end by have flat recess joint 22 and
Upper polishing disk 1 connects;The described upper polishing disk axis of rotation 6 lower end is provided with pin-and-hole 23, is installed with latch 24 in pin-and-hole, and latch is positioned at joint
Flat recess in;Described upper polishing disk 1 sense of rotation is consistent with described lower polishing disk 14 rotation direction.
The diameter of described correction dish 8 is the 8/15 of described lower polishing disk 14 diameter, and the thickness of described correction dish is that itself is straight
The 1/10 of footpath;Described correction dish 8 is spacing by described correction dish clamp 9, by correction dish described in regulation correction dish clamp 9 scalable
8 positions;Described correction dish 8 is in the 10 times rotations of described correction disk-drive motor, sense of rotation and described lower polishing disk 14 direction one
Cause.
Preferably, a diameter of 1500mm of described lower polishing disk 14, material is marble;It addition, the material of correction dish is also
It it is marble.
Described workpiece ring clamp 12 are provided with drivewheel 25, driven pulley 26 and shield arm 27, drivewheel 25 and described workpiece ring
Driving motor 13 to connect, shield arm 27 is provided with auxiliary wheel 28;Drivewheel 25, driven pulley 26 and auxiliary wheel 28 and described workpiece ring 11
Cylindrical is tangent, and 120 ° of corresponding described workpiece ring 11 center is uniformly distributed, and holds described workpiece ring 11 tightly;Described workpiece ring clamp 12 set
There is XY axis adjustment device 29, workpiece ring 11 position described in scalable.
Preferably, described upthrow cd-rom drive motor 7, correction disk-drive motor 10, workpiece ring drive motor 13 be can
Buncher, additionally eccentric support 4 and main engine bed 15 are respectively arranged with adjustable speed motor.
During work, first spill polishing fluid at lower polishing disk 14, correction dish 8 is moved in correction dish clamp 9, by workpiece ring
Shield arm 27 is opened, and workpiece ring 11 is placed on lower polishing disk 14, workpiece 30 is put into workpiece ring 11, table on workpiece 30
Polishing fluid is spilt in face, is then placed on workpiece by upper polishing disk 1, and workpiece ring of closing shield arm 27 is also locked, and regulates workpiece ring XY
Axis adjustment device 29, makes workpiece ring 11 be in operating position, puts down main fork 2 subsequently, makes inserting of the polishing disk axis of rotation 6 lower end
Pin 24 is positioned at the flat recess of polishing disk joint 22, regulates main fork 2, secondary fork 3 length and eccentric 4, so that upthrow
CD 1 is in operating position, opens host switch, and main engine bed 15 works, and lower polishing disk 14 rotates, and then opens correction dish and drives
Motor 7 and workpiece ring drive motor 13 to switch, correction dish 8, workpiece ring 11 rotation, after confirming to work well, open eccentric turbine
Seat 5 and upthrow cd-rom drive motor 7 switch, and make polishing disk 1 swing and rotation works.Lower polishing disk 14 is to workpiece 30 lower surface
Carrying out annular polishing, 1 shape of lower polishing disk is modified keeping by correction dish 8 simultaneously, and upper polishing disk 1 is the most simultaneously to workpiece 30
Carry out swinging polishing and annular polishing.
Experiment shows, this utility model use can swing and can the upthrow compact disk structure of rotation, make polishing disk simultaneously
Carry out workpiece swinging polishing and annular polishing, improve polishing efficiency, and make polishing locus more uniform, solve face shape
The problem easily stepping on limit, rake angle;Lower polishing disk carries out annular polishing to workpiece lower surface, uses correction dish to lower polishing card
Shape is modified keeping, and improves polishing disk surface figure accuracy, thus improves optical component surface shape precision, reduces optical surface
Small size foozle;Use adjustable calipers structure, add scalable technological parameter, make polishing locus uniform further;
This utility model achieves and bore is reached 600mm, to before the depth of parallelism, echo and transmission wavefront has the heavy caliber of particular/special requirement
Optical element twin polishing, improves optical elements of large caliber twin polishing precision and production efficiency, also improves optical element
Service life and system beam quality.
Below this utility model is discussed in detail, but those skilled in the art can carry out various change and change
Enter, the scope of the present utility model limited without departing from appended claims.
Claims (4)
1. an optical elements of large caliber Twp-sided polishing machine, including: upper polishing disk, main fork, secondary fork, eccentric, eccentric
Support, the upper polishing disk axis of rotation, upthrow cd-rom drive motor, correction dish, correction dish clamp, correction disk-drive motor, workpiece ring,
Workpiece ring clamp, workpiece ring drive motor, lower polishing disk, main engine bed;Wherein, main fork, secondary fork, eccentric, eccentric turbine
The upper polishing disk swinging structure of seat composition, provides oscillating motion for upper polishing disk;Main fork one end is provided with polishing disk rotation
Axle, upthrow cd-rom drive motor, upthrow cd-rom drive motor drives the upper polishing disk axis of rotation to rotate, provides rotation for upper polishing disk
Motion;Correction dish is positioned in lower polishing card, spacing by correction dish clamp, correction dish clamp is provided with correction dish clamp and drives
Galvanic electricity machine, is used for driving correction dish rotation;Workpiece ring is positioned in lower polishing card, spacing by workpiece ring clamp, workpiece ring card
It is provided with workpiece ring on pincers and drives motor, be used for driving workpiece ring rotation;Main engine bed connects lower polishing disk, drives lower polishing disk edge
Counterclockwise rotation.
Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: described secondary fork scalable
Length, one end is connected with described main fork by oscillating bearing, and the other end is connected with described eccentric by rolling bearing;Pass through
Regulate the main fork amplitude of oscillation described in the eccentric throw scalable of described eccentric;Described main fork adjustable length, terminal surface is arranged
Having motor cabinet to be connected with described upthrow cd-rom drive motor, be additionally provided with through hole, bottom surface is provided with square shaft bearing, for placing
The polishing disk axis of rotation;Described upper polishing disk axis of rotation upper end is by shaft coupling with described upthrow cd-rom drive motor outfan even
Connecing, lower end is connected with upper polishing disk by having the joint of flat recess;Described upper polishing disk axis of rotation lower end is provided with pin-and-hole, pin-and-hole
Inside being installed with latch, latch is positioned at the flat recess of joint;Described upper polishing disk sense of rotation and described lower polishing disk rotation direction
Unanimously.
Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: the diameter of described correction dish
Being the 8/15 of described lower polishing disk diameter, the thickness of described correction dish is the 1/10 of the diameter of described correction dish;Described correction dish
Spacing by described correction dish clamp, by the position of correction dish described in regulation correction dish clamp scalable;Described correction dish is in institute
Stating rotation under correction disk-drive motor, sense of rotation is consistent with described lower polishing disk direction.
Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: described workpiece ring clamp set
Having drivewheel, driven pulley and shield arm, drivewheel to drive motor to be connected with described workpiece ring, shield arm is provided with auxiliary wheel;Actively
Wheel, driven pulley and auxiliary wheel are tangent with described workpiece ring cylindrical, are uniformly distributed for 120 ° of described workpiece ring center, hold tightly described
Workpiece ring;Described workpiece ring clamp are provided with XY axis adjustment device, workpiece ring position described in scalable.
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CN201620301432.0U CN205703670U (en) | 2016-04-07 | 2016-04-07 | A kind of optical elements of large caliber Twp-sided polishing machine |
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CN201620301432.0U CN205703670U (en) | 2016-04-07 | 2016-04-07 | A kind of optical elements of large caliber Twp-sided polishing machine |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106312778A (en) * | 2016-04-07 | 2017-01-11 | 东莞市兰光光学科技有限公司 | Double-face polishing machine for large-caliber optical element |
CN106863109A (en) * | 2017-03-17 | 2017-06-20 | 衢州学院 | The plane lapping polishing machine and its method of a kind of work piece holder linear reciprocating motion |
CN109015356A (en) * | 2018-10-23 | 2018-12-18 | 昆山福步工业设备有限公司 | A kind of scroll wheel preventing vibration |
CN109397007A (en) * | 2018-10-26 | 2019-03-01 | 中国科学院上海光学精密机械研究所 | A kind of new and effective thermal field regulation polishing machine and its polishing method |
CN110153839A (en) * | 2019-06-06 | 2019-08-23 | 中国工程物理研究院激光聚变研究中心 | Unified polishing immersion element processing unit (plant), processing method and polishing machine |
CN110434681A (en) * | 2019-07-24 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | The two-sided high-precision polishing method of heavy caliber sapphire window element |
CN113118916A (en) * | 2021-03-17 | 2021-07-16 | 上海工程技术大学 | Workpiece ring driving equipment of large-scale ring polishing machine |
CN115139210A (en) * | 2022-08-02 | 2022-10-04 | 上海菲利华石创科技有限公司 | Synchronous polishing device for groove bottom surface and groove side surface of thick quartz plate groove for semiconductor |
CN115179111A (en) * | 2022-06-29 | 2022-10-14 | 大连理工大学 | Bath polishing method and device for deliquesced workpiece |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106312778A (en) * | 2016-04-07 | 2017-01-11 | 东莞市兰光光学科技有限公司 | Double-face polishing machine for large-caliber optical element |
CN106863109A (en) * | 2017-03-17 | 2017-06-20 | 衢州学院 | The plane lapping polishing machine and its method of a kind of work piece holder linear reciprocating motion |
CN109015356A (en) * | 2018-10-23 | 2018-12-18 | 昆山福步工业设备有限公司 | A kind of scroll wheel preventing vibration |
CN109397007A (en) * | 2018-10-26 | 2019-03-01 | 中国科学院上海光学精密机械研究所 | A kind of new and effective thermal field regulation polishing machine and its polishing method |
CN109397007B (en) * | 2018-10-26 | 2024-03-01 | 中国科学院上海光学精密机械研究所 | Novel efficient thermal field regulating and controlling polishing machine and polishing method thereof |
CN110153839B (en) * | 2019-06-06 | 2023-12-26 | 中国工程物理研究院激光聚变研究中心 | Full-caliber polishing immersed element processing device, processing method and polishing machine |
CN110153839A (en) * | 2019-06-06 | 2019-08-23 | 中国工程物理研究院激光聚变研究中心 | Unified polishing immersion element processing unit (plant), processing method and polishing machine |
CN110434681A (en) * | 2019-07-24 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | The two-sided high-precision polishing method of heavy caliber sapphire window element |
CN110434681B (en) * | 2019-07-24 | 2021-09-07 | 中国科学院上海光学精密机械研究所 | Double-side high-precision polishing method for large-caliber sapphire window element |
CN113118916A (en) * | 2021-03-17 | 2021-07-16 | 上海工程技术大学 | Workpiece ring driving equipment of large-scale ring polishing machine |
CN115179111B (en) * | 2022-06-29 | 2023-10-24 | 大连理工大学 | Bath polishing method and device for deliquescing workpiece |
CN115179111A (en) * | 2022-06-29 | 2022-10-14 | 大连理工大学 | Bath polishing method and device for deliquesced workpiece |
CN115139210A (en) * | 2022-08-02 | 2022-10-04 | 上海菲利华石创科技有限公司 | Synchronous polishing device for groove bottom surface and groove side surface of thick quartz plate groove for semiconductor |
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Granted publication date: 20161123 Termination date: 20210407 |