CN110429466A - A kind of high-power semiconductor laser real-time detecting system - Google Patents
A kind of high-power semiconductor laser real-time detecting system Download PDFInfo
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- CN110429466A CN110429466A CN201910546665.5A CN201910546665A CN110429466A CN 110429466 A CN110429466 A CN 110429466A CN 201910546665 A CN201910546665 A CN 201910546665A CN 110429466 A CN110429466 A CN 110429466A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2632—Circuits therefor for testing diodes
- G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
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Abstract
The invention discloses a kind of high-power semiconductor laser real-time detecting systems, including generating device of laser, transmission fiber, beam splitter and laser output power detection circuit；Laser separates incoming laser output power detection circuit by beam splitter；Laser output power detection circuit includes photoelectric converter, signal amplifier, processor and temperature sensing circuit；The Output optical power of laser is converted to electric current proportional thereto by photoelectric converter, is reconverted into the voltage signal directly proportional to output average light power, and the intensity of optical signal is adjusted by signal amplifier, improves the interference free performance of feedback system；Signal is simultaneously fed back to processor by the cavity temperature of the generating device of laser of temperature sensing circuit monitoring simultaneously, obtains corrected realtime power value by genetic algorithm；By the above-mentioned means, the present invention can be realized the real-time detection value to high-power semiconductor laser reality output laser power, support information is provided for subsequent power control.
Description
Technical field
The present invention relates to field of semiconductor lasers, more particularly to a kind of high-power semiconductor laser real-time detection system
System.
Background technique
Currently, semiconductor laser has in national defence, scientific research, communication, processing and other fields flies application extensively, especially swashing
Photocoagulation or cutting application direction, need laser provide a continuous-stable high power laser to lathe carry out welding or
Cutting, the size and stability of semiconductor laser output power directly affect system performance, therefore cope with semiconductor laser
Device power carries out high-precision control.
Since the energy of laser is provided by electric energy, it is possible to the fluctuation of power is made up by control power supply,
When carrying out material welding, it is desirable that control circuit accurately can obtain and calculate the realtime power of laser at a high speed, using logical
It crosses and changes supply-injected electric current, waveform required for meeting laser energy；Semiconductor laser power detecting system is general
Temperature sensor is used as using thermistor, thermal resistance, integrated temperature sensor etc., using pid algorithm or increasingly complex control
Algorithm processed controls power, using semiconductor refrigeration chip as actuator, flows through semiconductor refrigeration chip by changing
The control to laser temperature is realized in the size of electric current and direction；But in current temperature control system, temperature sensor measurement
Be the heat sink temperature being in contact with laser luminescence chip, by the loss that heat occurs during conduction,
So that temperature that temperature sensor detects and laser actual temperature is had certain deviation, it is difficult to realize temperature control precision into
One step improves.
Semiconductor laser is the luminescent device driven by electric current, only when bias current value is greater than threshold current, is partly led
Body laser can just shine；In an ideal case, the P-I relationship of semiconductor laser is that linearity curve is paid particular attention to
It is that the threshold current and luminous efficiency of semiconductor laser can be with temperature and lifetime change；The threshold current of semiconductor laser
It significantly increases as the temperature rises, luminous efficiency can reduce as the temperature rises, semiconductor laser threshold current
With the drift of luminous efficiency, very big inconvenience is brought to its application, the variation of temperature inherently causes the P-I characteristic of laser diode
Curve nonlinear distortion is unfavorable for the modulation to laser diode, and only regulation laser is under constant operating temperature, ability
Guarantee the stable work of laser diode；In order to overcome these disadvantages, it is necessary to high speed accurately monitoring is carried out to output power,
The work that laser can be maintained steady in a long-term.
Summary of the invention
In order to overcome the shortcomings of existing high-power semiconductor laser power detecting system, the present invention provides a kind of high power
Semiconductor laser real-time detecting system can reduce error caused by laser works heat up, improve the response of detection system
Speed and sensitivity.
The technical solution adopted by the present invention is that:
A kind of high-power semiconductor laser real-time detecting system, including generating device of laser, transmission fiber, beam splitter and laser
Ouput power detection circuit.
Generating device of laser: for emitting high power laser light.
Beam splitter: it is provided in the optical path that the laser that generating device of laser is issued passes through at 45 ° with incident laser
Transmit eyeglass, the transmission eyeglass be it is low with absorptivity, the high GaAs of pyroconductivity is as substrate material, the film that lays thereon
Material has minimum absorpting and scattering, and suitable refractive index in 800-1100nm, for high power laser to be divided
For the reflection laser and transmission laser transmitted along different directions, 99.9% high power laser injects transmission fiber through beam splitter,
0.1% laser is separated, and is applied to power monitoring；
The method for obtaining the reflection laser setting value are as follows: the output power setting value of the generating device of laser × transflection
The reflectivity of mirror.
The laser output power detection circuit includes photoelectric converter, signal amplifier and processor；Laser is exported
Power-sensing circuit is set as the receiving end of the reflection laser, for obtaining the power of reflection laser.
Photoelectric converter is for receiving optical signal, reduction transmission data, and photoelectric converter has good temperature, aging and steady
Determine transfer characteristic, the Output optical power of laser is converted into electric current proportional thereto using photoelectric converter, is reconverted into
The voltage signal directly proportional to output average light power；The voltage signal generates control voltage after amplifier, and control is partly led
The bias current of body laser driving circuit.
Signal amplifier is for the intensity for adjusting optical signal, the output end company of input terminal and the photoelectric converter
It connects, the voltage signal for exporting photoelectric converter carries out shaping amplification, to improve the interference free performance of feedback system.
Present invention improves over existing photoelectric receiving arrangement, by beam splitter isolate 0.1% laser and carry out power inspection
It surveys, combines the temperature of real-time detection, power algorithm is modified, therefore the present invention being capable of real-time monitoring semiconductor laser
Launched power, compensate for calculating error caused by the influence due to temperature to slope, reduce the noise proportional of amplifier,
Improve the accuracy and speed of laser power detection.
The laser output power detection circuit further includes temperature sensing circuit connected to the processor, sharp for monitoring
Optical generator cavity temperature, feedback signal is to ouput power detection circuit, it is ensured that the accuracy of power detection.
Transmission fiber: the transmission for high power laser.
Same laser is under different input currents, different temperatures, the time needed for pump light signals reach stable state
It is not identical；Especially when the temperature difference is larger, difference is become apparent, or even the control module of operational excellence under cryogenic,
Excessively delay, the concussion even overshoot excess phenomenon of adjustment process appearance under the high temperature conditions, that is, pump laser are defeated
Enter the case where electric current is far more than given value, laser caused by the excessive input current of pump laser can not rapidly enter stabilization
The case where state, will seriously affect the normal operation of rear end equipment, shorten rear end equipment service life even it is badly damaged after
End equipment.
In the power detection of laser, ratio control is simplest control mode, and the output and input of controller miss
Poor model is proportional relationship, but only with ratio control can make system export in there are steady-state errors；By using differential control
System, the differential of the output and input signal that make controller is proportional, predicts the trend of error change, makes the work for inhibiting error
Shifted to an earlier date with variation, that is to say, that when error is close to 0, inhibiting the effect of error is just 0, has proportional+integral+differential
(PID) controller of function, the control action that can regulate and control error in advance are equal to 0, even negative value, avoid the super of regulated and controled variable
It adjusts, suitable for improving there is larger inertia or hysteretic properties to obtain controlled device and obtain dynamic characteristic.
For the size of real-time monitoring system output average light power, the analog signal exported by photoelectric detecting system,
It needs to be converted into digital quantity by A/D converter part, and compared with the digital quantity of controller inner setting carries out processing, come
Adjust pulse optical fiber output power value.
Laser beam is deflected to photosensitive sensor, laser energy can be converted into electric signal, controller is by the signal and in advance
If laser power value compares, ratio+differential+integral (PID) control is made, laser is adjusted by control power driving circuit
Beam driving current.
The present invention realizes closed loop feedback control, ensure that the real-time controllable of laser output power, using photoelectric conversion
Diode, sample rate reach ms grades, realize the control for high-power semiconductor laser power well, realize function
The linear corresponding relation of rate and electric signal.
The present invention is directed to high power laser real work situation, obtains optical power and temperature number from laser cavity inside
According to real-time in the process in laser working process to acquire optical power and temperature data；In conjunction with intelligent prediction algorithms process logarithm
According to being handled, which can predict laser power actual value according to temperature data, thus real-time judge laser power
The gap of setting value and laser power actual value, and then process state is monitored, export the pre- of present laser power
Measured value.
The genetic algorithm that the processor executes comprises the following steps that
Carry out three parameters of optimal controller using genetic algorithm, steps are as follows for specific calculating: (1) estimating three parameters
Variation range is encoded with 8 binary numbers；Power/the temperature data that will acquire is divided into two groups, and one group is initial kind
Group, another group is validation group, for verifying the prediction effect of model；
(2) it is according to sorting algorithm model, expression formula is established using set
(3) set algorithm parameter combination and optimizing strategy carry out validation group data using the algorithm model established in step (2)
Prediction, and the prediction effect of evaluation model；
(4) population is decoded, obtains corresponding PID control parameter, is used to calculating target function value and fitness function；
(5) to all parameter combinations, repeat the operation of step (3) and iteration；
(6) population replicated, intersected and mutation operation, obtain next-generation population；
(7) it is combined according to algorithm operation iteration in step (5) as a result, seeking the algorithm parameter that behaves oneself best on verifying collection,
Select the model of parameter combination foundation；
(8) algorithm model selected in step (7) is applied to the power/temperature data acquired in real time, reached to laser power
Carry out the purpose of real-time monitoring.
The beneficial effects of the present invention are:
1) present invention is realized by photoelectric conversion device and genetic algorithm to high-power semiconductor laser reality output laser
The real-time detection of power provides support information for subsequent power control.
2) present invention solves what laser power under different temperatures acquired by the compensation of power detection feedback and integrated temperature
Deviation.
3) present invention significantly improves laser output stability and laser power control precision, effectively increases power detection
Accuracy, hence it is evident that improve laser processing quality.
Detailed description of the invention
Fig. 1 is system construction drawing provided by the invention；
Fig. 2 is the structural block diagram of control device provided by the invention；
Fig. 3 is the flow diagram of control algolithm provided by the invention；
The components in the drawings are labeled as follows: 1, generating device of laser；2, transmission fiber；3, beam splitter；4, laser output power
Detection circuit；5, photoelectric converter；6, signal amplifier；7, processor；8, temperature sensing circuit.
Specific embodiment
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawing, so that advantages and features of the invention energy
It is easier to be readily appreciated by one skilled in the art, so as to make a clearer definition of the protection scope of the present invention.
Fig. 1, Fig. 2 and Fig. 3 are please referred to, the embodiment of the present invention includes:
A kind of high-power semiconductor laser real-time detecting system, including generating device of laser 1, transmission fiber 2,3 and of beam splitter
Laser output power detection circuit 4.
Generating device of laser 1: for emitting high power laser light.
Beam splitter 3: it is provided in the optical path that the laser that generating device of laser 1 is issued passes through at 45 ° with incident laser
Transmission eyeglass, the transmission eyeglass be it is low with absorptivity, for the high GaAs of pyroconductivity as substrate material, that lays thereon is thin
Membrane material has minimum absorpting and scattering, and suitable refractive index in 800-1100nm, for dividing high power laser
Light is the reflection laser transmitted along different directions and transmission laser, and 99.9% high power laser is through beam splitter injection transmission light
Fibre, 0.1% laser are separated, and are applied to power monitoring；
The method for obtaining the reflection laser setting value are as follows: the output power setting value of the generating device of laser 1 × described point
The reflectivity of beam device 3.
The laser output power detection circuit 4 includes photoelectric converter 5, signal amplifier 6 and processor 7；By laser
Ouput power detection circuit 4 is set as the receiving end of the reflection laser, for obtaining the power of reflection laser.
Photoelectric converter 5 is for receiving optical signal, reduction transmission data, photoelectric converter 5 have good temperature, aging and
Stablize transfer characteristic, the Output optical power of laser is converted into electric current proportional thereto, reconvert using photoelectric converter 5
For the voltage signal directly proportional to output average light power, which generates control voltage, control half after amplifier
The bias current of conductor laser driving circuit.
Signal amplifier 6 is for the intensity for adjusting optical signal, the output end of input terminal and the photoelectric converter 5
Connection, the voltage signal for exporting photoelectric converter 5 carries out shaping amplification, to improve the interference free performance of feedback system.
Present invention improves over existing photoelectric receiving arrangement, by beam splitter isolate 0.1% laser and carry out power inspection
It surveys, combines the temperature of real-time detection, power algorithm is modified, therefore the present invention being capable of real-time monitoring semiconductor laser
Launched power, compensate for calculating error caused by the influence due to temperature to slope, reduce the noise of signal amplifier 6
Ratio improves the accuracy and speed of laser power detection.
The laser output power detection circuit 5 further includes temperature sensing circuit 8 connected to the processor, for monitoring
The cavity temperature of generating device of laser 1, feedback signal is to ouput power detection circuit 4, it is ensured that the accuracy of power detection.
Transmission fiber 2: the transmission for high power laser.
Same laser is under different input currents, different temperatures, the time needed for pump light signals reach stable state
It is not identical；Especially when the temperature difference is larger, difference is become apparent, or even the control module of operational excellence under cryogenic,
Excessively delay, the concussion even overshoot excess phenomenon of adjustment process appearance under the high temperature conditions, that is, pump laser are defeated
Enter the case where electric current is far more than given value, laser caused by the excessive input current of pump laser can not rapidly enter stabilization
The case where state, will seriously affect the normal operation of rear end equipment, shorten rear end equipment service life even it is badly damaged after
End equipment.
The present invention realizes closed loop feedback control, ensure that the real-time controllable of laser output power, using photoelectric conversion
Diode, sample rate reach ms grades, realize the control for high-power semiconductor laser power well, realize function
The linear corresponding relation of rate and electric signal.
The present invention is directed to high power laser real work situation, obtains optical power and temperature number from laser cavity inside
According to real-time in the process in laser working process to acquire optical power and temperature data；In conjunction with intelligent prediction algorithms process logarithm
According to being handled, which can predict laser power actual value according to temperature data, thus real-time judge laser power
The gap of setting value and laser power actual value, and then process state is monitored, export the pre- of present laser power
Measured value.
The genetic algorithm that the processor 7 executes comprises the following steps that
Carry out three parameters of optimal controller using genetic algorithm, steps are as follows for specific calculating: (1) estimating three parameters
Variation range is encoded with 8 binary numbers；Power/the temperature data that will acquire is divided into two groups, and one group is initial kind
Group, another group is validation group, for verifying the prediction effect of model；
(2) using set according to establishing sorting algorithm model, expression formula are as follows:
(3) set algorithm parameter combination and optimizing strategy carry out validation group data using the algorithm model established in step (2)
Prediction, and the prediction effect of evaluation model；
(4) population is decoded, obtains corresponding PID control parameter, is used to calculating target function value and fitness function；
(5) to all parameter combinations, repeat the operation of step (3) and iteration；
(6) population replicated, intersected and mutation operation, obtain next-generation population；
(7) it is combined according to algorithm operation iteration in step (5) as a result, seeking the algorithm parameter that behaves oneself best on verifying collection,
Select the model of parameter combination foundation；
(8) algorithm model selected in step (7) is applied to the power/temperature data acquired in real time, reached to laser power
Carry out the purpose of real-time monitoring.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (4)
1. a kind of high-power semiconductor laser real-time detecting system, which is characterized in that including generating device of laser, transmission light
Fine, beam splitter and laser output power detection circuit；Generating device of laser is for emitting high power laser light；Transmission fiber is for big
The transmission of power laser；Beam splitter be set as in the optical path that the laser that generating device of laser 1 issued passes through with incident laser at
45 ° of transmission eyeglass, reflection laser and transmission laser for transmitting high power laser light splitting along different directions, exhausted big portion
The laser light beam splitter divided, minimal amount of laser are separated, and are applied to power monitoring；Laser output power detection circuit packet
Include photoelectric converter, signal amplifier and processor；Connecing for the reflection laser is set by laser output power detection circuit
Receiving end, for obtaining the power of reflection laser；Photoelectric converter is converted to the Output optical power of laser proportional thereto
Electric current is reconverted into the voltage signal directly proportional to output average light power；Signal amplifier is used for for adjusting optical signal
Intensity, input terminal are connect with the output end of the photoelectric converter, and the voltage signal for exporting photoelectric converter carries out
Shaping amplification, to improve the interference free performance of feedback system；The laser output power detection circuit further includes and processor
The temperature sensing circuit of connection, for monitoring the cavity temperature of generating device of laser, feedback signal is to ouput power detection circuit.
2. a kind of high-power semiconductor laser real-time detecting system according to claim 1, it is characterised in that:
The reflection laser setting value is output power setting value × beam splitter reflectivity of the generating device of laser.
3. a kind of high-power semiconductor laser real-time detecting system according to claim 1, it is characterised in that:
The transmission eyeglass be it is low with absorptivity, the high GaAs of pyroconductivity is as substrate material, the thin-film material that lays thereon
There is minimum absorpting and scattering, and suitable refractive index in 800-1100nm, it can be anti-by the 0.1% of the incident laser
It is incident upon photoelectric converter.
4. a kind of high-power semiconductor laser real-time detecting system according to claim 1, it is characterised in that:
The genetic algorithm that the processor executes comprises the following steps that (1) estimates the variation range of three parameters, with the two of 8
System number is encoded；Power/the temperature data that will acquire is divided into two groups, and one group is initial population, and another group is validation group, uses
To verify the prediction effect of model；
(2) it is according to sorting algorithm model, expression formula is established using set
(3) set algorithm parameter combination and optimizing strategy carry out validation group data using the algorithm model established in step (2)
Prediction, and the prediction effect of evaluation model；
(4) population is decoded, obtains corresponding PID control parameter, is used to calculating target function value and fitness function；
(5) above-mentioned parameter is combined, repeats the operation of step (3) and iteration；
(6) population replicated, intersected and mutation operation, obtain next-generation population；
(7) it is combined according to algorithm operation iteration in step (5) as a result, seeking the algorithm parameter that behaves oneself best on verifying collection,
Select the model of parameter combination foundation；
(8) algorithm model selected in step (7) is applied to the power/temperature data acquired in real time, reached to laser power
Carry out the purpose of real-time monitoring.
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