CN110412758A - A kind of imaging detection device based on Spectral Confocal - Google Patents
A kind of imaging detection device based on Spectral Confocal Download PDFInfo
- Publication number
- CN110412758A CN110412758A CN201910743320.9A CN201910743320A CN110412758A CN 110412758 A CN110412758 A CN 110412758A CN 201910743320 A CN201910743320 A CN 201910743320A CN 110412758 A CN110412758 A CN 110412758A
- Authority
- CN
- China
- Prior art keywords
- color separation
- prism
- image
- light beam
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 30
- 238000001514 detection method Methods 0.000 title claims abstract description 28
- 230000003595 spectral effect Effects 0.000 title claims abstract description 20
- 238000000926 separation method Methods 0.000 claims abstract description 39
- 230000003287 optical effect Effects 0.000 claims abstract description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000005286 illumination Methods 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010226 confocal imaging Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000003086 colorant Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/008—Details of detection or image processing, including general computer control
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Multimedia (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of imaging detection devices based on Spectral Confocal, including light fixture, image-forming assembly, color separation component and multiple images detector, light fixture transmitting has the light beam of different wave length, the light beam of different wave length is radiated at different location of the testee in one section of depth distance of optical axis respectively, and the light beam of different wave length enters color separation component after assembling after testee different depth surface reflection by image-forming assembly；Imaging beam after convergence is divided into multiple light beams of different wave length by color separation component, and the light beam of each wavelength is focused on its corresponding image detector and is imaged.Imaging detection device of the present invention solves the problems, such as that existing image checking intermediate-resolution is mutually restricted with depth of focus, realizes the high-acruracy survey that the big depth of field can be also obtained under object lens high-resolution.
Description
Technical field
The present invention relates to a kind of imaging detection devices based on Spectral Confocal, belong to imaging measurement technology field.
Background technique
Imaging measurement technology is widely used in industrial detection, such as the widely used micro- inspection in semiconductor detection
It surveys.Currently, the resolution ratio and the depth of field of micro- detection are mainly determined by object lens.λ/2 depth of field DOF=(NA) of general object lens2, wherein
λ is wavelength, and NA is the numerical aperture of object lens；NA is bigger, then resolving power of lens is higher, but depth of field DOF is with regard to smaller, detection resolution
It is mutually restricted with the depth of field.Therefore, when being detected using big NA object lens, field depth is limited, detects the biggish object of depth, generally
It needs to move object lens along optical axis direction or measured object is scanned.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of imaging detection device based on Spectral Confocal, imaging inspections
Surveying device can be realized in the case where object lens NA is certain, by Spectral Confocal technology, by the detection depth of field of object lens improve 3 times with
On.
In order to solve the above technical problems, the technical scheme adopted by the invention is as follows:
A kind of imaging detection device based on Spectral Confocal, including light fixture, image-forming assembly, color separation component and multiple figures
As detector, light fixture transmitting has the light beam of different wave length, and the light beam of different wave length is radiated at testee along light respectively
The light beam of different location in one section of depth distance of axis, different wave length passes through imaging after testee different depth surface reflection
Component enters color separation component after assembling；Imaging beam after convergence is divided into multiple light beams of different wave length by color separation component, each
The light beam of wavelength is focused on its corresponding image detector and is imaged.
Wherein, each image detector passes through cable respectively and connect with host computer, and the image on each image detector is adopted
What is collected is the clear image at testee different location, and host computer is extracted in each image by image fusion technology
The region of image clearly is fused into an image, so that apparatus of the present invention can be realized obtains big scape under object lens high-resolution
The clear image of testee in deep range.
Wherein, the light fixture includes light source and focus lamp, the light beam with different wave length that focus lamp emits light source
It assembles and enters image-forming assembly；Light source is LED white light source or optical fiber white light light source.
Wherein, the image-forming assembly includes object lens, spectroscope and cylinder mirror；Spectroscope is semi-transparent semi-reflecting lens, and spectroscope is by one
Portions incident illuminating bundle is turned back, into object lens after illumination on testee, object lens by the light beam of different wave length be focused at by
Object is surveyed along the different location in one section of depth distance of optical axis；Enter object in the light beam of testee different depth surface reflection
Mirror is converged to imaging beam, and imaging beam enters color separation component after assembling after spectroscope transmits using cylinder mirror.
Wherein, the color separation component is made of multiple colour splitting prisms or color separation component is made of two color separation plane mirrors.
Wherein, when color separation component is made of multiple colour splitting prisms, multiple colour splitting prisms include prism a, prism b and four
Prism c；The cemented surface center of prism a and prism b is air-gap, which is coated with the high pass filter coating of reflection blue light
(piece)；The cemented surface of prism b and four prism c do not have the air gap, which is coated with the low pass filter coating of reflection feux rouges
(piece).
Wherein, when color separation component is made of two color separation plane mirrors, the angle of two color separation plane mirror elongated central lines
It is 90 degree.
The utility model has the advantages that imaging detection device of the present invention solves what existing image checking intermediate-resolution was mutually restricted with depth of focus
Problem realizes the high-acruracy survey that the big depth of field can be also obtained under object lens high-resolution, using apparatus of the present invention in detection depth
When biggish object, without moving object lens along optical axis direction or being scanned to testee, testee can be also obtained
Clear image, imaging detection device of the present invention is realized in the case where object lens NA is certain, by Spectral Confocal technology, by object lens
The detection depth of field improve 3 times or more.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the embodiment 1 using the Spectral Confocal imaging detection device of Amici prism；
Fig. 2 is structural schematic diagram of the embodiment 2 using the Spectral Confocal imaging detection device of color separation plane mirror；
Fig. 3 is a kind of schematic diagram of the Spectral Confocal imaging detection device of back lighting；
Fig. 4 is a kind of schematic diagram of the Spectral Confocal imaging detection device of dark-ground illumination.
Specific embodiment
According to following embodiments, the present invention may be better understood.However, as it will be easily appreciated by one skilled in the art that real
It applies content described in example and is merely to illustrate the present invention, without sheet described in detail in claims should will not be limited
Invention.
Embodiment 1
As shown in Figure 1, the present invention is based on the imaging detection device of Spectral Confocal, including light fixture 17, image-forming assembly 18,
Color separation component 10 and multiple images detector (the present embodiment is three image detectors 12,13,14), light fixture 17 is by light source
1 and condenser 2 form, light source 1 can be LED light source or optical fiber source, and light source 1 is issued from blue wavelength to red wavelength range
Different wave length white light beam, the aggregation of white light beam that light source 1 issues is incident on image-forming assembly 18 by condenser 2.
Image-forming assembly 18 is made of object lens 3, spectroscope 4 and cylinder mirror 5, and the light beam that light fixture 17 is emitted is anti-through spectroscope 4
It penetrates and is transmitted with object lens 3, final illumination is on testee 7；The light beam of different wave length can be focused at respectively measured object by object lens 3
On the different location of body 7, therefore testee 7 can be by the beam lighting of different wave length along one section of depth distance of optical axis；Light
Beam reenters image-forming assembly 18 through the reflection of 7 different location of testee again, and by object lens 3, spectroscope 4, cylinder mirror 5 is transmitted, will
Testee 7 is imaged in color separation component 10.The angle of spectroscope 4 and horizontal plane is 45 °.
Color separation component 10 is made of multiple colour splitting prisms 11, and imaging beam is divided into RGB three-beam by colour splitting prism 11, blue
Light, green light and feux rouges；Being focused at image detector 12 is blue light, and being focused at image detector 13 is feux rouges, is focused at figure
As detector 14 is green light.Colour splitting prism 11 is made of prism a, prism b and four prism c；Prism a and prism b
Cemented surface center be air-gap, the cemented surface be coated with reflection blue light high pass filter coating；The gluing of prism b and four prism c
Face does not have the air gap, the low pass filter coating of cemented surface plating reflection feux rouges；The white light beam that image-forming assembly 18 is emitted enters three
Prism a reflects blue light in the cemented surface of prism a and prism b, transmits red-green glow；It is complete that the blue light of reflection passes through prism a again
Reflection turns back post-concentration on image detector 12；Transmission red-green glow beam enters prism b, glued in prism b and four prism c
Feux rouges is reflected at face, transmits green light；The feux rouges of reflection passes through prism b total reflection again and turns back post-concentration in image detector 13
On；The green light of transmission enters four prism c post-concentrations on image detector 14.
Three image detectors of the present invention are connect by cable with host computer, and three image detectors collect three kinds respectively
The image of different colours, due to three kinds of colors light beam at testee 7 focusing position it is different, three width Image Acquisition arrive
Be clear image at 7 different location of testee.Host computer extracts this three width by existing image co-registration processing technique
The region of image clearly in image is fused into an image, obtains under object lens high-resolution so that apparatus of the present invention can be realized
The clear image of testee in big field depth.
Embodiment 2
The light fixture 17 of embodiment 2 is consistent with embodiment 1 with image-forming assembly 18, and color separation component 10 is different, such as Fig. 2 institute
Show, color separation component 10 is made of two color separation plane mirrors 21,22, and two color separation plane mirrors 21,22 place (i.e. two in 90 degree of angles
The angle of a 21,22 elongated central line of color separation plane mirror is 90 degree)；The blue light of imaging beam is after the reflection of color separation plane mirror 21
Be focused on image detector 23, transmitted through color separation plane mirror 21 light beam again after color separation plane mirror 22, reflection to red light, green light
Transmission, be focused on image detector 24 and 25 respectively (reflection to red light post-concentration on image detector 24, meeting after green light transmission
Gather on image detector 25).
Embodiment 3
The image-forming assembly 18 of embodiment 3 is consistent with embodiment 1 with color separation component 10, and light fixture 17 is different, such as Fig. 3 institute
Show, the light fixture (light source) of embodiment 3 is the backlight 31 for emitting different wave length, and backlight 31 is from soffit lighting testee
7。
Embodiment 4
The image-forming assembly 18 of embodiment 4 is consistent with embodiment 1 with color separation component 10, and light fixture is different, as shown in figure 4,
The light fixture (light source) of embodiment 4 is the annular light source 41 for emitting different wave length, is located at 7 top of testee, annular light source
41 can be from side illumination testee 7.
Claims (7)
1. a kind of imaging detection device based on Spectral Confocal, it is characterised in that: including light fixture, image-forming assembly, color separation group
Part and multiple images detector, light fixture transmitting have different wave length light beam, the light beam of different wave length be radiated at respectively by
Different location of the object in one section of depth distance of optical axis is surveyed, the light beam of different wave length is in testee different depth surface reflection
Enter color separation component after assembling afterwards by image-forming assembly；Imaging beam after convergence is divided into the multiple of different wave length by color separation component
Light beam, the light beam of each wavelength are focused on its corresponding image detector and are imaged.
2. the imaging detection device according to claim 1 based on Spectral Confocal, it is characterised in that: each image detector
It is connect respectively by cable with host computer.
3. the imaging detection device according to claim 1 based on Spectral Confocal, it is characterised in that: the light fixture packet
Light source and focus lamp are included, the light beam with different wave length that focus lamp emits light source, which is assembled, enters image-forming assembly；Light source is that LED is white
Radiant or optical fiber white light light source.
4. the imaging detection device according to claim 1 based on Spectral Confocal, it is characterised in that: the image-forming assembly packet
Include object lens, spectroscope and cylinder mirror；Spectroscope is semi-transparent semi-reflecting lens, and spectroscope turns back a part of incident illumination beam, into object
On testee, the light beam of different wave length is focused at testee along one section of depth distance of optical axis by object lens respectively for illumination after mirror
On interior different location；Enter object lens in the light beam of testee different depth surface reflection and is converged to imaging beam, imaging
Beam enters color separation component after assembling after spectroscope transmits using cylinder mirror.
5. the imaging detection device according to claim 1 based on Spectral Confocal, it is characterised in that: the color separation component by
Multiple colour splitting prism compositions or color separation component are made of two color separation plane mirrors.
6. the imaging detection device according to claim 5 based on Spectral Confocal, it is characterised in that: color separation component is by multiple
When colour splitting prism forms, multiple colour splitting prisms include prism a, prism b and four prism c；The glue of prism a and prism b
Conjunction face center is air-gap, which is coated with the high pass filter coating of reflection blue light；The cemented surface of prism b and four prism c without
The air gap, the cemented surface are coated with the low pass filter coating of reflection feux rouges.
7. the imaging detection device according to claim 5 based on Spectral Confocal, it is characterised in that: when color separation component is by two
When a color separation plane mirror forms, the angle of two color separation plane mirror elongated central lines is 90 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910743320.9A CN110412758A (en) | 2019-08-13 | 2019-08-13 | A kind of imaging detection device based on Spectral Confocal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910743320.9A CN110412758A (en) | 2019-08-13 | 2019-08-13 | A kind of imaging detection device based on Spectral Confocal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110412758A true CN110412758A (en) | 2019-11-05 |
Family
ID=68367375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910743320.9A Pending CN110412758A (en) | 2019-08-13 | 2019-08-13 | A kind of imaging detection device based on Spectral Confocal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110412758A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021248398A1 (en) * | 2020-06-11 | 2021-12-16 | 东莞市神州视觉科技有限公司 | Spectral confocal measurement device and measurement method |
| CN113865709A (en) * | 2021-08-16 | 2021-12-31 | 杭州博联智能科技股份有限公司 | Intelligent lamp color testing device and method based on prism color separation |
| CN114166843A (en) * | 2021-11-23 | 2022-03-11 | 长园运泰利视觉科技(珠海)有限公司 | Camera system and imaging method thereof |
| CN114441495A (en) * | 2022-02-13 | 2022-05-06 | 中国科学院长春光学精密机械与物理研究所 | Multicolor fluorescence microscopic imaging system |
| WO2022160444A1 (en) * | 2021-01-28 | 2022-08-04 | 公安部物证鉴定中心 | Optical lens used for spectral imaging |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010007498A1 (en) * | 2000-01-12 | 2001-07-12 | Masatoshi Arai | Semiconductor wafer inspection machine |
| US20120050877A1 (en) * | 2010-08-24 | 2012-03-01 | Fujifilm Corporation | Color separating optical system |
| KR101242929B1 (en) * | 2011-09-23 | 2013-03-12 | 포항공과대학교 산학협력단 | Muti-spectral camera system |
| CN110308152A (en) * | 2019-07-26 | 2019-10-08 | 上海御微半导体技术有限公司 | A kind of optical detection apparatus and optical detecting method |
| CN210323556U (en) * | 2019-08-13 | 2020-04-14 | 茂莱（南京）仪器有限公司 | Imaging detection device based on spectrum confocal |
-
2019
- 2019-08-13 CN CN201910743320.9A patent/CN110412758A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010007498A1 (en) * | 2000-01-12 | 2001-07-12 | Masatoshi Arai | Semiconductor wafer inspection machine |
| US20120050877A1 (en) * | 2010-08-24 | 2012-03-01 | Fujifilm Corporation | Color separating optical system |
| KR101242929B1 (en) * | 2011-09-23 | 2013-03-12 | 포항공과대학교 산학협력단 | Muti-spectral camera system |
| CN110308152A (en) * | 2019-07-26 | 2019-10-08 | 上海御微半导体技术有限公司 | A kind of optical detection apparatus and optical detecting method |
| CN210323556U (en) * | 2019-08-13 | 2020-04-14 | 茂莱（南京）仪器有限公司 | Imaging detection device based on spectrum confocal |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021248398A1 (en) * | 2020-06-11 | 2021-12-16 | 东莞市神州视觉科技有限公司 | Spectral confocal measurement device and measurement method |
| US12085501B2 (en) | 2020-06-11 | 2024-09-10 | Aleader Vision Technology Co., Ltd. | Spectral confocal measurement device and measurement method thereof |
| WO2022160444A1 (en) * | 2021-01-28 | 2022-08-04 | 公安部物证鉴定中心 | Optical lens used for spectral imaging |
| CN113865709A (en) * | 2021-08-16 | 2021-12-31 | 杭州博联智能科技股份有限公司 | Intelligent lamp color testing device and method based on prism color separation |
| CN114166843A (en) * | 2021-11-23 | 2022-03-11 | 长园运泰利视觉科技(珠海)有限公司 | Camera system and imaging method thereof |
| CN114441495A (en) * | 2022-02-13 | 2022-05-06 | 中国科学院长春光学精密机械与物理研究所 | Multicolor fluorescence microscopic imaging system |
| CN114441495B (en) * | 2022-02-13 | 2024-03-22 | 中国科学院长春光学精密机械与物理研究所 | Multicolor fluorescence microscopic imaging system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110412758A (en) | A kind of imaging detection device based on Spectral Confocal | |
| CN106471332B (en) | Multi-wavelength confocal measuring device | |
| CN106441571B (en) | A kind of light source module and the line scanning multi-optical spectrum imaging system using it | |
| CN103969658B (en) | Close-range photogrammetry color three dimension scanning laser radar | |
| CN110260799A (en) | A kind of Spectral Confocal displacement sensor | |
| CN108344695A (en) | Reflective multi-wavelength line scans confocal imaging system | |
| CN110031099A (en) | Calibrating installation and method for multi-optical spectrum imaging system optical channel collimation | |
| CN111413070A (en) | Brightness detection device and detection method thereof | |
| CN110823126A (en) | Measuring device and method for measuring optical distance of target plane of component | |
| US9261352B2 (en) | Chromatic converter for altimetry | |
| CN103196552B (en) | Measuring device for light intensity of narrow-light-beam light-emitting diode (LED) lamp | |
| TW201741617A (en) | Device for measuring three-dimensional shape using multi-wavelength optical scanning interferometer | |
| CN115574740A (en) | Multifunctional optical autocollimator | |
| CN212963235U (en) | Detection device | |
| JPWO2020096794A5 (en) | ||
| CN103698006A (en) | 45-degree annular illumination device used for on-line light splitting color photometer | |
| CN108955549A (en) | A kind of two-sided measuring thickness device of translucent material | |
| CN210323556U (en) | Imaging detection device based on spectrum confocal | |
| CN208187948U (en) | Reflective multi-wavelength line scans confocal imaging system | |
| CN103905119A (en) | Visible light communication receiving device | |
| CN105651733B (en) | Material scattering characteristic measuring device and method | |
| CN203274910U (en) | Measuring device for light intensity of narrow-light-beam LED lamp | |
| CN205718836U (en) | Two-dimensional position optical measurement system based on parallel splicing of multi-linear-array CCD | |
| CN105698684B (en) | Two-dimensional position optical measurement system based on parallel splicing of multi-linear-array CCD | |
| CN208537026U (en) | A kind of spectral radiance meter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |