CN110411613A - Air guide washer and its manufacturing method - Google Patents
Air guide washer and its manufacturing method Download PDFInfo
- Publication number
- CN110411613A CN110411613A CN201910833186.1A CN201910833186A CN110411613A CN 110411613 A CN110411613 A CN 110411613A CN 201910833186 A CN201910833186 A CN 201910833186A CN 110411613 A CN110411613 A CN 110411613A
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- China
- Prior art keywords
- air guide
- washer
- guide groove
- washer body
- face
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 230000005518 electrochemistry Effects 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 3
- 238000006056 electrooxidation reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
The present invention provides a kind of air guide washer and its manufacturing method, belongs to the equipment technical field for being exclusively used in manufacture sensor, wherein air guide washer is ring structure, comprising: washer body is ring structure, has upper and lower two basic change face；Air guide groove is arranged at least one described faying face of the washer body, and the air guide groove is connected to inside and outside the washer body；Air guide washer of the invention, when in use, it will be connected to inside and outside washer body by air guide groove, under the premise of not changing washer body original thickness, make the air of washer body inner ring when vacuumizing, can discharge rapidly and efficiently so that gas be avoided to be trapped in the inside of ring washer improve exhaust efficiency and exhaust effect of the sensor when ultrahigh vacuum is vented.
Description
Technical field
The present invention relates to the equipment technical fields for being exclusively used in manufacture sensor, and in particular to a kind of air guide washer and its manufacture
Method.
Background technique
Pressure difference sensor is made of top electrode, insulator and lower electrode etc. multiple components.When electrode compression power acts on
When, certain deformation can occur for stress electrode, and therefore, certain variation occurs for the distance between upper/lower electrode, to make to detect
Signal changes.
In pressure difference sensor preparation process, in order to regulate and control the distance between two electrode of pressure difference.Usually pass through replacement one
Or the hard material roll adjustment washer of multiple and different thickness, it is therefore an objective to limit the test scope of minimum pressure difference detectable signal.
However, the machining accuracy and flatness requirement due to pressure difference sensor interior fittings are high, using existing tune
When spacing is adjusted away from washer, the gas flowing between two electrodes is tended to interfere with, influences the exhaust efficiency of sensor, or even will
Gas is trapped in short space, directly affects sensor life-time.
Summary of the invention
Therefore, the purpose of the present invention is to provide a kind of air guide washers, to solve differential sensing in the prior art
Device exhaust sealing time is long, the problem after sealing-in more than residual gas.
In order to solve the above technical problem, the present invention provides a kind of air guide washers, comprising:
Washer body is ring structure, has upper and lower two basic change face；
Air guide groove is arranged at least one described faying face of the washer body, and the air guide groove is connected to institute
It states inside and outside washer body.
As a preferred embodiment, the air guide groove is provided on the upper and lower two basic change face of the washer body.
As a preferred embodiment, the air guide groove is sinusoidal.
As a preferred embodiment, the air guide groove has cross one another two on the faying face.
As a preferred embodiment, further includes:
Air guide gap is arranged on the end face of the support level surrounded by the air guide groove of the washer body, institute
The both ends for stating air guide gap are respectively communicated with the air guide groove.
As a preferred embodiment, the air guide gap has two, described in two on the end face of the support level
Air guide gap is connected with criss-cross fashion.
As a preferred embodiment, the width in the air guide gap is 0.1~1mm.
As a preferred embodiment, the washer body with a thickness of 0.05~0.35mm.
As a preferred embodiment, the depth of the air guide groove is 0.01~0.1mm.
The manufacturing method of air guide washer provided by the invention, comprising the following steps:
Washer body is selected according to thickness requirements；
Air guide groove is set, it is rotten using laser, electron beam, chemical attack or electrochemistry on the faying face of washer body
Air guide groove is arranged, so as to be connected to inside and outside washer body in the method for erosion；
Air guide gap is set, on the faying face of washer body, at the end of the support level surrounded by the air guide groove
On face, at least one air guide gap is arranged with laser, electron beam, chemical attack or the method for electrochemical corrosion, so that described lead
It is connected to inside and outside the both ends of air cleft gap and the air guide groove and/or the washer body.
Technical solution of the present invention has the advantages that
1. air guide washer provided by the invention will be connected to when in use by air guide groove inside and outside washer body,
Under the premise of not changing washer body original thickness, make the air of washer body inner ring when vacuumizing, it can be rapidly and efficiently
Discharge improve exhaust efficiency of the sensor when ultrahigh vacuum is vented so that gas be avoided to be trapped in the inside of ring washer
And exhaust effect.
2. air guide washer provided by the invention, the air guide gap being arranged on the end of support level can be by supporting table
The air of the end of rank is discharged, and stacks in multiple washers in use, the end short space that gas will not be made to fall into support level
It is interior, it ensure that the exhaust effect of sensor, so that the quality of sensor can be improved.
3. the manufacturing method of air guide washer provided by the invention after having chosen the thickness of washer body, then carries out air guide
The production of groove will not only change the thickness of washer body, but also setting method is simple, it is ensured that support level position
Ring washer thickness it is constant, ensure that original application range of washer；Then, by the support end face of support level
Air guide gap is set, can further be exported the gas of the support endface of support level, uses air guide convenient for stacking
When washer, sensor is vacuumized.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic perspective view of the air guide washer provided in embodiments of the present invention.
Fig. 2 is the enlarged drawing of a-quadrant in Fig. 1.
Fig. 3 is the main view of the part-structure of air guide washer.
Fig. 4 is the top view of Fig. 3.
Fig. 5 is the use state schematic perspective view that multiple groups air guide washer is stacked.
Fig. 6 is the enlarged drawing of B area in Fig. 5.
Description of symbols:
1, washer body；2, air guide groove；3, support level；4, air guide gap.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
As long as in addition, the non-structure each other of technical characteristic involved in invention described below different embodiments
It can be combined with each other at conflict.
Embodiment 1
The present embodiment provides a kind of specific embodiments of air guide washer, as shown in Figure 1 and Figure 2, the washer of present embodiment
Ontology 1 is conventional ring structure washer, and it is recessed to be provided with air guide on the face of two basic change up and down of washer body 1 by laser
Slot 2, the air guide groove 2 have two, are cross one another sinusoidal shape, by the air guide groove 2 for being connected to
Inside and outside washer body 1, extract the inside air of washer body 1 in time out when vacuumizing.
On the end face of the support level 3 surrounded by air guide groove 2, it is additionally provided with two air guide gaps 4, the air guide seam
Gap 4 is arranged at right-angled intersection, wherein an air guide gap 4 is connected to inside and outside washer body 1, another air guide gap 4 connects
The air guide groove 2 of logical 3 two sides of support level；By the air guide gap 4, for making the air of endface of support level 3 can
To be extracted out in time when vacuumizing.
In order to realize the accurate adjusting to the distance between two electrode of sensor, what the washer body 1 of the present embodiment used
Material is hard material, and ceramics, glass, alloy, metal, bakelite etc. specifically can be used.
As shown in Figure 3, Figure 4, about the thickness h 1 of washer body 1, available range is 0.05~0.35mm；
About the depth h2 of air guide groove 2, available range is 0.01~0.1mm.
About the width d in air guide gap 4, available range is 0.1~1mm.
The above specific value can carry out selection use according to actual needs, such as in the present embodiment, select washer body 1
Thickness h 1 be 0.35mm, the depth h2 of air guide groove 2 is 0.04mm, and the width d of air guide groove 2 is 1mm.
As shown in Figure 5, Figure 6, when in use, washer body 1 can be stacked gradually as needed, when stacking makes two panels washer
It is supported between ontology 1 by support level 3.In this way, when sensor is exhausted, between adjacent two washer body 1
Gas can be also smoothly discharged, gas will not be made to be trapped in washer body 1, to ensure that the quality of sensor.
In addition, it is recessed that air guide can be only arranged in the washer body 1 on the faying face of side as a kind of alternative embodiments
Slot 2, the other side can be used for cooperating with the faying face for being provided with air guide groove 2 of other washer bodies 1.
As a kind of alternative embodiments, the air guide gap that is arranged on the end face of the support level 3 of the washer body 1
4, it is convenient to omit, the gas circulation in outside in washer body 1 can be only realized by air guide groove 2.
Embodiment 2
The present embodiment provides a kind of specific embodiments of the manufacturing method of air guide washer, comprising the following steps:
The first step chooses the thickness of washer body 1 to be processed, between two electrodes of the sensor adjusted as needed away from
From the thickness for choosing suitable washer, specifically can selection range be 0.05~0.35mm；The thickness of washer is selected, is
In order to be adjusted to the detectable signal variation of pressure difference sensor by the ultra-thin gasket of micron order.
Air guide groove 2 is arranged in second step, rotten using laser, electron beam, chemistry on the faying face of the washer body 1
Air guide groove 2 is arranged, so as to be connected to inside and outside washer body 1 in the methods of erosion or electrochemical corrosion.
Air guide gap 4 is arranged, on the faying face of washer body 1, in the branch surrounded by the air guide groove 2 in third step
On the end face for supportting step 3, two mutual right-angled intersections are arranged with laser, electron beam, chemical attack or the method for electrochemical corrosion
Air guide gap 4 so that inside and outside the both ends in the air guide gap 4 and the air guide groove 2 and the washer body 1
Connection.
In addition, as a kind of replaceable real-time mode, it is described step 3: the step of air guide gap 4 is arranged, it is convenient to omit,
The air circulation inside and outside washer body 1 only can be realized by air guide groove 2.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes still within the protection scope of the invention.
Claims (10)
1. air guide washer characterized by comprising
Washer body (1) is ring structure, has upper and lower two basic change face；
Air guide groove (2) is arranged at least one described faying face of the washer body (1), and the air guide groove (2) is even
Lead to inside and outside the washer body (1).
2. air guide washer according to claim 1, which is characterized in that the upper and lower two basic change face of the washer body (1)
On be provided with the air guide groove (2).
3. air guide washer according to claim 1, which is characterized in that the air guide groove (2) is sinusoidal.
4. air guide washer according to claim 3, which is characterized in that the air guide groove (2) has on the faying face
There are cross one another two.
5. air guide washer according to claim 1, which is characterized in that further include:
Air guide gap (4) is arranged at the end for the support level (3) of the washer body (1) surrounded by the air guide groove (2)
On face, the both ends of the air guide gap (4) are respectively communicated with the air guide groove (2).
6. air guide washer according to claim 5, which is characterized in that the air guide gap (4) is in the support level (3)
End face on have two, two air guide gaps (4) are connected with criss-cross fashion.
7. air guide washer according to claim 5, which is characterized in that the width of the air guide gap (4) is 0.1~1mm.
8. air guide washer according to claim 1, which is characterized in that the washer body (1) with a thickness of 0.05~
0.35mm。
9. air guide washer according to claim 8, which is characterized in that the depth of the air guide groove (2) be 0.01~
0.1mm。
10. a kind of manufacturing method of air guide washer, which comprises the following steps:
Washer body (1) is selected according to thickness requirements；
It is arranged air guide groove (2), on the faying face of washer body (1), using laser, electron beam, chemical attack or electrochemistry
The method of corrosion is arranged air guide groove (2), so as to be connected to inside and outside washer body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910833186.1A CN110411613A (en) | 2019-09-04 | 2019-09-04 | Air guide washer and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910833186.1A CN110411613A (en) | 2019-09-04 | 2019-09-04 | Air guide washer and its manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110411613A true CN110411613A (en) | 2019-11-05 |
Family
ID=68370120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910833186.1A Pending CN110411613A (en) | 2019-09-04 | 2019-09-04 | Air guide washer and its manufacturing method |
Country Status (1)
| Country | Link |
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| CN (1) | CN110411613A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2302378Y (en) * | 1997-03-05 | 1998-12-30 | 冶金工业部钢铁研究总院 | Self-gas sealing air-filling valve |
| CA2400530A1 (en) * | 2001-08-30 | 2003-02-28 | Dana Corporation | Exhaust port gasket with cylinder-specific electronic oxygen sensors |
| DE202010004773U1 (en) * | 2009-04-10 | 2010-08-12 | Lam Research Corp., Fremont | Sealing element with postioning feature for a clamped monolithic gas distribution electrode |
| CN102395250A (en) * | 2011-11-01 | 2012-03-28 | 深南电路有限公司 | Vacuum pumping device and method for circuit board |
| CN208579860U (en) * | 2018-07-18 | 2019-03-05 | 上海贤日测控科技有限公司 | A kind of differential capacitive pressure sensor structure |
| CN208606936U (en) * | 2018-08-16 | 2019-03-15 | 常州曼淇威压力控制技术有限公司 | Anti- pipeline floats electricity pressure sensor |
| CN210322097U (en) * | 2019-09-04 | 2020-04-14 | 川北真空科技(北京)有限公司 | Air guide gasket |
-
2019
- 2019-09-04 CN CN201910833186.1A patent/CN110411613A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2302378Y (en) * | 1997-03-05 | 1998-12-30 | 冶金工业部钢铁研究总院 | Self-gas sealing air-filling valve |
| CA2400530A1 (en) * | 2001-08-30 | 2003-02-28 | Dana Corporation | Exhaust port gasket with cylinder-specific electronic oxygen sensors |
| DE202010004773U1 (en) * | 2009-04-10 | 2010-08-12 | Lam Research Corp., Fremont | Sealing element with postioning feature for a clamped monolithic gas distribution electrode |
| CN102395250A (en) * | 2011-11-01 | 2012-03-28 | 深南电路有限公司 | Vacuum pumping device and method for circuit board |
| CN208579860U (en) * | 2018-07-18 | 2019-03-05 | 上海贤日测控科技有限公司 | A kind of differential capacitive pressure sensor structure |
| CN208606936U (en) * | 2018-08-16 | 2019-03-15 | 常州曼淇威压力控制技术有限公司 | Anti- pipeline floats electricity pressure sensor |
| CN210322097U (en) * | 2019-09-04 | 2020-04-14 | 川北真空科技(北京)有限公司 | Air guide gasket |
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