CN205679350U - Parallel-plate dry-type capacitance pressure transducer - Google Patents
Parallel-plate dry-type capacitance pressure transducer Download PDFInfo
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- CN205679350U CN205679350U CN201620567430.6U CN201620567430U CN205679350U CN 205679350 U CN205679350 U CN 205679350U CN 201620567430 U CN201620567430 U CN 201620567430U CN 205679350 U CN205679350 U CN 205679350U
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Abstract
A kind of parallel-plate dry-type capacitance pressure transducer, solve existing sensor manufacturing process requirement more difficult, it is difficult to meet precise measurement and control pressure requirements, the problems such as yield rate is low, including housing, assemble the flat-faced tube fixed electrode in housing, moving electrode, be characterized in that: the sapphire insulator of fixed electrode is connected by silver-bearing copper brazing layer is fixing with welding block, and insulator bottom surface Vacuum Deposition connects planar metal electrode, insulating barrier；The moving electrode being fixed into by whole face, the bottom of diaphragm Yu battery lead plate, is set in parallel in fixed electrode by support set and is connected in the setting cavity connect, and support set contacts the upper and lower crest of diaphragm edge waviness respectively with connecting seat；Welded by cutting edge between each accessory.Its reasonable in design, processing technology is simple, and material source is wide, and crudy is good, parallel-plate electrode is the most excellent, compared with similar products, same thick diaphragm, range accuracy is high, anti-seismic performance is stable, corrosion-resistant, significantly improves production efficiency and service life, reduces manufacturing cost.
Description
Technical field
This utility model relates to a kind of dry-type capacitance sensor for measuring pressure medium, and particularly one disclosure satisfy that
There is certain corrosion resistance and Antiradiation, pure flat in high precision, used by the precise measurement and control pressure field of the requirement such as high reliability
Andante dry-type capacitance pressure transducer.It is applicable to measure the slight pressure of gas medium, absolute slight pressure.
Background technology
At present, can be used for measuring the place that sensitive uranium enrichment needs precise measurement and control pressure with other, mostly use dry type
Capacitance sensor.Although there is hundreds of dry-type capacitance sensor home and abroad, but using representational in industry is the U.S.
The product (structural principle is as shown in Figure 4,5) that MKS company produces, it is the absolute micropressure sensor of dry-type capacitance.Its structure bag
Include: the housing being made up of casing cover 19, fixed electrode shell 14 and outer shell base 16, the parabola fixed electrode being assembled in housing and film
Chip moving electrode 15 part such as grade.Wherein it is packaged with contact conductor 21, parabola fixed electrode by glass insulator 20 on casing cover 19
Band in the ceramic insulator 13 of electrode 22 be assembled in fixed electrode shell 14, the paraboloidal concave surface vacuum of ceramic insulator 13
Painting is coated with parabola metallic diaphragm 17 and parabola insulating barrier 18, diaphragm type moving electrode 15 fixed electrode shell 14 and outer shell base 16
Push down and tighten stretching.Its operation principle is: when gas pressure is after the impulse mouth of outer shell base 16 enters, is applied to diaphragm type and moves
On electrode 15, diaphragm type moving electrode 15 is pressed to fixed electrode, make the electric capacity between diaphragm type moving electrode 15 and parabola fixed electrode
Changing, by interior electrode 22, the contact conductor 21 on glass insulator 20 exports the signal of telecommunication.Again through control circuit
After processing and amplifying, outputting standard high level signal, i.e. obtain the absolute micro-pressure measuring medium.
The manufacturing process of the absolute micropressure sensor of this dry-type capacitance is summarized as follows:
Step one makes fixed electrode, and on ceramic insulator 13, electrode 22 in vacuum-sintering, processes paraboloidal recessed
Face final vacuum coating parabola metallic diaphragm 17 and parabola insulating barrier 18, make parabola fixed electrode；
Step 2 makes the fixed electrode shell 14 of nickel base superalloy (Inconel X-750) material, outer shell base 16, outer
Cap 19, then carries out heating, Ageing Treatment；
Step 3 is burning glass insulator 20, encapsulated electrode lead-in wire 21 on casing cover 19, uses the work that condition is strict
Skill is sintered, and each part presents press seal situation each other.This requires relatively stricter in technique, careless slightly it is necessary to burst.Real
On border, glass is not full hole in sealing, once flat hole or expose the hole sealed, and just bursts.
Step 4 makes diaphragm type moving electrode 15, selects thickness at the Inconel X-750 alloy strip steel rolled stock of 100 μm, warp
Multi-direction rolloff becomes the flat diaphragm of 20 μ m-thick.In the operation of rolling, often roll after once it is necessary to anneal in a vacuum once, keep one
Fixed temperature carries out Ageing Treatment.The most just roll motionless, or roll uneven.Elasticity is processed, it is simply that cool down rapidly, typically
The chilled helium of liquid nitrogen to be used and argon.Inconel X-750 is sedimentation type super stainless steel, and PROCESS FOR TREATMENT is than Hastelloy fiber crops
Tired.Because it can undergo phase transition in different temperatures.
Diaphragm type moving electrode 15 mold together with fixed electrode shell 14, outer shell base 16 of heat treatment is tightened by step 5
Stretching, pushes down the diaphragm type moving electrode 15 tightening stretching all the time with fixed electrode shell 14, outer shell base 16, and cutting unnecessary part will
Three is soldered to together, puts into heat treatment under fine vacuum.The coefficient of expansion of the material of glass insulator 20 and fixed electrode shell 14
It is unmatched, fabricated construction have to be selected.It is narrow that this just determines its warm area used, and is only limitted to 0～50 DEG C；
Step 6 wire connects interior electrode 22 and contact conductor 21, with electron beam by fixed electrode shell 14 under fine vacuum
Together with being soldered to casing cover 19, concurrently form high-vacuum chamber, make the absolute micropressure sensor of dry-type capacitance.
The sensor of MKS company of the U.S., owing to being the product produced by strict process conditions, for 0～
The transducer range of 10kPa, diaphragm thickness can reach 20 μm, and to 0～1kPa range, diaphragm thickness can realize 5 μm, so its amount
Cheng Jingdu is high, it is possible to achieve ± more than 0.5%F.S, stability reaches ± 0.1%/year.Because it has radioprotective merit corrosion-resistant, resistance to
Can, can be used for uranium enrichment and other precise measurement and control aspects of sensitivity, therefore China is implemented strict embargo by America and Europe.
Although the range accuracy of this kind of dry-type capacitance sensor is high, but in use there is also certain problem:
First, its diaphragm type moving electrode 15 is the flat diaphragm without ripple, is exhausted at pottery facing to parabola fixed electrode
It is processed into close to parabola on edge 13, then plates parabola metallic diaphragm 17 and parabola insulating barrier 18.During work, as galvanic electricity
The flat diaphragm of pole is the parabola of the parabola that the vary fixed electrode to determining, the linear of diaphragm is bad, it is not easy to
Match with fixed electrode, non-linear the biggest；
Secondly, on making, diaphragm type moving electrode 15 is carried out stretching all the time and tighten welding, if do not stretched tight after Han Jie
Tightly, being eliminated, yield rate is low, and cost is high；
Further, range determines by sensor diameter and diaphragm thickness, 5 μm as thick in diaphragm, small range can be 0～
1kPa, but 1 year can only be taken less than.If it is on enriched uranium centrifuge, the most certain spillage risk.Because diaphragm is not only wanted
Thin and have invar property, also there is corrosion resistant thickness, conflicting.As can be seen here, diaphragm is thin, and range can be little, but processes
Technique is difficult, and comparative lifetime is short when there being corrosive medium.It addition, existing sensor high alumina ceramic, material therefor is wanted
Ask tight, it is impossible to gassiness.
Reporting according to patent documentation, Present Domestic manufacture level cannot realize the strict welding of this requirement and tighten technique,
Also can not produce above-mentioned high-precision dry-type capacitance product sensor.Such as: application publication number is " can increasing of CN102944352A
The capacitance diaphragm pressure sensor of forceful electric power pole plate stability " in, disclosed technical scheme is: the battery lead plate of fixed electrode is by picture
Hub on wheel props up in sensor frame.The defect that this sensor produces is mainly: because this hub must expand and receive
Contracting, under outside vibration effect, hub also wants relative frame, thin film to produce vibration, the precision of former capital sensor to be had influence on and
Quality.During measurement, when thin film and battery lead plate are when without pressure, it are parallel, when there being pressure, deformation, parabolically deformation, i.e.
The parabola of gradual change is to plane (MKS is that the parabola seeing gradual change is to parabola).So, will produce bigger non-linear,
When having served as range, owing to thin film is without constraint, without relying on, so thin film can be damaged.
Patent announcement number is " integrated capacitor type pressure sensor " of CN 201622147U, and the structure of record is a group
The simple sensor of dress formula, is exclusively used in sphygomanometer.Its fixed electrode is stator, and moving electrode is moving plate, moving plate center and corrugated plate
Center is bonded to together.This corrugated plate outer rim one side is soldered on base (impulse mouth of holding concurrently), forms an elastic cavity, base with
Corrugated plate and stator are fixed in radome with three supports respectively, in also circuit part is also included within.Therefore, it exists
Problem is: 1, because this support is distributed, is difficult to synchronize change, therefore spacing deformation is big, will not stablize under the influence of the external world.
2, moving plate is connected with diaphragm type center, and corrugated plate ripple is unrestricted, and change is difficult to uniformly, it is impossible to ensure between moving plate and stator
Parallel.The corrugated plate upper limit is indefinite, when big pressure overload, yielding, damages.3, between stator and moving plate it is free air, it is impossible to
Ensureing that turnover every time is dried consistent, electric capacity is uncertain, and the range accuracy determining sensor is the lowest.4, absolute pressure can not be measured.5、
In addition to blood pressure, it is little to it and uses.
Utility model content
The purpose of this utility model is to provide a kind of parallel-plate dry-type capacitance pressure transducer, solves existing dry-type capacitance
The technological requirement of sensor production is more difficult and tight, it is not easy to meet precise measurement and control pressure requirements, and yield rate is low, and high cost is asked
Topic, its reasonable in design, processing technology is simple, and material source is wide, and handling ease quality is good, and parallel-plate electrode is the most excellent, with
Like product is compared, same thick diaphragm, and range accuracy is high, and anti-seismic performance is stable, and corrosion-resistant, significantly improve production efficiency and
In service life, reduce manufacturing cost.
This utility model be the technical scheme is that this parallel-plate dry-type capacitance pressure transducer includes housing, assembles
Flat-faced tube fixed electrode in housing and flat-faced tube moving electrode, be characterized in that: the envelope of described flat-faced tube fixed electrode
It is connected to sapphire insulator and the welding block as shell of extraction electrode, is fixed together by silver-bearing copper brazing layer,
The bottom surface Vacuum Deposition of sapphire insulator finishing connects planar metal electrode and planar insulating layer；By constant modulus alloy convoluted diaphragm with
The fixing flat-faced tube moving electrode connected and composed in whole of the bottom of battery lead plate, arranged in parallel with flat-faced tube fixed electrode by
Invar property support set and invar property connect in the setting high-air-tightness cavity connect, between sapphire insulator and invar property support set
It is provided with the extendable room that flat-faced tube moving electrode moves, and makes invar property support set contact permanent bullet respectively with invar property connection seat
Property alloy corrugated diaphragm is looped around the upper crest of battery lead plate neighboring ripple or lower crest；The invar property support set of shell is with permanent
Welded by stress-removal cutting edge between elastic connection seat or between invar property support set and welding block.
Sealing is also set up by between sapphire insulator and welding block that described silver-bearing copper brazing layer is fixed together
Encapsulant layer.
Whole with the bottom of described battery lead plate the fixing constant modulus alloy convoluted diaphragm being connected, selecting transducer range is 0
～under the soft state of 10kPa, setting waveform being carried out the diaphragm of invar property process, diaphragm thickness is 80 μm～100 μm.
This utility model has the advantage that and good effect is: due to this utility model use by constant modulus alloy ripple
The fixing moving electrode connected and composed of whole with the bottom of battery lead plate of diaphragm fixes, with welding block, the indigo plant being connected by silver-bearing copper brazing layer
It is all flat-faced tube structure that gem insulator makees fixed electrode, and insulator sapphire material makes, and has both made 10-12Pa is true
Under sky, do not exit；Insulator and the expansion of metal coefficients match of welding block, high airtight with realizing under silver-bearing copper brazing layer fine vacuum
Property encapsulation, entirely weld, so its reasonable in design, processing technology is simple, and material source is wide, and handling ease quality is good.It addition,
Bottom surface Vacuum Deposition because repairing at the sapphire insulator of flat-faced tube fixed electrode connects planar metal electrode and planar insulating layer, flat
Panel type moving electrode uses the convoluted diaphragm that constant modulus alloy makes, and whole of battery lead plate welds with constant modulus alloy convoluted diaphragm,
Constant modulus alloy convoluted diaphragm has multiple tracks ripple at the edge that keeps to the side, therefore is easy to the stretching of constant modulus alloy convoluted diaphragm with mobile.Meanwhile,
By the constant modulus alloy upper and lower crest of convoluted diaphragm ripple, connect seat with accessory invar property support set, invar property and be any limitation as, anti-
Shake, it is ensured that moving electrode can only be by axially-movable, it is achieved high stability, effectively reduces the impact of external vibration.This parallel
Plate type electrode the most excellent, compared with similar products, same thick constant modulus alloy convoluted diaphragm range accuracy is high, and corrosion resistant
Erosion, significantly improves production efficiency and service life, reduces manufacturing cost.The range of sensor is by the diameter of diaphragm and thickness, ripple
Stricture of vagina shape, number determine, this processes experience, technics comparing maturation at instrument industry.Constant modulus alloy convoluted diaphragm waveform is permissible
Shape under soft state, then carry out invar property process.In welding process, due to structure and welding procedure, do not affect diaphragm
Elasticity and quality.For being resistant to the diaphragm of 1 atmospheric pressure, thickness 80 μm, invar property, absolute zero can be realized to the amount of 1kPa
Journey.Precision can reach ± 0.1%F.S.It is provided with flat-faced tube moving electrode between sapphire insulator and invar property support set to move
Extendable room so that flat-faced tube moving electrode, fixed electrode are arranged in parallel to be connected by invar property support set and invar property
In the setting high-air-tightness cavity connect, and invar property support set can be contacted constant modulus alloy ripple respectively with invar property connection seat
Diaphragm is looped around the upper crest of battery lead plate neighboring ripple or lower crest, it can be ensured that flat-faced tube moving electrode can only be by axially
Motion.The invar property support set of shell is connected between seat with invar property or passes through stress-removal between invar property support set and welding block
Cutting edge welding (general argon arc welding, Laser Welding, beam-plasma weldering all right), if the material energy phase of welding block and invar property support set
Just, coefficient of expansion difference produces stress to compatible formation stable alloy, and the cutting edge by weld bond buffers.At present, the same medium of selection
The material of contact is the NI-CR-MO alloys of Hastelloy C-276(corrosion-resisant alloy tungstenic more more preferable than Inconel X-750)
Make Deng alloy.Including constant modulus alloy convoluted diaphragm, invar property support set, invar property connect seat etc. and locate the most before welding
Managing, be soldered and do not reprocess, production efficiency is high.For measuring the difference of medium, again need not be to constant modulus alloy convoluted diaphragm
Stretching, material source is wide, has a lot of material available.The experience of industry processing simultaneously, technics comparing are ripe, affiliate
A lot, accessory processing, technique all simplify.Because constant modulus alloy convoluted diaphragm is with ripple, same thickness range is permissible
The least, conversely speaking, for same range, thickness can be several times of thickness of diaphragm of MKS existing product.Thick diaphragm makes well,
And it is corrosion-resistant.During such as range 0～10kPa, diaphragm thickness can be 80 μm～100 μm；Diaphragm good stability, sensor accuracy
High.As the diaphragm for 50 μm, such as range 0～50Pa, absolute zero to 50Pa can realize ± more than 0.1%F.S precision.Weldering
When connecing, constant modulus alloy convoluted diaphragm corrugated contact upper and lower weldment invar property support set, invar property is allowed to connect the inner plane of seat,
Need not stretch, tighten without secondary, technique is simple.Therefore, this utility model solves existing dry-type capacitance sensor production
Technological requirement is more difficult and tight, it is not easy to meet precise measurement and control pressure requirements, and yield rate is low, high cost problem.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, this utility model is further described.
Fig. 1 is a kind of structural representation of the present utility model；
Fig. 2 is I structure for amplifying schematic diagram of Fig. 1；
Fig. 3 is II structure for amplifying schematic diagram of Fig. 1；
Fig. 4 is a kind of structural representation of prior art；
Fig. 5 is III structure for amplifying schematic diagram of Fig. 4.
Sequence number explanation in figure: 1 extraction electrode, 2 sapphire insulators, 3 silver-bearing copper brazing layers, 4 invar property support sets, 5 permanent bullets
Property alloy corrugated diaphragm, 6 invar property connect seats, 7 battery lead plates, 8 planar metal electrodes, 9 planar insulating layer, 10 welding blocks, 11 close
Envelope encapsulant layer, 12 cutting edges, 13 ceramic insulators, 14 fixed electrode shells, 15 diaphragm type moving electrodes, 16 outer shell bases, 17 cambered surfaces
Metallic diaphragm, 18 cambered surface insulating barriers, 19 casing covers, 20 glass insulators, 21 contact conductors, electrode in 22.
Detailed description of the invention
Concrete structure of the present utility model is described in detail according to Fig. 1～5.This parallel-plate dry-type capacitance pressure transducer includes
Housing, the parts such as the flat-faced tube fixed electrode being assembled in housing and flat-faced tube moving electrode.Its middle shell includes as outward
The welding block 10 of shell, invar property support set 4 and invar property connect seat 6.The sapphire insulator 2 of flat-faced tube fixed electrode is sealed with
Extraction electrode 1, sapphire insulator 2 is fixed together by silver-bearing copper brazing layer 3 with welding block 10.Due to silver-bearing copper brazing layer
3 bonding areas are relatively large, in order to realize the yield rate of 100%, blue precious be fixed together by silver-bearing copper brazing layer 3
Between stone insulator 2 and welding block 10, there is provision of sealed filling material layer 11 and make up.The general feelings of sealed filling material layer 11
Under condition need not, only when silver-bearing copper brazing layer 3 goes wrong, just Emergency use.Bottom surface Vacuum Deposition in sapphire insulator 2 finishing
Connect planar metal electrode 8 and planar insulating layer 9.It is connected by whole with the bottom of battery lead plate 7 of constant modulus alloy convoluted diaphragm 5 is fixing
The flat-faced tube moving electrode constituted, arranged in parallel with flat-faced tube fixed electrode by invar property support set 4 and invar property company
In the high-air-tightness cavity of joint chair 6 sealing-in.In the present embodiment, owing to thick diaphragm makes well, diaphragm is thick the corrosion resistant life-span
The most longer, so whole with the bottom of battery lead plate 7 the fixing constant modulus alloy convoluted diaphragm 5 being connected, select transducer range
Being the diaphragm that setting waveform carries out under the soft state of 0～10kPa invar property process, diaphragm thickness is preferentially made as 80 μm～100 μ
m.It is provided with the extendable room that flat-faced tube moving electrode moves between sapphire insulator 2 and invar property support set 4, and makes permanent bullet
Property support set 4 and invar property connect seat 6 and contact constant modulus alloy convoluted diaphragm 5 respectively and be looped around battery lead plate 7 neighboring ripple
Upper crest or lower crest.Constant modulus alloy convoluted diaphragm 5 has had ripple, and displacement is not the most rigid stretching, but by " folding "
The elastic deformation of the diaphragm got up, good linearity, elastic more longlasting.Membrane flexive deformation is easy, and thickness just can be with relative thick one
A bit, thick making is easy for, and heat treatment deformation is little, antibody Monoclonal.The more important thing is, chemical attack degree is as thickness change,
The thickest the most corrosion-resistant.Meanwhile, any material has certain slip.Also relevant with thickness.With regard to thickness at diaphragm thickness weld bond, for a long time
Sealing is the most better.The sensor made, particularly absolute pressure transducer, the life-span is the longest.It addition, membrane flexive is the most pre-
System, does not redraws during welding, and postwelding is not reprocessed, and makes simple, and cost is low.During because of welding, allow constant modulus alloy ripple film
The corrugated contact upper and lower weldment invar property support set 4 of sheet 5, invar property connect the inner plane of seat 6, need not stretch, without secondary
Tighten, therefore processing technology is simple.The invar property support set 4 of shell is connected with invar property between seat 6 or invar property support set 4 and weldering
Connect and welded by stress-removal cutting edge 12 between block 10.The specification shape of cutting edge 12 the most preferentially selects the processing dimension shown in Fig. 3.Only
The material wanting welding block 10, invar property support set 4, invar property to connect seat 6 compatible mutually can form stable alloy just, the coefficient of expansion
The stress produced during different welding, can lean on the cutting edge 12 of weld bond to buffer.Therefore, it uses warm area scope wide, can low temperature-
55 DEG C use between high temperature 200 DEG C.
This utility model concrete processing technology process is:
Step one makes flat-faced tube fixed electrode
First the parallel sapphire insulator 2 of end face as shown in Figure 1 and welding block 10 are processed, in the weldering of welding block 10
Cutting edge 12 is processed at Kou.Sapphire insulator 2 selects α-Al2O3Monocrystalline, cylinder crystal orientation is vertical C direction of principal axis so that solder
The linear expansion coefficient of the plane that sealing-in is big is 7.6 × 10-6/ DEG C, it is beneficial to select the material of 10 welding blocks.Welding block 10 material is optional
Making of 3J1 or 3J53 alloy, linear expansion coefficient is about 7.5 × 10-6/ DEG C, extraction electrode 1 can be selected for platinum filament, diameter 0.8～
0.5mm, also can be selected for platinotron, diameter 0.8～1.0mm, tank wall thickness 0.1～0.3mm, it is also possible to select titanium silk and titanium pipe, specification
With platinum filament or platinotron.It is enclosed within outside extraction electrode 1 with tubulose silver-copper brazing alloy, inserts on sapphire insulator 2 centre bore, pass through silver-bearing copper
Sapphire insulator 2 is welded by brazing layer 3 with welding block 10；
Then use the upper transverse plane of turning welding block 10 and the method for the silver-bearing copper brazing layer 3 of spilling, make exhausted with sapphire
Edge 2 upper and lower end plane keeping parallelism.Finally at sapphire insulator 2 surface vacuum coating, make planar metal electrode 8
Metallic diaphragm, after making planar metal electrode 8 be connected with extraction electrode 1, Vacuum Deposition planar insulating layer on planar metal electrode 8
9.General plating SiO or Al2O3Film layer, metallic diaphragm and insulating barrier, all about 1 μm, make flat-faced tube fixed electrode.
Step 2 makes accessory invar property support set 4 and invar property connects seat 6
By design requirement, with the specification of sapphire insulator 2, manufacture invar property support set 4, in order to exhausted at sapphire
The extendable room guaranteeing that flat-faced tube moving electrode moves is reserved between edge 2 and invar property support set 4.Select good springiness, corrosion resistant
The materials such as the Inconel X-750 alloy of erosion or Hastelloy C-276 alloy, in the weld work of invar property support set 4
Go out cutting edge 12.As shown in Figure 3.After machining shapes, after carrying out precipitation and Ageing Treatment, inspect its hardness by random samples with batch.Invar property is even
The selection of joint chair 6 and process technique are with invar property support set 4.
Step 3 makes flat-faced tube moving electrode
For the constant modulus alloy convoluted diaphragm 5 of flat-faced tube moving electrode, corrosion-resistant good Hastelloy can be selected
C-276 alloy, according to transducer range, during such as 0～10kPa, thickness is selected in 80 μm～100 μm, the thinnest uses 50 μm, processes circle
Shape sheet (soft state), extrudes ripple with ripple mould.Ripple height overall is at about 1.9mm, the pitch of waves about 2.5mm.Select little ripple,
General selection interior 4 ripples of Ф 60～Ф 40 are uniform.After having pressed ripple, carry out increasing temperature under vacuum, then the quenching of applying argon gas quickly cooling；
For the battery lead plate 7 of flat-faced tube moving electrode, for ease of welding and heat treatment, general selection is as far as possible with permanent bullet
The material of property alloy corrugated diaphragm 5 is identical.Quench after turning, two-sided polish.Use silver-bearing copper soldering, by whole for battery lead plate 7 with permanent
Elastic alloy convoluted diaphragm 5 fills graphite mo(u)ld and is soldered under vacuo together.Can also be by roll welding mode by constant modulus alloy ripple film
Together with sheet 5 face whole with battery lead plate 7 is soldered to.
Step 4 assembly welding
First welding block 10 and the invar property support set 4 of sapphire insulator 2 will be welded with, by the sword at the two weld bond
Mouth 12 welds together.Again by the battery lead plate 7 with constant modulus alloy convoluted diaphragm 5, with the perseverance that weld work has cutting edge 12
Elastic supporting sleeve 4, invar property connect seat 6 and weld together, and can use the sides such as argon arc welding, Laser Welding, plasma weldering, electron beam weldering
Formula is welded.In order to prevent convoluted diaphragm from vibrating, invar property support set 4, invar property connect inner plane and the constant modulus alloy ripple of seat 6
The corrugated contact face of stricture of vagina diaphragm 5, somewhat crimping point ripple.Owing to constant modulus alloy convoluted diaphragm 5 displacement is big, press against the most also
Do not affect certainty of measurement.Good with the sensor stability that this processing method is made, this point is extremely important.Extraction electrode 1 is used
When tubule makes, it is the most economical for being soldered entire infrastructure evacuation again.It is pumped into fine vacuum pressure knot tubule, also can seal, 2/3 can be saved
The cost of technology.If make is table sensor, this pipe connects back pressure thin film, and (technique refers to patent publication No.
" the thin film isolated form gauge pressure transducer of built-in balance chamber " of CN104215383A).
Below one of the present utility model concrete processing technology process is implemented exactly.
Claims (3)
1. a parallel-plate dry-type capacitance pressure transducer, including housing, the flat-faced tube fixed electrode being assembled in housing peace
Panel type moving electrode, it is characterised in that: the sapphire insulator being sealed with extraction electrode of described flat-faced tube fixed electrode and work
For the welding block of shell, being fixed together by silver-bearing copper brazing layer, the bottom surface Vacuum Deposition in the finishing of sapphire insulator connects
Planar metal electrode and planar insulating layer；Connected and composed by whole of the bottom of constant modulus alloy convoluted diaphragm Yu battery lead plate is fixing
Flat-faced tube moving electrode, arranged in parallel with flat-faced tube fixed electrode is being connected setting connecing by invar property support set and invar property
High-air-tightness cavity in, be provided with between sapphire insulator and invar property support set that flat-faced tube moving electrode moves is flexible
Space, and make invar property support set and invar property connect seat to contact constant modulus alloy convoluted diaphragm respectively and be looped around battery lead plate periphery
The upper crest of edge waviness or lower crest；The invar property support set of shell be connected between seat with invar property or invar property support set with
Welded by stress-removal cutting edge between welding block.
Parallel-plate dry-type capacitance pressure transducer the most according to claim 1, it is characterised in that: by described silver-bearing copper soldering
Sealed filling material layer is also set up between sapphire insulator and welding block that layer is fixed together.
Parallel-plate dry-type capacitance pressure transducer the most according to claim 1, it is characterised in that: with the end of described battery lead plate
The fixing constant modulus alloy convoluted diaphragm connected in whole of portion, to setting waveform under the soft state selecting transducer range to be 0～10kPa
Carrying out the diaphragm of invar property process, diaphragm thickness is 80 μm～100 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620567430.6U CN205679350U (en) | 2016-06-13 | 2016-06-13 | Parallel-plate dry-type capacitance pressure transducer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620567430.6U CN205679350U (en) | 2016-06-13 | 2016-06-13 | Parallel-plate dry-type capacitance pressure transducer |
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| Publication Number | Publication Date |
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| CN205679350U true CN205679350U (en) | 2016-11-09 |
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| CN201620567430.6U Withdrawn - After Issue CN205679350U (en) | 2016-06-13 | 2016-06-13 | Parallel-plate dry-type capacitance pressure transducer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910751B (en) * | 2016-06-13 | 2018-11-13 | 沈阳市传感技术研究所 | Parallel-plate dry-type capacitance pressure sensor |
-
2016
- 2016-06-13 CN CN201620567430.6U patent/CN205679350U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910751B (en) * | 2016-06-13 | 2018-11-13 | 沈阳市传感技术研究所 | Parallel-plate dry-type capacitance pressure sensor |
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