CN110405649B - Sol-gel polishing pellet added with soluble filler with water-resistant coating and preparation method thereof - Google Patents
Sol-gel polishing pellet added with soluble filler with water-resistant coating and preparation method thereof Download PDFInfo
- Publication number
- CN110405649B CN110405649B CN201910716724.9A CN201910716724A CN110405649B CN 110405649 B CN110405649 B CN 110405649B CN 201910716724 A CN201910716724 A CN 201910716724A CN 110405649 B CN110405649 B CN 110405649B
- Authority
- CN
- China
- Prior art keywords
- water
- polishing
- pellet
- glue
- aluminum nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 91
- 239000008188 pellet Substances 0.000 title claims abstract description 65
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 239000000945 filler Substances 0.000 title claims abstract description 27
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 239000011248 coating agent Substances 0.000 title claims abstract description 20
- 238000002360 preparation method Methods 0.000 title abstract description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 48
- 239000004372 Polyvinyl alcohol Substances 0.000 claims abstract description 33
- 229920002451 polyvinyl alcohol Polymers 0.000 claims abstract description 33
- 238000000227 grinding Methods 0.000 claims abstract description 28
- 239000011347 resin Substances 0.000 claims abstract description 27
- 229920005989 resin Polymers 0.000 claims abstract description 27
- 239000007788 liquid Substances 0.000 claims abstract description 15
- -1 phenolic aldehyde Chemical class 0.000 claims abstract description 12
- 238000009966 trimming Methods 0.000 claims abstract 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 48
- 239000003292 glue Substances 0.000 claims description 39
- 239000000843 powder Substances 0.000 claims description 34
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 32
- 229910003460 diamond Inorganic materials 0.000 claims description 19
- 239000010432 diamond Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 19
- 239000002270 dispersing agent Substances 0.000 claims description 18
- 235000012239 silicon dioxide Nutrition 0.000 claims description 15
- 238000001035 drying Methods 0.000 claims description 14
- 238000005245 sintering Methods 0.000 claims description 13
- 235000019441 ethanol Nutrition 0.000 claims description 12
- 239000000377 silicon dioxide Substances 0.000 claims description 12
- 238000002156 mixing Methods 0.000 claims description 11
- 239000011265 semifinished product Substances 0.000 claims description 11
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 230000002378 acidificating effect Effects 0.000 claims description 9
- 239000011148 porous material Substances 0.000 claims description 9
- 239000002002 slurry Substances 0.000 claims description 9
- 239000000725 suspension Substances 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 7
- 239000000047 product Substances 0.000 claims description 7
- 239000000080 wetting agent Substances 0.000 claims description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical group [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 6
- 239000000654 additive Substances 0.000 claims description 6
- 230000000996 additive effect Effects 0.000 claims description 6
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000003921 oil Substances 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- 239000009719 polyimide resin Substances 0.000 claims description 6
- 239000007787 solid Substances 0.000 claims description 6
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000003756 stirring Methods 0.000 claims description 5
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims description 4
- 229910019142 PO4 Inorganic materials 0.000 claims description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 4
- 239000002518 antifoaming agent Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000000280 densification Methods 0.000 claims description 4
- JZZIHCLFHIXETF-UHFFFAOYSA-N dimethylsilicon Chemical compound C[Si]C JZZIHCLFHIXETF-UHFFFAOYSA-N 0.000 claims description 4
- 229920001971 elastomer Polymers 0.000 claims description 4
- 238000009499 grossing Methods 0.000 claims description 4
- 229920001568 phenolic resin Polymers 0.000 claims description 4
- 239000005011 phenolic resin Substances 0.000 claims description 4
- 239000010452 phosphate Substances 0.000 claims description 4
- 238000007873 sieving Methods 0.000 claims description 4
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical group Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 3
- 229920002873 Polyethylenimine Polymers 0.000 claims description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 3
- 238000001354 calcination Methods 0.000 claims description 3
- 238000009694 cold isostatic pressing Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910001610 cryolite Inorganic materials 0.000 claims description 3
- 239000002612 dispersion medium Substances 0.000 claims description 3
- 238000007710 freezing Methods 0.000 claims description 3
- 230000008014 freezing Effects 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000004005 microsphere Substances 0.000 claims description 3
- 239000012046 mixed solvent Substances 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical group [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 238000003828 vacuum filtration Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 239000011787 zinc oxide Substances 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- 241000252203 Clupea harengus Species 0.000 claims description 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 2
- 150000008051 alkyl sulfates Chemical class 0.000 claims description 2
- 239000003945 anionic surfactant Substances 0.000 claims description 2
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 2
- 239000000292 calcium oxide Substances 0.000 claims description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 2
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 2
- 229920001577 copolymer Polymers 0.000 claims description 2
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 2
- FPAFDBFIGPHWGO-UHFFFAOYSA-N dioxosilane;oxomagnesium;hydrate Chemical compound O.[Mg]=O.[Mg]=O.[Mg]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O FPAFDBFIGPHWGO-UHFFFAOYSA-N 0.000 claims description 2
- 150000002148 esters Chemical class 0.000 claims description 2
- 239000000194 fatty acid Substances 0.000 claims description 2
- 229930195729 fatty acid Natural products 0.000 claims description 2
- 150000004665 fatty acids Chemical class 0.000 claims description 2
- 150000002191 fatty alcohols Chemical class 0.000 claims description 2
- 235000019514 herring Nutrition 0.000 claims description 2
- 239000000395 magnesium oxide Substances 0.000 claims description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 2
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 2
- 239000002736 nonionic surfactant Substances 0.000 claims description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 2
- 229920000058 polyacrylate Polymers 0.000 claims description 2
- 229920000728 polyester Polymers 0.000 claims description 2
- 229920000570 polyether Polymers 0.000 claims description 2
- 229920000098 polyolefin Polymers 0.000 claims description 2
- 229920002503 polyoxyethylene-polyoxypropylene Polymers 0.000 claims description 2
- 239000000344 soap Substances 0.000 claims description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 claims description 2
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 2
- 238000010257 thawing Methods 0.000 claims description 2
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 claims description 2
- 239000004846 water-soluble epoxy resin Substances 0.000 claims description 2
- 239000002344 surface layer Substances 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 6
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- 239000007767 bonding agent Substances 0.000 abstract description 5
- 235000015895 biscuits Nutrition 0.000 abstract description 4
- 239000006187 pill Substances 0.000 description 37
- 239000000463 material Substances 0.000 description 14
- 229910052732 germanium Inorganic materials 0.000 description 8
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 8
- 239000011230 binding agent Substances 0.000 description 7
- 230000003746 surface roughness Effects 0.000 description 7
- 230000007062 hydrolysis Effects 0.000 description 6
- 238000006460 hydrolysis reaction Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 229910001018 Cast iron Inorganic materials 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000007670 refining Methods 0.000 description 5
- 239000005543 nano-size silicon particle Substances 0.000 description 4
- 238000005054 agglomeration Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 238000003763 carbonization Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000084 colloidal system Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000000805 composite resin Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000011354 acetal resin Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011246 composite particle Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000013530 defoamer Substances 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002113 nanodiamond Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/009—Tools not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910716724.9A CN110405649B (en) | 2019-08-05 | 2019-08-05 | Sol-gel polishing pellet added with soluble filler with water-resistant coating and preparation method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910716724.9A CN110405649B (en) | 2019-08-05 | 2019-08-05 | Sol-gel polishing pellet added with soluble filler with water-resistant coating and preparation method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110405649A CN110405649A (en) | 2019-11-05 |
CN110405649B true CN110405649B (en) | 2020-08-04 |
Family
ID=68365845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910716724.9A Active CN110405649B (en) | 2019-08-05 | 2019-08-05 | Sol-gel polishing pellet added with soluble filler with water-resistant coating and preparation method thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110405649B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113799008B (en) * | 2021-09-27 | 2022-10-21 | 苏州赛尔特新材料有限公司 | Self-trimming freeze-drying polishing wheel and preparation method and application thereof |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60114467A (en) * | 1983-11-21 | 1985-06-20 | Matsushita Electric Ind Co Ltd | Grinding wheel |
US6685755B2 (en) * | 2001-11-21 | 2004-02-03 | Saint-Gobain Abrasives Technology Company | Porous abrasive tool and method for making the same |
US6669747B2 (en) * | 2002-02-15 | 2003-12-30 | Master Chemical Corporation | Grinding wheel with titanium aluminum nitride and hard lubricant coatings |
US6913517B2 (en) * | 2002-05-23 | 2005-07-05 | Cabot Microelectronics Corporation | Microporous polishing pads |
FR2851079B1 (en) * | 2003-02-12 | 2005-08-26 | Soitec Silicon On Insulator | SEMICONDUCTOR STRUCTURE ON SUBSTRATE WITH HIGH ROUGHNESS |
CN101905439B (en) * | 2009-06-04 | 2012-07-04 | 宋健民 | Polishing pad with internal in-situ generated gap and gap generating method |
CN104625978B (en) * | 2013-11-14 | 2018-03-20 | 江苏华东砂轮有限公司 | A kind of heavy-load abraded steel billet emery wheel of big specification high-speed resin |
CN104175236A (en) * | 2014-08-25 | 2014-12-03 | 王根生 | Novel sintering polishing disk for crystal polishing and preparation technique thereof |
CN104209879B (en) * | 2014-09-11 | 2017-04-12 | 衢州学院 | Method for manufacturing soluble fixed soft abrasive-polishing film |
CN106956212B (en) * | 2017-03-17 | 2018-12-04 | 衢州学院 | A kind of aluminium nitride chip polishing method using chemical polishing solution and ceramic polished disk |
CN108314463B (en) * | 2018-04-10 | 2021-01-29 | 衢州学院 | Electrolytic copper filled porous diamond grinding tool and preparation method thereof |
CN108972386A (en) * | 2018-05-30 | 2018-12-11 | 安徽佑开科技有限公司 | A kind of modified zirconia silicon rubber phenolic resin grinding wheel and preparation method thereof |
-
2019
- 2019-08-05 CN CN201910716724.9A patent/CN110405649B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN110405649A (en) | 2019-11-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110315439B (en) | Mirror grinding wheel with capillary micropores and preparation method thereof | |
CA2379950C (en) | Method for making microabrasive tools | |
CN111216037B (en) | Polishing pad and preparation method thereof | |
CN100425405C (en) | Freezing nanometer abrasive polishing pad and its prepn. method | |
CN108161774B (en) | Polishing pad and manufacturing method thereof | |
CN104209879B (en) | Method for manufacturing soluble fixed soft abrasive-polishing film | |
CN101157198A (en) | Semi-sessile abrasive grain of plane stainless steel polishing method | |
CN110421494B (en) | Resin metal composite mirror grinding wheel based on sol-gel method and preparation method thereof | |
CN110405649B (en) | Sol-gel polishing pellet added with soluble filler with water-resistant coating and preparation method thereof | |
CN101774160B (en) | Grainofice-type concretion abrasive polishing pad as well as rapid preparation method and device | |
CN110405543B (en) | Ferrite substrate polishing method adopting acidic polishing solution and metal-based polishing disk | |
CN104944956B (en) | Gel reaction-based polycrystalline nanometer diamond grinding tool preparation method | |
CN109202750A (en) | Hollow accumulation abrasive grain of one kind and preparation method thereof, super-hard abrasive tool | |
CN113414705B (en) | Large-size double-layer flexible polishing pad and preparation method and application thereof | |
CN112917400A (en) | High-performance composite material precision polishing and grinding abrasive cloth and preparation method thereof | |
CN104786163A (en) | Ceramic bonding agent diamond grinding tool and preparation method thereof | |
CN113997213A (en) | Ceramic diamond grinding wheel for thinning SiC wafer and manufacturing method thereof | |
CN111251175A (en) | Grinding pad and preparation method and application thereof | |
CN111805415B (en) | Porous resin grinding disc and preparation method thereof | |
CN201446498U (en) | Pore self-generating abrasive material grinders | |
CN107793157B (en) | Preparation method of cubic silicon carbide super-fine oilstone | |
CN101176983A (en) | Semi-fixing abrasive grain polishing method of brass sheet substrate | |
WO2020007015A1 (en) | Diamond composite material, preparation method therefor, and application thereof | |
CN110628385A (en) | Composite diamond particles for magnetorheological polishing and preparation method thereof | |
CN111733453A (en) | Crucible for polycrystalline silicon ingot casting and preparation method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230508 Address after: Room 2101, Building 2, No. 21 Intercity Road, Huguan Town, High tech Zone, Suzhou City, Jiangsu Province, 215000 Patentee after: Suzhou Saimike Precision Industry Co.,Ltd. Address before: 78 No. 324000 Zhejiang province Kecheng District of Quzhou City Jiuhua North Avenue Patentee before: QUZHOU University |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231031 Address after: Room 2101, building 2, No.21, intercity Road, high tech Zone, Suzhou City, Jiangsu Province Patentee after: Suzhou Weifu Materials Co.,Ltd. Address before: Room 2101, Building 2, No. 21 Intercity Road, Huguan Town, High tech Zone, Suzhou City, Jiangsu Province, 215000 Patentee before: Suzhou Saimike Precision Industry Co.,Ltd. |