CN110376592B - Acousto-optic regulation and control optical phased array laser radar - Google Patents
Acousto-optic regulation and control optical phased array laser radar Download PDFInfo
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- CN110376592B CN110376592B CN201910666841.9A CN201910666841A CN110376592B CN 110376592 B CN110376592 B CN 110376592B CN 201910666841 A CN201910666841 A CN 201910666841A CN 110376592 B CN110376592 B CN 110376592B
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- optic modulation
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- modulation grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
Abstract
The application provides optics phased array lidar of reputation regulation and control, optics phased array lidar includes: the device comprises a laser light source, an optical waveguide array and an acousto-optic modulation grating; wherein the laser light source is used for emitting laser; the optical waveguide array is used for enabling the laser to propagate in the direction of the optical waveguide array; the acousto-optic modulation grating is positioned on the optical waveguide array and used for modulating the grating period of the acousto-optic modulation grating through the acoustic wave frequency so as to modulate the emission angle of the laser in the longitudinal direction. The acousto-optic modulation grating is positioned on the optical waveguide array, and the grating period of the acousto-optic modulation grating can be modulated through the acoustic wave frequency, so that the wavelength of incident light does not need to be adjusted, and large-angle longitudinal scanning can be realized by using a single-wavelength laser. The optical phased array laser radar no longer uses a tunable laser, and the cost is greatly reduced.
Description
Technical Field
The invention relates to the technical field of radars, in particular to an acousto-optic controlled optical phased array laser radar.
Background
The laser radar has wide application in the fields of atmospheric detection, urban surveying and mapping, ocean detection, autonomous driving, robot technology, laser television, laser three-dimensional imaging, industrial robots and the like. Among them, miniaturization, security, networking, and intelligence are challenges facing future laser radars.
Most of the laser radars on the market today are made of discrete free-space optical elements including laser, lens and external receiver, etc., and in these hardware combinations, the laser emitting unit needs to rotate to scan while oscillating, which makes the structure complex, bulky, small in scanning range, expensive and cost tens of thousands of dollars.
Therefore, solid state lidar is becoming a necessary trend for the development of lidar, and especially optical phased array lidar is the most promising one of various solid state lidar.
However, the scanning angle of the current optical phased array laser radar in the longitudinal direction is very small and depends on a very expensive tunable laser.
How to use single-wavelength laser to realize large-angle longitudinal scanning is an important problem to be solved urgently by the optical phased array laser radar.
Disclosure of Invention
In view of the above, in order to solve the above problems, the present invention provides an acousto-optic controlled optical phased array laser radar, which has the following technical scheme:
an acousto-optic modulated optical phased array lidar, comprising: the device comprises a laser light source, an optical waveguide array and an acousto-optic modulation grating;
wherein the laser light source is used for emitting laser;
the optical waveguide array is used for enabling the laser to propagate in the direction of the optical waveguide array;
the acousto-optic modulation grating is positioned on the optical waveguide array and used for modulating the grating period of the acousto-optic modulation grating through the acoustic wave frequency so as to modulate the emission angle of the laser in the longitudinal direction.
Preferably, in the above optical phased array lidar, the acousto-optic modulation grating includes: a coupling portion and a grating portion;
wherein the coupling portion overlaps the optical waveguide array, and the coupling portion is coupled with the optical waveguide array.
Preferably, in the above optical phased array lidar, the optical phased array lidar further includes: a mirror;
wherein the reflector is disposed below or above the grating portion.
Preferably, in the above optical phased array lidar, the acousto-optic modulation grating further comprises: an electrode structure;
the electrode structure is positioned above or below the acousto-optic modulation grating or respectively positioned above and below the acousto-optic modulation grating.
Preferably, in the optical phased array lidar, the electrode structure is a finger-inserted electrode with positive and negative electrodes arranged in a staggered manner;
when the electrode structures are respectively positioned above and below the acousto-optic modulation grating, the negative electrode positioned above and the positive electrode positioned below are oppositely arranged.
Preferably, in the optical phased array laser radar, the electrode structure located above the acousto-optic modulation grating is a ground electrode;
the electrode structure below the acousto-optic modulation grating is a finger electrode with positive and negative electrodes arranged in a staggered mode.
Preferably, in the above optical phased array lidar, the electrode structure is located at one end of the acousto-optic modulation grating;
or the two ends of the acousto-optic modulation grating are both provided with the electrode structures.
Preferably, in the above optical phased array lidar, the acousto-optic modulation grating further comprises: an acoustic wave absorbing structure;
the acoustic wave absorption structure is positioned at one end of the acousto-optic modulation grating, and the electrode structure is positioned at the other end of the acousto-optic modulation grating.
Preferably, in the above optical phased array lidar, the material of the acousto-optic modulation grating is an acousto-optic crystal material, a piezoelectric material or an optical elastic material.
Preferably, in the above optical phased array lidar, a material of the acousto-optic modulation grating is AlN material or LiNbO3A material.
Compared with the prior art, the invention has the following beneficial effects:
in the optical phased array laser radar provided by the invention, the acousto-optic modulation grating is positioned on the optical waveguide array, and the grating period of the acousto-optic modulation grating can be modulated through the acoustic wave frequency, so that the wavelength of incident light does not need to be adjusted, and a single-wavelength laser can be used for realizing large-angle longitudinal scanning.
The optical phased array laser radar no longer uses a tunable laser, and the cost is greatly reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an optical phased array laser radar according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another optical phased array lidar according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another optical phased array lidar according to an embodiment of the present invention;
fig. 4 is a schematic side view of a position structure of an optical waveguide array and an acousto-optic modulation grating according to an embodiment of the present invention;
fig. 5 is a schematic top view of a position structure of an optical waveguide array and an acousto-optic modulation grating according to an embodiment of the present invention;
fig. 6 is a schematic side view of the position structure of another optical waveguide array and acousto-optic modulation grating provided by the embodiment of the invention;
fig. 7 is a schematic top view of another optical waveguide array and acousto-optic modulation grating according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of a position structure for disposing a mirror according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of an electrode configuration according to an embodiment of the present invention;
FIG. 10 is a schematic side view of a position structure for disposing an electrode structure according to an embodiment of the present invention;
FIG. 11 is a schematic top view of a position structure for disposing an electrode structure according to an embodiment of the present invention;
FIG. 12 is a schematic side view of another electrode configuration according to an embodiment of the present invention;
FIG. 13 is a schematic top view of another electrode configuration according to an embodiment of the present invention;
FIG. 14 is a schematic structural diagram of another electrode configuration according to an embodiment of the present invention;
fig. 15 is a schematic diagram of a position where an acoustic wave absorbing structure is disposed according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
At present, the optical phased array laser radar realizes transverse and longitudinal two-dimensional laser beam scanning, and the transverse scanning is mainly controlled by a phase, the wavelength is adjusted, and the longitudinal scanning is realized by grating scattering.
Generally, the range of the transverse scanning angle is large, the range of the longitudinal scanning angle is small, and the wavelength can be adjusted to 100nm to achieve the adjustment range of 10 degrees. The main reason for this is that the grating period is fixed.
Based on the above problem, the application provides an optics phased array laser radar, perfect solution the problem that exists among the prior art.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an optical phased array lidar according to an embodiment of the present invention, where the optical phased array lidar includes: a laser light source 11, an optical waveguide array 12 and an acousto-optic modulation grating 13;
wherein, the laser light source 11 is used for emitting laser;
the optical waveguide array 12 is used for enabling the laser to propagate in the direction of the optical waveguide array 12;
the acousto-optic modulation grating 13 is located on the optical waveguide array 12, and is configured to modulate a grating period of the acousto-optic modulation grating 13 through an acoustic wave frequency, so as to modulate an emission angle of the laser in a longitudinal direction.
The optical waveguide array can have the function of thermo-optic or electro-optic phase modulation, so that the laser can realize transverse scanning.
In this embodiment, the acousto-optic modulation grating in the optical phased array lidar is located on the optical waveguide array, and the grating period of the acousto-optic modulation grating can be modulated through the acoustic frequency, so that the wavelength of incident light does not need to be adjusted, and large-angle longitudinal scanning can be realized by using a single-wavelength laser.
The optical phased array laser radar no longer uses a tunable laser, and the cost is greatly reduced.
Further, based on the above embodiment of the present invention, referring to fig. 2, fig. 2 is a schematic structural diagram of another optical phased array lidar according to an embodiment of the present invention, where the optical phased array lidar further includes: the optical splitter 21;
the optical beam splitter 21 is configured to split the laser light to be incident into a plurality of optical waveguide arrays.
Further, based on the above-mentioned embodiment of the present invention, referring to fig. 3, fig. 3 is a schematic structural diagram of another optical phased array lidar according to an embodiment of the present invention, where the optical phased array lidar further includes: an optical phase controller 31;
wherein the optical phase controller 31 is configured to control the phase of the optical waveguide array.
Further, based on the above-mentioned embodiment of the present invention, referring to fig. 4, fig. 4 is a schematic side view of a position structure of an optical waveguide array and an acousto-optic modulation grating according to an embodiment of the present invention.
Referring to fig. 5, fig. 5 is a schematic top view illustrating a position structure of an optical waveguide array and an acousto-optic modulation grating according to an embodiment of the present invention.
Wherein, the whole acousto-optic modulation grating 13 covers the optical waveguide array 12.
Further, based on the above-mentioned embodiment of the present invention, referring to fig. 6, fig. 6 is a schematic side view of another optical waveguide array and an acoustic optical modulation grating according to an embodiment of the present invention.
Referring to fig. 7, fig. 7 is a schematic top view illustrating a position structure of an optical waveguide array and an acousto-optic modulation grating according to another embodiment of the present invention.
The acousto-optic modulation grating 13 includes: a coupling portion 131 and a grating portion 132;
wherein the coupling part overlaps with the optical waveguide array, and the coupling part 131 is coupled with the optical waveguide array 12.
In this embodiment, when the acousto-optic modulation grating completely covers the optical waveguide array, only part of light is coupled with the grating, and the grating does not play a strong role, so that the acousto-optic modulation grating is divided into a coupling part and a grating part, wherein the coupling part is an acousto-optic crystal optical waveguide structure, and light is transmitted to the grating part by the coupling mode between optical waveguides, so that the light and the grating can be more fully coupled.
Further, based on the above embodiment of the present invention, referring to fig. 8, fig. 8 is a schematic diagram of a position structure for setting a mirror according to an embodiment of the present invention, where the optical phased array laser radar further includes: a mirror;
wherein the reflecting mirror 81 is disposed below or above the grating portion 132.
In this embodiment, when the projection of the grating portion 132 does not cover the optical waveguide array in the direction perpendicular to the surface of the optical waveguide array 12, the light is scattered to two spaces, i.e., the upper and lower spaces, but in practical applications, only one space is needed, and therefore, the reflector 81 is disposed on one side of the backlight surface to improve the light extraction rate.
Further, based on the above embodiment of the present invention, referring to fig. 9, fig. 9 is a schematic structural diagram of a structure for disposing an electrode according to an embodiment of the present invention.
The acousto-optic modulation grating 13 further includes: an electrode structure 91;
the electrode structure is positioned above or below the acousto-optic modulation grating or respectively positioned above and below the acousto-optic modulation grating.
It should be noted that fig. 9 only illustrates the electrode structures respectively located above and below the acousto-optic modulation grating.
In this embodiment, an electric field is applied to both the upper side and the lower side of the acousto-optic modulation grating, so that the electric field can enter the acousto-optic modulation grating more fully.
Further, based on the above embodiments of the present invention, referring to fig. 10, fig. 10 is a schematic side view of a position structure for disposing an electrode structure according to an embodiment of the present invention.
Referring to fig. 11, fig. 11 is a schematic top view of a position structure for disposing an electrode structure according to an embodiment of the present invention.
The electrode structure 91 is a finger-inserting electrode with positive and negative electrodes arranged in a staggered manner;
when the electrode structures 91 are respectively located above and below the acousto-optic modulation grating 13, the negative electrode located above is disposed opposite to the positive electrode located below.
In this embodiment, the upper electrode and the lower electrode are both provided with finger-inserted electrodes in which positive and negative electrodes are arranged alternately, and the negative electrode of the upper electrode is arranged opposite to the positive electrode of the lower electrode in the direction perpendicular to the grating portion, so that the electric field can enter the acousto-optic modulation grating more sufficiently to a great extent.
Further, based on the above-mentioned embodiment of the present invention, referring to fig. 12, fig. 12 is a schematic side view of another position structure for disposing an electrode structure according to the embodiment of the present invention.
Referring to fig. 13, fig. 13 is a schematic top view of another position structure for disposing an electrode structure according to an embodiment of the present invention.
The electrode structure above the acousto-optic modulation grating 13 is a grounding electrode 121;
the electrode structure below the acousto-optic modulation grating 13 is a finger electrode with positive and negative electrodes arranged in a staggered manner.
In this embodiment, in the case where the electric field is made to enter the acousto-optic modulation grating more sufficiently, the manufacturing process can be simplified to a great extent by setting the upper electrode as the front surface ground electrode.
Further, based on the above-mentioned embodiments of the present invention, as shown in the schematic position diagrams of the electrode structures shown in fig. 9-13, the electrode structure is located at one end of the acousto-optic modulation grating.
Referring to fig. 14, fig. 14 is a schematic structural diagram of another electrode configuration according to an embodiment of the present invention.
The electrode structures 91 are arranged at two ends of the acousto-optic modulation grating.
In the embodiment of the invention, the light waves in two directions are relatively transmitted to form stronger standing waves, so that the grating effect is more obvious, the length of the grating is favorably reduced, and the size of the whole device is reduced.
Further, based on the above-mentioned embodiment of the present invention, referring to fig. 15, fig. 15 is a schematic position diagram of an acoustic wave absorbing structure according to an embodiment of the present invention.
The acousto-optic modulation grating further comprises: an acoustic wave absorbing structure 15;
the acoustic wave absorbing structure 15 is located at one end of the acousto-optic modulation grating 13, and the electrode structure 91 is located at the other end of the acousto-optic modulation grating 13.
In this embodiment, by providing the acoustic wave absorbing structure 15 at one end of the acousto-optic modulation grating 13 and the electrode structure 91 at the other end, the active area of the acousto-optic modulation grating can be defined.
Further, based on the above embodiments of the present invention, the material of the acousto-optic modulation grating is an acousto-optic crystal material, a piezoelectric material, or an optical elastic material.
Optionally, the material of the acousto-optic modulation grating is AlN material or LiNbO3A material.
As can be seen from the above description, in the optical phased array lidar provided by the present invention, the acousto-optic modulation grating is located on the optical waveguide array, and the grating period of the acousto-optic modulation grating can be modulated by the acoustic frequency, so that the wavelength of the incident light does not need to be adjusted, and a large-angle longitudinal scanning can be achieved by using a single-wavelength laser.
The optical phased array laser radar no longer uses a tunable laser, and the cost is greatly reduced.
The acousto-optic controlled optical phased array laser radar provided by the invention is described in detail, a specific example is applied in the description to explain the principle and the implementation mode of the invention, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
It should be noted that, in the present specification, the embodiments are all described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include or include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. An acousto-optic modulated optical phased array lidar, comprising: the device comprises a laser light source, an optical waveguide array and an acousto-optic modulation grating;
wherein the laser light source is used for emitting laser;
the optical waveguide array is used for enabling the laser to propagate in the direction of the optical waveguide array;
the acousto-optic modulation grating is positioned on the optical waveguide array and used for modulating the grating period of the acousto-optic modulation grating through the acoustic wave frequency so as to modulate the emission angle of the laser in the longitudinal direction;
the acousto-optic modulation grating includes: a coupling portion and a grating portion; the coupling part is of an acousto-optic crystal optical waveguide structure;
wherein the coupling portion overlaps the optical waveguide array, and the coupling portion couples with the optical waveguide array;
the optical phased array lidar further comprising: a mirror;
the reflector is arranged below or above the grating part, so that light is prevented from being scattered to an upper space and a lower space when the projection of the grating part does not cover the optical waveguide array in the direction perpendicular to the surface of the optical waveguide array.
2. The optical phased array lidar of claim 1, wherein the acousto-optic modulation grating further comprises: an electrode structure;
the electrode structure is positioned above or below the acousto-optic modulation grating or respectively positioned above and below the acousto-optic modulation grating.
3. The optical phased array lidar according to claim 2, wherein said electrode structure is a interdigitated electrode having alternating positive and negative electrodes;
when the electrode structures are respectively positioned above and below the acousto-optic modulation grating, the negative electrode positioned above and the positive electrode positioned below are oppositely arranged.
4. The optical phased array lidar of claim 2, wherein the electrode structure above the acousto-optic modulation grating is a ground electrode;
the electrode structure below the acousto-optic modulation grating is a finger electrode with positive and negative electrodes arranged in a staggered mode.
5. The optical phased array lidar of claim 2, wherein the electrode structure is located at one end of the acousto-optic modulation grating;
or the two ends of the acousto-optic modulation grating are both provided with the electrode structures.
6. The optical phased array lidar of claim 2, wherein said acousto-optic modulation grating further comprises: an acoustic wave absorbing structure;
the acoustic wave absorption structure is positioned at one end of the acousto-optic modulation grating, and the electrode structure is positioned at the other end of the acousto-optic modulation grating.
7. The optical phased array lidar according to claim 1, wherein the material of the acousto-optic modulation grating is an acousto-optic crystal material or a piezoelectric material or an opto-elastic material.
8. The optical phased array lidar according to claim 1, wherein the material of the acousto-optic modulation grating is AlN material or LiNbO3A material.
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