CN110376592A - A kind of optical phased array laser radar of acousto-optic regulation - Google Patents

A kind of optical phased array laser radar of acousto-optic regulation Download PDF

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Publication number
CN110376592A
CN110376592A CN201910666841.9A CN201910666841A CN110376592A CN 110376592 A CN110376592 A CN 110376592A CN 201910666841 A CN201910666841 A CN 201910666841A CN 110376592 A CN110376592 A CN 110376592A
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CN
China
Prior art keywords
acousto
laser radar
phased array
modulation grating
grating
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CN201910666841.9A
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CN110376592B (en
Inventor
宋俊峰
郜峰利
李雪妍
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Jilin University
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Jilin University
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Priority to CN201910666841.9A priority Critical patent/CN110376592B/en
Publication of CN110376592A publication Critical patent/CN110376592A/en
Priority to PCT/CN2020/096752 priority patent/WO2021012847A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning

Abstract

This application provides a kind of optical phased array laser radars of acousto-optic regulation, and the optical phased array laser radar includes: laser light source, optical waveguide array harmony light modulation grating;Wherein, the laser light source is for launching laser;The optical waveguide array is for propagating the laser on the direction of the optical waveguide array;The acousto-optic modulation grating is located on the optical waveguide array, for modulating the screen periods of the acousto-optic modulation grating by frequency of sound wave, to modulate the laser in the launch angle of longitudinal direction.I.e. acousto-optic modulation grating is located on the optical waveguide array, and the screen periods of the acousto-optic modulation grating can be modulated by frequency of sound wave, the wavelength for adjusting incident light is thus no longer needed to, to can realize wide-angle longitudinal scanning using single wavelength laser.The optical phased array laser radar does not use tunable laser, and cost substantially reduces.

Description

A kind of optical phased array laser radar of acousto-optic regulation
Technical field
The present invention relates to Radar Technology fields, more specifically to a kind of optical phased array laser thunder of acousto-optic regulation It reaches.
Background technique
Laser radar Atmospheric Survey, Tactics of Urban Surveying, hydrospace detection, autonomous driving, robot technology, laser television, swash The fields such as light three-dimensional imaging and industrial robot are all widely used.Wherein, miniaturization, safe, networking and intelligence It is the following laser radar facing challenges.
It is still made of discrete free space optical elements used by most of laser radars on Vehicles Collected from Market, including Laser, camera lens and external receiver etc., in these hardware combinations, laser emission element also needs to rotate while oscillation It is scanned, this makes, and its structure is complicated, bulky, scanning range is small, and expensive, and cost reaches tens of thousands of dollars.
Therefore, solid-state laser radar becomes the inexorable trend of laser radar development, especially optical phased array laser radar It is one most promising in various solid-state laser radars.
But optical phased array laser radar is in the scanning angle very little of longitudinal direction at present, and Price-dependent is very Expensive tunable laser.
It so, how the use of Single wavelength laser realization wide-angle longitudinal scanning to be that optical phased array laser radar is badly in need of solving A major issue.
Summary of the invention
In view of this, to solve the above problems, the present invention provides a kind of optical phased array laser radar of acousto-optic regulation, skill Art scheme is as follows:
A kind of optical phased array laser radar of acousto-optic regulation, the optical phased array laser radar include: laser light source, Optical waveguide array harmony light modulation grating;
Wherein, the laser light source is for launching laser;
The optical waveguide array is for propagating the laser on the direction of the optical waveguide array;
The acousto-optic modulation grating is located on the optical waveguide array, for modulating the acousto-optic modulation by frequency of sound wave The screen periods of grating, to modulate the laser in the launch angle of longitudinal direction.
Preferably, in above-mentioned optical phased array laser radar, the acousto-optic modulation grating includes: coupling unit and grating Part;
Wherein, the coupling unit has overlapping with the optical waveguide array, the coupling unit and the optical waveguide array Coupling.
Preferably, in above-mentioned optical phased array laser radar, the optical phased array laser radar further include: reflection Mirror;
Wherein, the reflecting mirror is set to the below or above of the grating part.
Preferably, in above-mentioned optical phased array laser radar, the acousto-optic modulation grating further include: electrode structure;
Above and below the electrode structure is located above or below the acousto-optic modulation grating or is located at.
Preferably, in above-mentioned optical phased array laser radar, the electrode structure, which is that positive and negative electrode is staggered, to be inserted Refer to electrode;
When above and below the electrode structure is located at the acousto-optic modulation grating, the negative electrode that is located above It is oppositely arranged with underlying positive electrode.
Preferably, the electrode structure in above-mentioned optical phased array laser radar, above the acousto-optic modulation grating For grounding electrode;
Electrode structure below the acousto-optic modulation grating is the staggered slotting finger electrode of positive and negative electrode.
Preferably, in above-mentioned optical phased array laser radar, the electrode structure is located at the acousto-optic modulation grating One end;
Or, the both ends of the acousto-optic modulation grating are provided with the electrode structure.
Preferably, in above-mentioned optical phased array laser radar, the acousto-optic modulation grating further include: wave absorption knot Structure;
Wherein, the wave absorption structure is located at one end of the acousto-optic modulation grating, and the electrode structure is located at described The other end of acousto-optic modulation grating.
Preferably, in above-mentioned optical phased array laser radar, the material of the acousto-optic modulation grating is acousto-optic crsytal material Material or piezoelectric material or elastooptic mateiral.
Preferably, in above-mentioned optical phased array laser radar, the material of the acousto-optic modulation grating be AlN material or LiNbO3Material.
Compared to the prior art, what the present invention realized has the beneficial effect that
In a kind of optical phased array laser radar provided by the invention, acousto-optic modulation grating is located at the optical waveguide array On, and the screen periods of the acousto-optic modulation grating can be modulated by frequency of sound wave, it thus no longer needs to adjust incident light Wavelength, to can realize wide-angle longitudinal scanning using single wavelength laser.
The optical phased array laser radar does not use tunable laser, and cost substantially reduces.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of structural schematic diagram of optical phased array laser radar provided in an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of another optical phased array laser radar provided in an embodiment of the present invention;
Fig. 3 is the structural schematic diagram of another optical phased array laser radar provided in an embodiment of the present invention;
Fig. 4 is a kind of positional structure side view signal of optical waveguide array harmony light modulation grating provided in an embodiment of the present invention Figure;
Fig. 5 is that a kind of positional structure of optical waveguide array harmony light modulation grating provided in an embodiment of the present invention overlooks signal Figure;
Fig. 6 is that the positional structure side view of another optical waveguide array harmony light modulation grating provided in an embodiment of the present invention is shown It is intended to;
Fig. 7 is that the positional structure vertical view of another optical waveguide array harmony light modulation grating provided in an embodiment of the present invention is shown It is intended to;
Fig. 8 is a kind of positional structure schematic diagram that reflecting mirror is arranged provided in an embodiment of the present invention;
Fig. 9 is a kind of structural schematic diagram that electrode structure is arranged provided in an embodiment of the present invention;
Figure 10 is a kind of positional structure schematic side view that electrode structure is arranged provided in an embodiment of the present invention;
Figure 11 is a kind of positional structure schematic top plan view that electrode structure is arranged provided in an embodiment of the present invention;
Figure 12 is the positional structure schematic side view of another setting electrode structure provided in an embodiment of the present invention;
Figure 13 is the positional structure schematic top plan view of another setting electrode structure provided in an embodiment of the present invention;
Figure 14 is the structural schematic diagram of another setting electrode structure provided in an embodiment of the present invention;
Figure 15 is a kind of position view that wave absorption structure is arranged provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Optical phased array laser radar realizes horizontal and vertical two-dimensional laser beam scanning at present, mainly by phase controlling Transversal scanning, adjusting wavelength simultaneously realize longitudinal scanning by grating scattering.
Generally laterally scanning angle range is larger, and longitudinal scanning angle very little, wavelength regulation 100nm just may be implemented 10 The adjustable range of degree.The main reason is that screen periods are fixed and invariable.
Based on the above issues, this application provides a kind of optical phased array laser radar, the prior art is perfectly solved The problem of.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real Applying mode, the present invention is described in further detail.
With reference to Fig. 1, Fig. 1 is a kind of structural schematic diagram of optical phased array laser radar provided in an embodiment of the present invention, institute Stating optical phased array laser radar includes: laser light source 11,12 harmony light modulation grating 13 of optical waveguide array;
Wherein, the laser light source 11 is for launching laser;
The optical waveguide array 12 is for propagating the laser on the direction of the optical waveguide array 12;
The acousto-optic modulation grating 13 is located on the optical waveguide array 12, for modulating the acousto-optic by frequency of sound wave The screen periods of modulated grating 13, to modulate the laser in the launch angle of longitudinal direction.
The optical waveguide array can have the function of hot light or Electro-optical Modulation phase, so that laser realizes transversal scanning.
In this embodiment, acousto-optic modulation grating is located on the optical waveguide array in the optical phased array laser radar, And the screen periods that can modulate the acousto-optic modulation grating by frequency of sound wave thus no longer need to the wave for adjusting incident light It is long, to can realize wide-angle longitudinal scanning using single wavelength laser.
The optical phased array laser radar does not use tunable laser, and cost substantially reduces.
Further, it is based on the above embodiment of the present invention, with reference to Fig. 2, Fig. 2 is another light provided in an embodiment of the present invention Learn the structural schematic diagram of phased-array laser radar, the optical phased array laser radar further include: beam splitter 21;
Wherein, the beam splitter 21 is used to the laser carrying out light-splitting processing, to be incident to numerous optical waveguides In array.
Further, it is based on the above embodiment of the present invention, with reference to Fig. 3, Fig. 3 is another light provided in an embodiment of the present invention Learn the structural schematic diagram of phased-array laser radar, the optical phased array laser radar further include: optical phase controller 31;
Wherein, the optical phase controller 31 is used to control the phase of the optical waveguide array.
Further, it is based on the above embodiment of the present invention, with reference to Fig. 4, Fig. 4 is a kind of light wave provided in an embodiment of the present invention Lead the positional structure schematic side view of array harmony light modulation grating.
With reference to Fig. 5, Fig. 5 is a kind of positional structure of optical waveguide array harmony light modulation grating provided in an embodiment of the present invention Schematic top plan view.
Wherein, the acousto-optic modulation grating 13 is all covered on the optical waveguide array 12.
Further, it is based on the above embodiment of the present invention, with reference to Fig. 6, Fig. 6 is another light provided in an embodiment of the present invention The positional structure schematic side view of waveguide array harmony light modulation grating.
With reference to Fig. 7, Fig. 7 is the position knot of another optical waveguide array harmony light modulation grating provided in an embodiment of the present invention Structure schematic top plan view.
The acousto-optic modulation grating 13 includes: coupling unit 131 and grating part 132;
Wherein, the coupling unit has overlapping with the optical waveguide array, the coupling unit 131 and the optical waveguide battle array Column coupling 12.
In this embodiment, when the acousto-optic modulation grating is all covered on the optical waveguide array, only part Light is coupled with grating, and grating role is not very by force, therefore, acousto-optic modulation grating to be divided into coupling unit and grating portion Point, wherein coupling unit is acousto-optic crsytal optical waveguide structure, and light is transmitted to grating portion by the coupled modes between optical waveguide Point, thus light and grating can be enable more fully to couple.
Further, it is based on the above embodiment of the present invention, with reference to Fig. 8, Fig. 8 is a kind of setting provided in an embodiment of the present invention The positional structure schematic diagram of reflecting mirror, the optical phased array laser radar further include: reflecting mirror;
Wherein, the reflecting mirror 81 is set to the below or above of the grating part 132.
In this embodiment, on the direction on the surface perpendicular to the optical waveguide array 12, the grating part 132 Projection when not covering the optical waveguide array, light can be scattered to two spaces up and down out, still, in practical applications, only A space need to be scattered to, therefore, reflecting mirror 81 is set in the side of shady face, to improve light emission rate.
Further, it is based on the above embodiment of the present invention, with reference to Fig. 9, Fig. 9 is a kind of setting provided in an embodiment of the present invention The structural schematic diagram of electrode structure.
The acousto-optic modulation grating 13 further include: electrode structure 91;
Above and below the electrode structure is located above or below the acousto-optic modulation grating or is located at.
It should be noted that the top of the acousto-optic modulation grating is only located in attached drawing 9 to the electrode structure It is illustrated with lower section.
In this embodiment, to electric field is applied above and below the acousto-optic modulation grating, electric field can be made more to fill That divides enters acousto-optic modulation grating.
Further, it is based on the above embodiment of the present invention, with reference to Figure 10, Figure 10 is that one kind provided in an embodiment of the present invention is set Set the positional structure schematic side view of electrode structure.
With reference to Figure 11, Figure 11 is that a kind of positional structure that electrode structure is arranged provided in an embodiment of the present invention overlooks signal Figure.
The electrode structure 91 is the staggered slotting finger electrode of positive and negative electrode;
When above and below the electrode structure 91 is located at the acousto-optic modulation grating 13, what is be located above is negative Electrode is oppositely arranged with underlying positive electrode.
In this embodiment, by the way that upper electrode and lower electrode are disposed as the staggered slotting finger of positive and negative electrode Electrode, and on the direction perpendicular to the grating part, the negative electrode of the upper electrode and positive electrode of lower electrode is opposite sets It sets, electric field can be made to enter acousto-optic modulation grating more fully with high degree.
Further, it is based on the above embodiment of the present invention, with reference to Figure 12, Figure 12 is another kind provided in an embodiment of the present invention The positional structure schematic side view of electrode structure is set.
With reference to Figure 13, Figure 13 is that the positional structure of another setting electrode structure provided in an embodiment of the present invention overlooks signal Figure.
Electrode structure above the acousto-optic modulation grating 13 is grounding electrode 121;
Electrode structure positioned at 13 lower section of acousto-optic modulation grating is the staggered slotting finger electrode of positive and negative electrode.
In this embodiment, in the case where making electric field more fully enter acousto-optic modulation grating, by by upper electrode It is set as front grounding electrode, it can be with the simplification manufacturing process of high degree.
Further, it is based on the above embodiment of the present invention, electrode structure position view, described as shown in Fig. 9-Figure 13 Electrode structure is located at one end of the acousto-optic modulation grating.
With reference to Figure 14, Figure 14 is the structural schematic diagram of another setting electrode structure provided in an embodiment of the present invention.
Wherein, the both ends of the acousto-optic modulation grating are provided with the electrode structure 91.
In embodiments of the present invention, the light wave counterpropagate of both direction will form stronger standing wave, the effect of such grating Fruit will become apparent from, and advantageously reduce the length of grating, to reduce the size of entire device.
Further, it is based on the above embodiment of the present invention, with reference to Figure 15, Figure 15 is that one kind provided in an embodiment of the present invention is set Set the position view of wave absorption structure.
The acousto-optic modulation grating further include: wave absorption structure 15;
Wherein, the wave absorption structure 15 is located at one end of the acousto-optic modulation grating 13, the electrode structure 91 In the other end of the acousto-optic modulation grating 13.
In this embodiment, by the way that wave absorption structure 15, Yi Jiling is arranged in one end of the acousto-optic modulation grating 13 Electrode structure 91 is arranged in one end, can limit the working region of the acousto-optic modulation grating.
Further, be based on the above embodiment of the present invention, the material of the acousto-optic modulation grating be acoustic-optic crystal materials or Piezoelectric material or elastooptic mateiral.
Optionally, the material of the acousto-optic modulation grating is AlN material or LiNbO3Material.
As can be seen from the above description, in a kind of optical phased array laser radar provided by the invention, acousto-optic modulation grating position In on the optical waveguide array, and the screen periods of the acousto-optic modulation grating can be modulated by frequency of sound wave, thus The wavelength for no longer needing to adjust incident light, to can realize wide-angle longitudinal scanning using single wavelength laser.
The optical phased array laser radar does not use tunable laser, and cost substantially reduces.
A kind of optical phased array laser radar of acousto-optic regulation provided by the present invention is described in detail above, this Apply that a specific example illustrates the principle and implementation of the invention in text, the explanation of above example is only intended to It facilitates the understanding of the method and its core concept of the invention;At the same time, for those skilled in the art, think of according to the present invention Think, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification should not be construed as pair Limitation of the invention.
It should be noted that all the embodiments in this specification are described in a progressive manner, each embodiment weight Point explanation is the difference from other embodiments, and the same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it is corresponded to the methods disclosed in the examples, so being described relatively simple, phase Place is closed referring to method part illustration.
It should also be noted that, herein, relational terms such as first and second and the like are used merely to one Entity or operation are distinguished with another entity or operation, without necessarily requiring or implying between these entities or operation There are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant are intended to contain Lid non-exclusive inclusion, so that the element that the process, method, article or equipment including a series of elements is intrinsic, It further include either the element intrinsic for these process, method, article or equipments.In the absence of more restrictions, The element limited by sentence "including a ...", it is not excluded that in the process, method, article or equipment including the element In there is also other identical elements.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one The widest scope of cause.

Claims (10)

1. a kind of optical phased array laser radar of acousto-optic regulation, which is characterized in that the optical phased array laser radar includes: Laser light source, optical waveguide array harmony light modulation grating;
Wherein, the laser light source is for launching laser;
The optical waveguide array is for propagating the laser on the direction of the optical waveguide array;
The acousto-optic modulation grating is located on the optical waveguide array, for modulating the acousto-optic modulation grating by frequency of sound wave Screen periods, to modulate the laser in the launch angle of longitudinal direction.
2. optical phased array laser radar according to claim 1, which is characterized in that the acousto-optic modulation grating includes: Coupling unit and grating part;
Wherein, the coupling unit has overlapping with the optical waveguide array, and the coupling unit is coupled with the optical waveguide array.
3. optical phased array laser radar according to claim 2, which is characterized in that the optical phased array laser radar Further include: reflecting mirror;
Wherein, the reflecting mirror is set to the below or above of the grating part.
4. optical phased array laser radar according to claim 3, which is characterized in that the acousto-optic modulation grating also wraps It includes: electrode structure;
Above and below the electrode structure is located above or below the acousto-optic modulation grating or is located at.
5. optical phased array laser radar according to claim 4, which is characterized in that the electrode structure is positive and negative electrode Staggered slotting finger electrode;
When above and below the electrode structure is located at the acousto-optic modulation grating, the negative electrode being located above and position Positive electrode in lower section is oppositely arranged.
6. optical phased array laser radar according to claim 4, which is characterized in that be located on the acousto-optic modulation grating The electrode structure of side is grounding electrode;
Electrode structure below the acousto-optic modulation grating is the staggered slotting finger electrode of positive and negative electrode.
7. optical phased array laser radar according to claim 4, which is characterized in that the electrode structure is located at the sound One end of light modulation grating;
Or, the both ends of the acousto-optic modulation grating are provided with the electrode structure.
8. optical phased array laser radar according to claim 4, which is characterized in that the acousto-optic modulation grating also wraps It includes: wave absorption structure;
Wherein, the wave absorption structure is located at one end of the acousto-optic modulation grating, and the electrode structure is located at the acousto-optic The other end of modulated grating.
9. optical phased array laser radar according to claim 1, which is characterized in that the material of the acousto-optic modulation grating For acoustic-optic crystal materials or piezoelectric material or elastooptic mateiral.
10. optical phased array laser radar according to claim 1, which is characterized in that the material of the acousto-optic modulation grating Material is AlN material or LiNbO3Material.
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PCT/CN2020/096752 WO2021012847A1 (en) 2019-07-23 2020-06-18 Acousto-optic regulated and controlled optical phased-array laser radar

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