CN110365916B - Array reflection type microscopic image acquisition system - Google Patents
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- CN110365916B CN110365916B CN201910743162.7A CN201910743162A CN110365916B CN 110365916 B CN110365916 B CN 110365916B CN 201910743162 A CN201910743162 A CN 201910743162A CN 110365916 B CN110365916 B CN 110365916B
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- 238000005286 illumination Methods 0.000 claims abstract description 26
- 230000005284 excitation Effects 0.000 claims abstract description 16
- 239000011159 matrix material Substances 0.000 claims description 4
- 238000001000 micrograph Methods 0.000 claims 5
- 239000000523 sample Substances 0.000 abstract description 27
- 238000001514 detection method Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 239000012472 biological sample Substances 0.000 abstract description 4
- 238000000018 DNA microarray Methods 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 238000003384 imaging method Methods 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/90—Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Optics & Photonics (AREA)
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- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
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Abstract
The invention discloses an array reflection type microscopic image acquisition system which comprises a microscopic camera module array and a receiving end, wherein the microscopic camera module array is positioned right above a sample stage; the microscopic camera module array comprises a plurality of microscopic camera modules distributed in an array, each microscopic camera module comprises a first lens group, a reflective illumination structure, an excitation light source, a second lens group and an image sensor, the first lens group and the second lens group are symmetrically arranged, the image sensor is electrically connected with the receiving end, the excitation light source is located on one side of the reflective illumination structure, and the light source emitted by the excitation light source irradiates on the reflective illumination structure. The invention can collect multiple areas of the sample at the same time, improves the detection speed, and is suitable for detecting opaque large-area samples such as test silicon chips, semiconductor microscopes, biochips, thick biological samples and the like.
Description
Technical Field
The invention belongs to the technical field of machine vision detection, and particularly relates to an array reflection type microscopic image acquisition system which can be applied to high-flux microscopic imaging of semiconductor wafers and biological samples.
Background
The micro imaging system is an optical system or instrument capable of amplifying and imaging micro objects or details which are difficult to observe or distinguish by human eyes so as to extract micro structure information, and related products are widely used in the fields of experimental research, production and manufacturing and the like. As related disciplines have advanced in the microscopic field, many front-end theory-based microscopy imaging systems have broken through the optical imaging limits, moving toward higher resolutions.
However, in practical applications, conventional microscopic imaging systems are limited to optical structures, and optical magnification must be achieved by means of high-resolution objective lenses having small angles of view (within 3 °) in combination with long conjugate distances, resulting in bulky and complex optical systems, which are expensive. Meanwhile, due to the small field of view, the traditional microscope system needs to be realized by adopting a scanning splicing method when a large sample is imaged, the related equipment is introduced to make the manufacturing cost more expensive, and the precise structure of the microscope system during working can be more easily influenced by external factors such as vibration, temperature and the like. Again, the mode of operation of scan stitching results in long imaging times and lower efficiency for large area samples like semiconductor wafers.
In summary, the conventional microscope is generally huge in size and high in cost, and has a complicated imaging process for a large sample, and is long in time consumption, so that the requirements of the conventional semiconductor and biological sample microscopic detection are difficult to meet.
In summary, the realization of a large-sample microscopic imaging system with large field of view, high resolution, strong stability, large flux and low cost is a problem to be solved urgently and has high practical value.
Disclosure of Invention
The invention mainly solves the technical problem of providing an array reflection type microscopic image acquisition system which can simultaneously acquire a plurality of areas of a sample, improves the detection speed and is suitable for detecting opaque large-area samples such as test silicon chips, semiconductor microscopes, biochips, thick biological samples and the like.
In order to solve the technical problems, the invention adopts a technical scheme that: the array reflection type microscopic image acquisition system comprises a microscopic camera module array and a receiving end, wherein the microscopic camera module array is positioned right above a sample table;
the microscopic camera module array comprises a plurality of microscopic camera modules distributed in an array, each microscopic camera module comprises a first lens group, a reflective illumination structure, an excitation light source, a second lens group and an image sensor, the first lens group and the second lens group are symmetrically arranged, the reflective illumination structure is positioned between the first lens group and the second lens group, the first lens group is positioned between the reflective illumination structure and the sample table, the second lens group is positioned between the reflective illumination structure and the image sensor, the image sensor is electrically connected with the receiving end, the excitation light source is positioned on one side of the reflective illumination structure, and the light source emitted by the excitation light source irradiates on the reflective illumination structure.
The invention adopts the further technical scheme for solving the technical problems that:
Further, the second lens group includes at least two microlenses, the size of the microlens near the image sensor being largest, and the size of the microlens far from the image sensor being smallest; the first lens group comprises at least two micro lenses, the micro lens close to the image sensor has the smallest size, and the micro lens far away from the image sensor has the largest size; the size of the micro lens is 0.5-15mm in diameter.
Further, the arrangement mode of the plurality of microscopic camera modules is linear array side by side arrangement, matrix arrangement or concentric circle arrangement.
Further, the focal plane of the second lens group coincides with the receiving end face of the image sensor, the focal length of the second lens group is 1-3mm, and the F number of the second lens group is smaller than 5.
Further, the focal length of the first lens group is 1-6mm.
Further, the pixel size of the image sensor is 0.8-2.5 μm.
Further, the image sensor is a CMOS image sensor or a CCD image sensor.
Further, the reflective illumination structure is a half-transparent half-reflective prism.
Further, the excitation light source is a laser light source, an LED light source or a gas light source.
The invention has the beneficial effects that:
When shooting, a plurality of large-view-field high-resolution miniature microscopic camera modules can be connected together to form an array structure, so that a plurality of microscopic camera modules can be used for microscopic imaging of samples at the same time, thereby realizing high-resolution and large-view-field high-flux microscopic imaging of large-area samples, and the method is specifically characterized in that:
in each micro-camera module, the size of a micro-lens close to the sample in the first lens group is the largest, and the size of a micro-lens close to the image sensor is the smallest, so that the micro-camera module has a large imaging field of view by coupling the optical information of the sample in a large front field of view range into an optical path; the ratio of the focal length of the second lens group to the focal length of the first lens group is the optical magnification of microscopic imaging, and the magnification of 0.5X-8X can be realized by configuring the focal lengths of the two lens groups; the first lens group and the second lens group are short-focal-length optical lens groups, so that the size is small, and the first lens group and the second lens group can be used as microscopic camera modules for array arrangement; the image sensor is an image sensor with a small pixel size, so that high sample resolution can be realized under a small optical magnification;
The structural design of an array formed by a plurality of microscopic imaging modules enables all the imaging modules to cover all the interested areas on a large-area sample as much as possible, and can assist in realizing non-blind area microscopic imaging of the sample by moving a sample table in a small range, so that a receiving end can process all sub-images into complete images, and microscopic detection efficiency of the sample is improved;
and the microscopic image collected by each microscopic camera module can be independently processed and the result is sent to a receiving end for analysis by synthesis, so that the information collection efficiency and the scanning efficiency of the invention are higher.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention (for example, a matrix distribution);
FIG. 2 is a schematic diagram of a structure of an embodiment 1 of the present invention (the first lens group and the second lens group each include two microlenses);
FIG. 3 is a schematic diagram of a structure of an embodiment 2 of the present invention (the first lens group and the second lens group each include three microlenses);
fig. 4 is a schematic structural view of embodiment 3 of the present invention (the first lens group includes two microlenses, and the second lens group includes three microlenses);
fig. 5 is a schematic structural view of embodiment 4 of the present invention (the first lens group includes three microlenses, and the second lens group includes two microlenses);
the parts in the drawings are marked as follows:
The device comprises a microscopic camera module array 1, a first lens group 11, a reflective illumination structure 12, a second lens group 13, an image sensor 14, a receiving end 2, an excitation light source 3 and a sample stage 4.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making clear and defining the scope of the present invention.
Example 1: an array reflection type microscopic image acquisition system is shown in fig. 1 and 2, and comprises a microscopic camera module array 1 and a receiving end 2, wherein the microscopic camera module array is positioned right above a sample table 4;
The micro-camera module array comprises a plurality of micro-camera modules distributed in an array, each micro-camera module comprises a first lens group 11, a reflective illumination structure 12, an excitation light source 3, a second lens group 13 and an image sensor 14, the first lens group and the second lens group are symmetrically arranged, the reflective illumination structure is positioned between the first lens group and the second lens group, the first lens group is positioned between the reflective illumination structure and the sample table, the second lens group is positioned between the reflective illumination structure and the image sensor, the image sensor is electrically connected with the receiving end, the excitation light source is positioned on one side of the reflective illumination structure, the light source emitted by the excitation light source irradiates on the reflective illumination structure, and the micro-camera modules are all fixed on the same frame.
The second lens group comprises two micro lenses, wherein the micro lens close to the image sensor has the largest size, and the micro lens far away from the image sensor has the smallest size; the first lens group comprises two micro lenses, the micro lens close to the image sensor has the smallest size, and the micro lens far away from the image sensor has the largest size; the size of the micro lens is 0.5-15mm in diameter.
The arrangement mode of the microscopic camera modules is linear array side by side arrangement, matrix arrangement or concentric circle arrangement.
The arrangement interval of the microscopic camera modules can be adjusted according to the characteristic distribution rule of the samples.
The focal plane of the second lens group coincides with the receiving end face of the image sensor, the focal length of the second lens group is 1-3mm, and the F (aperture) number of the second lens group is smaller than 5.
The focal length of the first lens group is 1-6mm.
The pixel size of the image sensor is 0.8-2.5 μm.
The image sensor is a CMOS image sensor or a CCD image sensor.
The reflective illumination structure is a semi-transparent semi-reflective prism.
The excitation light source is a laser light source, an LED light source or a gas light source.
The receiving end is a computer or a mobile phone.
Example 2: an array reflection type microscopic image acquisition system, as shown in fig. 1 and 3, the second lens group comprises three micro lenses, wherein the micro lenses close to the image sensor have the largest size, and the micro lenses far away from the image sensor have the smallest size; the first lens group includes three microlenses, the size of the microlens close to the image sensor is smallest, and the size of the microlens far from the image sensor is largest.
Example 3: an array reflection type microscopic image acquisition system, as shown in fig. 1 and 4, the second lens group comprises three micro lenses, wherein the micro lenses close to the image sensor have the largest size, and the micro lenses far away from the image sensor have the smallest size; the first lens group comprises two micro lenses, the micro lens close to the image sensor has the smallest size, and the micro lens far away from the image sensor has the largest size.
Example 4: an array reflection type microscopic image acquisition system, as shown in fig. 1 and 5, the second lens group comprises two micro lenses, wherein the micro lenses close to the image sensor have the largest size, and the micro lenses far away from the image sensor have the smallest size; the first lens group includes three microlenses, the size of the microlens close to the image sensor is smallest, and the size of the microlens far from the image sensor is largest.
The working principle of the invention is as follows:
When the microscopic system is used, all components in the microscopic system are built, the microscopic camera modules are arranged into an array according to the shape of a large-area sample, and the heights of the microscopic camera modules are adjusted in advance through standard plane sample imaging. When an actual sample is tested, the sample to be tested is placed on a sample table, a power supply is turned on, each microscopic module image is observed from a receiving end, fine adjustment focusing is realized by manually adjusting the height and levelness of the sample or by adjusting the height and levelness of the sample through an electric displacement table, the brightness of an illumination system is adjusted, the observed image is clearer, and the obtained image is stored at the receiving end. If no blind area microscopic imaging of the whole surface of the sample is required, small area scanning in the XY direction can be realized through an electric XY displacement table, and then the microscopic imaging result of the whole area of the sample can be obtained through image stitching.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the present invention and the accompanying drawings, or direct or indirect application in other related technical fields, are included in the scope of the present invention.
Claims (6)
1. An array reflection type microscopic image acquisition system is characterized in that: the device comprises a microscopic camera module array (1) and a receiving end (2), wherein the microscopic camera module array is positioned right above a sample table (4);
The micro-camera module array comprises a plurality of micro-camera modules distributed in an array, each micro-camera module comprises a first lens group (11), a reflective illumination structure (12), an excitation light source (3), a second lens group (13) and an image sensor (14), the first lens group and the second lens group are symmetrically arranged, the reflective illumination structure is positioned between the first lens group and the second lens group, the first lens group is positioned between the reflective illumination structure and the sample table, the second lens group is positioned between the reflective illumination structure and the image sensor, the image sensor is electrically connected with the receiving end, the excitation light source is positioned at one side of the reflective illumination structure, and the light source emitted by the excitation light source irradiates on the reflective illumination structure;
The second lens group comprises at least two micro lenses, wherein the micro lens closest to the image sensor has the largest size, and the micro lens farthest from the image sensor has the smallest size; the first lens group comprises at least two micro lenses, the micro lens closest to the image sensor has the smallest size, and the micro lens farthest from the image sensor has the largest size; the size of the micro lens is 0.5-15mm in diameter;
the focal plane of the second lens group is overlapped with the receiving end face of the image sensor, the focal length of the second lens group is 1-3mm, and the F number of the second lens group is smaller than 5;
The focal length of the first lens group is 1-6mm.
2. The array-reflective microscopy image acquisition system of claim 1, wherein: the arrangement mode of the microscopic camera modules is linear array side by side arrangement, matrix arrangement or concentric circle arrangement.
3. The array-reflective microscopy image acquisition system of claim 1, wherein: the pixel size of the image sensor is 0.8-2.5 μm.
4. The array-reflective microscopy image acquisition system of claim 1, wherein: the image sensor is a CMOS image sensor or a CCD image sensor.
5. The array-reflective microscopy image acquisition system of claim 1, wherein: the reflective illumination structure is a semi-transparent semi-reflective prism.
6. The array-reflective microscopy image acquisition system of claim 1, wherein: the excitation light source is a laser light source, an LED light source or a gas light source.
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