CN109061865A - It is a kind of can auto-focusing more multiplying power microscopic structures - Google Patents
It is a kind of can auto-focusing more multiplying power microscopic structures Download PDFInfo
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- CN109061865A CN109061865A CN201811096605.XA CN201811096605A CN109061865A CN 109061865 A CN109061865 A CN 109061865A CN 201811096605 A CN201811096605 A CN 201811096605A CN 109061865 A CN109061865 A CN 109061865A
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- lens barrel
- sample stage
- power lens
- low power
- high power
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses it is a kind of can auto-focusing more multiplying power microscopic structures, low power lens barrel and high power lens barrel are installed in lens cone frame, low power lens barrel and high power lens barrel are each perpendicular to sample stage, the end of low power lens barrel and high power lens barrel is mounted on camera, the lens barrel end of low power lens barrel is equipped with spectroscope, the lens barrel end of high power lens barrel is equipped with reflecting mirror, object lens are installed below spectroscope, object lens are mounted on objective lens support, objective lens support connects motor, sample stage is equipped with below object lens, reflective system source is set to sample stage upper side, transmissive system light source is set to below sample stage.The beneficial effects of the invention are as follows the images that can obtain the two or more multiplying powers of height simultaneously, greatly save imaging time.
Description
Technical field
The invention belongs to microscope and microscope imaging technical field, be related to it is a kind of can precisely auto-focusing and support
Multiple enlargement ratios shoot microscopic structure design simultaneously.
Background technique
Existing micro- beam scanner system needs to shoot multiple amplification factors (such as 20x and 40x).It is varifocal aobvious
Micro mirror is generally required when different enlargement ratios take figure manually or electrically to be switched, when needing to carry out multiple enlargement ratios to sample to sweep
When retouching, then must each multiplying power individually scan, lead to the problem that sweep time is too long.
Focusing mode generally uses the mobile focusing mode of sample stage to carry out, and manually or automatically moves up and down to sample stage
Focusing, object lens, lens barrel and camera position are kept fixed constant.Since the control of sample stage height generally uses gear or screw rod control
System, precision is 100 microns, for the lower depth of field (< 10 microns, such as biologic slice, semiconductor chip, micro-nano device)
Application scenarios cannot achieve accurate auto-focusing.The mobile motor of control sample stage is transported since the heavier also difficulty of sample stage reaches high speed
Turn and realize the function of focusing.
Summary of the invention
The purpose of the present invention is to provide it is a kind of can auto-focusing more multiplying power microscopic structures, beneficial effects of the present invention
It is the image that can obtain the two or more multiplying powers of height simultaneously, greatlys save imaging time.
The technical scheme adopted by the invention is that low power lens barrel and high power lens barrel are installed in lens cone frame, low power lens barrel
Sample stage is each perpendicular to high power lens barrel, and the end of low power lens barrel and high power lens barrel is mounted on camera, the lens barrel of low power lens barrel
End is equipped with spectroscope, and the lens barrel end of high power lens barrel is equipped with reflecting mirror, is equipped with object lens below spectroscope, object lens are mounted on object
On mirror support, objective lens support connects motor, is equipped with sample stage below object lens, reflective system source is set on sample stage side
Side, transmissive system light source are set to below sample stage.
Another scheme is that low power lens barrel and high power lens barrel are installed in lens cone frame, and low power lens barrel is perpendicular to sample
Platform, high power lens barrel are parallel to sample stage, and the end of low power lens barrel and high power lens barrel is mounted on camera, low power lens barrel or high power lens
The lens barrel end of cylinder is equipped with spectroscope, is equipped with object lens below spectroscope, and object lens are mounted on objective lens support, objective lens support connection
Motor, object lens lower section are equipped with sample stage, and reflective system source is set to sample stage upper side, and transmissive system light source is set to
Below sample stage.
Further, camera is area array cameras or line-scan digital camera, records the image of different multiplying.
Further, motor band objective lens holder control object lens vertically move up and down.
Detailed description of the invention
Fig. 1 is one system structure diagram of scheme；
Fig. 2 is scheme two system structural schematic diagram.
In figure, 1. low power lens barrels, 2. high power lens barrels, 3. lens cone frames, 4. cameras, 5. spectroscopes, 6. reflecting mirrors, 7. objects
Mirror, 8. objective lens supports, 9. motors, 10. sample stages, 11. reflective system sources, 12. transmissive system light sources.
Specific embodiment
The present invention is described in detail With reference to embodiment.
Scheme one is as shown in Figure 1, low power lens barrel 1 and high power lens barrel 2 are installed in lens cone frame 3, low power lens barrel 1 and height
Times lens barrel 2 is each perpendicular to sample stage 10, and the end of low power lens barrel 1 and high power lens barrel 2 is mounted on camera 4, the mirror of low power lens barrel 1
Cylinder end is equipped with spectroscope 5, and the lens barrel end of high power lens barrel 2 is equipped with reflecting mirror 6, and object lens 7, object lens 7 are equipped with below spectroscope 5
It is mounted on objective lens support 8, objective lens support 8 connects motor 9, is equipped with sample stage 10 below object lens 7, reflective system source 11 is set
It is placed in 10 upper side of sample stage, transmissive system light source 12 is set to 10 lower section of sample stage.
It is multiplexed optical path in low power lens barrel 1 and high power lens barrel 2 by spectroscope 5, there is individual camera 4 in each lens barrel end
It can recorde the image of different multiplying.Object lens 7 are controlled with objective lens holder 8 by motor 9 vertically to move up and down, and with
The image that camera 4 acquires forms feedback system, to realize the purpose of high-speed auto-focusing.Reflective system source 11, transmission
Formula system source 12 is two kinds of lighting methods, is respectively suitable for the design of reflective and transmissive system.
Object lens 7, which obtain image and through spectroscope 5 are divided latter road and are transmitted into low power lens barrel 1, to be imaged, final as through phase
Machine 4 obtains.The information that spectroscope 5 reflects enters high power lens cylinder 2 after the reflection of reflecting mirror 6 and is imaged onto camera 4.Object lens 7 pass through electricity
Object lens 7 continuously can be moved to multiple positions and take figure by the control height of machine 9, when work, most clear by image analysis determination
Operating position simultaneously feeds back to the realization auto-focusing of motor 9.Sample stage 10 can be mobile in the direction XY, may be implemented to large area object
Body is scanned shooting, and reflective system source 11 and transmissive system light source 12 can be according to observing samples or observation purposes not
Together, it is used alone or is used cooperatively.
Scheme two is not as shown in Fig. 2, maximum with scheme one is both low power lens cylinder 1 perpendicular to sample stage 10, high power lens barrel 2
It is parallel to sample stage 10, without using reflecting mirror 6.Make optical path in low power lens barrel 1 and high power lens barrel 2 by spectroscope 5
Multiplexing, the image that each lens barrel end has individual camera 4 to can recorde different multiplying.
The legend provided in the present invention is two lens barrels, but can be expanded by simple combination is multiple lens barrels.In the present invention
The position of low power and high power lens barrel can arbitrarily be exchanged.The reflective system source of the present invention and transmissive system light source are two allusion quotations
The microscope light source scheme of type, also can need to expand according to observation is other light sources scheme.One in two lens barrels can be more
It is changed to the imaging lens barrel of other classifications, such as fluorescence microscopy lens barrel.
The above is only not to make limit in any form to the present invention to better embodiment of the invention
System, any simple modification that embodiment of above is made according to the technical essence of the invention, equivalent variations and modification,
Belong in the range of technical solution of the present invention.
Claims (4)
1. one kind can auto-focusing more multiplying power microscopic structures, it is characterised in that: low power lens barrel and high power lens barrel are installed in
In lens cone frame, low power lens barrel and high power lens barrel are each perpendicular to sample stage, and the end of low power lens barrel and high power lens barrel is mounted on
Camera, the lens barrel end of low power lens barrel are equipped with spectroscope, and the lens barrel end of high power lens barrel is equipped with reflecting mirror, installation below spectroscope
There are object lens, object lens are mounted on objective lens support, and objective lens support connects motor, are equipped with sample stage, reflective system light below object lens
Source is set to sample stage upper side, and transmissive system light source is set to below sample stage.
2. one kind can auto-focusing more multiplying power microscopic structures, it is characterised in that: low power lens barrel and high power lens barrel are installed in
In lens cone frame, for low power lens barrel perpendicular to sample stage, high power lens barrel is parallel to sample stage, the end of low power lens barrel and high power lens barrel
It is mounted on camera, the lens barrel end of low power lens barrel or high power lens barrel is equipped with spectroscope, is equipped with object lens, object lens below spectroscope
It is mounted on objective lens support, objective lens support connects motor, is equipped with sample stage below object lens, reflective system source is set to sample
Platform upper side, transmissive system light source are set to below sample stage.
3. according to one kind as claimed in claim 1 or 2 can auto-focusing more multiplying power microscopic structures, it is characterised in that: the phase
Machine is area array cameras or line-scan digital camera, records the image of different multiplying.
4. according to one kind as claimed in claim 1 or 2 can auto-focusing more multiplying power microscopic structures, it is characterised in that: the electricity
Machine band objective lens holder control object lens vertically move up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811096605.XA CN109061865A (en) | 2018-09-19 | 2018-09-19 | It is a kind of can auto-focusing more multiplying power microscopic structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811096605.XA CN109061865A (en) | 2018-09-19 | 2018-09-19 | It is a kind of can auto-focusing more multiplying power microscopic structures |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109061865A true CN109061865A (en) | 2018-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811096605.XA Pending CN109061865A (en) | 2018-09-19 | 2018-09-19 | It is a kind of can auto-focusing more multiplying power microscopic structures |
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| CN (1) | CN109061865A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110274899A (en) * | 2019-07-31 | 2019-09-24 | 中国科学院海洋研究所 | A kind of halomereid phosphorimager |
| CN110837200A (en) * | 2019-12-12 | 2020-02-25 | 中国工程物理研究院激光聚变研究中心 | Variable-magnification X-ray high-speed photographic device |
| CN111290109A (en) * | 2020-04-09 | 2020-06-16 | 北京利恩和通讯技术有限责任公司 | Microscope capable of displaying different multiples simultaneously |
| WO2022111710A1 (en) * | 2020-11-30 | 2022-06-02 | 深圳市瑞图生物技术有限公司 | Optical path conversion device and optical system |
| CN116931236A (en) * | 2023-09-14 | 2023-10-24 | 长春长光智欧科技有限公司 | Double-rate optical system based on probe alignment wafer |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204331133U (en) * | 2014-12-25 | 2015-05-13 | 中国工程物理研究院机械制造工艺研究所 | High low power confocal compound microscope illuminance of image plane coalignment |
| CN107367829A (en) * | 2017-08-16 | 2017-11-21 | 桂林优利特医疗电子有限公司 | Single-lens light splitting zoom microscopic system |
-
2018
- 2018-09-19 CN CN201811096605.XA patent/CN109061865A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204331133U (en) * | 2014-12-25 | 2015-05-13 | 中国工程物理研究院机械制造工艺研究所 | High low power confocal compound microscope illuminance of image plane coalignment |
| CN107367829A (en) * | 2017-08-16 | 2017-11-21 | 桂林优利特医疗电子有限公司 | Single-lens light splitting zoom microscopic system |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110274899A (en) * | 2019-07-31 | 2019-09-24 | 中国科学院海洋研究所 | A kind of halomereid phosphorimager |
| CN110837200A (en) * | 2019-12-12 | 2020-02-25 | 中国工程物理研究院激光聚变研究中心 | Variable-magnification X-ray high-speed photographic device |
| CN111290109A (en) * | 2020-04-09 | 2020-06-16 | 北京利恩和通讯技术有限责任公司 | Microscope capable of displaying different multiples simultaneously |
| WO2022111710A1 (en) * | 2020-11-30 | 2022-06-02 | 深圳市瑞图生物技术有限公司 | Optical path conversion device and optical system |
| CN116931236A (en) * | 2023-09-14 | 2023-10-24 | 长春长光智欧科技有限公司 | Double-rate optical system based on probe alignment wafer |
| CN116931236B (en) * | 2023-09-14 | 2023-11-28 | 长春长光智欧科技有限公司 | Double-rate optical system based on probe alignment wafer |
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Application publication date: 20181221 |