CN110364472A - A kind of micro- vibration actuating vacuum sucking pen - Google Patents
A kind of micro- vibration actuating vacuum sucking pen Download PDFInfo
- Publication number
- CN110364472A CN110364472A CN201910659752.1A CN201910659752A CN110364472A CN 110364472 A CN110364472 A CN 110364472A CN 201910659752 A CN201910659752 A CN 201910659752A CN 110364472 A CN110364472 A CN 110364472A
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- China
- Prior art keywords
- vibration body
- gas compression
- intermediate valve
- compression chamber
- declines
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Abstract
The invention discloses a kind of micro- vibration actuating vacuum sucking pen, including gas compression chamber, intermediate valve decline vibration body, upper end cover, sealing ring, centre ring, wire guide sealing-plug, sucker disk seat, sucker, air inlet and exhaust outlet.Wherein, described intermediate ring one end and sucker disk seat are tightly connected, and the other end and upper end cover are tightly connected, and the intermediate valve vibration body that declines is respectively placed in the both ends of intermediate ring.The intermediate valve decline vibration body by self-deformation make gas compression chamber and it is extraneous generate pressure difference, driving gas is discharged by air inlet inflow gas compression chamber, then by exhaust outlet.The present invention integrates gas compression pump and material mechanism for picking, compact-sized, and control is simple and fast response time, adsorbable frivolous micro devices are widely used in the fields such as microelectronics, computer, biological medicine and minute manufacturing.
Description
Technical field
The present invention relates to the vacuum suction pick device fields of micro devices, more particularly to a kind of micro- vibration actuating vacuum to inhale
Pen.
Background technique
In recent years, with the rapid development of science and technology, electronic product is kept updating, and towards intelligent, miniature
The direction of change is developed.Micro electronmechanical product needs to pick up a large amount of frivolous fragile devices, such as chip, ceramic wafers in assembling process
With silicon wafer etc..Negative pressure of vacuum pick device plays an important role in the pick process of such devices, simple with structure,
The advantages that pickup force is easily controllable and device damage is small, is suitable for adsorbing frangible, soft, frivolous and spherical object.Negative pressure of vacuum
It is the power resources of negative pressure pick device, and vacuum generator is a kind of negative pressure of vacuum source that negative pressure is generated using positive pressure gas source,
With the advantages such as small in size, easy for installation and at low cost, but need to be equipped with independent positive pressure gas source, and there are system working efficiencies
The problems such as low, work noise is big and control accuracy difference.
In order to improve working performance of the negative pressure pick device when picking up frivolous material, still there are many problems to need to solve:
1, the absorption fluctuation of negative pressure pick-up structure is larger, and pickup material is made to be easy to fall；
2, negative pressure pickup force control accuracy difference is easy to occur because adsorption capacity is excessive for some frivolous friable materials
Damage；
3, the transformation efficiency for converting negative pressure for positive pressure using vacuum generator is low, and noise is big.
Summary of the invention
For overcome the deficiencies in the prior art, the present invention provides a kind of micro- vibration actuating vacuum sucking pen, collect gas compression pump
With material mechanism for picking in one, compact-sized, control is simple and fast response time, adsorbable frivolous micro devices are suitable extensively
For fields such as microelectronics, computer, biological medicine and minute manufacturings.
To achieve the above object, the present invention is realized according to following technical scheme:
A kind of micro- vibration actuating vacuum sucking pen characterized by comprising intermediate valve decline vibration body, upper end cover, sealing ring, in
Between ring, wire guide sealing-plug, sucker disk seat, sucker, air inlet and exhaust outlet, wherein the top intermediate valve declines vibration body with it is described
Intermediate ring is tightly connected by the sealing ring, and the top conducting wire sealing-plug is mounted in the intermediate ring side mounting hole, often
A intermediate valve decline vibration body driving conducting wire be each passed through the corresponding conducting wire sealing-plug and can connect external drive electricity
Source, above and below decline vibration body, the sealing ring, the intermediate ring and top the conducting wire sealing-plug of the intermediate valve it is mutual
Gluing, sealing forms gas compression chamber；
The sucker disk seat and the lower section intermediate valve vibration body that declines are tightly connected by the sealing ring, and the lower section conducting wire is close
Blocking is mounted in the mounting hole of the sucker disk seat side；
The sucker and the sucker disk seat are tightly connected, and the air inlet passes through the centre bore of the sucker, sucker disk seat
Centre bore and the lower section intermediate valve vibration body that declines are connected with the gas compression chamber；
The upper end cover and the top intermediate valve vibration body that declines are tightly connected by the sealing ring, and the exhaust outlet passes through
The centre bore of the upper end cover and the top intermediate valve vibration body that declines are connected with the gas compression chamber.
In above-mentioned technical proposal, the intermediate valve vibration body that declines is made of piezoelectric ceramics, oscillating plate and check valve, the pressure
Electroceramics and oscillating plate are annular and are adhesively fixed, and the check valve is bonded in the side of the oscillating plate, the check valve
One direction is opened.
In above-mentioned technical proposal, the quantity of the gas compression chamber is one or more, when using multiple gas compression chambers
When, each gas compression chamber is connected in series.
Compared with prior art, the present invention having the following beneficial effects:
1, a kind of micro- vibration actuating vacuum sucking pen of the present invention integrates gas compression pump and material mechanism for picking, without being equipped with
Gas compression pump and vacuum generator can generate negative pressure of vacuum in sucker end face；
2, the intermediate valve declines vibration body based on piezoelectric effect work, is driven by alternating voltage signal.Its vibrational state can
It to realize by control driving signal, and then realizes the control of micro- vibration actuating vacuum sucking pen adsorption strength, meets different components
Absorption, which is picked up, to be required；
3, it is directly communicated between the gas compression chamber and air inlet, shortens gas flow length, reduced gas and flow edge
Stroke pressure loss, and improve system negative pressure response speed.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is a kind of structural schematic diagram of micro- vibration actuating vacuum sucking pen of the invention；
Operation principle schematic diagram when Fig. 2 is a kind of micro- vibration actuating vacuum sucking pen air-breathing of the invention；
Operation principle schematic diagram when Fig. 3 is a kind of micro- vibration actuating vacuum sucking pen exhaust of the invention.
The components in the drawings are labeled as follows: 1- gas compression chamber, 2- intermediate valve decline vibration body, 21- potsherd, 22- vibration
Movable plate, 23- check valve, 3- upper end cover, 4- sealing ring, ring among 5-, 6- wire guide sealing-plug, 7- sucker disk seat, 8- sucker, 9- into
Port, 10- exhaust outlet.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.
In the description of the present invention, it is to be understood that, term " radial direction ", " axial direction ", "upper", "lower", "top", "bottom",
The orientation or positional relationship of the instructions such as "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of retouching
It states the present invention and simplifies description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific
Orientation construction and operation, therefore be not considered as limiting the invention.In the description of the present invention, unless otherwise indicated,
The meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation " " is set
Set ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
It, can also be indirectly connected through an intermediary to be to be connected directly.It for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
Referring to Fig. 1, a kind of micro- vibration actuating vacuum sucking pen of the present invention include: intermediate valve decline vibration body 2, upper end cover 3, seal
Circle 4, intermediate ring 5, wire guide sealing-plug 6, sucker disk seat 7, sucker 8, air inlet 9 and exhaust outlet 10, wherein top intermediate valve declines
Vibration body 2 is tightly connected with intermediate ring 5 by sealing ring 4, wherein upper Square wire sealing-plug 6 is mounted on 5 side of the intermediate ring installation
Kong Zhong, the decline driving conducting wire of vibration body 2 of each intermediate valve are each passed through conducting wire sealing-plug 6 and can connect external drive power supply, on
Decline vibration body 2, sealing ring 4, intermediate ring 5 and upper Square wire sealing-plug 6 of the intermediate valve of side and lower section is bonded to each other sealing and forms gas
Body compression chamber 1；
Further, sucker disk seat 7 and lower section the intermediate valve vibration body 2 that declines are tightly connected by sealing ring 4, lower Square wire sealing-plug
6 are mounted in the 7 side mounting hole of sucker disk seat, and sucker 8 and sucker disk seat 7 are tightly connected, and air inlet 9 passes through the sucker 8
Centre bore, the centre bore of sucker disk seat 7 and lower section the intermediate valve vibration body 2 that declines are connected with gas compression chamber 1；
Further, upper end cover 3 and top the intermediate valve vibration body 2 that declines are tightly connected by sealing ring 4, and exhaust outlet 10 passes through institute
The centre bore and top intermediate valve for stating upper end cover 3 vibration body 2 that declines are connected with gas compression chamber 1.
Further, the intermediate valve vibration body 2 that declines is made of piezoelectric ceramics 21, oscillating plate 22 and check valve 23, piezoelectric ceramics
21 and oscillating plate 22 be annular and be adhesively fixed, check valve 23 is bonded in the side of the oscillating plate 22,23 folk prescription of check valve
To unlatching.
Further, the quantity of the gas compression chamber 1 is not limited to one, when using multiple gas compression chambers 1, often
A gas compression chamber is connected in series.
A kind of micro- vibration actuating vacuum sucking pen of the invention, the in-between micro- vibration body 2 of valve type is driven by alternating voltage signal, according to control
The variation of method processed, may be implemented multiple-working mode.Illustrate with regard to embodiment shown in FIG. 1: operating mode one is only top
Intermediate valve decline vibration body work；Operating mode two is that intermediate valve just below declines vibration body work；Operating mode three is in two
Between the micro- vibration body of valve type work at the same time.Above-mentioned three kinds of operating modes are illustrated below.
Operating mode one: only the intermediate valve of driving top declines vibration body vibration, when the intermediate valve of the top vibration body that declines is upward
When bending, the intracavitary air pressure of gas compression reduces, and is located below intermediate valve under outer gas differential pressure action inside and declines the unidirectional of vibration body
Valve is opened, and air is sucked by air inlet, and gas compression chamber is entered after the check valve for the vibration body that declines by lower section intermediate valve；Work as top
Intermediate valve decline vibration body when being bent downwardly, the intracavitary air pressure of gas compression increases, and is located above under inside and outside differential pressure effect
Between the micro- vibration body of valve type check valve open, the intracavitary air of gas compression through check valve and by the gas vent of upper end cover be discharged；
Operating mode two: only the intermediate valve of driving lower section declines vibration body vibration, when the intermediate valve of the lower section vibration body that declines is downward
When bending, the intracavitary air pressure of gas compression reduces, and is located below intermediate valve under outer gas differential pressure action inside and declines the unidirectional of vibration body
Valve is opened, and air is sucked by air inlet, and gas compression chamber is entered after the check valve for the vibration body that declines by lower section intermediate valve；Work as lower section
Intermediate valve decline vibration body when being bent upwards, the intracavitary air pressure of gas compression increases, and is located above under inside and outside differential pressure effect
Between the micro- vibration body of valve type check valve open, the intracavitary air of gas compression through check valve and by the gas vent of upper end cover be discharged；
Operating mode three: while two intermediate valves being driven to decline vibration body vibration, when the intermediate valve of the lower section vibration body that declines is downward
The intermediate valve of bending and top declines vibration body when being bent upwards, and the intracavitary air pressure of gas compression reduces, inside outer gas differential pressure action
Under be located below the decline check valve of vibration body of intermediate valve and open, air sucks by air inlet, is declined vibration body by lower section intermediate valve
Check valve after enter gas compression chamber；When the intermediate valve of the lower section vibration body that declines is bent upwards and the intermediate valve of top declines vibration body
When being bent downwardly, the intracavitary air pressure of gas compression increases, and intermediate valve is located above under inside and outside differential pressure effect and is declined the list of vibration body
It is opened to valve, the intracavitary air of gas compression is discharged through check valve and by the gas vent of upper end cover.
Operating mode one and operating mode two are worked independently using the single intermediate valve vibration body that declines, and power consumption is low and gas
Compressed capability is weak, it can be achieved that function is picked up in the absorption of lighter device.Compared with operating mode one and operating mode two, operating mode three is defeated
Enter that power is high and gas compression ability is strong, it can be achieved that function is picked up in the absorption of heavier device.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of protection of the claims
Subject to.
Claims (3)
1. a kind of micro- vibration actuating vacuum sucking pen characterized by comprising intermediate valve declines vibration body (2), upper end cover (3), sealing ring
(4), intermediate ring (5), wire guide sealing-plug (6), sucker disk seat (7), sucker (8), air inlet (9) and exhaust outlet (10), wherein on
Fang Suoshu intermediate valve declines vibration body (2) and the intermediate ring (5) is tightly connected by the sealing ring (4), and the top conducting wire is close
Blocking (6) is mounted in the mounting hole of intermediate ring (5) side, and each intermediate valve declines the driving conducting wire point of vibration body (2)
The corresponding conducting wire sealing-plug (6) and Chuan Guo not can connect external drive power supply, above and below the intermediate valve decline vibration
Body (2), the sealing ring (4), the intermediate ring (5) and top the conducting wire sealing-plug (6) are bonded to each other sealing and form gas
Compression chamber (1)；
The sucker disk seat (7) and the lower section intermediate valve vibration body (2) that declines are tightly connected by the sealing ring (4), described in lower section
Conducting wire sealing-plug (6) is mounted in the mounting hole of the sucker disk seat (7) side；
The sucker (8) and the sucker disk seat (7) are tightly connected, the air inlet (9) by the centre bore of the sucker (8),
Centre bore and the lower section intermediate valve of sucker disk seat (7) vibration body (2) that declines are connected with the gas compression chamber (1)；
The upper end cover (3) and the top intermediate valve decline vibration body (2) by the sealing ring (4) sealed connection, the exhaust
Mouthful (10) are declined vibration body (2) and the gas compression chamber (1) by centre bore and the top intermediate valve of the upper end cover (3)
It is connected.
2. the micro- vibration actuating vacuum sucking pen of one kind according to claim 1, which is characterized in that the intermediate valve declines vibration body
(2) it is made of piezoelectric ceramics (21), oscillating plate (22) and check valve (23), the piezoelectric ceramics (21) and oscillating plate (22) are
Annular and be adhesively fixed, the check valve (23) is bonded in the side of the oscillating plate (22), check valve (23) one direction
It opens.
3. the micro- vibration actuating vacuum sucking pen of one kind according to claim 1, which is characterized in that the gas compression chamber (1)
Quantity is one or more, and when using multiple gas compression chamber (1), each gas compression chamber (1) is connected in series.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910659752.1A CN110364472A (en) | 2019-07-22 | 2019-07-22 | A kind of micro- vibration actuating vacuum sucking pen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910659752.1A CN110364472A (en) | 2019-07-22 | 2019-07-22 | A kind of micro- vibration actuating vacuum sucking pen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110364472A true CN110364472A (en) | 2019-10-22 |
Family
ID=68221397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910659752.1A Pending CN110364472A (en) | 2019-07-22 | 2019-07-22 | A kind of micro- vibration actuating vacuum sucking pen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110364472A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201221457Y (en) * | 2008-05-23 | 2009-04-15 | 北京联合大学 | Valve and vibrator integrated piezoelectric pump with valve |
| CN103192402A (en) * | 2013-04-14 | 2013-07-10 | 苏州科技学院 | Piezoelectric ultrasonic vibration absorption picker |
| CN103994056A (en) * | 2014-06-16 | 2014-08-20 | 吉林大学 | Multi-vibrator axial cross-flow piezoelectric pump |
| CN103994057A (en) * | 2014-06-16 | 2014-08-20 | 吉林大学 | Movable valve type piezoelectric pump |
| JP2017184297A (en) * | 2016-03-28 | 2017-10-05 | セイコーエプソン株式会社 | Piezoelectric actuator, piezoelectric motor, robot, hand and pump |
| CN107524584A (en) * | 2016-06-22 | 2017-12-29 | 于平 | New more oscillator piezoelectric pumps |
-
2019
- 2019-07-22 CN CN201910659752.1A patent/CN110364472A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201221457Y (en) * | 2008-05-23 | 2009-04-15 | 北京联合大学 | Valve and vibrator integrated piezoelectric pump with valve |
| CN103192402A (en) * | 2013-04-14 | 2013-07-10 | 苏州科技学院 | Piezoelectric ultrasonic vibration absorption picker |
| CN103994056A (en) * | 2014-06-16 | 2014-08-20 | 吉林大学 | Multi-vibrator axial cross-flow piezoelectric pump |
| CN103994057A (en) * | 2014-06-16 | 2014-08-20 | 吉林大学 | Movable valve type piezoelectric pump |
| JP2017184297A (en) * | 2016-03-28 | 2017-10-05 | セイコーエプソン株式会社 | Piezoelectric actuator, piezoelectric motor, robot, hand and pump |
| CN107524584A (en) * | 2016-06-22 | 2017-12-29 | 于平 | New more oscillator piezoelectric pumps |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191022 |
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| RJ01 | Rejection of invention patent application after publication |