CN110360267A - A kind of device for actively eliminating the interference of optical system external shock - Google Patents
A kind of device for actively eliminating the interference of optical system external shock Download PDFInfo
- Publication number
- CN110360267A CN110360267A CN201910645739.0A CN201910645739A CN110360267A CN 110360267 A CN110360267 A CN 110360267A CN 201910645739 A CN201910645739 A CN 201910645739A CN 110360267 A CN110360267 A CN 110360267A
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- vibration
- axis
- platform
- optical
- optical system
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/18—Control arrangements
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
The present invention provides a kind of device for actively eliminating the interference of optical system external shock, including optical platform, optical device, platform support is equipped with below optical platform, there is outer triggering signal interface on optical device, active shaking assembly is equipped between platform support and optical platform, exterior vibration sensing module is equipped on platform support, exterior vibration sensing module, outer triggering signal interface, active shaking assembly is all connected with integrated treatment host, integrated treatment host is used to acquire environmental activity in the vibration signal on platform support by exterior vibration sensing module, and so that it is made reversely equal amplitude shocks according to the synchronous triggering active shaking assembly of vibration signal and be used to offset environmental vibration.The present apparatus is applied in environment in the case where vibration complexity, environmental vibration situation can actively be acquired, and synchronous triggering active shaking assembly makes reversed equal amplitude shocks, offsets environmental vibration with this, is capable of influence of the reduction environmental vibration of high degree to optical platform.
Description
Technical field
It is specifically a kind of actively to eliminate optical system the invention mainly relates to Precision Machining optical platform correlative technology field
The device of external shock interference.
Background technique
Vibration isolation processing for Precision Machining optical platform is presently mainly passive type vibration isolation, includes vibration isolation rubber, vibration isolation
The modes such as air cushion.The intrinsic frequency for being limited to vibration isolation material influences, and the above vibration isolation way can only be to single vibration in synchronization
The vibration of frequency range effectively mitigates, and poor for the vibration isolating effect of this mode of vibration beyond its isolation frequency range.
Since the vibration isolating effect of Precision Machining optical platform directly influences machining accuracy, how maximum journey
The external environment vibration that avoids of degree is a technical problem of those skilled in the art's urgent need to resolve to the interference of optical platform.
Summary of the invention
For the deficiency for solving current technology, the present invention combination prior art provides a kind of active and disappears from practical application
Except the device of optical system external shock interference, the present apparatus is applied in environment in the case where vibration complexity, can actively acquire
Environmental vibration situation, and synchronous triggering active shaking assembly makes reversed equal amplitude shocks, offsets environmental vibration with this, Neng Gouji
Influence of the reduction environmental vibration of big degree to optical platform.
Technical scheme is as follows:
A kind of device for actively eliminating the interference of optical system external shock, including optical platform, be set on optical platform
Optical device, be equipped with platform support below the optical platform, there is outer triggering signal interface on the optical device,
It is equipped with active shaking assembly between the platform support and optical platform, exterior vibration is equipped on the platform support and senses mould
Block, the exterior vibration sensing module, outer triggering signal interface, active shaking assembly are all connected with integrated treatment host, described
Integrated treatment host is used to acquire environmental activity in the vibration signal on platform support by exterior vibration sensing module, and according to
The synchronous active shaking assembly that triggers of vibration signal makes it make reversed equal amplitude shocks for offsetting environmental vibration.
Further, the optical platform is equipped with tabletop of platform vibration-sensing module, the tabletop of platform vibration-sensing
Module connects integrated treatment host, and the integrated treatment host determines that environmental vibration can not by tabletop of platform vibration-sensing module
When effectively offsetting, by the outer triggering signal that links, optical system is triggered as optical device, outside identical with vibration frequency is provided
Working signal.
Further, the platform support being arranged below the optical platform be it is multiple, each platform support is correspondingly arranged
There are exterior vibration sensing module and active shaking assembly.
Further, the active shaking assembly includes upper backup pad, lower supporting plate, the upper backup pad and optical platform
Bottom connection, the lower supporting plate connect with platform support, are connected between upper backup pad and lower supporting plate by multiaxis percussion mechanism
It connects.
Further, the multiaxis percussion mechanism be three axis percussion mechanisms comprising X-axis vibrator, Y-axis vibrator and
Z axis vibrator is respectively used to realize that actively actively vibration and Z axis actively shake X-axis for vibration, Y-axis.
Further, the Z axis vibrator is installed on the upper surface of lower supporting plate, the X-axis vibrator, Y-axis vibrator
It is respectively arranged on two orthogonal sides of lower supporting plate.
Further, the Z axis vibrator include vibration generator and can be realized X-axis, Y direction moves horizontally
Double-axle sliding component, the Y-axis vibrator include vibration generator and can be realized X-axis, the twin shaft that Z-direction moves horizontally
Slide assemblies, the X-axis vibrator include vibration generator and can be realized Y-axis, the double-axle sliding that Z-direction moves horizontally
Component, X-axis vibrator, Y-axis vibrator, the vibration generator of Z axis vibrator and double-axle sliding modular construction is identical, installation side
To difference.
Further, there are three mounting surface, three mounting surfaces are respectively used to that X-axis shake is fixedly mounted tool on the upper backup pad
Dynamic device, Y-axis vibrator, Z axis vibrator vibration generator, X-axis vibrator, Y-axis vibrator, Z axis vibrator double-axle sliding
Component is fixed on lower supporting plate corresponding position.
Further, the double-axle sliding component includes A to support shaft, and the A is equipped with Crux to support shaft, described
Crux and A are slidably matched between support shaft, B are equipped on the Crux to support shaft, the B to support shaft and A to
Support shaft axis direction is perpendicular, and B is equipped with mounting base to support shaft, and the mounting base and B are slidably matched between support shaft,
Vibration generator is connected in the mounting base.
Further, the Crux and A are equipped with sliding bearing, the mounting base and B to support to support shaft connection place
Shaft connection place is equipped with sliding bearing.
Beneficial effects of the present invention:
1, after the device of the invention starting, the shake being applied on optical platform bracket is acquired by exterior vibration sensing module
Emotionally condition, and integrated treatment host is sent to by data line, integrated treatment host is counted in real time according to collected vibration signal
It calculates and active shaking assembly is driven to generate the vibration opposite with exterior vibration amplitude equal phase, exterior vibration, energy are offset with this
Enough high degrees ensure that optical platform table top is not interfered by exterior vibration.
2, the present invention in, when system can not completely isolated exterior vibration when, can be according to tabletop of platform vibration-sensing module
Signal further provides the identical external working signal with vibration frequency for optical device on optical platform, to ensure to set every time
It is in identical amplitude position when standby triggering work, to eliminate influence of the vibration to optical device.
3, active shaking assembly structure provided by the present invention designs advantages of simple, easy for installation, and movement is flexible, Neng Gouti
For the shock conditions of three axis directions, to ensure influence of the counteracting environmental vibration of degree big to the greatest extent to optical platform.
Detailed description of the invention
Attached drawing 1 is principle of the invention structural schematic diagram；
Attached drawing 2 is optical platform structural schematic diagram of the present invention；
Attached drawing 3 is active shaking assembly mounting means schematic diagram of the present invention；
Attached drawing 4 is multiaxis percussion mechanism structural schematic diagram one of the present invention；
Attached drawing 5 is multiaxis percussion mechanism structural schematic diagram two of the present invention；
Attached drawing 6 is double-axle sliding component structure diagram of the present invention.
Label shown in attached drawing:
1, integrated treatment host；2, optical device；3, optical platform；4, tabletop of platform vibration-sensing module；5, optical branch
Frame；6, exterior vibration sensing module；7, active shaking assembly；8, outer triggering signal interface；9, upper backup pad；10, lower support
Plate；11, X-axis vibrator；12, Z axis vibrator；13, Y-axis vibrator；14, generator is shaken；15, mounting disc；16, mounting base；
17, B is to support shaft；18, Crux；19, A is to support shaft.
Specific embodiment
With reference to the drawings and specific embodiments, the invention will be further described.It should be understood that these embodiments are merely to illustrate
The present invention rather than limit the scope of the invention.In addition, it should also be understood that, after reading the content taught by the present invention, this field
Technical staff can make various changes or modifications the present invention, and such equivalent forms equally fall within range defined herein.
As shown in Figure 1, being the principle provided by the present invention that can actively eliminate optical system external shock countermeasure set
Figure.Including optical platform 3, the optical device being set on optical platform 32, platform support 5, optics are equipped with below optical platform 3
There is outer triggering signal interface 8 in equipment 2, outer triggering signal interface 8 is used to connect the trigger signal of external optical system,
It is equipped with active shaking assembly 7 between platform support 5 and optical platform 3, exterior vibration sensing module is equipped on platform support 5
6, exterior vibration sensing module 6, outer triggering signal interface 8, active shaking assembly 7 are all connected with integrated treatment host 1.
Exterior vibration sensing module 6 of the invention is arranged on platform support 5, is able to detect external environment and acts on platform
Vibration on bracket 5, and be sent to integrated treatment host 1 and carry out calculation processing.Active shaking assembly 7 is by integrated treatment host 1
Control, when integrated treatment host 1 detects the vibration of platform support 5 by exterior vibration sensing module 6, it can be according to shake
Moving the synchronous triggering active shaking assembly 7 of signal makes it make reversed equal amplitude shocks for offsetting environmental vibration, so that it is guaranteed that light
3 table top of platform is learned not by the interference of exterior vibration.
As a preferred embodiment, in the present invention, optical platform 3 is equipped with tabletop of platform vibration-sensing module 4, the platform
Table top vibration-sensing module 4 is used to the vibration at detection platform table top, and tabletop of platform vibration-sensing module 4 connects integrated treatment master
Machine 1 illustrates when tabletop of platform vibration-sensing module 4 detects that tabletop of platform vibration is greater than given threshold by actively shaking
Component 7 can not effectively offset the vibration of environment, and integrated treatment host 1 will link outer triggering signal at this time, trigger optical system
External working signal identical with vibration frequency is provided for optical device 2, in identical when ensuring every secondary device triggering work
Amplitude position, to eliminate influence of the vibration to optical device 2.
As illustrated in figures 3-6, it is provided with four platforms bracket 5 below optical platform 3 of the invention, four platforms bracket 5 is in
Supporting leg type setting, each platform support 5 are correspondingly arranged on an exterior vibration sensing module 6 and an active shaking assembly 7,
The data action that each active shaking assembly 7 is detected according to corresponding exterior vibration sensing module 6, from the multi-faceted shake for guaranteeing platform
Kinetic energy is enough cancelled.
In the present invention, the specific structure of active shaking assembly 7 is as follows: including upper backup pad 9, lower supporting plate 10, upper support
Plate 9 is connect with 3 bottom of optical platform, and lower supporting plate 10 is connect with platform support 5, is led between upper backup pad 9 and lower supporting plate 10
Cross the connection of multiaxis percussion mechanism.Specific multiaxis percussion mechanism is three axis percussion mechanisms, is capable of the vibration of tri- axis direction of XYZ, with
Just can platform support 5 caused by comprehensive counteracting external environment shake, for realizing the vibration of three axis structure it include X-axis shake
Dynamic device 11, Y-axis vibrator 13 and Z axis vibrator 12, X-axis vibrator 11, Y-axis vibrator 13 and Z axis vibrator 12 are
Straight line vibrator is respectively used to realize that actively actively vibration and Z axis actively shake X-axis for vibration, Y-axis.
In the present invention, Z axis vibrator 12 is installed on the upper surface of lower supporting plate 10, X-axis vibrator 11, Y-axis vibrator 13
It is respectively arranged on 10 two orthogonal sides of lower supporting plate.
In the present invention, Z axis vibrator 12 include vibration generator 14 and can be realized X-axis, Y direction moves horizontally
Double-axle sliding component, Y-axis vibrator 13 include vibration generator 14 and can be realized X-axis, the twin shaft that Z-direction moves horizontally
Slide assemblies, X-axis vibrator 11 include vibration generator 14 and can be realized Y-axis, the double-axle sliding that Z-direction moves horizontally
Component, X-axis vibrator 11, Y-axis vibrator 13, the vibration generator 14 of Z axis vibrator 12 and double-axle sliding modular construction phase
Together, different installation directions is taken to realize the vibration of X-axis, Y-axis, Z axis respectively.
There are three mounting surfaces, i.e. upper backup pad 9 to be made of a top plate, two side plates for tool on upper backup pad 9 of the invention,
Two side plates are respectively used to that the vibration generator 14 of X-axis vibrator 11, Y-axis vibrator 13 is fixedly mounted, and top plate is for installing Z axis
The vibration generator 14 of vibrator 12, X-axis vibrator 11, Y-axis vibrator 13, Z axis vibrator 12 double-axle sliding component fix
On 10 corresponding position of lower supporting plate.Corresponding X-axis, Y-axis, the vibration generator 14 on Z axis are for generating the level of corresponding direction
Vibration, the vibration are transmitted on lower supporting plate 10 by double-axle sliding component, and are transmitted to platform by the correspondence of lower supporting plate 10
On bracket 5, environmental vibration is successively offset, the operating frequency of vibration generator 14 is controlled by integrated treatment host 1.
In order to guarantee in the present invention, shake in X-direction, Y direction, the smooth transfer of Z-direction, twin shaft of the invention
Slide assemblies are as shown in fig. 6, include A to support shaft 19, A supports that axle bed is fixed on lower branch to 19 both ends of support shaft by axle bed
On fagging 10, A is equipped with Crux 18 as shown in the figure to support shaft 19, and the Crux 18 and A are slided between support shaft 19
Cooperation, and sliding bearing is set at the place of being slidably connected, to reduce frictional force, equipped with B to support shaft 17 on Crux 18, B to
Support shaft 17 and A are perpendicular to 19 axis direction of support shaft, and B is equipped with mounting base 16, mounting base 16 and B to branch to support shaft 17
It is slidably matched between support axis 17, and sliding bearing is set at the place of being slidably matched, to reduce the frictional force of opposite sliding, mounting base 16
Upper to have a mounting disc 15, vibration generates, and the output end of vibration generator 14 is connected to mounting base 16 by the mounting disc 15
On.The double-axle sliding component provided by the present invention is versatile, and structure is simple, it is firm to stablize, while playing support, again
It is able to satisfy the movement of two vertical direction.
Claims (10)
1. a kind of device for actively eliminating the interference of optical system external shock, including optical platform, is set on optical platform
Optical device, the optical platform lower section are equipped with platform support, it is characterised in that: have external trigger letter on the optical device
Number interface is equipped with active shaking assembly between the platform support and optical platform, and outside is equipped on the platform support
Vibration-sensing module, the exterior vibration sensing module, outer triggering signal interface, active shaking assembly are all connected with integrated treatment
Host, the integrated treatment host are used to acquire environmental activity by exterior vibration sensing module in the vibration letter on platform support
Number, and so that it is made reversely equal amplitude shocks according to the synchronous triggering active shaking assembly of vibration signal and be used to offset environmental vibration.
2. a kind of device for actively eliminating the interference of optical system external shock as described in claim 1, it is characterised in that: described
Optical platform is equipped with tabletop of platform vibration-sensing module, and the tabletop of platform vibration-sensing module connects integrated treatment host,
It is when the integrated treatment host determines that environmental vibration can not effectively be offset by tabletop of platform vibration-sensing module, linkage is external
Trigger signal triggers optical system as optical device and provides external working signal identical with vibration frequency.
3. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 1 or 2, it is characterised in that:
The platform support being arranged below the optical platform be it is multiple, each platform support is correspondingly arranged on exterior vibration sensing module
And active shaking assembly.
4. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 3, it is characterised in that: described
Active shaking assembly includes upper backup pad, lower supporting plate, and the upper backup pad is connect with optical platform bottom, the lower supporting plate
It connect with platform support, is connected between upper backup pad and lower supporting plate by multiaxis percussion mechanism.
5. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 4, it is characterised in that: described
Multiaxis percussion mechanism is three axis percussion mechanisms comprising X-axis vibrator, Y-axis vibrator and Z axis vibrator are respectively used to reality
Actively actively vibration and Z axis actively shake existing X-axis for vibration, Y-axis.
6. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 5, it is characterised in that: described
Z axis vibrator is installed on the upper surface of lower supporting plate, and the X-axis vibrator, Y-axis vibrator are respectively arranged in lower supporting plate two
On orthogonal side.
7. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 6, it is characterised in that: described
Z axis vibrator includes vibration generator and can be realized X-axis, the double-axle sliding component that Y direction moves horizontally, the Y-axis
Vibrator includes vibration generator and can be realized X-axis, the double-axle sliding component that Z-direction moves horizontally, the X-axis vibration
Device includes vibration generator and can be realized Y-axis, the double-axle sliding component that Z-direction moves horizontally, X-axis vibrator, Y-axis shake
Dynamic device, the vibration generator of Z axis vibrator and double-axle sliding modular construction is identical, installation direction is different.
8. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 7, it is characterised in that: described
There are three mounting surface, three mounting surfaces are respectively used to that X-axis vibrator, Y-axis vibrator, Z axis shake is fixedly mounted tool on upper backup pad
The vibration generator of dynamic device, X-axis vibrator, Y-axis vibrator, Z axis vibrator double-axle sliding component be fixed on lower supporting plate pair
It answers on position.
9. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 8, it is characterised in that: described
Double-axle sliding component includes A to support shaft, and the A is equipped with Crux to support shaft, and the Crux and A are between support shaft
It is slidably matched, B is equipped on the Crux to support shaft, the B perpendicular, B to support shaft and A to support shaft axis direction
It is equipped with mounting base to support shaft, the mounting base and B are slidably matched between support shaft, and vibration generator is connected to the peace
It fills on seat.
10. a kind of device for actively eliminating the interference of optical system external shock as claimed in claim 9, it is characterised in that: institute
It states Crux and A and is equipped with sliding bearing, the mounting base and B to support shaft connection place equipped with sliding axle to support shaft connection place
It holds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910645739.0A CN110360267B (en) | 2019-07-17 | 2019-07-17 | Device for actively eliminating external vibration interference of optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910645739.0A CN110360267B (en) | 2019-07-17 | 2019-07-17 | Device for actively eliminating external vibration interference of optical system |
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| CN110360267A true CN110360267A (en) | 2019-10-22 |
| CN110360267B CN110360267B (en) | 2021-05-21 |
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| CN201910645739.0A Active CN110360267B (en) | 2019-07-17 | 2019-07-17 | Device for actively eliminating external vibration interference of optical system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112228494A (en) * | 2020-09-24 | 2021-01-15 | 中国科学院微电子研究所 | Active damping system and scanning electron microscope with same |
| CN112709778A (en) * | 2020-12-02 | 2021-04-27 | 微控物理储能研究开发（深圳）有限公司 | Shock absorption photoetching machine and shock absorption method thereof |
| CN114251579A (en) * | 2021-11-19 | 2022-03-29 | 苏州浪潮智能科技有限公司 | Cabinet, damping system and damping support |
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| CN110360267B (en) | 2021-05-21 |
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