CN110360267B - Device for actively eliminating external vibration interference of optical system - Google Patents
Device for actively eliminating external vibration interference of optical system Download PDFInfo
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- CN110360267B CN110360267B CN201910645739.0A CN201910645739A CN110360267B CN 110360267 B CN110360267 B CN 110360267B CN 201910645739 A CN201910645739 A CN 201910645739A CN 110360267 B CN110360267 B CN 110360267B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/18—Control arrangements
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- General Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
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- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention provides a device for actively eliminating external vibration interference of an optical system, which comprises an optical platform and optical equipment, wherein a platform support is arranged below the optical platform, an external trigger signal interface is arranged on the optical equipment, an active vibration component is arranged between the platform support and the optical platform, an external vibration sensing module is arranged on the platform support, the external vibration sensing module, the external trigger signal interface and the active vibration component are all connected with a comprehensive processing host, and the comprehensive processing host is used for acquiring a vibration signal acted on the platform support by the environment through the external vibration sensing module and synchronously triggering the active vibration component according to the vibration signal to make reverse equal-amplitude vibration to offset the environmental vibration. The device is applied to the environment, can actively collect the environment vibration condition under the complex vibration condition, synchronously triggers the active vibration assembly to make reverse equal-amplitude vibration, offsets the environment vibration, and can greatly reduce the influence of the environment vibration on the optical platform.
Description
Technical Field
The invention mainly relates to the related technical field of precision machining optical platforms, in particular to a device for actively eliminating external vibration interference of an optical system.
Background
The vibration isolation treatment for the precision processing optical platform is mainly passive vibration isolation at present, and comprises modes of vibration isolation rubber, vibration isolation air cushions and the like. The vibration isolation method is limited by the influence of the natural frequency of the vibration isolation material, can only effectively reduce the vibration in a single vibration frequency range at the same time, and has poor vibration isolation effect on the vibration beyond the vibration isolation frequency range.
Since the vibration isolation effect of the precision machining optical platform directly affects the machining precision, how to avoid the interference of the external environmental vibration to the optical platform to the maximum extent is a technical problem that needs to be solved urgently by those skilled in the art.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a device for actively eliminating the external vibration interference of an optical system from practical application by combining the prior art, and the device can be applied to the situation of complex vibration in the environment, can actively collect the environment vibration situation and synchronously trigger an active vibration component to make reverse equal-amplitude vibration so as to offset the environment vibration and greatly reduce the influence of the environment vibration on an optical platform.
The technical scheme of the invention is as follows:
the utility model provides an initiative eliminates device that external vibrations of optical system disturbed, includes optical platform, sets up the optical equipment on optical platform, the optical platform below is equipped with the platform support, the last external trigger signal interface that has of optical equipment be equipped with the initiative vibrations subassembly between platform support and the optical platform be equipped with outside vibrations sensing module on the platform support, outside vibrations sensing module, outside trigger signal interface, the initiative vibrations subassembly all connect the integrated processing host computer, the integrated processing host computer is used for gathering the vibration signal that the environment acted on the platform support through outside vibrations sensing module to it makes it make reverse equal amplitude vibrations to offset environmental vibrations to trigger the initiative vibrations subassembly in step according to vibration signal.
Further, be equipped with platform mesa vibrations sensing module on the optical platform, platform mesa vibrations sensing module connects the integrated processing host computer, the integrated processing host computer judges through platform mesa vibrations sensing module that environmental vibrations can't effectively offset the time, will link external trigger signal, touches optical system and provides the outside working signal the same with the vibration frequency for optical equipment.
Furthermore, a plurality of platform supports are arranged below the optical platform, and each platform support is correspondingly provided with an external vibration sensing module and an active vibration assembly.
Further, the initiative vibrations subassembly includes backup pad, bottom suspension fagging, it is connected with the optical platform bottom to go up the backup pad, the bottom suspension fagging is connected with the platform support, goes up and connects through multiaxis vibrations mechanism between backup pad and the bottom suspension fagging.
Furthermore, multiaxis vibrations mechanism is triaxial vibrations mechanism, and it includes X axle electromagnetic shaker, Y axle electromagnetic shaker and Z axle electromagnetic shaker, is used for realizing X axle initiative vibrations, Y axle initiative vibrations and Z axle initiative vibrations respectively.
Furthermore, the Z-axis vibrator is arranged on the upper surface of the lower supporting plate, and the X-axis vibrator and the Y-axis vibrator are respectively arranged on two mutually vertical side surfaces of the lower supporting plate.
Further, Z axle electromagnetic shaker is including shaking the generater and can realizing X axle, Y axle direction horizontal migration's biax sliding component, Y axle electromagnetic shaker is including shaking the generater and can realizing X axle, Z axle direction horizontal migration's biax sliding component, X axle electromagnetic shaker is including shaking the generater and can realizing Y axle, Z axle direction horizontal migration's biax sliding component, and X axle electromagnetic shaker, Y axle electromagnetic shaker, Z axle electromagnetic shaker's shake generater and biax sliding component structure are the same, the installation direction is different.
Furthermore, the upper supporting plate is provided with three mounting surfaces, the three mounting surfaces are respectively used for fixedly mounting a vibration generator of the X-axis vibrator, the Y-axis vibrator and the Z-axis vibrator, and a double-shaft sliding assembly of the X-axis vibrator, the Y-axis vibrator and the Z-axis vibrator is fixed at a corresponding position of the lower supporting plate.
Further, biax slip subassembly includes A to the back shaft, A is equipped with the cross seat to the back shaft, sliding fit between cross seat and A to the back shaft be equipped with B on the cross seat to the back shaft, B is perpendicular mutually to back shaft and A to the back shaft axis direction, and B is equipped with the mount pad to the back shaft, mount pad and B are to sliding fit between the back shaft, and vibrations generater connects on the mount pad.
Furthermore, the cross seat and the joint of the A direction supporting shaft are provided with sliding bearings, and the mounting seat and the joint of the B direction supporting shaft are provided with sliding bearings.
The invention has the beneficial effects that:
1. after the device is started, the external vibration sensing module is used for collecting vibration conditions acting on the optical platform support and transmitting the vibration conditions to the comprehensive processing host through the data line, and the comprehensive processing host calculates and drives the active vibration assembly to generate vibration with the same amplitude and the opposite phase with the external vibration amplitude in real time according to the collected vibration signals so as to offset the external vibration and ensure that the table top of the optical platform is not interfered by the external vibration to a great extent.
2. In the invention, when the system can not completely isolate external vibration, an external working signal with the same vibration frequency as the vibration frequency can be further provided for the optical equipment on the optical platform according to the signal of the platform surface vibration sensing module, so that the equipment is ensured to be in the same amplitude position when being triggered to work every time, and the influence of vibration on the optical equipment is eliminated.
3. The active vibration assembly provided by the invention has the advantages of simple and reasonable structural design, convenience in installation and flexibility in movement, and can provide vibration conditions in three axial directions so as to ensure that the influence of environmental vibration on the optical platform is counteracted to the greatest extent.
Drawings
FIG. 1 is a schematic diagram of the principle structure of the present invention;
FIG. 2 is a schematic diagram of an optical bench according to the present invention;
FIG. 3 is a schematic view of an installation manner of the active vibration component of the present invention;
FIG. 4 is a first structural diagram of the multi-axis vibrating mechanism of the present invention;
FIG. 5 is a schematic structural view of a multi-axis vibrating mechanism according to the present invention;
FIG. 6 is a schematic view of a dual-axis slide assembly according to the present invention.
Reference numerals shown in the drawings:
1. a comprehensive processing host; 2. an optical device; 3. an optical platform; 4. a platform surface vibration sensing module; 5. an optical mount; 6. an external vibration sensing module; 7. an active vibration component; 8. an external trigger signal interface; 9. an upper support plate; 10. a lower support plate; 11. an X-axis vibrator; 12. a Z-axis vibrator; 13. a Y-axis vibrator; 14. a shock generator; 15. mounting a disc; 16. a mounting seat; 17. b, supporting the shaft; 18. a cross seat; 19. a is towards the supporting shaft.
Detailed Description
The invention is further described with reference to the accompanying drawings and specific embodiments. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and these equivalents also fall within the scope of the present application.
Fig. 1 is a schematic diagram of an apparatus capable of actively eliminating external vibration interference of an optical system according to the present invention. Including optical platform 3, set up optical device 2 on optical platform 3, optical platform 3 below is equipped with platform support 5, optical device 2 is last to have outside trigger signal interface 8, outside trigger signal interface 8 is used for connecting the trigger signal of outside optical system, be equipped with initiative vibrations subassembly 7 between platform support 5 and optical platform 3, be equipped with outside vibrations sensing module 6 on platform support 5, outside vibrations sensing module 6, outside trigger signal interface 8, comprehensive processing host computer 1 is all connected to initiative vibrations subassembly 7.
The external vibration sensing module 6 is arranged on the platform support 5, can detect vibration acted on the platform support 5 by an external environment, and sends the vibration to the comprehensive processing host 1 for calculation processing. The active vibration component 7 is controlled by the comprehensive processing host 1, and when the comprehensive processing host 1 detects the vibration of the platform support 5 through the external vibration sensing module 6, the active vibration component 7 can be synchronously triggered according to a vibration signal to make the active vibration component make reverse equal-amplitude vibration to counteract the environmental vibration, so that the table top of the optical platform 3 is not interfered by the external vibration.
As a preferred scheme, in the present invention, a platform table vibration sensing module 4 is disposed on the optical platform 3, the platform table vibration sensing module 4 is used to detect vibration at the platform of the platform, the platform table vibration sensing module 4 is connected to the host computer 1, when the platform table vibration sensing module 4 detects that the platform table vibration is greater than a set threshold, it indicates that the vibration of the environment cannot be effectively offset by the active vibration component 7, at this time, the host computer 1 will link an external trigger signal, and the optical trigger system provides an external working signal with the same frequency as the vibration frequency for the optical device 2, so as to ensure that the optical device 2 is at the same amplitude position each time of triggering operation, so as to eliminate the influence of the vibration on the optical device 2.
As shown in fig. 3 to 6, four platform supports 5 are disposed below the optical platform 3, the four platform supports 5 are arranged in a leg type, each platform support 5 is correspondingly provided with an external vibration sensing module 6 and an active vibration component 7, and each active vibration component 7 acts according to data detected by the corresponding external vibration sensing module 6 to ensure that vibration of the platform can be offset from multiple directions.
In the present invention, the active vibration component 7 has the following specific structure: including last backup pad 9, bottom suspension fagging 10, go up backup pad 9 and be connected with 3 bottoms of optical platform, bottom suspension fagging 10 is connected with platform support 5, goes up and connects through multiaxis vibrations mechanism between backup pad 9 and the bottom suspension fagging 10. The specific multi-axis vibration mechanism is a three-axis vibration mechanism and can vibrate in three axes of XYZ, so that vibration of the platform support 5 caused by an external environment can be offset in all directions, the structure for achieving three-axis vibration comprises an X-axis vibrator 11, a Y-axis vibrator 13 and a Z-axis vibrator 12, and the X-axis vibrator 11, the Y-axis vibrator 13 and the Z-axis vibrator 12 are all linear vibrators and are respectively used for achieving X-axis active vibration, Y-axis active vibration and Z-axis active vibration.
In the present invention, a Z-axis vibrator 12 is installed on an upper surface of a lower support plate 10, and an X-axis vibrator 11 and a Y-axis vibrator 13 are respectively installed on two perpendicular side surfaces of the lower support plate 10.
In the invention, the Z-axis vibrator 12 comprises a vibration generator 14 and a double-axis sliding assembly capable of realizing horizontal movement in the X-axis direction and the Y-axis direction, the Y-axis vibrator 13 comprises a vibration generator 14 and a double-axis sliding assembly capable of realizing horizontal movement in the X-axis direction and the Z-axis direction, the X-axis vibrator 11 comprises a vibration generator 14 and a double-axis sliding assembly capable of realizing horizontal movement in the Y-axis direction and the Z-axis direction, the vibration generator 14 and the double-axis sliding assembly of the X-axis vibrator 11, the Y-axis vibrator 13 and the Z-axis vibrator 12 have the same structure, and vibration in the X-axis direction, vibration in the Y-axis direction and vibration in the Z-axis direction.
The upper supporting plate 9 of the invention is provided with three mounting surfaces, namely the upper supporting plate 9 consists of a top plate and two side plates, the two side plates are respectively used for fixedly mounting a vibration generator 14 of an X-axis vibrator 11 and a Y-axis vibrator 13, the top plate is used for mounting the vibration generator 14 of a Z-axis vibrator 12, and a double-shaft sliding component of the X-axis vibrator 11, the Y-axis vibrator 13 and the Z-axis vibrator 12 is fixed on the corresponding position of the lower supporting plate 10. The vibration generators 14 corresponding to the X-axis, the Y-axis and the Z-axis are used for generating horizontal vibration in corresponding directions, the vibration is transmitted to the lower supporting plate 10 through the dual-axis sliding assembly and is correspondingly transmitted to the platform support 5 through the lower supporting plate 10, environmental vibration is counteracted sequentially, and the action frequency of the vibration generators 14 is controlled through the comprehensive processing host 1.
In order to ensure the smooth transmission of the vibration in the X-axis direction, the Y-axis direction and the Z-axis direction, the biaxial sliding assembly of the present invention, as shown in FIG. 6, comprises an A-direction supporting shaft 19, the two ends of the A-direction supporting shaft 19 are supported by shaft seats, the shaft seats are fixed on the lower supporting plate 10, the A-direction supporting shaft 19 is provided with a cross-shaped seat 18 as shown in the figure, the cross seat 18 is in sliding fit with the support shaft 19, and a sliding bearing is arranged at the sliding connection part to reduce the friction force, a B-direction supporting shaft 17 is arranged on the cross seat 18, the B-direction supporting shaft 17 is vertical to the axial direction of the A-direction supporting shaft 19, a mounting seat 16 is arranged on the B-direction supporting shaft 17, the mounting seat 16 is in sliding fit with the B-direction supporting shaft 17, a sliding bearing is arranged at the sliding fit position, to reduce friction against sliding movement, the mounting base 16 has a mounting plate 15, and the output of the vibration generator 14 is connected to the mounting base 16 through the mounting plate 15. The double-shaft sliding assembly provided by the invention has the advantages of strong universality, simple structure, stability and firmness, and can meet the requirements of two vertical movements while supporting.
Claims (5)
1. The utility model provides an initiative eliminates device that external shock of optical system disturbed, includes optical platform, sets up the optical equipment on optical platform, the optical platform below is equipped with platform support, its characterized in that: the optical equipment is provided with an external trigger signal interface, an active vibration component is arranged between the platform support and the optical platform, an external vibration sensing module is arranged on the platform support, the external vibration sensing module, the external trigger signal interface and the active vibration component are all connected with a comprehensive processing host, and the comprehensive processing host is used for acquiring a vibration signal acted on the platform support by the environment through the external vibration sensing module and synchronously triggering the active vibration component according to the vibration signal to make reverse equal-amplitude vibration to offset the environment vibration;
the optical platform is provided with a platform table vibration sensing module, the platform table vibration sensing module is connected with a comprehensive processing host, and when the comprehensive processing host judges that environmental vibration cannot be effectively offset through the platform table vibration sensing module, an external trigger signal is linked, and the touch optical system provides an external working signal with the same vibration frequency as the optical equipment;
a plurality of platform supports are arranged below the optical platform, and each platform support is correspondingly provided with an external vibration sensing module and an active vibration assembly;
the active vibration component comprises an upper supporting plate and a lower supporting plate, the upper supporting plate is connected with the bottom of the optical platform, the lower supporting plate is connected with the platform support, and the upper supporting plate and the lower supporting plate are connected through a multi-axis vibration mechanism;
the multi-axis vibration mechanism is a three-axis vibration mechanism and comprises an X-axis vibrator, a Y-axis vibrator and a Z-axis vibrator which are respectively used for realizing X-axis active vibration, Y-axis active vibration and Z-axis active vibration;
the Z-axis vibrator is arranged on the upper surface of the lower supporting plate, and the X-axis vibrator and the Y-axis vibrator are respectively arranged on two mutually vertical side surfaces of the lower supporting plate.
2. The apparatus according to claim 1, wherein the apparatus for actively eliminating external vibration interference of the optical system comprises: z axle electromagnetic shaker is including shaking the generater and can realizing X axle, Y axle direction horizontal migration's biax sliding component, Y axle electromagnetic shaker is including shaking the generater and can realizing X axle, Z axle direction horizontal migration's biax sliding component, X axle electromagnetic shaker is including shaking the generater and can realize Y axle, Z axle direction horizontal migration's biax sliding component, and X axle electromagnetic shaker, Y axle electromagnetic shaker, Z axle electromagnetic shaker's vibrations generater and biax sliding component structure are the same, the installation direction is different.
3. The apparatus according to claim 2, wherein the apparatus for actively eliminating external vibration interference of the optical system comprises: the upper supporting plate is provided with three mounting surfaces, the three mounting surfaces are respectively used for fixedly mounting a vibration generator of an X-axis vibrator, a Y-axis vibrator and a Z-axis vibrator, and double-shaft sliding assemblies of the X-axis vibrator, the Y-axis vibrator and the Z-axis vibrator are fixed on corresponding positions of the lower supporting plate.
4. The apparatus according to claim 3, wherein the apparatus for actively eliminating external vibration interference of the optical system comprises: biax slip subassembly includes A to the back shaft, A is equipped with the cross seat to the back shaft, cross seat and A are to sliding fit between the back shaft be equipped with B on the cross seat to the back shaft, B is perpendicular mutually to back shaft and A to the back shaft axis direction, and B is equipped with the mount pad to the back shaft, mount pad and B are to sliding fit between the back shaft, and vibrations generater is connected on the mount pad.
5. The apparatus according to claim 4, wherein the apparatus for actively eliminating external vibration interference of the optical system comprises: the cross seat and the joint of the supporting shaft A are provided with sliding bearings, and the joint of the mounting seat and the joint of the supporting shaft B is provided with sliding bearings.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910645739.0A CN110360267B (en) | 2019-07-17 | 2019-07-17 | Device for actively eliminating external vibration interference of optical system |
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| CN201910645739.0A CN110360267B (en) | 2019-07-17 | 2019-07-17 | Device for actively eliminating external vibration interference of optical system |
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| CN110360267B true CN110360267B (en) | 2021-05-21 |
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| CN112228494A (en) * | 2020-09-24 | 2021-01-15 | 中国科学院微电子研究所 | Active damping system and scanning electron microscope with same |
| CN112709778B (en) * | 2020-12-02 | 2022-06-17 | 微控物理储能研究开发（深圳）有限公司 | Shock absorption photoetching machine and shock absorption method thereof |
| CN114251579B (en) * | 2021-11-19 | 2024-03-26 | 苏州浪潮智能科技有限公司 | Rack, shock mitigation system and shock attenuation support |
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| JP2003130128A (en) * | 2001-10-30 | 2003-05-08 | Canon Inc | Active vibration-free apparatus |
| JP2006283966A (en) * | 2005-03-10 | 2006-10-19 | Kurashiki Kako Co Ltd | Active vibration removing apparatus |
| DE102008026077B4 (en) * | 2008-05-30 | 2017-11-09 | Integrated Dynamics Engineering Gmbh | lithography system |
| JP6587487B2 (en) * | 2015-09-30 | 2019-10-09 | 倉敷化工株式会社 | Active vibration isolator and sensor installation method |
| JP6556196B2 (en) * | 2017-07-27 | 2019-08-07 | 倉敷化工株式会社 | Active vibration isolator |
| CN107345553B (en) * | 2017-09-07 | 2023-08-22 | 中国船舶重工集团公司第七一九研究所 | Shock-resistant swinging device for active vibration isolator |
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