CN110359021A - It is a kind of to improve pretreated target binding method - Google Patents
It is a kind of to improve pretreated target binding method Download PDFInfo
- Publication number
- CN110359021A CN110359021A CN201910774125.2A CN201910774125A CN110359021A CN 110359021 A CN110359021 A CN 110359021A CN 201910774125 A CN201910774125 A CN 201910774125A CN 110359021 A CN110359021 A CN 110359021A
- Authority
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- China
- Prior art keywords
- binding
- target pipe
- penstock
- metallic target
- metallic
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/04—Electroplating with moving electrodes
- C25D5/06—Brush or pad plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/04—Tubes; Rings; Hollow bodies
Abstract
Pretreated target binding method is improved the invention discloses a kind of, including step, b, penstock pre-treatment step, c, metallic target pipe pre-treatment step, d, binding step before a, pretreatment, a kind of pretreated target binding method of improvement through the invention, pretreating effect before rotary target is bound is effectively improved, rotary target is improved and binds quality.
Description
Technical field
The present invention relates to rotary targets to bind pretreated technical field, ties up more particularly, to a kind of pretreated target of improvement
Determine method.
Background technique
The viscous of rotary target binding is directly affected in the pretreating effect of penstock and metallic target pipe before binding to rotary target
Tie firmness and welded rate, adhesion firmness and welded rate it is low make rotary target occurs when in use it is conductive it is bad, heat dissipation is uneven, easy
The case where falling off seriously affects the use of product, therefore particularly important to the pretreatment before the binding of rotary target.
Metallic target pipe is integral into slender type, and metallic target length of tube is up to 2.7 meters, for the accurate control of target material structure, target
Inside pipe wall is to drill, the techniques such as bore hole process the size and shape of inner circle, but inner wall of long pipe processing is inevitable
There are the margins of tolerance in roughness and size.The roughness of inner wall changes and the caused accidentally surface defect of cutter vibration can not be kept away
Exempt from, in binding, the problems such as wetting and exhaust of recessed position necessarily will affect binding quality.Traditional metalized, benefit
Enhanced with ultrasonic wave binding soldering material and target pipe between binding force, but for it is rougher, can not accurately measure removal lack
Sunken long tube target inner wall, single ultrasonic wave metal cannot ensure the exhaust and coating at the depression defects such as deeper tool marks.
And because metallic target pipe is elongated, when binding face ultrasound paint metals layer to metallic target pipe, lead to not check judgement gold
The uniformity for belonging to target pipe binding face metalization layer, cannot be effectively ensured between binding solder and metallic target pipe has enough infiltrations
Property, the rotary target pretreating effect before binding is poor, and the welded rate for causing rotary target to be bound is low, and rotary target binding quality is difficult to protect
Card.
Summary of the invention
In view of the deficienciess of the prior art, improving pretreated target binding side the object of the present invention is to provide a kind of
Method effectively improves pretreating effect before rotary target is bound, and improves rotary target and binds quality.
To achieve the goals above, the technical scheme adopted by the invention is that: it is a kind of to improve pretreated target binding side
Method includes the following steps,
A, the binding face of step before pretreatment, binding face and penstock to metallic target pipe carries out sandblasting, cleaning and baking respectively
Dry-cure；
B, penstock pre-treatment step, by the binding face of the penstock after cleaning, drying carry out ultrasound coating binding brazing metal from
And a penstock metalization layer is formed, including following sub-step,
B1, it penstock is installed on to one can make the rotating device of its at the uniform velocity rotation,
B2, penstock is heated to after the first temperature and is kept the temperature, which is higher than the melting temperature of binding brazing metal
And it is lower than the melting temperature of metallic target pipe and penstock,
B3, starting rotating device rotate penstock at the uniform velocity, and penstock rotational velocity is controlled at 3-6 revs/min,
B4, start ultrasonic coating unit, the binding brazing metal of molten added in the liquid reserve tank of ultrasonic coating unit,
Liquid reserve tank will bind brazing metal according to the liquid feed speed of setting and be supplied in ultrasonic brush head, and ultrasonic brush head is according to 100mm/ points
The speed of clock at the uniform velocity moves in the binding face of penstock, until the binding face of penstock is completely covered in binding brazing metal, it is thick to form one
Degree is the penstock metalization layer of 0.05-0.1mm, cancels the heating to penstock, completes penstock pretreatment；
C, metallic target pipe pre-treatment step makes electric brush plating liquor in the binding of metallic target pipe the metallic target pipe after cleaning, drying
Face carry out Brush Plating to formed one enhancing metal layer, carried out on the basis of enhance metal layer using binding brazing metal thus
A target metalization layer, including following sub-step are formed,
C1, it metallic target pipe is installed on to one can make the rotating device of its at the uniform velocity rotation,
C2, the voltage of electric brushing coating installation is arranged in 10-15V, electric current setting, will be negative in electric brushing coating installation in 30-50A
Pole is electrically connected to metallic target pipe and forms cathode interconnecting piece, and cathode interconnecting piece is arranged around the tube wall of metallic target pipe,
C3, starting rotating device rotate metallic target pipe at the uniform velocity, and the control of the rotational velocity of metallic target pipe turns in 0.8-1.2/
Minute,
It is provided with a feed flow portion in c4, electric brushing coating installation, electric brush plating liquor is stored in feed flow portion, feed flow portion is connected to brush plating
Head, feed flow portion provide electric brush plating liquor to brush plating head according to the liquid supply speed of setting, start electric brushing coating installation, and metallic target pipe is yin
Pole, brush plating head are anode, and it is a unit length that each movable length of brush plating head in electric brushing coating installation, which is 1-1.5m, is moved per minute
Move 3-6 unit length, the metal ion in electric brush plating liquor discharges crystallization on the binding face of metallic target pipe, formation one with a thickness of
The enhancing metal layer of 0.03-0.08mm completes enhancing metal layer until the binding face of metallic target pipe is completely covered in enhancing metal layer
Brush Plating,
C5, the electric brush plating liquor in metallic target pipe is recycled, the enhancing metal layer of metallic target pipe is carried out using clear water
Cleaning,
C6, metallic target pipe is heated to second temperature and is kept the temperature, which is higher than the fusing point temperature of binding brazing metal
Degree and the melting temperature for being lower than metallic target pipe and penstock,
C7, starting rotating device rotate metallic target pipe at the uniform velocity, and metallic target pipe rotational velocity is controlled at 3-6 revs/min,
C8, by ultrasonic coating unit, will binding brazing metal on the basis of enhance metal layer ultrasound brush head according to 10-
20mm/ minutes speed at the uniform velocity moves in the binding face of metallic target pipe, until metallic target pipe is completely covered in binding brazing metal
Binding face forms one with a thickness of the target metalization layer of 0.08-0.1mm, cancels the heating to metallic target pipe, complete metallic target pipe
Pretreatment；
D, step is bound, between being provided with the binding of set distance between the binding face of metallic target pipe and the binding face of penstock
Gap, pours into binding brazing metal in binding gap, and binding brazing metal is formed by curing binding layer.
In further technical solution, the electric brush plating liquor be comprising tin compound, nickel compound or copper compound, it is described
Cathode interconnecting piece selects metallic copper material to be made.
In further technical solution, before a, pretreatment before step, the inner wall of the metallic target pipe is carried out
Drilling or bore hole form recessed position, in the c4 step, are formed by the recessed position to metallic target pipe with a thickness of 0.05-
The 0.08 enhancing metal layer.
In further technical solution, in the c4 step, by electric brush plating liquor the metallic target pipe inner wall table
Face crystallization is filled the recessed position, the interface that the formation one between metallic target pipe and enhancing metal layer rises and falls,
The another side of the enhancing metal layer opposite with interface is an even surface.
In further technical solution, the metallic target pipe selects molybdenum target material, and the penstock selects titanium penstock, the binding
Brazing metal selects indium, and in b2 the and c6 step, first temperature and second temperature are controlled respectively at 170-300 DEG C.
In further technical solution, step before a, pretreatment further includes following sub-step, a1), respectively to described
The binding face of metallic target pipe and the penstock carries out blasting treatment, respectively reaches the binding surface roughness of metallic target pipe and penstock
Ra0.8-1.6；A2), metallic target pipe and penstock are placed in ultrasonic cleaning pond, successively heat water and wine into ultrasonic wave pond
Essence cleans the binding face of metallic target pipe and penstock；A3), metallic target pipe and penstock heating device is put into dry,
The temperature setting of heating device dries metallic target pipe and the binding face liquid of penstock at 160-300 DEG C.
In further technical solution, in the a2 step, by the metallic target pipe and the penstock at 50-100 DEG C
Hot water in clean 1-2 hours, after metallic target pipe and penstock are cleaned in the hot water, in the ultrasonic cleaning pond plus alcohol washes
5-15 minutes.
In further technical solution, in the c8 step, the ultrasound coating unit generates ultrasonic wave, and ultrasonic wave is made
The atom rate travel and quickening liquid in binding brazing metal for the binding brazing metal of molten, to accelerate liquid
The flowing of the binding brazing metal of state, while spread the binding brazing metal of molten further to enhancing metal layer, make
Enhance the wetting contact between metal layer and target metalization layer, makes to form one between metalization layer and enhancing metal layer and spread to glue
Tie layer.
In further technical solution, the length of the metallic target pipe is more than 1.5 meters, then metallic target pipe interval 0.8-1.1
A cathode interconnecting piece is respectively set in rice, makes the homogeneous current distribution in metallic target pipe, formed the metal of the enhancing metal layer from
The deposition rate of son keeps uniform.
In further technical solution, in the b4 step, by the ultrasonic wave in ultrasonic coating unit in the back
The binding face of pipe carries out vibration friction, increases the contact area between binding brazing metal and penstock binding face, makes penstock and tie up
Determine to form an adhesive force layer between the molecular layer of brazing metal phase mutual friction.
After adopting the above method, the invention has the advantages that compared with the prior art:
1. the present invention enhances metal layer using the brush plating of Brush Plating mode, the uniform of target inside pipe wall coating effect can be effectively ensured
Property, to ensure between binding brazing metal and metallic target pipe having enough wellabilities, ensure and enhance the binding effect of rotary target.
2. the present invention is coated using binding brazing metal by the ultrasonic wave that ultrasonic wave coating unit issues, thus shape
At the stronger target metalization layer of cohesive force and penstock metalization layer, welded rate is helped to improve.
3. multiple cathode interconnecting pieces are respectively set using interval set distance setting in the present invention, long during Brush Plating
The monolithic conductive uniform in effect of the rotary target of type, keeps the deposition rate of metal ion in electric brush plating liquor close, reduces operation difficulty,
The surface smoothness of the enhancing metal layer of formation is high.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 and Fig. 2 is the microstructure schematic diagram of metallic target pipe and enhancing metal layer of the invention respectively.
Specific embodiment
It is only below presently preferred embodiments of the present invention, is not intended to limit the scope of the present invention.
It is a kind of to improve pretreated target binding method, comprising the following steps:
A, the binding face of step before pretreatment, binding face and penstock to metallic target pipe carries out sandblasting, cleaning and baking respectively
Dry-cure；
Before being pre-processed to metallic target pipe and penstock, it is necessary to carry out preliminary treatment to metallic target pipe and penstock, tentatively
Processing includes carrying out sandblasting and cleaning to the binding face of metallic target pipe and the binding face of penstock.Sandblasting makes rough surface, increase table
Area, that is, contact surface increases the adhesive force of the coating on the sandblasting face；The machining of penstock outer circle can achieve coarsely lower
Degree, surface is more smooth, the difficulty that target pipe inner circle is processed due to long pipe orifice, so that roughness control is more difficult, there are a small amount of lifts
Deng defect caused by processing, sandblasting can improve the surface condition in sandblasting face, can improve the uniformity of sandblasting surface roughness, favorably
Quality is bound in improving.
Sandblasting simultaneously can also remove the natural oxide film in the binding face of metallic target pipe and penstock.To metal before increasing coating
The binding face of target pipe and penstock is cleaned, the particulate matter mainly left to flushing nozzleman's sequence, while removing metallic target pipe
With the fatty quasi-grease and other organic dirts in the binding face of penstock, the good cleannes in the binding face of metallic target pipe and penstock
It is the premise to obtain good uniform coating effect, and effectively prevent the pollution to subsequent handling.
More specifically, further include following sub-step: a1), sandblasting is carried out to the binding face of metallic target pipe and penstock respectively
Processing, makes the binding surface roughness of metallic target pipe and penstock respectively reach Ra0.8-1.6；The spray of the binding face of metallic target pipe or penstock
Sand roughness is too small, be easy to cause the poor adhesive force of enhancing metal layer, while can not completely remove tying up for metallic target pipe and penstock
Determine the natural oxide film in face；Metallic target pipe and the binding face blasted rough degree of penstock are too big, due to enhancing metal layer and penstock gold
The requirement thinner thickness of categoryization layer can not cover the binding face of metallic target pipe, make if roughness is too big after enhancing metal layer coating
Metallic target pipe binding face is exposed, can not cover penstock after influencing the coating effect or the coating of penstock metalization layer of metalization layer
Binding face keeps penstock binding face exposed, influences binding layer and penstock metalization layer effect.Preferably, the metallic target of Ra0.8-1.6
Pipe and the binding surface roughness of penstock are suitable ranges.
A2), metallic target pipe and penstock are placed in ultrasonic cleaning pond, successively heat water and alcohol into ultrasonic wave pond
The binding face of metallic target pipe and penstock is cleaned；Metallic target pipe and penstock are tied up by ultrasonic wave using hot water and alcohol
Determine face to be cleaned, the vibration that ultrasonic wave generates hot water and alcohol helps to enhance degreasing effect, while also can be by metallic target
Particulate matter at the coarse dolly dimple in the binding face of pipe and penstock shakes out or goes out.Hot water and alcohol can effectively remove fats oil
Rouge machine organic dirt acts in conjunction with ultrasonic wave, cleans up the binding face of metallic target pipe and penstock, reach Brush Plating table
The requirement of face cleannes.More specifically, in a2 step, metallic target pipe and penstock are cleaned into 1-2 in 50-100 DEG C of hot water
Hour, metallic target pipe and penstock add alcohol washes 5-15 minutes in ultrasonic cleaning pond after hot water cleaning.
A3), metallic target pipe and penstock are put into heating device to dry, the temperature setting of heating device is in 160-300
℃.Metallic target pipe and penstock are removed from ultrasonic cleaning pond, to after cleaning metallic target pipe and penstock dry, heat
The temperature setting of device makes the water or vaporized alcohol of the binding face of metallic target pipe and penstock remnants at 160-300 DEG C, for pre- place
Science and engineering sequence is prepared.
B, penstock pre-treatment step, by the binding face of the penstock after cleaning, drying carry out ultrasound coating binding brazing metal from
And a penstock metalization layer is formed, including following sub-step,
B1, it penstock is installed on to one can make the rotating device of its at the uniform velocity rotation, by the way that penstock is installed on an at the uniform velocity rotation
Rotating device in, penstock rotates automatically, reduces the workload of worker, improves working efficiency, while controlling the at the uniform velocity rotation of penstock
Turn the consistency of the thickness for the penstock metalization layer for helping to ensure that ultrasound coating is formed.
B2, penstock is heated to after the first temperature and is kept the temperature, which is higher than the melting temperature of binding brazing metal
And it is lower than the melting temperature of metallic target pipe and penstock, and it is easy to oxidize at normal temperature because the fusing point of binding brazing metal is lower, it is formed
Penstock is heated above the temperature of binding brazing metal by one oxidation film, is kept molten by binding brazing metal, is facilitated
Bind the diffusion of brazing metal.More specifically, set temperature is arranged at 160-300 DEG C.
B3, starting rotating device rotate penstock at the uniform velocity, and penstock rotational velocity is controlled at 3-6 revs/min.
B4, start ultrasonic coating unit, the binding brazing metal of molten added in the liquid reserve tank of ultrasonic coating unit,
Liquid reserve tank will bind brazing metal according to the liquid feed speed of setting and be supplied in ultrasonic brush head, and ultrasonic brush head is according to 100mm/ points
The speed of clock at the uniform velocity moves in the binding face of penstock, until the binding face of penstock is completely covered in binding brazing metal, forms thickness
For the penstock metalization layer of 0.05-0.1mm, the heating to penstock is cancelled, completes penstock pretreatment；The confession of brazing metal will be bound
It cooperates to speed, ultrasonic brush head movement speed and penstock rotational velocity, to realize the thickness of the penstock metalization layer formed
More uniformly, it while can control ultrasonic brush head in the ultrasonication time consistency of per unit area, binding brazing metal made to exist
Per unit area to penstock binding face diffusion time it is consistent, facilitate bind brazing metal formed on penstock binding face it is attached
Put forth effort and the stronger penstock metalization layer of cohesive force, raising binding welded rate.More specifically, in b4 step, pass through ultrasound
Ultrasonic wave in coating unit carries out vibration friction in the binding face of penstock, increases between binding brazing metal and penstock binding face
Contact area, make penstock and bind the mutual friction of brazing metal phase molecular layer between generate fusion to formed an adhesive force
Layer.The adhesive force layer is only limitted to interpenetrating between molecular layer and spreads, no generation intermetallic compound, the adhesive force layer
Tensile strength is strong, which keeps penstock and penstock metalization layer tight between penstock metalization layer and penstock binding face
Closely connected conjunction, while penstock metalization layer is identical as the metal material that binding layer uses, penstock metalization layer is the equal of a transition
Layer, effectively improves the wellability between penstock and binding layer, to further increase welded rate.It is tied up in ultrasonic coating unit use
After determining the binding face that brazing metal coats penstock completely, set distance of the setting scraper apart from penstock binding face, the set distance
For the thickness of penstock metalization layer, scraper and penstock are co-axially mounted, scraper is made to scrape off the extra binding gold of penstock metalization layer
Belong to solder, further ensures that the consistency of penstock metallization layer thickness.
C, metallic target pipe pre-treatment step makes electric brush plating liquor in the binding of metallic target pipe the metallic target pipe after cleaning, drying
Face carries out Brush Plating to form enhancing metal layer, is carried out on the basis of enhancing metal layer using binding brazing metal to shape
At a target metalization layer.
Coating binding solder indium is carried out this invention takes the outer wall to penstock and forms penstock metalization layer, to metallic target pipe
Inner wall carry out Brush Plating and form enhancing metal layer, then to form target golden for coating binding solder indium on the basis of enhance metal layer
Categoryization layer binds penstock and metallic target pipe, which is set as method 1.
Two groups of comparative experimentss are taken respectively, and the design of scheme of method 2 is that coating binding solder indium is carried out to the outer wall of penstock
Form penstock metalization layer, target metalization layer formed to the inner wall of metallic target pipe coating binding solder indium, then to penstock and
Metallic target pipe is bound.The design of scheme of method 3 is to carry out coating binding solder indium to the outer wall of penstock to form penstock metal
Change layer, then on the basis of penstock metalization layer, metal layer is enhanced to one layer of penstock of outer wall Brush Plating of penstock, to metallic target pipe
Inner wall carry out Brush Plating and form enhancing metal layer, then to form target golden for coating binding solder indium on the basis of enhance metal layer
Categoryization layer binds penstock and metallic target pipe, and penstock and metallic target pipe use identical technique of brush plating and electric brush plating liquor.
Every kind of binding method does 3 groups of experiments respectively, obtains different binding welded rate data.
| Experimental group | Experimental group 1 | Experimental group 2 | Experimental group 3 |
| Method 1 | 98% | 98% | 98% |
| Method 2 | 96% | 96% | 97% |
| Method 3 | 98% | 98% | 98% |
Table 1.1 take respectively 3 kinds it is different to the obtained binding soldering of the pretreating scheme of penstock and metallic target pipe
Rate data.
For rotary target binding, the wellability between material directly affects the welded rate of binding.And wellability and material
The pattern of matter and material surface has much relations, and material surface pattern is uneven, directly affects exhaust when binding, exhaust is not
Freely, binding quality is directly affected, large area bubble is formed, binding welded rate is poor, it is therefore desirable to guarantee the light of metallic target inside pipe wall
Slippery just can guarantee the welded rate of rotary target binding.The length of metallic target pipe is longer, and the knife bar of processing target inside pipe wall bore hole is got over
Long, rigidity is poorer, and the roughness and dimensional tolerance of inner surface differ larger compared with the outer circle of lathe process after processing, due to gold
Belong to the elongate form of target pipe, the means of detection are restricted, detailed can not observe, therefore the pretreatment of metallic target pipe is before binding
It has to carry out place mat work, improves the smoothness of the inner wall of metallic target pipe.From the comparison number of method 1 and method 2 in table 1.1
According to can be seen that rough surface will appear in processing because of situations such as metallic target inside pipe wall, bore hole lifts is difficult to avoid that, also difficult
With stability contorting, traditional metalization layer is only limitted to the painting of recessed position coated with the high degrees of smoothness for realizing metallic target inside pipe wall
It is far from being enough, it is therefore desirable to by then enhancing after Brush Plating forms an enhancing metal layer in metallic target inside pipe wall
Target metalization layer is coated on the basis of metal layer, to realize the high degrees of smoothness of metallic target inside pipe wall, improves rotary target binding
Welded rate.It can be seen that the welded rate comparison of method 3 and method 1 as can be seen that due to being penstock from the data in table 1.1
After being machined by lathe, the precision on surface and cursorily sufficiently small directly coats the outer wall of penstock and forms penstock metallization
Layer is enough to ensure that binding welded rate, and method 3 is identical as the welded rate that method 1 is obtained, therefore does not need to carry out penstock outer wall
Brush Plating.
Specifically include following sub-step:
C1, it metallic target pipe is installed on to one can make the rotating device of its at the uniform velocity rotation, control the rotation speed of metallic target pipe
Cooperate with the brush plating head movement speed of electric brushing coating installation, to control to form an enhancing metal layer in homogeneous thickness.
More specifically, metallic target pipe is installed on comprising the concrete steps that for inner tubal wall pretreatment process equipment: by sandblasting and clearly
Metallic target pipe after washing is installed in the rack of inner tubal wall pretreatment process equipment, and the inclination that one end can be gone up and down is hinged in rack
Platform, the rotation fixed part for rotating metallic target pipe is provided on sloping platform, and metallic target pipe is fixed on rotation fixed part
It is interior；Because the cross-sectional area of metallic target pipe is circle, Brush Plating is carried out in the binding face to metallic target pipe, metallic target pipe is fixed on
In the equipment that a meeting rotates it, Brush Plating operation of being more convenient for manually is rotated without passing through, easy to operate.It tilts simultaneously
Platform is convenient for the electric brush plating liquor recycling after Brush Plating.When being rinsed the metallic target pipe after Brush Plating, it is also convenient for rinsing
Later liquids recovery.High degree of automation, it is simple to operate.
C2, the voltage of electric brushing coating installation is arranged in 10-15V, electric current setting, will be negative in electric brushing coating installation in 30-50A
Pole is electrically connected to metallic target pipe and forms cathode interconnecting piece, and cathode interconnecting piece is arranged around the tube wall of metallic target pipe, sets fixed
Voltage and current, the speed of crystallization so that the metal ion in control brush plating solution discharges on metallic target pipe binding face.
C3, starting rotating device rotate metallic target pipe at the uniform velocity, and the control of the rotational velocity of metallic target pipe turns in 0.8-1.2/
Minute.
It is provided with a feed flow portion in c4, electric brushing coating installation, electric brush plating liquor is stored in feed flow portion, feed flow portion is connected to brush plating
Head, feed flow portion provide electric brush plating liquor to brush plating head according to the liquid supply speed of setting, start electric brushing coating installation, and metallic target pipe is yin
Pole, brush plating head are anode, and it is a unit length that each movable length of brush plating head in electric brushing coating installation, which is 1-1.5m, is moved per minute
Move 3-6 unit length, the metal ion in electric brush plating liquor discharges crystallization on the binding face of metallic target pipe, formation one with a thickness of
The enhancing metal layer of 0.03-0.08mm completes enhancing metal layer until the binding face of metallic target pipe is completely covered in enhancing metal layer
Brush Plating.Preferably, enhance the thickness control of metal layer in 0.05-0.07mm.The liquid supply speed of control brush plating solution,
It is equipped with the movement speed of brush plating head, making electric brush plating liquor that the ion concentration to be formed be electroplated uniformly enhances metal layer.Meanwhile
Matched by the control of three aspect of movement speed of the rotation speed and brush plating head of liquid supply speed, metallic target pipe to electric brush plating liquor
It closes, to control the uniformity of enhancing metal layer thickness.Meanwhile the enhancing metal layer and metallic target formed by Brush Plating mode
The binding force of material is strong.
Before a, pretreatment before step, when processing bore hole or drilling to metallic target pipe, metallic target inside pipe wall is coarse, bore hole
Situations such as lifts, is difficult to avoid that, while being also difficult to control, and in this case, Brush Plating is due to operating conveniently, it is easier to ensure that machine
Metallic target inside pipe wall caused by processing is coarse or the effective of recessed position surface fills or coat, and making, which enhances metal layer, forms one
Even smooth plane.So that the inner wall of metallic target pipe is formed a smooth face, can effectively avoid in subsequent binding procedure
Bubble area is formed, binding rate is effectively improved.In c4 step, by recessed position to metallic target pipe formed with a thickness of
The enhancing metal layer of 0.05-0.08mm forms the enhancing metal with a thickness of 0.03-0.05mm to the part other than recessed position
Layer, so that the surface uniformity difference of the surface of enhancing metal layer to metallic target pipe outer wall controls in the range of 0.005mm.Adding
During work, the recessed position height that the bore hole or tool marks of formation are formed is generally in 0.03-0.08mm, therefore at recessed position
The enhancing metal layer of the 0.05-0.08mm thickness of formation is to be enough to fill recessed position completely.Preferably, in recessed position
Place forms the enhancing metal layer of 0.08mm thickness.More specifically, in c4 step, as depicted in figs. 1 and 2, Fig. 1 and Fig. 2 are handed over
The left side at interface is the enhancing metal layer that Brush Plating is formed, and the right side of Fig. 1 and Fig. 2 interface is metallic target pipe, passes through Brush Plating
Liquid is filled recessed position in the inner wall surface crystallization of metallic target pipe, the formation between metallic target pipe and enhancing metal layer
It rises and falls and rough interface, the another side that enhances metal layer opposite with interface is even surface.Enhance metal layer
The coarse or recessed position of metallic target pipe is filled, therefore, the interface of enhancing metal layer and metallic target inside pipe wall is one
Relief, and enhance metal layer and formed after certain thickness, the coarse or recessed position of metallic target inside pipe wall is filled completely, is made
Enhancing the metal layer face opposite with the interface of target inside pipe wall is an even surface.So that the surface of enhancing metal layer is to metallic target pipe
The surface uniformity difference of outer wall controls in the range of 0.005mm.It is preferred that so that outside the surface to metallic target pipe of enhancing metal layer
The surface uniformity difference of wall controls in the range of 0.002mm.
More specifically, the length of metallic target pipe is more than 1.5 meters, then 0.8-1.1 meters of metallic target pipe interval setting cathode connects
Socket part.The preferred metallic copper material of cathode interconnecting piece is made.If the length of metallic target pipe is too long, between brush plating head and cathode interconnecting piece
Distance it is excessive, make the current dissipation in metallic target pipe, conductive effect is poor, influences the deposition of metal ion when Brush Plating, causes
The effect of the enhancing metal layer of formation is poor.In interval 0.8-1.1 meters of setting cathode interconnecting piece of metallic target pipe, guarantee in metallic target pipe
The current density and conductive effect of each point are close, so that the metal ion in electric brush plating liquor is kept uniform deposition rate, reduce behaviour
Make difficulty, the overall surface for enhancing metal layer is smooth, and the enhancing metal layer of the longer metal targets pipe of length can be effectively ensured
Brush Plating effect.
It is more than the processing mode of the cathode interconnecting piece of 1.5 meters of metallic target pipe for length, passes through tying up in metallic target pipe
Determine face to carry out Brush Plating and form enhancing metal layer.Since metallic target pipe is elongated, volume is big and weight is big, and need to be in metallic target pipe
Binding face increases enhancing metal layer, makes enhancing metal layer using Brush Plating mode, equipment is simple, flexible operation, therefore only
Anode brush head is needed to carry out Brush Plating to metallic target pipe binding face, metallic target pipe outer wall does not need to make additional processing, such as
It is protected without doing additional cladding to metallic target pipe outer wall etc., or makees excessive movement to metallic target pipe.Can have by Brush Plating
The surface uniformity of effect control enhancing metal layer, the surface uniformity for enhancing metal layer refer to the surface of enhancing metal layer to metal
The uniformity of the distance of target pipe outer wall.Accidental surface defect caused by being shaken in processing due to cutter due to the inner wall of target tube
With the deviation in size, in binding, the problems such as wetting and exhaust of recessed position, will affect binding quality.Only lean on traditional gold
Categoryization processing, cannot ensure filling up for the relatively serious position of the recess such as deeper tool marks, recessed position is obvious, uneven surface
It is whole, cause binding when be vented it is unsmooth, cause binding welded rate it is low.It is coated with and increases between target metalization layer and metallic target pipe
Strong metal layer, can effectively make up because metallic target pipe is too long can not detect check metallic target pipe binding face target metalization layer it is uniform
Property technological deficiency, the coating inhomogeneities of target metalization layer directly affect binding brazing metal and metallic target pipe between leaching
Lubricant nature, therefore the uniformity of target metalization layer can not ensure, the binding unstable quality of rotary target.Face is bound to metallic target pipe
Increase enhancing metal layer, to increase the wellability between binding brazing metal and metallic target pipe using enhancing metal layer, because of enhancing
The uniform performance of metal layer is effectively controlled, and the wellability bound between brazing metal and metallic target pipe is controlled effectively
And guarantee.
More specifically, for the setting of metallic target pipe outer wall at least there are two cathode interconnecting piece, the cathode of power supply is electrically connected cathode
Interconnecting piece, the positive connecting strap of power supply have the anode brush head of electric brush plating liquor.
In Brush Plating, metallic target pipe connects the cathode of power supply, and anode brush head connects the anode of power supply, has electric brush plating liquor
Binding face surface wipes of the anode brush head in metallic target pipe, surface and sun of the metal ion in metallic target pipe in electric brush plating liquor
A crystallization is put on each point of pole head contacts, and the enhancing metal layer for increasing at any time and being formed gradually thickeies, due to sun
Pole brush head and metallic target pipe have certain speed of related movement, thus enhancing for each point on metal layer is a discontinuously crystallization
Process.Electric brush plating liquor is to include tin compound, nickel compound or copper compound.
It is surrounded with the cathode interconnecting piece made of conductive metal material in the outer wall of metallic target pipe, adjacent cathode connects
Socket part interval 80-110cm setting, to realize that it is conductive uniform that the Brush Plating position of anode brush head in metallic target pipe binding face is formed
Area；
Table 1.2 is 1 cathode interconnecting piece to be arranged in metallic target pipe cathode is arranged at interval of set distance in metallic target pipe
Experimental comparison's data of interconnecting piece.
Table 1.2 is metallic target pipe when 2.7 meters long, 1 cathode interconnecting piece is arranged in metallic target pipe and at interval of 80-
Experimental comparison's data of 1 cathode interconnecting piece are respectively set in 110cm.When 1 cathode interconnecting piece is arranged in metallic target pipe, Brush Plating shape
It is 4 hours at the enhancing metal layers time.And 1 cathode interconnecting piece is respectively set at interval of 80-110cm in metallic target pipe
When, the Brush Plating formation enhancing metal layers time is 1.5 hours.Since the length of metallic target pipe is up to 1.5 meters or more, electricity
The cathode in source is closer from anode brush head in the link position of metallic target pipe, and the current density of formation is of moderate size, and current density is equal
Even, conductive effect is good, and the time for forming enhancing metal layers is shorter, forms the high-efficient of enhancing metal layer.Opposite, electricity
The cathode in source is remoter from anode brush head in the link position of metallic target pipe, and current density is small, and current dissipation, conductive effect is poor, shape
Time at enhancing metal layers is longer, needs the thickness of the time of the Brush Plating longer enhancing metal layer that can be only achieved requirement
Degree.
Cathode interconnecting piece is arranged in the position ring of the side end 100cm from rotary target material from table 1.3 around being equipped with one
Cathode interconnecting piece finds out that for current collection in the left and right sides of cathode interconnecting piece, current distribution is uneven leads to each dot from table 1.2
At enhancing metal layer differ greatly, the thickness of the enhancing metal layer formed close to cathode interconnecting piece two side position is thicker, far
1 annular cathode connection is arranged in thinner thickness from the enhancing metal layer that cathode interconnecting piece position is formed on metallic target pipe
Portion, since the current strength close to the position of cathode interconnecting piece is strong, uniform current density, conductive effect is good, the enhancing gold of formation
Time used in category layer is short, and the current strength of the position far from cathode interconnecting piece is weak, and current density dispersion, conductive effect is poor, shape
Time at enhancing metal layers is long, since the current strength of each position differs farther out, enhances metal to formation in operation
The time difficulty control of thickness degree, to keep the uniformity for the enhancing metal layer to be formed poor.
On 1.3 metallic target pipe of table be arranged 1 annular cathode interconnecting piece, rotary target material along its length at interval of
40cm, the thickness data for the enhancing metal layer that the different angle in the same section of different distance detects.
An annular cathode interconnecting piece is respectively set at interval of 80cm on metallic target pipe in table 1.4, on rotary target material edge
Length direction is at interval of 20cm, the thickness data for the enhancing metal layer that the different angle in the same section of different distance detects.
The metallic target pipe that table 1.3 and table 1.4 are selected respectively with a thickness of 16mm.
The present invention is on the metallic target pipe around setting cathode interconnecting piece made of conductive metal material, it is preferable that yin
Interconnecting piece preferred metallic copper material in pole is made.The electric conductivity of metallic copper is more excellent.Therefore cathode interconnecting piece plays electrical conduction here
Effect, selects the material to conduct electricity very well, plays the effect of more preferable conduction electricity.Cathode interconnecting piece is arranged around metallic target pipe, from
And the one annulus contact ring of shape layer between cathode interconnecting piece and metallic target pipe, the electric current on the cathode of power supply are contacted along annulus
Circle is conducted, and is dissipated into metallic target pipe along annulus contact ring, to form the cylindrical brush of a uniform current density
Plate electric field.Find out from the data of table 1.4, an annular cathode interconnecting piece be respectively set at interval of 80cm on metallic target pipe,
Due to each point homogeneous current distribution at the section, good conductivity, the enhancing metal that the difference on same section is formed
Thickness degree is substantially uniform, and the thickness difference of the enhancing metal layer in same section is maintained in lesser range.Therefore in metal
Multiple cathode interconnecting pieces, which are arranged, around interval on target pipe can make current distribution more evenly, and electric conductivity is more preferable, thus more easy
Control enhancing metal layer forms the rate of thickness, keeps enhancing layer on surface of metal uniformity more preferable.The enhancing metal that Brush Plating is formed
Layer by anode brush head and cathode interconnecting piece positional distance influenced, therefore cathode interconnecting piece at interval of 80-110cm setting one
It is a, with realize anode brush head and the distance between cathode interconnecting piece be maintained in suitable range, electric current in the range
Density is of moderate size, uniform current density, and conductive effect is good, to form a conductive homogeneity range, forms the rate of enhancing metal layer
It is more average, to more be easy to control the surface uniformity of enhancing metal layer.
In conjunction with table 1.2,1.3 and table 1.4 as can be seen that anode brush head is remoter with a distance from cathode interconnecting piece, anode brush head electricity
In the case of the brush plating same time, the enhancing metal layer thickness of formation is thinner, and electroplating efficiency is low, thus to length up to 2 meters with
On metallic target pipe metallic brush plating when, the distance between anode brush head and cathode interconnecting piece will affect enhance metal layer formation
Rate, because enhancing metal layer synthesis speed can change with anode brush head from the distance between cathode interconnecting piece, to length compared with
When the long metallic target pipe that 1 cathode interconnecting piece is only arranged carries out Brush Plating, Brush Plating operation difficulty is increased, makes to enhance metal
The surface uniformity of layer not can guarantee.
It can be seen that from the data of table 1.4 and often take the enhancing metal layer a little detected in the every distance 20cm of same straight line
Thickness difference is maintained within the scope of 0.002mm, in the thickness for the enhancing metal layer that same section different rotation angle takes a detection to obtain
Degree difference is maintained within the scope of 0.002mm, is illustrated that an annular cathode interconnecting piece is arranged at interval of 80cm, can be made metallic target pipe
Homogeneous current distribution can form conductive homogeneity range, the anode brush head is in conductive homogeneity range when anode brush head carries out Brush Plating
Form the enhancing metal layer in homogeneous thickness on surface to metallic target pipe outer wall.
Because the length of metallic target pipe is longer, and every time, the moving distance of anode brush head is 1-1.5 meters long, therefore will be by sun
The Brush Plating that metallic target pipe is completed in brush head segmentation in pole could form complete enhancing metal layer.
Existing is being segmentation binding to rotary target binding, and the length of every section of metallic target pipe when segmentation is bound is shorter,
It can observe the formational situation of metallic target pipe binding face metalization layer, conveniently to ensure subsequent to bind metal welding when being bound
There are enough wellabilities between material and metallic target pipe, the binding quality of rotary target can just be effectively ensured.As shown in table 1.4, it is based on
The too long meticulous particularity of metallic target pipe can not check the formational situation of confirmation metalization layer, to not can guarantee rotary target
Quality, the binding unstable quality of metallic target pipe are bound, therefore passes through brush between metalization layer and metallic target pipe binding face
Plating means increase by one layer of enhancing metal layer as transition, preferably fill up to recess more visibility point work, make metallic target
The inner wall of pipe forms good smooth pattern.It is connected simultaneously in metallic target pipe at interval of 80-110cm setting cathode using the present invention
Portion, thus the enhancing metal layer that the uniformity formed is good, then further ultrasound on the basis of uniformity good enhancing metal layer
Metalization layer is coated, forms a diffusion bonding at the diffusion bonding layer is formed in uniformly between metalization layer and enhancing metal layer
Property good enhancing metal layer, the caking property between target metalization layer and enhancing metal layer, to guarantee leptosomatic metallic target
There are enough wellabilities between binding brazing metal and metallic target pipe when pipe is bound, the binding matter of rotary target can just be effectively ensured
Amount.Meanwhile the ultrasonic wave of ultrasonic coating unit generation carries out the coating of binding brazing metal, by ultrasonication, makes enhancing gold
Belong to the wetting contact between layer and target metalization layer, makes to form a diffusion bonding between target metalization layer and enhancing metal layer
Cohesive force between layer, more reinforcing target metalization layer and enhancing metal layer.Keep the binding effect of rotary target material more excellent.This hair
Bright scheme is also applied for the binding brazing metal rotary target binding scheme not strong with the metallic cohesion of metallic target pipe.
C5, the electric brush plating liquor in metallic target pipe is recycled, the enhancing metal layer of metallic target pipe is carried out using clear water
Cleaning.Electric brush plating liquor is recycled, prevents from polluting the environment.Metallic target pipe is cleaned using clear water, prevents electricity
Brush plating liquid causes cross contamination to subsequent step, influences the film layer effect being subsequently formed.
More specifically, the sloping platform of starting inner tubal wall pretreatment process equipment, to the remnants in metallic target pipe binding face
Brush plating liquid is collected, and one end by rising sloping platform makes metallic target pipe generally in heeling condition, the low side in position
It is provided with liquid collecting box, remaining brush plating liquid influent collecting box reuses clear water and rinses to metallic target pipe, to metallic target pipe
It is thermally dried, completes the Brush Plating of the enhancing metal layer of metallic target pipe；
After metallic target pipe binding face Brush Plating forms complete enhancing metal layer, need to bind the residual of face to metallic target pipe
Remaining electric brush plating liquor is recycled.In inner tubal wall pretreatment process equipment of the invention, metallic target pipe is fixed on a sloping platform,
One end of the sloping platform can rise, and metallic target pipe is made to be in heeling condition, one end alignment liquid collecting box of metallic target pipe, from
And the remaining electric brush plating liquor in metallic target pipe flows into liquid collecting box therewith, and after the completion of liquid collecting box is collected, liquid is collected
Case is removed, and is changed another liquid collecting box and is placed in the position placed originally, is then rinsed to metallic target pipe, because of metallic target pipe
Also in heeling condition, so that the liquid collecting box that the liquid rinsed flows directly into after replacement is collected.Increase to liquid
Recycling prevents harmful liquid from flowing into environment, environmentally protective.And then metallic target pipe is thermally dried, it is right in next step
Metallic target pipe binding face carries out coating metalization layer and prepares.
C6, metallic target pipe is heated to second temperature and is kept the temperature, which is higher than the fusing point temperature of binding brazing metal
Degree and the melting temperature for being lower than metallic target pipe and penstock, the effect of the set temperature of the step and effect are set with b2 step respectively
The effect for determining temperature is identical with effect.
Metallic target pipe selects molybdenum target material, and penstock selects titanium penstock, and binding brazing metal selects indium, in b2 and c6 step,
First temperature and second temperature are controlled respectively at 170-300 DEG C.
C7, starting rotating device rotate metallic target pipe at the uniform velocity, and metallic target pipe rotational velocity is controlled at 3-6 revs/min.
C8, by ultrasonic coating unit, will binding brazing metal on the basis of enhance metal layer ultrasound brush head according to 10-
20mm/ minutes speed at the uniform velocity moves in the binding face of metallic target pipe, until metallic target pipe is completely covered in binding brazing metal
Binding face forms the target metalization layer with a thickness of 0.08-0.1mm, cancels the heating to metallic target pipe, completes metallic target pipe
Pretreatment；After ultrasonic coating unit coats the binding face of metallic target pipe using binding brazing metal completely, scraper distance is set
Metallic target pipe binds the set distance in face, which is the thickness of target metalization layer, and scraper and metallic target pipe is coaxial
Installation, makes scraper scrape off the extra binding brazing metal of target metalization layer, further ensures that the one of target metallization layer thickness
Cause property.On the basis of the enhancing metal layer that binding force is strong and mechanical property is good, ultrasonic coating unit generates ultrasonic wave, ultrasonic wave
The binding brazing metal of molten is acted on, the atom rate travel and quickening liquid in binding brazing metal to accelerate liquid
Binding brazing metal flowing, by ultrasound effect, enhancing metal layer surface rub, destroy enhancing metal layer
The oxidation film on surface makes to enhance the wetting contact between metal layer and target metalization layer, promotes the binding metal welding of molten
Expect further to spread and combine to enhancing metal layer, makes to form a diffusion bonding layer between metalization layer and enhancing metal layer.It should
Diffusion bonding layer makes to enhance metal layer and target metalization layer is firmly combined, and improves between enhancing metal layer and target metalization layer
Mechanical property.Target metalization layer and binding layer are made of binding brazing metal, the binding between same metal material, leaching
Lubricant nature is good, and thermal expansion coefficient is identical, and heating conduction is identical with specific heat capacity, can effectively avoid stress build up when binding from generating, target
It is high that material binds welded rate.
D, it is provided with the binding gap of set distance between the binding face of metallic target pipe and the binding face of penstock, is binding
Binding brazing metal is poured into gap, binding brazing metal is formed by curing binding layer.In the binding face of penstock and metallic target pipe point
Pretreatment is not carried out, making the side towards binding layer of penstock and metallic target pipe is the film layer made of binding brazing metal,
When pouring into binding gap to make to bind solder and fill up binding gap, the binding brazing metal in binding layer is golden with penstock respectively
Categoryization layer and the abundant wetting contact of target metalization layer, because target metalization layer and penstock metalization layer coating thicknesses of layers are equal
Even, surface is smooth, and binding brazing metal comes into full contact with and is bonded with target metalization layer and penstock metalization layer respectively, does not generate gas
Bubble, binding welded rate are high.
Metal layer is enhanced using Brush Plating mode brush plating, the uniformity of the coated effect of target inside pipe wall can be effectively ensured, to protect
There are enough wellabilities between barrier binding brazing metal and metallic target pipe, ensures and enhance the binding effect of rotary target.The present invention
It is coated using binding brazing metal by the ultrasonic wave that ultrasonic wave coating unit issues, to form the stronger target of cohesive force
Material metalization layer and penstock metalization layer, help to improve welded rate.The present invention is respectively set using interval set distance setting
Multiple cathode interconnecting pieces, during Brush Plating, the rotary target monolithic conductive uniform in effect of elongated, make in electric brush plating liquor metal from
The deposition rate of son is close, reduces operation difficulty, and the surface smoothness of the enhancing metal layer of formation is high.
The above is only a preferred embodiment of the present invention, for those of ordinary skill in the art, according to the present invention
Thought, there will be changes in the specific implementation manner and application range, and the content of the present specification should not be construed as to the present invention
Limitation.
Claims (10)
1. a kind of improve pretreated target binding method, it is characterised in that: the following steps are included:
A, the binding face of step before pretreatment, binding face and penstock to metallic target pipe carries out at sandblasting, cleaning and drying respectively
Reason；
B, the binding face of the penstock after cleaning, drying is carried out ultrasound coating binding brazing metal to shape by penstock pre-treatment step
At a penstock metalization layer, including following sub-step,
B1, it penstock is installed on to one can make the rotating device of its at the uniform velocity rotation,
B2, penstock is heated to after the first temperature and is kept the temperature, which is higher than the binding melting temperature of brazing metal and low
In the melting temperature of metallic target pipe and penstock,
B3, starting rotating device rotate penstock at the uniform velocity, and penstock rotational velocity is controlled at 3-6 revs/min,
B4, start ultrasonic coating unit, the binding brazing metal of molten, liquid storage are added in the liquid reserve tank of ultrasonic coating unit
Case is supplied in ultrasonic brush head for brazing metal is bound according to the liquid feed speed of setting, and ultrasonic brush head was according to 100mm/ minutes
Speed at the uniform velocity moves in the binding face of penstock, until the binding face of penstock is completely covered in binding brazing metal, formed one with a thickness of
The penstock metalization layer of 0.05-0.1mm cancels the heating to penstock, completes penstock pretreatment；
C, metallic target pipe pre-treatment step, to the metallic target pipe after cleaning, drying make electric brush plating liquor the binding face of metallic target pipe into
Row Brush Plating is carried out on the basis of enhancing metal layer using binding brazing metal to form an enhancing metal layer to be formed
One target metalization layer, including following sub-step,
C1, it metallic target pipe is installed on to one can make the rotating device of its at the uniform velocity rotation,
C2, the voltage of electric brushing coating installation is arranged in 10-15V, electric current is arranged in 30-50A, by the negative electricity in electric brushing coating installation
It being connected to metallic target pipe and forms cathode interconnecting piece, cathode interconnecting piece is arranged around the tube wall of metallic target pipe,
C3, starting rotating device rotate metallic target pipe at the uniform velocity, and the rotational velocity of metallic target pipe is controlled at 0.8-1.2 revs/min,
It is provided with a feed flow portion in c4, electric brushing coating installation, electric brush plating liquor is stored in feed flow portion, feed flow portion is connected to brush plating head,
Feed flow portion provides electric brush plating liquor to brush plating head according to the liquid supply speed of setting, starts electric brushing coating installation, and metallic target pipe is cathode, brush
Plating head is anode, and it is a unit length that each movable length of brush plating head in electric brushing coating installation, which is 1-1.5m, moves 3-6 per minute
Secondary unit length, the metal ion in electric brush plating liquor discharge crystallization on the binding face of metallic target pipe, form one with a thickness of 0.03-
The enhancing metal layer of 0.08mm completes the electricity of enhancing metal layer until the binding face of metallic target pipe is completely covered in enhancing metal layer
Brush plating,
C5, the electric brush plating liquor in metallic target pipe is recycled, the enhancing metal layer of metallic target pipe is cleaned using clear water,
C6, metallic target pipe is heated to second temperature and is kept the temperature, the set temperature be higher than binding brazing metal melting temperature and
Lower than the melting temperature of metallic target pipe and penstock,
C7, starting rotating device rotate metallic target pipe at the uniform velocity, and metallic target pipe rotational velocity is controlled at 3-6 revs/min,
C8, by ultrasonic coating unit, will binding brazing metal on the basis of enhance metal layer ultrasound brush head according to 10-
20mm/ minutes speed at the uniform velocity moves in the binding face of metallic target pipe, until metallic target pipe is completely covered in binding brazing metal
Binding face forms one with a thickness of the target metalization layer of 0.08-0.1mm, cancels the heating to metallic target pipe, complete metallic target pipe
Pretreatment；
D, step is bound, the binding gap of set distance is provided between the binding face of metallic target pipe and the binding face of penstock,
Binding brazing metal is poured into binding gap, binding brazing metal is formed by curing binding layer.
2. a kind of pretreated target binding method of improvement according to claim 1, it is characterised in that: the electric brush plating liquor
For comprising tin compound, nickel compound or copper compound, the cathode interconnecting piece selects metallic copper material to be made.
3. a kind of pretreated target binding method of improvement according to claim 2, it is characterised in that: in a, pre- place
Before managing before step, drilling is carried out to the inner wall of the metallic target pipe or bore hole forms recessed position, in the c4 step, led to
Cross the enhancing metal layer formed to the recessed position of metallic target pipe with a thickness of 0.05-0.08.
4. a kind of pretreated target binding method of improvement according to claim 3, it is characterised in that: in the c4 step
In, by electric brush plating liquor the metallic target pipe inner wall surface crystallization the recessed position is filled, metallic target pipe and
Enhance the interface that the formation one between metal layer rises and falls, the another side of the enhancing metal layer opposite with interface is one flat
Sliding surface.
5. a kind of pretreated target binding method of improvement according to claim 1, it is characterised in that: the metallic target pipe
Molybdenum target material is selected, the penstock selects titanium penstock, and the binding brazing metal selects indium, described in b2 the and c6 step
First temperature and second temperature are controlled respectively at 170-300 DEG C.
6. a kind of pretreated target binding method of improvement according to claim 1, it is characterised in that: a, pretreatment
Preceding step further includes following sub-step,
A1), blasting treatment is carried out to the binding face of the metallic target pipe and the penstock respectively, makes tying up for metallic target pipe and penstock
Determine surface roughness and respectively reaches Ra0.8-1.6；
A2), metallic target pipe and penstock are placed in ultrasonic cleaning pond, water and alcohol is successively heated into ultrasonic wave pond to gold
The binding face for belonging to target pipe and penstock is cleaned；
A3), metallic target pipe and penstock are put into heating device to dry, the temperature setting of heating device, will at 160-300 DEG C
Metallic target pipe and the drying of the binding face liquid of penstock.
7. a kind of pretreated target binding method of improvement according to claim 6, it is characterised in that: in the a2 step
In, the metallic target pipe and the penstock are cleaned 1-2 hours in 50-100 DEG C of hot water, metallic target pipe and penstock are in hot water
After middle cleaning, add alcohol washes 5-15 minutes in the ultrasonic cleaning pond.
8. a kind of pretreated target binding method of improvement according to claim 7, it is characterised in that: in the c8 step
In, the ultrasound coating unit generates ultrasonic wave, and ultrasonic wave acts on the binding brazing metal of molten, to accelerate liquid
Binding brazing metal in atom rate travel and accelerate liquid binding brazing metal flowing, while also making molten
Binding brazing metal is further spread to enhancing metal layer, makes to enhance the wetting contact between metal layer and target metalization layer,
Make to form a diffusion bonding layer between metalization layer and enhancing metal layer.
9. a kind of pretreated target binding method of improvement according to any one of claims 1 to 8, it is characterised in that: institute
The length for stating metallic target pipe is more than 1.5 meters, then a cathode interconnecting piece is respectively set in 0.8-1.1 meters of metallic target pipe interval, makes metal
Homogeneous current distribution in target pipe, the deposition rate for forming the metal ion of the enhancing metal layer keep uniform.
10. a kind of pretreated target binding method of improvement according to claim 9, it is characterised in that: walked in the b4
In rapid, vibration friction is carried out in the binding face of the penstock by the ultrasonic wave in ultrasonic coating unit, increases binding metal welding
Contact area between material and penstock binding face keeps formation one between penstock and the molecular layer of binding brazing metal phase mutual friction attached
Put forth effort layer.
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| CN111020507A (en) * | 2019-12-18 | 2020-04-17 | 先导薄膜材料（广东）有限公司 | Target binding device |
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| CN108677151A (en) * | 2018-03-28 | 2018-10-19 | 东莞市欧莱溅射靶材有限公司 | A kind of rotary target merogenesis binding device and merogenesis binding method |
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