CN110359010A - Metal mask item, metal mask plate and its restorative procedure - Google Patents
Metal mask item, metal mask plate and its restorative procedure Download PDFInfo
- Publication number
- CN110359010A CN110359010A CN201810251345.2A CN201810251345A CN110359010A CN 110359010 A CN110359010 A CN 110359010A CN 201810251345 A CN201810251345 A CN 201810251345A CN 110359010 A CN110359010 A CN 110359010A
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- China
- Prior art keywords
- metal mask
- item
- frame
- welding region
- welding
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention discloses a kind of metal mask item, metal mask plate and its restorative procedures, belong to evaporation process field.The metal mask item includes graphics field and at least two pairs of welding regions, the graphics field is located at the middle part of the metal mask item, each pair of welding region includes two welding regions for being symmetricly set on the graphics field two sides, positioned at the graphics field the same side at least two welding regions along the metal mask item length direction arranged for interval.By the way that multipair welding region is arranged, when so that the solder joint of welding region and frame welding loosens on the outside of use, can be welded again using inside welding region and the lesser frame of another size carry out using, without abandoning metal mask item, so that metal mask item may be reused, the production cost of metal mask plate is reduced.
Description
Technical field
The present invention relates to evaporation process field, in particular to a kind of metal mask item, metal mask plate and its restorative procedure.
Background technique
Currently, Organic Light Emitting Diode (English Organic Light Emitting Diode, abbreviation OLED) display surface
Plate production mainly uses the technology of organic vapor deposition plated film, the technology be usually using high-precision metal mask plate as mold,
Heating organic material makes its vaporization at high temperature, then with material molecule state through on the opening vapor deposition to substrate of mask plate.
Wherein, metal mask plate includes frame (English Frame) and the metal mask item (English Mask) for being provided with opening,
Metal mask item is welded on frame, and the region that frame is located at below metal mask item is provided with hollowed out area.When vapor deposition, by frame
Frame is arranged on hollow microscope carrier, and substrate to be deposited fitting is placed on metal mask item, then is arranged on substrate to be deposited
One magnetic partition is used for adsorbing metal mask strip, is bonded it with substrate to be deposited, organic material is heated below microscope carrier, organic
Microscope carrier and frame are passed through after material at high temperature volatilization and through on the opening of metal mask item vapor deposition to substrate.
Metal mask plate is during production or use it is possible that following failure: metal mask position has partially
Difference, frame deform, the solder joint between frame and metal mask item loosens or falls off, can only when there is above-mentioned failure
Metal mask item is separated and abandoned from frame, and welds new metal mask item on frame.Due to metal mask valence
Lattice are expensive, and the production cost that direct discard processing will cause OLED display panel is excessively high.
Summary of the invention
Cause the production cost of OLED display panel excessively high to solve directly to abandon metal mask item in the prior art
Problem, the embodiment of the invention provides a kind of metal mask item, metal mask plate and its restorative procedures.The technical solution is such as
Under:
In a first aspect, the metal mask item includes graphics field the embodiment of the invention provides a kind of metal mask item
At least two pairs of welding regions, the graphics field are located at the middle part of the metal mask item, and each pair of welding region includes
Two are symmetricly set on the welding region of the graphics field two sides, at least two welderings positioned at the same side of the graphics field
Region is connect along the length direction arranged for interval of the metal mask item.
In an implementation of the embodiment of the present invention, it is provided on the metal mask item and is used to indicate the welding
The surface of the label in region or the welding region is equipped with the patterned structures for identifying the position of the welding region,
Or the thickness of the welding region is greater than the thickness in other regions of the metal mask item.
Arbitrary neighborhood in another implementation of the embodiment of the present invention, positioned at the same side of the graphics field
The spacing of two welding regions is 20-50mm.
In another implementation of the embodiment of the present invention, the metal mask item is equipped with a plurality of cutting line, is located at
It is equipped with two cutting lines between the welding region of the arbitrary neighborhood of the same side of the graphics field, is located at described
A cutting line is equipped between the outermost welding region of metal mask item and the side of the metal mask item.
Arbitrary neighborhood in another implementation of the embodiment of the present invention, in the same side for being located at the graphics field
The welding region between two cutting lines in, the shape of a cutting line is straight line, is cut described in another
Secant includes two straightways and an arc segment, and the arc segment is folded between two straightway, and shape is the described of straight line
Cutting line is close apart from the graphics field apart from the cutting line of the graphics field than another.
Second aspect, the embodiment of the invention also provides a kind of metal mask plates, which is characterized in that the metal mask plate
Including the first frame and multiple metal mask items, each metal mask item is as the described in any item metals of first aspect are covered
Film item, each metal mask item are welded on first frame by a pair welding region of itself.
In an implementation of the embodiment of the present invention, the metal mask plate further includes the second frame, and described second
Frame is separably embedded in first frame.
In another implementation of the embodiment of the present invention, second frame includes the first subframe and the second sub- frame
Frame, second subframe are arranged on first subframe and are embedded in first frame, first frame and
Orthographic projection of second subframe in the plane where the metal mask item and first subframe are in the metal
Orthographic projection in plane where mask strip is overlapped.
In another implementation of the embodiment of the present invention, the metal mask plate further includes third frame；Described
Three frames include third subframe and the 4th subframe, and the 4th subframe is arranged on the third subframe and is embedded at
In the third frame, the positive throwing of second frame and the 4th subframe in the plane where the metal mask article
Shadow is overlapped with orthographic projection of the third subframe in the plane where the metal mask item.
In another implementation of the embodiment of the present invention, the metal mask plate further include it is multiple block item, each
The item that blocks is arranged between the two neighboring metal mask item, and the item that blocks is perpendicular to the metal mask item
On the direction of place plane between the metal mask item and first frame；
Each both ends for blocking item are symmetrically arranged at least two pairs and block a welding region, and each pair of item that blocks welds
Connect region include two be located at it is described block a both ends block a welding region, it is each it is described block item by itself
A welding region is blocked described in a pair to be welded on first frame.
In another implementation of the embodiment of the present invention, the metal mask plate further includes multiple support bars, each
The support bar is arranged between the metal mask item and first frame, and the length direction of the support bar with it is described
The length direction of metal mask item intersects；
The both ends of each support bar are symmetrically arranged at least two pairs of support bar welding regions, each pair of support bar weldering
Connecing region includes two support bar welding regions for being located at the support bar both ends, and each support bar passes through itself
A pair of support bar welding region is welded on first frame.
The third aspect, the embodiment of the invention also provides a kind of restorative procedure of metal mask plate, the restorative procedure base
It is realized in the described in any item metal mask plates of second aspect, the metal mask item in the metal mask plate includes the first welding
Region and the second welding region, second welding region are located at the figure of first welding region and the metal mask item
Between region, first welding region is the region of the metal mask item and the first frame welding, the restorative procedure packet
It includes:
Second welding region of the metal mask item is aligned with the second frame, wherein second frame is separable
Ground is embedded in first frame；
The metal mask item is welded on second frame by second welding region.
In an implementation of the embodiment of the present invention, the restorative procedure further include:
Before the second welding region of the metal mask item is aligned with the second frame, by the metal mask item with
First framework apart.
In another implementation of the embodiment of the present invention, by the metal mask item and first framework apart,
Include:
Along metal mask item described in cutting wire cutting, so that the metal mask item and first framework apart, described
Cutting line is arranged on the metal mask item and between first welding region and second welding region.
In another implementation of the embodiment of the present invention, by the second welding region and second of the metal mask item
Frame alignment, comprising:
Second frame is set in first frame so that the second welding region of the metal mask item with
The second frame alignment.
Technical solution provided in an embodiment of the present invention has the benefit that
The embodiment of the present invention by the way that multipair welding region is arranged so that on the outside of use welding region and frame welding weldering
When loosening occurs in point, can be welded again using inside welding region with the lesser frame of another size is made
With so that metal mask item may be reused, reducing the production cost of metal mask plate without abandoning metal mask item.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is a kind of structural schematic diagram of metal mask item provided in an embodiment of the present invention；
Fig. 2 is a kind of structural schematic diagram of metal mask plate provided in an embodiment of the present invention；
Fig. 3 is the structural schematic diagram of another metal mask plate provided in an embodiment of the present invention；
Fig. 4 A is a kind of structural schematic diagram of first frame provided in an embodiment of the present invention；
Fig. 4 B is a kind of structural schematic diagram of second frame provided in an embodiment of the present invention；
Fig. 4 C is the assembling schematic diagram of the first frame and the second frame provided in an embodiment of the present invention；
Fig. 4 D is the structural schematic diagram of third frame provided in an embodiment of the present invention；
Fig. 4 E is the assembling schematic diagram of the second frame and third frame provided in an embodiment of the present invention；
Fig. 4 F is the assembling schematic diagram of the first frame provided in an embodiment of the present invention, the second frame and third frame；
Fig. 4 G is the structural schematic diagram of another second frame provided in an embodiment of the present invention；
Fig. 5 is the structural schematic diagram provided in an embodiment of the present invention for blocking item；
Fig. 6 is the mounting structure schematic diagram provided in an embodiment of the present invention for blocking item；
Fig. 7 is the structural schematic diagram of support bar provided in an embodiment of the present invention；
Fig. 8 is the mounting structure schematic diagram of support bar provided in an embodiment of the present invention；
Fig. 9 is a kind of restorative procedure flow chart of metal mask plate provided in an embodiment of the present invention；
Figure 10 A~Figure 10 E is the welding process schematic diagram of metal mask item and the first frame provided in an embodiment of the present invention；
Figure 10 F~Figure 10 L is metal mask plate repair process schematic diagram provided in an embodiment of the present invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to embodiment party of the present invention
Formula is described in further detail.
Fig. 1 is a kind of structural schematic diagram of metal mask item 10 provided in an embodiment of the present invention, referring to Fig. 1, the metal
Mask strip 10 includes graphics field 101 and at least two pairs of welding regions 102, and the graphics field 101 is located at the metal mask
The middle part of item 10, each pair of welding region 102 include two welding regions for being symmetricly set on 101 two sides of graphics field
102, positioned at the graphics field 101 the same side at least two welding regions 102 along the metal mask item 10 length
Direction a arranged for interval.
The embodiment of the present invention is by being arranged multipair welding region 102, so that welding region 102 and frame weld on the outside of use
When loosening occurs in the solder joint connect, it can be welded again using inside welding region 102 with the lesser frame of another size
It taps into enforcement to use, without abandoning metal mask item 10, so that metal mask item 10 may be reused, reduces metal mask plate
Production cost.In addition, the fabrication cycle of metal mask item is long, if may will affect normal life using new metal mask item
It produces.
Metal mask item provided in an embodiment of the present invention can be high-precision metal mask strip (English Fine Metal
Mask, English FMM), it can be used for being deposited the organic light emission film layer etc. on oled substrate.
Wherein, the graphics field 101 of metal mask item 10 is corresponding with the graphics field on oled substrate to be deposited, graph area
Domain 101 include it is multiple for vapor deposition rectangular area 111 (Fig. 1 only show wherein 2 as signal), rectangular area 111 is used for
It passes through for evaporation material and is then deposited onto the setting position of oled substrate.Multiple rectangular areas 111 are arranged in metal mask item
10 middle part, multiple rectangular areas 111 being centrosymmetrically arranged along the length direction of metal mask item 10, such as in gold
The two sides for belonging to the center of the length direction of mask strip 10 are equipped with the rectangular area 111 of identical quantity.Above-mentioned rectangular area 111 is only
For citing, in other embodiments, above-mentioned rectangular area 111 can also be the region of other shapes, such as border circular areas etc..
When in embodiments of the present invention, in order to guarantee welding, the position of welding region can be accurately determined, it can be to welding
Region is marked or is handled.
Illustratively, it is provided with the label for being used to indicate the welding region 102 on the metal mask item 10, will welded
Region 102 is highlighted using label, and in order to confirm the position of welding region 102, simultaneous mode is simple, convenient for system
Make.Wherein, the mark that label can be indentation or be formed using coating.
Illustratively, the surface of the welding region 102 is equipped with the figure for identifying the position of the welding region 102
The position of welding region 102 can be identified using patterned structures as welding region 102 by changing structure, while metal is covered
Film item 10 and frame can more easily be welded together.For example, patterned structures can be formed on metal mask item 10
Netted pierced pattern.
Illustratively, the thickness of the welding region 102 is greater than the thickness in other regions of the metal mask item 10, adopts
It thereby may be ensured that metal is covered so that there is enough metal materials to can be used in welding with the welding region 102 for thickening design
The intensity of film item 10 and frame welding.The thickness of aforesaid welding tracts 102 can be 1.5-2 times of the thickness in other regions.
In embodiments of the present invention, positioned at the graphics field 101 the same side arbitrary neighborhood two welding
The spacing d in region 102 is 20-50mm.The region can guarantee smoothly complete and throw the net when replacing frame, meanwhile, between being somebody's turn to do
Away from designing, the not too big size for causing entire metal mask plate is too big.Illustratively, spacing d can be 30mm.It is worth saying
Bright, the numerical value of aforementioned spacing d is a kind of implementation, and in actual fabrication, the size of spacing d can be according to different productions
Line, distinct device and different product are adjusted, as long as meeting the condition and requirement of apparatus and process.
In embodiments of the present invention, the metal mask item 10 is equipped with a plurality of cutting line 103, is located at the graphics field
It is equipped with two cutting lines 103 between the welding region 102 of the arbitrary neighborhood of 101 the same side, is located at the gold
Belong to and being cut described in being equipped with one between the outermost welding region 102 and the side of the metal mask item 10 of mask strip 10
Secant 103.One cutting line 103 of the corresponding design in the outside of each welding region 102, can be used for positioning, and remove after welding
Fall the extra part of metal mask item 10.Other than above-mentioned 102 corresponding cutting lines 103 of each welding region, the metal
Mask strip 10 designs a cutting line 103 also between adjacent welding tracts 102, can when solder joint loosens,
Metal mask item 10 is separated by being cut according to cutting line 103.Therefore outermost welding region 102 and metal mask item
It is equipped with a cutting line 103 between 10 side, is equipped with two cutting lines 103 between adjacent welding tracts 102.
As shown in Figure 1, the shape of the cutting line 103 of the redundance for positioning and removing metal mask item 10 can be with
For straight line, namely the cutting line 103 for positioning and cutting is straight line, the length direction of the straight line and metal mask item 10 simultaneously
A is vertical.
As shown in Figure 1, the cutting line 103 for separating metal mask item 10 includes two straightways (with metal mask item 10
Length direction a it is vertical) and an arc segment, the arc segment be folded between two straightway.As shown in Figure 1, shape is
The cutting line 103 of straight line is apart from the cutting line 103 of the graphics field 101 than another apart from the graphics field
101 is close.
Wherein, above-mentioned arc segment is covered to 10 middle bent of metal mask item by the isolated metal of the cutting line 103
The both ends of film item 10 have arc notch, identical as the both ends shape of virgin metal mask strip 10, which is used in metal
The coupling part engaging that the both ends of mask strip 10 can be connect when connecting with equipment of throwing the net with equipment of throwing the net, realization are thrown the net.Example
Property, the arc at 103 middle part of cutting line can be half arc-shaped.
The embodiment of the invention provides the implementation of the following two kinds cutting line 103, the cutting line 103 be etched line or
Person's track, two ways can accurately indicate the position of cutting line.Wherein, etched line refers to through the recessed of etching technics formation
Channel-shaped filament.
Fig. 2 is a kind of structural schematic diagram of metal mask plate provided in an embodiment of the present invention, and referring to fig. 2, the metal is covered
Diaphragm plate includes the first frame 20 and multiple metal mask items 10, and each metal mask item 10 is that metal as shown in Figure 1 is covered
Film item 10, each metal mask item 10 are welded on first frame 20 by a pair welding region 102 of itself
On.The embodiment of the present invention is by being arranged multipair welding region 102, so that welding region 102 and frame welding on the outside of use
When loosening occurs in solder joint, can be welded again using inside welding region 102 and the lesser frame of another size into
It exercises and uses, without abandoning metal mask item 10, so that metal mask item 10 may be reused, reduce the life of metal mask plate
Produce cost.
As shown in Fig. 2, multiple 10 structures of metal mask item are identical, multiple 10 uniform intervals of metal mask item and it is arranged in parallel
On first frame 20.
Fig. 3 is the structural schematic diagram of another metal mask plate provided in an embodiment of the present invention, as shown in figure 3, the gold
Belonging to mask plate further includes the second frame 30, and second frame 30 is separably embedded in first frame 20, and described the
The width of two frames 30 is equal with the spacing of welding region 102 described in another pair on the metal mask item 10.Design two
On the one hand frame can guarantee to repair metal mask plate, on the other hand, the overall dimensions of metal mask plate compared with
It is small.As seen from Figure 3, when the second frame 30 is arranged in the first frame 20, the outer wall and the first frame of the second frame 30
20 inner wall fitting, and the second frame 30 arrangement corresponding with a pair of of welding region 102 on metal mask item 10.
In embodiments of the present invention, the structure of the second frame 30 can have 2 kinds, with reference to the accompanying drawing to the embodiment of the present invention
The structure of the second frame 30 provided is specifically described:
Fig. 4 A is a kind of structural schematic diagram of first frame 20 provided in an embodiment of the present invention, as shown in Figure 4 A, the first frame
Frame 20 includes two groups of opposite side, and one group is label 20A and 20C, and another group is label 20B and 20D, wherein one group of opposite side is used for and gold
Belong to mask strip 10 to weld together.The cross section of each edge of first frame 20 is rectangle.
Fig. 4 B is a kind of structural schematic diagram of second frame 30 provided in an embodiment of the present invention, as shown in Figure 4 B, described
Two frames 30 include the first subframe 301 and the second subframe 302, and second subframe 302 is arranged in the described first sub- frame
It on frame 301 and is embedded in first frame 301, first frame 20 and second subframe 302 are in the metal
The orthographic projection in plane where mask strip 10 is with first subframe 301 in the plane where the metal mask item 10
Orthographic projection be overlapped.This implementation metal mask item 10 can not only be separated from the first frame 20 after again into
Row welding, can also directly weld the second frame 30 and metal mask item 10, so that metal mask item 10 uses first simultaneously
Frame 20 and the second frame 30 are supported.This design is not required to metal mask item 10 to be separated, is not only easily repaired processing,
And using two frame supports, the integral strength of metal mask plate is increased.
Wherein, the thickness of second subframe 302 is identical as the thickness of first frame 20, such second frame 30
The top surface of the frame obtained with the combination of the first frame 20 flushes, and ensure that the fixed effect with metal mask item.
Wherein, the outer profile of the outer profile of first subframe 301 and first frame 20 is that shapes and sizes are equal
The Internal periphery of identical rectangle, the Internal periphery of first subframe 301 and second subframe 302 is that shapes and sizes are equal
Rectangle that is identical and being arranged concentrically, the Internal periphery of the outer profile of second subframe 302 and first frame be shape and
Size rectangle all the same, the thickness of second subframe 302 are identical as the thickness of first frame.Due to the second frame
30 above structure, when by the setting of the second frame 30 to the inside of the first frame 20, the second frame 30 and the combination of the first frame 20
At a rectangular frame, and the cross section of each edge of the rectangular frame is rectangle, and structure is as shown in Figure 4 C.
When realization, second subframe 302 can be an integral molding structure with the first subframe 301.
Further, the metal mask plate can also include third frame, correspondingly, when metal mask plate includes three
It may include 3 pairs of welding regions when rectangular frame, on metal mask item 10, metal mask item 10 may be reused three at this time
It is secondary.Fig. 4 D is the structural schematic diagram of third frame 40 provided in an embodiment of the present invention, referring to fig. 4 D, and the third frame 40 includes
Third subframe 401 and the 4th subframe 402, the 4th subframe 402 is arranged on the third subframe 401, described
The orthographic projection and the third of second frame 30 and the 4th subframe 402 in the plane where the metal mask article 10
Orthographic projection of the subframe 401 in the plane where the metal mask item 10 is overlapped.This design is not required to metal to be separated and covers
Film item 10 is not only easily repaired processing, and metal mask plate can be significantly greatly increased using three frame supports when needed
Integral strength.
Wherein, the thickness of the 4th subframe 402 is identical as the thickness of second frame 30, such second frame 30
The top surface for combining obtained frame with third frame 40 flushes, and ensure that the fixed effect with metal mask item.
Wherein, the third frame 40 includes third subframe 401 and the 4th subframe 402, the 4th subframe 402
It is arranged on the third subframe 401 and is embedded in the third frame 401, the outer profile of the third subframe 401
Outer profile with first frame is shapes and sizes rectangle all the same, the Internal periphery of the third subframe 401 and institute
The Internal periphery for stating the 4th subframe 402 is that shapes and sizes are all the same and the rectangle that is arranged concentrically, the 4th subframe 402
The Internal periphery of outer profile and second subframe 302 is shapes and sizes rectangle all the same, the 4th subframe 402
Thickness is identical as the thickness of second frame.The structure of third frame 40 is similar with the structure of the second frame 30, by third frame
When the setting of frame 30 is to the inside of the second frame 30, structure is as shown in Figure 4 E, by the setting of third frame 30 to the second frame 30 and the
When the inside of the combined structure of one frame 20, structure is as illustrated in figure 4f.
When realization, the third subframe 401 and the 4th subframe 402 are an integral molding structure.
Fig. 4 G is the structural schematic diagram of another second frame 30 provided in an embodiment of the present invention, as shown in Figure 4 G, described
The thickness of second frame 30 is identical as the thickness of first frame 20.Wherein, the outer profile of second frame 30 with it is described
The Internal periphery of first frame 20 is shapes and sizes rectangle all the same.Using the second frame 30 of this design, frame structure
Simply.It, can be by metal mask item 10 from first when solder joint between the first frame 20 and metal mask item 10 loosens
It separates on frame 20, is then welded again with the second frame 30.
Certainly, in embodiments of the present invention, third frame 40 can also be designed by the way of Fig. 4 G.
The above embodiment of the present invention is only for example, and in practice, metal mask plate can also include more rectangular frames.
In embodiments of the present invention, the metal mask plate further includes multiple blocking item (English Cover).Fig. 5 is this hair
The structural schematic diagram for blocking item 50 that bright embodiment provides, Fig. 6 is the mounting structure provided in an embodiment of the present invention for blocking item 50
Schematic diagram.Referring to figs. 5 and 6, each item 50 that blocks is arranged between the two neighboring metal mask item 10, and described
It blocks articles 50 and is located at the metal mask article 10 and described the in the direction perpendicular to the 10 place plane of metal mask article
Between one frame 20, namely in the vertical direction the height of metal mask item 10 be higher than block item 50 (this is because metal mask
Item 10 is erected on support bar, referring to being hereinafter described)；Each both ends for blocking item 50 are symmetrically arranged at least two pairs
Block a welding region 501, it is each pair of it is described block a welding region 501 and include two be located at and described block 50 both ends of item
A welding region 501 is blocked, each described block blocks a welding region 501 described in a pair that item 50 passes through itself and be welded on institute
It states on the first frame 20.Item 50 is blocked using designing with the identical mode of metal mask item 10, so that blocking item 50 can also repeat
It uses, to save cost.
As shown in figure 5, this, which blocks to be additionally provided on item, blocks a cutting line 502, appointing for 50 one end of item is blocked positioned at described
Adjacent described block of anticipating is equipped with two and blocks a cutting line 502 between a welding region 501, block item 50 1 positioned at described
Outermost described block at end blocks a cutting line equipped with one between welding region 501 and the end for blocking item 50
502.A cutting line 502 is blocked in the corresponding design one in outside for each blocking a welding region 501, can be used for positioning, and
It removes after welding and blocks the extra part of item 50.It each blocks a welding region 501 corresponding one in addition to above-mentioned and blocks item
Outside cutting line 502, this block item 50 also it is adjacent block between a welding region 501 design one block a cutting line 502, can
With when solder joint loosens, by separating according to blocking the cutting of a cutting line 502 and will block item 50, benefit is repeated
With.
As shown in figure 5, the cutting line 502 that blocks can be straight line.Block a cutting line 502 can for etched line or
Person's track.
In embodiments of the present invention, the metal mask plate further includes multiple support bars (English Howling).Fig. 7 is this
The structural schematic diagram for the support bar 60 that inventive embodiments provide, Fig. 8 is the installation knot of support bar 60 provided in an embodiment of the present invention
Structure schematic diagram.Referring to figs. 7 and 8, each support bar 60 is arranged in the metal mask item 10 and first frame 20
Between, and the length direction of the support bar 60 intersects with the length direction of the metal mask item 10；Each support bar
60 both ends are symmetrically arranged at least two pairs of support bar welding regions 601, and each pair of support bar welding region 601 includes two
It is located at the support bar welding region 601 at 60 both ends of support bar, each support bar 60 passes through a pair of of the institute of itself
Support bar welding region 601 is stated to be welded on first frame 20.Branch is designed using with the identical mode of metal mask item 10
Stay 60, so that support bar 60 can also be reused, to save cost.
As shown in figure 5, length direction of the length direction of the support bar 60 perpendicular to the metal mask item 10.
As shown in fig. 7, support bar cutting line 602 is additionally provided on the support bar, positioned at appointing for described 60 one end of support bar
It anticipates and is equipped with two support bar cutting lines 602 between the adjacent support bar welding region 601, be located at the support bar 60 1
A support bar cutting line is equipped between the outermost support bar welding region 601 and the end of the support bar 60 at end
602.One support bar cutting line 602 of the corresponding design in the outside of i.e. each support bar welding region 601, can be used for positioning, and
The extra part of support bar 60 is removed after welding.In addition to above-mentioned 601 corresponding support bars of each support bar welding region
Outside cutting line 602, which designs a support bar cutting line 602 also between adjacent supports welding region 601, can
To separate support bar 60 by cutting according to support bar cutting line 602 when solder joint loosens, benefit is repeated
With.
As shown in fig. 7, the support bar cutting line 602 can be straight line.Support bar cutting line 602 is etched line or print
Brush line.
It is readily apparent that, blocks item and be arranged between adjacent metal mask strip, and the figure of metal mask item is arranged in support bar
Rectangular area interval in shape region, therefore block the figure that item and support bar will not stop evaporation material to pass through metal mask item
On the vapor deposition to oled substrate of region.
In embodiments of the present invention, the profile of the first frame 20, the second frame 30 and third frame 40 is rectangle, as square
Shape frame.Certainly, in other embodiments, the profile of the first frame 20, the second frame 30 and third frame 40 is also possible to it
His figure, the application are without limitation.
Fig. 9 is a kind of restorative procedure flow chart of metal mask plate provided in an embodiment of the present invention, and this method is based on aforementioned
Metal mask plate realizes that the metal mask item in the metal mask plate includes the first welding region and the second welding region, institute
The second welding region is stated between first welding region and the graphics field of the metal mask item, first welding
Region is the region of the metal mask item and the first frame welding, referring to Fig. 9, this method comprises:
Step S31: the second welding region of the metal mask item is aligned with the second frame, wherein second frame
Frame is separably embedded in first frame.
Before step S31, this method further include: weld the first welding region of the metal mask item and the first frame
It connects.It is illustrated below with reference to welding process of Figure 10 A~Figure 10 E to metal mask item and the first frame:
The first step will first block item 50 and block a welding region 501A by first and be welded to the first frame as shown in Figure 10 A
On frame 20；Support bar 60 as shown in Figure 10 B, then is welded to the first frame by the first support bar welding region 601A by second step
On frame 20；Third step will block item 50 along a cutting line is blocked and carry out cutting process, by support bar 60 along branch as illustrated in figure 10 c
Stay cutting line carries out cutting process, and item 50 is blocked in excision and support bar 60 stretches out the part in 20 outside of the first frame；4th step,
As shown in Figure 10 D, metal mask item 10 is welded on the first frame 20 by the first welding region 102A；5th step is such as schemed
Shown in 10E, metal mask item 10 is subjected to cutting process along cutting line, excision metal mask item 10 stretches out 20 outside of the first frame
Part.Through the above steps, the assembly of metal mask plate is completed.
Since metal mask item 10 has elasticity, it is welded under the metal mask item 10 on the first frame 20 in order to prevent
It hangs down, throws the net, during throwing the net, clamp 10 both ends of metal mask item simultaneously using two clips (English gripper)
Apply reversal interlocking relay, be bonded it with the first frame 20 after being stretched to required position, and bombards metal mask item 10 with laser beam
Surface makes the welding region moment of metal mask item 10 melt and solidify, so that metal mask item 10 and the first frame 20 be welded
It is connected together, clip is unclamped after the completion of welding, and with the clamp area of the corresponding metal mask item 10 of laser ablation.
Wherein, welding procedure can be laser welding.
Step S32: the metal mask item is welded on second frame by second welding region.
The embodiment of the present invention by the way that multipair welding region is arranged so that on the outside of use welding region and frame welding weldering
When loosening occurs in point, can be welded again using inside welding region with the lesser frame of another size is made
With so that metal mask item may be reused, reducing the production cost of metal mask plate without abandoning metal mask item.
In an implementation of the embodiment of the present invention, the restorative procedure can also include:
Before the second welding region of the metal mask item is aligned with the second frame, by the metal mask item with
First framework apart.Using the second frame of this design, frame structure is simple.The first frame and metal mask item it
Between solder joint when loosening, metal mask item can be separated from the first frame, then again with the second frame welding.
Wherein, by the metal mask item and first framework apart, comprising:
Along metal mask item described in cutting wire cutting, so that the metal mask item and first framework apart, described
Cutting line is arranged on the metal mask item and between first welding region and second welding region, can be with
When solder joint loosens, by the way that metal mask item is separated according to cutting wire cutting.
Further, this method can also include: to block item 50 and support bar 60 by described and divide with first frame 20
From.Detailed process is identical as the separation process of metal mask item 10, i.e., edge blocks item cutting wire cutting and blocks item 50, along support bar
Wire cutting support bar 60 is cut, to block item 50 and support bar 60 is separated and reused for described.
The first repair mode provided in an embodiment of the present invention is to remove metal mask item, is carried out again with the second frame
Welding, the program are suitable for precision of throwing the net insufficient (metal mask position deviation etc.), frame deformation (cleaning, use, carrying
Etc. processes cause), solder joint loosen or fall off (processes such as cleaning, use, carrying cause) situations such as.Below with reference to Figure 10 F~figure
The process is described in detail in 10J:
The first step will first block item 50 and block a welding region 501B by second and be welded to the second frame as shown in figure 10f
On frame 30；Support bar 60 as shown in figure 10g, then is welded to the second frame by the second support bar welding region 601B by second step
On frame 30；Third step will block item 50 along a cutting line is blocked and carry out cutting process, by support bar 60 along branch as shown in Figure 10 H
Stay cutting line carries out cutting process, and item 50 is blocked in excision and support bar 60 stretches out the part in 30 outside of the second frame；4th step,
As shown in figure 10i, metal mask item 10 is welded on the second frame 30 by the second welding region 102B；5th step is such as schemed
Shown in 10J, metal mask item 10 is subjected to cutting process along cutting line, excision metal mask item 10 stretches out 30 outside of the second frame
Part.Through the above steps, the reparation of metal mask plate is completed.It should be noted that in the process, 30 He of the second frame
Second welding region of metal mask item 10 welds, namely the welding region on the inside of the first welding region, similar, hides
Blend stop 50 and support bar 60 are welded by the welding region of inside and the second frame 30.
In another implementation of the embodiment of the present invention, by the second welding region and second of the metal mask item
Frame alignment, comprising:
Second frame is set in first frame so that the second welding region of the metal mask item with
The second frame alignment.This implementation metal mask item can not only be separated from the first frame after again into
Row welding can also directly weld the second frame and metal mask item so that metal mask item use simultaneously the first frame and
Second frame is supported.This design is not required to metal mask item to be separated, is not only easily repaired processing, and use two
Frame support, increases the integral strength of metal mask plate, realizes the reinforcing of metal mask plate.
Second of repair mode provided in an embodiment of the present invention is directly to cover the second frame to be set in the first frame and gold
Belong to mask strip to be welded, the program is to be suitable for situations such as solder joint is loosened or fallen off.Below with reference to Figure 10 K~Figure 10 L to this
Process is described in detail:
30 sets of second frame are first set in the first frame 20 by the first step as shown in Figure 10 K, and by the second frame 20 with
Metal mask item 10 blocks item 50 and support bar 60 is welded；Second step passes through metal mask item 10 as shown in Figure 10 L
Second welding region 102B carries out cutting process along cutting line, and excision metal mask item 10 stretches out the portion in 30 outside of the second frame
Point.Through the above steps, the reparation of metal mask plate is completed.It should be noted that in the process, the second frame 30 and metal
Second welding region of mask strip 10 welds, namely the welding region on the inside of the first welding region, similar, blocks item
50 and support bar 60 be also to be welded by the welding region of inside and the second frame 30.In addition, in the above process, second step is
Optional step, and it is also an option that item 50 or the progress cutting process of support bar 60 is blocked in second step.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (15)
1. a kind of metal mask item, which is characterized in that the metal mask item includes graphics field and at least two pairs of welding regions,
The graphics field is located at the middle part of the metal mask item, and each pair of welding region includes two and is symmetricly set on the figure
The welding region of shape region two sides, positioned at the graphics field the same side at least two welding regions along the metal mask
The length direction arranged for interval of item.
2. metal mask item according to claim 1, which is characterized in that be provided with and be used to indicate on the metal mask item
The surface of the label of the welding region or the welding region is equipped with the figure for identifying the position of the welding region
The thickness of change structure or the welding region is greater than the thickness in other regions of the metal mask item.
3. metal mask item according to claim 1 or 2, which is characterized in that positioned at the same side of the graphics field
The spacing of two welding regions of arbitrary neighborhood is 20-50mm.
4. metal mask item according to claim 1 or 2, which is characterized in that the metal mask item is equipped with a plurality of cut
Secant is equipped with two cuttings between the welding region of the arbitrary neighborhood of the same side of the graphics field
Line is equipped with one between the outermost welding region of the metal mask item and the side of the metal mask item
The cutting line.
5. metal mask item according to claim 4, which is characterized in that be located at appointing for the same side of the graphics field
In two cutting lines anticipated between the adjacent welding region, the shape of a cutting line is straight line, another
The cutting line includes two straightways and an arc segment, and the arc segment is folded between two straightway, and shape is straight line
The cutting line it is close apart from the graphics field apart from the cutting line of the graphics field than another.
6. a kind of metal mask plate, which is characterized in that the metal mask plate includes the first frame and multiple metal mask items, often
A metal mask item is metal mask item as described in any one in claim 1-5, and each metal mask item passes through
A pair welding region of itself is welded on first frame.
7. metal mask plate according to claim 6, which is characterized in that the metal mask plate further includes the second frame,
Second frame is separably embedded in first frame.
8. metal mask plate according to claim 7, which is characterized in that second frame includes the first subframe and the
Two subframes, second subframe are arranged on first subframe and are embedded in first frame, described first
The orthographic projection of frame and second subframe in the plane where the metal mask item and first subframe are in institute
The orthographic projection stated in the plane where metal mask item is overlapped.
9. metal mask plate according to claim 8, which is characterized in that the metal mask plate further includes third frame；
The third frame includes third subframe and the 4th subframe, and the 4th subframe is arranged in the third subframe
It above and is embedded in second frame, second frame and the 4th subframe are flat where the metal mask article
Orthographic projection in face is overlapped with orthographic projection of the third subframe in the plane where the metal mask item.
10. according to the described in any item metal mask plates of claim 6-9, which is characterized in that the metal mask plate further includes
Multiple to block item, each item that blocks is arranged between the two neighboring metal mask item, and the item that blocks is vertical
Where the metal mask item on the direction of plane between the metal mask item and first frame；
The both ends for blocking item are symmetrically arranged at least two pairs and block a welding region, each pair of described to block a welding section
Domain include two be located at it is described block a both ends block a welding region, it is each described to block a pair of item by itself
The welding region that blocks is welded on first frame.
11. according to the described in any item metal mask plates of claim 6-9, which is characterized in that the metal mask plate further includes
Multiple support bars, each support bar is arranged between the metal mask item and first frame, and the support bar
Length direction intersect with the length direction of the metal mask item；
The both ends of each support bar are symmetrically arranged at least two pairs of support bar welding regions, each pair of support bar welding section
Domain includes two support bar welding regions for being located at the support bar both ends, a pair that each support bar passes through itself
The support bar welding region is welded on first frame.
12. a kind of restorative procedure of metal mask plate, which is characterized in that the restorative procedure is based on as claim 6-11 is any
Metal mask plate described in realizes that the metal mask item in the metal mask plate includes the first welding region and the second welding
Region, second welding region are described between first welding region and the graphics field of the metal mask item
First welding region is the region of the metal mask item and the first frame welding, and the restorative procedure includes:
Second welding region of the metal mask item is aligned with the second frame, wherein second frame is separably embedding
It is located in first frame；
The metal mask item is welded on second frame by second welding region.
13. restorative procedure according to claim 12, which is characterized in that the restorative procedure further include:
Before the second welding region of the metal mask item is aligned with the second frame, by the metal mask item with it is described
First framework apart.
14. restorative procedure according to claim 13, which is characterized in that by the metal mask item and first frame
Separation, comprising:
Along metal mask item described in cutting wire cutting, so that the metal mask item and first framework apart, the cutting
Line is arranged on the metal mask item and between first welding region and second welding region.
15. the described in any item restorative procedures of 2-14 according to claim 1, which is characterized in that by the of the metal mask article
Two welding regions are aligned with the second frame, comprising:
Second frame is set in first frame so that the second welding region of the metal mask item with it is described
The alignment of second frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810251345.2A CN110359010B (en) | 2018-03-26 | 2018-03-26 | Metal mask strip, metal mask plate and repairing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810251345.2A CN110359010B (en) | 2018-03-26 | 2018-03-26 | Metal mask strip, metal mask plate and repairing method thereof |
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| CN110359010B CN110359010B (en) | 2021-09-03 |
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| CN110359010B (en) | 2021-09-03 |
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