CN110346388A - A kind of automatic sample system up and down - Google Patents

A kind of automatic sample system up and down Download PDF

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Publication number
CN110346388A
CN110346388A CN201910641314.2A CN201910641314A CN110346388A CN 110346388 A CN110346388 A CN 110346388A CN 201910641314 A CN201910641314 A CN 201910641314A CN 110346388 A CN110346388 A CN 110346388A
Authority
CN
China
Prior art keywords
sample
regulating mechanism
automatic
manipulator
sample tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910641314.2A
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Chinese (zh)
Inventor
洪春霞
边风刚
周平
缪夏然
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Applied Physics of CAS
Original Assignee
Shanghai Institute of Applied Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Applied Physics of CAS filed Critical Shanghai Institute of Applied Physics of CAS
Priority to CN201910641314.2A priority Critical patent/CN110346388A/en
Publication of CN110346388A publication Critical patent/CN110346388A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1656Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1669Programme controls characterised by programming, planning systems for manipulators characterised by special application, e.g. multi-arm co-operation, assembly, grasping
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor

Abstract

The present invention provides a kind of automatic sample system up and down, comprising: system base;Manipulator, sampling bench and the five dimension sample stages being independently installed on system base;The five dimensions sample stage includes: X stacked along the vertical direction to regulating mechanism, Z-direction regulating mechanism, grazing angle Pitch regulating mechanism, roll angle Roll regulating mechanism and pivot angle Yaw regulating mechanism;System further include: several sample trays being placed on sampling bench;And sample tray mounting base, it is provided with a vertical perforative through-hole thereon, the through-hole is connect by pipeline with blowing plant;Wherein, manipulator can carry out loading of the sample tray between sampling bench and sample tray mounting base automatically and vary work, made in x-ray bombardment to sample to be tested by the automatic adjustment of five dimension sample stages, automatically complete the detection of multiple samples.According to the present invention, a kind of high degree of automation, raising conventional efficient, reduction equipment damage rate automatic sample system up and down is provided.

Description

A kind of automatic sample system up and down
Technical field
The present invention relates to automatic sampling device fields, relate more specifically to a kind of automatic sample system up and down.
Background technique
Grazing Incidence X-Ray experimental technique is a kind of technology of testing film, and X-ray is incident on sample with very little angle when test Product surface can be used for the information such as density, thickness, roughness, crystallite dimension and the crystal grain orientation of testing film.BL16B1 experiment Glancing incidence of standing, which is tested, currently used to be artificial loading and varies, the mode that sample is tested one at a time, but this side Formula needs frequently disengaging experiment shed, and Preparatory work of experiment work will be about 20 minutes or so, and when experimental period is only several seconds Between, conventional efficient is not high.
Summary of the invention
The object of the present invention is to provide a kind of automatic sample systems up and down, so that it is real to solve Grazing Incidence X-Ray in the prior art Test the low problem of working efficiency caused by needing manually loading and varying.
In order to solve the above-mentioned technical problem, the invention adopts the following technical scheme:
There is provided a kind of automatic sample system up and down, comprising: system base;The machine being independently installed on the system base Tool hand, sampling bench and five dimension sample stages;Wherein, the five dimensions sample stage includes: X stacked along the vertical direction to adjusting machine Structure, Z-direction regulating mechanism, grazing angle Pitch regulating mechanism, roll angle Roll regulating mechanism and pivot angle Yaw regulating mechanism;Institute State automatic sample system up and down further include: several sample trays being placed on sampling bench;And it is installed on the five dimensions sample stage The sample tray mounting base of top is provided with a vertical perforative through-hole in the sample tray mounting base, and the through-hole passes through pipe Road is connect with a blowing plant;Wherein, the sample tray that the manipulator can carry out being equipped with sample to be tested automatically is sampling Loading between platform and sample tray mounting base and work is varied, roentgenogram is made by the automatic adjustment of the five dimensions sample stage It is mapped on sample to be tested, automatically completes the detection of multiple samples.
The rear end of the manipulator is installed on the system base by manipulator mounting seat, before the manipulator End connection two fingers Pneumatic paw.
Preferably, the five dimension sample stage is installed on the system base by five dimension sample stage mounting seats.
Preferably, the X is to regulating mechanism, Z-direction regulating mechanism, grazing angle Pitch regulating mechanism, roll angle Roll tune Section mechanism and pivot angle Yaw regulating mechanism pass through fastener and are sequentially connected setting from bottom to top.
Preferably, the sample tray has a substantially string configuration, the sample tray in the longitudinal direction opposite Both ends have the card slot grabbed for manipulator, and the middle part of the upper surface of the sample tray has the sample for placing sample to be tested Product slot.
Preferably, the sampling bench is equipped with several pallet placing grooves from upper surface to lower recess, when the sample carrier When disk is placed in the pallet placing groove, the edge of the sample cell of the sample tray protrudes from the upper surface institute of the sampling bench Plane.
Preferably, it is offered in the sample tray mounting base consistent recessed with the strip profile of the sample tray Slot, the through-hole are opened on the bottom surface of the groove.
Preferably, the manipulator is five axis joint manipulators.
The five dimensions sample stage passes through electric machine controller and driver control.
The system base is installed on the experiment porch of experiment centre by fastener.
The automatic sample system up and down provided according to the present invention, be it is a kind of can replace the loading for being manually automatically performed sample and The device of function is varied, is mainly used under with the strong experimental conditions of batch samples and repeatability.The desk-top machinery is on hand For lower sample system using manipulator programming, motor driven and compressed air-driven, manipulator has accurate positioning, structure simple, high Reliability, high efficiency, it is easy to maintain the advantages that, manipulator fixture can be replaced, and replace simple.Manipulator control software is adopted The human-machine operation software integrated with synchrotron radiation station, to user friendly.Desk-top machinery plays sample equipment to reduce experiment on hand The working strength of personnel, improves conventional efficient.Desk-top machinery in the present invention plays sample system to can be universally used in synchrotron radiation on hand The automatic sample system up and down of each experiment centre, does technological reserve for Future experiments station laboratory automation.
The automatic sample system up and down provided according to the present invention, manipulator can carry out the sample tray equipped with sample to be tested automatically Loading between sampling bench and sample tray mounting base and work is varied, automatically completes the glancing incidence experiment of multiple samples, 20 minutes that the Preparatory work of experiment working time is needed from the prior art were controlled within 3 minutes, and can disposably be realized multiple The automation glancing incidence of sample is tested, and has been saved a large amount of experimental period, has been substantially increased conventional efficient, is decreased because artificial Operation causes the probability of equipment damage.Automatic sample system up and down provided by the invention not only may be implemented to plunder the X-ray of sample Incidence experiment, it may also be used for typical X-ray scattering experiment is that domestic first realization X-ray glancing incidence experiment and typical X-ray dissipate It penetrates the automatic loading of experiment and varies system.
In short, the present invention provides a kind of high degree of automation, improve conventional efficient, reduce equipment damage rate, It is suitable for the automatic sample system up and down of the experiment of X-ray glancing incidence and typical X-ray scattering experiment simultaneously.
Detailed description of the invention
Fig. 1 is the overall structure diagram of automatic sample system up and down according to a preferred embodiment of the present invention;
Fig. 2 is the structural schematic diagram of the sampling bench and sample tray in automatic sample system up and down as shown in Figure 1.
Specific embodiment
Below in conjunction with specific embodiment, the present invention will be further described.It should be understood that following embodiment is merely to illustrate this The range of invention and is not intended to limit the present invention.
As shown in Figure 1, being the automatic sample system 100 up and down provided according to a preferred embodiment of the present invention, this is automatic Upper and lower sample system 100 includes: system base 1;Manipulator 2, the sampling bench 3 and five being independently installed on system base 1 Tie up sample stage 4;Several sample trays 5 being placed on sampling bench 3;It is installed on the sample tray installation of five dimension sample stages, 4 top Seat 6.
Wherein, system base 1 is installed on the experiment porch of experiment centre by fastener, such as four fixing hoops 11, Anti- locking system shakes.
The rear end of manipulator 2 is installed on system base 1 by manipulator mounting seat 7, and the front end connection of manipulator 2 is double Refer to Pneumatic paw 8, by pine and grabs realization crawl work, rigidity positioning is strong, and standalone module is conveniently replaceable.
According to the preferred embodiment, referring to fig. 2, sample tray 5 has substantially string configuration, and sample tray 5 is in length Opposite end on direction has the card slot 51 grabbed for two fingers Pneumatic paw 8, and the middle part of the upper surface of sample tray 5, which has, to be used In the sample cell 52 for placing sample to be tested.
According to the preferred embodiment, sampling bench 3 is horizontally placed on system base 1, sampling bench 3 be equipped with from upper surface to Several pallet placing grooves 31 of lower recess, for placing sample tray 5, when sample tray 5 is placed in the pallet placing groove 31 When, the edge of the sample cell 52 of sample tray 5 protrudes from the plane where the upper surface of sampling bench 3.
It should be understood, however, that sample tray 5 can also be arranged along the vertical direction, between sample to be tested and sample tray 5 It is fixed using double-sided adhesive.
Five dimension sample stages 4 include: the X that is sequentially stacked from bottom to top along the vertical direction to adjustment structure 41, Z-direction regulating mechanism 42, grazing angle Pitch regulating mechanism 43, roll angle Roll regulating mechanism 44 and pivot angle Yaw regulating mechanism 45.Optionally, It is sequentially connected between each regulating mechanism by fastener, such as screw.
It should be understood, however, that above-mentioned X adjusts machine to adjustment structure 41, Z-direction regulating mechanism 42, grazing angle Pitch Structure 43, roll angle Roll regulating mechanism 44 and pivot angle Yaw regulating mechanism 45 are not limited in such a row in the present embodiment Column mode, can also be stacked with other sequences according to the actual situation.
According to a preferred embodiment of the present invention, five dimension sample stages used in the present invention are electronic using Japan Kohzu Platform, wherein X is XA10A-R102 to the model that adjustment structure 41 uses, and the model that Z-direction regulating mechanism 42 uses is ZA10A- The model that W201, grazing angle Pitch regulating mechanism 43 and roll angle Roll regulating mechanism 44 use jointly is SA10A-RL, packet Containing two spindle motors, the model that pivot angle Yaw regulating mechanism 45 uses is RA07A-W01.
Offered in sample tray mounting base 6 with the consistent groove 61 of the strip profile of sample tray 5, the groove 61 Offer a vertical perforative through-hole 62 on bottom surface, the through-hole by pipeline 63 and blowing plant (not shown go out) even It connects, to realize the fixation of sample tray 5 by way of aspiration.
According to a preferred embodiment of the present invention, due to the insufficient height of five dimension sample stages 4, five dimension sample stages also pass through Five dimension sample stage mounting seats 9 are installed on system base 1, can pass through sample to be tested convenient for X-ray.
According to a preferred embodiment of the present invention, manipulator 2 is five axis joint manipulators, using novel AC, Have the characteristics that compact-sized, response is fast, repetitive positioning accuracy is high and high reliablity.
According to a preferred embodiment of the present invention, five dimension sample stages 4 electric machine controller and drive general using experiment centre Dynamic device control has the characteristics that network communication, adjustment are simple, programming is quick, reliable and stable.
In the present embodiment, the program of the EPICS software programming manipulator based on (SuSE) Linux OS.EPICS, which is used, to be divided Cloth structure, by writing server, in a network by collaborative share, and client only needs to share server end PV (process variable) access, the distributed AC servo system to equipment can be realized.
Driving under the EPICS of manipulator can control crawl path, conditional access and fault alarm of manipulator etc..
Such a automatic sample system 100 up and down provided according to the present invention is mainly by mechanical arm assembly, sampling bench, five A kind of automated system for tieing up sample stage and pallet mounting base composition, for carrying out Grazing Incidence X-Ray scattering to multiple samples Loading before experiment test considers ease for use and mobility with work, whole system is varied, and overall weight is no more than 20kg.
The automatic sample system 100 up and down that above preferred embodiment according to the present invention provides, application method is described as follows:
Before test starts, whole system pedestal 1 is installed on experiment centre by four fixing hoops 11 and tested by operator It is integrated with it on platform, manipulator 2 grabs a placement sample to be tested by two fingers Pneumatic paw 8 from sampling bench 3 Sample tray 5, then sample tray 5 is placed in sample tray mounting base 6, at this time the compressed air in opening conduits 63 Sample tray 5 is tightly sucked in valve, compressed air, and manipulator 2 retreats to beside.
It tests shed and leads to X-ray, call glancing incidence experiment to cut the realization of light path sequence automatically and focus and cut light automatically, then change not Same grazing angle ensures that X-ray can pass through sample to be tested, wherein X is to adjustment structure 41 for adjusting X to displacement, Z-direction tune Section mechanism 42 is used to adjust the grazing angle of sample to be tested for adjusting Z-direction displacement, grazing angle Pitch regulating mechanism 43 Pitch, roll angle Roll regulating mechanism 44 is used to adjust the roll angle Roll of sample to be tested, and pivot angle Yaw regulating mechanism 45 is used for Adjust the pivot angle Yaw of sample to be tested.X-ray is irradiated on the sample to be tested with certain grazing angle by X-ray emission end, Glancing incidence scattered signal enters the big vacuum pipe of experiment centre by X-ray receiving end, finally by the detector of experiment centre end It receives, obtains the glancing incidence signal data of specific sample.
Manipulator 2 obtains enabling signal, and the sample and sample tray 5 that will test completion automatically are put back on sampling bench 3, machine Tool hand 2 returns to home position, waits sense command next time.
The automatic sample system 100 up and down provided according to the present invention, manipulator can carry out the sample equipped with sample to be tested automatically Loading of the pallet between sampling bench and sample tray mounting base and work is varied, the glancing incidence for automatically completing multiple samples is real It tests, 20 minutes that the Preparatory work of experiment working time is needed from the prior art were controlled within 3 minutes, and can disposably be realized more The automation experiment of a sample has saved a large amount of experimental period, has substantially increased conventional efficient, decreased because of manual operation Cause the probability of equipment damage.
Above-described, only presently preferred embodiments of the present invention, the range being not intended to limit the invention, of the invention is upper Stating embodiment can also make a variety of changes.Letter made by all claims applied according to the present invention and description Single, equivalent changes and modifications, fall within the claims of the invention patent.The not detailed description of the present invention is normal Advise technology contents.

Claims (10)

1. a kind of automatic sample system up and down characterized by comprising system base;Independently it is installed on the system base On manipulator, sampling bench and five dimension sample stages;Wherein, the five dimensions sample stage includes: X stacked along the vertical direction to tune It saves mechanism, Z-direction regulating mechanism, grazing angle Pitch regulating mechanism, roll angle Roll regulating mechanism and pivot angle Yaw and adjusts machine Structure;The automatic sample system up and down further include:
Several sample trays being placed on sampling bench;And
The sample tray mounting base being installed on above the five dimensions sample stage, is provided with one in the sample tray mounting base and passes through vertically The through-hole worn, the through-hole are connect by pipeline with a blowing plant;
Wherein, the manipulator can carry out automatically the sample tray equipped with sample to be tested sampling bench and sample tray mounting base it Between loading and vary work, by it is described five dimension sample stage automatic adjustment make in x-ray bombardment to sample to be tested, automate Complete the detection of multiple samples.
2. automatic sample system up and down according to claim 1, which is characterized in that the rear end of the manipulator passes through manipulator Mounting seat is installed on the system base, and the front end of the manipulator connects two fingers Pneumatic paw.
3. automatic sample system up and down according to claim 1, which is characterized in that the five dimension sample stage passes through five dimension samples Platform mounting seat is installed on the system base.
4. automatic sample system up and down according to claim 1, which is characterized in that the X adjusts machine to regulating mechanism, Z-direction Structure, grazing angle Pitch regulating mechanism, roll angle Roll regulating mechanism and pivot angle Yaw regulating mechanism are by fastener under Setting is sequentially connected on and.
5. automatic sample system up and down according to claim 1, which is characterized in that the sample tray has substantially strip Structure, the sample tray have the card slot that grabs for manipulator in the opposite end of length direction, the sample tray it is upper The middle part on surface has the sample cell for placing sample to be tested.
6. automatic sample system up and down according to claim 5, which is characterized in that the sampling bench be equipped with from upper surface to Several pallet placing grooves of lower recess, when the sample tray is placed in the pallet placing groove, the sample of the sample tray The edge of product slot protrudes from the plane where the upper surface of the sampling bench.
7. automatic sample system up and down according to claim 6, which is characterized in that offered in the sample tray mounting base With the consistent groove of strip profile of the sample tray, the through-hole is opened on the bottom surface of the groove.
8. automatic sample system up and down according to claim 1, which is characterized in that the manipulator is five axis joints machinery Hand.
9. automatic sample system up and down according to claim 1, which is characterized in that the five dimensions sample stage passes through motor control Device and driver control.
10. automatic sample system up and down according to claim 1, which is characterized in that the system base is pacified by fastener On experiment porch loaded on experiment centre.
CN201910641314.2A 2019-07-16 2019-07-16 A kind of automatic sample system up and down Pending CN110346388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910641314.2A CN110346388A (en) 2019-07-16 2019-07-16 A kind of automatic sample system up and down

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CN201910641314.2A CN110346388A (en) 2019-07-16 2019-07-16 A kind of automatic sample system up and down

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CN110346388A true CN110346388A (en) 2019-10-18

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658350U (en) * 1993-01-27 1994-08-12 住友金属工業株式会社 Sample container for X-ray fluorescence analysis
CN102636508A (en) * 2012-03-20 2012-08-15 中国科学院上海应用物理研究所 Sample platform used for grazing incidence XAFS method
CN105059920A (en) * 2015-06-29 2015-11-18 湖南三德科技股份有限公司 Air-suction type sample storing and taking device
DE202017103451U1 (en) * 2017-06-08 2017-07-06 Chenglibochuang Technology Chengdu Co.,Ltd. Automation structure for online sampling, sample feeding and purification of the upside-down cup
CN206832712U (en) * 2017-06-12 2018-01-02 苏州三值精密仪器有限公司 Applied to the intelligent sampling system in Xray fluorescence spectrometer
CN107884807A (en) * 2017-11-22 2018-04-06 同方威视技术股份有限公司 Automatic sample-changing equipment based on gamma spectrometer
CN108594494A (en) * 2018-06-14 2018-09-28 广东速美达自动化股份有限公司 One kind detecting assembly line automatically without FPC liquid crystal displays
CN109827976A (en) * 2019-03-14 2019-05-31 中国科学院上海应用物理研究所 A kind of optical system of online observation and adjusting X-ray beam and sample
CN210487650U (en) * 2019-07-16 2020-05-08 中国科学院上海应用物理研究所 Automatic sample loading and unloading system

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658350U (en) * 1993-01-27 1994-08-12 住友金属工業株式会社 Sample container for X-ray fluorescence analysis
CN102636508A (en) * 2012-03-20 2012-08-15 中国科学院上海应用物理研究所 Sample platform used for grazing incidence XAFS method
CN105059920A (en) * 2015-06-29 2015-11-18 湖南三德科技股份有限公司 Air-suction type sample storing and taking device
DE202017103451U1 (en) * 2017-06-08 2017-07-06 Chenglibochuang Technology Chengdu Co.,Ltd. Automation structure for online sampling, sample feeding and purification of the upside-down cup
CN206832712U (en) * 2017-06-12 2018-01-02 苏州三值精密仪器有限公司 Applied to the intelligent sampling system in Xray fluorescence spectrometer
CN107884807A (en) * 2017-11-22 2018-04-06 同方威视技术股份有限公司 Automatic sample-changing equipment based on gamma spectrometer
CN108594494A (en) * 2018-06-14 2018-09-28 广东速美达自动化股份有限公司 One kind detecting assembly line automatically without FPC liquid crystal displays
CN109827976A (en) * 2019-03-14 2019-05-31 中国科学院上海应用物理研究所 A kind of optical system of online observation and adjusting X-ray beam and sample
CN210487650U (en) * 2019-07-16 2020-05-08 中国科学院上海应用物理研究所 Automatic sample loading and unloading system

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